Micro-nano metal coil preparation method based on combined template and auxiliary device

Through the preparation method and auxiliary device of micro-nano metal coil based on combined templates, combined with laser, focused ion beam or lithography technology, the problems of uneven coating and positioning accuracy in the existing process are solved, and the rapid and efficient micro-nano metal coils are achieved. Preparation and production of complex shapes to meet diverse application needs.

CN119082674APending Publication Date: 2024-12-06GUIZHOU POWER GRID CO LTD
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Patent Information

Application Number
CN202410944952.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-07-15
Publication Date
2024-12-06

AI Technical Summary

Technical Problem

The existing micro-nano metal coil preparation process has problems such as uneven coating, low production efficiency, high equipment cost and complex operation, especially in the process of multi-process superposition and fusion preparation, it is difficult to ensure positioning accuracy and base stability.

Method used

Using the micro-nano metal coil preparation method based on the combined template, the template with two partial coil structures is prepared for evaporation, and the positioning and driving mechanism in the auxiliary device are used to ensure a high-precision evaporation process, combined with laser, focusing ion beam or The coil structure is processed by lithography technology, and a single-crystal silicon substrate and silver-segment metal material are selected after single-side polishing.

Benefits of technology

It realizes the rapid and efficient preparation of micro-nano metal coils, shortens the production cycle, can prepare products with complex shapes and structures, meets the needs of diverse applications, and ensures high accuracy and efficiency of the evaporation process through auxiliary devices.

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Abstract

The invention relates to the technical field of micro-nano metal coil preparation, in particular to a micro-nano metal coil preparation method based on a combined template and an auxiliary device. The coil structure is installed on an evaporation substrate through a substrate, and the evaporation substrate is placed on an auxiliary device; evaporating the coil structure; after evaporation is completed, the substrate is taken out, a coil formed on the substrate through evaporation is detected, the integrity of the coil is verified, the coil structure is obtained through machining on a template piece through one machining method of laser, focused ion beam or photoetching, and monocrystalline silicon with the single face polished is selected as the substrate; according to the manufacturing method, the combined template electron beam evaporation technology is adopted, rapid and efficient manufacturing of the micro-nano metal coil can be achieved, the production period is shortened, the micro-nano metal coil with the complex shape and structure can be manufactured by dividing a plurality of templates, and diversified application requirements are met.
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Description

Technical Field

[0001] The invention relates to the technical field of micro-nano metal coil preparation, in particular to a micro-nano metal coil preparation method based on a combined template and an auxiliary device. Background Art

[0002] With the continuous development and application of science and technology, the manufacture of micro-nanoscale structures has become a hot topic. As one of the most basic components in microsystems, micro-nanoscale structures have been widely used and studied in many fields such as microelectronics, computers, optics, magnetism, and mechanics.

[0003] At present, the manufacturing processes of micro-nano scale metal structures are mainly chemical deposition, electroplating, evaporation, laser cutting, electron beam lithography, etc. Among them, chemical deposition can produce metal films and can produce crystals with complex composition and structure such as mixed crystals, but the reaction conditions are strict when preparing metal structures, and the surface quality is unstable, which affects the stability and consistency of the product. Electroplating metal structures have the advantages of low cost, easy operation, and high production efficiency, but often due to uneven current density distribution, it may lead to uneven coating, affecting the performance of the metal structure. The process of preparing micro-nano metal structures by evaporation is relatively simple and fast, which is suitable for batch production and can improve production efficiency, but the equipment is expensive and consumes a lot of energy, which may not be economical for small-scale production. Laser cutting has high precision and good repeatability, and is suitable for a variety of materials such as metals, non-metals, plastics, and wood, but the operation requires higher power energy and has large energy loss during operation. Electron beam lithography can be used to manufacture complex structures and can be used for various materials, but the manufacturing process is complicated, the equipment cost is high, and the processing speed is slow. These manufacturing processes have their own characteristics, but using a single process to prepare micro-nano metal coils often encounters various problems. Therefore, it is a feasible method to adopt a multi-process superposition fusion to prepare micro-nano metal coils.

[0004] When preparing micro-nano metal coils, it is necessary to evaporate the template on the substrate. Since the template has a certain unqualified rate, it is troublesome to take out the evaporated template and then put in the new template when evaporating multiple different templates. In addition, the positioning accuracy is difficult to ensure that the base does not move during use. Therefore, we designed a micro-nano metal coil preparation method and auxiliary device based on a combined template. Summary of the invention

[0005] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0006] In view of the problems of the micro-nano metal coil preparation method and auxiliary device based on the combined template mentioned above or in the prior art, the present invention is proposed.

[0007] Therefore, the object of the present invention is to provide a method and auxiliary device for preparing a micro-nano metal coil based on a combined template.

[0008] In order to solve the above technical problems, the present invention provides the following technical solutions: prepare two templates with partial coil structures; install the template and the substrate (the template is placed on the substrate) on a vapor deposition substrate, and place the vapor deposition substrate on an auxiliary device (M); perform vapor deposition on the template;

[0009] After the evaporation is completed, the substrate is taken out and the coil formed by evaporation on the substrate is inspected to verify its integrity.

[0010] As a preferred solution of the method for preparing a micro-nano metal coil based on a combined template of the present invention, the coil structure is obtained by processing on a template sheet using one of the processing methods of laser, focused ion beam or photolithography.

[0011] As a preferred solution of the method for preparing micro-nano metal coils based on a combined template of the present invention, wherein: the substrate is single-sided polished single-crystalline silicon; the metal material used for evaporation is silver segment.

[0012] The beneficial effects of the method for preparing micro-nano metal coils based on a combined template of the present invention are as follows: the present invention can realize the rapid and efficient preparation of micro-nano metal coils by adopting the combined template electron beam evaporation technology, shortening the production cycle, and can prepare micro-nano metal coils with complex shapes and structures by dividing multiple templates, thereby optimizing product design and meeting diverse application needs.

[0013] In order to solve the above technical problems, an auxiliary device is provided, which includes a positioning mechanism, a driving mechanism arranged at the bottom of the positioning mechanism, and a containing mechanism arranged on the driving mechanism; the positioning mechanism includes a mounting cover, a plurality of ring bars are arranged on the top of the mounting cover, and a speed reducer is arranged on the top of the ring bars; the driving mechanism includes a motor arranged at the bottom of the positioning mechanism, the driving end of the motor passes through the mounting cover and a contact frame is arranged between the motor and the positioning mechanism, a plurality of inclined blocks are arranged on the periphery of the interference frame, and the inclined blocks are adapted to the positioning mechanism.

[0014] As a preferred solution of the auxiliary device of the present invention, the positioning mechanism further comprises a rotating ring arranged on the top of the mounting cover, a plurality of annular grooves are arranged inside the rotating ring, a mounting hole is arranged on one side of the annular groove, and a blind hole is arranged on the mounting hole.

[0015] As a preferred solution of the auxiliary device of the present invention, the positioning mechanism also includes a slide arranged on the mounting cover, a bracket is provided at the bottom of the slide, the bottom of the bracket is connected to the inner wall of the mounting cover through an elastic belt, an inclined groove is provided on the outer wall of the bracket, an inclined plate is attached to the inclined groove, and a movable frame is provided between the inclined plate and the inclined block.

[0016] As a preferred solution of the auxiliary device of the present invention, wherein: the bracket is slidably connected to the top of the inner wall of the installation cover, the movable frame is slidably connected to the installation cover, and the inclined plate is adapted to the inclined groove.

[0017] As a preferred solution of the auxiliary device of the present invention, the containing mechanism includes a rotating frame arranged on a rotating ring, a containing groove arranged on the peripheral side of the rotating frame, the rotating frame and the corresponding ring strip are provided with a bottom groove, the inner wall of the bottom groove is provided with a rubber pad layer, and a positioning mark is provided on the top of the mounting cover corresponding to the containing groove.

[0018] As a preferred solution of the auxiliary device of the present invention, the containing mechanism further comprises a connecting seat arranged on the motor drive shaft, a reset spring is arranged between the connecting seat and the mounting hole, a positioning arc strip is arranged between the connecting seat and the blind hole, and the connecting seat is located inside the annular groove and is slidably connected thereto.

[0019] As a preferred solution of the auxiliary device of the present invention, the blind hole is slidably connected to the positioning arc bar, the cross section of the reset spring is arc-shaped, the positioning arc bar is located inside the reset spring, and the connecting seat is in contact with the inner wall of the rotating frame.

[0020] Beneficial effects of the auxiliary device of the present invention: the setting of the driving mechanism in the present invention can effectively limit the rotating frame, and during the operation, the driving mechanism can effectively drive the positioning mechanism to rotate. The motor in the driving mechanism can effectively drive the rotating frame to rotate at a low speed with high precision, which can ensure the evaporation effect on the workpiece during the operation. The setting of the holding mechanism can better limit the workpiece, and while limiting the workpiece, ensure that the position of the workpiece is located in the output direction of the evaporation generating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative labor.

[0022] Figure 1 Schematic diagram of template 1 for the preparation method of micro-nano metal coils based on combined templates.

[0023] Figure 2 Schematic diagram of template 2 for the preparation method of micro-nano metal coils based on a combined template.

[0024] Figure 3 It is a schematic diagram of the overall structure based on the auxiliary device.

[0025] Figure 4 It is a partial structural schematic diagram based on auxiliary device.

[0026] Figure 5 It is a schematic diagram of the structure of the driving mechanism and the containing mechanism based on the auxiliary device.

[0027] Figure 6 It is a schematic diagram of the internal structure of the containing mechanism based on the auxiliary device.

[0028] Figure 7 It is a cross-sectional view of a holding mechanism based on an auxiliary device.

[0029] Figure 8 for Figure 7 Enlarged view of point A in the middle.

[0030] Fig. 9 Schematic diagram of the positioning mechanism based on the auxiliary device. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0032] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0033] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0034] Example 1, reference Figure 1 to Figure 2, which is the first embodiment of the present invention, provides a method for preparing a micro-nano metal coil based on a combined template, preparing two templates with partial coil structures; the coil structure on the template is processed on the template sheet using one of the processing methods of laser, focused ion beam or photolithography; after the template, substrate and evaporation substrate are installed, the template is evaporated; after the evaporation is completed, the substrate is taken out, and the coil formed by evaporation on the substrate is tested to verify its integrity. The substrate is single-sided polished single crystal silicon; the metal material used for evaporation is silver segment. Specifically;

[0035] S1. The coil structure is processed on a template sheet with a groove pattern corresponding to the desired micro-nano metal coil structure by using one of the methods of laser, focused ion beam or photolithography;

[0036] Two templates were processed in total. Template 1 was processed with 20 separation segments with an angle of 14° with the center of the spiral. Figure 1 ;

[0037] 20 separation segments with a 6° angle to the spiral center are processed on template 2. Figure 2 , and the groove patterns of the two templates have a certain overlap, forming a complete and connected coil structure.

[0038] S2, installing the template and the substrate (the template is placed on the substrate) on the evaporation substrate, and placing the evaporation substrate on the auxiliary device M, the auxiliary device M is located in the electron beam evaporation coating equipment;

[0039] S3. After placing the workpiece into the electron beam evaporation coating equipment, close the door of the electron beam evaporation coating equipment and start vacuum pumping until the air pressure reaches a specified value;

[0040] Silver segments of metal materials were used for evaporation, and the electron beam current was set to 0.2 kA. After the metal evaporation source was heated to an evaporation temperature of 1500 °C, the substrate baffle of the electron beam evaporation coating equipment was opened, and the evaporation source was turned on. At this time, the deposition rate was 20 nm / min, and the evaporation time of template 1 was controlled to be about 5 minutes. After the end, the gun filament was turned off and switched to template 2;

[0041] Repeat the evaporation operation for 5 minutes. After all templates are evaporated, stop evaporation and open the vent valve to return the air pressure of the equipment to atmospheric pressure. After cooling, take it out to complete the preparation of the micro-nano metal coil structure.

[0042] S4. After taking out the coil structure, observe whether the coil structure is complete under a high-resolution microscope, use an AFM atomic force microscope to scan the structure to determine whether the thickness of the micro-nano metal coil structure meets the requirements, and use a conductive test to verify the conductivity of the structure.

[0043] Example 2, reference Figures 3 to 9, which is the second embodiment of the present invention. Different from the previous embodiment, the auxiliary device M includes a positioning mechanism 100, a driving mechanism 200 arranged at the bottom of the positioning mechanism 100, and a containing mechanism 300 arranged on the driving mechanism 200; the positioning mechanism 100 includes a mounting cover 101, a plurality of rings 102 are arranged on the top of the mounting cover 101, and a deceleration plate 103 is arranged on the top of the rings 102; the driving mechanism 200 includes a motor 201 arranged at the bottom of the positioning mechanism 100, a driving end of the motor 201 passes through the mounting cover 101 and a contact frame 202 is arranged between the positioning mechanism 100, a plurality of inclined blocks 203 are arranged on the peripheral side of the contact frame 202, and the inclined blocks 203 are adapted to the positioning mechanism 100.

[0044] Specifically, the setting of the driving mechanism 200 can effectively limit the rotating frame 301. During the operation, the driving mechanism 200 can effectively drive the positioning mechanism 100 to rotate. The motor 201 in the driving mechanism 200 can effectively drive the rotating frame 301 to rotate at a low speed with high precision, which can ensure the evaporation effect of the workpiece during the operation. The setting of the holding mechanism 300 can better limit the workpiece, and while limiting the workpiece, ensure that the position of the workpiece is located in the output direction of the evaporation generating device. The setting of the mounting cover 101 avoids damage to the motor 201 located at the bottom of the mounting cover 101 during the evaporation process, plays a protective role, and protects some components in the positioning mechanism 100 at the same time.

[0045] The positioning mechanism 100 further includes a rotating ring 104 disposed on the top of the mounting cover 101 . A plurality of annular grooves 105 are disposed inside the rotating ring 104 . A mounting hole 106 is disposed on one side of the annular groove 105 . A blind hole 107 is disposed on the mounting hole 106 .

[0046] Preferably, the setting of the rotating ring 104 can effectively redirect the driving force in the motor 201 to the rotating frame 301, and at the same time ensure that a certain distance of the rotating frame 301 is in a limited state during the rotation process. This limited state can effectively ensure the positioning accuracy of the workpiece. The setting of the annular groove 105 can effectively limit the connecting seat 305. The mounting hole 106 is located between the blind hole 107 and the annular groove 105. The number of the annular groove 105 is the same as that of the containing groove 302, and cannot be an odd number.

[0047] The positioning mechanism 100 further includes a slide 108 disposed on the mounting cover 101, a bracket 109 is disposed at the bottom of the slide 108, the bottom of the bracket 109 is connected to the inner wall of the mounting cover 101 through an elastic belt 110, an inclined groove 111 is disposed on the outer wall of the bracket 109, an inclined plate 112 is attached to the inclined groove 111, and a movable frame 113 is disposed between the inclined plate 112 and the inclined block 203. The bracket 109 is slidably connected to the top of the inner wall of the mounting cover 101, the movable frame 113 is slidably connected to the mounting cover 101, and the inclined plate 112 is adapted to the inclined groove 111.

[0048] Furthermore, the slide 108 is made of metal, and the setting of the slide 108 can effectively limit the rotating frame 301, and can effectively limit the workpiece during use. When the rotating frame 301 rotates, the slide 108 limits the rotating frame 301. When limited, the workpiece is in the required position, and the workpiece can be effectively limited to avoid affecting the evaporation effect due to precision problems. The setting of the bracket 109 can effectively drive the slide 108 to rise and fall, and the setting of the elastic belt 110 can effectively drive the slide 108 to reset. The setting of the inclined plate 112 can effectively adapt to the inclined block 203. When the inclined block 203 moves, it can drive the inclined plate 112 to descend. The descending of the inclined plate 112 drives the slide 108 to descend. The descending of the slide 108 eliminates the obstruction of the rotating frame 301, and the rotating frame 301 can continue to rotate.

[0049] The rest of the structure is the same as that of Example 1.

[0050] In summary, the setting of the rotating ring 104 can effectively transfer the driving force in the motor 201 to the rotating frame 301, and at the same time ensure that a certain distance of the rotating frame 301 is in a limited state during the rotation process. This limited state can effectively ensure the position accuracy of the workpiece. The setting of the bracket 109 can effectively drive the slide 108 to rise and fall, the setting of the elastic belt 110 can effectively drive the slide 108 to reset, and the setting of the inclined plate 112 can effectively adapt to the inclined block 203. When the inclined block 203 moves, it can drive the inclined plate 112 to descend.

[0051] Example 3, reference Figures 3 to 9 , which is the third embodiment of the present invention. Different from the previous embodiment, the containing mechanism 300 includes a rotating frame 301 arranged on the rotating ring 104, a containing groove 302 arranged on the peripheral side of the rotating frame 301, the rotating frame 301 and the corresponding ring strip 102 are provided with a bottom groove 303, the inner wall of the bottom groove 303 is provided with a rubber cushion layer, and a positioning mark 304 is provided on the top of the mounting cover 101 corresponding to the containing groove 302.

[0052] Furthermore, the setting of the ring bar 102 can effectively limit the rotating frame 301. There are multiple ring bars 102, and the ring bars 102 are set in a raised shape. The deceleration plate 103 above the ring bar 102 can slow down the rotating frame 301 to avoid the initial velocity being too large and affecting the position of the workpiece. The setting of the resistance frame 202 can effectively drive the inclined block 203 to rotate. The number of inclined blocks 203 and the containing slots 302 are consistent and are both even numbers. The positioning mark 304 is the output end of the evaporation generating device, which can effectively evaporate the workpiece.

[0053] The containing mechanism 300 also includes a connecting seat 305 arranged on the driving shaft of the motor 201, a return spring 306 is provided between the connecting seat 305 and the mounting hole 106, a positioning arc strip 307 is provided between the connecting seat 305 and the blind hole 107, and the connecting seat 305 is located inside the annular groove 105 and is slidably connected thereto.

[0054] Preferably, the setting of the rotating ring 104 can effectively drive the containing groove 302 to rotate. The cross-section of the containing groove 302 is circular. The containing groove 302 is located at the top extension of the rotating frame 301. The setting of the connecting seat 305 can effectively convert the driving force in the motor 201 into a driving force for pushing the reset spring 306. The movement of the reset spring 306 can effectively bring the driving force to the mounting hole 106. After receiving the driving force, the mounting hole 106 drives the rotating ring 104 to rotate. After the rotating ring 104 rotates, it drives the rotating frame 301 to rotate.

[0055] The blind hole 107 is slidably connected to the positioning arc strip 307 . The cross section of the reset spring 306 is arc-shaped. The positioning arc strip 307 is located inside the reset spring 306 . The connecting seat 305 is in contact with the inner wall of the rotating frame 301 .

[0056] The cross section of the blind hole 107 is arc-shaped, the positioning arc strip 307 is made of metal, the return spring 306 is limited by the positioning arc strip 307 when it is contracted, and the setting of the connecting seat 305 can effectively drive the rotating frame 301 to rotate.

[0057] The rest of the structure is the same as that of Example 2.

[0058] When in use, the workpiece is placed in the containing slot 302 of the corresponding rotating frame 301 in sequence, and the motor 201 is started at this time. After starting, the motor 201 drives the rotating frame 301 to rotate. When the rotating frame 301 closest to the evaporation end rotates to a specified position, the other rotating frames 301 corresponding to it are limited by the slide 108. After the slide 108 is limited, the motor 201 continues to rotate for a distance. At this time, the connecting seat 305 drives the return spring 306 to contract, and the rotating frame 301 conflicts with the slide 108. At this time, the motor 201 can be stopped and the evaporation work can be carried out. After the evaporation is completed, the motor 201 is started again. The motor 201 of the machine 201 drives the inclined block 203 in the contact frame 202 to contact the movable frame 113. The movable frame 113 moves and drives the inclined plate 112 to move. The inclined plate 112 pushes the inclined slot 111 during its movement. The inclined slot 111 is pushed and then drops. The dropping of the inclined slot 111 drives the slide 108 to drop. After the slide 108 drops, it drives the elastic belt 110 to stretch. The elastic potential energy is accumulated during the dropping of the elastic belt 110. The limit of the rotating frame 301 is cancelled, and the rotating frame 301 will continue to rotate. The deceleration plate 103 can effectively prevent the rotating frame 301 from being too fast in the initial stage and affecting the position of the workpiece.

[0059] At the same time, the inclined block 203 is separated from the movable frame 113, and the slide 108 is reset under the elastic potential energy of the elastic belt 110. At the same time, the movable frame 113 is reset during the movement, and the next limit can be performed at this time.

[0060] In summary, the arrangement of the ring strip 102 and the bottom groove 303 can effectively hinder the rotating frame 301, the rubber lining can ensure the friction force so that the blocking can be sustained, and the arrangement of the connecting seat 305 can effectively convert the driving force in the motor 201 into the driving force of the reset spring 306. During use, it can be ensured that after the rotating frame 301 is limited, the reset spring 306 can still push the rotating frame 301 after contraction, thereby ensuring the operating accuracy and making the rotating frame 301 fit with the abutment frame 202.

[0061] Importantly, it should be noted that the construction and arrangement of the present application shown in a plurality of different exemplary embodiments are only exemplary. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, and parameter values ​​(e.g., temperature, pressure, etc.), installation arrangement, use of materials, color, directional changes, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in the application. For example, the element shown as integrally formed can be composed of multiple parts or elements, the position of the element can be inverted or otherwise changed, and the nature or number or position of the discrete element can be changed or changed. Therefore, all such modifications are intended to be included in the scope of the present invention. The order or sequence of any process or method steps can be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure of performing the function described herein, and is not only structurally equivalent but also equivalent structure. Without departing from the scope of the present invention, other replacements, modifications, changes and omissions can be made in the design, operating conditions and arrangement of the exemplary embodiments. Therefore, the invention is not limited to a specific embodiment, but extends to numerous modifications still falling within the scope of the appended claims.

[0062] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0063] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0064] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A method for preparing a micro-nano metal coil based on a combined template, characterized in that: preparing two templates having partial coil structures; Mounting the template and the substrate (the template is placed on the substrate) on the evaporation substrate, and placing the evaporation substrate on the auxiliary device (M); Evaporating the template; After the evaporation is completed, the substrate is taken out and the coil formed by evaporation on the substrate is inspected to verify its integrity.

2. The method for preparing a micro-nano metal coil based on a combined template according to claim 1, characterized in that: The coil structure is obtained by processing on a template sheet using one of laser, focused ion beam or photolithography processing methods.

3. The method for preparing a micro-nano metal coil based on a combined template according to claim 2, characterized in that: The substrate is made of single-sided polished single crystal silicon; the metal material used for evaporation is silver segment.

4. An auxiliary device, characterized in that: The auxiliary device (M) according to claims 1 to 3, comprising a positioning mechanism (100), a driving mechanism (200) arranged at the bottom of the positioning mechanism (100), and a containing mechanism (300) arranged on the driving mechanism (200); The positioning mechanism (100) comprises a mounting cover (101), a plurality of ring strips (102) are provided on the top of the mounting cover (101), and a speed reducer (103) is provided on the top of the ring strips (102); The driving mechanism (200) comprises a motor (201) arranged at the bottom of the positioning mechanism (100); the driving end of the motor (201) passes through the mounting cover (101) and an abutment frame (202) is arranged between the motor and the positioning mechanism (100); a plurality of inclined blocks (203) are arranged around the abutment frame (202); and the inclined blocks (203) are adapted to the positioning mechanism (100).

5. The auxiliary device according to claim 4, characterized in that: The positioning mechanism (100) further comprises a rotating ring (104) arranged on the top of the mounting cover (101), a plurality of annular grooves (105) are arranged inside the rotating ring (104), a mounting hole (106) is arranged on one side of the annular groove (105), and a blind hole (107) is arranged on the mounting hole (106).

6. The auxiliary device according to claim 5, characterized in that: The positioning mechanism (100) further comprises a slide (108) arranged on the mounting cover (101), a bracket (109) being provided at the bottom of the slide (108), the bottom of the bracket (109) being connected to the inner wall of the mounting cover (101) via an elastic belt (110), an inclined groove (111) being provided on the outer wall of the bracket (109), an inclined plate (112) being attached to the inclined groove (111), and a movable frame (113) being provided between the inclined plate (112) and the inclined block (203).

7. The auxiliary device according to claim 6, characterized in that: The bracket (109) is slidably connected to the top of the inner wall of the installation cover (101), the movable frame (113) is slidably connected to the installation cover (101), and the inclined plate (112) is adapted to the inclined groove (111).

8. The auxiliary device according to claim 6 or 7, characterized in that: The containing mechanism (300) comprises a rotating frame (301) arranged on a rotating ring (104), a containing groove (302) arranged on the circumference of the rotating frame (301), the rotating frame (301) and the corresponding ring strip (102) are provided with a bottom groove (303), the inner wall of the bottom groove (303) is provided with a rubber cushion layer, and a positioning mark (304) is provided on the top of the mounting cover (101) corresponding to the containing groove (302).

9. The auxiliary device according to claim 8, characterized in that: The containing mechanism (300) further comprises a connecting seat (305) arranged on the driving shaft of the motor (201), a return spring (306) is arranged between the connecting seat (305) and the mounting hole (106), a positioning arc strip (307) is arranged between the connecting seat (305) and the blind hole (107), and the connecting seat (305) is located inside the annular groove (105) and is slidably connected thereto.

10. The auxiliary device according to claim 9, characterized in that: The blind hole (107) is slidably connected to the positioning arc strip (307), the cross section of the reset spring (306) is arc-shaped, the positioning arc strip (307) is located inside the reset spring (306), and the connecting seat (305) is in contact with the inner wall of the rotating frame (301).