Quartz boat, carrying equipment, caching equipment and carrying method

Abstract

The invention relates to the field of solar cell manufacturing and the field of copper base material graphene product production, and provides a quartz boat, a carrying device, a temporary storage device and a carrying method, and the quartz boat comprises a plurality of connecting rods and a pair of bearing plates; the quartz boat has a first direction and a second direction, the connecting rods are connected with the pair of bearing plates in the first direction, the two sides of the bearing plates in the second direction are each provided with a grabbing part, and the carrying equipment is suitable for grabbing the grabbing parts, on the two sides of the second direction, of the quartz boat and lifting the quartz boat. The carrying equipment is suitable for grabbing the two ends of the quartz boat in the second direction. The grabbing parts are arranged on the two sides of the second direction of the quartz boat, the carrying equipment is suitable for grabbing the grabbing parts on the two sides of the second direction of the quartz boat, and under the condition that it is guaranteed that the total length of the quartz boat is not changed, the bearing space in the quartz boat is increased; the number of the short quartz boats grabbed by the carrying equipment can be more flexibly arranged, and the fracture risk in the carrying process of the quartz boats is greatly reduced due to the reduction of the span between the quartz boat grabbing parts.

Description

Technical Field

[0001] The invention relates to the field of solar cell manufacturing and copper-based graphene product production, and further relates to a quartz boat, a transport device, a buffer device and a transport method. Background Art

[0002] Tubular coating equipment is one of the key process equipment used in the field of solar cell manufacturing and copper-based graphene product production. The operation and storage of quartz boats are important steps in the automated production process of tubular process equipment. How to achieve efficient and stable operation and storage of quartz boats is very critical. In tubular coating equipment, the function of the handling equipment is to grab and carry the quartz boat used to load the substrate; when the handling equipment is working, the quartz boat is carried by grabbing the ears at both ends of the first direction of the quartz boat. This structure has the following disadvantages: 1. The number of quartz boats to be carried cannot be flexibly adjusted, usually a single long quartz boat or two short quartz boats, and it is impossible to carry two or more quartz boats. 2. For the transportation of a single long quartz boat, the structural strength of the quartz boat is very high, and strengthening the strength of the quartz boat will not only lead to a reduction in its internal bearing space, but also increase its weight, which will increase the load on the paddle and the module arm of the handling equipment, reducing the safety of the equipment during operation. 3. For carrying two short quartz boats, it is necessary to add a crossbeam and two grippers, which will also increase the load on the module arm, and sufficient space must be reserved between the two quartz boats for the middle gripper to pick and place, resulting in reduced space utilization and reduced production capacity. 4. The ears at both ends of the quartz boat in the first direction will occupy the length of the entire boat, reducing the actual loading space of the quartz boat. Summary of the invention

[0003] In view of the above technical problems, the purpose of the present invention is to provide a quartz boat, a handling device, a caching device and a handling method, wherein a pair of gripping parts are provided on both sides of the second direction of the quartz boat, and the handling device is suitable for gripping the gripping parts on both sides of the second direction of the quartz boat, thereby increasing the carrying space inside the quartz boat while ensuring that the total length of the quartz boat remains unchanged; the number of short quartz boats gripped by the handling device can be arranged more flexibly, and the reduction in the span between the gripping parts of the quartz boat greatly reduces the risk of the quartz boat breaking during the handling process, and the operation of the quartz boat can be efficiently and stably realized under the premise of low cost, and multiple quartz boats can be flexibly transported.

[0004] In order to achieve the above-mentioned object, the present invention provides a quartz boat, comprising a plurality of connecting rods and a pair of bearing plates;

[0005] The quartz boat has a first direction and a second direction, a plurality of connecting rods connect a pair of the supporting plates along the first direction, the supporting plates are respectively provided with a grabbing portion on both sides of the second direction, and the handling equipment is suitable for grabbing the grabbing portions on both sides of the quartz boat in the second direction and lifting the quartz boat.

[0006] In some embodiments, the carrying plate is disposed at both ends of the plurality of connecting rods in the first direction, and a pair of the grabbing portions are disposed at both sides of the carrying plate in the second direction;

[0007] An abutment wall is provided at the bottom of the grabbing portion, and the abutment wall is suitable for matching and abutting with a lifting rod of a handling device.

[0008] In some embodiments, the abutment wall is arc-shaped;

[0009] The carrying plate is further provided with guide walls on both sides of the second direction, the guide walls are arranged below the grabbing portion, the curvature of the guide walls is connected to the end of the abutting wall, and the lifting rod of the transporting equipment is suitable for reaching the abutting wall of the grabbing portion along the guide walls.

[0010] In some embodiments, the supporting plate is further provided with a first avoidance wall on both sides of the second direction, the first avoidance wall is arranged below the guide wall, the first avoidance wall is connected to the end of the guide wall, and the distance between the first avoidance wall and the center of the abutment wall is greater than the distance between the center of the lifting rod of the transporting equipment and the center of the abutment wall.

[0011] In some embodiments, the bearing plate is further provided with second avoidance walls on both sides of the second direction, the second avoidance walls are arranged at the top and / or bottom of both sides of the bearing plate in the second direction, and the second avoidance walls are suitable for avoiding pipelines;

[0012] And / or, the bottom of the carrier plate is further provided with a pair of placement portions spaced apart along the second direction, and the placement portions are suitable for being placed on the cache rack.

[0013] According to another aspect of the present application, a transport device is further provided, which is suitable for grabbing the two ends of the second direction of any one of the quartz boats in the above-mentioned preferred embodiments, and the transport device includes a moving mechanism and a grabbing mechanism, the moving mechanism is arranged at the two ends of the first direction of the quartz boat and the moving mechanism is suitable for driving the grabbing mechanism to move, the grabbing mechanism includes a pair of lifting rods and a driving assembly, the lifting rods are arranged along the first direction of the quartz boat and the lifting rods are matched with the abutting wall at the bottom of the grabbing part; the driving assembly is suitable for driving the pair of lifting rods to approach or move away from each other and respectively reach under a pair of grabbing parts of the quartz boat.

[0014] In some embodiments, the driving assembly includes a driving member and a pair of transmission mechanisms, the pair of transmission mechanisms are arranged at both ends of the quartz boat in the first direction and connect a pair of lifting rods and the driving member, and the driving member is suitable for driving the pair of lifting rods to rotate through the transmission mechanism and reach under the grabbing part.

[0015] In some embodiments, the transmission mechanism includes a pair of rotating components, which are arranged at both ends of the second direction of the quartz boat and are respectively connected to the lifting rod and the driving member, and the rotating components include a locking block, a connecting block, a first rotating member, a second rotating member and a mounting plate. The locking block is suitable for fixedly connecting one end of the lifting rod, the locking block is fixedly connected to the connecting block, one end of the connecting block is rotatably connected to the mounting plate via the first rotating member, and the driving component is rotatably connected to the other end of the connecting block via the second rotating member, and the driving member is suitable for driving the connecting block to rotate around the first rotating member, thereby driving the locking block and the lifting rod to rotate.

[0016] In some embodiments, the transmission mechanism further includes a synchronization component, which includes a third transmission member and a pair of fixed blocks, the driving member is installed between the pair of fixed blocks, each of the fixed blocks is provided with a guide shaft, and the mounting plate is further provided with a pair of guide grooves on both sides of the second direction, the guide shaft is rotatably arranged in the guide groove through the third rotating member, the fixed block is rotatably connected to the other end of the connecting block through the second rotating member, the driving member is suitable for driving the pair of fixed blocks to approach or move away from each other along the guide groove and the pair of fixed blocks move the same distance, so that the rotation amplitude of the lifting rod is consistent;

[0017] And / or, a pair of limiting rings are further provided at both ends of the lifting rod, and the limiting rings are suitable for abutting against both ends of at least one of the quartz boats in the first direction.

[0018] According to another aspect of the present application, a cache device is further provided, wherein the cache rack comprises at least one layer of cache racks, the cache rack is suitable for placing any one quartz boat of the above-mentioned preferred embodiments, the cache rack comprises a support arm and a support rod, a pair of the support arms are arranged at both ends of the quartz boat in a first direction, a pair of the support rods are arranged at intervals along the second direction of the quartz boat and both ends of a pair of the support rods are respectively connected to a pair of the support arms, and the support rods are suitable for abutting against the placement portion of the quartz boat.

[0019] According to another aspect of the present application, a method for transporting a quartz boat is further provided, comprising using a moving mechanism to move a gripping mechanism of a transport device above the quartz boat;

[0020] Use the driving assembly to move the lifting rod of the grabbing mechanism to below the grabbing parts on both sides of the quartz boat in the second direction;

[0021] Then, the moving mechanism is used to lift the quartz boat and place it on the cache device;

[0022] The driving assembly is then used to drive the lifting rod of the grabbing mechanism to move in the opposite direction and leave the grabbing parts on both sides of the quartz boat in the second direction.

[0023] Compared with the prior art, the quartz boat, handling equipment, buffer equipment and handling method provided by the present invention have at least one of the following beneficial effects:

[0024] 1. A pair of gripping parts are provided on both sides of the second direction of the quartz boat, and the handling equipment is suitable for gripping the gripping parts on both sides of the second direction of the quartz boat, which increases the carrying space inside the quartz boat while ensuring that the total length of the quartz boat remains unchanged; the number of short quartz boats gripped by the handling equipment can be arranged more flexibly, and the reduction in the span between the gripping parts of the quartz boat greatly reduces the risk of the quartz boat breaking during the handling process. Under the premise of low cost, the operation of the quartz boat can be realized efficiently and stably, and multiple quartz boats can be flexibly handled.

[0025] 2. An arc-shaped abutment wall is provided at the bottom of the gripping part, and the abutment wall is suitable for matching and abutting with the lifting rod of the handling equipment, thereby increasing the abutment area and stability between the lifting rod and the gripping part, and preventing the quartz boat from shaking during the transportation of the quartz boat; a guide wall is also provided at the bottom of the abutment wall, and the lifting rod is suitable for reaching the inside of the abutment wall along the guide wall, so that the position of the lifting rod matches the position of the abutment wall of the gripping part, thereby improving the matching degree between the lifting rod and the abutment wall of the gripping part.

[0026] 3. A first avoidance wall is also provided below the guide wall. The distance between the first avoidance wall and the center of the abutment wall is greater than the distance between the center of the lifting rod of the handling equipment and the center of the abutment wall, thereby reducing the risk of the lifting rod colliding with the supporting plate during the movement and reserving space in advance for the movement of the lifting rod. The quartz boat is suitable for being placed on the cache rack through the placement part below the supporting plate, and the placement process is convenient and simple.

[0027] 4. The lifting rod can grab the grabbing parts of multiple quartz boats according to actual needs, and efficiently realize the transportation of several quartz boats; the driving component can drive a pair of lifting rods to move synchronously and reach under the grabbing part, and the transportation process of the transportation equipment is more coordinated and stable; the driving member is suitable for driving the lifting rod to rotate and reach under the grabbing part. At this time, the height direction movement of the transportation equipment is minimal and the space utilization rate is highest, which solves the height size limitation of the tubular coating equipment to a certain extent; the driving member can drive a pair of lifting rods on both sides of the second direction to rotate synchronously and symmetrically, making full use of the space, and the synchronization component makes the rotation amplitude consistent to avoid jamming during rotation.

[0028] 5. Limiting rings are arranged at both ends of the lifting rod and are relatively located at both ends of the first direction of the quartz boat. The limiting rings can play a role of fixing and limiting the quartz boat to prevent the quartz boat from moving at will; and the distance between the limiting rings can be set according to the length and number of the quartz axes, so that the lifting rod can lift multiple quartz boats, and the scope of use is wider. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present invention.

[0030] Figure 1 It is a diagram of the transport of a quartz boat;

[0031] Figure 2 is a side view of the quartz boat in the first direction;

[0032] Figure 3 is a side view of the quartz boat in the second direction;

[0033] Figure 4 It is an overall picture of the handling equipment;

[0034] Figure 5 It is the structural diagram of the handling equipment;

[0035] Figure 6 It is the installation diagram of the cache device;

[0036] Figure 7 It is a structural diagram of the cache rack;

[0037] Figure 8 This is a detailed picture of the cache rack;

[0038] Fig. 9 It is a structural diagram of a tubular coating equipment.

[0039] Description of Figure Numbers:

[0040] Quartz boat 1, first direction 101, second direction 102, connecting rod 11, carrying plate 12, grabbing portion 121, abutting wall 1211, guide wall 122, first avoidance wall 123, second avoidance wall 124, placement portion 125,

[0041] Handling device 2, moving mechanism 21, grabbing mechanism 22, lifting rod 23, driving assembly 24, driving member 241, transmission mechanism 242, rotating assembly 243, locking block 2431, connecting block 2432, first rotating member 2433, mounting plate 2434, second rotating member 2435, synchronizing assembly 244, fixing block 2441, guide shaft 2442, guide groove 2443, third rotating member 2444, limiting ring 25,

[0042] Cache device 3, cache rack 31, support rod 311, support arm 312, locking member 313, photoelectric sensor 314,

[0043] Translation device 4, silicon carbide paddle 41. DETAILED DESCRIPTION

[0044] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0045] In order to simplify the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

[0046] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0047] In this document, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are only preferred implementations of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be regarded as the scope of protection of the present invention.

[0049] refer to Figures 1 to 3The present invention provides a quartz boat 1, including a plurality of connecting rods 11 and a pair of carrying plates 12; the quartz boat 1 has a first direction 101 and a second direction 102, the plurality of connecting rods 11 connect the pair of carrying plates 12 along the first direction 101, the carrying plates 12 are respectively provided with a grabbing portion 121 on both sides of the second direction 102, and the handling equipment 2 is suitable for grabbing the grabbing portions 121 on both sides of the quartz boat 1 in the second direction 102 and lifting the quartz boat 1.

[0050] In this embodiment, a pair of gripping parts 121 are provided on both sides of the second direction 102 of the quartz boat 1, and the transporting device 2 is suitable for gripping the gripping parts 121 on both sides of the second direction 102 of the quartz boat 1, so as to increase the carrying space inside the quartz boat 1 while ensuring that the total length of the quartz boat 1 remains unchanged; the number of short quartz boats 1 gripped by the transporting device 2 can be arranged more flexibly, and the reduction in the span between the gripping parts 121 of the quartz boat 1 greatly reduces the risk of breakage of the quartz boat 1 during the transport process, and under the premise of low cost, the operation of the quartz boat 1 can be realized efficiently and stably, and multiple quartz boats 1 can be flexibly transported.

[0051] Specifically, a plurality of connecting rods 11 are arranged in an array between a pair of supporting plates 12, and a placement space is arranged between the connecting rods 11, and the placement space is suitable for placing silicon wafers and carriers. The first direction 101 is the axial direction of the connecting rods 11, and the second direction 102 is the radial direction of the connecting rods 11, or the first direction 101 is the length direction of the quartz boat 1, and the second direction 102 is the width direction of the quartz boat 1. The supporting plates 12 are arranged at both ends of the plurality of connecting rods 11 in the first direction 101, and a pair of gripping portions 121 are arranged on both sides of the second direction 102 of the supporting plates 12. Compared with the existing quartz boat 1, a pair of gripping portions 121 are arranged on both sides of the second direction 102 of the supporting plates 12, that is, a pair of gripping portions 121 are symmetrically arranged along the first direction 101, and at this time, the gripping portions 121 do not affect the total length of the quartz boat 1 in the first direction 101, thereby increasing the bearing space inside the quartz boat 1. It is worth noting that the principle that the present application can reduce the risk of breakage of the quartz boat 1 during transportation is that when the gripping parts 121 grip both sides of the quartz boat 1 in the second direction 102 , the span between the gripping parts 121 is smaller than that in the prior art.

[0052] Since the tubular coating equipment is a cylinder, a number of quartz boats 1 are arranged along its axial direction, and the grabbing parts 121 are arranged on both sides of the carrier plate 12 in the second direction 102, the distance between adjacent quartz boats 1 can also be reduced, and the ears on both sides of the first direction 101 of the existing quartz boats 1 affect the space utilization rate of the tubular coating equipment. Moreover, the grabbing parts 121 of each quartz boat 1 are located on both sides of the second direction 102 of the quartz boat 1, and the lifting rod 23 of the handling device 2 can grab multiple quartz boats 1 at one time, and the length, size and number of the quartz boats 1 can be flexibly adjusted, which greatly expands the application scenarios of the quartz boats 1 and the handling device 2 and improves the handling efficiency.

[0053] It is worth noting that in the present application, the grabbing portion 121 is protruding from both sides of the supporting plate 12 in the second direction 102. In a modified embodiment, the grabbing portion 121 may also be formed by the supporting plate 12 being recessed inwardly. The present application does not make further limitations thereon. As long as it can realize its grabbing function, it is within the protection scope of the present application.

[0054] Furthermore, the abutment wall 1211 is arc-shaped; the supporting plate 12 is also provided with guide walls 122 on both sides of the second direction 102, and the guide walls 122 are arranged below the grabbing portion 121, and the arc of the guide wall 122 is connected to the end of the abutment wall 1211, and the lifting rod 23 of the transporting equipment 2 is suitable for reaching the abutment wall 1211 of the grabbing portion 121 along the guide wall 122.

[0055] In this embodiment, an arc-shaped abutment wall 1211 is provided at the bottom of the gripping portion 121, and the abutment wall 1211 is suitable for matching and abutting with the lifting rod 23 of the transporting equipment 2, thereby increasing the abutment area and stability between the lifting rod 23 and the gripping portion 121, and preventing the quartz boat 1 from shaking during the transport of the quartz boat 1; a guide wall 122 is also provided at the bottom of the abutment wall 1211, and the lifting rod 23 is suitable for reaching the abutment wall 1211 along the guide wall 122, so that the position of the lifting rod 23 matches the position of the abutment wall 1211 of the gripping portion 121, thereby improving the matching degree between the lifting rod 23 and the abutment wall 1211 of the gripping portion 121.

[0056] Specifically, the abutment wall 1211 is in an arc shape that is concave upward, and the abutment wall 1211 matches the outer wall of the lifting rod 23. Preferably, the abutment is semicircular, and its contact area with the lifting rod 23 is the largest, and the lifting rod 23 and the abutment wall 1211 are more stable, which can effectively prevent the quartz boat 1 from shaking during the transportation of the quartz boat 1. It is worth noting that the abutment wall 1211 includes but is not limited to an arc shape, and can also be an ellipse, a long direction shape, a square, a trapezoid, etc. The specific shape of the abutment wall 1211 is not further limited in this application, as long as the abutment wall 1211 matches the outer wall of the lifting rod 23.

[0057] At the same time, during the process of transporting the quartz boat 1, the lifting rod 23 reaches below the abutting wall 1211 of the gripping portion 121. At this time, due to the placement position of the quartz boat 1 or the error of the transporting device 2, the center of the lifting rod 23 may not match the center of the abutting wall 1211. During the process of the lifting rod 23 moving upward and reaching the inside of the abutting wall 1211, the lifting parts on both sides of the second direction 102 of the quartz boat 1 will squeeze the quartz boat 1 to move in the second direction 102, so that the center of the lifting rod 23 matches the center of the abutting wall 1211, that is, the lifting rod 23 completely reaches the inside of the abutting wall 1211. During the movement of the quartz boat 1 in the second direction 102, the substrate to be processed (silicon wafer, copper powder) on the quartz boat 1 is prone to the risk of tilting. A guide wall 122 is also provided at the bottom of the abutting wall 1211, and the curvature of the guide wall 122 connects the end of the abutting wall 1211 and the guide wall 122 does not exceed the end of the abutting wall 1211. During the upward movement of the lifting rod 23, the quartz boat 1 slides against each other along the guide wall 122, so that the movement of the quartz boat 1 in the second direction 102 is more stable. It is worth noting that the guide wall 122 extends from the end of the abutting wall 1211 to the side away from the abutting wall 1211, that is, the depth of the end of the guide wall 122 on the receiving plate is greater than the depth of the abutting wall 1211 on the supporting plate 12. At this time, the lifting rod 23 can reach the end of the abutting wall 1211 along the end of the guide wall 122. If the guide wall 122 exceeds the end of the abutting wall 1211, during the movement of the lifting rod 23, the lifting rod 23 is easy to hit the guide wall 122 of the supporting plate 12 due to an error, causing damage to the supporting plate 12. The guide wall 122 can also be set as an inclined straight line, which is not further limited in this application.

[0058] Furthermore, the supporting plate 12 is also provided with a first avoidance wall 123 on both sides of the second direction 102, the first avoidance wall 123 is arranged below the guide wall 122, the first avoidance wall 123 is connected to the end of the guide wall 122, and the distance between the first avoidance wall 123 and the center of the abutment wall 1211 is greater than the distance between the center of the lifting rod 23 of the conveying equipment 2 and the center of the abutment wall 1211.

[0059] In this embodiment, a first avoidance wall 123 is further provided under the guide wall 122. The distance between the first avoidance wall 123 and the center of the abutment wall 1211 is greater than the distance between the center of the lifting rod 23 of the transporting equipment 2 and the center of the abutment wall 1211, thereby reducing the risk of the lifting rod 23 colliding with the supporting plate 12 during the movement, and reserving space in advance for the movement of the lifting rod 23.

[0060] Specifically, the first avoidance wall 123 is the deepest part of the carrier plate 12 on both sides in the second direction 102, and the depth of the first avoidance wall 123 is greater than or equal to the end of the guide wall 122. It can also be said that the distance between the first avoidance wall 123 and the center of the abutment wall 1211 is greater than the distance between the center of the lifting rod 23 of the transport device 2 and the center of the abutment wall 1211, that is, when the lifting rod 23 reaches below the abutment wall 1211, there is sufficient space between the lifting rod 23 and the first avoidance wall 123, and when the lifting rod 23 is moved upward, the lifting rod 23 does not contact the first avoidance wall 123, and the lifting rod 23 contacts the end of the guide wall 122 and reaches the inside of the abutment wall 1211 along the guide wall 122. Generally, the distance between the first avoidance wall 123 and the center of the abutment wall 1211 is 4-5 mm greater than the distance between the center of the lifting rod 23 of the transport device 2 and the center of the abutment wall 1211. This distance is a preferred embodiment. According to the different configurations of the gripping portion 121 and the lifting rod 23 of the quartz boat 1, this distance may also be changed accordingly, and this application does not make any further limitations here.

[0061] It is worth noting that the supporting plate 12 is also provided with second avoidance walls 124 on both sides of the second direction 102. The second avoidance walls 124 are arranged at the top and / or bottom of the supporting plate 12 on both sides of the second direction 102. The second avoidance walls 124 are suitable for avoiding pipelines, facilitating the arrangement of gas circuits and wiring inside the tubular coating equipment.

[0062] Furthermore, a pair of placement portions 125 spaced apart along the second direction 102 are provided at the bottom of the carrier plate 12 , and the placement portions 125 are suitable for being placed on the cache rack 31 .

[0063] In this embodiment, the quartz boat 1 is suitable for being placed on the buffer rack 31 through the placement portion 125 below the carrier plate 12, and the placement process is convenient and simple. Specifically, a pair of placement portions 125 are located at the bottom of the carrier plate 12 and are spaced apart in the second direction 102, that is, the pair of placement portions 125 are symmetrically arranged along the first direction 101. Fig. 9 The placement portion 125 is an upwardly concave placement groove, which is suitable for being placed on the silicon carbide paddle 41 of the translation device 4 in the tubular coating device, and is also suitable for being placed on the support rod 311 of the buffer rack 31. The shape of the placement portion 125 is not further limited in this application, as long as it can be placed on the silicon carbide paddle 41 of the translation device 4 in the tubular coating device and on the support rod 311 of the buffer rack 31.

[0064] Further, refer to Fig. 9The present invention provides a tubular coating device, which includes a quartz boat 1 and a transport device 2. The placement portion 125 of the quartz boat 1 is suitable for being placed on the silicon carbide paddle 41 of the translation device 4 in the tubular coating device. The transport device 2 is suitable for being arranged above the quartz boat 1 and grabbing the two ends of the quartz boat 1 in the second direction 102, and transporting the quartz boat 1 between the buffer device 3 on the silicon carbide paddle 41 of the translation device 4 in the tubular coating device.

[0065] Further, refer to Figure 4 and Figure 5 The present invention provides a transport device 2, which is suitable for grabbing the two ends of the second direction 102 of the quartz boat 1 in any of the above-mentioned embodiments. The transport device 2 includes a moving mechanism 21 and a grabbing mechanism 22. The moving mechanism 21 is arranged at the two ends of the first direction 101 of the quartz boat 1 and the moving mechanism 21 is suitable for driving the grabbing mechanism 22 to move. The grabbing mechanism 22 includes a pair of lifting rods 23 and a driving assembly 24. The lifting rods 23 are arranged along the first direction 101 of the quartz boat 1 and the lifting rods 23 match the abutting wall 1211 at the bottom of the grabbing portion 121; the driving assembly 24 is suitable for driving the pair of lifting rods 23 to approach or move away from each other and respectively reach the bottom of a pair of grabbing portions 121 of the quartz boat 1.

[0066] In this embodiment, the lifting rod 23 can grab the grabbing parts 121 of multiple quartz boats 1 according to actual needs, and efficiently realize the transportation of several quartz boats 1; the driving component 24 can drive a pair of lifting rods 23 to move synchronously and reach under the grabbing parts 121, so that the transportation process of the transportation equipment 2 is more coordinated and stable.

[0067] Specifically, the transport device 2 includes a moving mechanism 21 and a grabbing mechanism 22. The grabbing mechanism 22 includes a pair of lifting rods 23 and a driving assembly 24. The moving mechanism 21 can drive the grabbing mechanism 22 to move up, down, left, and right. The moving mechanism 21 is a pair, and the pair of moving mechanisms 21 is arranged at both ends of the quartz boat 1 in the first direction 101, thereby reducing the length of the transport device 2 in the second direction 102. The grabbing mechanism 22 includes a lifting rod 23 and a driving assembly 24. The driving assembly 24 is installed on the moving mechanism 21. Each moving mechanism 21 is provided with a driving assembly 24. Of course, one moving mechanism 21 may be provided with a driving assembly 24, and the other moving mechanism 21 may not be provided with a driving assembly 24. The two ends of the lifting rod 23 along the first direction 101 are respectively connected to a driving assembly 24, and the lifting rod 23 is a pair, and the pair of lifting rods 23 are arranged at intervals along the second direction 102. The same end of the pair of lifting rods 23 is connected to the same driving assembly 24, and the driving assembly 24 is suitable for driving the two lifting rods 23 to move synchronously and approach or move away from each other, so that the two lifting rods 23 can reach the bottom of a pair of grasping parts 121 of the quartz boat 1. Of course, the same end of a pair of lifting rods 23 can also be connected to two driving assemblies 24, and the two driving assemblies 24 realize the synchronous operation of the two lifting rods 23 through a controller. As long as the handling device 2 is suitable for grasping the two ends of the second direction 102 of the quartz boat 1, it is within the protection scope of this application. The lifting rod 23 includes a silicon carbide round rod, a thin-walled stainless round rod, etc. The outer diameter of the round rod is usually between 30-50 mm, the wall thickness of the silicon carbide material is 5-8 mm, and the stainless steel material is 2-4 mm.

[0068] Furthermore, the driving assembly 24 includes a driving member 241 and a pair of transmission mechanisms 242. The pair of transmission mechanisms 242 are arranged at both ends of the first direction 101 of the quartz boat 1 and connect a pair of lifting rods 23 and the driving member 241. The driving member 241 is suitable for driving the pair of lifting rods 23 to rotate through the transmission mechanism 242 and reach under the grabbing portion 121.

[0069] In this embodiment, the driving member 241 is suitable for driving the lifting rod 23 to rotate and reach under the grabbing portion 121. At this time, the height direction movement of the transporting equipment 2 is minimal and the space utilization rate is highest, which solves the height size limitation of the tubular coating equipment to a certain extent.

[0070] Specifically, the transmission mechanism 242 includes a pair of rotating components 243, which are arranged at both ends of the second direction 102 of the quartz boat 1 and are respectively connected to a lifting rod 23 and a driving member 241. A rotating component 243 is provided at both ends of each lifting rod 23. The rotating component 243 includes a locking block 2431, a connecting block 2432, a first rotating member 2433, a second rotating member 2435 and a mounting plate 2434. The locking block 2431 is suitable for fixedly connecting one end of the lifting rod 23. The locking block 2431 is fixedly connected to the connecting block 2432. One end of the connecting block 2432 is rotatably connected to the mounting plate 2434 through the first rotating member 2433. The driving component 24 is rotatably connected to the other end of the connecting block 2432 through the second rotating member 2435. The driving member 241 is suitable for driving the connecting block 2432 to rotate around the first rotating member 2433, thereby driving the locking block 2431 and the lifting rod 23 to rotate. The first rotating member 2433 includes but is not limited to an oil-free bushing, a rotating shaft, a pin, etc. The connecting block 2432 is L-shaped, the locking block 2431 is fixedly connected to one end of the connecting block 2432, the driving member 241 is connected to the other end of the connecting block 2432, the mounting plate 2434 is connected to the middle part of the connecting block 2432 through the first rotating member 2433, and the driving member 241 is suitable for driving the connecting block 2432 to rotate around the rotating first rotating member 2433, thereby rotating the lifting rod 23. The locking block 2431 includes a first block and a second block, and the first block and the second block clamp the lifting rod 23 up and down and fix them by screws.

[0071] It is worth noting that the reason why the lifting rod 23 is rotated to the bottom of the grabbing portion 121 in the present application is that the height space of the tubular coating device is limited, and the vertical movement space of the transport device 2 is limited, so the driving member 241 drives the lifting rod 23 to rotate through the rotating assembly 243, which is the optimal solution, and its space utilization rate is high. Of course, in a modified embodiment, the driving member 241 can also drive the lifting rod 23 to move horizontally and reach the bottom of the grabbing portion 121.

[0072] Furthermore, the transmission mechanism 242 also includes a synchronization component 244, which includes a third rotating member 2444 and a pair of fixed blocks 2441. The driving member 241 is installed between the pair of fixed blocks 2441. Each fixed block 2441 is provided with a guide shaft 2442. The mounting plate 2434 is also provided with a pair of guide grooves 2443 on both sides of the second direction 102. The guide shaft 2442 is rotatably arranged in the guide groove 2443 through the third rotating member 2444. The fixed block 2441 is rotatably connected to the other end of the connecting block 2432 through the second rotating member 2435. The driving member 241 is suitable for driving the pair of fixed blocks 2441 to move closer to or away from each other along the guide groove 2443 and the pair of fixed blocks 2441 move the same distance, so that the rotation amplitude of the lifting rod 23 is consistent.

[0073] In this embodiment, the driving member 241 can drive a pair of lifting rods on both sides of the second direction 102 to rotate synchronously and symmetrically, making full use of the space, and the synchronization component 244 makes the rotation amplitude consistent to avoid jamming during the rotation process.

[0074] Specifically, the driving member 241 is arranged along the second direction 102 and the two ends of the driving member 241 are respectively connected to the fixed blocks 2441, that is, the driving member 241 is fixedly installed between a pair of fixed blocks 2441. A pair of fixed blocks 2441 are symmetrically arranged along the first direction 101 of the quartz axis. The driving member 241 includes but is not limited to a cylinder, an electric cylinder, etc. When the driving member 241 axially telescopically moves, the driving member 241 drives the two fixed blocks 2441 to move away from or close to each other, thereby achieving the purpose of one driving member 241 driving two fixed blocks 2441 and two lifting rods 23. It is worth noting that in the present application, a driving member 241 is provided on each side of the first direction 101 of the quartz boat 1, and the two driving members 241 are linked to each other. Of course, a driving member 241 can also be provided on one side of the first direction 101 of the quartz boat 1, which is within the protection scope of the present application.

[0075] In order to make the moving distances of the two fixed blocks 2441 equal. The present application is provided with a guide shaft 2442 on each fixed block 2441, and the guide shaft 2442 extends to one side of the mounting plate 2434, and correspondingly, a guide groove 2443 is provided on the mounting plate 2434. The guide shaft 2442 is rotatably mounted on the guide groove 2443 through the third rotating member 2444, and the fixed blocks 2441 slide and move away from each other through the guide shaft 2442. Preferably, the guide groove 2443 is arranged in an arc shape and is away from each other. The fixed block 2441 is T-shaped, the guide shaft 2442 is located at one end of the fixed block 2441, the other end of the fixed block 2441 is movably connected to the connecting block 2432, and the driving member 241 is connected to the middle end of the fixed block 2441.

[0076] It is worth noting that the transport device 2 lifts the quartz boat 1 from both sides of the second direction 102 of the quartz boat 1 through two lifting rods 23 to realize the transport of the quartz boat 1. Specifically, the transport device 2 realizes the taking and placing of the quartz boat 1 through the two states of closing and opening between the two lifting rods 23; the lifting rods 23 of the transport device 2 remain in the open state when not grabbing the boat. When the quartz boat 1 needs to be grabbed, the transport device 2 moves from the upper position to the top of the quartz boat 1 and then falls downward. After the transport device 2 falls to the lower position, the lifting rods 23 are closed, and the transport device 2 moves upward to grab the quartz boat 1. After the transport device 2 grabs the quartz boat 1, the quartz boat 1 is transferred to the cache device 3 through the up, down and translation movement of the moving mechanism 21. After putting down the quartz boat 1, the transport device 2 continues to fall to the lower position to open the lifting rods 23, and then moves to the upper position and then translates to the standby position. The two ends of the two lifting rods 23 are fixed by a locking block 2431; the locking block 2431 and one end of the connecting block 2432 are fixed together by screws, and the connecting block 2432 is connected to the mounting plate 2434 on the moving mechanism 21 through the first rotating member 2433; the first rotating member 2433 includes a pin and an oil-free bushing, and the pin and the mounting plate 2434 are locked with a nut, and an oil-free bushing is installed between the pin and the connecting block 2432 to ensure that the connecting block 2432 can rotate smoothly on the pin. The other end of the connecting block 2432 is connected to the fixed block 2441 through the second rotating member 2435, and the second rotating member 2435 includes a rotating shaft, and the rotating shaft and the connecting block 2432 are locked with a nut, and an oil-free bushing is also installed between the rotating shaft and the fixed block 2441, so that the fixed block 2441 and the rotating shaft can rotate smoothly. In this way, we realize the opening and closing of the two lifting rods 23 by controlling the extension and retraction of the driving member 241 to rotate the connecting block 2432.

[0077] Furthermore, a pair of limiting rings 25 are provided at both ends of the lifting rod 23 , and the limiting rings 25 are suitable for abutting against two ends of at least one quartz boat 1 in the first direction 101 .

[0078] In this embodiment, the limit rings 25 are arranged at both ends of the lifting rod 23 and are relatively located at both ends of the first direction 101 of the quartz axis. The limit rings 25 can play a role in fixing and limiting the quartz boat 1 to prevent the quartz boat 1 from moving at will; and the distance between the limit rings 25 can be set according to the length and number of the quartz axes, so that the lifting rod 23 can lift multiple quartz boats 1, and the scope of use is wider.

[0079] Specifically, a limit block is installed on the lifting rod 23 to limit and adjust the position of the quartz boat 1 on the lifting rod 23. Preferably, the limit ring 25 can be removed and installed on the lifting rod 23. The limit ring 25 is in the shape of two semicircular arcs, and the two semicircular arcs are locked and clamped on the lifting rod 23 by screws. Of course, the lifting rod 23 and the limit ring 25 can also be fixed by other fixing structures, which is not further limited in this application. At the same time, the handling device 2 also includes a protective shell, which is installed on the top of the drive assembly 24 to prevent damage to the drive assembly 24 and improve the durability of the handling device 2.

[0080] Further, refer to Figures 6 to 8 The present invention provides a cache device 3, which includes at least one layer of cache racks 31. The cache racks 31 are suitable for placing the quartz boat 1 in any of the above embodiments. The cache racks 31 include support arms 312 and support rods 311. A pair of support arms 312 are arranged at both ends of the first direction 101 of the quartz boat 1, and a pair of support rods 311 are arranged at intervals along the second direction 102 of the quartz boat 1, and the two ends of the pair of support rods 311 are respectively connected to a pair of support arms 312, and the support rods 311 are suitable for abutting against the placement portion 125 of the quartz boat 1.

[0081] In this embodiment, the quartz boat 1 is suitable for being placed on a pair of support rods 311 of the cache rack 31, and the placement of the quartz boat 1 is more convenient and quick. Specifically, the cache device 3 can be set as a single-layer cache rack 31 or a multi-layer cache rack 31 according to the equipment capacity. Each layer of the cache rack 31 uses two support rods 311 as support for the quartz boat 1. The support rods 311 are generally made of stainless steel with an outer diameter of 25-35mm and a wall thickness of 2-4mm. Both ends of each support rod 311 are fixedly connected to the support arm 312 through a locking member 313. The locking member 313 includes but is not limited to screws, pressure blocks, pins, etc., as long as the support rod 311 can be fixedly connected to the support arm 312. The support arm 312 is fixed to the frame at intervals through a connecting member. A limit block is also installed on the support rod 311, which can be used to limit and adjust the position of multiple quartz boats 1. The limit block can also be detachably installed on the support rod 311. Photoelectric sensors 314 are installed at both ends of the buffer rack 31 to detect the state of the quartz boat 1 on the buffer rack 31. A protective shell is installed outside the photoelectric sensor 314 to play a protective and heat-insulating role.

[0082] Furthermore, the present invention provides a method for transporting a quartz boat 1, comprising using a moving mechanism 21 to move a gripping mechanism 22 of a transport device 2 to the top of the quartz boat 1 and then drop it; using a driving component 24 to move a lifting rod 23 of the gripping mechanism 22 to below a gripping portion 121 on both sides of the quartz boat 1 in the second direction 102; then using the moving mechanism 21 to lift the quartz boat 1 and place it on a cache device 3; and then using the driving component 24 to drive the lifting rod 23 of the gripping mechanism 22 to move in the opposite direction and leave the gripping portion 121 on both sides of the quartz boat 1 in the second direction 102.

[0083] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred embodiments of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A quartz boat, characterized in that: It includes a plurality of connecting rods and a pair of bearing plates; The quartz boat has a first direction and a second direction, a plurality of connecting rods connect a pair of the supporting plates along the first direction, the supporting plates are respectively provided with a grabbing portion on both sides of the second direction, and the handling equipment is suitable for grabbing the grabbing portions on both sides of the quartz boat in the second direction and lifting the quartz boat.

2. A quartz boat according to claim 1, characterized in that: The carrying plate is disposed at two ends of the plurality of connecting rods in the first direction, and a pair of the grabbing portions are disposed at two sides of the carrying plate in the second direction; An abutment wall is provided at the bottom of the grabbing portion, and the abutment wall is suitable for matching and abutting with a lifting rod of a handling device.

3. A quartz boat according to claim 2, characterized in that: The abutting wall is in an arc shape; The carrying plate is further provided with guide walls on both sides of the second direction, the guide walls are arranged below the grabbing portion, the curvature of the guide walls is connected to the end of the abutting wall, and the lifting rod of the transporting equipment is suitable for reaching the abutting wall of the grabbing portion along the guide walls.

4. A quartz boat according to claim 3, characterized in that: The supporting plate is also provided with a first avoidance wall on both sides of the second direction, the first avoidance wall is arranged below the guide wall, the first avoidance wall is connected to the end of the guide wall, and the distance between the first avoidance wall and the center of the abutment wall is greater than the distance between the center of the lifting rod of the conveying equipment and the center of the abutment wall.

5. A quartz boat according to claim 4, characterized in that: The bearing plate is further provided with second avoidance walls on both sides of the second direction, the second avoidance walls are arranged at the top and / or bottom of both sides of the bearing plate in the second direction, and the second avoidance walls are suitable for avoiding pipelines; And / or, the bottom of the carrier plate is further provided with a pair of placement portions spaced apart along the second direction, and the placement portions are suitable for being placed on the cache rack.

6. A handling device, characterized in that: The transport device is suitable for grabbing at least two ends of the quartz boat in the second direction according to any one of claims 1 to 5, the transport device comprises a moving mechanism and a grabbing mechanism, the moving mechanism is arranged at two ends of the quartz boat in the first direction and the moving mechanism is suitable for driving the grabbing mechanism to move, the grabbing mechanism comprises a pair of lifting rods and a driving assembly, the lifting rods are arranged along the first direction of the quartz boat and the lifting rods match the abutting wall at the bottom of the grabbing portion; The driving assembly is suitable for driving a pair of lifting rods to move closer to or farther from each other and respectively reach below a pair of gripping parts of the quartz boat.

7. A handling device according to claim 6, characterized in that: The driving assembly includes a driving member and a pair of transmission mechanisms, wherein the pair of transmission mechanisms are arranged at both ends of the quartz boat in the first direction and connect a pair of lifting rods and the driving member, and the driving member is suitable for driving the pair of lifting rods to rotate and reach below the grabbing part through the transmission mechanism.

8. A handling device according to claim 7, characterized in that: The transmission mechanism includes a pair of rotating components, which are arranged at the two ends of the second direction of the quartz boat and are respectively connected to the lifting rod and the driving member. The rotating components include a locking block, a connecting block, a first rotating member, a second rotating member and a mounting plate. The locking block is suitable for fixedly connecting one end of the lifting rod, the locking block is fixedly connected to the connecting block, one end of the connecting block is rotatably connected to the mounting plate via the first rotating member, the driving component is rotatably connected to the other end of the connecting block via the second rotating member, and the driving member is suitable for driving the connecting block to rotate around the first rotating member, thereby driving the locking block and the lifting rod to rotate.

9. A handling device according to claim 8, characterized in that: The transmission mechanism also includes a synchronization component, which includes a third transmission member and a pair of fixed blocks, the driving member is installed between the pair of fixed blocks, each of the fixed blocks is provided with a guide shaft, and the mounting plate is further provided with a pair of guide grooves on both sides of the second direction, the guide shaft is rotatably arranged in the guide groove through the third rotating member, the fixed block is rotatably connected to the other end of the connecting block through the second rotating member, the driving member is suitable for driving the pair of fixed blocks to approach or move away from each other along the guide groove and the pair of fixed blocks move the same distance, so that the rotation amplitude of the lifting rod is consistent; And / or, a pair of limiting rings are further provided at both ends of the lifting rod, and the limiting rings are suitable for abutting against both ends of at least one of the quartz boats in the first direction.

10. A cache device, characterized in that: The cache rack includes at least one layer of cache rack, and the cache rack is suitable for placing the quartz boat described in any one of claims 1-6. The cache rack includes a support arm and a support rod. A pair of the support arms are arranged at both ends of the quartz boat in a first direction, and a pair of the support rods are arranged at intervals along the second direction of the quartz boat and the two ends of a pair of the support rods are respectively connected to a pair of the support arms, and the support rods are suitable for abutting against the placement portion of the quartz boat.

11. A method for transporting a quartz boat, characterized in that: include: Using a moving mechanism, a gripping mechanism of a handling device is moved above the quartz boat; Use the driving assembly to move the lifting rod of the grabbing mechanism to below the grabbing parts on both sides of the quartz boat in the second direction; Then, the moving mechanism is used to lift the quartz boat and place it on the cache device; The driving assembly is then used to drive the lifting rod of the grabbing mechanism to move in the opposite direction and leave the grabbing parts on both sides of the quartz boat in the second direction.

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