Stirring mechanism matched with crystal pulling process production

Abstract

The invention belongs to the technical field of crystal pulling process equipment, particularly relates to a stirring mechanism matched with crystal pulling process production, and aims to solve the problems that in the crystal pulling production process, filtering equipment needs to sufficiently and slowly oxidize volatile substances to prevent the volatile substances from being burnt and exploded when making contact with outside air, but the volatile substances filtered out in an ash bin are slowly oxidized, and the production efficiency is low. According to the technical scheme, the air cylinder fixing device comprises an air cylinder fixing barrel, an air cylinder is fixedly installed in the air cylinder fixing barrel through a plurality of screws, a cylinder rod connector is fixedly arranged at the end of an air cylinder rod, and a rotating arm is arranged below the air cylinder. According to the invention, inflammables in the ash bin can be fully oxidized, the danger of deflagration is prevented, the oxidation speed is accelerated, the preparation time of the process is shortened, and the production safety and efficiency are improved; the double-rocker mechanism is matched with the upper ratchet mechanism and the lower ratchet mechanism, one ratchet mechanism is responsible for unidirectional rotation, and the other ratchet mechanism is responsible for preventing the cantilever from being brought back when the air cylinder retracts, so that unnecessary reverse rotation is avoided, and the stirring stability and controllability are improved.

Description

Technical Field

[0001] The invention relates to the technical field of crystal pulling process equipment, and in particular to a stirring mechanism supporting crystal pulling process production. Background Art

[0002] The crystal pulling process mainly obtains high-quality single-crystal silicon rods by melting polycrystalline silicon at high temperature and controlling its crystallization process. This process plays a decisive role in subsequent chip manufacturing, because the purity, uniformity and size of single-crystal silicon directly affect the performance and cost of the chip. The crystal pulling process is an indispensable part of semiconductor manufacturing. By continuously optimizing and innovating the crystal pulling process, the quality and production efficiency of single-crystal silicon rods can be improved, thereby promoting the sustainable development of the semiconductor industry.

[0003] During the crystal pulling process, the process inert gas needs to be filtered and recovered, and some impurities will evaporate along with the inert gas when the crucible heats the silicon material. During the production process, these impurities need to be filtered out. These substances will burn and explode when in contact with the outside air, which can easily cause safety accidents. Therefore, the filtering equipment needs to fully and slowly oxidize these volatile substances to prevent them from burning and exploding when in contact with the outside air. However, the volatile substances filtered out in the ash bin oxidize slowly, which is not conducive to improving production efficiency.

[0004] In view of the above problems, the present invention document proposes a stirring mechanism for supporting the crystal pulling process to solve the above problems. Summary of the invention

[0005] The present invention provides a stirring mechanism for supporting the crystal pulling process production, which solves the problem in the prior art that in the crystal pulling production process, the filtering equipment needs to fully and slowly oxidize the volatile substances to prevent explosion when in contact with the outside air, but the volatile substances filtered out in the ash bin oxidize slowly, which is not conducive to improving the production efficiency.

[0006] The present invention provides the following technical solutions:

[0007] A stirring mechanism for supporting crystal pulling process production, comprising:

[0008] A cylinder fixing cylinder, in which a cylinder is fixedly installed by a plurality of screws, a cylinder rod joint is fixedly provided at the end of the cylinder rod, and a rotating arm is provided below the cylinder;

[0009] The double rocker mechanism is provided on the cylinder and is used to convert the linear motion of the cylinder into rotational motion, driving the rotating arm to rotate;

[0010] The high-efficiency mixing assembly is installed on the rotating arm to improve the oxidation efficiency of the volatile substances filtered out in the ash bin.

[0011] In one possible design, the double rocker mechanism includes a connecting rod connected to the cylinder rod joint, the connecting rod is connected to a ratchet mechanism via a pin, a cantilever is fixedly installed at the end surface of the cylinder fixing tube via screws, a bearing is installed at the end of the cantilever, and the core shaft in the bearing is arranged to pass through the bearing.

[0012] In the design, the high-efficiency mixing assembly includes a plurality of chains fixed to the bottom of the rotating arm by corresponding split pins, and the plurality of chains are arranged at equal distances.

[0013] In a possible design, a counterweight is fixedly provided at the other end of the chain via a corresponding cotter pin.

[0014] In a possible design, the plurality of counterweights are irregularly composed of positive and negative trapezoidal scrapers and elliptical scrapers.

[0015] In a possible design, another set of ratchet mechanisms that function as a backlash prevention mechanism is installed on the cantilever and the spindle.

[0016] In a possible design, an O-ring is sleeved on the base of the cylinder to improve the sealing performance of the connection between the base and the cylinder fixing tube.

[0017] It is to be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the invention.

[0018] The beneficial effects of the present invention are:

[0019] The present invention enables the combustibles in the ash bin to be fully oxidized, thereby preventing the danger of deflagration, speeding up the oxidation speed, shortening the process preparation time, and improving production safety and efficiency.

[0020] The present invention effectively increases the contact between oxygen and combustible materials during the stirring process through the design of a high-efficiency mixing component, especially the irregular shape of the counterweight block, thereby significantly improving the oxidation efficiency of volatile substances filtered out in the ash bin. The double rocker mechanism cooperates with the upper and lower ratchet mechanisms, one is responsible for unidirectional rotation, and the other is responsible for preventing the cantilever from being brought back when the cylinder is retracted, thereby avoiding unnecessary reversal and improving the stability and controllability of stirring.

[0021] The entire stirring mechanism in the present invention is compactly designed, and the components are tightly connected and easy to disassemble, which is convenient for subsequent maintenance and replacement. Moreover, the stirring mechanism is particularly suitable for the production process of the supporting crystal pulling process, and can effectively improve the production efficiency and product quality. At the same time, it also has certain versatility and can be applied to other occasions requiring efficient stirring and mixing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1A schematic diagram of the main structure of a stirring mechanism for a supporting crystal pulling process provided by an embodiment of the present invention;

[0023] Figure 2 A bottom-up structural schematic diagram of a stirring mechanism produced by a supporting crystal pulling process provided by an embodiment of the present invention;

[0024] Figure 3 A schematic diagram of the partial structure of a stirring mechanism for a supporting crystal pulling process provided by an embodiment of the present invention;

[0025] Figure 4 An exploded view of a stirring mechanism produced in a supporting crystal pulling process provided in an embodiment of the present invention.

[0026] Figure numerals: 1. Cylinder fixing tube; 2. Cylinder; 3. Connecting rod; 4. Ratchet mechanism; 5. Cylinder rod joint; 6. Cantilever; 7. Bearing; 8. Core shaft; 9. Nut; 10. Screw; 11. Pin; 12. Rotating arm; 13. Chain; 14. Counterweight; 15. Split pin; 16. O-ring. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0028] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms, "connection" and "installation" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. In addition, "connection" can be a direct connection or an indirect connection through an intermediate medium. Among them, "fixed" means that the two are connected to each other and the relative position relationship after connection remains unchanged. The directional terms mentioned in the embodiments of the present invention, such as "inside", "outside", "top", "bottom", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of the present invention, rather than indicating or implying that the referred to or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0029] In the embodiments of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0030] In the embodiments of the present invention, "and / or" is only a description of the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0031] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present invention. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0032] Embodiment 1

[0033] Please refer to Figure 1-4 , a stirring mechanism, comprising:

[0034] The cylinder fixing barrel 1 is used as the basic supporting structure of the entire stirring mechanism. The cylinder 2 is firmly fixed and installed inside the cylinder fixing barrel 1 by a number of evenly distributed screws 10. The end of the cylinder rod of the cylinder 2 is fixedly connected with a cylinder rod joint 5, which is used to transmit the power of the cylinder. A rotating arm 12 is arranged below the cylinder 2;

[0035] In order to realize the unidirectional rotation of the rotating arm 12, a set of double rocker mechanism is designed, which is mainly composed of a connecting rod 3, a ratchet mechanism 4 and auxiliary components. Specifically, one end of the connecting rod 3 is connected to the cylinder rod joint 5 through a pin 11, and the other end is connected to the ratchet mechanism 4. At one end of the cylinder fixed tube 1, a cantilever 6 is installed by a screw 10, and a bearing 7 is installed at the end of the cantilever 6. A core shaft 8 is set through the bearing 7. The ratchet mechanism 4 and the rotating arm 12 pass through the lower part of the core shaft 8 respectively, and are locked on the outside by a nut 9 to ensure the stability of the structure. When the cylinder rod of the cylinder 2 is working, the connecting rod 3 is pushed through the cylinder rod joint 5, and then the ratchet mechanism 4 is driven to swing left and right. Because of the unidirectional rotation characteristics of the ratchet mechanism 4, the core shaft 8 drives the rotating arm 12 to rotate only in one direction, and the stirring process begins;

[0036] In order to further ensure the unidirectional rotation of the rotating arm 12, an additional set of ratchet mechanism 4 is installed on the cantilever 6 and the core shaft 8 to play a role of preventing reverse movement. When the cylinder is retracted, the cantilever is brought back to prevent the friction force of the ratchet mechanism 4 during the idle stroke swing from driving the core shaft 8 and the rotating arm 12 to reverse.

[0037] In order to improve the oxidation efficiency of volatile substances in the ash bin, a high-efficiency mixing component is designed, which is mainly composed of multiple chains 13 and counterweights 14. The chains 13 are equidistantly and fixedly installed on the bottom of the rotating arm 12 through cotter pins 15, and the other end is connected to the counterweight 14 through the cotter pin 15. The design of the counterweight 14 is ingenious, and is composed of an irregular combination of positive and negative trapezoidal scrapers and elliptical scrapers. Such a design can increase the contact between oxygen and combustible substances during the mixing process, thereby improving the oxidation efficiency of volatile substances.

[0038] The present application can be used in crystal pulling process production, and can also be used in other fields applicable to the present application.

[0039] Embodiment 2

[0040] Improvements based on Example 1:

[0041] A stirring mechanism for supporting crystal pulling process production, which is used in the field of crystal pulling process equipment;

[0042] Reference Figure 4 In order to improve the sealing performance of the connection between the cylinder 2 and the cylinder fixing tube 1 and prevent gas leakage or dust from entering, an O-ring 16 is specially set on the base of the cylinder 2. The O-ring can effectively block external gas or impurities from entering the mechanism and prevent internal gas from leaking out, thereby ensuring the stable operation of the stirring mechanism under harsh working conditions.

[0043] In summary, the stirring mechanism in this specific embodiment realizes efficient stirring and oxidation of volatile substances in the ash bin through precise mechanism design and efficient mixing components, thereby improving the overall process efficiency and product quality. At the same time, by increasing the sealing and anti-return devices, the reliability and durability of the stirring mechanism in complex environments are ensured.

[0044] However, as is well known to those skilled in the art, the working principles and wiring methods of the cylinder 2 and the ratchet mechanism 4 are commonplace, and are conventional means or common knowledge, and will not be elaborated here. Those skilled in the art may make any optional selections according to their needs or convenience.

[0045] The working principle and usage process of this technical solution are as follows:

[0046] When in use, the cylinder 2, the connecting rod 3, the ratchet mechanism 4 and the cantilever 6 form a double rocker mechanism. By connecting the air source or power supply, the cylinder 2 is started, and the cylinder rod of the cylinder 2 begins to extend, pushing the connecting rod 3 through the cylinder rod joint 5, thereby driving the ratchet mechanism 4 to swing left and right. Because of the one-way rotation characteristic of the ratchet mechanism 4, the core shaft 8 drives the rotating arm 12 to rotate only in one direction, and the stirring process begins. The rotating arm 12 drives the high-efficiency mixing component to rotate in the ash bin, and the combined structure of the chain 13 and the counterweight block 14 mixes and stirs the materials in the ash bin. The special shape of the counterweight block 14 (positive and negative trapezoidal scrapers and elliptical scrapers) increases the complexity and efficiency of stirring, which helps to improve the oxidation efficiency of volatile substances.

[0047] In order to prevent the friction force of the ratchet mechanism 4 during its idle stroke from driving the core shaft 8 and the rotating arm 12 to reverse, another ratchet mechanism 4 installed on the cantilever 6 and the core shaft 8 can prevent their reverse and maintain the stirring effect. When the predetermined stirring time or effect is reached, the power supply or air source of the cylinder 2 is turned off, the rotating arm 12 stops rotating, and the stirring process ends.

[0048] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention; the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A stirring mechanism for supporting crystal pulling process production, characterized in that: include: A cylinder fixing tube (1), wherein a cylinder (2) is fixedly mounted in the cylinder fixing tube (1) by means of a plurality of screws (10), a cylinder rod joint (5) is fixedly arranged at the end of a cylinder rod of the cylinder (2), and a rotating arm (12) is arranged below the cylinder (2); A double rocker mechanism is provided on the cylinder (2) and is used to convert the linear motion of the cylinder (2) into rotational motion, thereby driving the rotating arm (12) to rotate; The high-efficiency mixing component is arranged on the rotating arm (12) and is used to improve the oxidation efficiency of the volatile substances filtered out in the ash bin.

2. A stirring mechanism for supporting crystal pulling process production according to claim 1, characterized in that: The double rocker mechanism comprises a connecting rod (3) connected to a cylinder rod joint (5), the connecting rod (3) being connected to a ratchet mechanism (4) via a pin (11), a cantilever (6) being fixedly mounted on the end surface of the cylinder fixing tube (1) via a screw (10), a bearing (7) being mounted on the end of the cantilever (6), and a core shaft (8) in the bearing (7) being arranged to penetrate the bearing (7).

3. A stirring mechanism for supporting crystal pulling process production according to claim 2, characterized in that: The ratchet mechanism (4) and the rotating arm (12) pass through the core shaft (8) from the bottom and are locked by a nut (9).

4. The stirring mechanism for supporting the crystal pulling process according to claim 1, characterized in that: The high-efficiency mixing assembly comprises a plurality of chains (13) fixedly arranged at the bottom of the rotating arm (12) through corresponding split pins (15), and the plurality of chains (13) are arranged at equal distances.

5. A stirring mechanism for supporting crystal pulling process production according to claim 4, characterized in that: A counterweight block (14) is fixedly provided at the other end of the chain (13) via a corresponding cotter pin (15).

6. A stirring mechanism for supporting crystal pulling process production according to claim 5, characterized in that: The plurality of counterweight blocks (14) are irregularly composed of positive and negative trapezoidal scrapers and elliptical scrapers.

7. A stirring mechanism for supporting crystal pulling process production according to claim 2, characterized in that: Another set of ratchet mechanisms (4) having a reverse stop function are installed on the cantilever (6) and the core shaft (8).

8. The stirring mechanism for supporting the crystal pulling process according to claim 1, characterized in that: An O-shaped sealing ring (16) is sleeved on the base of the cylinder (2) to improve the sealing performance of the connection between the cylinder (2) and the cylinder fixing tube (1).

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