A feeler gauge calibration method based on non-contact optics and a calibration device thereof

Abstract

A feeler gauge calibration method and a calibration device based on non-contact optics, comprising: the feeler gauge to be tested is set between the upper measuring head and the lower measuring head of the confocal laser displacement sensor, so that the lasers of the two measuring heads are coaxial for differential measurement; a standard gauge block is placed between the upper measuring head and the lower measuring head, the correction value of the standard gauge block is input, and the distance between the upper measuring head and the lower measuring head is read; the feeler gauge measuring point is determined, the upper measuring head and the lower measuring head respectively read the data of the center origin of each feeler gauge measuring point, the feeler gauge is moved, and a small displacement is performed within the measurement area range in the x-axis and y-axis plane directions of each feeler gauge measuring point, and the reading values ​​of the upper measuring head and the lower measuring head are combined to form n coordinates, which are respectively fitted into upper and lower planes S1 and S2, and the thickness deviation and curvature of the feeler gauge are respectively calculated. The present invention provides a feeler gauge calibration method and a device based on non-contact optics with high accuracy, convenient and efficient operation, automation, and batch detection.

Description

Technical Field

[0001] The invention relates to a feeler gauge calibration method and a calibration device thereof, and in particular to a feeler gauge calibration method and a calibration device thereof based on non-contact optics. Background Art

[0002] Feeler gauges are physical measuring tools with fixed thickness, mainly used for gap detection. Feeler gauges have been widely used in mechanical processing, automobile maintenance, manufacturing and other fields. Their accuracy is directly related to the improvement of product quality in the application field. In the field of metrology technology, the calibration cycle of feeler gauges is half a year. According to the existing technology JJG 62-2017 Feeler Gauge Calibration Procedure and GB / T 22523-2008 Feeler Gauge, the calibration of the thickness dimension limit deviation and curvature of the feeler gauge adopts contact measurement (contact measurement). The measurement method is to use a micrometer, a length gauge or a wall thickness micrometer as the main standard instrument for direct contact measurement. Taking the length gauge as an example, the measurement process is to first contact the spherical measuring cap of the length gauge with the flat measuring cap, read the reading value of the length gauge as the relative zero point, then move the measuring axis of the length gauge to separate the two measuring caps, put the feeler gauge between the two measuring caps, make the spherical measuring cap contact with the front side of the feeler gauge, and the flat measuring cap contact with the back side of the feeler gauge; the difference between the reading value of the specified measuring point and the relative zero point value is the thickness value of the point; for the feeler gauge with a nominal value greater than 0.10mm, the back side thickness measurement should also be added. When measuring, make the spherical measuring cap contact with the back side of the feeler gauge, and the flat measuring cap contact with the front side of the feeler gauge, read the length gauge data and calculate the thickness deviation and curvature of the feeler gauge.

[0003] The prior art feeler gauge calibration adopts contact measurement, which has the following disadvantages: first, the contact measurement requires manual flipping of the feeler gauge to make the feeler gauge contact with the contact head in the measurement operation, and manual processing is required in the data processing, resulting in slow measurement speed, inability to automatically process data, and high labor intensity for calibration personnel; second, the measuring force of the contact measurement causes indentation deformation, the flatness of the measuring cap of the length measuring instrument, and the deviation of the measuring position, which all affect the measurement results and are also important sources of error; third, the contact measurement method cannot realize batch calibration of feeler gauges, and the measurement efficiency is low.

[0004] Chinese invention patent CN 111895924 B discloses an automatic lens thickness measurement device, the measurement object is various small round aspherical lenses, which are transparent glass. The center thickness is measured by a laser coaxial displacement sensor, and the edge thickness is measured by a contact sensor. This technical solution is generated based on the characteristics of the lens, such as the use of an automatic centering fixture to find the center position of the lens for a round lens, and the transportation of a suction cup is based on the adsorbable characteristics of the lens. Therefore, this technical solution is not suitable for feeler gauges whose measurement objects are thin, soft, easy to deform, have high standards for wrinkles, and have requirements for thickness deviation in addition to curvature. In addition, its host computer software will compare the actual data with the measured data to obtain a scaling formula. According to different lens models (different curvatures), the host computer software uses different scaling formulas for data correction, which is also only for lenses and is not suitable for feeler gauge calibration. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a feeler gauge calibration method and a calibration device based on non-contact optics which are high in precision, convenient and efficient in operation, automated and capable of batch detection.

[0006] The present invention is achieved in that:

[0007] A feeler gauge calibration method based on non-contact optics comprises the following steps:

[0008] Step 1: The feeler gauge to be tested is set between the upper measuring head and the lower measuring head of the confocal laser displacement sensor, so that the lasers of the two measuring heads are coaxial to perform differential measurement;

[0009] Step 2: Place the standard gauge block between the upper and lower measuring heads, input the correction value of the standard gauge block, and read the distance D between the upper and lower measuring heads;

[0010] Step 3: Determine the feeler gauge measuring point. The upper and lower measuring heads read the data of the center origin O of each feeler gauge measuring point respectively and record it as and ;

[0011] Step 4: Move the feeler gauge and make a small displacement within the measuring area in the x-axis and y-axis plane directions at each feeler gauge measuring point, and combine the readings of the upper and lower measuring heads to form n coordinates. , , respectively fitting into upper and lower planes S1 and S2, the vertical distances from plane S1 to the upper measuring head and from plane S2 to the lower measuring head are marked as , ;

[0012] Step 5: Calculate the thickness deviation and curvature of the feeler gauge at the measuring point:

[0013] The above fitting plane S1 is the conversion basis, and the thickness deviation of the feeler gauge Similarly, the following fitting plane S2 is used as the conversion basis, and the thickness deviation of the feeler gauge is , where D is the measured value obtained by calibration of the standard gauge block, For the nominal value of the feeler gauge being tested, calculate the thickness deviation of the feeler gauge or , different measuring points of the same feeler gauge, take The largest measuring point As the thickness deviation of the feeler gauge;

[0014] Feeler gauge curvature , for different measuring points of the same feeler gauge, take the largest As the curvature of the feeler gauge.

[0015] A feeler gauge calibration device based on non-contact optics is used to implement a feeler gauge calibration method based on non-contact optics as described above, and the calibration device comprises:

[0016] Including: frame body, mounting base plate, two-dimensional hollow moving platform, fixture assembly, mounting vertical plate, confocal laser displacement sensor, control system;

[0017] The mounting base plate is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base plate;

[0018] One side of the middle part of the mounting vertical plate is fixedly connected to the mounting bottom plate through a connecting rib, the other side of the middle part is fixedly connected to the lower measuring head of the confocal laser displacement sensor through a lower measuring head adjustment unit, the upper part is fixedly connected to the upper measuring head of the confocal laser displacement sensor through an upper measuring head adjustment unit, and the lower part is fixed to the bottom plate of the frame body through a connecting rib;

[0019] The two-dimensional hollow moving platform is a hollow electric-controlled xy-axis moving two-dimensional platform, wherein the fixture assembly is placed in the hollow part thereof, and the motion control of the two-dimensional hollow moving platform drives the fixture assembly to be positioned;

[0020] The control system includes: a lower computer and a motor controller, which are installed in the frame body;

[0021] The measuring head controller, the first optical unit and the second optical unit of the confocal laser displacement sensor are all installed in the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit respectively;

[0022] The lower computer is respectively connected to the upper computer, the motor controller and the measuring head controller for communication. The upper computer is installed with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower computer. The motor controller and the measuring head controller transmit feedback signals to the upper computer through the lower computer. The data collected by the upper measuring head and the lower measuring head are uploaded to the upper computer via the lower computer.

[0023] Furthermore, two high-precision dual-axis levels are fixedly installed on the two-dimensional hollow mobile platform to monitor and measure the levelness of the two-dimensional hollow mobile platform in real time and feed it back to the lower computer to correct the measurement result data.

[0024] Furthermore, the fixture assembly includes: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal material, and a plurality of grooves are arranged in parallel thereon to accommodate the feeler gauge to be inspected and the magnetic ring, and a through hole is provided at the measuring position so that the lasers of the upper measuring head and the lower measuring head can be projected onto the feeler gauge to be inspected; the magnetic ring is a magnetic circular ring structure, which tightly presses the feeler gauge to be inspected into the groove of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measuring area of ​​the feeler gauge.

[0025] Furthermore, an inclination sensor is fixedly provided on the mounting vertical plate, which is used to detect the inclination angle of the mounting vertical plate and feed the data back to the lower computer for data correction.

[0026] Furthermore, the confocal laser displacement sensor is one of KEYENCE's CL-L030 coaxial laser displacement meter, Germany's Mi-Iridium's IFS2406-10 spectral confocal sensor, or China's Haibosen's HPS-CFL030 spectral confocal displacement sensor.

[0027] The advantages of the present invention are:

[0028] 1. The confocal laser displacement sensor differential measurement is used to achieve non-contact measurement of the feeler gauge, which has high accuracy, will not cause depression deformation, and will not cause damage to the feeler gauge;

[0029] 2. Use a dedicated fixture to prevent deformation and wrinkles of the feeler gauge, ensuring that the shape of the feeler gauge does not change during the measurement process;

[0030] 3. The hollow mobile platform is used to ensure the stability of the force on the feeler gauge being inspected during the movement, while reducing the installation space and making the structure more compact;

[0031] 4. It realizes batch and fully automatic detection of feeler gauges, improving detection efficiency;

[0032] 5. The measuring software can automatically process data and generate original test records, thus realizing paperless and intelligent feeler gauge testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention will be further described below in conjunction with embodiments with reference to the accompanying drawings.

[0034] Figure 1 It is a structural schematic diagram of a feeler gauge calibration device based on non-contact optics of the present invention.

[0035] Figure 2 yes Figure 1 Schematic diagram of the three-dimensional structure of the installation position of the upper and lower measuring heads and fixture components.

[0036] Figure 3 yes Figure 1 Schematic diagram of the three-dimensional structure of the installation position of the vertical plate and the frame body.

[0037] Figure 4 The present invention is a system control principle block diagram of a feeler gauge calibration device based on non-contact optics.

[0038] Figure 5 It is a schematic diagram of the bottom plate structure in the clamp assembly of the present invention.

[0039] Figure 6 It is a schematic diagram of the structure of the fixture assembly of the present invention with the feeler gauge to be inspected installed (the feeler gauge to be inspected in the groove in the rightmost column is shown without the magnetic ring installed).

[0040] Figure 7 It is a schematic diagram of the measurement point layout of the I-type feeler gauge according to the present invention.

[0041] Figure 8 It is a schematic diagram of the measurement point layout of the type II feeler gauge according to the present invention.

[0042] Fig. 9 It is a schematic diagram of the measurement spot layout of the measurement points in the present invention.

[0043] Fig.10 It is a software execution flow chart in the host computer in the present invention.

[0044] Reference numerals:

[0045] 1-installation base plate, 2-two-dimensional hollow mobile platform, 31-first high-precision biaxial level, 32-second high-precision biaxial level, 4-fixture assembly, 41-fixture base plate, 42-feeler gauge, 43-magnetic ring, 44-groove, 421-measuring point, 422-measuring point, 423-measuring point, 424-measuring point, 425-measuring point, 51-upper measuring head, 52-lower measuring head, 6-installation vertical plate, 7-L-shaped connecting rib, 81-upper measuring head adjustment unit, 82-lower measuring head adjustment unit, 91-frame body, 92-lower computer, 93-micro display panel, 941-first optical unit, 942-second optical unit, 95-transformer, 96-motor controller, 97-measuring head controller, 10-tilt sensor. DETAILED DESCRIPTION

[0046] See also Figures 1 to 10 As shown, the present invention first proposes a feeler gauge calibration method based on non-contact optics:

[0047] The feeler gauge to be tested is set between the upper measuring head and the lower measuring head of the confocal laser displacement sensor, so that the lasers of the two measuring heads are coaxial for differential measurement; the feeler gauge measuring point is determined according to the JJG 62-2017 feeler gauge calibration procedure, and the upper measuring head and the lower measuring head respectively read the data of the center origin O of each feeler gauge measuring point and record them as and ; Move the feeler gauge and make a small displacement within the measurement area in the plane direction of each feeler gauge measurement point (x, y). The measurement spot of the measurement point is evenly distributed within the measurement area ( Fig. 9 The readings of the upper and lower measuring heads are combined to form n coordinates. , The upper and lower planes S1 and S2 are fitted respectively. The vertical distances from the upper plane S1 to the upper measuring head and from the lower plane S2 to the lower measuring head can be calculated by the measurement software and marked as , , then the thickness deviation and curvature of the feeler gauge at the measuring point are:

[0048] The above fitting plane S1 is the conversion basis, and the thickness deviation of the feeler gauge Similarly, the following fitting plane S2 is used as the conversion basis, and the thickness deviation of the feeler gauge is , where D can be the measured value obtained by calibration with a 1mm fourth-grade or higher-grade standard gauge block. For the nominal value of the feeler gauge being tested, calculate the thickness deviation of the feeler gauge or , different measuring points of the same feeler gauge, take The largest measuring point As the thickness deviation of the feeler gauge;

[0049] Feeler gauge curvature , for different measuring points of the same feeler gauge, take the largest As the curvature of the feeler gauge.

[0050] Specifically, the measurement process of the thickness deviation and curvature of the feeler gauge is as follows:

[0051] The first step is to place a standard gauge block with a nominal value of 1mm, grade 4 or above, between the upper and lower measuring heads, input the correction value of the gauge block, which can be obtained through value traceability, and read the distance D between the upper and lower measuring heads;

[0052] Step 2: Read the distance data from the upper and lower measuring heads to the upper and lower surfaces of the gauge being tested at the measuring point center origin O. and ;

[0053] Step 3: Move the feeler gauge and make a small displacement at each measuring point of the feeler gauge. Combine the readings of the upper and lower measuring heads to form n coordinates. , ;

[0054] Step 4: Set the coordinates , Fitting is performed into two planes S1 and S2, and the vertical distances from plane S1 to the upper measuring head and from plane S2 to the lower measuring head are calculated as follows: , ;

[0055] Step 5: Calculate the thickness deviation of the feeler gauge or , different measuring points of the same feeler gauge, take The largest measuring point As the thickness deviation of the feeler gauge;

[0056] Step 6: According to JJG 62-2017 feeler gauge verification regulations, calculate the curvature of the feeler gauge greater than 0.1mm , for different measuring points of the same feeler gauge, take the largest As the curvature of the feeler gauge.

[0057] The present invention also proposes a calibration device for realizing the above-mentioned feeler gauge calibration method based on non-contact optics, which mainly includes: a frame body 91, a mounting base plate 1, a two-dimensional hollow moving platform 2, a fixture assembly 4, a mounting vertical plate 6, a confocal laser displacement sensor, and a control system;

[0058] The mounting base plate 1 is a planar structure, which is mounted on the frame body 91; a two-dimensional hollow moving platform 2 is mounted on the mounting base plate 1;

[0059] One side of the middle part of the mounting vertical plate 6 is fixedly connected to the mounting base plate 1 through an L-shaped connecting rib 7, the other side of the middle part is fixedly connected to the lower measuring head 52 of the confocal laser displacement sensor through a lower measuring head adjustment unit 82, the upper part is fixedly connected to the upper measuring head 51 of the confocal laser displacement sensor through an upper measuring head adjustment unit 81, and the lower part is fixed to the bottom plate of the frame body 91 through an L-shaped connecting rib 7;

[0060] Among them, the two-dimensional hollow mobile platform 2 is a hollow electric-controlled xy-axis motion two-dimensional platform, which can realize positioning at any position within the xy-axis plane travel range through control signals. It is embedded with displacement sensors inside, which can directly measure the displacement values ​​of the x-axis and y-axis. The fixture assembly 4 is placed in the hollow part. The motion control of the two-dimensional hollow mobile platform 2 drives the fixture assembly 4 to position, and accurately positions it to the measurement points 421, 422, 423, 424, and 425 of the measurement area of ​​the feeler piece to be inspected. Two high-precision dual-axis levels are also fixedly installed on the two-dimensional hollow mobile platform 2, namely the first high-precision dual-axis level 31 and the second high-precision dual-axis level 32, which can monitor and measure the horizontality of the two-dimensional hollow mobile platform 2 in real time and feed it back to the lower computer and correct the measurement result data.

[0061] The fixture assembly 4 includes: a fixture bottom plate 41 and a magnetic ring 43, wherein the fixture bottom plate 41 is made of metal material, and a plurality of specific grooves 44 are arranged in parallel on the fixture bottom plate 41 to place the feeler gauge piece 42 and the magnetic ring 43 to be inspected, and a through hole is opened at the measuring position so that the lasers of the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor can be projected onto the feeler gauge piece 42 to be inspected; the magnetic ring 43 is a magnetic circular ring structure, which presses the feeler gauge piece 42 to be inspected tightly into the groove 44 of the fixture bottom plate 41, and the inner ring area of ​​the magnetic ring 43 is the circular measuring area of ​​the feeler gauge. A fixture assembly 4 can realize the installation and batch calibration of multiple feeler gauge pieces, and at the same time, the magnetic circular ring is used to press the feeler gauge piece to be inspected, which can ensure that the feeler gauge piece to be inspected is not deformed or wrinkled, and further ensure the measurement accuracy. There can be multiple fixture assemblies 4, so that when one of the feeler gauge fixture assemblies 4 is measuring on the device, the remaining fixture assemblies 4 can be used to arrange the feeler gauge 42 to be tested, so as to improve the testing efficiency.

[0062] Confocal laser displacement sensor is a mature technology and can be directly obtained on the market, such as CL-L030 laser coaxial displacement meter, IFS2406-10 spectral confocal sensor, or HPS-CFL030 spectral confocal displacement sensor, etc., wherein the upper measuring head 51 and the lower measuring head 52 respectively form a measuring unit with two first optical units 941, the second optical unit 942, and a measuring head controller 97, and the measurement data is fed back to the lower computer. By adjusting the displacement and angle of the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, the upper measuring head 51 and the lower measuring head 52 can be finally made coaxial, meeting the measurement requirements of the confocal laser displacement sensor. The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 can use the optional accessories provided by the confocal laser displacement sensor manufacturer, such as the Keyence adjustment fixture (model OP-88285), or can be self-processed or use other related fixtures.

[0063] The two-dimensional hollow mobile platform is an existing mature technology and can be directly obtained on the market. For example, Zhuoli Hanguan’s two-dimensional hollow mobile platform model number is XY120120.

[0064] The control system includes: a lower computer 92 and a motor controller 96, which are installed in the frame body 91;

[0065] The measuring head controller 97, the first optical unit 941 and the second optical unit 942 of the confocal laser displacement sensor are installed in the frame body 91; the measuring head controller 97 is connected to the upper measuring head 51 and the lower measuring head 52 through the first optical unit 941 and the second optical unit 942 respectively;

[0066] The frame body 91 serves as the main supporting structure, with a mounting base plate 1 installed on the top, and the other five surfaces are enclosed by plates, wherein the control circuit board of the lower computer 92 and the micro display panel 93 are fixedly installed on the two side surfaces, and the first optical unit 941, the second optical unit 942, a transformer 95, two motor controllers 96, and a measuring head controller 97 are fixedly installed on the inner side of the bottom surface.

[0067] An inclination sensor 10 is fixed on the mounting vertical plate 6 to detect the inclination angle of the mounting vertical plate 6 and feed the data back to the lower computer 92 for data correction.

[0068] The transformer 95 provides various voltage power supplies for the device, and the two motor controllers 96 are respectively connected to the two motors of the two-dimensional hollow mobile platform 2 for communication.

[0069] The lower computer 92 is connected to the upper computer (not shown), the motor controller 96 and the measuring head controller 97 for communication. The upper computer is installed with automatic measurement software ( Fig.10), the control requirements of the automatic measurement software are transmitted to the motor controller 96 and the measuring head controller 97 through the lower computer 92, and the motor controller 96 and the measuring head controller 97 transmit the feedback signal to the upper computer through the lower computer 92; the data collected by the upper measuring head 51, the lower measuring head 52, the first high-precision dual-axis level 31, the second high-precision dual-axis level 32, and the inclination sensor 10 are uploaded to the upper computer via the lower computer 92, and the automatic measurement software generates the original calibration record after data processing and saves it in the form of a document.

[0070] The specific operation process is as follows:

[0071] 1. Turn on the power of the calibration device, open the automatic measurement software to warm up the device, clean the gauge piece 42 to be tested and place it in the same room with the device for isothermal treatment;

[0072] 2. Place the feeler gauges 42 to be inspected one by one in the corresponding grooves 44 of the fixture bottom plate 41 and press them tightly with the magnetic ring 43;

[0073] 3. Input the relevant information to be inspected (including the model, length and nominal thickness of the feeler gauge 42 to be inspected) into the automatic measurement software and save the measurement settings;

[0074] 4. Place the fixture assembly 4 with the feeler gauge installed on the two-dimensional hollow mobile platform 2, start the automatic measurement software, and measure the thickness deviation and curvature of each feeler gauge according to the setting requirements. After the measurement of this group is completed, replace another set of fixture assemblies with the feeler gauge installed and repeat the above measurement;

[0075] 5. After the automatic measurement software completes the automatic measurement, click the "Save" button in the automatic measurement software to automatically save the measurement result data in the form of a document;

[0076] 6. Take out the fixture assembly 4, take out the magnetic ring 43 and the feeler gauge 42 respectively, turn off the power, and the test is completed.

[0077] The present invention discloses a feeler gauge calibration device and a calibration method based on non-contact optics, which utilize the differential measurement principle of a confocal laser displacement sensor to realize non-contact measurement of the feeler gauge. At the same time, a dedicated clamp is used to prevent deformation and wrinkles of the feeler gauge caused by the clamp. At the same time, calibration of batch feeler gauges is realized by arranging and paving the feeler gauges. The device and the calibration method have the characteristics of high precision, high intelligence, high working efficiency, etc., and meet the requirements of non-contact batch automatic calibration of feeler gauges.

[0078] It should be noted that the present invention is described using a feeler gauge as an example. In actual practice, it can also be applied to the testing of other thin sheets such as high-precision copper sheets, high-precision aluminum sheets, lithium battery sheets, and thin rubber sheets. It is only necessary to adjust the groove 44 in the fixture assembly 4 to a shape that matches the thin sheet being tested.

[0079] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the protection scope of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A feeler gauge calibration method based on non-contact optics, characterized in that: The steps include: Step 1: The feeler gauge to be tested is set between the upper measuring head and the lower measuring head of the confocal laser displacement sensor, so that the lasers of the two measuring heads are coaxial to perform differential measurement; Step 2: Place the standard gauge block between the upper and lower measuring heads, input the correction value of the standard gauge block, and read the distance D between the upper and lower measuring heads; Step 3: Determine the feeler gauge measuring point. The upper and lower measuring heads read the data of the center origin O of each feeler gauge measuring point respectively and record it as and ; Step 4: Move the feeler gauge and make a small displacement within the measuring area in the x-axis and y-axis plane directions at each feeler gauge measuring point, and combine the readings of the upper and lower measuring heads to form n coordinates. , , respectively fitted into the upper plane S1 and the lower plane S2, the vertical distances from the upper plane S1 to the upper measuring head and from the lower plane S2 to the lower measuring head are marked as , ; Step 5: Calculate the thickness deviation and curvature of the feeler gauge at the measuring point: The above plane S1 is the conversion basis, the thickness deviation of the feeler gauge Similarly, the following plane S2 is used as the conversion reference, and the thickness deviation of the feeler gauge is ,in, Calculate the thickness deviation of the feeler gauge by taking the nominal value of the feeler gauge under test. or , different measuring points of the same feeler gauge, take The largest measuring point As the thickness deviation of the feeler gauge; Feeler gauge curvature , for different measuring points of the same feeler gauge, take the largest As the curvature of the feeler gauge.

2. A feeler gauge calibration device based on non-contact optics, characterized in that: For implementing a feeler gauge calibration method based on non-contact optics as claimed in claim 1, the calibration device comprises: Frame body, mounting base plate, two-dimensional hollow mobile platform, fixture assembly, mounting riser, confocal laser displacement sensor, control system; The mounting base plate is a planar structure, which is mounted on the frame body; the two-dimensional hollow moving platform is mounted on the mounting base plate; One side of the middle part of the mounting vertical plate is fixedly connected to the mounting bottom plate, the other side of the middle part is fixedly connected to the lower measuring head of the confocal laser displacement sensor through a lower measuring head adjustment unit, the upper part is fixedly connected to the upper measuring head of the confocal laser displacement sensor through an upper measuring head adjustment unit, and the lower part is fixed to the bottom plate of the frame body; The two-dimensional hollow moving platform is a hollow electric-controlled xy-axis moving two-dimensional platform, wherein the fixture assembly is placed in the hollow part, and the motion control of the two-dimensional hollow moving platform drives the fixture assembly to be positioned; the fixture assembly is installed with a feeler gauge to be inspected; The control system includes: a lower computer and a motor controller, which are installed in the frame body; The measuring head controller, the first optical unit and the second optical unit of the confocal laser displacement sensor are all installed in the frame body; the measuring head controller is connected to the upper measuring head and the lower measuring head through the first optical unit and the second optical unit respectively; The lower computer is respectively connected to the upper computer, the motor controller and the measuring head controller for communication. The upper computer is installed with automatic measurement software. The control requirements of the automatic measurement software are transmitted to the motor controller and the measuring head controller through the lower computer. The motor controller and the measuring head controller transmit feedback signals to the upper computer through the lower computer. The data collected by the upper measuring head and the lower measuring head are uploaded to the upper computer via the lower computer.

3. A feeler gauge calibration device based on non-contact optics as claimed in claim 2, characterized in that: The two-dimensional hollow mobile platform is also fixedly installed with two high-precision dual-axis levels for real-time monitoring and measuring the levelness of the two-dimensional hollow mobile platform and feeding it back to the lower computer and correcting the measurement result data.

4. A feeler gauge calibration device based on non-contact optics as claimed in claim 2, characterized in that: The fixture assembly comprises: a fixture base plate and a magnetic ring, wherein the fixture base plate is made of metal material, and a plurality of grooves are arranged in parallel on the fixture base plate so as to place the feeler gauge piece to be inspected and the magnetic ring, and a through hole is arranged at the measuring position so that the lasers of the upper measuring head and the lower measuring head can be projected onto the feeler gauge piece to be inspected; the magnetic ring is a magnetic circular ring structure, which tightly presses the feeler gauge piece to be inspected into the groove of the fixture base plate, and the inner ring area of ​​the magnetic ring is the circular measuring area of ​​the feeler gauge.

5. A feeler gauge calibration device based on non-contact optics as claimed in claim 2, characterized in that: The vertical mounting plate is fixedly provided with an inclination sensor for detecting the inclination angle of the vertical mounting plate and feeding the data back to the lower computer for data correction.

6. A feeler gauge calibration device based on non-contact optics as claimed in claim 2, characterized in that: The confocal laser displacement sensor is one of the CL-L030 laser coaxial displacement meter, the IFS2406-10 spectral confocal sensor, or the HPS-CFL030 spectral confocal displacement sensor.

Images