Vacuum cavity substrate conveying device and method

Abstract

The invention relates to a vacuum cavity substrate conveying device and method, and the device comprises a vacuum cavity, a transmission system disposed on the inner side of the vacuum cavity, and a power system disposed on the outer side of the vacuum cavity. The transmission system comprises a first transmission device and a second transmission device which are composed of a plurality of magnetic wheels, a plurality of steel belts, a plurality of guide wheels and a plurality of bearings; at least one of the plurality of bearings penetrates through the vacuum chamber and is connected with the power system; the multiple bearings are arranged on the same horizontal line in parallel at equal intervals. The magnetic wheels are uniformly mounted on the bearing; the steel belt is mounted on the magnetic wheel; the multiple guide wheels are installed on the bearings in a one-to-one correspondence mode. The manufacturing cost of the magnetofluid is low, sealing of the magnetofluid is not affected by temperature, machining hole sites of the cavity for installing the magnetofluid are few, and deformation of the cavity is not prone to occurring.

Description

Technical Field

[0001] The invention relates to a substrate conveying device, and in particular to a vacuum chamber substrate conveying device and method. Background Art

[0002] Vacuum coating is the process of coating optical parts under vacuum conditions; there are three forms of vacuum coating, namely evaporation coating, sputtering coating and ion plating. For different coating processes, there are usually corresponding high-temperature baking and corresponding evaporation sources under the substrate in the vacuum chamber. In addition, in the actual application of vacuum evaporation machines, it is often necessary to perform multiple evaporation in multiple chambers. Therefore, the traditional way of taking in and out of vacuum evaporation machines is inconvenient and impractical. Therefore, a transmission device is needed to connect multiple chambers and transfer multiple substrates.

[0003] The existing transmission generally adopts crawler transmission, and its materials are easy to volatilize in high temperature vacuum environment, causing poor evaporation and damaging the instrument; the gear transmission, turbine worm gear transmission and other methods often have poor bearing capacity and cannot complete the substrate transportation; the industry mainly adopts multi-stage gear meshing transmission structure, which also has the disadvantages of large noise and dust generation, affecting the operating environment and product yield. The closest transmission scheme now is to use magnetic fluid seal to transmit substrates, but due to the high cost of magnetic fluid, magnetic fluid seal has a certain time use cycle, temperature will also affect magnetic fluid seal, the cavity for installing magnetic fluid has many processing holes, it is easy to cause cavity deformation, and the cavity processing cost is high. Summary of the invention

[0004] In view of the high cost of magnetic fluid in the prior art, the fact that magnetic fluid seals have a certain service life, the temperature affects the magnetic fluid seals, and the cavity for installing magnetic fluid has many processing holes, which easily causes cavity deformation. The present invention provides a vacuum cavity substrate conveying device, comprising a vacuum chamber (7), a transmission system arranged inside the vacuum chamber (7) and a power system arranged outside the vacuum chamber (7), wherein the transmission system comprises a first transmission device and a second transmission device composed of a plurality of magnetic wheels (2), a plurality of steel belts (1), a plurality of guide wheels (5) and a plurality of bearings (4); at least one of the plurality of bearings (4) passes through the vacuum chamber (7) and is connected to the power system; and the plurality of bearings (4) are arranged in parallel and at equal intervals on the same horizontal line;

[0005] The magnetic wheel (2) is evenly mounted on the bearing (4);

[0006] The steel belt (1) is mounted on the magnetic wheel (2);

[0007] The plurality of guide wheels (5) are mounted on the bearing (4) in a one-to-one correspondence.

[0008] Preferably, the first transmission device and the second transmission device are symmetrically arranged on both sides of the inner side of the vacuum chamber (7).

[0009] Preferably, the power system is installed on one or both sides of the outside of the vacuum chamber (7) and is connected to the bearing (4) on the same side.

[0010] Preferably, it also includes a coupling (8) and a transmission shaft (9);

[0011] A power system is installed on one side of the outer side of the vacuum chamber (7); the power system is connected to the bearing (4) on the opposite side via the coupling (8); and the bearing (4) connected to the power system is connected to the bearing (4) symmetrically on the opposite side via the transmission shaft (9).

[0012] Preferably, each of the steel strips (1) is arranged around two adjacent bearings (4), and there is only one common bearing (4) between the adjacently arranged steel strips (1).

[0013] Preferably, it also includes a substrate tray (6);

[0014] The substrate tray (6) is placed on a plurality of guide wheels (5).

[0015] Preferably, the power system is a servo motor assembly (3).

[0016] The present invention also provides a vacuum chamber substrate conveying method, comprising:

[0017] A steel belt (1) is mounted on each magnetic wheel (2), and the magnetic wheel (2) and the steel belt (1) generate magnetic attraction;

[0018] Generating tension force through the magnetic attraction force;

[0019] The tensioning force generates frictional force, and the servo motor assembly (3) drives the bearing (4) to drive the magnetic wheel (2) to rotate, so that the steel belt (1) and the magnetic wheel (2) rotate together, driving the substrate tray (6) to move.

[0020] Preferably, the friction force is generated by the tensioning force, and the servo motor assembly (3) drives the bearing (4) to drive the magnetic wheel (2) to rotate, so that the steel belt (1) and the magnetic wheel (2) rotate together, driving the substrate tray (6) to move, including:

[0021] The guide wheel (5) is mounted on the bearing (4), and the bearing (4) is driven to rotate by the servo motor assembly (3), thereby causing the guide wheel (5) to rotate;

[0022] The substrate tray (6) is mounted on the guide wheel (5), and under the action of the gravity of the substrate tray (6), the guide wheel (5) rotates to drive the substrate tray (6) to move.

[0023] Preferably, the servo motor assembly (3) drives the bearing (4) to rotate, comprising:

[0024] When a servo motor assembly (3) is installed, the servo motor is connected to the bearing (4) on the opposite side via a coupling (8), and the bearing (4) connected to the servo motor assembly (3) is connected to the symmetrical bearing (4) on the opposite side via a transmission shaft (9);

[0025] When two servo motor assemblies (3) are installed, the two servo motor assemblies (3) respectively control the bearing (4) on the same side as the servo motor assembly (3).

[0026] Compared with the closest prior art, the present invention has the following beneficial effects:

[0027] 1. The present invention provides a vacuum chamber substrate conveying device, comprising a vacuum chamber 7, a transmission system arranged inside the vacuum chamber 7 and a power system arranged outside the vacuum chamber 7, wherein the transmission system comprises a first transmission device and a second transmission device composed of a plurality of magnetic wheels 2, a plurality of steel belts 1, a plurality of guide wheels 5 and a plurality of bearings 4; at least one of the plurality of bearings 4 passes through the vacuum chamber 7 and is connected to the power system; the plurality of bearings 4 are arranged in parallel at equal intervals on the same horizontal line; the magnetic wheels 2 are evenly mounted on the bearings 4; the steel belts 1 are mounted on the magnetic wheels 2; the plurality of guide wheels 5 are mounted on the bearings 4 in a one-to-one correspondence; the plurality of guide wheels 5 are mounted on the bearings 4 in a one-to-one correspondence; the present invention realizes that the cost of magnetic fluid is low, temperature has no effect on the sealing of magnetic fluid, the cavity processing holes for mounting magnetic fluid are few, and cavity deformation is not easy to occur.

[0028] 2. Since each steel belt 1 of the present invention is arranged around two adjacent bearings 4, and there is only one common bearing 4 between the adjacent steel belts 1, it is possible to achieve large torque transmission and is not prone to wear.

[0029] 3. The present invention provides that each magnetic wheel 2 is equipped with a steel belt 1, and the magnetic wheel 2 and the steel belt 1 generate magnetic attraction; the tension force is generated by the magnetic attraction; the friction force is generated by the tension force, and the servo motor drives the magnetic wheel 2, so that the steel belt 1 and the magnetic wheel 2 move together, driving the substrate tray 6 to move; the friction transmission design is used to reduce equipment wear.

[0030] 4. In the present invention, when one servo motor assembly 3 is installed, the servo motor assembly 3 is connected to the opposite bearing 4 through a coupling 8, and the bearing 4 connected to the servo motor assembly 3 is connected to the symmetrical bearing 4 on the opposite side through a transmission shaft 9; when two servo motor assemblies 3 are installed, the two servo motor assemblies 3 respectively control the bearing 4 on the same side as the servo motor assembly 3; installing one servo motor assembly 3 makes the overall structure more diversified, and one power system can be used to control the transmission devices on both sides, making the structure simpler; or installing two power systems can make the overall structure more powerful and more efficient during transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the overall structure of the vacuum chamber substrate conveying device of the present invention;

[0032] Figure 2 is a schematic diagram of the bearing installation of the present invention;

[0033] Figure 3 It is a partial structural schematic diagram of the vacuum chamber substrate conveying device of the present invention;

[0034] Figure 4 is a flow chart of the operating method of the vacuum chamber substrate conveying device of the present invention;

[0035] Figure 5 It is a schematic diagram of the operation method of the vacuum chamber substrate conveying device of the present invention;

[0036] In the figure; 1. steel belt; 2. magnetic wheel; 3. servo motor assembly; 4. bearing; 5. guide wheel; 6. substrate tray; 7. vacuum chamber; 8. coupling; 9. transmission shaft. DETAILED DESCRIPTION

[0037] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0038] Embodiment 1, combination Figure 1 The present invention provides a vacuum chamber substrate conveying device, comprising a vacuum chamber 7, a transmission system set up inside the vacuum chamber 7 and a power system set up outside the vacuum chamber 7, wherein the transmission system comprises a first transmission device and a second transmission device composed of a plurality of magnetic wheels 2, a plurality of steel belts 1, a plurality of guide wheels 5 and a plurality of bearings 4; at least one of the plurality of bearings 4 passes through the vacuum chamber 7 and is connected to the power system; the plurality of bearings 4 are arranged in parallel at equal intervals on the same horizontal line;

[0039] The magnetic wheel 2 is evenly mounted on the bearing 4;

[0040] The steel belt 1 is mounted on the magnetic wheel 2;

[0041] A plurality of guide wheels 5 are mounted on the bearings 4 in a one-to-one correspondence.

[0042] The first transmission device and the second transmission device are symmetrically arranged on both sides of the inner side of the vacuum chamber 7 .

[0043] The power system is installed on one or both sides of the outside of the vacuum chamber 7 and is connected to the bearing 4 on the same side.

[0044] Also includes a coupling 8 and a transmission shaft 9;

[0045] A power system is installed on one side of the outer side of the vacuum chamber 7 . The power system is connected to the bearing 4 on the opposite side through a coupling 8 . The bearing 4 connected to the power system is connected to the symmetrical bearing 4 on the opposite side through a transmission shaft 9 .

[0046] Each steel belt 1 is arranged around two adjacent bearings 4 , and there is only one common bearing 4 between adjacent steel belts 1 .

[0047] Also includes a substrate tray 6;

[0048] The substrate tray 6 is placed on the plurality of guide wheels 5 .

[0049] The power system is a servo motor assembly 3.

[0050] Example 2

[0051] The present invention provides a vacuum chamber substrate conveying device, comprising a vacuum chamber 7, a transmission system arranged inside the vacuum chamber 7 and a power system arranged outside the vacuum chamber 7, wherein the transmission system comprises a first transmission device and a second transmission device composed of a plurality of magnetic wheels 2, a plurality of steel belts 1, a plurality of guide wheels 5 and a plurality of bearings 4; at least one of the plurality of bearings 4 passes through the vacuum chamber 7 and is connected to the power system; the plurality of bearings 4 are arranged in parallel and at equal intervals on the same horizontal line; the magnetic wheels 2 are evenly mounted on the bearings 4; the steel belt 1 is mounted on the magnetic wheel 2; the plurality of guide wheels 5 are mounted on the bearings 4 in a one-to-one correspondence; the plurality of guide wheels 5 are mounted on the bearings 4 in a one-to-one correspondence; through the cooperation between the steel belt 1 and the magnetic wheel 2, a magnetic attraction force is converted into a tensioning force and then converted into a friction force to form a substrate transporting push plate to reduce the cost of magnetic fluid, and the temperature has no effect on the magnetic fluid seal, the cavity for mounting the magnetic fluid has few processing holes, and it is not easy to cause cavity deformation

[0052] The first transmission device and the second transmission device are symmetrically arranged on both sides of the inner side of the vacuum chamber 7 .

[0053] The power system is installed on one or both sides of the outside of the vacuum chamber 7 and connected to the bearing 4 on the same side;

[0054] One or two power systems can be set as needed to make the overall structure more diversified. One power system can control the transmission devices on both sides, making the structure more simple.

[0055] Or install two power systems to make the overall structure more powerful and more efficient during transportation.

[0056] This proposal sets up a transmission steel belt 1 and a magnetic wheel 2, and drives the magnetic wheel 2 through a servo motor assembly 3. The magnetic wheel 2 and the steel belt 1 are magnetically attracted to each other, and the steel belt 1 also rotates when the magnetic wheel 2 rotates, thus solving the substrate transmission problem:

[0057] 1) The steel belt 1 transmission is not affected by temperature and corrosion

[0058] 2) Stainless steel material,

[0059] 3) Large torque transmission and not easy to wear

[0060] 4) Friction transmission design concept

[0061] The magnetic fluid is installed on the outer shell of the vacuum chamber 7, and the synchronous belt is connected with the synchronous wheels on each magnetic fluid shaft to transmit the torque to the supporting wheel to realize the substrate movement function.

[0062] This proposal is to install steel belt 1, magnetic wheel 2, silicon nitride bearing 4, bearing 4 mounting frame and other accessories in the vacuum chamber 7, the servo motor drives the magnetic wheel 2, each magnetic wheel 2 is equipped with a steel belt 1, the magnetic wheel 2 and the steel belt 1 generate friction through the action of magnetic attraction and tension, so that the steel belt 1 and the magnetic wheel 2 move together, the shaft on which the magnetic wheel 2 is installed is the same as the shaft of the support wheel, when the support wheel shaft rotates, the support wheel also rotates, the pallet is installed on the support wheel, and under the action of the gravity of the pallet, the support wheel rotates to realize the pallet movement function.

[0063] In this proposal, one or two servo motor assemblies 3 can be installed as needed. When one servo motor assembly 3 is installed, the servo motor assembly 3 is connected to any bearing 4, and the bearing 4 is driven to rotate by the servo motor assembly 3. At the same time, the bearing 4 is connected to the corresponding bearing 4 on the other side through a transmission shaft 9, which drives the corresponding bearing 4 on the other side to rotate. The rotation of the bearing 4 drives the magnetic wheel 2 to rotate. The magnetic wheels 2 are connected by a steel belt 1, which drives the other bearings 4 and the magnetic wheel 2 to rotate at the same time. The guide wheel 5 is installed on the bearing 4, and the substrate tray 6 is installed on the guide wheel 5. As the bearing 4 rotates, the guide wheel 5 is driven to rotate, thereby realizing the movement of the substrate tray.

[0064] When two servo motor assemblies 3 are installed, the two servo motor assemblies 3 are respectively connected to bearings 4 at symmetrical positions on both sides, and the bearings 4 are driven to rotate through the servo motor assemblies 3. The rotation of the bearings 4 drives the magnetic wheels 2 to rotate. The magnetic wheels 2 are connected by steel belts 1, and at the same time drive other bearings 4 and magnetic wheels 2 to rotate. The guide wheel 5 is installed on the bearing 4, and the substrate tray 6 is installed on the guide wheel 5. As the bearings 4 rotate, the guide wheel 5 is driven to rotate, thereby realizing the movement of the substrate tray.

[0065] Example 3

[0066] The present invention also provides a vacuum chamber substrate conveying method, comprising:

[0067] A steel belt 1 is mounted on each magnetic wheel 2, and the magnetic wheel 2 and the steel belt 1 generate magnetic attraction;

[0068] Produce tension through magnetic attraction;

[0069] The friction force is generated by the tensioning force, and the servo motor assembly 3 drives the bearing 4 to drive the magnetic wheel 2 to rotate, so that the steel belt 1 rotates together with the magnetic wheel 2, driving the substrate tray 6 to move.

[0070] The friction force is generated by the tension force, and the servo motor assembly 3 drives the bearing 4 to drive the magnetic wheel 2 to rotate, so that the steel belt 1 and the magnetic wheel 2 rotate together, and drive the substrate tray 6 to move, including:

[0071] The guide wheel 5 is mounted on the bearing 4, and the bearing 4 is driven to rotate by the servo motor assembly 3, so that the guide wheel 5 rotates;

[0072] The substrate tray 6 is mounted on the guide wheel 5 , and under the action of the gravity of the substrate tray 6 , the guide wheel 5 rotates to drive the substrate tray 6 to move.

[0073] The bearing 4 is driven to rotate by the servo motor assembly 3, including:

[0074] When a servo motor assembly 3 is installed, the servo motor assembly 3 is connected to the opposite side bearing 4 through the coupling 8, and the bearing 4 connected to the servo motor assembly 3 is connected to the symmetrical bearing 4 on the opposite side through the transmission shaft 9;

[0075] When two servo motor assemblies 3 are installed, the two servo motor assemblies 3 respectively control the bearing 4 on the same side as the servo motor assembly 3 .

[0076] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0077] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0078] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0079] The above are merely embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention are included in the scope of the claims of the present invention to be approved.

Claims

1. A vacuum chamber substrate conveying device, comprising a vacuum chamber (7), a transmission system arranged inside the vacuum chamber (7) and a power system arranged outside the vacuum chamber (7), characterized in that: The transmission system comprises a first transmission device and a second transmission device composed of a plurality of magnetic wheels (2), a plurality of steel belts (1), a plurality of guide wheels (5) and a plurality of bearings (4); at least one of the plurality of bearings (4) passes through the vacuum chamber (7) and is connected to the power system; the plurality of bearings (4) are arranged in parallel and at equal intervals on the same horizontal line; The magnetic wheel (2) is evenly mounted on the bearing (4); The steel belt (1) is mounted on the magnetic wheel (2); The plurality of guide wheels (5) are mounted on the bearing (4) in a one-to-one correspondence.

2. The device according to claim 1, characterized in that The first transmission device and the second transmission device are symmetrically arranged on two sides of the inner side of the vacuum chamber (7).

3. The device according to claim 2, characterized in that The power system is installed on one side or both sides of the outside of the vacuum chamber (7) and is connected to the bearing (4) on the same side.

4. The device according to claim 3, characterized in that It also includes a coupling (8) and a transmission shaft (9): A power system is installed on one side of the outer side of the vacuum chamber (7); the power system is connected to the bearing (4) on the opposite side via the coupling (8); and the bearing (4) connected to the power system is connected to the bearing (4) symmetrically on the opposite side via the transmission shaft (9).

5. The device according to claim 1, characterized in that Each of the steel belts (1) is arranged around two adjacent bearings (4), and there is only one common bearing (4) between the adjacently arranged steel belts (1).

6. The device according to claim 1, characterized in that Also includes a substrate tray (6); The substrate tray (6) is placed on a plurality of guide wheels (5).

7. The device according to claim 1, characterized in that The power system is a servo motor assembly (3).

8. A vacuum chamber substrate conveying method, used for operating the vacuum chamber substrate conveying device obtained in any one of claims 1 to 8, characterized in that: include: A steel belt (1) is mounted on each magnetic wheel (2), and the magnetic wheel (2) and the steel belt (1) generate magnetic attraction; Generating tension force through the magnetic attraction force; The tensioning force generates frictional force, and the servo motor assembly (3) drives the bearing (4) to drive the magnetic wheel (2) to rotate, so that the steel belt (1) and the magnetic wheel (2) rotate together, driving the substrate tray (6) to move.

9. The method according to claim 8, characterized in that The friction force is generated by the tensioning force, and the servo motor assembly (3) drives the bearing (4) to drive the magnetic wheel (2) to rotate, so that the steel belt (1) and the magnetic wheel (2) rotate together, driving the substrate tray (6) to move, including: The guide wheel (5) is mounted on the bearing (4), and the bearing (4) is driven to rotate by the servo motor assembly (3), thereby causing the guide wheel (5) to rotate; The substrate tray (6) is mounted on the guide wheel (5), and under the action of the gravity of the substrate tray (6), the guide wheel (5) rotates to drive the substrate tray (6) to move.

10. The method according to claim 9, characterized in that The step of driving the bearing (4) to rotate by the servo motor assembly (3) comprises: When a servo motor assembly (3) is installed, the servo motor assembly (3) is connected to the bearing (4) on the opposite side via a coupling (8), and the bearing (4) connected to the servo motor assembly (3) is connected to the symmetrical bearing (4) on the opposite side via a transmission shaft (9); When two servo motor assemblies (3) are installed, the two servo motor assemblies (3) respectively control the bearing (4) on the same side as the servo motor assembly (3).

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