Energy-saving metallized film evaporation equipment

Abstract

The invention relates to the technical field of metallized film evaporation, in particular to energy-saving metallized film evaporation equipment which comprises an evaporation box and further comprises two evaporation assemblies used for evaporation of two kinds of metal respectively. The isolation mechanism is arranged between the two evaporation assemblies and used for isolating the two kinds of metal particles; the cleaning mechanism is used for removing by-products and pollutants on the surface of the first metal layer; the drying mechanism is used for removing moisture and volatile impurities on the surface of the film; and the activation mechanism is used for improving the binding force between the metal layer and the film base layer. According to the energy-saving metallized film evaporation equipment, the two evaporation assemblies are arranged in the evaporation box, evaporation can be conducted on a film twice, by arranging the cleaning mechanism, the drying mechanism and the activating mechanism, surface treatment can be conducted on the film on which a first layer of metal is evaporated, the combination degree of the film and a second layer of metal can be improved, and therefore the evaporation process can be shortened, and the evaporation efficiency can be improved. And meanwhile, waste of heat and vacuum degree is avoided, and the purpose of saving energy is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of metallized film evaporation, in particular to energy-saving metallized film evaporation equipment. Background Art

[0002] Vacuum evaporation, or evaporation for short, refers to a process in which a certain heating evaporation method is used to evaporate the coating material (or film material) under vacuum conditions and gasify it, so that the particles fly to the surface of the substrate and condense into a film. In order to optimize the electrical and mechanical properties of the film, it is often necessary to evaporate double or even multiple layers of metal on the surface of the film. At present, the evaporation of double-layer metal films is mainly achieved by repeated evaporation processes.

[0003] Therefore, when evaporating a double metal layer, the film needs to be placed in an evaporation box for independent evaporation twice. Between the two evaporation, the film needs to be taken out of the evaporation box for surface treatment. This results in waste of heat and vacuum during film evaporation, low production efficiency, and high energy consumption. In view of this, we propose an energy-saving metallized film evaporation equipment. Summary of the invention

[0004] The purpose of the embodiment of the present invention is to provide an energy-saving metallized film evaporation device, which solves the problems of low efficiency and high energy consumption in the current double-layer metal evaporation.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] An energy-saving metallized film evaporation device, comprising an evaporation box, and further comprising:

[0007] Two evaporation components, used for evaporating two metals respectively;

[0008] An isolation mechanism, disposed between the two evaporation components, for isolating two types of metal particles;

[0009] a cleaning mechanism for removing byproducts and contaminants from the surface of the first metal layer;

[0010] Drying mechanism, used to remove moisture and volatile impurities from the film surface;

[0011] An activation mechanism for improving the bonding strength between the metal layer and the film base layer;

[0012] A guide mechanism for conveying the film;

[0013] The isolation mechanism comprises an isolation box fixedly installed in the evaporation box, the isolation box is a hollow structure, both sides of the isolation box are connected with adsorption plates, and both sides of the adsorption plates penetrate the isolation box.

[0014] As a preferred technical solution, first openings are opened on both sides of the isolation box, the first openings are located above the adsorption plate, a negative pressure pipe is connected to the isolation box, and the air pressure inside the isolation box is lower than the air pressure inside the evaporation box.

[0015] As a preferred technical solution, the cleaning mechanism includes a liquid storage tank fixedly installed in the evaporation tank, the liquid storage tank is used to hold the cleaning liquid, a liquid pump is installed in the liquid storage tank, the input end of the liquid pump is connected to a liquid extraction pipe for extracting the cleaning liquid, the output end of the liquid pump is connected to a shunt pipe, and the shunt pipe is connected to a plurality of liquid outlet pipes.

[0016] As a preferred technical solution, a fixed cylinder is fixedly installed in the liquid storage tank, a roller is rotatably installed in the fixed cylinder, the roller is coaxially arranged with the fixed cylinder, and the outer diameter of the roller is smaller than the inner diameter of the fixed cylinder, both ends of the roller are in contact with the inner wall of the fixed cylinder, and a plurality of partitions are distributed in a circular array on the outer peripheral wall of the roller, and one end of the partition away from the roller is in contact with the inner wall of the fixed cylinder, so as to divide the fixed cylinder into a plurality of liquid storage chambers;

[0017] One end of the plurality of liquid outlet pipes away from the shunt pipe is communicated with the interior of the fixed tube. A water spraying port is provided on the surface of the fixed tube and is arranged inclined.

[0018] As a preferred technical solution, a filter is installed on the liquid extraction tube.

[0019] As a preferred technical solution, a water-absorbing roller is rotatably installed in the liquid storage tank, and the water-absorbing roller is connected to the rotating roller through a belt;

[0020] A rotating motor is installed on the liquid storage tank, and an output end of the rotating motor is drivingly connected to one end of a rotating roller.

[0021] As a preferred technical solution, the drying mechanism comprises a drying box fixedly installed in the evaporation box, a heating pipe is installed in the drying box, an opening is provided on the top of the drying box, and a communication port is provided on one side;

[0022] A second opening is provided on one side of the isolation box, and the second opening is communicated with the communication port.

[0023] As a preferred technical solution, the activation mechanism is a plasma generator.

[0024] As a preferred technical solution, the evaporation assembly includes a telescopic motor fixedly installed at the bottom of the evaporation box, and the output end of the telescopic motor is drivingly connected to the evaporation boat.

[0025] As a preferred technical solution, the guide mechanism includes a tensioning roller, a first horizontal roller, a second horizontal roller and a plurality of guide rollers rotatably installed in the evaporation box;

[0026] The first horizontal roller and the second horizontal roller are used to horizontally transport the film that has undergone the first evaporation, so that the first metal layer on the film passes through the cleaning mechanism, the drying mechanism and the isolation mechanism in sequence.

[0027] By means of the above technical solution, the present invention provides an energy-saving metallized film evaporation device, which has at least the following beneficial effects:

[0028] The energy-saving metallized film evaporation equipment has two evaporation components in the evaporation box, which can perform evaporation on the film twice. An isolation mechanism is provided between the two evaporation components to isolate the two metal vapors to avoid mixing of the metal vapors and affecting the effect of metal layer deposition. By arranging a cleaning mechanism, a drying mechanism and an activation mechanism, the surface of the film with the first layer of metal evaporated can be treated to improve the bonding degree between the film and the second layer of metal, thereby shortening the evaporation process, improving the evaporation efficiency, and avoiding the waste of heat and vacuum, thereby achieving the purpose of energy saving. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application:

[0030] Figure 1 It is an isometric view of the overall structure of an embodiment of the present invention;

[0031] Figure 2 It is a front view of the overall structure of an embodiment of the present invention;

[0032] Figure 3 A schematic diagram of the internal structure of a vapor deposition box in an embodiment of the present invention;

[0033] Figure 4 Schematic diagram of an isolation box and an adsorption plate in an embodiment of the present invention;

[0034] Figure 5 It is a cross-sectional view of the cleaning mechanism, the drying mechanism and the isolation mechanism in the embodiment of the present invention;

[0035] Figure 6 is a schematic diagram of a rotating electrical machine according to an embodiment of the present invention;

[0036] Figure 7 Schematic diagram of a heating tube in an embodiment of the present invention.

[0037] In the figure: 1. evaporation box; 2. evaporation component; 21. telescopic motor; 22. evaporation boat; 3. isolation mechanism; 31. isolation box; 311. first port; 312. second port; 32. adsorption plate; 33. negative pressure pipe; 4. cleaning mechanism; 41. liquid storage tank; 42. rotating roller; 43. partition; 44. fixed cylinder; 441. water spray port; 45. liquid outlet pipe; 46. shunt pipe; 47. liquid pump; 48. liquid extraction pipe; 49. filter; 410. rotating motor; 411. water absorption roller; 5. drying mechanism; 51. drying box; 511. connecting port; 52. heating pipe; 6. unwinding roller; 7. winding roller; 8. guiding mechanism; 81. tensioning roller; 82. first horizontal roller; 83. second horizontal roller; 9. activation mechanism. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] See also Figure 1-Figure 7 , a technical solution provided by the present invention:

[0040] An energy-saving metallized film evaporation device comprises a sealable evaporation box 1, in which an unwinding roller 6, a winding roller 7 and a guide mechanism 8 composed of a plurality of rotating rollers are rotatably installed. Two evaporation components 2 are arranged in the evaporation box 1 to form two evaporation areas, which are respectively used for evaporating two metals.

[0041] See also Figure 2 The evaporation component 2 includes a telescopic motor 21 fixedly installed at the bottom of the evaporation box 1. The output end of the telescopic motor 21 is driven and connected to the evaporation boat 22. Through the telescopic motor 21, the distance between the evaporation boat 22 and the film can be adjusted according to different metals, thereby changing the deposition speed and uniformity of metal particles on the surface of the film.

[0042] In order to prevent the metal vapor from interfering with each other when two layers of metal are evaporated on the film, an isolation mechanism 3 is provided in the evaporation box 1. The isolation mechanism 3 is arranged between the two evaporation components 2 to isolate the two metal particles so that the film can contact with the second metal after one layer of metal is evaporated.

[0043] See also Figure 2-Figure 5The isolation mechanism 3 includes an isolation box 31 fixedly installed in the evaporation box 1, which is used to isolate the two metal vapors and confine the metal vapors in a certain area to prevent the two metal particles from mixing with each other and affecting the evaporation effect. The isolation box 31 is a hollow structure, and adsorption plates 32 are connected on both sides of the isolation box 31. The adsorption plates 32 are porous structures that can capture metal vapor and prevent metal vapor from moving along the structural gap to another evaporation area and mixing with another metal vapor. Both sides of the adsorption plate 32 pass through the isolation box 31 and have a certain thickness to ensure its adsorption time and adsorption effect.

[0044] In a preferred embodiment, first openings 311 are provided on both sides of the isolation box 31, and a negative pressure pipe 33 is connected to the isolation box 31, and one end of the negative pressure pipe 33 is connected to an external negative pressure device, so that the internal air pressure of the isolation box 31 is lower than the internal air pressure of the evaporation box 1, thereby forming a pressure difference between the porous adsorption plate 32 and the first opening 311, so that the metal vapor in the evaporation box 1 is adsorbed into the adsorption plate 32 and the isolation box 31. The thickness of the adsorption plate 32 is much greater than the wall thickness of the isolation box 31, and the internal pore size of the adsorption plate 32 is much smaller than the pore size of the first opening 311. The porous structure blocks and captures the airflow, thereby alleviating the influence of the pressure difference on the metal vapor on both sides, and preventing the metal vapor in the evaporation area from being drawn into the isolation box 31 in large quantities. The first opening 311 is located above the adsorption plate 32, so that the pressure difference here is increased, and the escaping metal particles can be captured, thereby improving the particle isolation effect without interfering with metal evaporation.

[0045] After a layer of metal is evaporated on the film, certain by-products and pollutants will exist on its surface, which will affect its bonding effect with the second metal layer. For this reason, a cleaning mechanism 4 is set in the evaporation box 1 to remove the by-products and pollutants on the surface of the first metal layer to ensure that the electrical, optical or mechanical properties of the film are not affected.

[0046] Specifically, the cleaning mechanism 4 includes a liquid storage tank 41 fixedly installed in the evaporation tank 1, the liquid storage tank 41 is used to contain the cleaning liquid, and a liquid pump 47 is installed in the liquid storage tank 41. The output end of the liquid pump 47 is connected to a shunt pipe 46, and the shunt pipe 46 is connected to a plurality of liquid outlet pipes 45, and the plurality of liquid outlet pipes 45 are distributed in a straight line at equal distances along the width direction of the film to expand the area where the cleaning liquid is sprayed.

[0047] In a preferred embodiment, a fixed cylinder 44 is fixedly installed in the liquid storage tank 41, and the fixed cylinder 44 is a hollow structure, and its length is not less than the width of the film. A roller 42 is rotatably installed in the fixed cylinder 44, and the roller 42 is coaxially arranged with the fixed cylinder 44, and one end of the roller 42 is rotatably connected to the inner wall of the evaporation box 1 through a rotating shaft, and one end of the rotating shaft is connected to an external driving device, so that the rotating shaft 42 can rotate at high speed in the fixed cylinder 44. The outer diameter of the roller 42 is smaller than the inner diameter of the fixed cylinder 44, and the two ends of the roller 42 are in contact with the inner wall of the fixed cylinder 44, so that an annular chamber is formed between the outer wall of the roller 42 and the inner wall of the fixed cylinder 44. A plurality of partitions 43 are distributed in a circular array on the outer peripheral wall of the roller 42, and one end of the partition 43 is fixedly connected or integrally formed with the outer peripheral wall of the roller 42, and the end of the partition 43 away from the roller 42 is in contact with the inner wall of the fixed cylinder 44, so that the internal chamber of the fixed cylinder 44 is divided into a plurality of liquid storage chambers, which can store a plurality of cleaning liquids. The ends of the multiple liquid outlet pipes 45 away from the shunt pipe 46 are all connected to the interior of the fixed cylinder 44, and are used to inject the cleaning liquid into the fixed cylinder 44. A water spray port 441 is provided on the surface of the fixed cylinder 44. When the roller 42 rotates at high speed, the cleaning liquid in the liquid storage cavity will be sprayed out from the water spray port 441 under the action of centrifugal force, contact the surface of the film, and clean the by-products and pollutants on the surface of the film. The water spray port 441 is square and can be adapted to the shape of the film. Compared with spraying through an ordinary circular nozzle, spraying through the square water spray port 441 in this embodiment allows the cleaning liquid to contact the surface of the film more evenly, and the effect of removing impurities is better.

[0048] The water spray port 441 is set at an angle so that the sprayed cleaning liquid can re-enter the liquid storage tank 41 for circulation. The input end of the liquid pump 47 is connected to a liquid extraction pipe 48 for extracting the cleaning liquid. A filter 49 is installed on the liquid extraction pipe 48. The filter 49 is a nano-scale filter that can filter metal ions in the cleaning liquid.

[0049] In a preferred embodiment, a water-absorbing roller 411 is rotatably installed in the liquid storage tank 41. The surface of the water-absorbing roller 411 is provided with a porous flexible material and is in contact with the surface of the film to absorb the liquid on the surface of the film. The water-absorbing roller 411 is connected to the rotating roller 42 through a belt. In addition, a rotating motor 410 is installed on the liquid storage tank 41, and the output end of the rotating motor 410 is drivingly connected to one end of the rotating roller 42. The rotating motor 410 provides power for the rotation of the liquid storage tank 41 and the water-absorbing roller 411 to ensure the cleaning and water-absorbing effects.

[0050] A drying mechanism 5 is provided in the evaporation box 1 for removing moisture and volatile impurities from the surface of the film.

[0051] See also Figure 5 and Figure 7The drying mechanism 5 in this embodiment includes a drying box 51 fixedly installed in the evaporation box 1, a heating pipe 52 is installed in the drying box 51, an opening is provided on the top of the drying box 51, and a connecting port 511 is provided on one side, and a second opening 312 is provided on one side of the isolation box 31, and the second opening 312 is connected to the connecting port 511. After heating, the liquid on the surface of the film evaporates, and under the pressure difference between the inside and outside of the isolation box 31, the steam enters the isolation box 31 through the connecting port 511 and the second opening 312, and is then extracted through the negative pressure pipe 33. A filtering device is provided on the negative pressure pipe 33 to prevent impurities from entering the negative pressure equipment.

[0052] An activation mechanism 9 is provided in the evaporation box 1. The activation mechanism 9 is preferably a plasma generator, which performs plasma activation on the surface of the film to improve the bonding strength between the metal layer and the film base layer.

[0053] In addition, a unwinding roller 6, a winding roller 7 and a guide mechanism 8 are also provided in the evaporation box 1, wherein the guide mechanism 8 is used to transport the film, and the unwinding roller 6 and the winding roller 7 are arranged on both sides of the guide mechanism 8, which are respectively used for unwinding the film substrate and winding up the metal film after evaporation.

[0054] See also Figure 2 The guide mechanism 8 includes a tension roller 81, a first horizontal roller 82, a second horizontal roller 83 and a plurality of guide rollers rotatably installed in the evaporation box 1. The first horizontal roller 82 and the second horizontal roller 83 are used to horizontally transport the film that has undergone the first evaporation, so that the first metal layer on the film passes through the cleaning mechanism 4, the drying mechanism 5 and the isolation mechanism 3 in sequence, thereby ensuring the removal of impurities and drying effects after the film is evaporated with the first layer of metal, and at the same time ensuring the isolation effect of the isolation mechanism 3 on the metal vapor on both sides. One of the guide rollers guides the film to the activation mechanism 9, so that the first metal layer faces the plasma generator for plasma activation.

[0055] The energy-saving metallized film evaporation device of the present invention undergoes the following steps when in use:

[0056] 1. Guide, install the film substrate on the unwinding roller 6, and pull one end of the film substrate, so that the film passes through the first evaporation zone, the activation mechanism 9, the cleaning mechanism 4, the drying mechanism 5, the isolation mechanism 3, the second evaporation zone in sequence, and finally fixed on the winding roller 7;

[0057] 2. Vapor deposition: according to the properties of the two metal layers to be evaporated and the thickness of the metal layer to be evaporated, the height of the evaporation boat 22 is adjusted, and then the evaporation box 1 is closed, and the evaporation box 1 and the isolation box 31 are evacuated respectively, and then the evaporation is started;

[0058] 3. Isolation. During the evaporation process, metal vapor diffuses upward from the evaporation boat 22. Most of the metal vapor will be deposited on the surface of the film, and a small amount of vapor will diffuse outside the evaporation area. When the diffused vapor moves to the vicinity of the adsorption plate 32, it will be affected by the pressure difference on both sides of the isolation box 31 and adsorbed into the adsorption plate 32 or even enter the isolation box 31. A very small amount of metal vapor will escape to the top of the adsorption plate 32 and be captured by the negative pressure from the first port 311 and drawn into the isolation box 31 to prevent the two metals from mixing with each other.

[0059] 4. Activation: The film with the first metal layer deposited moves along the guide roller to the ion generator for plasma activation treatment;

[0060] 5. Cleaning: the liquid pump 47 draws out the cleaning liquid in the liquid storage tank 41 through the liquid extraction pipe 48, and discharges it into the liquid storage cavity between the rotating roller 42 and the fixed cylinder 44 through the shunt pipe 46 and the liquid outlet pipe 45. The rotating roller 42 rotates at high speed under the drive of the rotating motor 410, thereby driving the liquid storage cavity to rotate at high speed. When the liquid storage cavity rotates to align with the water spray port 441, the cleaning liquid is sprayed out under the action of centrifugal force and contacts the first metal layer to wash the byproducts and pollutants on the surface of the first metal layer.

[0061] 6. Drying: First, the water-absorbing roller 411 rotates to absorb the liquid on the surface of the metal layer, and then the heating tube 52 generates heat to heat and dry the remaining liquid. After heating, the liquid evaporates and is absorbed into the isolation box 31 through the pressure difference;

[0062] 7. Winding up: After the dried film passes through the second vapor deposition zone, it is wound up by the winding roller 7.

[0063] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0064] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An energy-saving metallized film evaporation device, comprising an evaporation box (1), characterized in that: Also includes: Two evaporation components (2), respectively used for evaporating two metals; An isolation mechanism (3) is disposed between the two evaporation components (2) and is used to isolate two types of metal particles; A cleaning mechanism (4) for removing byproducts and contaminants on the surface of the first metal layer; A drying mechanism (5) for removing moisture and volatile impurities from the surface of the film; An activation mechanism (9) for improving the bonding force between the metal layer and the film base layer; A guide mechanism (8) for conveying the film; The isolation mechanism (3) comprises an isolation box (31) fixedly installed in the evaporation box (1); the isolation box (31) is a hollow structure; both sides of the isolation box (31) are connected to adsorption plates (32); both sides of the adsorption plates (32) penetrate the isolation box (31).

2. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The isolation box (31) is provided with first openings (311) on both sides, the first openings (311) are located above the adsorption plate (32), the isolation box (31) is connected to a negative pressure pipe (33), and the internal air pressure of the isolation box (31) is lower than the internal air pressure of the evaporation box (1).

3. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The cleaning mechanism (4) comprises a liquid storage tank (41) fixedly installed in the evaporation box (1), the liquid storage tank (41) being used to contain cleaning liquid, a liquid pump (47) being installed in the liquid storage tank (41), the input end of the liquid pump (47) being connected to a liquid extraction pipe (48) for extracting the cleaning liquid, the output end of the liquid pump (47) being connected to a shunt pipe (46), and the shunt pipe (46) being connected to a plurality of liquid outlet pipes (45).

4. The energy-saving metallized film evaporation equipment according to claim 3, characterized in that: A fixed cylinder (44) is fixedly installed in the liquid storage box (41), and a roller (42) is rotatably installed in the fixed cylinder (44). The roller (42) and the fixed cylinder (44) are coaxially arranged, and the outer diameter of the roller (42) is smaller than the inner diameter of the fixed cylinder (44). Both ends of the roller (42) are in contact with the inner wall of the fixed cylinder (44), and a plurality of partitions (43) are distributed in a circular array on the outer peripheral wall of the roller (42). One end of the partition (43) away from the roller (42) is in contact with the inner wall of the fixed cylinder (44), so as to divide the fixed cylinder (44) into a plurality of liquid storage chambers. One end of the plurality of liquid outlet pipes (45) away from the diversion pipe (46) is communicated with the interior of the fixed cylinder (44). A water spraying port (441) is provided on the surface of the fixed cylinder (44), and the water spraying port (441) is arranged obliquely.

5. The energy-saving metallized film evaporation equipment according to claim 3, characterized in that: A filter (49) is installed on the liquid extraction pipe (48).

6. The energy-saving metallized film evaporation equipment according to claim 3, characterized in that: A water-absorbing roller (411) is rotatably installed in the liquid storage box (41), and the water-absorbing roller (411) is connected to the rotating roller (42) via a belt; A rotating motor (410) is installed on the liquid storage tank (41), and an output end of the rotating motor (410) is drivingly connected to one end of a rotating roller (42).

7. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The drying mechanism (5) comprises a drying box (51) fixedly installed in the evaporation box (1), a heating pipe (52) is installed in the drying box (51), an opening is provided at the top of the drying box (51), and a communication port (511) is provided at one side; A second opening (312) is provided on one side of the isolation box (31), and the second opening (312) is communicated with the communication port (511).

8. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The activation mechanism (9) is a plasma generator.

9. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The evaporation assembly (2) comprises a telescopic motor (21) fixedly mounted on the bottom of the evaporation box (1), and the output end of the telescopic motor (21) is drivingly connected to an evaporation boat (22).

10. The energy-saving metallized film evaporation equipment according to claim 1, characterized in that: The guide mechanism (8) comprises a tensioning roller (81) rotatably installed in the evaporation box (1), a first horizontal roller (82), a second horizontal roller (83) and a plurality of guide rollers; The first horizontal roller (82) and the second horizontal roller (83) are used to horizontally transport the film that has undergone the first vapor deposition, so that the first metal layer on the film passes through the cleaning mechanism (4), the drying mechanism (5) and the isolation mechanism (3) in sequence.

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