Precise sliding table module

Abstract

The invention provides a precise sliding table module. The precise sliding table module comprises a supporting component and a sliding table, a motion execution assembly; the motion execution assembly is assembled on the supporting component, and at least part of the motion execution assembly can move on at least one part of the supporting component; a safety monitoring component; the safety monitoring component is arranged on the motion execution component, and the safety monitoring component is used for limiting the travel range of at least partial movement of the motion execution component on at least one part of the supporting component; a precision monitoring component; the precision monitoring component is mounted on the motion execution assembly to monitor the motion precision of the motion execution assembly at least partially within the travel range. According to the precise sliding table module, through the specific structural design, the motion execution assembly, the safety monitoring component and the precision monitoring component are adopted to form a closed-loop system, the motion stability and the motion precision of the precise sliding table module are effectively improved, and therefore the precise sliding table module has a profound influence on industrial modernization development and has a long-term market prospect.

Description

Technical Field

[0001] The invention relates to the technical field of slide tables, and in particular to a precision slide table module. Background Art

[0002] In fields such as large-scale integrated circuit manufacturing and optical inspection, precision slide modules are key basic components for achieving precise feed motion and feed accuracy, and are the most critical components of precision equipment.

[0003] With the advancement of technology, the requirements for load, accuracy, speed and acceleration of precision slide modules in special environments are becoming higher and higher. Therefore, it is necessary and urgent to speed up the development of precision slide modules suitable for micro-nano precision.

[0004] Generally speaking, precision slide modules are composed of core components such as roller screws, linear guides and encoders, and are used to fix and install the moved load. Among them, roller screws are the most commonly used transmission elements in tool machinery and precision machinery. Their main function is to convert rotational motion into linear motion, or to convert torque into axial repetitive force, while having the characteristics of high precision, reversibility and high efficiency. In addition, when the ball screw is used as the active body, the nut will convert it into linear motion according to the lead of the corresponding specification as the rotation angle of the screw rod, and the passive workpiece can be connected to the nut seat and the nut to achieve the corresponding linear motion. Since the ball screw has very small friction resistance, precision slide modules with roller screws are widely used in various industrial equipment and precision instruments.

[0005] In the prior art, the traditional precision slide module is mostly controlled by manual operation or a simple control system, which makes the existing precision slide module have problems such as low efficiency and low precision. In addition, due to the heavy weight of the traditional precision slide module, it is difficult for the traditional precision slide module to bear heavy loads. Summary of the invention

[0006] The precision slide module provided in the present application is intended to overcome at least some of the defects of existing precision slide modules.

[0007] The embodiment of the present invention provides a precision slide module. The precision slide module comprises:

[0008] Support components;

[0009] A motion execution assembly; the motion execution assembly is mounted on the support member, and at least a portion of the motion execution assembly can move on at least a portion of the support member;

[0010] A safety monitoring component; the safety monitoring component is arranged on the motion execution component, and the safety monitoring component is used to limit the range of travel of at least a part of the motion execution component moving on at least a part of the support component;

[0011] An accuracy monitoring component; the accuracy monitoring component is installed on the motion execution component to monitor the motion accuracy of the motion execution component at least partially within the stroke range.

[0012] In some embodiments, the support member comprises:

[0013] A base and a pair of guide rails; the pair of guide rails both extend along a first direction and are symmetrically arranged on two sides of the base that are away from each other in a second direction;

[0014] The pair of guide rails can be used to guide at least a portion of the motion execution assembly to move in the first direction;

[0015] The first direction and the second direction are orthogonal to each other.

[0016] In some embodiments, the motion execution component includes:

[0017] Drive components, rotary motion components and linear motion components;

[0018] At least a portion of the driving component is connected to at least a portion of the rotationally movable component to drive at least a portion of the rotationally movable component to rotate;

[0019] At least a portion of the linear motion component is connected to at least a portion of the rotational motion component, so that the linear motion component can move along the first direction following the rotation of at least a portion of the rotational motion component.

[0020] In some embodiments, the motion execution component further comprises:

[0021] Motor mounting seat; the motor mounting seat is fixed to any end of the base in the first direction, and the driving component is arranged on the motor mounting seat.

[0022] In some embodiments, the driving component includes:

[0023] A servo motor and a rotary encoder; the rotary encoder is connected to the servo motor, and the rotary encoder can measure corresponding displacement parameters according to the rotation speed parameters of the servo motor.

[0024] In some embodiments, the rotational motion component comprises:

[0025] A ball screw, a coupling, two bearings and two bearing seats; the axial direction of the ball screw is parallel to the first direction;

[0026] The two bearing seats are respectively arranged on two sides of the base away from each other in the first direction, and each of the bearing seats is embedded with a bearing;

[0027] Two opposite ends of the ball screw in the first direction are respectively sleeved on the two bearings, and one end thereof can extend to the coupling;

[0028] Wherein, the servo motor is connected to the ball screw through the coupling, so that the servo motor drives the ball screw to rotate.

[0029] In some embodiments, the linear moving component comprises:

[0030] A mobile platform and at least one pair of sliders respectively arranged on a pair of the guide rails;

[0031] The movable platform is sleeved on the ball screw and can move along the first direction following the rotation of the ball screw;

[0032] Wherein, the mobile platform is connected to at least one pair of the sliders, so that the sliders can move on the guide rail following the movement of the mobile platform.

[0033] In some embodiments, the safety monitoring component includes:

[0034] at least two limit switches and at least two baffles;

[0035] At least two of the limit switches are respectively arranged on the two bearing seats; at least two of the baffles are respectively arranged on two sides of the movable platform that are away from each other in the first direction;

[0036] The limit switch may be connected to the servo motor via a cable, and the limit switch and the baffle cooperate with each other to limit the travel range of the mobile platform in the first direction.

[0037] In some embodiments, the limit switch comprises:

[0038] A base, a transmitting part and a receiving part; the transmitting part and the receiving part are arranged at two ends of the base opposite to each other; the transmitting part is used to transmit light, and the receiving part is used to receive light;

[0039] When the baffle is located between the emitting portion and the receiving portion, the light can be blocked so that the light cannot reach the receiving portion, and at this time, the servo motor stops rotating.

[0040] In some embodiments, the accuracy monitoring component includes:

[0041] A grating ruler and a grating reading head; the grating ruler is attached to the base; the grating reading head is connected to the moving platform through a reading head fixing block, so that the grating reading head can move along the first direction following the movement of the moving platform;

[0042] The grating reading head can cover at least a portion of the grating ruler; when the grating reading head moves in the first direction, the position parameters of the mobile platform can be measured in real time;

[0043] comparing the position parameter with the displacement parameter to monitor the motion accuracy of the mobile platform;

[0044] Wherein, the reading head fixing block has multiple adjustable degrees of freedom.

[0045] Optionally, an origin mark is provided in the rotary encoder, and when the mobile platform moves to the position of the limit switch, the servo motor drives the mobile platform to move in reverse until it reaches the origin mark of the rotary encoder, thereby allowing the mobile platform to move within the travel range.

[0046] At least one advantageous aspect of the precision slide module provided by an embodiment of the present invention is that the precision slide module, through a specific structural design, adopts a closed-loop system consisting of motion execution components, safety monitoring components and precision monitoring components, which can effectively improve the motion stability and motion accuracy of the precision slide module, thereby having a profound impact on the development of industrial modernization and even other fields, and has a long-term market prospect. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] One or more embodiments are exemplarily described by corresponding drawings, which do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and the figures in the drawings do not constitute proportional limitations unless otherwise stated.

[0048] Figure 1 A schematic structural diagram of a precision slide module provided by an embodiment of the present invention;

[0049] Figure 2 A three-dimensional exploded view of a precision slide module provided by an embodiment of the present invention;

[0050] Figure 3 A schematic structural diagram of a limit switch provided in an embodiment of the present invention.

[0051] Figure markings: 100, precision slide module; 1001, first direction; 1002, second direction; 1, support component; 11, base; 12, guide rail; 2, motion execution component; 21, driving component; 22, rotating motion component; 23, linear moving component; 24, motor mounting seat; 211, servo motor; 212, rotary encoder; 221, ball screw; 222, coupling; 223, bearing; 224, bearing seat; 231, mobile platform; 232, slider; 3, safety monitoring component; 31, limit switch; 32, baffle; 311, base; 312, transmitting part; 313, receiving part; 4, accuracy monitoring component; 41, grating scale; 42, grating reading head. DETAILED DESCRIPTION

[0052] The present invention is described in detail below in conjunction with specific embodiments. It should be emphasized that the following description is merely illustrative and is not intended to limit the scope of the present invention and its application.

[0053] It should be noted that, unless otherwise clearly specified and limited, the terms "first direction", "second direction", "mutually divergent" and the like used in this specification to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. The terms such as "installation", "fitting", "connection" and "fixation" should be understood in a broad sense. For example, "connection" can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; "fixation" can be bolt fixation, snap fixation or glue fixation; the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated; thus, the features specified as "first" and "second" may explicitly or implicitly include one or more of the features; "multiple" or "several" means two or more; in addition, "and / or" includes any and all combinations of one or more related listed items; for ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0055] In the embodiments of the present application, the specific shape, structure, size, etc. of the "precision slide module" are not limited, and those skilled in the art can selectively use any suitable implementation method according to actual needs.

[0056] Figure 1 A schematic structural diagram of a precision slide module provided in an embodiment of the present invention. Figure 2 A three-dimensional exploded view of the precision slide module provided in an embodiment of the present invention.

[0057] See also Figure 1 and Figure 2 The precision slide module 100 includes: a supporting component 1, a motion execution component 2, a safety monitoring component 3 and an accuracy monitoring component 4.

[0058] The motion execution assembly 2 is assembled on the supporting component 1 , and at least a part of the motion execution assembly 2 can move on at least a part of the supporting component 1 .

[0059] In addition, the safety monitoring component 3 is disposed on the motion execution component 2 , and the safety monitoring component 3 is used to limit the travel range of at least a portion of the motion execution component 2 moving on at least a portion of the support component 1 .

[0060] In addition, the accuracy monitoring component 4 is mounted on the motion execution component 2 to monitor the motion accuracy of the motion execution component 2 at least partially within the stroke range.

[0061] In some embodiments, Figure 1 and Figure 2 As shown, the supporting component 1 includes a base 11 and a pair of guide rails 12 .

[0062] Specifically, the pair of guide rails 12 both extend along the first direction 1001 , and are symmetrically disposed on two sides of the base 11 that are away from each other in the second direction 1002 .

[0063] It should be noted that the pair of guide rails 12 can be used to guide at least a portion of the motion execution assembly 2 to move in the first direction 1001 .

[0064] It can be understood that the first direction 1001 and the second direction 1002 are orthogonal to each other.

[0065] In some embodiments, reference Figure 1 and Figure 2 It can be seen that the motion execution component 2 includes: a driving component 21 , a rotational motion component 22 and a linear motion component 23 .

[0066] Specifically, at least a portion of the driving component 21 is connected to at least a portion of the rotational motion component 22 to drive at least a portion of the rotational motion component 22 to rotate.

[0067] In the embodiment of the present application, at least a portion of the linear moving component 23 is connected to at least a portion of the rotational moving component 22 , so that the linear moving component 23 can move along the first direction 1001 following the rotation of at least a portion of the rotational moving component 22 .

[0068] In some embodiments, in combination Figure 1 and Figure 2 It can be known that the motion execution component 2 also includes: a motor mounting seat 24.

[0069] To further explain, the motor mounting seat 24 is fixed to any end of the base 11 in the first direction 1001 , and the driving component 21 is disposed on the motor mounting seat 24 .

[0070] In some embodiments, according to Figure 2 It can be known that the driving component 21 includes: a servo motor 211 and a rotary encoder 212 .

[0071] The rotary encoder 212 is connected to the servo motor 211 , and the rotary encoder 212 can measure the corresponding displacement parameter according to the rotation speed parameter of the servo motor 211 .

[0072] In addition, the rotary encoder 212 is arranged on the servo motor 211, and can accurately detect the angular position or angular velocity of the servo motor 211 during rotation (that is, the speed parameter of the servo motor 211), and convert the above-mentioned angular position or angular velocity into a measurable electrical signal (that is, obtaining the corresponding displacement parameter based on the speed parameter of the servo motor 211).

[0073] Generally speaking, in a control system with a servo motor or a stepper motor, a rotary encoder is often used as a position feedback element, which can monitor the actual position information of the servo motor or the stepper motor in real time, and feed back the above actual position information to the control system to achieve closed-loop control. In addition, through the feedback of the rotary encoder, the control system can compare the difference between the actual position of the servo motor or the stepper motor and the preset target position in real time, and adjust the control signal according to this difference to reduce the error. This closed-loop control mechanism can significantly improve the accuracy and stability of the control system. Since the precision slide module 100 adopts the above control system, the precision slide module 100 has higher accuracy and stability.

[0074] In addition, for application scenarios such as machine tool feed axes and robot joints that need to measure multiple turns of rotation, rotary encoders can provide multi-turn detection functions, which can not only remember the absolute position of the servo motor or stepper motor during rotation, but also reposition to the last position after power failure.

[0075] In summary, rotary encoders have broad application prospects and important roles in industrial automation, robotics, CNC machine tools and other fields; rotary encoders help to achieve efficient and accurate control system design by providing accurate position and speed information.

[0076] In some embodiments, Figure 1 and Figure 2 It can be seen that the rotating motion component 22 includes: a ball screw 221 , a coupling 222 , two bearings 223 and two bearing seats 224 .

[0077] Specifically, the bearing 223 can be a deep groove ball bearing and an angular contact ball bearing; among them, the angular contact ball bearing can withstand axial loads and radial loads; at high speeds, the angular contact ball bearing can be used to withstand pure axial loads; in addition, adding bearing 223 to the precision slide module 100 can make the overall structure have higher rigidity, precise motion control and smooth transmission.

[0078] The axial direction of the ball screw 221 is parallel to the first direction 1001 ; the two bearing seats 224 are respectively arranged on two sides of the base 11 away from each other in the first direction 1001 , and a bearing 223 is embedded in each bearing seat 224 .

[0079] In addition, two opposite ends of the ball screw 221 in the first direction 1001 are respectively sleeved on two bearings 223 , and one end thereof can extend to the coupling 222 .

[0080] In addition, the servo motor 211 is connected to the ball screw 221 through a coupling 222 , so that the servo motor 211 drives the ball screw 221 to rotate.

[0081] Specifically, the roller screw is the most commonly used transmission element in tool machinery and precision machinery. Its main function is to convert rotational motion into linear motion, or to convert torque into axial repetitive force, while having the characteristics of high precision, reversibility and high efficiency. Generally speaking, a ball screw includes at least: a screw shaft, a screw nut and a number of steel balls; the above-mentioned several steel balls roll between the screw shaft and the screw nut, so that the driving torque required for the ball screw is only one-third of that of the sliding screw, so the ball screw has higher efficiency and is widely used in various industrial equipment and precision instruments.

[0082] Moreover, when the ball screw is used as an active workpiece, the screw nut will convert the corresponding linear motion according to the lead of the corresponding specification as the rotation angle of the screw shaft increases, and the passive workpiece (such as the mobile platform 231 in the embodiment of the present application) can be connected to the screw nut of the ball screw through the nut seat, thereby realizing the corresponding linear motion.

[0083] It should be noted that the accuracy of the screw shaft determines the accuracy of the mechanical device or equipment with the ball screw as the active workpiece. In order to achieve high-precision positioning or feeding needs, the error of the screw nut can be compensated by screw compensation.

[0084] It is understandable that the precision slide module 100 uses a servo motor to directly drive the ball screw, eliminating the traditional gear reduction mechanism, making the mechanical transmission structure in the precision slide module 100 simple, which can not only improve the displacement accuracy and reduce the transmission error, but also reduce the overall weight.

[0085] In some embodiments, please refer to Figure 1 and Figure 2 The linear moving component 23 includes: a moving platform 231 and at least one pair of sliders 232 .

[0086] In the embodiment of the present application, at least one pair of sliders 232 are respectively disposed on a pair of guide rails 12 ; the movable platform 231 is sleeved on the ball screw 221 , and can move along the first direction 1001 following the rotation of the ball screw 221 .

[0087] To further explain, the moving platform 231 is connected to at least one pair of sliders 232 , so that the sliders 232 can move on the guide rail 12 following the movement of the moving platform 231 .

[0088] Generally speaking, the guide rail 12 mainly plays a guiding and supporting role, that is, to ensure that the linear moving component 23 can accurately move along the preset direction (i.e., the first direction 1001) under the action of external force (the external force can be understood as: the weight of the linear moving component 23 itself, the weight of the workpiece placed on the mobile platform 231, the cutting force or the traction force).

[0089] In some embodiments, please refer to Figure 1 and Figure 2 The safety monitoring component 3 includes: at least two limit switches 31 and at least two baffles 32.

[0090] Among them, at least two limit switches 31 are respectively arranged on the two bearing seats 224; at least two baffles 32 are respectively arranged on two sides of the movable platform 231 that are away from each other in the first direction 1001.

[0091] In addition, the limit switch 31 can be connected to the servo motor 211 via a cable, and the limit switch 31 and the baffle 32 cooperate with each other to limit the travel range of the movable platform 231 in the first direction 1001 .

[0092] In addition, an origin mark is set in the rotary encoder 212. When the mobile platform 231 moves to the position of the limit switch 31, the servo motor 211 drives the mobile platform 231 to move in the reverse direction until it reaches the origin mark of the rotary encoder 212, so that the mobile platform 231 moves within the travel range.

[0093] Figure 3 A schematic structural diagram of a limit switch provided in an embodiment of the present invention.

[0094] In some embodiments, Figure 1-Figure 3 As shown, the limit switch 31 includes a base 311 , a transmitting portion 312 and a receiving portion 313 .

[0095] It should be noted that the emitting portion 312 and the receiving portion 313 are disposed oppositely at two ends of the base 311 ; the emitting portion 312 is used to emit light, and the receiving portion 313 is used to receive light.

[0096] It is understandable that when the baffle 32 is located between the emitting portion 312 and the receiving portion 313 , the light can be blocked so that the light cannot reach the receiving portion 313 , and at this time, the servo motor 211 stops rotating.

[0097] In some embodiments, in combination Figure 1 and Figure 2 It can be known that the accuracy monitoring component 4 includes: a grating scale 41 and a grating reading head 42.

[0098] Specifically, the grating ruler 41 is attached to the base 11; the grating reading head 42 is connected to the moving platform 231 through a reading head fixing block (not shown in the figure), so that the grating reading head 42 can move along the first direction 1001 following the movement of the moving platform 231.

[0099] Generally speaking, the grating reading head 42 can cover at least a portion of the grating scale 41 ; when the grating reading head 42 moves in the first direction 1001 , the position parameters of the moving platform 231 can be measured in real time.

[0100] In the embodiment of the present application, the above-mentioned position parameter is compared with the displacement parameter to monitor the motion accuracy of the mobile platform 231 .

[0101] Furthermore, the read head fixing block has multiple adjustable degrees of freedom.

[0102] It should be noted that since the mobile platform 231 is required to achieve a motion accuracy of less than 1.5μm, the above-mentioned accuracy monitoring component 4 can select an open reflective grating; in addition, the grating read head 42 can be installed on the mobile platform 231 through a read head fixing block, and the above-mentioned read head fixing block has 6 fine-tuning degrees of freedom, which can easily and quickly adjust the grating read head 42 and the grating scale 41 to the optimal spatial position to reduce the measurement error caused by the measuring instrument.

[0103] It should be noted that measurement accuracy is an important technical indicator of a reflective grating, and its selection should be based on the requirements of the measured displacement distance and measurement speed; for example, a reflective grating can be selected with a measurement accuracy of 0.1μm resolution.

[0104] The method for improving the motion accuracy of the precision slide module 100 is described in detail: adding a grating ruler 41 to the precision slide module 100 as a full closed-loop feedback, thereby greatly improving the motion accuracy of the precision slide module 100; specifically, taking a grating ruler with a resolution of 0.1um as an example, its feedback accuracy can reach ±(5um+30um) / m. In this case, for a 300mm grating ruler, its accuracy error is about 12um. In addition, in the case of low measurement accuracy, a similar "screw compensation" method can be adopted to improve the motion accuracy of the precision slide module 100: a laser interferometer is used to record the gap between the actual accuracy and the preset target accuracy, and a set of data is listed, and then compensation is performed during the driving process based on this data.

[0105] In summary, the precision slide module provided by the embodiment of the present invention, through a specific structural design, uses a motion execution component, a safety monitoring component, and an accuracy monitoring component to form a closed-loop system, which can effectively improve the motion stability and motion accuracy of the precision slide module, thereby having a profound impact on the development of industrial modernization and even other fields, and has a long-term market prospect. Therefore, the precision slide module provided by the embodiment of the present invention has a certain novelty compared to the traditional precision slide module.

[0106] The above contents are further detailed descriptions of the present invention in combination with specific / preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention.

Claims

1. A precision slide module, characterized in that: include: Support components; A motion execution assembly; the motion execution assembly is mounted on the support member, and at least a portion of the motion execution assembly can move on at least a portion of the support member; A safety monitoring component; the safety monitoring component is arranged on the motion execution component, and the safety monitoring component is used to limit the range of travel of at least a part of the motion execution component moving on at least a part of the support component; An accuracy monitoring component; the accuracy monitoring component is installed on the motion execution component to monitor the motion accuracy of the motion execution component at least partially within the stroke range.

2. The precision slide module according to claim 1, characterized in that: The supporting member comprises: A base and a pair of guide rails; the pair of guide rails both extend along a first direction and are symmetrically arranged on two sides of the base that are away from each other in a second direction; The pair of guide rails can be used to guide at least a portion of the motion execution assembly to move in the first direction; The first direction and the second direction are orthogonal to each other.

3. The precision slide module according to claim 2, characterized in that: The motion execution component comprises: Drive components, rotary motion components and linear motion components; At least a portion of the driving component is connected to at least a portion of the rotationally movable component to drive at least a portion of the rotationally movable component to rotate; At least a portion of the linear motion component is connected to at least a portion of the rotational motion component, so that the linear motion component can move along the first direction following the rotation of at least a portion of the rotational motion component.

4. The precision slide module according to claim 3, characterized in that: The motion execution component also includes: Motor mounting seat; the motor mounting seat is fixed to any end of the base in the first direction, and the driving component is arranged on the motor mounting seat.

5. The precision slide module according to claim 3, characterized in that: The driving component comprises: A servo motor and a rotary encoder; the rotary encoder is connected to the servo motor, and the rotary encoder can measure corresponding displacement parameters according to the rotation speed parameters of the servo motor.

6. The precision slide module according to claim 5, characterized in that: The rotary motion component comprises: A ball screw, a coupling, two bearings and two bearing seats; the axial direction of the ball screw is parallel to the first direction; The two bearing seats are respectively arranged on two sides of the base away from each other in the first direction, and each of the bearing seats is embedded with a bearing; Two opposite ends of the ball screw in the first direction are respectively sleeved on the two bearings, and one end thereof can extend to the coupling; Wherein, the servo motor is connected to the ball screw through the coupling, so that the servo motor drives the ball screw to rotate.

7. The precision slide module according to claim 6, characterized in that: The linear moving component comprises: A mobile platform and at least one pair of sliders respectively arranged on a pair of the guide rails; The movable platform is sleeved on the ball screw and can move along the first direction following the rotation of the ball screw; Wherein, the mobile platform is connected to at least one pair of the sliders, so that the sliders can move on the guide rail following the movement of the mobile platform.

8. The precision slide module according to claim 7, characterized in that: The safety monitoring component comprises: at least two limit switches and at least two baffles; At least two of the limit switches are respectively arranged on the two bearing seats; at least two of the baffles are respectively arranged on two sides of the movable platform that are away from each other in the first direction; The limit switch may be connected to the servo motor via a cable, and the limit switch and the baffle cooperate with each other to limit the travel range of the mobile platform in the first direction.

9. The precision slide module according to claim 8, characterized in that: The limit switch comprises: A base, a transmitting part and a receiving part; the transmitting part and the receiving part are arranged at two ends of the base opposite to each other; the transmitting part is used to transmit light, and the receiving part is used to receive light; When the baffle is located between the emitting portion and the receiving portion, the light can be blocked so that the light cannot reach the receiving portion, and at this time, the servo motor stops rotating.

10. The precision slide module according to claim 7, characterized in that: The accuracy monitoring component comprises: A grating ruler and a grating reading head; the grating ruler is attached to the base; the grating reading head is connected to the moving platform through a reading head fixing block, so that the grating reading head can move along the first direction following the movement of the moving platform; The grating reading head can cover at least a portion of the grating ruler; when the grating reading head moves in the first direction, the position parameters of the mobile platform can be measured in real time; comparing the position parameter with the displacement parameter to monitor the motion accuracy of the mobile platform; Wherein, the reading head fixing block has multiple adjustable degrees of freedom.

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