Vacuum pump cooling control system and method based on data analysis

Abstract

The invention discloses a vacuum pump cooling control system and method based on data analysis, and belongs to the technical field of vacuum pump cooling. The system comprises a control module, a data acquisition module, a database, a model analysis module, an intelligent calculation module, an intelligent adjustment module and an interaction module. The control module is used for controlling the vacuum pump and the cooling device; the data acquisition module is used for acquiring parameter data of the vacuum pump and acquiring operation data in the operation process of the vacuum pump; the database is used for storing historical data; the model analysis module is used for establishing a vacuum pump temperature analysis model and fitting a curve of a vacuum pump cooling effect under different cooling liquid flows and temperature differences; the intelligent calculation module is used for calculating the cooling liquid flow needing to be adjusted in the cooling device at the next moment; the intelligent adjusting module is used for dynamically adjusting the flow of the cooling liquid; and the interaction module is used for providing a man-machine interaction platform and performing digital display.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pump cooling, and in particular to a vacuum pump cooling control system and method based on data analysis. Background Art

[0002] A vacuum pump is a device used to remove gas from a sealed container to create and maintain a vacuum environment. It is widely used in electronic manufacturing, chemical processing, medical equipment, food packaging and other fields. To ensure the safety of the vacuum pump operation, when the temperature of the vacuum pump is too high, a cooling device is required to cool the vacuum pump. The circulating coolant in the cooling device absorbs the heat generated by the vacuum pump during operation to ensure that all components of the pump operate within an appropriate temperature range.

[0003] By controlling the coolant flow in the cooling device, the temperature of the vacuum pump can be maintained within the optimal range. Within a certain range, the greater the coolant flow, the higher the heat absorption efficiency of the vacuum pump. However, there are often system delays in the process of coolant flow control, which leads to inaccurate temperature control of the vacuum pump and affects the operating efficiency of the vacuum pump system. In addition, the existing technology is insufficient in analyzing the data generated during the operation of the vacuum pump and is unable to extract effective information. Blindly increasing the coolant flow will lead to a waste of resources. Summary of the invention

[0004] The object of the present invention is to provide a vacuum pump cooling control system and method based on data analysis to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a vacuum pump cooling control method based on data analysis, the method comprising the following steps: S10, controlling the vacuum pump to extract gas from the container, and starting the cooling device to cool the vacuum pump; S20, obtaining parameter data of the vacuum pump, and collecting operating data during the operation of the vacuum pump; the parameter data includes the volume of the vacuum pump suction port and exhaust port; the operating data includes the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port; S30, storing the operation data as historical data in a database, and updating the database; establishing a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fitting a curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences; S40, determining the target temperature of the gas at the exhaust port of the vacuum pump; calculating the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model, and dynamically adjusting the coolant flow rate until the cooling device is turned off.

[0006] A vacuum pump cooling control system based on data analysis, the system comprises a control module, a data acquisition module, a database, a model analysis module, an intelligent calculation module, an intelligent adjustment module and an interaction module; The control module is used to control the vacuum pump to extract gas from the container, and start or shut down the cooling device to cool the vacuum pump; and send control signals of the vacuum pump and the cooling device to the data acquisition module; The data acquisition module is used to obtain parameter data of the vacuum pump and collect operating data during the operation of the vacuum pump; the parameter data includes the volume of the vacuum pump suction port and exhaust port; the operating data includes the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port; the collected operating data is sent to the database, intelligent computing module and interactive module; The database is used to store the operating data as historical data and continuously update it; The model analysis module is used to establish a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fit the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences; The intelligent calculation module is used to calculate the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model; and send the calculated coolant flow rate required to be adjusted in the cooling device at the next moment to the intelligent adjustment module and the interaction module; The intelligent adjustment module is used to dynamically adjust the coolant flow until the cooling device is turned off; The interactive module is used to provide a human-computer interaction platform to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow rate in the cooling device at the next moment; wherein, the management personnel can control the target temperature of the gas at the exhaust port of the vacuum pump and the coolant flow rate in the cooling device through the human-computer interaction platform.

[0007] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: by collecting the operating data at the suction and exhaust ports of the vacuum pump and analyzing the changing process of the gas temperature in the vacuum pump, the data information mining capability of the system is improved; by establishing a vacuum pump temperature analysis model, fitting the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences, and calculating the coolant flow rate that needs to be adjusted in the cooling device at the next moment, the coolant flow rate is controlled in advance, the system control delay is reduced, and the operating efficiency of the vacuum pump is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a schematic diagram of the steps of a vacuum pump cooling control method based on data analysis of the present invention; Figure 2 It is a structural schematic diagram of a vacuum pump cooling control system based on data analysis of the present invention. DETAILED DESCRIPTION

[0009] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0010] See also Figure 1-2 , the present invention provides a technical solution: See also Figure 1 In the first embodiment of the present invention, a vacuum pump cooling control method based on data analysis is provided. In the method, a vacuum pump is used to create a vacuum environment for industrial production. The method includes the following steps: S10, controlling the vacuum pump to extract the gas in the container, and starting the cooling device to cool the vacuum pump.

[0011] In this embodiment, the vacuum pump is a screw vacuum pump; the container represents a closed device for extracting gas from the vacuum pump, which is used to create a vacuum environment; and the cooling device is used to cool the vacuum pump.

[0012] S20. Obtain parameter data of the vacuum pump and collect operating data during the operation of the vacuum pump; the parameter data include the volume of the vacuum pump suction port and exhaust port; the operating data include the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port.

[0013] Furthermore, the container is connected to the suction port of the vacuum pump; the exhaust port of the vacuum pump is connected to the external environment; the suction port volume represents the maximum inter-tooth volume when the suction port of the vacuum pump and the container are connected to each other; the exhaust port volume represents the inter-tooth volume when it is about to be connected to the exhaust port of the vacuum pump; the suction port gas temperature and pressure represent the gas temperature and pressure in the suction port volume; the exhaust port gas temperature and pressure represent the gas temperature and pressure in the exhaust port volume.

[0014] In the present embodiment, the inter-tooth volume refers to a space formed between a pair of intermeshing screw rotors.

[0015] It should be noted that the operation process of the screw vacuum pump includes suction, compression and exhaust; during suction, the rotor inside the vacuum pump rotates, and one end of the tooth gradually disengages from the meshing to form an inter-tooth volume, and the inter-tooth volume gradually increases to the size of the vacuum pump suction port volume. Due to the pressure difference between the space inside the vacuum pump suction port and the container, the gas in the container flows into the space inside the vacuum pump suction port volume at this time; during compression, as the rotor continues to rotate, in the closed space, the inter-tooth volume continues to decrease, and the gas volume also decreases accordingly, resulting in an increase in gas pressure. When the inter-tooth volume is about to be connected to the vacuum pump exhaust port, the gas pressure and temperature reach the highest at this time; during exhaust, the inter-tooth volume is connected to the vacuum pump exhaust port, the inter-tooth volume continues to decrease, and the gas is discharged at the exhaust port until the inter-tooth volume becomes 0 again.

[0016] S30, storing the operation data as historical data in a database, and updating the database; establishing a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fitting the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences.

[0017] Specifically, the method steps are: S301. Determine the volume of the vacuum pump suction port according to the parameter data of the vacuum pump. and exhaust port volume ; Retrieve historical operation data from the database for analysis and determine different timestamps Gas temperature at the suction port of the lower vacuum pump , Gas pressure at the inlet , Exhaust gas temperature , Exhaust port gas pressure ; Determine different timestamps Coolant flow rate in the lower cooling device and temperature ; S302, according to The gas pressure at the exhaust port at all times , Vacuum pump suction port volume size and exhaust port volume , when there is no heat exchange with the outside, The gas temperature at the vacuum pump exhaust port at the moment : ; in, Indicates the molar coefficient of the gas in the inter-tooth volume; It represents the specific heat capacity at constant volume of the gas in the inter-tooth volume; S303, establish a vacuum pump temperature analysis model, and Temperature difference between lower coolant and air inlet and coolant flow rate As independent variables and , the coolant temperature is The impact value of the moment As dependent variable , fitting the curve of the vacuum pump cooling effect under different coolant flow rates and temperature differences, and obtaining the calculation expression of the fitting curve: ; in, express The temperature of the gas at the vacuum pump exhaust port when there is no heat exchange with the outside world; express The gas temperature at the exhaust port of the vacuum pump at all times; and are all constants.

[0018] It should be noted that during the operation of the vacuum pump, the gas pressure in the inter-tooth volume continues to increase, thereby generating a large amount of heat, causing the temperature of the vacuum pump to rise; by calculating the exhaust port temperature when the gas in the inter-tooth volume does not exchange heat with the outside world, and comparing it with the actual collected exhaust port temperature, the influence of the cooling device on the temperature change of the exhaust port of the vacuum pump is determined; by collecting the operating data at the suction port and exhaust port of the vacuum pump, the change process of the gas temperature in the vacuum pump is analyzed, and a vacuum pump temperature analysis model is established to analyze the influence of the coolant flow rate and the temperature difference between the coolant and the suction port gas on the cooling effect of the vacuum pump, thereby improving the data information mining capability of the system and providing a data analysis basis for the subsequent calculation of the coolant flow rate.

[0019] In this implementation, historical operation data is retrieved from the database for analysis, and different timestamps are Temperature difference between lower coolant and air inlet and coolant flow rate As independent variables and , the coolant temperature is The impact value of the moment As dependent variable , respectively determine the independent variables as and When The corresponding points on the axis; according to the least squares method, we can get the Next, about and The curve calculation formula and the corresponding and Value; among them, , and It reflects the influence of different coolant flow rates and temperature differences on the cooling effect of the vacuum pump.

[0020] S40, determining the target temperature of the gas at the exhaust port of the vacuum pump; calculating the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model, and dynamically adjusting the coolant flow rate until the cooling device is turned off.

[0021] Specifically, the method steps are: S401. Determine the target temperature of the gas at the vacuum pump exhaust port ; Analyze the collected operation data to determine the current The gas temperature at the vacuum pump suction port at all times And the gas pressure at the inlet ; Determine the coolant temperature in the cooling device According to the calculation formula of step S302, predict The gas temperature at the vacuum pump exhaust port at the moment ; Wherein, the temperature of the coolant in the cooling device is fixed; S402, according to And the calculation expression of the fitting curve in the vacuum pump temperature analysis model, calculate The coolant flow rate that needs to be adjusted in the cooling device at all times : ; S403, according to the calculation , dynamically adjust the coolant flow in the cooling device at the next moment until the cooling device is turned off.

[0022] In this implementation, arrive Moment and arrive The time step length of each moment is the time interval from the suction port to the exhaust port of the vacuum pump; Indicates the timestamp corresponding to the historical data; represents the current timestamp; wherein, according to the calculation formula of step S302, the predicted The gas temperature at the vacuum pump exhaust port at the moment The method is: according to the ideal gas state equation and the target temperature of the gas at the exhaust port of the vacuum pump ,predict The gas pressure at the exhaust port at all times : ;according to and ,predict The gas temperature at the vacuum pump exhaust port at the moment : .

[0023] Furthermore, a human-computer interaction platform is provided to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow in the cooling device at the next moment; wherein, the management personnel can control the target temperature of the gas at the exhaust port of the vacuum pump and the coolant flow in the cooling device through the human-computer interaction platform.

[0024] In this implementation, when the manager controls the target temperature of the gas at the exhaust port of the vacuum pump through the human-computer interaction platform, the coolant flow rate in the cooling device at the next moment is recalculated; when the manager controls the coolant flow rate in the cooling device through the human-computer interaction platform, the coolant flow rate is maintained constant.

[0025] See also Figure 2 , in the second embodiment: a vacuum pump cooling control system based on data analysis is provided, the system includes a control module, a data acquisition module, a database, a model analysis module, an intelligent calculation module, an intelligent adjustment module and an interaction module; The control module is used to control the vacuum pump to extract gas from the container, and start or shut down the cooling device to cool the vacuum pump; and send control signals of the vacuum pump and the cooling device to the data acquisition module; The data acquisition module is used to obtain parameter data of the vacuum pump and collect operating data during the operation of the vacuum pump; the parameter data includes the volume of the vacuum pump suction port and exhaust port; the operating data includes the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port; the collected operating data is sent to the database, intelligent computing module and interactive module; The database is used to store the operating data as historical data and continuously update it; The model analysis module is used to establish a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fit the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences; The intelligent calculation module is used to calculate the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model; and send the calculated coolant flow rate required to be adjusted in the cooling device at the next moment to the intelligent adjustment module and the interaction module; The intelligent adjustment module is used to dynamically adjust the coolant flow until the cooling device is turned off; The interactive module is used to provide a human-computer interaction platform to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow rate in the cooling device at the next moment; wherein, the management personnel can control the target temperature of the gas at the exhaust port of the vacuum pump and the coolant flow rate in the cooling device through the human-computer interaction platform.

[0026] Further, the model analysis module includes a data analysis unit, an exhaust port temperature calculation unit and a model management unit; The data analysis unit is used to determine the volume of the vacuum pump suction port and the exhaust port according to the parameter data of the vacuum pump; retrieve the historical operation data from the database for analysis, determine the gas temperature of the vacuum pump suction port, the gas pressure of the suction port, the gas temperature of the exhaust port, the gas pressure of the exhaust port, and determine the coolant flow and temperature in the cooling device; The exhaust port temperature calculation unit is used to calculate the gas temperature at the exhaust port of the vacuum pump when no heat exchange is performed with the outside; The model management unit is used to establish a vacuum pump temperature analysis model, taking the temperature difference between the coolant and the gas at the intake port and the coolant flow rate as independent variables, taking the influence of the coolant on the gas temperature as the dependent variable, fitting the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences, and obtaining a calculation expression for the fitting curve.

[0027] Furthermore, the intelligent computing module includes a real-time monitoring unit and a computing control unit; The real-time monitoring unit is used to determine the target temperature of the gas at the exhaust port of the vacuum pump, analyze the collected operation data, determine the gas temperature and gas pressure at the suction port of the vacuum pump at the current moment; determine the temperature of the coolant in the cooling device; The calculation control unit is used to predict the gas temperature at the vacuum pump exhaust port at the next moment; and calculate the coolant flow rate that needs to be adjusted in the cooling device at the next moment.

[0028] In this embodiment: The vacuum pump is a screw vacuum pump; when the screw vacuum pump starts to operate, the control module controls the vacuum pump to extract gas in the container, starts the cooling device, and sends control signals of the vacuum pump and the cooling device to the data acquisition module; The data acquisition module obtains the parameter data of the vacuum pump and collects the operation data of the vacuum pump during operation; and sends the collected operation data to the database, the intelligent computing module and the interactive module; The database stores the operating data as historical data and continuously updates it; The data analysis unit in the model analysis module determines the volume size of the vacuum pump suction port and the exhaust port, retrieves the historical operation data from the database for analysis, and sends the analyzed data to the exhaust port temperature calculation unit and the model management unit; the exhaust port temperature calculation unit calculates the gas temperature of the vacuum pump exhaust port when no heat exchange is performed with the outside, and sends it to the model management unit; the model management unit establishes a vacuum pump temperature analysis model, fits the curve of the vacuum pump cooling effect under different coolant flow rates and temperature differences, and obtains the calculation expression of the fitting curve; The real-time monitoring unit in the intelligent computing module analyzes the collected operation data and sends the data analyzed at the current moment to the computing control unit; the computing control unit predicts the gas temperature at the exhaust port of the vacuum pump at the next moment; calculates the coolant flow rate required to be adjusted in the cooling device at the next moment; wherein the calculated coolant flow rate required to be adjusted in the cooling device at the next moment is sent to the intelligent adjustment module and the interactive module; The intelligent adjustment module dynamically adjusts the coolant flow rate according to the calculated coolant flow rate required to be adjusted in the cooling device at the next moment, until the control module controls the cooling device to be turned off; The interactive module provides a human-computer interaction platform to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow in the cooling device at the next moment; when the manager controls the target temperature of the gas at the exhaust port of the vacuum pump through the human-computer interaction platform, the control signal is sent to the real-time monitoring unit; when the manager controls the coolant flow in the cooling device through the human-computer interaction platform, the control signal is sent to the intelligent adjustment module, and the coolant flow is maintained constant according to the manager's control signal.

[0029] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum pump cooling control method based on data analysis, characterized in that: The method comprises the following steps: S10, controlling the vacuum pump to extract gas from the container, and starting the cooling device to cool the vacuum pump; S20, obtaining parameter data of the vacuum pump, and collecting operating data during the operation of the vacuum pump; the parameter data includes the volume of the vacuum pump suction port and exhaust port; the operating data includes the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port; S30, storing the operation data as historical data in a database, and updating the database; establishing a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fitting a curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences; S40, determining the target temperature of the gas at the exhaust port of the vacuum pump; calculating the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model, and dynamically adjusting the coolant flow rate until the cooling device is turned off.

2. A vacuum pump cooling control method based on data analysis according to claim 1, characterized in that: The container is connected to the suction port of the vacuum pump; the exhaust port of the vacuum pump is connected to the external environment; the suction port volume represents the maximum inter-tooth volume when the suction port of the vacuum pump and the container are connected to each other; the exhaust port volume represents the inter-tooth volume when it is about to be connected to the exhaust port of the vacuum pump; the suction port gas temperature and pressure represent the gas temperature and pressure in the suction port volume; the exhaust port gas temperature and pressure represent the gas temperature and pressure in the exhaust port volume.

3. A vacuum pump cooling control method based on data analysis according to claim 1, characterized in that: The method steps of step S30 are: S301. Determine the volume of the vacuum pump suction port according to the parameter data of the vacuum pump. and exhaust port volume ; Retrieve historical operation data from the database for analysis and determine different timestamps Gas temperature at the suction port of the lower vacuum pump , Gas pressure at the inlet , Exhaust gas temperature , Exhaust port gas pressure ; Determine different timestamps Coolant flow rate in the lower cooling device and temperature ; S302, according to The gas pressure at the exhaust port at all times , Vacuum pump suction port volume size and exhaust port volume , when there is no heat exchange with the outside, The gas temperature at the vacuum pump exhaust port at the moment : ； in, Indicates the molar coefficient of the gas in the inter-tooth volume; It represents the specific heat capacity at constant volume of the gas in the inter-tooth volume; S303, establish a vacuum pump temperature analysis model, and Temperature difference between lower coolant and air inlet and coolant flow rate As independent variables and , the coolant to the gas temperature The impact value of the moment As dependent variable , fitting the curve of the vacuum pump cooling effect under different coolant flow rates and temperature differences, and obtaining the calculation expression of the fitting curve: ； in, express The temperature of the gas at the vacuum pump exhaust port when there is no heat exchange with the outside world; express The gas temperature at the exhaust port of the vacuum pump at all times; and are all constants.

4. A vacuum pump cooling control method based on data analysis according to claim 3, characterized in that: The method steps of step S40 are: S401. Determine the target temperature of the gas at the vacuum pump exhaust port ; Analyze the collected operation data to determine the current The gas temperature at the vacuum pump suction port at all times And the gas pressure at the inlet ; Determine the coolant temperature in the cooling device ; According to the calculation formula of step S302, it is predicted The gas temperature at the vacuum pump exhaust port at the moment ; Wherein, the temperature of the coolant in the cooling device is fixed; S402, according to And the calculation expression of the fitting curve in the vacuum pump temperature analysis model, calculate The coolant flow rate that needs to be adjusted in the cooling device at all times : ； S403, according to the calculation , dynamically adjust the coolant flow in the cooling device at the next moment until the cooling device is turned off.

5. A vacuum pump cooling control method based on data analysis according to claim 4, characterized in that: A human-computer interaction platform is provided to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow in the cooling device at the next moment; the management personnel can control the target temperature of the gas at the exhaust port of the vacuum pump and the coolant flow in the cooling device through the human-computer interaction platform.

6. A vacuum pump cooling control system based on data analysis, characterized in that: The system includes a control module, a data acquisition module, a database, a model analysis module, an intelligent calculation module, an intelligent adjustment module and an interaction module; The control module is used to control the vacuum pump to extract gas from the container, and start or shut down the cooling device to cool the vacuum pump; and send control signals of the vacuum pump and the cooling device to the data acquisition module; The data acquisition module is used to obtain parameter data of the vacuum pump and collect operating data during the operation of the vacuum pump; the parameter data includes the volume of the vacuum pump suction port and exhaust port; the operating data includes the coolant flow and temperature in the cooling device, and the gas temperature and pressure at the vacuum pump suction port and exhaust port; the collected operating data is sent to the database, intelligent computing module and interactive module; The database is used to store the operating data as historical data and continuously update it; The model analysis module is used to establish a vacuum pump temperature analysis model based on the parameter data of the vacuum pump and the historical operation data stored in the database, and fit the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences; The intelligent calculation module is used to calculate the coolant flow rate required to be adjusted in the cooling device at the next moment according to the parameter data of the vacuum pump, the currently collected operating data and the established vacuum pump temperature analysis model; and send the calculated coolant flow rate required to be adjusted in the cooling device at the next moment to the intelligent adjustment module and the interaction module; The intelligent adjustment module is used to dynamically adjust the coolant flow until the cooling device is turned off; The interactive module is used to provide a human-computer interaction platform to digitally display the parameter data of the vacuum pump, the collected operating data and the calculated coolant flow rate in the cooling device at the next moment; wherein, the management personnel can control the target temperature of the gas at the exhaust port of the vacuum pump and the coolant flow rate in the cooling device through the human-computer interaction platform.

7. A vacuum pump cooling control system based on data analysis according to claim 6, characterized in that: The model analysis module includes a data analysis unit, an exhaust port temperature calculation unit and a model management unit; The data analysis unit is used to determine the volume of the vacuum pump suction port and the exhaust port according to the parameter data of the vacuum pump; retrieve the historical operation data from the database for analysis, determine the gas temperature of the vacuum pump suction port, the gas pressure of the suction port, the gas temperature of the exhaust port, the gas pressure of the exhaust port, and determine the coolant flow and temperature in the cooling device; The exhaust port temperature calculation unit is used to calculate the gas temperature at the exhaust port of the vacuum pump when no heat exchange is performed with the outside; The model management unit is used to establish a vacuum pump temperature analysis model, taking the temperature difference between the coolant and the gas at the intake port and the coolant flow rate as independent variables, taking the influence of the coolant on the gas temperature as the dependent variable, fitting the curve of the cooling effect of the vacuum pump under different coolant flow rates and temperature differences, and obtaining a calculation expression for the fitting curve.

8. A vacuum pump cooling control system based on data analysis according to claim 7, characterized in that: The intelligent computing module includes a real-time monitoring unit and a computing control unit; The real-time monitoring unit is used to determine the target temperature of the gas at the exhaust port of the vacuum pump, analyze the collected operation data, determine the gas temperature and gas pressure at the suction port of the vacuum pump at the current moment; determine the temperature of the coolant in the cooling device; The calculation control unit is used to predict the gas temperature at the exhaust port of the vacuum pump at the next moment; and calculate the coolant flow rate that needs to be adjusted in the cooling device at the next moment.

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