A device for forming a silicon carbide coating on the surface of a graphite product

Abstract

The invention discloses a device for forming a silicon carbide coating on the surface of a graphite product, which relates to the technical field of material surface treatment. The device comprises a base and an outer furnace body placed on the base, wherein a gas pipe is fixedly installed on the top of the outer furnace body, and further comprises an air guide mechanism, wherein the air guide mechanism comprises a connecting box fixedly connected to the gas pipe, an air inlet pipe is arranged on the top of the connecting box, and a transmission component comprises an impeller rotatably connected to the inside of the connecting box, and a lower rotating shaft with a connecting hole is rotatably connected to the base, and the airflow is transported by moving a push plate, and the kinetic energy of the airflow is increased, so that the reaction gas can more easily pass through the inside of the holes of the graphite product during the flow process, thereby enabling the silicon carbide coating to be fully formed on the inner wall of the hole on the graphite product, thereby solving the problem that it is difficult for the existing device to form the silicon carbide coating on the inner wall of the hole of the graphite product, and making the thickness of the silicon carbide coating at various positions on the graphite product tend to be consistent.

Description

Technical Field

[0001] The invention relates to the technical field of material surface treatment, and in particular to a device for forming a silicon carbide coating on the surface of a graphite product. Background Art

[0002] With the continuous development of science and technology, graphite products have been widely used in many fields, such as metallurgy, chemical industry, electronics, etc. However, graphite products have some shortcomings in certain specific environments, such as poor oxidation resistance and insufficient wear resistance. In order to improve the performance and service life of graphite products, forming a silicon carbide coating on its surface has become an effective solution.

[0003] A vertical deposition furnace is a device that uses chemical vapor deposition to prepare coatings. It is generally composed of a furnace body, a base, and a frame inside the furnace body for placing workpieces. The furnace body and the base are detachably connected, and the placement and removal of workpieces are achieved by separating the furnace body and the base. When in use, the workpiece is placed on the frame, and then the reaction gas containing silicon and carbon is introduced into the furnace body. Under certain temperature and pressure conditions, the gas undergoes a chemical reaction and is deposited on the surface of the graphite product to form a silicon carbide coating.

[0004] When a traditional vertical deposition furnace is used to prepare a silicon carbide coating on a graphite product with through holes, the holes on the graphite product are narrow and the reaction gas encounters greater resistance when passing through the holes than when flowing around the graphite product. Therefore, it is difficult for the reaction gas to enter the holes, resulting in the silicon carbide coating thickness formed on the inner wall of the hole of the graphite product being significantly smaller than the silicon carbide coating thickness on the outer surface of the graphite product, making the silicon carbide coating thickness on the graphite product uneven, thereby reducing the coating preparation effect of the workpiece. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that when a traditional vertical deposition furnace is used to prepare a silicon carbide coating on a graphite product with through holes, due to the narrow holes on the graphite product, the reaction gas will encounter greater resistance when passing through the holes than flowing around the graphite product. Therefore, it is difficult for the reaction gas to enter the holes, resulting in the thickness of the silicon carbide coating formed on the inner wall of the hole of the graphite product being significantly smaller than the thickness of the silicon carbide coating on the outer surface of the graphite product. A device for forming a silicon carbide coating on the surface of a graphite product is proposed.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technology: a device for forming a silicon carbide coating on the surface of a graphite product, comprising a base and an outer furnace body placed on the base, a gas delivery pipe is fixedly installed on the top of the outer furnace body, and further comprising:

[0007] An air guide mechanism, the air guide mechanism comprising a connecting box fixedly connected to the air delivery pipe, and an air inlet pipe is arranged on the top of the connecting box;

[0008] A transmission assembly, the transmission assembly includes an impeller rotatably connected to the inside of the connecting box, an upper rotating shaft is fixedly installed at the bottom of the impeller, a lower rotating shaft with a connecting hole is rotatably connected to the base, the lower rotating shaft and the upper rotating shaft are respectively provided with connected air outlet channels, a strip groove is provided on the lower rotating shaft, a cam member is sleeved on the lower rotating shaft, and a latch embedded in the strip groove is slidably connected to the inside of the cam member;

[0009] A flow control mechanism, the flow control mechanism comprises a placement plate sleeved on the lower rotating shaft, a cavity is provided inside the placement plate, an air outlet is provided at the bottom of the cavity, a push plate is slidably connected inside the cavity, a spring c is provided between the push plate and the inner wall of the cavity, a lower orifice plate is fixedly connected to the bottom of the placement plate, a ball is rotatably installed in the hole inside the lower orifice plate, and the inner width of the lower orifice plate is greater than the radius of the ball and smaller than the diameter of the ball;

[0010] After the lower orifice plate is placed above the graphite product, the ball is pushed into the interior of the lower orifice plate by the graphite product, and a gap is generated between the ball and the hole of the lower orifice plate. The push plate slides back and forth to suck the reaction gas into the cavity and then blows the reaction gas out from the gas outlet. The reaction gas is blown into the hole of the graphite product through the gap between the ball and the hole of the lower orifice plate.

[0011] As a further description of the above technology, a device for forming a silicon carbide coating on the surface of a graphite product is as follows: the top of the placement plate is slidably connected to an upper orifice plate, the bottom of the upper orifice plate is fixedly connected to a support plate, the support plate passes through and extends to the interior of the cavity, and the top of the push plate is inclined.

[0012] As a further description of the above technology, a device for forming a silicon carbide coating on the surface of a graphite product is as follows: the cam member is rotatably connected to the inside of a placement plate, a push rod passing through a spring c is fixedly connected to one side of the push plate close to the cam member, and a roller is rotatably connected to one end of the push rod close to the cam member.

[0013] As a further description of the above technology, a device for forming a silicon carbide coating on the surface of a graphite product is as follows: a gasket is rotatably connected to the bottom surface of the placement plate, and blades equidistantly arranged in a circumferential manner are fixedly connected to the edge of the gasket, and the blades are located directly below the air outlet.

[0014] As a further description of the above-mentioned technology, an equipment for forming a silicon carbide coating on the surface of a graphite product is as follows: an inner partition is fixedly connected to the inside of the outer furnace body, a gas delivery cavity is formed between the inner partition and the inner wall of the outer furnace body, the gas delivery pipe passes through the outer furnace body and is connected to the gas delivery cavity, a plurality of groups of air inlet holes are opened on the inner partition, a shell is fixedly assembled in a group of air inlet holes between adjacent placement plates, and closing plugs are installed in the other air inlet holes, a blocking plate is slidably connected to the inside of the shell, and a spring a is arranged between the blocking plate and the inner wall of the shell.

[0015] As a further description of the above technology, a device for forming a silicon carbide coating on the surface of a graphite product is as follows: a connecting piece rotatably connected to the upper rotating shaft is fixedly connected to the top of the outer furnace body, and the air outlet channel inside the upper rotating shaft is connected to the connecting piece.

[0016] As a further description of the above technology, a device for forming a silicon carbide coating on the surface of a graphite product is provided: an insert is fixedly connected to the top of the lower rotating shaft, and the insert is embedded in the bottom of the upper rotating shaft.

[0017] As a further description of the above-mentioned technology, a device for forming a silicon carbide coating on the surface of a graphite product is as follows: a spring b is installed between the latch and the inner wall of the cam member, and the side of the latch close to the lower rotating shaft is tapered.

[0018] In summary, due to the use of the above-mentioned technology, the device for forming a silicon carbide coating on the surface of a graphite product has the following beneficial effects:

[0019] The airflow is transported by the movement of the push plate, and the kinetic energy of the airflow is increased, so that the reaction gas can pass through the inside of the holes of the graphite product more easily during the flow, so that the silicon carbide coating can be fully formed on the inner wall of the hole on the graphite product, which solves the problem that the existing device is difficult to form a silicon carbide coating on the inner wall of the hole of the graphite product, so that the thickness of the silicon carbide coating at various positions on the graphite product tends to be consistent, thereby improving the preparation effect of the coating. In addition, only the ball in contact with the graphite product will be lifted up, thereby forming a gap between the hole and the lower hole plate, so the reaction gas will only be ejected from the hole located above the graphite product. This design can control the ejection position of the reaction gas according to the placement position of the graphite product, so as to strengthen the coating inside the hole of each graphite product, avoid unnecessary airflow transportation, and improve the use effect. In addition, the reaction gas is ejected from the top of the graphite product, so that the top surface of the graphite product is more evenly contacted with the reaction gas, thereby improving the uniformity of the silicon carbide coating on the top surface of the graphite product;

[0020] The movement of the push plate continuously inhales and ejects the reaction gas, so that the reaction gas around the graphite product is always in a disturbed state, thereby improving the uniformity of the reaction gas distribution and the uniformity of the silicon carbide coating on the graphite product;

[0021] During the process of conveying the reaction gas, the upper orifice plate moves upward, so that a gap is formed between the holes of the upper orifice plate and the balls inside it, reducing the shielding of the bottom of the graphite product by the upper orifice plate, making it easier for the reaction gas to enter the holes on the graphite product from the top or bottom, further improving the formation effect of the silicon carbide coating on the inner wall of the hole, and making the bottom surface of the graphite product contact with the reaction gas more uniformly, thereby improving the uniformity of the silicon carbide coating on the bottom surface of the graphite product;

[0022] The device uses balls to suspend graphite products, greatly reducing the contact area between graphite products and external equipment, thereby reducing the dead angle when the graphite products are coated, making it easier for the silicon carbide coating to fully cover the surface of the graphite products, improving the coating effect, and the reaction gas pushes the blades to rotate the gasket during the flow process, so that the balls roll, driving the graphite products to move, and switching the positions between the balls and the graphite products, avoiding the failure to form silicon carbide coatings at the contact position between the graphite products and the balls, and ensuring that the surface of the graphite products is completely covered by the silicon carbide coatings;

[0023] The placement plate is sleeved on the lower rotating shaft, which is easy to install and easy to adapt to the height of the graphite product, so that the internal space of the outer furnace body can be fully utilized, thereby improving the coating processing efficiency of the device for graphite products, and multiple placement plates separate the internal space of the inner partition, so that the graphite products in each independent space do not affect each other, thereby improving the consistency of the processing quality of each graphite product;

[0024] Through the outer shell, the blocking plate and the spring a, the gas pressure in the gas delivery cavity can enter the interior of the inner partition only after reaching the target size. This design can prevent the graphite products close to the gas outlet end of the gas delivery pipe from contacting the reaction gas first, resulting in different silicon carbide coating effects on graphite products at different positions, thereby ensuring that the coating effects of all graphite products are uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It shows a schematic diagram of the overall structure provided by an embodiment of the present invention;

[0026] Figure 2 A schematic diagram of an internal structure provided according to an embodiment of the present invention is shown;

[0027] Figure 3 The embodiment of the present invention provides Figure 2 The enlarged schematic diagram at A in the middle;

[0028] Figure 4 A schematic cross-sectional view of a housing provided according to an embodiment of the present invention is shown;

[0029] Figure 5An exploded schematic diagram of a flow control mechanism provided according to an embodiment of the present invention is shown;

[0030] Figure 6 A sectional perspective view of a placement plate provided according to an embodiment of the present invention is shown;

[0031] Figure 7 A cross-sectional plan view of a placement plate provided according to an embodiment of the present invention is shown;

[0032] Figure 8 A schematic diagram of the structure of a cam member according to an embodiment of the present invention is shown;

[0033] Fig. 9 The embodiment of the present invention provides Figure 8 The enlarged schematic diagram of point B in the middle;

[0034] Fig.10 A schematic diagram of a latch structure provided according to an embodiment of the present invention is shown.

[0035] Legend:

[0036] 10. Base; 11. External furnace body; 12. Gas pipe;

[0037] 20. air guide mechanism; 21. connecting box; 22. inner partition; 23. air delivery cavity; 24. outer shell; 25. blocking plate; 26. spring a; 27. closing plug; 28. adapter; 29. ​​air outlet channel;

[0038] 30. Transmission assembly; 31. Impeller; 32. Upper rotating shaft; 33. Lower rotating shaft; 34. Insert; 35. Strip groove; 36. Cam member; 37. Spring b; 38. Latch;

[0039] 40. Flow control mechanism; 41. Placement plate; 42. Upper orifice plate; 43. Support plate; 44. Lower orifice plate; 45. Ball; 46. Push rod; 47. Roller; 48. Push plate; 49. Spring c; 410. Cavity; 411. Air outlet; 412. Gasket; 413. Blade. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technology in the embodiments of the present invention, a device for forming a silicon carbide coating on the surface of a graphite product. Obviously, the described embodiment is only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] like Figure 1-Figure 10As shown, the present invention provides: an apparatus for forming a silicon carbide coating on the surface of a graphite product: comprising a base 10 and an outer furnace body 11 placed on the base 10, a gas delivery pipe 12 is fixedly installed on the top of the outer furnace body 11, and also comprising:

[0042] The air guide mechanism 20 includes a connecting box 21 fixedly connected to the air delivery pipe 12, and an air inlet pipe is arranged on the top of the connecting box 21;

[0043] The transmission assembly 30 includes an impeller 31 rotatably connected to the inside of the connecting box 21. After the reaction gas enters the inside of the connecting box 21 through the air inlet pipe, it will push the impeller 31 to rotate. An upper rotating shaft 32 is fixedly installed at the bottom of the impeller 31. A lower rotating shaft 33 with a connecting hole is rotatably connected to the base 10. The lower rotating shaft 33 and the upper rotating shaft 32 are respectively provided with interconnected gas outlet channels 29. A strip groove 35 is provided on the lower rotating shaft 33. A cam member 36 is sleeved on the lower rotating shaft 33. A latch 38 embedded in the strip groove 35 is slidably connected to the inside of the cam member 36. When the lower rotating shaft 33 rotates, it can drive the latch 38 embedded in the strip groove 35 to rotate, thereby driving the cam member 36 to rotate.

[0044] The flow control mechanism 40 includes a placement plate 41 sleeved on the lower rotating shaft 33, a cavity 410 is provided inside the placement plate 41, an air outlet 411 is provided at the bottom of the cavity 410, a push plate 48 is slidably connected inside the cavity 410, and the push plate 48 moves inside the cavity 410 to increase or decrease the internal air pressure of the cavity 410, so that the external reaction gas enters the cavity 410 and is output from the cavity 410, and a spring is provided between the push plate 48 and the inner wall of the cavity 410. Spring c49, the bottom of the placement plate 41 is fixedly connected with a lower orifice plate 44, and a ball 45 is rollingly installed in the hole inside the lower orifice plate 44. The inner width of the lower orifice plate 44 is greater than the radius of the ball 45 and smaller than the diameter of the ball 45. The purpose is to make the ball 45 still partially located in the hole of the lower orifice plate 44 after being lifted by the graphite product, so that each hole of the lower orifice plate 44 always corresponds to each ball 45 one by one, so as to prevent the ball 45 from rolling randomly inside the lower orifice plate 44;

[0045] After the lower orifice plate 44 is placed above the graphite product, the ball 45 is pushed into the interior of the lower orifice plate 44 by the graphite product, and a gap is generated between the ball 45 and the hole of the lower orifice plate 44. The push plate 48 slides back and forth to suck the reaction gas into the cavity 410 and then blows the reaction gas out from the gas outlet 411. The reaction gas is blown into the holes of the graphite product through the gap between the ball 45 and the hole of the lower orifice plate 44.

[0046] Reference Figure 5-Figure 7The top of the placement plate 41 is slidably connected to the upper orifice plate 42, and the bottom of the upper orifice plate 42 is fixedly connected to the support plate 43, which penetrates and extends to the interior of the cavity 410. The top of the push plate 48 is inclined. During the movement, the push plate 48 pushes the support plate 43 to drive the upper orifice plate 42 to move upward, so that the holes of the upper orifice plate 42 are separated from the balls 45 in the holes and gaps are generated, thereby reducing the shielding of the upper orifice plate 42 on the bottom of the graphite product above it, making it easier for the reaction gas to pass through the holes on the graphite product. There are other balls 45 rollingly installed in the holes of the upper orifice plate 42.

[0047] Reference Figure 8 The cam member 36 is rotatably connected to the inside of the placement plate 41, and a push rod 46 passing through a spring c49 is fixedly connected to one side of the push plate 48 close to the cam member 36. The push rod 46 is rotatably connected to the roller 47 at one end close to the cam member 36. During the rotation process, the cam member 36 pushes the roller 47, the push rod 46 and the push plate 48 through the external protrusion. At this time, the spring c49 is stretched. After the protrusion of the cam member 36 intersects with the roller 47, the contraction elastic force of the spring c49 pulls the push plate 48 back, thereby realizing the reciprocating motion of the push plate 48. The rotation of the cam member 36 can drive the roller 47 to roll on its outside, thereby reducing the friction between the cam member 36 and the push rod 46 when the cam member 36 rotates.

[0048] Reference Figure 7 and Fig. 9 The bottom surface of the placement plate 41 is rotatably connected to a gasket 412, and the edge of the gasket 412 is fixedly connected to blades 413 that are equidistantly arranged in a circumferential manner. The blades 413 are located directly below the air outlet 411 and are tilted. When the airflow flows out of the air outlet 411, it pushes the blades 413, thereby causing the gasket 412 to rotate, driving the ball 45 that is lifted up by the graphite product and in contact with the gasket 412 to roll, thereby realizing the position switching between the ball 45 and the graphite product, so that the silicon carbide fully covers all parts of the surface of the graphite product.

[0049] Reference Figure 2 and Figure 4The inner partition 22 is fixedly connected to the inner part of the outer furnace body 11, and the placement plate 41 is slidably connected to the inner part of the inner partition 22. A gas delivery cavity 23 is formed between the inner partition 22 and the inner wall of the outer furnace body 11. The gas delivery pipe 12 passes through the outer furnace body 11 and is connected to the gas delivery cavity 23. A plurality of groups of gas inlet holes are opened on the inner partition 22. A shell 24 is fixedly installed in a group of gas inlet holes between adjacent placement plates 41, and a sealing plug 27 is installed in the other gas inlet holes. Through the plurality of groups of gas inlet holes, the gas inlet position of the inner partition 22 can be conveniently controlled according to the height and position of the graphite product, so that the reaction gas can enter each independent gas inlet hole separated by the placement plate 41. In the space, improving the uniformity of the reaction gas distribution is beneficial to improving the uniformity of the coating. The inner part of the outer shell 24 is slidably connected with a baffle plate 25, and a spring a26 is arranged between the baffle plate 25 and the inner wall of the outer shell 24. As the air pressure inside the gas delivery cavity 23 increases, the air pressure will push the baffle plate 25, so that a gap is generated between the baffle plate 25 and the outer shell 24. At this time, the reaction gas inside the gas delivery cavity 23 can enter the inner part of the inner partition 22 through the gap. This design can prevent the graphite products near the gas outlet end of the gas delivery pipe 12 from contacting the reaction gas first, resulting in different silicon carbide coating effects on graphite products at different positions.

[0050] Reference Figure 3 The top of the outer furnace body 11 is fixedly connected with an adapter 28 rotatably connected to the upper rotating shaft 32. The gas outlet channel 29 inside the upper rotating shaft 32 is connected to the adapter 28. After use, the reaction gas entering the inner partition 22 enters the gas outlet channel 29 through the holes on the lower rotating shaft 33, and finally enters the adapter 28 through the gas outlet channel 29 inside the upper rotating shaft 32 to complete the discharge, thereby realizing the circulation of the reaction gas.

[0051] The top of the lower rotating shaft 33 is fixedly connected with an insert 34, and the insert 34 is embedded in the bottom of the upper rotating shaft 32. The rotation of the upper rotating shaft 32 drives the insert 34 to rotate, thereby driving the lower rotating shaft 33 to rotate. This design facilitates the separation and assembly between the outer furnace body 11 and the base 10. After the outer furnace body 11 is lifted, the lower rotating shaft 33 is separated from the upper rotating shaft 32. At this time, the placement plate 41 on the lower rotating shaft 33 and the graphite product on the placement plate 41 can be removed, which is convenient for loading and unloading of graphite products.

[0052] Reference Fig.10 A spring b37 is installed between the inner wall of the latch 38 and the cam member 36. The side of the latch 38 close to the lower shaft 33 is tapered. The purpose is to simplify the installation steps of the placement plate 41 without aligning the latch 38 with the strip groove 35 when the placement plate 41 is sleeved on the lower shaft 33. When the placement plate 41 is installed, it is directly sleeved on the lower shaft 33. At this time, the inclined surface of the latch 38 is compressed and contracted to the inside of the cam member 36, and then the cam member 36 is rotated until the latch 38 is aligned with the strip groove 35, and the spring b37 pops the latch 38 into the strip groove 35.

[0053] Working principle: In the initial state, the outer furnace body 11 and the base 10 are in a separated state, and the placement plate 41 is not sleeved on the lower rotating shaft 33;

[0054] The first placement plate 41 is sleeved on the lower rotating shaft 33 and made to slide to the bottom of the lower rotating shaft 33, and then the graphite product workpiece is evenly placed on the ball 45 on the top of the placement plate 41, and then the second placement plate 41 is sleeved on the lower rotating shaft 33, and the placement plate 41 is placed on the previously placed graphite product, and so on to achieve the alternate placement of the placement plate 41 and the graphite product. When the placement plate 41 is placed on the top of the graphite product, the ball 45 located in the lower hole plate 44 is lifted up by the graphite product and contacts with the bottom of the gasket 412. At this time, the hole of the lower hole plate 44 is in contact with the ball There is a gap between the upper and lower holes 45. After the graphite paper is placed on the placement plate 41, it contacts the ball 45 in the upper hole plate 42. The ball 45 does not move up and down under the support of the placement plate 41. It is worth mentioning that when the latch 38 is not aligned with the strip groove 35, when the placement plate 41 is sleeved on the lower shaft 33, the inclined surface of the latch 38 is squeezed by the lower shaft 33 and shrinks to the inside of the cam member 36, the spring b37 is compressed, and then the cam member 36 is rotated until the latch 38 is aligned with the strip groove 35. At this time, the spring b37 automatically pops the latch 38 into the strip groove 35.

[0055] After the outer furnace body 11 and the base 10 are assembled, the outer furnace body 11 accommodates the graphite product and the placement plate 41 into the inner partition 22, and then the reaction gas is input from the air inlet pipe of the connecting box 21, and the reaction gas enters the gas delivery cavity 23 after passing through the connecting box 21 and the gas delivery pipe 12. After entering the connecting box 21, the reaction gas will drive the impeller 31 to rotate. With the delivery of the reaction gas, the inside of the gas delivery cavity 23 is filled with the reaction gas, and the gas pressure inside the gas delivery cavity 23 gradually increases. After the gas pressure pushes the blocking plate 25 to generate a gap between it and the outer shell 24, the reaction gas passes through the gap and enters the space between each placement plate 41 in the inner partition 22, and the graphite product is processed with silicon carbide coating;

[0056] The impeller 31 rotates to drive the upper shaft 32, the insert 34 and the lower shaft 33 to rotate. The lower shaft 33 rotates to drive the latch 38 and the cam member 36 to rotate. The cam member 36 pushes the roller 47, the push rod 46 and the push plate 48 through the external protrusion during the rotation process. At this time, the spring c49 is stretched. After the protrusion of the cam member 36 intersects with the roller 47, the contraction elastic force of the spring c49 pulls the push plate 48 back. Therefore, the push plate 48 reciprocates in the cavity 410, and the cavity 410 passes through the outlet 4 11. The gap between the hole of the lower orifice plate 44 and the ball 45 is connected to the outside, so the reciprocating movement of the push plate 48 will suck the reaction gas into the cavity 410 through the hole of the lower orifice plate 44 and the gas outlet 411, and then discharge the gas sucked into the cavity 410 through the gas outlet 411 and the hole of the lower orifice plate 44. The movement of the push plate 48 can strengthen the flow of the reaction gas, making it easier for the reaction gas to enter the holes on the graphite product during the transportation process, and form a silicon carbide coating on the inner wall of the hole;

[0057] When the push plate 48 moves, the support plate 43 and the upper orifice plate 42 are pushed upward by the inclined surface. At this time, a gap is also formed between the holes of the upper orifice plate 42 and the balls 45 inside it, which is convenient for airflow to pass through, thereby reducing the obstruction of airflow from the holes of the graphite product, making it easier for the reaction gas to enter the holes from the top of the holes of the graphite product;

[0058] When the airflow passes through the air outlet 411, the blade 413 is pushed to drive the gasket 412 to rotate. The rotation of the gasket 412 drives the ball 45 in contact with it to roll, thereby driving the graphite product that lifts the ball 45 to move, thereby switching the positions of the ball 45 and the graphite product. Since the airflow through the air outlet 411 is constantly reciprocating, the graphite product automatically resets after moving, avoiding the situation where the moving position is uncontrollable due to always moving in one direction.

[0059] The above description is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field within the technical scope disclosed by the present invention, according to the technology of the present invention, a device for forming a silicon carbide coating on the surface of a graphite product and its inventive concept, can be equivalently replaced or changed, which should be covered by the protection scope of the present invention.

Claims

1. A device for forming a silicon carbide coating on the surface of a graphite product, comprising a base (10) and an outer furnace body (11) placed on the base (10), wherein a gas delivery pipe (12) is fixedly installed on the top of the outer furnace body (11), characterized in that: Also includes: An air guide mechanism (20), the air guide mechanism (20) comprising a communication box (21) fixedly connected to the air delivery pipe (12), an air inlet pipe being arranged on the top of the communication box (21); A transmission assembly (30), the transmission assembly (30) comprising an impeller (31) rotatably connected to the interior of the connecting box (21), an upper rotating shaft (32) being fixedly mounted on the bottom of the impeller (31), a lower rotating shaft (33) having a connecting hole being rotatably connected to the base (10), the interiors of the lower rotating shaft (33) and the upper rotating shaft (32) being respectively provided with interconnected air outlet passages (29), a strip groove (35) being formed on the lower rotating shaft (33), a cam member (36) being sleeved on the lower rotating shaft (33), and a latch (38) embedded in the strip groove (35) being slidably connected to the interior of the cam member (36); A flow control mechanism (40), the flow control mechanism (40) comprising a placement plate (41) sleeved on a lower rotating shaft (33), a cavity (410) being provided inside the placement plate (41), an air outlet (411) being provided at the bottom of the cavity (410), a push plate (48) being slidably connected inside the cavity (410), a spring c (49) being provided between the push plate (48) and the inner wall of the cavity (410), a lower orifice plate (44) being fixedly connected to the bottom of the placement plate (41), a ball (45) being rollingly installed in a hole inside the lower orifice plate (44), and an inner width of the lower orifice plate (44) being greater than a radius of the ball (45) and less than a diameter of the ball (45); The cam member (36) is rotatably connected to the inside of the placement plate (41); a push rod (46) passing through a spring c (49) is fixedly connected to one side of the push plate (48) close to the cam member (36); and a roller (47) is rotatably connected to one end of the push rod (46) close to the cam member (36); The top of the placement plate (41) is slidably connected to an upper orifice plate (42), the bottom of the upper orifice plate (42) is fixedly connected to a support plate (43), the support plate (43) penetrates and extends into the interior of the cavity (410), and the top of the push plate (48) is inclined; After the lower orifice plate (44) is placed above the graphite product, the ball (45) is pushed into the interior of the lower orifice plate (44) by the graphite product, and a gap is generated between the ball (45) and the hole of the lower orifice plate (44). The push plate (48) slides back and forth to suck the reaction gas into the cavity (410) and then blows the reaction gas out from the gas outlet (411). The reaction gas passes through the gap between the ball (45) and the hole of the lower orifice plate (44) and is blown into the hole of the graphite product.

2. The device for forming a silicon carbide coating on the surface of a graphite product according to claim 1, characterized in that: The bottom surface of the placement plate (41) is rotatably connected to a gasket (412), and the edge of the gasket (412) is fixedly connected to blades (413) arranged equidistantly around the circumference, and the blades (413) are located directly below the air outlet (411).

3. The device for forming a silicon carbide coating on the surface of a graphite product according to claim 1, characterized in that: An inner partition (22) is fixedly connected to the interior of the outer furnace body (11), and a gas delivery cavity (23) is formed between the inner partition (22) and the inner wall of the outer furnace body (11). The gas delivery pipe (12) passes through the outer furnace body (11) and is in communication with the gas delivery cavity (23). A plurality of groups of gas inlet holes are provided on the inner partition (22), a group of gas inlet holes between adjacent placement plates (41) is fixedly equipped with an outer shell (24), and closing plugs (27) are installed in the remaining gas inlet holes. A blocking plate (25) is slidably connected to the interior of the outer shell (24), and a spring a (26) is provided between the blocking plate (25) and the inner wall of the outer shell (24).

4. The device for forming a silicon carbide coating on the surface of a graphite product according to claim 3, characterized in that: A conversion member (28) rotatably connected to an upper rotating shaft (32) is fixedly connected to the top of the outer furnace body (11), and an air outlet passage (29) inside the upper rotating shaft (32) is in communication with the conversion member (28).

5. The device for forming a silicon carbide coating on the surface of a graphite product according to claim 1, characterized in that: An insert block (34) is fixedly connected to the top of the lower rotating shaft (33), and the insert block (34) is embedded in the bottom of the upper rotating shaft (32).

6. The device for forming a silicon carbide coating on the surface of a graphite product according to claim 5, characterized in that: A spring b (37) is installed between the latch (38) and the inner wall of the cam member (36), and the side of the latch (38) close to the lower rotating shaft (33) is tapered.

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