A planetary wheel outer ring raceway device and outer ring drive system

Abstract

The present application provides a planetary gear outer ring raceway device, which relates to the technical field of semiconductor processing equipment, and includes a pin gear ring and an outer ring seat; wherein: the pin gear ring is arranged around the outside of the machine tool worktable, and the pin gear ring rotates relative to the machine tool worktable with the center of the circle of the machine tool worktable as the rotation center; the outer ring seat is sleeved on the outside of the machine tool worktable, and the pin gear ring rotates on the top of the outer ring seat; the lower surface of the pin gear ring is provided with an upper raceway groove of an annular structure, and the upper surface of the outer ring seat is provided with a lower raceway groove of an annular structure, and the upper raceway groove and the lower raceway groove overlap to form an annular raceway, and a plurality of balls are installed in the annular raceway, and the balls can roll in the annular raceway. The defect in the related art that the planetary gear runs unsteadily or vibrates, resulting in a decrease in the grinding and polishing quality of the wafer, or even causing the wafer to be scrapped, is solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing equipment, and in particular to a planetary gear outer ring raceway device and an outer ring drive system. Background Art

[0002] Semiconductor wafer (crystal disc) processing is an important part of semiconductor device and chip manufacturing. The grinding and polishing of semiconductor wafers is the most critical processing step of wafers. At present, high-end CNC wafer grinding and polishing machine tools mainly adopt upper and lower grinding discs and dual-drive planetary gear structures. The lower grinding disc is also called the machine tool worktable. The planetary gear is between the upper grinding disc and the machine tool worktable. The wafer is contained in the belly hole of the planetary gear and can move with the planetary gear. The wafer is ground and polished during the movement. The so-called high-end CNC wafer grinding and polishing machine tool, or flexible processing production line, is to be able to intelligently control the rotation, revolution, speed, and steering of the planetary gear, the speed and steering of the upper grinding disc, the speed and steering of the machine tool worktable, and the pressure on the wafer, so that the wafer can obtain higher processing efficiency and processing quality. On high-end CNC wafer processing machines, the running trajectory of the planetary wheel is extremely important. The teeth of the planetary wheel mesh with the outer teeth of the central drive system and the inner teeth of the outer ring drive system respectively. The central drive system and the outer ring drive system drive the planetary wheel to move and realize the rotation and revolution of the planetary wheel. The CNC system of the machine tool can intelligently control the rotation, revolution, speed, direction and other parameters of the planetary wheel through the central drive system and the outer ring drive system, so as to obtain the best grinding and polishing effect for the wafer. At the same time, it can also realize the "self-wear correction" function of the grinding disc, so that the grinding disc can operate in a high-precision state for a long time, reducing the correction frequency and time of the grinding disc and extending the service life of the grinding disc.

[0003] At present, the outer ring drive system of the planetary gear mainly adopts a pin gear transmission mechanism. The pin gear ring is a larger ring structure, consisting of an inner and outer layer of pin teeth. The inner layer of pin teeth meshes with the gear teeth of the planetary gear to realize the outer ring drive of the planetary gear, and the outer layer of pin teeth meshes with the gear teeth of the driving gear to obtain the driving power of the pin gear ring. The driving gear is connected to the reducer and the motor; the pin gear ring is connected to the annular guide rail through a group of multiple roller supports to form an annular rotary rotation pair; when working, the motor drives the driving gear through the reducer, and the driving gear drives the pin gear ring to rotate through the outer layer of pin teeth, and the inner layer of pin teeth of the pin gear ring drives the planetary gear to rotate.

[0004] However, since the pin gear ring is supported by a group of multiple rollers and annular guide rails, some rollers often bounce irregularly on the annular guide rails during operation. The bouncing of the rollers will cause the pin gear ring to vibrate, and the vibration of the pin gear ring will be directly transmitted to the planetary wheel, causing the planetary wheel to run unsteadily or even vibrate. The unsteady operation or vibration of the planetary wheel will lead to a decline in the grinding and polishing quality of the wafers, or even cause the wafers to be scrapped. Summary of the invention

[0005] The purpose of the present application is to provide a planetary gear outer ring raceway device and an outer ring drive system, aiming to solve the defect in the related art that the planetary gear runs unsteadily or vibrates, resulting in a decrease in the grinding and polishing quality of the wafer, or even causing the wafer to be scrapped.

[0006] Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

[0007] According to a first aspect of the present application, a planetary wheel outer ring raceway device is provided, comprising a pin gear ring and an outer ring seat; wherein:

[0008] The pin gear ring is disposed around the outer side of the machine tool worktable, and the pin gear ring rotates relative to the machine tool worktable with the center of the circle of the machine tool worktable as the rotation center;

[0009] The outer ring seat is sleeved on the outside of the machine tool worktable, and the pin gear ring rotates on the top of the outer ring seat;

[0010] An upper raceway groove of an annular structure is formed on the lower surface of the pin gear ring, and a lower raceway groove of an annular structure is formed on the upper surface of the outer ring seat. The upper raceway groove and the lower raceway groove overlap to form an annular raceway, and a plurality of balls are installed in the annular raceway, and the balls can roll in the annular raceway.

[0011] In an exemplary embodiment of the present application, the top wall of the upper raceway groove cross-section is set to be a semicircle, and the side wall on one side of the upper raceway groove is set to be a vertical plane; the bottom wall of the lower raceway groove cross-section is set to be a semicircle, and the side wall on one side of the lower raceway groove is set to be a vertical plane, and the vertical plane of the upper raceway groove and the vertical plane of the lower raceway groove are arranged on both sides of the annular raceway relative to each other.

[0012] In an exemplary embodiment of the present application, a sealing structure for sealing a gap between the outer ring seat and the pin gear ring is provided, and the sealing structure is located on the inner side of the annular raceway.

[0013] In an exemplary embodiment of the present application, the sealing structure includes a first seal and a second seal, the first seal is fixedly connected to the top of the outer ring seat, the second seal is fixedly connected to the bottom of the pin gear ring, the first seal and the second seal are both labyrinth sealing grooves, and the first seal and the second seal are plugged and adapted to each other.

[0014] In an exemplary embodiment of the present application, the pin gear ring includes a gear ring and a plurality of pin shafts, and the plurality of pin shafts are fixed relative to the inner side of the gear ring in a circumferentially uniformly distributed manner.

[0015] In an exemplary embodiment of the present application, a plurality of pin holes are opened on the inner side of the upper surface of the gear ring, the pin shafts correspond to the pin holes one by one, and the pin shafts are plug-fitted with the pin holes.

[0016] In an exemplary embodiment of the present application, the gear ring is provided with a gear ring inner wall below the pin hole, and the distance between the axis of the pin hole and the gear ring inner wall is within a range greater than 0 and less than 2 / 5 of the pin hole diameter.

[0017] In an exemplary embodiment of the present application, the pin shaft is a stepped shaft.

[0018] According to a second aspect of the present application, an outer ring drive system is provided, comprising the planetary wheel outer ring raceway device described above.

[0019] In an exemplary embodiment of the present application, it also includes a planetary wheel outer ring belt transmission device and a planetary wheel outer ring lifting and stopping device.

[0020] In an exemplary embodiment of the present application, the planetary wheel outer ring belt transmission device comprises: a driving mechanism, a transmission mechanism and a driven mechanism; wherein,

[0021] The active mechanism is used to provide rotational power;

[0022] The transmission mechanism includes a driving wheel, a driven wheel and a double-sided synchronous belt, wherein the driving mechanism is used to drive the driving wheel to rotate; the driven wheel is located on the horizontal side of the driving wheel; the inner side of the double-sided synchronous belt has an inner tooth structure, and the outer side has an outer tooth structure, the double-sided synchronous belt is surrounded between the driving wheel and the driven wheel, and the inner tooth structure of the double-sided synchronous belt is meshed with the driving wheel and the driven wheel;

[0023] The driven mechanism includes a large-circle synchronous belt, the circumferential outer wall of the large-circle synchronous belt has a belt tooth structure, the belt tooth structure of the large-circle synchronous belt is meshed with the outer tooth structure of the double-sided synchronous belt, and the large-circle synchronous belt is sleeved on the outer side of the pin gear ring and fixedly connected to the pin gear ring.

[0024] In an exemplary embodiment of the present application, the outer tooth structure of the double-sided synchronous belt and the belt tooth structure of the large-circle synchronous belt are conjugate synchronous belt teeth.

[0025] In an exemplary embodiment of the present application, the large-circle synchronous belt is a closed-loop synchronous belt; or,

[0026] The large-circle synchronous belt has one or more notches, the length of which should be an integer multiple of the pitch of the external tooth structure in the double-sided synchronous belt, and the length of the notch needs to be smaller than the length of the double-sided synchronous belt that can mesh with the large-circle synchronous belt.

[0027] In an exemplary embodiment of the present application, a side of the double-sided synchronous belt close to the large-circle synchronous belt is arc-shaped, and a tooth structure on the arc-shaped side of the double-sided synchronous belt is fully meshed with a tooth structure of the large-circle synchronous belt.

[0028] In an exemplary embodiment of the present application, the planetary wheel outer ring lifting and stopping device comprises a lifting mechanism for driving the planetary wheel outer ring to move in a vertical direction, and a stopping mechanism for causing the lifting mechanism to instantly stop lifting the planetary outer ring; wherein the lifting mechanism comprises:

[0029] A driving device for providing rotational power;

[0030] A wire shaft is arranged in a vertical direction, the driving device drives the wire shaft to rotate, the wire shaft is used to transmit the rotational power, and a thread structure is processed on the circumferential side wall of the top of the wire shaft;

[0031] A nut, which is threadedly connected to the top of the thread shaft, and the nut can be moved in a vertical direction by rotating the thread shaft, and the nut is used to drive the outer ring of the planetary wheel to rise and fall;

[0032] The flash stop mechanism comprises:

[0033] A movable clamping member is provided with a clamping structure between the movable clamping member and the bottom of the thread shaft, which enables the movable clamping member to slide along the length direction of the thread shaft but cannot rotate relatively in the horizontal direction;

[0034] A fixed clamping piece, located above the movable clamping piece, capable of forming a clamping connection with the movable clamping piece so that the two are relatively fixed, and the fixed clamping piece is always in a fixed state;

[0035] A transmission clamping member, located below the movable clamping member, can be clamped with the movable clamping member so that the two are relatively fixed, and the driving device drives the movable clamping member to rotate;

[0036] The displacement device is used to drive the movable clamping part to rise or fall. When the driving device needs to drive the wire shaft to rotate, the displacement device drives the movable clamping part to fall, so that the movable clamping part is clamped and fixed with the transmission clamping part; when the wire shaft needs to be stopped, the displacement device drives the movable clamping part to rise, so that the movable clamping part is clamped and fixed with the fixed clamping part.

[0037] In an exemplary embodiment of the present application, the displacement device comprises:

[0038] The elastic component has elastic properties and can drive the movable clamping part to move upward so that the movable clamping part is clamped and fixed with the fixed clamping part;

[0039] A permanent magnetic ring, having magnetic properties, surrounds and is fixed to the circumferential outer wall of the movable clamping member;

[0040] The coil ring is electrically connected to the power supply and surrounds the outer side of the permanent magnetic ring. When energized, it can produce a magnetic pole reaction with the permanent magnetic ring, so that the permanent magnetic ring and the movable clamping part overcome the elastic force of the elastic component and move downward together, so that the movable clamping part is clamped and fixed with the transmission clamping part.

[0041] In an exemplary embodiment of the present application, the clamping structure includes a spline sleeve and a spline shaft, the spline shaft is slidably adapted to the spline sleeve, one of the two is fixed at the bottom of the wire shaft along the axial direction of the wire shaft, and the other is fixed at the center of the top of the movable clamping part.

[0042] In an exemplary embodiment of the present application, the spline sleeve is fixed at the center of the top of the movable clamping member, the spline shaft is fixed at the bottom of the wire shaft along the vertical direction, the spline sleeve passes through the fixed clamping member and is rotatably connected to the fixed clamping member, and the spline shaft is inserted into the interior of the spline sleeve; the elastic component includes:

[0043] A pull rod is vertically inserted into the interior of the thread shaft and is slidably connected to the thread shaft in the vertical direction;

[0044] A stopper, wherein a cavity is provided inside the movable clamping member, the cavity is located below the spline sleeve, the stopper is located in the cavity and is clamped with the movable clamping member in the vertical direction, and the bottom of the pull rod passes through the spline sleeve and extends into the cavity to be fixedly connected with the stopper;

[0045] A sliding block, wherein a sliding cavity is provided at the top of the wire shaft in the vertical direction, the sliding block is located in the sliding cavity and is slidably connected with the wire shaft in the vertical direction, and the top of the pull rod extends into the sliding cavity and is fixedly connected with the sliding block;

[0046] Spring, the wire shaft is provided with a storage cavity in the vertical direction below the sliding cavity, the sliding cavity is communicated with the storage cavity, the spring is located in the storage cavity and surrounds the outside of the pull rod, the top of the spring is fixedly connected to the sliding block, and the bottom of the spring is fixedly connected to the inner bottom wall of the storage cavity.

[0047] The exemplary embodiments of the present application may have some or all of the following beneficial effects:

[0048] In a planetary wheel outer ring raceway device provided in an exemplary embodiment of the present application, an upper raceway groove is provided on the lower surface of the pin gear ring, and a lower raceway groove is provided on the upper surface of the outer ring seat, and the pin gear ring is placed directly above the outer ring seat, at which time the upper raceway groove is located directly above the lower raceway groove, and an annular raceway is formed by the superposition of the upper raceway groove and the lower raceway groove, and a plurality of balls are placed in the annular raceway, and when the pin gear ring rotates above the outer ring seat, the balls roll in the annular raceway. The annular raceway and the balls are used as supporting structures through the above structure, so that a rolling motion pair is formed between the outer ring seat, the balls and the pin gear ring, and in the prior art, the structure of the roller is complex, so it is difficult to ensure consistency during the assembly process, and the pin gear ring is pressed on a plurality of rollers. If the height consistency between the rollers is not good, the annular guide rail will vibrate irregularly up and down with some of the rollers due to non-contact during the rotation process. The ball has a simple structure and is easy to assemble, so it only needs to ensure that all the ball sizes are consistent during production so that vibration will not occur. The above structure effectively improves the stability of the planetary wheel during rotation, thereby improving the polishing quality of the wafer.

[0049] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0051] Figure 1 A schematic diagram of the overall structure of a machine tool workbench and a base in an embodiment of the present application is shown;

[0052] Figure 2 A schematic diagram of a planetary wheel outer ring driving system in an embodiment of the present application is shown;

[0053] Figure 3A top view of a transmission mechanism and a driven mechanism in a planetary wheel outer ring belt transmission device in an embodiment of the present application is shown;

[0054] Figure 4 Shows Figure 3 A partial enlarged schematic diagram of part A;

[0055] Figure 5 A schematic diagram of the active mechanism in the planetary wheel outer ring belt transmission device in an embodiment of the present application is shown;

[0056] Figure 6 A top view showing the meshing state of the double-sided synchronous belt and the large-circle synchronous belt in the planetary outer ring belt transmission device in the embodiment of the present application is shown;

[0057] Figure 7 A schematic diagram showing the outer ring seat and flange structure in an embodiment of the present application is shown;

[0058] Figure 8 A side cross-sectional view of the planetary wheel outer ring raceway device in an embodiment of the present application is shown;

[0059] Fig. 9 Shows Figure 8 A partial enlarged schematic diagram of part B;

[0060] Fig.10 The side cross-sectional view of the planetary wheel outer ring lifting and stopping device in the embodiment of the present application is a lifting mechanism;

[0061] Fig.11 A side cross-sectional view of the planetary wheel outer ring lifting and stopping device in the embodiment of the present application is shown, which embodies the clamping structure and the stopping mechanism;

[0062] Fig.12 A side cross-sectional view showing the structure of the elastic component of the planetary wheel outer ring lifting and stopping device in the embodiment of the present application;

[0063] Fig.13 A schematic diagram of the structure of the elastic component in an embodiment of the present application is shown;

[0064] Fig.14 A partial cross-sectional view of the movable clamp structure in an embodiment of the present application is shown.

[0065] Description of reference numerals:

[0066] 1. Active mechanism; 11. Driving motor; 12. Speed ​​reducer; 2. Transmission mechanism; 21. Active wheel; 22. Driven wheel; 23. Double-sided synchronous belt; 3. Driven mechanism; 31. Large circle synchronous belt; 32. Pin gear ring; 321. Upper raceway groove; 322. First seal; 323. Pin shaft; 324. Pin hole; 325. Inner wall of gear ring; 4. Outer ring seat; 41. Lower raceway groove; 42. Ball; 43. Second seal; 44. Flange; 441. Long hole; 5. Lifting mechanism; 51. Driving device; 52. Wire shaft; 521. Sliding cavity; 522. Storage cavity; 523. Connecting part; 53. Wire nut; 5 31. Connecting plate; 6. Flash stop mechanism; 61. Movable clamping part; 611. Cavity; 612. Plug-in slot; 62. Fixed clamping part; 63. Transmission clamping part; 64. Displacement device; 641. Elastic component; 6411. Pull rod; 6412. Stop block; 6413. Sliding block; 6414. Spring; 642. Permanent magnet ring; 6421. Magnetic column; 643. Coil ring; 7. Clamping structure; 71. Spline sleeve; 72. Spline shaft; 8. Housing; 9. Motor seat; 91. Sleeve shaft; 911. Boss; 92. Pressure cover; 10. Base; 101. Machine tool worktable; 102. Planetary wheel; 103. Seat plate. DETAILED DESCRIPTION

[0067] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that the present application will be comprehensive and complete and fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their detailed descriptions will be omitted. In addition, the drawings are only schematic illustrations of the present application and are not necessarily drawn to scale.

[0068] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of the diagram to another component, these terms are used in this specification only for convenience, such as according to the direction of the examples in the drawings. It is understood that if the device of the diagram is turned upside down, the component described as "upper" will become the component "lower". When a structure is "on" other structures, it may mean that the structure is formed integrally on the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.

[0069] The terms "a", "an", "the" and "at least one" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express an open-ended inclusive meaning and mean that additional elements / components / etc. may exist in addition to the listed elements / components / etc.; the terms "first" and "second" are used merely as labels and are not intended to limit the quantity of their objects.

[0070] like Figure 1 As shown, in the embodiment of the present application, the structure of the machine tool worktable 101 is disclosed, the wafer is contained in the belly hole of the planetary wheel 102, the planetary wheel 102 is placed on the table top of the machine tool worktable 101, the machine tool worktable 101 is also called a grinding and polishing disc or a lower grinding disc, the machine tool worktable 101 is fixed on the grinding disc spindle, the grinding disc spindle is installed on the base 10, the grinding disc spindle is connected to the grinding disc drive system, the grinding disc drive system can drive the grinding disc spindle to rotate and then drive the machine tool worktable 101 to rotate; at the center of the machine tool worktable 101, a central drive system is provided, the gear teeth of the planetary wheel 102 are respectively meshed with the central pin gear in the central drive system and the pin teeth of the outer ring drive system, the planetary wheel 102 is driven to rotate by the central drive system and the outer ring drive system, so that the planetary wheel 102 can rotate, revolve, or rotate + revolve.

[0071] The core component of the center drive system is the center pin gear. The power drive system is connected to the machine tool CNC system and is controlled by the machine tool CNC system. The center pin gear is located at the center of the machine tool worktable 101 and meshes with the gear teeth of the planetary wheel 102.

[0072] In the embodiment of the present application, a planetary wheel outer ring driving system is disclosed, including: a base 10, a seat plate 103, a planetary wheel outer ring belt transmission device, a planetary wheel outer ring roller device, and a planetary wheel outer ring lifting and stopping device. Specifically, the seat plate 103 and the machine tool workbench 101 are both above the base 10, the seat plate 103 surrounds the outer side of the machine tool workbench 101, and the planetary wheel outer ring belt transmission device and the planetary wheel outer ring roller device are installed on the seat plate 103. The planetary wheel outer ring belt transmission device is used to generate rotational power and transmit the generated power to the planetary gear, so that the planetary wheel 102 can rotate; the planetary wheel outer ring roller device is used to provide support force for the planetary wheel outer ring, so that the planetary wheel outer ring can rotate smoothly; the planetary wheel outer ring lifting and stopping device is used to raise or lower the planetary wheel outer ring, providing convenience for the staff to load and unload materials.

[0073] like Figure 2 As shown, in the embodiment of the present application, a planetary wheel outer ring belt transmission device is disclosed, comprising: an active mechanism 1, a transmission mechanism 2 and a driven mechanism 3; wherein,

[0074] The active mechanism 1 is used to provide rotational power;

[0075] like Figure 3 and Figure 4 As shown, the transmission mechanism 2 includes a driving wheel 21, a driven wheel 22 and a double-sided synchronous belt 23. The driving mechanism 1 is used to drive the driving wheel 21 to rotate; the driven wheel 22 is located on the horizontal side of the driving wheel 21; the inner side of the double-sided synchronous belt 23 has an inner tooth structure, and the outer side has an outer tooth structure. The double-sided synchronous belt 23 surrounds the driving wheel 21 and the driven wheel 22, and the inner tooth structure of the double-sided synchronous belt 23 is meshed with the driving wheel 21 and the driven wheel 22;

[0076] like Figure 3 and Figure 4 As shown, the driven mechanism 3 includes a large circle synchronous belt 31 and a pin gear ring 32. The circumferential outer wall of the large circle synchronous belt 31 has a belt tooth structure. The belt tooth structure of the large circle synchronous belt 31 is meshed with the outer tooth structure of the double-sided synchronous belt 23. The large circle synchronous belt 31 is sleeved on the outer side of the pin gear ring 32 and is fixedly connected to the pin gear ring 32. The pin gear ring 32 rotates around the outer side of the machine tool worktable 101 with the center of the machine tool worktable 101 as the rotation center and is used to drive the planetary wheel 102 to rotate.

[0077] like Figure 5 As shown, in the embodiment of the present application, the active mechanism 1 includes a drive motor 11 and a reducer 12, which are tightly connected by screws. The drive motor 11 is located below the reducer 12, and the reducer 12 is fixed under the seat plate 103. The drive motor 11 transmits the original rotational power to the reducer 12, and the reducer 12 reduces the speed of the original rotational power output by the drive motor 11 and enhances the torque, and then transmits it to the driving wheel 21 to drive the driving wheel 21 to rotate. It is worth noting that the relative position and connection method between the drive motor 11 and the reducer 12 are not fixed. The drive motor 11 can also be installed on one side of the reducer 12, and the connection method can also be fixed by other structures.

[0078] In the embodiment of the present application, both the driving wheel 21 and the driven wheel 22 are meshed with the inner tooth structure of the double-sided synchronous belt 23, ensuring that when the driving wheel 21 rotates, the double-sided synchronous belt 23 can be effectively driven to rotate around the driving wheel 21 and the driven wheel 22. The outer tooth structure of the double-sided synchronous belt 23 is tightly meshed with the belt tooth structure of the large circle synchronous belt 31, so that the double-sided synchronous belt 23 drives the large circle synchronous belt 31 to rotate, and then the large circle synchronous belt 31 drives the pin gear ring 32 to rotate. In the present application, both the double-sided synchronous belt 23 and the large circle synchronous belt 31 are made of rubber material, but this choice is not absolute. In other embodiments, the double-sided synchronous belt 23 and the large circle synchronous belt 31 can also be made of different materials to meet specific needs. Through the above structure, the tape transmission effect between the double-sided synchronous belt 23 and the large circle synchronous belt 31 is achieved, that is, the tape transmission of the two synchronous belts is called tape transmission. In view of the flexible characteristics of the synchronous belt, a flexible transmission is formed between the double-sided synchronous belt 23 and the large-circle synchronous belt 31, which effectively avoids the phenomenon of hard collision between the outer pin teeth of the pin gear ring 32 and the gear teeth of the driving gear in the traditional technology, and eliminates the problems caused by the pitch error. Through this structure, not only the problem of unstable operation and vibration of the outer ring of the planetary wheel is fundamentally solved, the quality of wafer grinding and polishing is significantly improved, but also has multiple advantages such as reliable and stable, simplified structure, and reduced noise.

[0079] In the embodiment of the present application, the outer tooth structure of the double-sided synchronous belt 23 and the belt tooth structure of the large-circle synchronous belt 31 are meshed in a conjugate synchronous belt tooth manner, and this meshing manner is achieved by the precise contact between the concave curved portion on the tooth root side of the outer teeth of the double-sided synchronous belt 23 and the convex curved portion on the tooth top side of the large-circle synchronous belt 31. This conjugate tooth structure can effectively suppress the relative displacement of the outer tooth structure and the belt tooth structure in the front-to-back direction, thereby significantly reducing the generation of noise and vibration, providing a more stable and silent environment for system operation, and further improving the accuracy and efficiency of semiconductor wafer grinding and polishing.

[0080] In the embodiment of the present application, in order to improve the continuity of power transmission and the smooth operation during the tape transmission process, the large-circle synchronous belt 31 is set to a closed annular structure. This structure maximizes the contact area between the large-circle synchronous belt 31 and the double-sided synchronous belt 23, thereby ensuring the high efficiency and stability of power transmission, while also reducing the force on a single tooth during meshing, thereby increasing the service life of the device. Of course, this design is not the only option. In order to facilitate processing and assembly, the large-circle synchronous belt 31 can also be set to a structure with one or more notches (the notch does not have a toothed structure), that is, the large-circle synchronous belt 31 is composed of multiple sections. However, in order to ensure that the large-circle synchronous belt 31 and the double-sided synchronous belt 23 always maintain a continuous meshing relationship and ensure uninterrupted power transmission, the length of each notch must be strictly controlled to ensure that it is less than the length of the double-sided synchronous belt 23 that can approach one side of the large-circle synchronous belt 31. At the same time, the length of the gap must also be an integer multiple of the pitch of the outer tooth structure of the double-sided synchronous belt 23. This control requirement is to ensure that the power transmitted to the pin gear ring 32 is uniform, continuous and uninterrupted, thereby providing stable and efficient power support for the semiconductor wafer grinding and polishing process.

[0081] like Figure 6 As shown, further, the side of the double-sided synchronous belt 23 close to the large-circle synchronous belt 31 is arc-shaped, and the tooth structure on the arc-shaped side of the double-sided synchronous belt 23 is fully meshed with the belt tooth structure of the large-circle synchronous belt 31. Through the setting of this structure, the number of meshing teeth can be maximized, and then the stress acting on a single tooth can be reduced, which can reduce the effect of tooth wear and breakage, and improve the running stability of the double-sided synchronous belt 23 and the large-circle synchronous belt 31.

[0082] like Figure 7 and Figure 8 As shown, in the embodiment of the present application, a planetary wheel outer ring raceway device is disclosed, including an outer ring seat 4, the outer ring seat 4 is sleeved on the outer side of the machine tool workbench 101, and the pin gear ring 32 rotates on the top of the outer ring seat 4;

[0083] like Figure 8 and Fig. 9 As shown, the lower surface of the pin gear ring 32 is provided with an upper raceway groove 321 of an annular structure, and the upper surface of the outer ring seat 4 is provided with a lower raceway groove 41 of an annular structure. The upper raceway groove 321 and the lower raceway groove 41 overlap to form an annular raceway, and a plurality of balls 42 are installed in the annular raceway, and the balls 42 can roll in the annular raceway.

[0084] In the embodiment of the present application, the outer ring seat 4 and the seat plate 103 are an integral structure, and the pin gear ring 32 is arranged directly above the outer ring seat 4. At this time, the upper raceway groove 321 and the lower raceway groove 41 are aligned, and the two are seamlessly connected to form an annular raceway. A plurality of balls 42 roll freely in the annular raceway, so that the pin gear ring 32, the outer ring seat 4 and the plurality of balls 42 together form a rotating motion pair. The above structure replaces the traditional solution in the prior art of installing multiple rollers at the bottom of the pin gear ring 32 so that the rollers roll in the track. Due to the large number of rollers in the traditional solution, it is difficult to ensure that all rollers are completely consistent in height after installation. When the rollers are inconsistent in height, it will cause up and down vibration during the movement, affecting the stability of the overall operation of the outer ring of the planetary wheel.

[0085] In contrast, the ball 42 solution adopted in the present application does not require complicated installation of the ball 42 and the pin gear ring 32, and only needs to ensure that all the balls 42 achieve dimensional consistency during the production stage. Through this structure, the present application overcomes the problem of the pin gear ring 32 vibrating up and down during the movement in the prior art, and significantly improves the stability of the outer ring of the planetary wheel during operation. It not only effectively improves the accuracy of the wafer polishing process, but also improves the polishing quality of the wafer.

[0086] Furthermore, the top wall of the cross section of the upper raceway groove 321 is set to be semicircular, and the side wall of the upper raceway groove 321 is set to be a vertical plane; the bottom wall of the cross section of the lower raceway groove 41 is set to be semicircular, and the side wall of the lower raceway groove 41 is set to be a vertical plane, and the two vertical planes are respectively located on both sides of the horizontal plane of the ball 42; specifically, the vertical plane of the upper raceway groove 321 is set on the side close to the inner wall of the pin gear ring 32, and the vertical plane of the lower raceway groove 41 is set on the side close to the outer wall of the outer ring seat 4. This structure can make the annular raceway formed by the upper raceway groove 321 and the lower raceway groove 41 completely fit with the ball 42, so as to improve the stability of the ball 42 when rolling in the annular raceway. The structure of the two vertical planes not only effectively restrains the ball 42 to prevent it from escaping from the annular raceway during movement, but also forms a locking structure between the bottom of the pin gear ring 32 and the top of the outer ring seat 4. It plays a guiding role for the rotation of the pin gear ring 32, and also strengthens the constraint on the pin gear ring 32, ensuring the smoothness of the rotation of the pin gear ring 32 and the continuity of power transmission, and providing a more stable and efficient operating environment for the grinding and polishing process of semiconductor wafers. It is worth noting that the structural design of the upper raceway groove 321 and the lower raceway groove 41 is not limited to the combination of a semicircle and a plumb plane. According to actual application requirements, other geometric shapes such as squares, triangles, and polygons can also be used. As long as it can ensure that the ball 42 rolls smoothly in the annular raceway, meet the continuity and stability requirements of power transmission, and the ball 42 is constrained in the upper raceway groove 321 and the lower raceway groove 41 so that it cannot jump, it is a feasible design solution.

[0087] like Fig. 9 As shown, in the embodiment of the present application, a sealing structure is further provided between the outer ring seat 4 and the pin gear ring 32, and the sealing structure is located on the inner side of the annular raceway. The sealing structure has a sealing effect on the annular raceway, effectively preventing the debris generated by the wafer during the grinding process from invading the inside of the annular raceway, ensuring the cleanliness of the annular raceway, and providing a guarantee for the smooth rolling of the ball 42 in the annular raceway, and also preventing the leakage of the lubricating fluid in the annular raceway. In the present application, no strict restrictions are set for the sealing structure. For example, a sealing ring can be used for sealing, which ensures the sealing effect while facilitating maintenance and replacement. In addition, a plug-in method of a bump and a groove can also be used. This design not only provides good sealing performance, but also has the advantages of simple structure and easy assembly.

[0088] In the specific implementation of the embodiment of the present application, the sealing structure includes a first seal 322 and a second seal 43, wherein the first seal 322 is arranged at the top of the outer ring seat 4 and is an integral structure with the outer ring seat 4, and the second seal 43 is arranged at the bottom of the pin gear ring 32 and is an integral structure with the pin gear ring 32. The first seal 322 and the second seal 43 are both labyrinth seal grooves, and the shape of the labyrinth seal groove is not limited to a specific form, and can be a triangle, a rectangle or other geometric shapes. Through the labyrinth seal groove, a structure of multiple sealing rings can be formed. This multi-stage sealing structure can significantly improve the sealing effect, effectively prevent the debris generated by the wafer during the grinding and polishing process from invading the inside of the annular raceway, ensure the cleanliness of the inside of the annular raceway, and at the same time, it is not easy to cause the lubricating fluid in the annular raceway to leak, creating an ideal environment for the smooth rolling of the ball 42.

[0089] like Figure 2 and Figure 7 As shown, further, a flange 44 is provided on the outer side of the outer ring seat 4, the flange 44 and the outer ring seat 4 are at the same horizontal height, an opening is provided on the side of the flange 4 close to the outer ring seat 4, a connecting port is provided on the outer ring seat 4 close to the flange 44, and the opening of the flange 44 is connected with the connecting port of the outer ring seat 4, forming a coherent channel structure. In the embodiment of the present application, the flange 44 and the outer ring seat 4 are an integrated structure, of course, this is not restrictive, according to actual application requirements, the flange 44 and the outer ring seat 4 can also adopt a split structure, and a fixed connection is achieved by bolt connection or welding.

[0090] In order to further improve the transmission effect of the transmission mechanism 2 and the large-circle synchronous belt 31, the transmission mechanism 2 is installed in the flange 44, and the transmission mechanism 2 can be adjusted in the flange 44. Specifically, the driven mechanism 3 is installed inside the flange 44, and the active mechanism 1 is installed below the flange 44, ensuring that the active mechanism 1 and the driven mechanism 3 can obtain stable support provided by the flange 44 when working, thereby improving the stability and reliability of the equipment during operation. Two elongated holes 441 are opened on the inner bottom wall of the flange 44, and the length direction of the two elongated holes 441 extends along the connection between the flange 44 and the outer ring seat 4, away from the outer ring seat 4. The two elongated holes 441 correspond to the driving wheel 21 and the driven wheel 22 respectively, and the positions of the driving wheel 21 and the driven wheel 22 can be adjusted along the length direction of the elongated holes 441. One possible implementation method is to adjust the position of the driving wheel 21 and the driven wheel 22. Specifically, the driving wheel 21 and the driven wheel 22 are fixedly connected with a central shaft at the central axis, and a slider is inserted into the elongated hole 441 at the bottom of the central shaft. The central shaft is rotatably connected to the slider, and the slider slides along the elongated hole 441. The slider is threadedly connected with a clamping bolt below the flange 44. The position of the driving wheel 21 and the driven wheel 22 is adjusted by sliding the slider in the elongated hole 441. After the driving wheel 21 and the driven wheel 22 are adjusted to the appropriate position, the clamping bolt is tightened so that the clamping bolt is pressed against the flange 44, thereby fixing the position of the driving wheel 21 and the driven wheel 22, ensuring that the driving wheel 21 and the driven wheel 22 have good stability during rotation. It is worth noting that the adjustment method described above is only an exemplary description, and the adjustment method for the driving wheel 21 and the driven wheel 22 is not limited to this one. As long as the driving wheel 21 and the driven wheel 22 can be moved along the length direction of the elongated hole 441 and the positions of the two can be effectively fixed after being adjusted to the appropriate position, they can be adopted. For example, a sliding clamping method can also be used to adjust and fix the positions of the driving wheel 21 and the driven wheel 22. By adjusting the positions of the driving wheel 21 and the driven wheel 22, on the one hand, the double-sided synchronous belt 23 can be kept in a tensioned state, avoiding the problem of unstable operation of the equipment due to insufficient tension. On the other hand, by adjusting the position of the double-sided synchronous belt 23, the meshing with the large-circle synchronous belt 31 can be optimally achieved, further improving the stability and reliability of the equipment during operation.

[0091] like Figure 4As shown, in the embodiment of the present application, the structures of the driving wheel 21 and the driven wheel 22 are exactly the same, which not only simplifies the production process, but also provides great convenience for the maintenance and maintenance of the equipment. Since the driving wheel 21 and the driven wheel 22 have the same structure, they can be interchanged with each other, which means that during the equipment maintenance process, the driving wheel 21 and the driven wheel 22 can be flexibly replaced according to actual needs, without worrying about compatibility issues caused by structural differences. A detachable connection method is adopted between the driving wheel 21 and the active mechanism 1, and between the driven wheel 22 and the transmission mechanism 2, which not only ensures the flexibility and maintainability of the equipment, but also provides great convenience for the maintenance and maintenance work of the staff. Specifically, the staff can easily disassemble and replace the driving wheel 21, the driven wheel 22 and the synchronous belt from the flange 44 without complex tools and professional skills, which greatly improves the efficiency and convenience of equipment maintenance. As an exemplary illustration of the detachable method of the driving wheel 21 and the driven wheel 22, the center of the driving wheel 21 and the driven wheel 22 is processed with a stopper, and the driving wheel 21 and the driven wheel 22 can be firmly connected to the central axis. During the connection process, screws are used to reinforce the connection, ensuring the reliability and stability of the connection. When disassembly is required, the staff can easily complete the disassembly process by simply removing the screws, without the need for complicated operations and tools, greatly simplifying the maintenance process of the equipment.

[0092] It is worth noting that the above content is only for exemplary purposes, and no special restrictions are imposed on the specific disassembly methods of the driving wheel 21 and the driven wheel 22. This means that in practical applications, different disassembly methods can be used according to specific needs and equipment characteristics to meet different maintenance and care needs.

[0093] In the embodiment of the present application, the pin gear ring 32 is composed of a gear ring and a plurality of pins 323 whose axes are arranged in the vertical direction. These pins 323 are arranged on the inner side of the gear ring in a circumferentially uniformly distributed manner, ensuring the balance and stability of the structure and being able to accurately mesh with the tooth structure of the planetary wheel 102. Each pin 323 is relatively fixed to the gear ring. The fixing method between the pin 323 and the gear ring can be achieved by bolt connection, clamping, welding, etc. It is worth noting that there is no special restriction on the specific fixing method between the pin 323 and the gear ring.

[0094] like Figure 4 and Fig. 9As shown, as a specific implementation method for fixing the pin shaft 323 to the gear ring in the embodiment of the present application, a plurality of pin holes 324 are pre-processed on the inner upper surface of the gear ring, and these pin holes 324 are evenly distributed in the circumferential direction and form a one-to-one correspondence with the pin shaft 323. Each pin shaft 323 is directly inserted into a pin hole 324, so that the relative fixation between the pin shaft 323 and the gear ring is achieved. This structure is not only simple and convenient to operate, simplifies the equipment assembly process, but also provides great convenience for subsequent maintenance work.

[0095] like Fig. 9 As shown, in the embodiment of the present application, in order to ensure the strength of the pin gear ring 32 structure and meet the requirement that the gear teeth of the planetary wheel 102 and the pin shaft 323 can mesh, it is necessary to impose special restrictions on the distance from the pin shaft 323 to the inner wall of the pin gear ring 32. Specifically, the gear ring is provided with a gear ring inner wall 325 below the pin hole 324, and the distance between the axis of the pin hole 324 and the gear ring inner wall 325 is within a range of greater than 0 and less than 2 / 5 of the diameter of the pin hole 324. The position of the pin hole 324 can not only ensure that the pin shaft 323 and the planetary wheel 102 can achieve accurate meshing, but also ensure that there is still a certain thickness between the inner wall of the pin hole 324 and the inner wall of the pin gear ring 32 to meet the structural strength of the pin gear ring 32 itself. In the present application, the distance between the axis of the pin hole 324 and the inner wall of the pin gear ring 32 is preferably set to 1 / 5 of the diameter of the pin hole 324.

[0096] In the embodiment of the present application, the pin shaft 323 is configured as a stepped shaft, which has the advantages of simple structure, low cost, strong load capacity and long service life.

[0097] like Figure 2 and Fig.10 As shown, in the embodiment of the present application, a planetary wheel outer ring lifting and stopping device is disclosed, including: a lifting mechanism 5 for driving the planetary wheel outer ring to move in a vertical direction, and a stopping mechanism 6 for causing the lifting mechanism 5 to instantly stop lifting the planetary wheel outer ring.

[0098] In the embodiment of the present application, a planetary wheel outer ring lifting and flashing stop device is disclosed. The planetary wheel outer ring lifting and flashing stop devices are arranged in multiples. The lifting mechanism 5 in each planetary wheel outer ring lifting and flashing stop device simultaneously provides a lifting or lowering force to the planetary wheel outer ring, thereby driving the seat plate 103, the planetary wheel outer ring belt transmission device and the planetary wheel outer ring raceway device to rise or fall, and the flashing stop mechanism 6 can instantly block the force provided by the lifting mechanism 5 to the planetary wheel outer ring, thereby multiple lifting mechanisms 5 can maintain a consistent lifting height. The device has the advantages of low cost, small space occupation and easy installation.

[0099] like Figure 2 and Fig.10As shown, in the embodiment of the present application, the lifting mechanism 5 includes:

[0100] A driving device 51, for providing rotational power;

[0101] The wire shaft 52 is arranged in the vertical direction. The driving device 51 drives the wire shaft 52 to rotate. The wire shaft 52 is used to transmit the rotational power. The circumferential side wall of the top of the wire shaft 52 is processed with a thread structure.

[0102] The nut 53 is threadedly connected to the top of the thread shaft 52. The nut 53 can be moved in the vertical direction by rotating the thread shaft 52. The nut 53 is used to drive the outer ring of the planetary wheel to rise and fall.

[0103] In the embodiment of the present application, a connecting plate 531 is provided between each nut 53 and the seat plate 103, and the connecting plate 531 is connected and fixed to the nut 53 and the seat plate 103 by screws, respectively. It is worth noting that this connection method is not the only choice, and it can also be fixed by welding, pasting, clamping and other methods. In terms of the driving device 51, an ordinary motor can be used as a power source, such as a stepping motor, which can effectively save manufacturing costs. When the height of the outer ring of the planetary wheel needs to be adjusted, the driving device 51 is started, and the driving device 51 drives the wire shaft 52 to rotate. Since the nut 53 and the seat plate 103 are relatively fixed, and the nut 53 and the wire shaft 52 are threadedly connected, the nut 53 can move along the length direction of the wire shaft 52 under the action of the rotation of the wire shaft 52. Thereby, the seat plate 103, the outer ring of the planetary wheel belt transmission device and the outer ring of the planetary wheel raceway device are adjusted to rise or fall.

[0104] like Fig.10 and Fig.11 As shown, in the embodiment of the present application, the flash stop mechanism 6 includes:

[0105] A clamping structure 7 is provided between the movable clamping member 61 and the bottom of the thread shaft 52, which enables the movable clamping member 61 to slide along the length direction of the thread shaft 52 but cannot rotate relatively in the horizontal direction;

[0106] The fixed clamping member 62 is located above the movable clamping member 61 and can be clamped with the movable clamping member 61 so that the two are relatively fixed. The fixed clamping member 62 is always in a fixed state.

[0107] The transmission clamping member 63 is located below the movable clamping member 61 and can be clamped with the movable clamping member 61 so that the two are relatively fixed, and the driving device 51 drives the movable clamping member 61 to rotate;

[0108] The displacement device 64 is used to drive the movable clamping part 61 to rise or fall. When the driving device 51 needs to drive the wire shaft 52 to rotate, the displacement device 64 drives the movable clamping part 61 to fall, so that the movable clamping part 61 is clamped and fixed with the transmission clamping part 63; when the wire shaft 52 needs to stop suddenly, the displacement device 64 drives the movable clamping part 61 to rise, so that the movable clamping part 61 is clamped and fixed with the fixed clamping part 62.

[0109] The servo motor used in the prior art has high control accuracy and fast response speed (can achieve the effect of emergency stop), while the stepper motor does not have this effect. In the embodiment of the present application, a stepper motor is used as the driving device 51. When the outer ring of the planetary wheel is adjusted, the displacement device 64 drives the movable clamping member 61 to move downward, so that the movable clamping member 61 is clamped and fixed with the transmission clamping member 63. At this time, the driving device 51 drives the transmission clamping member 63 to rotate, which can drive the movable clamping member 61 to rotate together. The movable clamping member 61 can drive the wire shaft 52 to rotate through the clamping structure 7. When the lifting mechanism 5 needs to be stopped, the displacement device 64 drives the movable clamping member 61 to rise rapidly, so that the movable clamping member 61 is clamped and fixed with the fixed clamping member 62. Since the fixed clamping member 62 is always in a fixed state, the movable clamping member 61 instantly reaches a fixed state after being clamped with the fixed clamping member 62, and the transmission clamping member 63 continues to rotate, which will not affect the movable clamping member 61. The movable clamping member 61 stops the rotation of the wire shaft 52 through the clamping structure 7. After the driving device 51 stops outputting the rotational power to the transmission clamping member 63, the transmission clamping member 63 still keeps rotating under the action of inertia, and the above-mentioned stop mechanism 6 can make multiple lifting mechanisms 5 achieve the effect of stopping the lifting work instantly at the same time. Therefore, by adopting the structure of the stepping motor and the stop mechanism 6, the effect of high control accuracy and fast response speed is also achieved to ensure the stability of the lifting of the outer ring drive system.

[0110] In the embodiment of the present application, in order to ensure that the flash stop mechanism 6 can stop the lifting mechanism 5 from lifting instantly, the distance between the movable clamp 61 and the fixed clamp 62 and the transmission clamp 63 is precisely controlled. Specifically, the distance from the top of the movable clamp 61 to the bottom of the fixed clamp 62, and from the bottom of the movable clamp 61 to the top of the transmission clamp 63 are strictly controlled within a range of less than 0.1 mm. The control of this distance enables the movable clamp 61 to move quickly and accurately from the transmission clamp 63 to the fixed clamp 62, thereby achieving the effect of instantaneous stopping, and meeting the strict requirements for high precision and high stability. It is worth noting that this requirement is not restrictive.

[0111] In the embodiments of the present application, no special restrictions are imposed on the specific structures of the movable clamping member 61, the fixed clamping member 62, and the transmission clamping member 63. For example, the movable clamping member 61 may adopt a bump structure with protrusions on the upper and lower sides, while the fixed clamping member 62 and the transmission clamping member 63 may adopt a groove structure adapted to the bumps. There are also no special restrictions on the displacement device 64. As long as the displacement device 64 can drive the movable clamping member 61 to achieve precise movement in the vertical direction, the requirements can be met. For example, driving methods such as cylinders and linear motors can be used as preferred solutions for the displacement device 64.

[0112] like Fig.11 and Fig.12 As shown, in the embodiment of the present application, the electromagnetic principle is used to achieve precise adjustment of the lifting and lowering of the movable clamping member 61. Specifically, the displacement device 64 includes:

[0113] The elastic component 641 has elastic properties and can drive the movable clamping member 61 to move upward, so that the movable clamping member 61 is clamped and fixed with the fixed clamping member 62;

[0114] The permanent magnet ring 642 has magnetic properties and surrounds and is fixed to the circumferential outer wall of the movable clamping member 61;

[0115] The coil ring 643 is connected to the power supply and surrounds the outer side of the permanent magnet ring 642. When powered on, it can produce a magnetic pole reaction with the permanent magnet ring 642, so that the permanent magnet ring 642 and the movable clamping member 61 overcome the elastic force of the elastic component 641 and move downward together, so that the movable clamping member 61 is clamped and fixed with the transmission clamping member 63.

[0116] like Fig.14 As shown, in the embodiment of the present application, the permanent magnet ring 642 is configured as a plurality of magnetic columns 6421, and the circumferential side wall of the movable clamping member 61 is provided with a plurality of plug-in slots 612 for plugging and matching with the magnetic columns 6421 in the vertical direction, and the magnetic columns 6421 plug-in slots 612 correspond to each other and are inserted into the plug-in slots 612. The permanent magnet ring 642 and the coil ring 643 are kept in a non-contact state, and when the outer ring of the planetary wheel needs to be raised and lowered, the coil ring 643 in each displacement device 64 is energized at the same time through the power supply, and a magnetic pole reaction is generated between the coil ring 643 and the permanent magnet ring 642, so that the permanent magnet ring 642 overcomes the elastic force of the elastic component 641 and drives the movable clamping member 61 to move downward, so that the movable clamping member 61 is clamped and fixed with the transmission clamping member 63, and then the driving device 51 is started to perform the lifting work.

[0117] When it is necessary to stop the lifting work, cut off the power supply to the coil ring 643. At this time, the magnetic pole reaction between the coil ring 643 and the permanent magnet ring 642 disappears instantly, and the elastic component 641 releases the elastic force, so that the movable clamping part 61 is quickly clamped and fixed with the fixed clamping part 62, so that the movable clamping part 61 and the wire shaft 52 can stop rotating instantly, and then the nut 53 stops lifting instantly, achieving the effect of flash stop.

[0118] Through the above technical scheme, the embodiments of the present application have the following significant advantages: first, the structure occupies a small space, which not only saves the installation space of the equipment, but also improves the compactness and portability of the equipment; second, the cost is low, and the maintenance cost of the equipment is reduced by adopting a non-contact drive scheme; third, it is easy to install, simplifies the installation process of the equipment, and improves the installation efficiency of the equipment; finally, it is sensitive to response. Through the electromagnetic principle, the equipment can respond quickly during the adjustment and stop process, meeting the strict requirements of industrial production for high precision and high stability.

[0119] In the embodiment of the present application, the clamping structure 7 includes a spline sleeve 71 and a spline shaft 72, one of which is fixedly connected to the bottom of the wire shaft 52, and the other is fixedly connected to the top of the movable clamping member 61. The spline shaft 72 is inserted into the spline sleeve 71 along the axial direction of the spline sleeve 71, and the spline shaft 72 can be slidably connected with the spline sleeve 71 along its own axial direction, and the two cannot rotate relative to each other, that is, the two can slide freely in the axial direction but are limited in rotation. It is understandable that the clamping structure 7 is not limited to this, as long as the two can slide relative to each other in the length direction of the wire shaft 52, and cannot rotate relative to each other in the horizontal direction. In specific implementation, the top of the spline shaft 72 is fixed to the bottom of the wire shaft 52 along the length direction of the wire shaft 52, the spline sleeve 71 is located at the center of the top of the movable clamping member 61 and is fixedly connected to the movable clamping member 61, and the spline sleeve 71 passes through the fixed clamping member 62 and is rotatably connected to the fixed clamping member 62.

[0120] like Fig.12 and Fig.13 As shown, in the embodiment of the present application, the elastic component 641 does not impose special restrictions on the specific structure of the elastic component 641. Only one or more springs 6414 can be used as the elastic component 641. The installation position can be either the bottom of the movable clamping part 61 or the top of the movable clamping part. When the movable clamping part 61 is clamped and fixed with the transmission clamping part 63, the spring 6414 component can be in a stretched state or in a compressed state. When the power is off, the spring 6414 component restores its original shape to drive the movable clamping part 61 to move upward.

[0121] In the embodiment of the present application, in order to ensure that the elastic component 641 has good stability when driving the movable clamping member 61 to move upward, the elastic component 641 includes a pull rod 6411, a stopper 6412, a sliding block 6413 and a spring 6414. This not only ensures the stability of the movable clamping member 61 during movement, but also effectively improves the reliability and durability of the overall structure.

[0122] In the embodiment of the present application, a cavity 611 is provided inside the movable clamping member 61, and the cavity 611 is located below and communicated with the spline sleeve 71. The stopper 6412 is placed in the cavity 611 and is connected to the movable clamping member 61 in the vertical direction. Specifically, the stopper 6412 adopts a multi-step ladder structure, and it is worth noting that the area of ​​the upper surface of the stopper 6412 is larger than the area of ​​the internal cross section of the spline sleeve 71.

[0123] In the embodiment of the present application, the pull rod 6411 is disposed in the wire shaft 52 along the length direction of the wire shaft 52, and the pull rod 6411 can slide along the length direction of the wire shaft 52 with the wire shaft 52. The bottom of the pull rod 6411 passes through the spline shaft 72 and the spline sleeve 71 and then extends into the cavity 611 and is fixedly connected to the stopper 6412.

[0124] A sliding cavity 521 is provided at the top of the thread shaft 52 along the vertical direction. The sliding block 6413 is located in the sliding cavity 521 and can be slidably connected to the thread shaft 52 along the vertical direction.

[0125] A receiving chamber 522 is provided at the top of the wire shaft 52 in the vertical direction. The receiving chamber 522 is located directly below the sliding chamber 521 and the two are interconnected. The spring 6414 is located in the receiving chamber 522, and the top of the spring 6414 extends into the sliding chamber 521 and is fixedly connected to the sliding block 6413. The bottom of the spring 6414 is fixedly connected to the inner bottom wall of the wire shaft 52 at the receiving chamber 522. This structure not only ensures the stability of the spring 6414, but also improves the stability of the movable clamping member 61 when it moves; it also provides elastic restoring force for the up and down movement of the sliding block 6413, so that the structure can be reused.

[0126] The top of the pull rod 6411 passes through the inside of the spring 6414 and is threadedly connected to the sliding block 6413, and the bottom of the pull rod 6411 extends into the cavity 611 and is threadedly connected to the stopper 6412. The threaded connection method is not only convenient for the staff to assemble, but also ensures the stability and reliability of the entire structure. Of course, this is not restrictive, and the top and bottom of the pull rod 6411 can also be fixedly connected to the sliding block 6413 and the stopper 6412 respectively by welding, clamping, gluing, etc.

[0127] In the embodiment of the present application, when the movable clamping member 61 is clamped with the transmission clamping member 63, the spring 6414 is in a deformed state and accumulates elastic potential energy. Once the coil ring 643 is powered off, the magnetic pole interaction between the coil ring 643 and the permanent magnet ring 642 disappears immediately, and the spring 6414 quickly releases the elastic potential energy stored inside. This release process drives the movable clamping member 61 to move upward smoothly through the linkage mechanism of the sliding block 6413, the pull rod 6411 and the stopper 6412 until it is accurately docked with the fixed clamping member 62 and firmly clamped and fixed, ensuring the stability and reliability of the entire device in the non-powered state. This structure cleverly utilizes the elastic force characteristics of the spring 6414, realizes the automatic resetting and clamping between the movable clamping member 61 and the fixed clamping member 62, and improves the automation and ease of use of the device.

[0128] In the preferred solution of the embodiment of the present application, in order to ensure that the movable clamping part 61 can be accurately aligned and smoothly clamped and fixed with the fixed clamping part 62 and the transmission clamping part 63. Therefore, the movable clamping part 61 is set as a double-end face gear disk, and the upper and lower surfaces of the double-end face gear disk both have a tooth structure, the fixed clamping part 62 is set as an upper end face gear disk, and the lower surface of the upper end face gear disk has a tooth structure, and the transmission clamping part 63 is set as a lower end face gear disk, and the upper surface of the lower end face gear disk has a tooth structure. It is worth noting that the tooth tip parts of the tooth structure in the double end face gear disk, the upper end face gear disk and the lower end face gear disk all adopt a conical structure, and the tooth tip adopts a conical structure. This detail is crucial. With this structure, since all the tooth structures are conical in shape, and both the double-end face gear disc and the lower end face gear disc have the ability to rotate, during the clamping process, the tooth tips will not abut against each other, ensuring that the double-end face gear disc can smoothly and accurately mesh with the upper end face gear disc and the lower end face gear disc, thereby achieving a stable clamping and fixing effect. Specifically, the double-end face gear disc can form a firm clamping connection with the lower surface of the upper end face gear disc through its entire upper surface; at the same time, the lower surface of the double-end face gear disc can also form a tight clamping connection with the upper surface of the lower end face gear disc. This structure not only simplifies the clamping process, but also significantly improves the stability and reliability of the double-end face gear disc when it is clamped with the upper end face gear disc and the lower end face gear disc.

[0129] In the embodiment of the present application, the planetary wheel outer ring lifting and stopping device also includes a housing 8, which is a shell-shaped rotating body, and the lifting mechanism 5 and the stopping mechanism 6 are both installed in the housing 8, and the fixed clamping member 62 is fixedly connected to the inside of the housing 8. In order to further improve the stability of the thread shaft 52 during rotation, the thread shaft 52 is provided with a connecting portion 523 above the fixed clamping member 62, and the connecting portion 523 adopts an annular structure and is integrated with the thread shaft 52. Bearings are installed between the top of the connecting portion 523 and the housing 8 and between the bottom of the connecting portion 523 and the fixed clamping member 62. In the present application, the bearing installed between the top of the connecting portion 523 and the housing 8 is a deep groove ball bearing, which has radial load capacity and low friction characteristics, and provides a guarantee for the smooth rotation of the thread shaft 52; the bearing installed between the connecting portion 523 and the top of the fixed clamping member 62 is a thrust bearing, which can effectively withstand axial loads, ensuring the stability and reliability of the thread shaft 52 when it is subjected to axial force. The above description is merely an exemplary description, and there is no special limitation on the bearings installed at the top and bottom of the connecting portion 523 .

[0130] In the embodiment of the present application, in order to improve the stability of the drive device 51 when outputting rotational power, the drive device 51 is set as a motor, and a motor seat 9 is set between the motor and the housing 8. A sleeve shaft 91 is rotatably connected in the motor seat 9, and the output shaft of the motor passes through the sleeve shaft 91 and is fixedly connected to the sleeve shaft 91. A boss 911 of an annular structure is fixed on the circumferential outer wall of the sleeve shaft 91. Bearings are installed on the upper and lower surfaces of the boss 911. When the sleeve shaft 91 rotates, the bearing forms a low-friction interface with the motor seat 9, which significantly reduces the friction force, thereby improving the smoothness and stability of the output shaft rotation. In the present application, the bearing installed on the upper surface of the boss 911 is a deep groove ball bearing, and the bearing installed on the lower surface of the boss 911 is a thrust bearing, which is of course not restrictive.

[0131] Furthermore, a gland 92 is sleeved on the outer side of the bottom of the sleeve shaft 91, and a labyrinth sealing groove is provided between the gland 92 and the sleeve shaft 91. By strengthening the sealing between the two, impurities are not easy to enter the motor base 9, thereby avoiding the obstruction of the output shaft rotation caused by impurities. Of course, the use of a labyrinth sealing groove is only an exemplary description, and the present application is not limited to this kind of sealing method. Other types of sealing methods are also applicable to this scenario to meet the sealing requirements under different working conditions. In the installation between the motor base 9 and the housing 8, and in the fixed connection between the gland 92 and the motor base 9, screws are used for fixing to ensure a firm connection between the components. However, this fixing method is also not restrictive.

[0132] In the embodiment of the present application, the geometric principle of three points determining a plane is followed, and the planetary wheel outer ring lifting and stopping device ensures that at least three groups are provided. It can be understood that when the volume of the planetary wheel outer ring increases, in order to ensure that it can be driven to rise and fall smoothly and efficiently, the number of corresponding lifting mechanisms 5 should also be increased accordingly to ensure the stability and reliability of the overall structure.

[0133] Furthermore, in the embodiment of the present application, the planetary wheel outer ring lifting and stopping devices are arranged in four groups, and the four groups of planetary wheel outer ring lifting and stopping devices are arranged at even intervals in the circumferential direction below the seat plate 103. A more stable support structure is formed. By increasing the number of devices, not only the load-bearing capacity is improved, but also the stability and reliability of the system are significantly enhanced, ensuring that when driving the large-volume planetary wheel outer ring, a more stable and precise lifting control can be achieved.

[0134] Those skilled in the art will easily think of other embodiments of the present application after considering the specification and practicing the embodiments of the present application. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that the present application does not apply for. The specification and embodiments are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the appended claims.

Claims

1. An outer ring drive system, characterized in that: It includes a planetary wheel outer ring raceway device and a planetary wheel outer ring belt transmission device; The planetary wheel outer ring raceway device comprises a pin gear ring (32) and an outer ring seat (4); wherein: The pin gear ring (32) is disposed around the outer side of the machine tool worktable (101), and the pin gear ring (32) rotates relative to the machine tool worktable (101) with the center of the circle of the machine tool worktable (101) as the rotation center; The outer ring seat (4) is sleeved on the outer side of the machine tool worktable (101), and the pin gear ring (32) rotates on the top of the outer ring seat (4); The lower surface of the pin gear ring (32) is provided with an upper raceway groove (321) of an annular structure, and the upper surface of the outer ring seat (4) is provided with a lower raceway groove (41) of an annular structure. The upper raceway groove (321) and the lower raceway groove (41) are superimposed to form an annular raceway, and a plurality of balls (42) are installed in the annular raceway, and the balls (42) can roll in the annular raceway; The top wall of the cross section of the upper rolling groove (321) is set to be a semicircle, and the side wall on one side of the upper rolling groove (321) is set to be a vertical plane; the bottom wall of the cross section of the lower rolling groove (41) is set to be a semicircle, and the side wall on one side of the lower rolling groove (41) is set to be a vertical plane, and the vertical plane of the upper rolling groove (321) and the vertical plane of the lower rolling groove (41) are arranged on both sides of the annular rolling groove opposite to each other; A sealing structure is provided between the outer ring seat (4) and the pin gear ring (32) for sealing the gap therebetween, and the sealing structure is located on the inner side of the annular raceway; The sealing structure comprises a first sealing member (322) and a second sealing member (43), wherein the first sealing member (322) is fixedly connected to the top of the outer ring seat (4), and the second sealing member (43) is fixedly connected to the bottom of the pin gear ring (32), the first sealing member (322) and the second sealing member (43) are both labyrinth sealing grooves, and the first sealing member (322) and the second sealing member (43) are plug-fitted to each other; The planetary wheel outer ring belt transmission device comprises: a driving mechanism (1), a transmission mechanism (2) and a driven mechanism (3); wherein: The active mechanism (1) is used to provide rotational power; The transmission mechanism (2) comprises a driving wheel (21), a driven wheel (22) and a double-sided synchronous belt (23); the driving mechanism (1) is used to drive the driving wheel (21) to rotate; the driven wheel (22) is located on a horizontal side of the driving wheel (21); the inner side of the double-sided synchronous belt (23) has an internal tooth structure, and the outer side has an external tooth structure; the double-sided synchronous belt (23) surrounds the driving wheel (21) and the driven wheel (22); the internal tooth structure of the double-sided synchronous belt (23) is meshed with the driving wheel (21) and the driven wheel (22); The driven mechanism (3) comprises a large-circle synchronous belt (31), the circumferential outer wall of the large-circle synchronous belt (31) has a belt tooth structure, the belt tooth structure of the large-circle synchronous belt (31) is meshed with the outer tooth structure of the double-sided synchronous belt (23), and the large-circle synchronous belt (31) is sleeved on the outer side of the pin gear ring (32) and fixedly connected to the pin gear ring (32).

2. An outer ring drive system according to claim 1, characterized in that: The pin gear ring (32) comprises a gear ring and a plurality of pin shafts (323), wherein the plurality of pin shafts (323) are fixed relative to the inner side of the gear ring in a circumferentially evenly distributed manner.

3. An outer ring drive system according to claim 2, characterized in that: A plurality of pin holes (324) are provided on the upper surface of the gear ring in the vertical direction, the pin shafts (323) correspond to the pin holes (324) one by one, and the pin shafts (323) are plug-fitted with the pin holes (324).

4. An outer ring drive system according to claim 3, characterized in that: The gear ring is provided with a gear ring inner wall (325) below the pin hole (324), and the distance between the axis of the pin hole (324) and the gear ring inner wall (325) is within a range of greater than 0 and less than 2 / 5 of the diameter of the pin hole (324).

5. The outer ring drive system according to claim 1, characterized in that: The outer tooth structure of the double-sided synchronous belt (23) and the belt tooth structure of the large-circle synchronous belt (31) are conjugate synchronous belt teeth.

6. An outer ring drive system according to claim 5, characterized in that: The large-circle synchronous belt (31) is a closed-loop synchronous belt; or, The large-circle synchronous belt (31) has one or more notches, the length of which should be an integer multiple of the pitch of the external tooth structure in the double-sided synchronous belt (23), and the length of which needs to be smaller than the length of the double-sided synchronous belt (23) that can mesh with the large-circle synchronous belt (31).

7. An outer ring drive system according to any one of claims 5 or 6, characterized in that: The side of the double-sided synchronous belt (23) close to the large-circle synchronous belt (31) is arc-shaped, and the outer tooth structure of the arc-shaped side of the double-sided synchronous belt (23) is completely meshed with the belt tooth structure of the large-circle synchronous belt (31).

8. The outer ring drive system according to claim 1, characterized in that: It also includes a planetary wheel outer ring lifting and stopping device.

9. An outer ring drive system according to claim 8, characterized in that: The planetary wheel outer ring lifting and stopping device comprises a lifting mechanism (5) for driving the planetary wheel outer ring to move in a vertical direction, and a stopping mechanism (6) for causing the lifting mechanism (5) to instantly stop lifting the planetary wheel outer ring; wherein the lifting mechanism (5) comprises: A driving device (51) for providing rotational power; The thread shaft (52) is arranged in a vertical direction, the driving device (51) drives the thread shaft (52) to rotate, the thread shaft (52) is used to transmit the rotational power, and the circumferential side wall of the top of the thread shaft (52) is processed with a thread structure; A nut (53) is threadedly connected to the top of the thread shaft (52), and the nut (53) can be moved in a vertical direction by rotating the thread shaft (52). The nut (53) is used to drive the outer ring of the planetary wheel to rise and fall; The flash stop mechanism (6) comprises: A movable clamping member (61) is provided with a clamping structure (7) between the movable clamping member (61) and the bottom of the thread shaft (52), which enables the movable clamping member (61) to slide along the length direction of the thread shaft (52) but cannot rotate relatively in the horizontal direction; A fixed clamping member (62) is located above the movable clamping member (61) and can be clamped with the movable clamping member (61) so that the two are relatively fixed, and the fixed clamping member (62) is always in a fixed state; The transmission clamping member (63) is located below the movable clamping member (61) and can be clamped with the movable clamping member (61) so that the two are relatively fixed, and the driving device (51) drives the transmission clamping member (63) to rotate; The displacement device (64) is used for driving the movable clamping part (61) to rise or fall. When it is necessary to make the driving device (51) drive the thread shaft (52) to rotate, the displacement device (64) drives the movable clamping part (61) to fall, so that the movable clamping part (61) and the transmission clamping part (63) are clamped and fixed; when it is necessary to make the thread shaft (52) stop suddenly, the displacement device (64) drives the movable clamping part (61) to rise, so that the movable clamping part (61) and the fixed clamping part (62) are clamped and fixed.

10. An outer ring drive system according to claim 9, characterized in that: The displacement device (64) comprises: The elastic component (641) has elastic properties and can drive the movable clamping member (61) to move upward, so that the movable clamping member (61) and the fixed clamping member (62) are clamped and fixed; A permanent magnetic ring (642) having magnetic properties, surrounding and fixedly arranged on the circumferential outer wall of the movable clamping member (61); The coil ring (643) is electrically connected to a power source and surrounds the outer side of the permanent magnet ring (642). When energized, it can generate a magnetic pole reaction with the permanent magnet ring (642), so that the permanent magnet ring (642) and the movable clamping member (61) overcome the elastic force of the elastic component (641) and move downward together, so that the movable clamping member (61) and the transmission clamping member (63) are clamped and fixed.

11. An outer ring drive system according to claim 10, characterized in that: The clamping structure (7) comprises a spline sleeve (71) and a spline shaft (72), wherein the spline shaft (72) is slidably adapted to the spline sleeve (71), one of which is fixedly arranged at the bottom of the thread shaft (52) along the axial direction of the thread shaft (52), and the other is fixedly arranged at the center of the top of the movable clamping member (61).

12. An outer ring drive system according to claim 11, characterized in that: The spline sleeve (71) is fixedly arranged at the center of the top of the movable clamping member (61), the spline shaft (72) is fixedly arranged at the bottom of the thread shaft (52) along the vertical direction, the spline sleeve (71) passes through the fixed clamping member (62) and is rotatably connected to the fixed clamping member (62), and the spline shaft (72) is inserted into the interior of the spline sleeve (71); the elastic component (641) comprises: A pull rod (6411) is vertically inserted into the interior of the wire shaft (52) and is slidably connected to the wire shaft (52) in the vertical direction; A stopper (6412), a cavity (611) is provided inside the movable clamping member (61), the cavity (611) is located below the spline sleeve (71), the stopper (6412) is located in the cavity (611) and is clamped with the movable clamping member (61) in the vertical direction, and the bottom of the pull rod (6411) passes through the spline sleeve (71) and extends into the cavity (611) to be fixedly connected with the stopper (6412); A sliding block (6413), wherein a sliding cavity (521) is provided at the top of the wire shaft (52) in the vertical direction, wherein the sliding block (6413) is located in the sliding cavity (521) and is slidably connected to the wire shaft (52) in the vertical direction, and the top of the pull rod (6411) extends into the sliding cavity (521) and is fixedly connected to the sliding block (6413); Spring (6414), the wire shaft (52) is provided with a storage chamber (522) in the vertical direction below the sliding chamber (521), the sliding chamber (521) is communicated with the storage chamber (522), the spring (6414) is located in the storage chamber (522) and surrounds the outer side of the pull rod (6411), the top of the spring (6414) is fixedly connected to the sliding block (6413), and the bottom of the spring (6414) is fixedly connected to the inner bottom wall of the storage chamber (522).

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