Rotary target material powder loading device and powder loading method

Abstract

The invention relates to the technical field of density measurement, and discloses a rotary target material powder loading device and method.The powder loading device is used for loading powder into a target material mold and comprises a rack and a turnover tank, the turnover tank is used for containing target material powder, an iron remover is movably arranged in the middle of the rack, and a powder loading pipe is arranged at a discharging port of the iron remover; a mold sealing cover is arranged at the other end of the powder containing pipe and used for sealing an opening of the target mold, a lifting mechanism is arranged on one side of the rack and used for lifting the turnover tank, so that the turnover tank is connected with a feeding port of the iron remover, and communication between the turnover tank and the target mold is achieved. The powder loading process is simple, and the powder loading efficiency is effectively improved. In the powder filling process, the situation that powder flies is avoided, waste of the powder is avoided, workers are prevented from inhaling the powder, and therefore the safety of the workers is effectively guaranteed. And the purity of powder entering the target material mold can be effectively ensured, so that the purity and the qualified rate of target material products are effectively ensured.

Description

Technical Field

[0001] The invention relates to the technical field of target materials, and in particular to a rotating target material powder loading device and a powder loading method. Background Art

[0002] Indium oxide target (ITO target) is an electronic ceramic material, mainly used for magnetron sputtering ITO film. In its molding process, the mold powder loading process is a key step to ensure the external dimensions, density and quality of the rotating target.

[0003] However, the existing method of loading powder into the rotary target mold is to manually use a stainless steel ice shovel to shovel the material from the material bucket, and then pour the powder into the rotary target mold. However, since the current development direction of rotary targets is large-scale, the mold height is basically close to the height of personnel, which makes manual loading more and more difficult. In addition, since this process is completely open, a large amount of dust will fly during the powder loading process, which not only causes powder waste, but also poses a risk of inhalation to personnel, posing a safety hazard. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a rotary target material powder loading device and a powder loading method, which simplify the powder loading operation, improve the powder loading efficiency, avoid powder waste, and ensure personnel safety.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A rotating target material powder loading device is used to load powder into a target material mold, comprising a frame and a turnover tank, wherein the turnover tank is used to hold target material powder, an iron remover is movably provided in the middle of the frame, a powder loading pipe is provided at the discharge port of the iron remover, a mold cover is provided at the other end of the powder loading pipe, and the mold cover is used to seal the opening of the target material mold, a lifting mechanism is provided on one side of the frame, and the lifting mechanism is used to lift the turnover tank so that the turnover tank is connected to the feed port of the iron remover, thereby realizing communication between the turnover tank and the target material mold.

[0007] Preferably, two slide rails are arranged opposite to each other on the frame, a slide frame is slidably connected between the two slide rails, and the iron remover is arranged on the slide frame.

[0008] Preferably, a movable joint is provided on the sliding frame, the iron remover is connected to the movable joint, and the turnover tank is connected to the feed port of the iron remover via the movable joint.

[0009] Preferably, the movable joint includes a spring, a fixed plate and a connecting tube, the fixed plate is fixedly mounted on the sliding frame, a first feeding hole is provided in the middle of the fixed plate, a plurality of guide pillars are provided at the edge of the fixed plate, a movable plate is movably connected up and down between the plurality of guide pillars, a second feeding hole is provided in the middle of the movable plate, one end of the connecting tube is connected to the second feeding hole, the other end of the connecting tube passes through the first feeding hole and is connected to the feed port of the iron remover, the spring is sleeved on the guide pillar, and its two ends are respectively abutted against the fixed plate and the movable plate.

[0010] Preferably, the lifting mechanism includes a power piece and a sliding rod extending along the height direction of the frame, a sliding seat is slidably connected to the sliding rod, a fork arm for connecting the turnover tank is provided on the sliding seat, and the power piece is connected to the sliding seat to drive the sliding seat to slide up and down along the sliding rod.

[0011] Preferably, the turnover tank includes a mounting frame, on which a tank body and a connecting piece for connecting to the lifting mechanism are provided, a discharge pipe is provided at the bottom of the tank body, and the discharge pipe is connected to the feed port of the iron remover to achieve communication between the turnover tank and the target material mold, and a roller is provided at the bottom of the mounting frame.

[0012] Preferably, the tank body comprises a tank body main body and a cover body arranged on the tank body main body, the cover body is provided with a loading port and a breathing valve, the loading port is detachably provided with an end cover, the tank body is provided with a vibrator, and the discharge pipe is provided with a valve.

[0013] Preferably, it comprises a scale body, the valve is an electronic valve, the scale body is electrically connected to the valve, and the target material mold is supported on the scale body when powder is loaded.

[0014] Preferably, a screen is provided inside the mold cover, and when the mold cover is connected to the target mold, the screen is located between the target mold and the powder loading tube.

[0015] A method for loading powder into a rotating target comprises the following steps:

[0016] Push the turnover tank to the lifting mechanism and connect it to its fork arm;

[0017] The lifting mechanism drives the turnover tank to rise to the specified position and moves the iron remover to the bottom of the turnover tank;

[0018] The lifting mechanism descends to connect the turnover tank with the movable joint on the iron remover;

[0019] Hoist the target mold onto the scale body, and sleeve the mold cover onto the target mold;

[0020] The control valve is opened to load powder into the target mold;

[0021] When the powder loading amount displayed on the scale reaches the set value, the valve closes.

[0022] Compared with the prior art, the rotary target material powder loading device and powder loading method of the embodiment of the present invention have the following beneficial effects: by setting a lifting mechanism for lifting the turnover tank on one side of the frame, the turnover tank filled with powder is directly pushed to the lifting mechanism during powder loading, and the connection with the iron remover is achieved under the action of the lifting mechanism, and then the mold cover is sleeved on the target material mold, so that the target material mold can be loaded with powder, and the powder loading process is simple, thereby effectively improving the powder loading efficiency. At the same time, since the opening of the target material mold is sleeved with the mold cover during the powder loading process, the powder will not fly during the powder loading process, which not only avoids the waste of powder, but also avoids the inhalation of powder by personnel, thereby effectively ensuring the safety of personnel.

[0023] In addition, by setting up an iron remover to connect the turnover tank and the target material mold, the purity of the powder entering the target material mold can be effectively guaranteed, thereby effectively ensuring the purity and qualified rate of the target material product. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic structural diagram of the rotating target powder loading device of the present invention.

[0025] Figure 2 It is a cross-sectional view of the rotary target powder loading device of the present invention.

[0026] Figure 3 It is a schematic diagram of the connection between the movable joint of the rotary target material powder loading device and the iron remover of the present invention.

[0027] Figure 4 It is a schematic structural diagram of the turnover tank of the rotary target powder loading device of the present invention.

[0028] Among them: 1-frame, 11-slide rail, 12-slide rack;

[0029] 2- turnover tank, 21- mounting frame, 22- connecting piece, 23- tank body, 24- roller, 25- breathing valve, 26- vibrator, 27- electronic valve, 28- end cover;

[0030] 3-Iron remover;

[0031] 4-Powder tube;

[0032] 5- Mould sealing;

[0033] 6-lifting mechanism, 61-power member, 62-sliding rod, 63-fork arm;

[0034] 7-movable joint, 71-spring, 72-fixed plate, 73-connecting pipe, 74-guide column, 75-movable plate, 76-sealing ring;

[0035] 8- scale body;

[0036] 9-Sieve;

[0037] 100-Target mold. DETAILED DESCRIPTION

[0038] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0039] like Figure 1-2 As shown, a rotating target material powder loading device according to an embodiment of the present invention is used to load powder to a target material mold 100, including a frame 1 and a turnover tank 2. The turnover tank 2 is used to hold target material powder. An iron remover 3 is movably provided in the middle of the frame 1 to remove ferromagnetic impurities in the powder. A powder loading pipe 4 is provided at the discharge port of the iron remover 3, and a mold cover 5 is provided at the other end of the powder loading pipe 4. The mold cover 5 is used to cover the opening of the target material mold 100. Preferably, the powder loading pipe 4 is a hose to facilitate the connection of the mold cover 5 to the target material mold 100. A lifting mechanism 6 is provided on one side of the frame 1, and the lifting mechanism 6 is used to lift the turnover tank 2 so that the turnover tank 2 is connected to the feed port of the iron remover 3 to achieve communication between the turnover tank 2 and the target material mold 100.

[0040] The rotating target material powder loading device based on the above characteristics is provided with a lifting mechanism 6 for lifting the turnover tank 2 on one side of the frame 1. When loading powder, the turnover tank 2 filled with powder is directly pushed to the lifting mechanism 6, and the connection with the iron remover 3 is achieved under the action of the lifting mechanism 6. Then, the mold cover 5 is sleeved on the target material mold 100, and the target material mold 100 can be loaded with powder. The powder loading process is simple, thereby effectively improving the powder loading efficiency. At the same time, since the opening of the target material mold 100 is sleeved with the mold cover 5 during the powder loading process, the powder will not fly during the powder loading process, which not only avoids the waste of powder, but also avoids the inhalation of powder by personnel, thereby effectively ensuring the safety of personnel.

[0041] In addition, by providing an iron remover 3 to connect the turnover tank 2 and the target mold 100, the purity of the powder entering the target mold 100 can be effectively guaranteed, thereby effectively ensuring the purity and qualified rate of the target product.

[0042] In this embodiment, during the powder filling process, the turnover tank 2 needs to be driven by the lifting mechanism 6 to lift and lower, and generally speaking, the turnover tank 2 is directly connected to the lifting mechanism 6 from the ground, and during the powder filling process, the turnover tank 2 needs to be above the iron remover 3, so the turnover tank 2 needs to pass the height where the iron remover 3 is located during the lifting process. Therefore, in order to avoid the iron remover 3 interfering with the lifting and lowering of the turnover tank 2, the turnover tank 2 needs to be able to move laterally. When the turnover tank 2 needs to be lifted, the turnover tank 2 moves toward the side away from the lifting mechanism 6. After the turnover tank 2 passes, the iron remover 3 is reset. To facilitate the movement of the turnover tank 2, two slide rails 11 are relatively arranged on the frame 1, and a sliding frame 12 is slidably connected between the two slide rails 11. Preferably, sliders are provided at both ends of the sliding frame 12, and the sliders are slidably connected to the slide rails 11, and the iron remover 3 is arranged on the sliding frame 12. When the iron remover 3 needs to be moved, it is only necessary to drive the sliding frame 12 to move along the slide rails 11. The sliding frame 12 can be connected to a driving mechanism to realize automatic control of the movement of the sliding frame 12, or the sliding frame 12 can be moved manually.

[0043] Please refer to the attached Figure 3 , since the turnover tank 2 and the iron remover 3 need to be temporarily connected, in order to ensure the connection accuracy and sealing, a movable joint 7 is also provided on the sliding frame 12, and the iron remover 3 is connected to the movable joint 7, and the turnover tank 2 is connected to the feed port of the iron remover 3 through the movable joint 7. Specifically, the movable joint 7 includes a spring 71, a fixed plate 72 and a connecting pipe 73, the fixed plate 72 is fixed on the sliding frame 12, a first feed hole is provided in the middle of the fixed plate 72, a plurality of guide pillars 74 are provided on the edge of the fixed plate 72, and a movable plate 75 is connected between the plurality of guide pillars 74 so as to be movable up and down, a second feed hole is provided in the middle of the movable plate 75, one end of the connecting pipe is connected to the second feed hole, and the other end of the connecting pipe passes through the first feed hole to connect to the feed port of the iron remover 3, the spring 71 is sleeved on the guide pillar 74, and its two ends are respectively abutted against the fixed plate 72 and the movable plate 75. When the turnover tank 2 is connected to the movable joint 7, the lifting mechanism 6 drives the turnover tank 2 to descend, the discharge port of the turnover tank 2 is connected to the second feeding hole, and the movable plate 75 is slightly pressed down to make the spring 71 in a compressed state, so that the movable plate 75 is in contact with the edge of the discharge port of the turnover tank 2. Under the action of the reset force of the spring 71, the movable plate 75 fits tightly with the outer wall of the turnover tank 2 to ensure the sealing. At the same time, in order to further ensure the sealing between the movable joint 7 and the turnover tank 2, a sealing ring 76 can be set on the upper surface of the movable plate 75 corresponding to the second feeding hole, that is, when the movable joint 7 is connected to the turnover tank 2, the sealing ring 76 is in contact with the outer wall of the turnover tank 2, further ensuring the sealing, thereby avoiding the flying of powder during the powder filling process and avoiding the waste of powder.

[0044] In addition, under the action of the sealing ring 76 and the spring 71, it can be ensured that even if there is a certain position deviation between the turnover tank 2 and the movable joint 7, a completely sealed connection can be achieved without manual docking. Of course, in order to ensure the connection accuracy, a photoelectric switch can be set for detection, and the lifting mechanism 6 can also be set with a travel switch to ensure the position accuracy of its movement.

[0045] Please refer to the attached Figure 1 , 2 In this embodiment, the lifting mechanism 6 includes a power member 61, a slide bar 62 extending along the height direction of the frame 1, a slide seat is slidably connected to the slide bar 62, and a fork arm 63 for connecting the turnover tank 2 is provided on the slide seat. The power member 61 is connected to the slide seat and is used to drive the slide seat to slide up and down along the slide bar 62. The power member 61 can be a hydraulic cylinder, a motor, etc., and can be directly connected to the slider, or can be connected through a chain, a gear, etc. The turnover tank 2 includes a mounting frame 21, and the mounting frame 21 is provided with a tank body 23 and a connecting member 22 for connecting with the lifting mechanism 6. Preferably, the connecting member 22 is an L-shaped connecting rod, and the connecting rod is connected to the mounting frame 21 to form a connecting hole. The fork arm 63 can be directly inserted into the connecting hole to form a connection. Preferably, two fork arms 63 are respectively arranged at the two ends of the slide seat, so that the two ends of the mounting frame 21 can be connected. During the lifting process of the turnover tank 2, the force balance of the turnover tank 2 is ensured, thereby ensuring the stability of its lifting. A discharge pipe is provided at the bottom of the tank body 23, and the discharge pipe is connected to the second connection hole of the movable joint 7 to achieve communication between the turnover tank 2 and the target mold 100. At the same time, since the turnover tank 2 needs to be loaded, it needs to be moved to the lifting mechanism 6 after loading, so the turnover tank 2 needs to be moved frequently. To facilitate movement, a roller 24 is provided at the bottom of the mounting frame 21.

[0046] Please refer to the attached Figure 4 In this embodiment, the tank body 23 includes a tank body main body and a cover body covered on the tank body main body, the cover body is provided with a loading port and a breathing valve 25, and the loading port is detachably provided with an end cover 28. When the tank body main body needs to be loaded, the end cover 28 is opened, and the end cover 28 can be covered after the loading is completed. Since the loading port is relatively small, loading through it can avoid flying materials, waste of powder, and inhalation by people. When it is necessary to clean the inside of the tank body main body, the cover body can be opened to facilitate cleaning of the inside, and the cover body can be covered after the cleaning is completed. At the same time, in order to ensure that the powder in the tank body 23 flows out smoothly when the target material mold 100 is loaded with powder, a vibrator 26 is provided on the tank body main body. Under the action of the vibrator 26 and the breathing valve 25, the powder can flow out smoothly.

[0047] Please refer to the attached Figure 1 , 2In this embodiment, in order to facilitate the precise control of the powder loading amount, an electronic valve 27 is provided on the discharge pipe, and a scale body 8 is also provided. The scale body 8 can be an electronic scale, which is electrically connected to the electronic valve 27. When loading powder, the target mold 100 is supported on the scale body 8. Before loading powder, the powder material to be fed can be set in advance according to the capacity of the target mold 100, and the opening and closing of the electronic valve 27 can be controlled to achieve precise feeding. Specifically, a controller can be set, and the controller connects the display screen, the scale body 8 and the electronic valve 27. By inputting the powder loading amount on the display screen, precise control can be achieved. The scale body 8 can be installed on the ground, that is, an installation groove is set on the ground, and the scale body 8 is placed in the installation groove. At the same time, the width of the installation groove is smaller than the width between the rollers 24 on both sides of the tank body 23, so as to ensure that there is no interference with the scale body 8 during the pushing process of the turnover tank 2. Guide grooves can also be set on both sides of the installation groove, and the rollers 24 move along the guide grooves.

[0048] In this embodiment, in order to ensure that the particles of the powder entering the target material mold 100 are qualified, a screen 9 is provided inside the mold cover 5. When the mold cover 5 is connected to the target material mold 100, the screen 9 is located between the target material mold 100 and the powder loading tube 4, that is, the powder must be screened by the screen 9 before loading, thereby ensuring the quality of the target material.

[0049] In summary, in the present application, the mold can be loaded with powder by opening the electronic valve 27, instead of manual loading, which improves efficiency; the powder loading process is fully sealed to avoid the introduction of impurities to contaminate the product, and at the same time, no powder will be flying, which avoids waste and inhalation by operators; the equipment is equipped with a weighing scale 8, and the feeding powder can be set in advance according to the capacity of the target mold 100 to achieve accurate feeding; the equipment is equipped with an iron remover 3, which can improve the product purity and qualified rate; the equipment is equipped with a screen 9, and only powder with qualified particle size can be loaded into the mold; the lifting mechanism 6 is used to lift the powder in the turnover tank 2, and the powder falls naturally for loading, which is not only efficient, but also avoids the use of a vacuum loader that causes the water content of the powder to decrease.

[0050] In order to solve the above technical problems, the present application also provides a powder loading method for a rotating target, comprising the following steps:

[0051] Push the turnover tank 2 to the lifting mechanism 6 and connect it to its fork arm 63;

[0052] The lifting mechanism 6 drives the turnover tank 2 to rise to a specified position and moves the iron remover 3 to the bottom of the turnover tank 2;

[0053] The lifting mechanism 6 descends to realize the connection between the turnover tank 2 and the movable joint 7 on the iron remover 3;

[0054] Hoist the target mold 100 onto the scale body 8, and sleeve the mold cover 5 onto the target mold 100;

[0055] The control valve is opened to load powder into the target mold 100;

[0056] When the powder loading amount displayed on the scale body 8 reaches the set value, the valve is closed.

[0057] The powder loading method of the present application has a simple powder loading process, thereby improving the powder loading efficiency, and does not cause powder flying, thereby avoiding powder waste and ensuring personnel safety.

[0058] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A rotating target powder loading device, used for loading powder into a target mold, characterized in that: It includes a frame and a turnover tank, the turnover tank is used to hold target material powder, an iron remover is movably provided in the middle of the frame, the discharge port of the iron remover is provided with a powder loading pipe, the other end of the powder loading pipe is provided with a mold cover, the mold cover is used to seal the opening of the target material mold, a lifting mechanism is provided on one side of the frame, the lifting mechanism is used to lift the turnover tank so that the turnover tank is connected to the feed port of the iron remover, thereby realizing the connection between the turnover tank and the target material mold.

2. The rotating target powder loading device according to claim 1, characterized in that: Two slide rails are arranged opposite to each other on the frame, a slide frame is slidably connected between the two slide rails, and the iron remover is arranged on the slide frame.

3. The rotating target powder loading device according to claim 2, characterized in that: The sliding frame is provided with a movable joint, the iron remover is connected to the movable joint, and the turnover tank is connected to the feed port of the iron remover through the movable joint.

4. The rotating target powder loading device according to claim 3, characterized in that: The movable joint includes a spring, a fixed plate and a connecting pipe. The fixed plate is fixedly mounted on the sliding frame. A first feeding hole is provided in the middle of the fixed plate. A plurality of guide pillars are provided at the edge of the fixed plate. A movable plate is movably connected up and down between the plurality of guide pillars. A second feeding hole is provided in the middle of the movable plate. One end of the connecting pipe is connected to the second feeding hole. The other end of the connecting pipe passes through the first feeding hole and is connected to the feeding port of the iron remover. The spring is sleeved on the guide pillar, and its two ends are respectively abutted against the fixed plate and the movable plate.

5. The rotating target powder loading device according to claim 1, characterized in that: The lifting mechanism includes a power piece and a slide bar extending along the height direction of the frame. A slide seat is slidably connected to the slide bar. A fork arm for connecting the turnover tank is provided on the slide seat. The power piece is connected to the slide seat and is used to drive the slide seat to slide up and down along the slide bar.

6. The rotating target powder loading device according to any one of claims 1 to 5, characterized in that: The turnover tank includes a mounting frame, on which a tank body and a connecting piece for connecting to the lifting mechanism are provided. A discharge pipe is provided at the bottom of the tank body, and the discharge pipe is connected to the feed port of the iron remover to achieve communication between the turnover tank and the target material mold. A roller is provided at the bottom of the mounting frame.

7. The rotating target powder loading device according to claim 6, characterized in that: The tank body comprises a tank body main body and a cover body covered on the tank body main body, the cover body is provided with a charging port and a breathing valve, the charging port is detachably provided with an end cover, the tank body is provided with a vibrator, and the discharge pipe is provided with a valve.

8. The rotating target powder loading device according to claim 7, characterized in that: It comprises a scale body, the valve is an electronic valve, the scale body is electrically connected to the valve, and the target material mold is supported on the scale body when powder is loaded.

9. The rotating target powder loading device according to any one of claims 1 to 5, characterized in that: A screen is provided inside the mold cover. When the mold cover is connected to the target mold, the screen is located between the target mold and the powder loading tube.

10. A method for loading powder into a rotating target, characterized in that: The following steps are involved: Push the turnover tank to the lifting mechanism and connect it to its fork arm; The lifting mechanism drives the turnover tank to rise to the specified position and moves the iron remover to the bottom of the turnover tank; The lifting mechanism descends to connect the turnover tank with the movable joint on the iron remover; Hoist the target mold onto the scale body, and sleeve the mold cover onto the target mold; The control valve is opened to load powder into the target mold; When the powder loading amount displayed on the scale reaches the set value, the valve closes.

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