Clamping jig for double-sided finish machining of valve block part

Abstract

The invention relates to the technical field of semiconductor valve block machining, in particular to a valve block part double-face finish machining clamping jig which comprises a right connecting frame, a left connecting frame and a bottom plate, the two ends of the bottom plate are fixedly connected with the right connecting frame and the left connecting frame respectively, and two through grooves penetrating in the height direction of the bottom plate are formed in the middle of the bottom plate; a through groove is formed in the bottom plate, a middle plate is arranged in the center of the through groove, the through groove is divided into two mounting grooves by the middle plate, the section size of each mounting groove is larger than that of each valve block, clamps for pressing the valve blocks on the two sides towards the two sides respectively are mounted on the middle plate, and a pressing device for pressing the valve blocks towards the rear side is arranged on the bottom plate. According to the clamping jig for double-sided finish machining of the valve block parts, the parts are arranged on the bottom plate, four parts can be installed in each time of clamping, installation is simple, the clamping jig can be rotated by 180 degrees to machine reverse stations, and the machine rate is effectively increased.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor valve block processing, and in particular to a clamping fixture for double-sided finishing of valve block parts. Background Art

[0002] With the rapid development of electronic integrated circuits and intelligent manufacturing technology, the demand for IC equipment has shown a significant growth trend. Among these advanced manufacturing equipment, valve block parts, as an important component of semiconductor equipment, have also seen a significant increase in demand. However, most valve block parts are consumable parts, and their processing efficiency and quality have become key factors restricting production efficiency.

[0003] In the traditional processing, valve block parts are usually clamped using conventional precision vises. This method is not only time-consuming and labor-intensive, reducing processing efficiency, but also during the finishing process, if the parts need to be turned over, it is difficult to ensure the repeated positioning accuracy of the parts, thus affecting the overall quality of the valve block parts.

[0004] In view of the above problems, the industry urgently needs an efficient and stable double-sided finishing and clamping solution for valve block parts. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a clamping fixture for double-sided finishing of valve block parts. The clamping fixture for double-sided finishing of valve block parts arranges the parts on a base plate. Four parts can be installed each time the clamping is performed. The installation is simple and the valve block parts can be rotated 180° to process the reverse side, thereby effectively improving the machine rate.

[0006] The technical solution of the present invention is as follows: A double-sided fine-machining clamping fixture for valve block parts comprises a right connecting frame, a left connecting frame and a bottom plate, the two ends of the bottom plate are respectively fixedly connected to the right connecting frame and the left connecting frame, two through grooves which penetrate in the height direction of the bottom plate are arranged in the middle of the bottom plate, an intermediate plate is arranged in the center of the through grooves, the intermediate plate divides the through grooves into two installation grooves whose cross-sectional dimensions are larger than those of the valve block, clamps which press the valve blocks on both sides toward both sides are installed on the intermediate plate, and a clamping device which presses the valve block toward the rear side is arranged on the bottom plate.

[0007] The clamping device includes a clamping block, a connecting rod, a stopper and a spring. A through hole 1 is provided on the bottom plate. The connecting rod is composed of a rod head, a rod body 1, a rod body 2 and a rod body 3 with outer diameters decreasing successively from the outside to the inside. The rod body cooperates with the through hole 1. The clamping block is composed of a straight rod and a clamping head arranged at both ends of the straight rod. A through hole 2 is provided on the straight rod. The rod body 2 cooperates with the through hole 2. The connecting rod passes through the through hole 1 and the through hole 2 successively and is fixedly connected with the stopper. The outer diameter of the stopper is larger than the diameter of the through hole 2. A spring is installed between the clamping block and the bottom plate, and the spring is sleeved on the rod body 1.

[0008] The rod body three is threadedly connected with the stopper, an external thread is arranged on the rod body three, and an internal thread hole matched with the rod body three is arranged at the center of the stopper.

[0009] The right connecting frame is composed of a right frame vertical plate and a right frame horizontal plate, the left connecting frame is composed of a left frame vertical plate and a left frame horizontal plate, and the two ends of the bottom plate are detachably connected with the right frame horizontal plate and the left frame horizontal plate.

[0010] The right frame vertical plate is fixedly mounted on the chuck of the processing machine tool and can rotate along with the chuck of the processing machine tool.

[0011] The left frame vertical plate is fixedly installed on a turntable with a rotary clamping function. The turntable is fixed on a working table of a processing machine tool. The rotation center of the turntable is consistent with the chuck center of the processing machine tool.

[0012] The clamping fixture for double-sided finishing of valve block parts also includes a backing plate, on which a boss corresponding to the mounting groove is arranged.

[0013] The clamp is a wedge-type block clamp model AK2-VT-SO.

[0014] The stopper is made of nylon.

[0015] Positioning L plates are respectively arranged between the right connecting frame, the left connecting frame and the bottom plate. The two positioning L plates are respectively fixedly connected to the right connecting frame and the left connecting frame. The two ends of the bottom plate can be quickly disassembled and connected with the positioning L plates through rivets.

[0016] The beneficial effects of the present invention are: 1. The present invention discloses a clamping fixture for double-sided finishing of valve block parts. The clamping fixture for double-sided finishing of valve block parts can arrange multiple valve block parts on a base plate through the designed clamping fixture. Up to 4 parts can be installed each time clamping. Compared with the traditional vise clamping method, the clamping process is greatly simplified, time and manpower are saved, and thus the processing efficiency is improved.

[0017] 2. The present invention discloses a double-sided finishing fixture for valve block parts. The double-sided finishing fixture for valve block parts adopts an embedded clamping solution, which effectively avoids the problem of parts floating during processing and improves the processing quality of the product. At the same time, the overall structure of the fixture is stable. Through high-strength design, it is ensured that the positioning accuracy of the parts will not decrease due to vibration or external force during the processing, thereby ensuring the accuracy of the reverse processing; key components such as the right connecting frame, the left connecting frame, the bottom plate, the connecting rod, the block, the pad and the like are made of carbon steel and are heat-treated, making the rigidity of the fixture stronger and increasing the stability and life of the fixture.

[0018] 3. The present invention discloses a double-sided finishing clamping jig for valve block parts. The double-sided finishing clamping jig for valve block parts has a designed positioning L-plate and rivet connection structure, so that the connection between the base plate and the left and right connecting frames can be quickly disassembled and assembled, thereby realizing rapid replacement of the jig and further improving the processing efficiency.

[0019] 4. The present invention discloses a clamping fixture for double-sided finishing of valve block parts. The stopper of the clamping fixture for double-sided finishing of valve block parts is made of nylon material, which avoids scratches on the surface of the parts during the processing and protects the surface quality of the parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only for the purpose of illustrating the preferred embodiment and are not to be considered as limiting the present invention.

[0021] In the attached picture: Figure 1 It is a schematic diagram of the overall structure of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention when in use; Figure 2 A schematic diagram of the three-dimensional structure of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 3 A top view of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 4 It is a schematic diagram of the exploded structure of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 5 It is a schematic diagram of the three-dimensional structure of a right connecting frame of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 6 It is a schematic diagram of the three-dimensional structure of the left connecting frame of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 7 It is a schematic diagram of the three-dimensional structure of a bottom plate of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Figure 8 It is a schematic diagram of the three-dimensional structure of a clamping block of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Fig. 9 A schematic diagram of the three-dimensional structure of a connecting rod of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; Fig.10 A schematic diagram of the three-dimensional structure of a backing plate of a clamping fixture for double-sided finishing of a valve block part according to an embodiment of the present invention; The components represented by the reference numerals in the figure are: The present invention: 1. a right connecting frame, 1a. a right frame vertical plate, 1b. a right frame horizontal plate, 2. a left connecting frame, 2a. a left frame vertical plate, 2b. a left frame horizontal plate, 3. a bottom plate, 3a. a through groove, 3b. a middle plate, 3c. a through hole one, 4. a clamping block, 4a. a straight rod, 4a1. a through hole two, 4b. a clamping head, 5. a connecting rod, 5a. a rod head, 5b. a rod body one, 5c. a rod body two, 5d. a rod body three, 6. a stopper, 7. a pad, 7a. a boss, 8. a positioning pin, 9. a bolt assembly, 10. a spring, 11. a rivet, 12. a clamp, 13. a positioning L-plate, 14. a turntable, 15. a valve block. DETAILED DESCRIPTION

[0022] like Figures 1 to 4 As shown, the clamping fixture for double-sided finishing of valve block parts mainly includes a right connecting frame 1, a left connecting frame 2, a base plate 3 and related clamping and positioning devices.

[0023] like Figure 5 As shown, the right connecting frame 1 is composed of a right frame vertical plate 1a and a right frame horizontal plate 1b, wherein the right frame vertical plate 1a is fixedly mounted on the chuck of the processing machine tool by bolt connection or the like, and can rotate with the chuck of the processing machine tool. It should be noted that the connection method between the right frame vertical plate 1a and the processing machine tool can be determined according to the specific structural form of the processing machine tool used. This embodiment is only an example, and this is not the core innovation point of this patent.

[0024] like Figure 6 As shown, the left connecting frame 2 is composed of a left frame vertical plate 2a and a left frame horizontal plate 2b. The left frame vertical plate 2a is fixedly mounted on a turntable 14 with a rotary clamping function by bolt connection or the like. The turntable 14 is fixed on the working table of the processing machine tool, and the rotation center of the turntable 14 is consistent with the chuck center of the processing machine tool. This design can ensure that during the processing, the fixture can be rotated 180° smoothly and accurately, so as to facilitate the fine processing of both sides of the valve block parts; the rotation of the turntable 14 can be achieved through the bearing structure.

[0025] Optionally, the two ends of the base plate 3 are respectively fixedly connected to the right frame cross plate 1b of the right connecting frame 1 and the left frame cross plate 2b of the left connecting frame 2 by bolts. Preferably, a quick disassembly connection can also be achieved through a positioning L plate 13 and a rivet 11. The positioning L plate 13 is respectively fixedly connected to the right connecting frame 1 and the left connecting frame 2. The base plate 3 can be conveniently installed on the connecting frame through the rivet 11, and can also be quickly disassembled to facilitate replacement or cleaning of the fixture.

[0026] like Figure 7As shown, two through slots 3a are provided in the middle of the bottom plate 3 and penetrate in the height direction of the bottom plate 3. An intermediate plate 3b is provided in the center of the through slot 3a to divide the through slot 3a into two installation slots with a cross-sectional size larger than the valve block 15. A clamp 12 (basic clamp - wedge block clamp - brand Qunqing Machinery; model: AK2-VT-SO order number: CT-806437:4) is installed on the intermediate plate 3b to press the valve blocks 15 on both sides to the two sides respectively; this clamp has a strong clamping force and stability, and can effectively prevent the parts from floating or shifting during the processing process.

[0027] In addition, a pressing device is also provided on the bottom plate 3 for pressing the valve block 15 toward the rear side. The pressing device comprises a pressing block 4, a connecting rod 5, a stopper 6 and a spring 10.

[0028] like Fig. 9 As shown, the connecting rod 5 is composed of a rod head 5a, a rod body 1 5b, a rod body 2 5c and a rod body 3 5d, which have decreasing outer diameters from outside to inside. A through hole 1 3c is provided on the bottom plate 3, and the rod body 5b is matched with the through hole 1 3c. Figure 8 As shown, the clamping block 4 is composed of a straight rod 4a and a clamping head 4b arranged at both ends of the straight rod 4a. A through hole 4a1 is arranged on the straight rod 4a, and a rod body 5c cooperates with the through hole 4a1. The connecting rod 5 passes through the through hole 1 3c and the through hole 2 4a1 in turn and is fixedly connected with the stopper 6. The outer diameter of the stopper 6 is larger than the diameter of the through hole 2 4a1 to prevent the clamping block 4 from falling off. A spring 10 is installed between the clamping block 4 and the base plate 3. The spring 10 is sleeved on the rod body 1 5b to form a rebound mechanism. When the valve block is installed, the elastic force of the spring 10 will make the clamping block 4 automatically fit the valve block, increasing the convenience of installation.

[0029] The rod body 3 5d is connected to the stopper 6 by threads, an external thread is arranged on the rod body 3 5d, and an internal thread hole matching the rod body 3 5d is arranged at the center of the stopper 6. This design can conveniently adjust the position and clamping force of the clamping block 4 to adapt to valve blocks of different sizes and materials.

[0030] The bolt assembly 9 is used for fixing the components.

[0031] In order to ensure the consistency of the valve block parts during installation, the present invention also provides a gasket 7. Fig.10 As shown, a boss 7a corresponding to the mounting groove is provided on the backing plate 7. When the valve block is installed, the bottom plate 3 is placed above the backing plate 7. The boss 7a plays a positioning role to ensure that the position of the valve block in the mounting groove is consistent.

[0032] When using the clamping fixture of the present invention, first place the backing plate 7 under the bottom plate 3, place the valve block 15 in the installation groove, and clamp it through the clamp 12 and the clamping device, then install the bottom plate 3 on the right connecting frame 1 and the left connecting frame 2 through the positioning L plate 13 and the rivet 11, then start the processing machine to fine-process one side of the valve block, and after the processing is completed, the processing machine rotates the fixture 180° to fine-process the other side of the valve block. During the whole process, the fixture structure is stable and the clamping device is reliable, ensuring the processing accuracy and efficiency.

[0033] The double-sided fine machining clamping jig of the valve block parts of the present invention can effectively solve the problem that traditional vise clamping is time-consuming and labor-intensive and affects processing efficiency and precision, thereby improving machine rate and product quality.

Claims

1. A clamping fixture for double-sided finishing of valve block parts, characterized in that: The invention comprises a right connecting frame (1), a left connecting frame (2) and a bottom plate (3), wherein two ends of the bottom plate (3) are fixedly connected to the right connecting frame (1) and the left connecting frame (2) respectively, and two through grooves (3a) are arranged in the middle of the bottom plate (3) and pass through the bottom plate (3) in the height direction, and an intermediate plate (3b) is arranged in the center of the through groove (3a), and the intermediate plate (3b) divides the through groove (3a) into two mounting grooves with a cross-sectional size larger than that of the valve block (15), and a clamp (12) is installed on the intermediate plate (3b) for respectively pressing the valve blocks (15) on both sides to the two sides, and a pressing device is arranged on the bottom plate (3) for pressing the valve block (15) to the rear side.

2. A double-sided finishing fixture for valve block parts according to claim 1, characterized in that: The clamping device comprises a clamping block (4), a connecting rod (5), a stopper (6) and a spring (10). A through hole 1 (3c) is provided on the bottom plate (3). The connecting rod (5) is composed of a rod head (5a), a rod body 1 (5b), a rod body 2 (5c) and a rod body 3 (5d) with decreasing outer diameters from the outside to the inside. The rod body (5b) cooperates with the through hole 1 (3c). The clamping block (4) comprises a straight rod (4a) and clamping heads provided at both ends of the straight rod (4a). (4b), a through hole 2 (4a1) is provided on the straight rod (4a), a rod body 2 (5c) cooperates with the through hole 2 (4a1), a connecting rod (5) passes through the through hole 1 (3c) and the through hole 2 (4a1) in sequence and is fixedly connected with a stopper (6), an outer diameter of the stopper (6) is larger than a diameter of the through hole 2 (4a1), a spring (10) is installed between the clamping block (4) and the bottom plate (3), and the spring (10) is sleeved on the rod body 1 (5b).

3. A double-sided finishing fixture for valve block parts according to claim 2, characterized in that: The rod body three (5d) is threadedly connected to the stopper (6); an external thread is provided on the rod body three (5d); and an internal thread hole matching the rod body three (5d) is provided at the center of the stopper (6).

4. A double-sided finishing fixture for valve block parts according to claim 1, characterized in that: The right connecting frame (1) is composed of a right frame vertical plate (1a) and a right frame horizontal plate (1b), the left connecting frame (2) is composed of a left frame vertical plate (2a) and a left frame horizontal plate (2b), and the two ends of the bottom plate (3) are detachably connected to the right frame horizontal plate (1b) and the left frame horizontal plate (2b).

5. A double-sided finishing fixture for valve block parts according to claim 4, characterized in that: The right frame vertical plate (1a) is fixedly mounted on the chuck of the processing machine tool and can rotate along with the chuck of the processing machine tool.

6. A fixture for double-sided finishing of valve block parts according to claim 5, characterized in that: The left frame vertical plate (2a) is fixedly mounted on a turntable (14) having a rotary clamping function. The turntable (14) is fixed on a workbench of a processing machine tool. The rotation center of the turntable (14) is consistent with the chuck center of the processing machine tool.

7. A double-sided finishing fixture for valve block parts according to claim 1, characterized in that: It also includes a backing plate (7), on which a boss (7a) corresponding to the mounting groove is provided.

8. The double-sided finishing fixture for valve block parts according to claim 1 is characterized in that: The clamp (12) is a wedge-type clamp with a model number of AK2-VT-SO.

9. A fixture for double-sided finishing of valve block parts according to claim 2, characterized in that: The stopper (6) is made of nylon.

10. A fixture for double-sided finishing of valve block parts according to claim 4, characterized in that: Positioning L plates (13) are respectively arranged between the right connecting frame (1) and the left connecting frame (2) and the bottom plate (3); the two positioning L plates (13) are respectively fixedly connected to the right connecting frame (1) and the left connecting frame (2); and the two ends of the bottom plate (3) can be quickly disassembled and connected to the positioning L plates (13) via rivets (11).

Images