Vacuum drying coating device for vacuum sputtering continuous coating production line

Abstract

The invention discloses a vacuum drying coating device for a vacuum sputtering continuous coating production line, and relates to the technical field of vacuum coating devices.The vacuum drying coating device comprises a vacuum chamber, a coating assembly and a coating turnover assembly are arranged in the vacuum chamber, and a plurality of drying lamps are connected to the inner wall of the vacuum chamber; according to the device, the air cylinder can be started, a push rod of the air cylinder stretches out and draws back to drive the rack to move, the rack is meshed with the gear, and the rotating rod, the second side plate, the connecting plate, the first side plate and the rotating shaft are sequentially driven, so that the cylindrical target material rotates around the axis of the rotating rod; therefore, the distance between the film-coating device and the to-be-coated plate on the conveying belt is Through the design, the lifting distance of the cylindrical target material can be accurately controlled and can be flexibly adjusted according to the thin film thickness requirement or the plate thickness; for example, the spacing can be reduced and the deposition speed can be accelerated during thick film production, and the spacing can be increased and the speed can be reduced during thin film production.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating devices, in particular to a vacuum drying coating device used in a vacuum sputtering continuous coating production line. Background Art

[0002] Vacuum coating is mainly based on the principles of physical vapor deposition and chemical vapor deposition. In physical vapor deposition, the coating material is transformed from solid to gaseous atoms or molecules through physical processes such as evaporation and sputtering, and then these gaseous particles move in a vacuum environment and deposit on the surface of the substrate.

[0003] According to the search, the Chinese patent document, announcement number: CN114875376A, discloses a continuous vacuum coating production line and coating process. The upper and lower ends of the mask plate in the metal mask plate structure are respectively engaged in the upper and lower slots, which is convenient for separate removal and recycling. The arcs generated by different power sources such as HIPIMS, DCpulse, MF, and RF are used to bombard the target material to generate metal atoms or ions, which react with the ionized reaction gas in the reaction chamber and then deposit on the surface of the metal mask plate to form a thick film. At the same time, due to the setting of the upper connecting shaft, the lower connecting shaft and the flip motor, it is convenient to flip the mask plate to turn over, complete the automatic face change of the metal mask plate, and achieve the purpose of double-sided coating.

[0004] However, in the above-mentioned coating technology, the equipment design lacks the function of effectively adjusting the distance between the cylindrical target and the workpiece to be coated. In the actual production process, different coating materials, workpiece thicknesses and required film properties have different requirements for this distance. If the cylindrical target is far away from the workpiece to be coated, the sputtered atoms need to travel a longer distance in the process of flying to the workpiece. In this process, they are more likely to collide with the residual gas molecules in the vacuum chamber, causing their direction of movement to change or energy loss. If the distance is too close, it is easy to cause a large number of sputtered particles to accumulate on the surface of the workpiece per unit time. These particles do not have enough time to arrange in order during the rapid deposition process, which is easy to produce internal stress. Summary of the invention

[0005] The purpose of the present invention is to make up for the deficiencies of the prior art and to provide a vacuum drying coating device for a vacuum sputtering continuous coating production line.

[0006] To achieve the above object, the present invention provides the following technical solution: a vacuum drying coating device for a vacuum sputtering continuous coating production line, comprising a vacuum chamber, a coating assembly and a coating flip assembly are arranged inside the vacuum chamber, a plurality of drying lamps are connected to the inner wall of the vacuum chamber, a conveyor belt is arranged inside the vacuum chamber, and sealing doors are installed at both ends of the vacuum chamber;

[0007] The coating assembly includes a first motor installed on the outer wall of the vacuum chamber, the output shaft of the first motor is fixedly connected to pulley one, the outer surface of pulley one is transmission-connected with a synchronous belt, the synchronous belt is transmission-connected with pulley two, the end face center of pulley two is fixedly connected with a rotating shaft, one end of the rotating shaft is fixedly connected with a cylindrical target material, and the outer surface of the rotating shaft is rotatably connected to a side plate No. 1 through a bearing, the top of the side plate No. 1 is fixedly connected with a connecting plate, one end of the connecting plate is fixedly connected with a side plate No. 2, the outer surface of the side plate No. 2 is fixedly connected with a rotating rod, one end of the rotating rod is fixedly connected with a gear, the gear is meshed with a rack, the bottom of the rack is slidably connected with a guide rail, and one end of the rack is connected with a cylinder, and the outer surface of the push rod of the cylinder is slidably connected to the fixed plate.

[0008] As a preferred solution of the present invention, both ends of the cylindrical target material are fixedly connected with rotating shafts, one of the rotating shafts is rotatably connected to the No. 1 side plate, and the other rotating shaft is rotatably connected to the No. 2 side plate, and a connecting plate is fixedly connected between the No. 1 side plate and the No. 2 side plate.

[0009] As a preferred solution of the present invention, the cylinder body end of the cylinder is installed on the outer surface of the fixed plate, and the center of the other end surface of the pulley is rotatably connected to the first side plate through a shaft matching bearing.

[0010] As a preferred solution of the present invention, the outer surface of the guide rail is connected to the outer wall of the vacuum chamber by bolts, and one end of the guide rail is fixedly connected to a fixing plate.

[0011] As a preferred solution of the present invention, two groups of the coating components are provided, and two groups of the drying lamps are also provided, and both ends of the drying lamps are connected to the inner sides of the vacuum chamber.

[0012] As a preferred solution of the present invention, the coating flipping assembly includes a transmission rod, shaft rod 1 and shaft rod 2 rotatably connected to the inner wall of the vacuum chamber, the outer surface of the transmission rod is fixedly connected to a rotating plate, the two ends of the rotating plate are rotatably connected to connecting rod 1 and connecting rod 2, the outer surface of shaft rod 1 is fixedly connected to a clamping plate No. 1, and the outer surface of shaft rod 2 is fixedly connected to a clamping plate No. 2.

[0013] As a preferred solution of the present invention, one end of the connecting rod 1 away from the rotating plate is rotatably connected to the tail end of the first clamping plate, one end of the connecting rod 2 away from the rotating plate is rotatably connected to the tail end of the second clamping plate, one end of the transmission rod is connected to the output shaft of the second motor, and the second motor is installed on the outer wall of the vacuum chamber.

[0014] As a preferred solution of the present invention, placement grooves are provided on the upper surfaces of the No. 1 clamping plate and the No. 2 clamping plate, and anti-slip ceramic strips are pasted in the placement grooves.

[0015] As a preferred solution of the present invention, the sealed door includes a door body arranged at both ends of the vacuum chamber, the inner surface of the door body is fixedly connected to a hinge plate, the outer surface of the hinge plate is connected to hinge rod 1 and hinge rod 2, the outer surface of hinge rod 1 is rotatably connected to bent rod 1, one end of bent rod 1 is rotatably connected to bent rod 2, one end of bent rod 2 is fixedly connected to a connecting rod, one end of the connecting rod is fixedly connected to the output shaft of a third motor, and one end of hinge rod 1 and hinge rod 2 away from the hinge plate slides in contact with a limiting plate.

[0016] As a preferred solution of the present invention, the third motor is installed on the outer wall of the vacuum chamber, the outer surface of the limit plate is penetrated by straight grooves and arc grooves, and the limit plate is fixedly connected to the inner wall of the vacuum chamber.

[0017] Compared with the prior art, the vacuum drying coating device for the vacuum sputtering continuous coating production line has the following beneficial effects:

[0018] 1. The present invention can start the cylinder, and the push rod of the cylinder can be extended and retracted to drive the rack to move, and the rack is meshed with the gear, which in turn drives the rotating rod, the second side plate, the connecting plate, the first side plate, and the rotating shaft, so that the cylindrical target rotates around the axis of the rotating rod, thereby adjusting the distance between the cylindrical target and the plate to be coated on the conveyor belt; this design can accurately control the lifting distance of the cylindrical target, and flexibly adjust it according to the film thickness requirements or the plate thickness; for example, when producing thick films, the spacing can be reduced to speed up the deposition speed, and when producing thin films, the spacing can be increased to reduce the speed, which can not only improve the film deposition rate, but also accurately control the film thickness, and can also be suitable for the coating of plates of different thicknesses, thereby improving the production flexibility and product quality.

[0019] 2. In the process of conveying plates on the conveyor belt of the present invention, when the plates pass over the coating flipping assembly and the coating on one side is completed, the second motor is started to drive the transmission rod, the rotating plate, the connecting rod one, the connecting rod two, the No. 1 clamping plate and the No. 2 clamping plate to realize the flipping of the plates; in this way, another set of coating assemblies can coat the other side, and double-sided coating can be completed in one process, which greatly improves the coating efficiency; and the anti-slip ceramic strips on the No. 1 clamping plate and the No. 2 clamping plate can withstand higher temperatures, ensuring stable clamping and flipping of the plates in a high temperature environment.

[0020] Other advantages, objectives and features of the present invention will be set forth in part in the following description and, in part, will be apparent to those skilled in the art based on an examination of the following or may be taught from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0022] Figure 2It is a schematic diagram of a partial three-dimensional structure of the present invention;

[0023] Figure 3 It is a cross-sectional structural schematic diagram of the present invention;

[0024] Figure 4 It is a schematic diagram of the three-dimensional structure of the coating assembly of the present invention;

[0025] Figure 5 It is a partial three-dimensional structural schematic diagram of the coating assembly of the present invention;

[0026] Figure 6 It is a schematic diagram of the three-dimensional structure of the coating flip assembly of the present invention;

[0027] Figure 7 It is a front structural schematic diagram of the coating flip assembly of the present invention;

[0028] Figure 8 It is a schematic diagram of the three-dimensional structure of the sealing door of the present invention;

[0029] Fig. 9 For the present invention Figure 8 Schematic diagram of the locally enlarged structure of A in the middle.

[0030] In the figure: 1. vacuum chamber; 2. coating assembly; 201. first motor; 202. pulley 1; 203. synchronous belt; 204. pulley 2; 205. rotating shaft; 206. cylindrical target; 207. side plate No. 1; 208. connecting plate; 209. side plate No. 2; 210. rotating rod; 211. gear; 212. rack; 213. guide rail; 214. cylinder; 215. fixed plate; 3. coating flip assembly; 301. transmission rod; 302. shaft rod 1; 303, shaft rod 2; 304, rotating plate; 305, connecting rod 1; 306, connecting rod 2; 307, clamping plate No. 1; 308, clamping plate No. 2; 309, second motor; 310, anti-skid ceramic strip; 4, drying lamp; 5, conveyor belt; 6, sealing door; 601, door body; 602, hinge plate; 603, hinge rod 1; 604, hinge rod 2; 605, curved rod 1; 606, curved rod 2; 607, connecting rod; 608, third motor; 609, limit plate. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] like Figure 1-9As shown, the present invention provides a technical solution: a vacuum drying coating device for a vacuum sputtering continuous coating production line, comprising a vacuum chamber 1, a coating assembly 2 and a coating flip assembly 3 are arranged inside the vacuum chamber 1, a plurality of drying lamps 4 are connected to the inner wall of the vacuum chamber 1, a conveyor belt 5 is arranged inside the vacuum chamber 1, and sealing doors 6 are installed at both ends of the vacuum chamber 1;

[0033] The coating assembly 2 includes a first motor 201 installed on the outer wall of the vacuum chamber 1, the output shaft of the first motor 201 is fixedly connected to a pulley 202, the outer surface of the pulley 202 is connected to a synchronous belt 203, the synchronous belt 203 is connected to a pulley 204, the end center of the pulley 204 is fixedly connected to a rotating shaft 205, one end of the rotating shaft 205 is fixedly connected to a cylindrical target 206, and the outer surface of the rotating shaft 205 is rotatably connected to a side plate 207 through a bearing, and the side plate 207 is connected to the outer surface of the rotating shaft 205. The top of the side plate 207 is fixedly connected to a connecting plate 208, one end of the connecting plate 208 is fixedly connected to a second side plate 209, the outer surface of the second side plate 209 is fixedly connected to a rotating rod 210, one end of the rotating rod 210 is fixedly connected to a gear 211, the gear 211 is meshed with a rack 212, the bottom of the rack 212 is slidably connected to a guide rail 213, and one end of the rack 212 is connected to a cylinder 214, the outer surface of the push rod of the cylinder 214 is slidably connected to a fixed plate 215.

[0034] like Figure 1-Figure 4 As shown, both ends of the cylindrical target 206 are fixedly connected with rotating shafts 205, one of the rotating shafts 205 is rotatably connected to the first side plate 207, and the other rotating shaft 205 is rotatably connected to the second side plate 209, and a connecting plate 208 is fixedly connected between the first side plate 207 and the second side plate 209.

[0035] By starting the first motor 201, the pulley 1 202 can be driven to rotate, and the pulley 1 202 can rotate the pulley 2 204 through the synchronous belt 203, so that the pulley 204 can drive the rotating shaft 205 to rotate. Since both ends of the cylindrical target 206 are connected to the rotating shaft 205, the cylindrical target 206 can be driven by the rotating shaft 205 to rotate; an ion source device is arranged outside the vacuum chamber 1, which is connected to the inside of the vacuum chamber 1 through a special pipe or window. When an inert gas is introduced into the inside of the vacuum chamber 1, the ions generated by the ion source device pass through the vacuum chamber 1. After being accelerated by the electric field in the air environment, they fly to the surface of the cylindrical target material 206 with a certain motion trajectory. After the atoms or molecules on the surface of the cylindrical target material 206 obtain sufficient kinetic energy, they will overcome the binding energy of the surface, detach from the surface and sputter out (the above is the prior art and will not be elaborated on in detail). By making the cylindrical target material 206 rotatable, the area bombarded by the ions will continuously change on the entire cylindrical surface as the cylindrical target material 206 rotates, so that all parts of the target material can be evenly sputtered, thereby greatly improving the overall utilization rate of the target material and reducing production costs.

[0036] like Figure 5 As shown, the cylinder body end of the cylinder 214 is mounted on the outer surface of the fixed plate 215, and the center of the other end surface of the pulley 202 is rotatably connected to the first side plate 207 through a shaft matching bearing.

[0037] The outer surface of the guide rail 213 is connected to the outer wall of the vacuum chamber 1 by bolts, and one end of the guide rail 213 is fixedly connected to the fixing plate 215 .

[0038] By starting the cylinder 214, the push rod end is extended or retracted. At this time, the cylinder 214 can drive the rack 212 to move, and the rack 212 drives the gear 211 meshing therewith to rotate, and the gear 211 drives the rotating rod 210 to rotate, and the rotating rod 210 drives the No. 2 side plate 209 to rotate, and the No. 2 side plate 209 drives the connecting plate 208, and the connecting plate 208 drives the No. 1 side plate 207 to rotate, so that the No. 1 side plate 207 cooperates with the No. 2 side plate 209 to drive the rotating shaft 205, and the rotating shaft 205 drives the cylindrical target 206 to rotate around the axis of the rotating rod 210, so that the distance between the cylindrical target 206 and the upper surface of the conveyor belt 5 can be adjusted, and then the distance from the plate to be coated can be adjusted. By controlling the output stroke of the cylinder 214, the lifting distance of the cylindrical target 206 can be controlled. When the distance between the cylindrical target 206 and the plate to be coated is adjusted to a suitable distance, the path of the sputtered atoms or molecules to reach the surface of the plate is shortened. In a vacuum environment, the particles are less likely to collide with gas molecules and suffer less energy loss during flight, so that more particles can be deposited on the surface of the plate per unit time, thereby increasing the deposition rate of the film. By adjusting the distance, the film deposition rate can be flexibly controlled according to actual production needs. For example, for films with different thickness requirements, if a thicker film is required, the distance can be appropriately reduced to speed up the deposition rate. If only a very thin film is required, the distance can be increased to reduce the deposition rate, thereby accurately controlling the film thickness. The distance can also be adjusted according to the thickness of the plate, so that it can be suitable for coating plates of different thicknesses.

[0039] like Figure 2 As shown, two groups of coating components 2 are provided, and two groups of drying lamps 4 are also provided, and two ends of the drying lamps 4 are connected to two sides inside the vacuum chamber 1 .

[0040] The plate to be coated can be transported by the conveyor belt 5. During the transportation process, it will pass under several drying lamps 4. The drying lamps 4 can dry the outer surface of the plate to remove water vapor. When the film is deposited on the surface of the plate containing water vapor, the water vapor will form an isolation layer between the film and the plate, weakening the bonding force between the film and the plate. After drying with the drying lamps 4, this situation can be improved, so that the film can be more firmly attached to the surface of the plate, reducing the phenomenon of film peeling.

[0041] like Figure 3 , Figure 6-Figure 7 As shown, the coating flip assembly 3 includes a transmission rod 301, an axis rod 1 302 and an axis rod 2 303 rotatably connected to the inner wall of the vacuum chamber 1, the outer surface of the transmission rod 301 is fixedly connected to a rotating plate 304, the two ends of the rotating plate 304 are rotatably connected to a connecting rod 1 305 and a connecting rod 2 306, the outer surface of the axis rod 1 302 is fixedly connected to a clamping plate No. 1 307, and the outer surface of the axis rod 2 303 is fixedly connected to a clamping plate No. 2 308.

[0042] One end of connecting rod 1 305 away from the rotating plate 304 is rotatably connected to the tail end of clamping plate 1 307, one end of connecting rod 2 306 away from the rotating plate 304 is rotatably connected to the tail end of clamping plate 2 308, one end of the transmission rod 301 is connected to the output shaft of the second motor 309, and the second motor 309 is installed on the outer wall of the vacuum chamber 1.

[0043] The upper surfaces of the No. 1 clamping plate 307 and the No. 2 clamping plate 308 are both provided with placement grooves, and anti-skid ceramic strips 310 are pasted in the placement grooves.

[0044] After coating one side of the plate, as the conveyor belt 5 continues to transport, when the plate passes over the coating flip assembly 3, the second motor 309 is started to drive the transmission rod 301 to rotate, and the transmission rod 301 drives the rotating plate 304 to rotate, and the rotating plate 304 can pull the connecting rod 1 305 and the connecting rod 2 306, the connecting rod 1 305 can pull the first clamping plate 307 to rotate, and the connecting rod 2 306 can pull the second clamping plate 308 to rotate. When the rotating plate 304 rotates ninety degrees, the first clamping plate 307 is rotated. The holding plate 307 cooperates with the No. 2 clamping plate 308 to clamp the plate. As the rotating plate 304 continues to rotate, the rotating plate 304 drives the connecting rod 1 305 and the connecting rod 2 306 to pull the No. 1 clamping plate 307 and the No. 2 clamping plate 308 in opposite directions. At this time, the plate can be turned over, so that another set of coating components 2 can coat the other side of the plate. The overall structure can complete the coating of both sides of the plate in one process, thereby improving the efficiency of coating. In addition, by setting an anti-slip ceramic strip 310 to contact the plate, it can withstand higher temperatures.

[0045] like Figure 8-Figure 9As shown, the sealing door 6 includes a door body 601 arranged at both ends of the vacuum chamber 1, the inner surface of the door body 601 is fixedly connected with a hinge plate 602, the outer surface of the hinge plate 602 is connected with a hinge rod 1 603 and a hinge rod 2 604, the outer surface of the hinge rod 1 603 is rotatably connected with a bent rod 1 605, one end of the bent rod 1 605 is rotatably connected with a bent rod 2 606, one end of the bent rod 2 606 is fixedly connected with a connecting rod 607, one end of the connecting rod 607 is fixedly connected with the output shaft of a third motor 608, and one end of the hinge rod 1 603 and the hinge rod 2 604 away from the hinge plate 602 slides in contact with a limiting plate 609.

[0046] The third motor 608 is installed on the outer wall of the vacuum chamber 1 . A straight groove and an arc groove are formed through the outer surface of the limiting plate 609 , and the limiting plate 609 is fixedly connected to the inner wall of the vacuum chamber 1 .

[0047] By starting the third motor 608 to rotate it clockwise, the connecting rod 607 is driven to rotate, the connecting rod 607 drives the second curved rod 606, the second curved rod 606 drives the first curved rod 605, the first curved rod 605 forces the first hinge rod 603 and the second hinge rod 604 to slide in the straight groove of the limit plate 609, when the second hinge rod 604 hits the rightmost end of the straight groove of the limit plate 609, the first hinge rod 603 is just located at the intersection of the straight groove and the arc groove on the limit plate 609, and the first curved rod 605 continues to drive, which will force the first hinge rod 603 enters the arc groove, at which time the hinge plate 602 rotates around the hinge rod 2 604, and then the hinge plate 602 drives the door body 601 to turn over, so that the door body 601 is opened, so that material can be fed into the vacuum chamber 1. After the feeding is completed, the third motor 608 is operated in reverse to close the door body 601 at both ends of the vacuum chamber 1. The junctions between the vacuum chamber 1 and the output ends of the first motor 201, the second motor 309 and the third motor 608 are all sealed, and the overall structure ensures the sealing of the vacuum chamber 1.

[0048] Working principle: first start the third motor 608, and its output shaft drives the connecting rod 607 to rotate, so that the second curved rod 606 and the first curved rod 605 move, and the hinge rod 1 603 and the second hinge rod 604 slide in the straight groove of the limit plate 609, and then the hinge rod 1 603 enters the arc groove, drives the hinge plate 602 to make the door body 601 flip open for feeding, and after the feeding is completed, the third motor 608 is reversed to close the door body 601; the conveyor belt 5 conveys the plate to be coated to pass under the drying lamp 4, and the drying lamp 4 dries the water vapor on the outer surface of the plate to prevent the water vapor from forming an isolation layer between the film and the plate, thereby enhancing the bonding force between the film and the plate; then start the cylinder 214, push the rack 212, and drive the cylindrical target 206 to rotate around the axis of the rotating rod 210 through the gear 211, the rotating rod 210 and other components, so as to adjust the distance between the cylindrical target 206 and the plate to be coated. The distance can be accurately controlled by controlling the stroke of the cylinder 214, and then according to the film thickness requirements or the plate thickness flexibility Actively control the deposition rate; then start the first motor 201, drive the pulley 1 202, the synchronous belt 203, the pulley 204, and the rotating shaft 205 to rotate the cylindrical target 206. At the same time, the ions generated by the ion source device outside the vacuum chamber 1 are accelerated by the electric field in the vacuum environment of the inert gas and bombard the cylindrical target 206, so that the atoms or molecules on the surface are sputtered out. The rotation of the cylindrical target 206 can improve the utilization rate of the target and reduce the cost; finally, when the coating on one side of the plate is completed When the conveyor belt 5 passes over the coating flipping assembly 3, the second motor 309 is started to drive the transmission rod 301, the rotating plate 304, the connecting rod 1 305, the connecting rod 2 306, the first clamping plate 307, and the second clamping plate 308 to flip the plate, and another set of coating assemblies 2 coats the other side, completing double-sided coating in one process, thereby improving the coating efficiency, and the anti-slip ceramic strips 310 on the first clamping plate 307 and the second clamping plate 308 can withstand higher temperatures.

[0049] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum drying coating device for a vacuum sputtering continuous coating production line, comprising a vacuum chamber (1), wherein a coating assembly (2) and a coating flip assembly (3) are arranged inside the vacuum chamber (1), characterized in that: A plurality of drying lamps (4) are connected to the inner wall of the vacuum chamber (1), a conveyor belt (5) is arranged inside the vacuum chamber (1), and sealing doors (6) are installed at both ends of the vacuum chamber (1); The coating assembly (2) comprises a first motor (201) mounted on the outer wall of the vacuum chamber (1); the output shaft of the first motor (201) is fixedly connected to a pulley 1 (202); the outer surface of the pulley 1 (202) is transmission-connected to a synchronous belt (203); the synchronous belt (203) is transmission-connected to a pulley 2 (204); the center of the end surface of the pulley 2 (204) is fixedly connected to a rotating shaft (205); one end of the rotating shaft (205) is fixedly connected to a cylindrical target (206); and the outer surface of the rotating shaft (205) is rotationally connected to a side plate (207) via a bearing; the side plate (207) is rotationally connected to a cylindrical target (206). The top of the plate (207) is fixedly connected to a connecting plate (208), one end of the connecting plate (208) is fixedly connected to a second side plate (209), the outer surface of the second side plate (209) is fixedly connected to a rotating rod (210), one end of the rotating rod (210) is fixedly connected to a gear (211), the gear (211) is meshedly connected to a rack (212), the bottom of the rack (212) is slidably connected to a guide rail (213), and one end of the rack (212) is connected to a cylinder (214), and the outer surface of the push rod of the cylinder (214) is slidably connected to a fixed plate (215).

2. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: Both ends of the cylindrical target (206) are fixedly connected with a rotating shaft (205), one of the rotating shafts (205) is rotatably connected to the first side plate (207), and the other rotating shaft (205) is rotatably connected to the second side plate (209), and a connecting plate (208) is fixedly connected between the first side plate (207) and the second side plate (209).

3. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: The cylinder body end of the cylinder (214) is mounted on the outer surface of the fixed plate (215), and the center of the other end surface of the pulley (202) is rotatably connected to the first side plate (207) through a shaft matching bearing.

4. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: The outer surface of the guide rail (213) is connected to the outer wall of the vacuum chamber (1) by means of bolts, and one end of the guide rail (213) is fixedly connected to a fixing plate (215).

5. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: The coating components (2) are provided in two groups, and the drying lamps (4) are also provided in two groups, and the two ends of the drying lamps (4) are connected to the two sides inside the vacuum chamber (1).

6. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: The coating flip assembly (3) comprises a transmission rod (301) rotatably connected to the inner wall of the vacuum chamber (1), an axle rod one (302) and an axle rod two (303); the outer surface of the transmission rod (301) is fixedly connected to a rotating plate (304); the two ends of the rotating plate (304) are rotatably connected to a connecting rod one (305) and a connecting rod two (306); the outer surface of the axle rod one (302) is fixedly connected to a clamping plate number one (307); and the outer surface of the axle rod two (303) is fixedly connected to a clamping plate number two (308).

7. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 6, characterized in that: One end of the connecting rod 1 (305) away from the rotating plate (304) is rotatably connected to the tail end of the first clamping plate (307), and one end of the connecting rod 2 (306) away from the rotating plate (304) is rotatably connected to the tail end of the second clamping plate (308). One end of the transmission rod (301) is connected to the output shaft of the second motor (309), and the second motor (309) is installed on the outer wall of the vacuum chamber (1).

8. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 7, characterized in that: The upper surfaces of the No. 1 clamping plate (307) and the No. 2 clamping plate (308) are both provided with placement grooves, and anti-slip ceramic strips (310) are pasted in the placement grooves.

9. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 1, characterized in that: The sealed door (6) includes a door body (601) arranged at both ends of the vacuum chamber (1), the inner surface of the door body (601) is fixedly connected to a hinge plate (602), the outer surface of the hinge plate (602) is connected to a hinge rod 1 (603) and a hinge rod 2 (604), the outer surface of the hinge rod 1 (603) is rotatably connected to a bent rod 1 (605), one end of the bent rod 1 (605) is rotatably connected to a bent rod 2 (606), one end of the bent rod 2 (606) is fixedly connected to a connecting rod (607), one end of the connecting rod (607) is fixedly connected to the output shaft of a third motor (608), and one end of the hinge rod 1 (603) and the hinge rod 2 (604) away from the hinge plate (602) slides in contact with a limiting plate (609).

10. The vacuum drying coating device for a vacuum sputtering continuous coating production line according to claim 9, characterized in that: The third motor (608) is mounted on the outer wall of the vacuum chamber (1); a straight groove and an arc groove are formed through the outer surface of the limit plate (609); and the limit plate (609) is fixedly connected to the inner wall of the vacuum chamber (1).

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