High-voltage insulation electrode vacuum high-frequency electromagnetic induction brazing device and method

Abstract

The invention discloses a high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device and method, and belongs to the technical field of equipment manufacturing. Comprising a vacuum chamber and a high-frequency induction brazing power supply which are fixedly mounted on an equipment mounting platform, a touch screen for monitoring and controlling which is fixedly mounted on one side of the equipment mounting platform, and a vacuum pump which is fixedly mounted at the bottom of the equipment mounting platform, a high-frequency induction heating coil is installed at the output end of the high-frequency induction brazing power source located on one side of the vacuum chamber, the high-frequency induction heating coil is fixedly installed in the center of the vacuum chamber, and the touch screen for monitoring and controlling collects the vacuum degree in the vacuum chamber through a vacuum degree detection inductor. And an extraction opening of the vacuum pump is communicated with the vacuum chamber through a connecting pipe. Rapid heating is achieved through high-frequency electromagnetic induction and the vacuum chamber, and the influence of oxidation generated in the heating process on the compactness and uniformity of a welding part is avoided as much as possible.

Description

Technical Field

[0001] The invention relates to a vacuum high-frequency electromagnetic induction brazing device and method for high-voltage insulating electrodes, belonging to the technical field of equipment manufacturing. Background Art

[0002] Ion implanters for chip manufacturing are used to complete the doping process in chip manufacturing. In order to achieve ion implantation doping suitable for large-scale production, it is necessary to accelerate the doping ions to the energy of the mega-electron volt (MeV) level, and the particle accelerator becomes a key component of the ion implanter. The ion implanter for chip manufacturing uses a linear radio frequency accelerator and uses an alternating electric field to accelerate the ion beam. The ion accelerator composed of a multi-stage radio frequency resonant accelerator can accelerate the doping ions to the required energy by repeatedly accelerating the ion beam at a lower energy gain. At the same time, before the doping ions enter the linear accelerator and when they reach each stage of the radio frequency resonant accelerator, the ion beam needs to be radially focused, using a four-stage focusing electromagnetic lens with a high voltage. A pair of positive and negative high-voltage insulating electrodes introduce high voltage to the electromagnetic lens. In order to obtain a high-energy ion beam, it is necessary to configure more than 10 electromagnetic lenses. During the normal operation cycle of the equipment, the electromagnetic lens needs to be disassembled, cleaned and reassembled every six months. When an abnormal operation of the equipment occurs, the faulty electromagnetic lens needs to be disassembled and repaired at any time. When the high-voltage insulating electrode is ablated, it needs to be updated and replaced. Therefore, high-voltage insulated electrodes are consumable parts with large demand in modern ion implanters. In addition, the ion beam channel needs to achieve an extremely high vacuum degree (1×10E-7Torr) to ensure the realization of various indicators such as the energy, uniformity, and stability of the ion beam energy. As an electrode that feeds extremely high voltage (20 kV) into a vacuum chamber with extremely high vacuum requirements, it is necessary to have standard sealing performance in addition to ensuring reliable insulation performance, good conductivity and stable installation characteristics.

[0003] The high-voltage insulating electrode is composed of insulating ceramic, conductive metal material and fixed metal material, and brazing is usually used to firmly bond the three. The welding parts need to achieve the best density and uniformity to ensure that the vacuum degree requirements in the ion beam vacuum chamber are met. In the past equipment maintenance and the use of customized accessories, the most common problem was that the defects in the welding parts of the replacement high-voltage insulating electrode caused the vacuum degree of the relevant parts of the equipment to fail to meet the standards. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and to provide a high-voltage insulating electrode vacuum high-frequency electromagnetic induction brazing device and method. In view of the problem that the vacuum degree of relevant parts of the equipment cannot meet the standards due to defects in the welding parts of the high-voltage insulating electrodes, high-frequency electromagnetic induction and a vacuum chamber are used to achieve rapid heating, and the influence of oxidation occurring during the heating process on the density and uniformity of the welding parts is avoided as much as possible.

[0005] To achieve the above object, the present invention is implemented by adopting the following technical solutions:

[0006] In the first aspect, the present invention provides a high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device, comprising: a vacuum chamber and a high-frequency induction brazing power supply fixedly mounted on an equipment mounting platform, a monitoring and control touch screen fixedly mounted on one side of the equipment mounting platform, and a vacuum pump fixedly mounted on the bottom of the equipment mounting platform, a high-voltage insulated electrode support seat is installed in the vacuum chamber, a high-frequency induction heating coil is installed at the output end of the high-frequency induction brazing power supply located on one side of the vacuum chamber, and the high-frequency induction heating coil is fixedly mounted in the center of the vacuum chamber, the monitoring and control touch screen collects the vacuum degree in the vacuum chamber through a vacuum degree detection sensor, and the vacuum pump exhaust port is connected to the vacuum chamber through a connecting pipe.

[0007] Furthermore, the vacuum degree detection sensor includes a vacuum chamber vacuum degree detection sensor and an exhaust port vacuum degree detection sensor, and a vacuum chamber detection port interface and a vacuum chamber exhaust port interface are provided on the rear side of the vacuum chamber, wherein the vacuum chamber detection port interface is connected with a detection port tee, and the other two ends of the detection port tee are respectively connected to the vacuum chamber vacuum degree detection sensor and a manual vacuum venting valve; the vacuum chamber exhaust port interface is connected with an exhaust port tee, and the other two ends of the exhaust port tee are respectively connected to the exhaust port vacuum degree detection sensor and a metal bellows, and the other end of the metal bellows is connected to the exhaust port of the vacuum pump, and the monitoring and control touch screen collects and displays the real-time vacuum degree data detected by the vacuum chamber vacuum degree detection sensor and the exhaust port vacuum degree detection sensor, and sets the vacuum degree threshold that the vacuum chamber needs to reach.

[0008] Furthermore, the high-voltage insulating electrode support seat and the high-frequency induction heating coil are both replaceable and can be matched with different high-voltage insulating electrodes to be brazed.

[0009] Furthermore, the front side of the vacuum chamber is an openable front side panel, and an observation window is provided on the front side panel. The observation window is covered with high temperature resistant quartz glass and is sealed and installed by a high temperature resistant sealing ring.

[0010] Furthermore, the high-voltage insulating electrode support seat has a threaded hole, and the specification of the threaded hole matches the thread specification of the high-voltage insulating electrode to be brazed.

[0011] Furthermore, an access port for connecting the high-frequency induction heating coil is provided on one side of the vacuum chamber, and the access port of the high-frequency induction heating coil is insulated and sealed with a high-temperature resistant material.

[0012] In a second aspect, the present invention provides a vacuum high-frequency electromagnetic induction brazing method for high-voltage insulated electrodes, comprising:

[0013] Installing the high-voltage insulating electrode to be brazed on a high-voltage insulating electrode support seat in the vacuum chamber;

[0014] Close the vacuum chamber and secure it in place;

[0015] Turn on the system power supply and observe the real-time detection information and setting information displayed on the monitoring and control touch screen, including the vacuum degree of the detection port and the vacuum degree of the exhaust port, as well as the vacuum degree threshold that the vacuum chamber is set to reach;

[0016] After reaching the initial standby state, turn on the vacuum pump;

[0017] Turn on the high-frequency induction brazing power supply switch and set the current and frequency parameters corresponding to the high-voltage insulated electrode to be brazed;

[0018] When the vacuum chamber reaches the preset vacuum threshold, the monitoring control touch screen displays a prompt message, turns on the high-frequency induction brazing power supply heating output switch, heats and brazes the high-voltage insulated electrode to be brazed, and observes the melting process of the brazing material through the observation window;

[0019] When the heating time specified by the process is reached, the brazing material is completely melted and the weld is fully wetted, turn off the high-frequency induction brazing power supply heating output switch and the vacuum pump;

[0020] Turn off the system power supply, wait for the temperature of the vacuum chamber to drop, release air into the vacuum chamber through the manual vacuum vent valve, and take out the welded high-voltage insulated electrode.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The present invention provides a high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device and method. In a high vacuum environment, high-frequency electromagnetic induction and a vacuum chamber are used to achieve rapid heating, and the influence of oxidation occurring during the heating process on the density and uniformity of the welding part is avoided as much as possible, thereby solving the shortcomings of conventional welding methods and realizing the domestic substitution of related precision accessories.

[0023] 2. The present invention realizes high-frequency electromagnetic induction heating brazing under high vacuum, which solves the problem that it is difficult to ensure the high vacuum sealing of the weld when brazing metal and ceramic. In addition, the present invention provides a solution for the manufacture of high-voltage insulating electrodes for ion implantation machines used in chip manufacturing. The prepared electrodes can meet the performance requirements under high voltage, high temperature and high vacuum conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0025] Figure 1 A schematic diagram of the overall structure of a high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device provided in Example 1 of the present invention;

[0026] Figure 2 This is a schematic diagram of the exterior of a vacuum chamber of a high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device provided in Example 1 of the present invention.

[0027] In the figure: 1. High-voltage insulating electrode; 2. High-voltage insulating electrode support seat; 3. High-frequency induction heating coil; 4. Vacuum chamber; 5. High-frequency induction brazing power supply; 6. Touch screen for monitoring and control; 7. Vacuum pump; 8. Equipment installation platform; 9. Vacuum chamber detection port interface; 10. Vacuum chamber exhaust port interface; 11. Observation window. DETAILED DESCRIPTION

[0028] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present invention can be combined with each other without conflict.

[0029] The following detailed description is an exemplary description, which is intended to provide further detailed description of the present invention. Unless otherwise specified, all technical terms used in the present invention have the same meaning as those generally understood by those skilled in the art to which the present invention belongs. The terms used in the present invention are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present invention.

[0030] Embodiment 1:

[0031] This embodiment provides a vacuum high-frequency electromagnetic induction brazing device for high-voltage insulated electrodes used in ion implanters, such as Figure 1As shown, it includes a high-voltage insulated electrode support seat 2, a high-frequency induction heating coil 3, a vacuum chamber 4, a high-frequency induction brazing power supply 5, a monitoring and control touch screen 6, a vacuum pump 7 and an equipment installation platform 8. The vacuum chamber 4 and the high-frequency induction brazing power supply 5 are installed on the equipment installation platform 8, the monitoring and control touch screen 6 is installed on one side of the equipment installation platform 8, and the vacuum pump 7 is installed at the bottom of the equipment installation platform 8, wherein:

[0032] The high-voltage insulating electrode support seat 2 is installed in the vacuum chamber 4, and the high-voltage insulating electrode support seat 2 is a replaceable component that matches different high-voltage insulating electrodes 1 to be brazed. In this embodiment, a threaded interface matching the high-voltage insulating electrode support seat 2 is provided at the bottom of the inner side of the vacuum chamber 4, and the high-voltage insulating electrode support seat 2 is fixed in the vacuum chamber 4 by means of the threaded interface, and the high-voltage insulating electrode support seat 2 has a threaded hole, and the specification of the threaded hole matches the thread specification of the high-voltage insulating electrode 1 to be brazed.

[0033] An access port is provided on one side of the vacuum chamber 4, and the high-frequency induction heating coil 3 is fixedly installed in the center of the vacuum chamber 4 through the access port, and is located above the high-voltage insulating electrode support seat 2. The access port outside the vacuum chamber 4 is connected to the output end of the high-frequency induction brazing power supply 5. The access port of the high-frequency induction heating coil 3 is insulated and sealed with high-temperature resistant materials. The high-frequency induction heating coil 3 is a replaceable component that matches different high-voltage insulating electrodes 1 to be brazed.

[0034] The front side of the vacuum chamber 4 is an openable front side panel, on which an observation window 11 is provided. The observation window 11 is covered with high temperature resistant quartz glass and is sealed and installed by a high temperature resistant sealing ring.

[0035] See also Figure 2 The rear side of the vacuum chamber 4 is provided with a vacuum chamber detection port interface 9 and a vacuum chamber exhaust port interface 10, which are equipped with a transfer interface component suitable for high vacuum pipeline requirements, wherein the vacuum chamber detection port interface 9 is used to connect the detection port tee, which is used to connect the vacuum chamber vacuum degree detection sensor and the manual vacuum venting valve; the vacuum chamber exhaust port interface 10 is used to connect the exhaust port tee, which is used to connect the exhaust port vacuum degree detection sensor and the metal bellows. The other end of the metal bellows is connected to the exhaust port of the vacuum pump 7. The monitoring and control touch screen 6 collects and displays the real-time vacuum degree data detected by the vacuum chamber vacuum degree detection sensor and the exhaust port vacuum degree detection sensor, and sets the vacuum degree threshold that the vacuum chamber needs to reach.

[0036] In this embodiment, the method for using the high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device includes the following steps:

[0037] The high-voltage insulating electrode support seat 2 matched with the high-voltage insulating electrode 1 to be brazed is fixed in place through the threaded interface in the vacuum chamber 4;

[0038] The high-frequency induction heating coil 3 matching the high-voltage insulated electrode 1 to be brazed is fixedly installed at the access port in the vacuum chamber 4, and the power output end of the high-frequency induction brazing power supply 5 is fixedly installed at the access port outside the vacuum chamber 4.

[0039] Install the processed high-voltage insulating electrode 1 to be brazed vertically in the threaded hole of the high-voltage insulating electrode support 2, with the ceramic part facing upward;

[0040] Close the front side panel of the vacuum chamber 4 and fix it in place to ensure a good seal;

[0041] Turn on the system power supply, and observe the real-time detection information and setting information displayed on the monitoring and control touch screen 6, including the vacuum degree of the detection port and the vacuum degree of the exhaust port, as well as the vacuum degree threshold value to be reached by the set vacuum chamber;

[0042] After reaching the initial standby state, the vacuum pump 7 is turned on;

[0043] Turn on the high-frequency induction brazing power supply 5, and set the current and frequency parameters corresponding to the high-voltage insulated electrode 1 to be brazed;

[0044] When the vacuum chamber 4 reaches a predetermined vacuum threshold, the monitoring and control touch screen 6 displays a prompt message, turns on the heating output switch of the high-frequency induction brazing power supply 5, heats and brazes the high-voltage insulated electrode 1 to be brazed, and observes the melting process of the brazing material through the observation window 11. When the heating time specified by the process is reached, the brazing material is completely melted, and the weld is fully wetted, the heating output switch of the high-frequency induction brazing power supply 5 is turned off, and the vacuum pump 7 is turned off.

[0045] Turn off the system power supply, wait for the temperature of the vacuum chamber 4 to drop, release air into the vacuum chamber 4 through the manual vacuum vent valve, take out the welded high-voltage insulating electrode 1, and install it on a special detection device to detect the sealing performance of the welding part.

[0046] It is known from common technical knowledge that the present invention can be implemented by other embodiments that do not deviate from its spirit or essential features. Therefore, the above disclosed embodiments are only illustrative in all respects and are not exclusive. All changes within the scope of the present invention or within the scope equivalent to the present invention are included in the present invention.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A vacuum high-frequency electromagnetic induction brazing device for high-voltage insulated electrodes, characterized in that: include: A vacuum chamber and a high-frequency induction brazing power supply are fixedly mounted on the equipment mounting platform, a monitoring and control touch screen is fixedly mounted on one side of the equipment mounting platform, and a vacuum pump is fixedly mounted on the bottom of the equipment mounting platform. A high-voltage insulating electrode support seat is installed in the vacuum chamber, and a high-frequency induction heating coil is installed at the output end of the high-frequency induction brazing power supply located on one side of the vacuum chamber, and the high-frequency induction heating coil is fixedly mounted in the center of the vacuum chamber. The monitoring and control touch screen collects the vacuum degree in the vacuum chamber through a vacuum degree detection sensor, and the vacuum pump exhaust port is connected to the vacuum chamber through a connecting pipe.

2. The high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device according to claim 1 is characterized in that: The vacuum degree detection sensor includes a vacuum chamber vacuum degree detection sensor and an exhaust port vacuum degree detection sensor. A vacuum chamber detection port interface and a vacuum chamber exhaust port interface are provided on the rear side of the vacuum chamber, wherein the vacuum chamber detection port interface is connected to a detection port tee, and the other two ends of the detection port tee are respectively connected to the vacuum chamber vacuum degree detection sensor and a manual vacuum venting valve; the vacuum chamber exhaust port interface is connected to an exhaust port tee, and the other two ends of the exhaust port tee are respectively connected to the exhaust port vacuum degree detection sensor and a metal bellows, and the other end of the metal bellows is connected to the exhaust port of the vacuum pump. The monitoring and control touch screen collects and displays the real-time vacuum degree data detected by the vacuum chamber vacuum degree detection sensor and the exhaust port vacuum degree detection sensor, and sets the vacuum degree threshold that the vacuum chamber needs to reach.

3. The vacuum high-frequency electromagnetic induction brazing device for high-voltage insulated electrodes according to claim 1 is characterized in that: The high-voltage insulating electrode support seat and the high-frequency induction heating coil are both replaceable configurations, and are matched with different high-voltage insulating electrodes to be brazed.

4. The high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device according to claim 1 is characterized in that: The front side of the vacuum chamber is an openable front side plate, and an observation window is opened on the front side plate. The observation window is covered with high-temperature resistant quartz glass and is sealed and installed through a high-temperature resistant sealing ring.

5. The high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device according to claim 1 is characterized in that: The high-voltage insulating electrode support seat is provided with a threaded hole, and the specification of the threaded hole matches the thread specification of the high-voltage insulating electrode to be brazed.

6. The high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device according to claim 1 is characterized in that: An access port for connecting the high-frequency induction heating coil is arranged on one side of the vacuum chamber, and the access port of the high-frequency induction heating coil is insulated and sealed with high-temperature resistant material.

7. A vacuum high-frequency electromagnetic induction brazing method for high-voltage insulated electrodes, characterized in that: The high-voltage insulated electrode vacuum high-frequency electromagnetic induction brazing device according to any one of claims 1 to 6 is used for operation, comprising the following steps: Installing the high-voltage insulating electrode to be brazed on a high-voltage insulating electrode support seat in the vacuum chamber; Close the vacuum chamber and secure it in place; Turn on the system power supply and observe the real-time detection information and setting information displayed on the monitoring and control touch screen, including the vacuum degree of the detection port and the vacuum degree of the exhaust port, as well as the vacuum degree threshold that the vacuum chamber is set to reach; After reaching the initial standby state, turn on the vacuum pump; Turn on the high-frequency induction brazing power supply switch and set the current and frequency parameters corresponding to the high-voltage insulated electrode to be brazed; When the vacuum chamber reaches the preset vacuum threshold, the monitoring control touch screen displays a prompt message, turns on the high-frequency induction brazing power supply heating output switch, heats and brazes the high-voltage insulated electrode to be brazed, and observes the melting process of the brazing material through the observation window; When the heating time specified by the process is reached, the brazing material is completely melted and the weld is fully wetted, turn off the high-frequency induction brazing power supply heating output switch and the vacuum pump; Turn off the system power supply, wait for the temperature of the vacuum chamber to drop, release air into the vacuum chamber through the manual vacuum vent valve, and take out the welded high-voltage insulated electrode.

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