Film coating method of batch film coating equipment

Abstract

The invention relates to a coating method of batch coating equipment, which comprises the following steps: S1, a mechanical arm suspends a substrate on a roller A, two sides of the mechanical arm are respectively provided with a substrate conveying device, and the substrate conveying devices rotate in the same direction; s2, the roller A moves to a vacuum exchange cabin for vacuumizing, the vacuum exchange cabin is provided with a gate valve, the gate valve is in a closed state in the vacuumizing process, and at the moment, the mechanical arm hangs the base plate to a roller B; and S3, the central processing unit conveys the roller A in the vacuum exchange cabin to a pretreatment cabin for pretreatment, and at the moment, the roller B moves to the vacuum exchange cabin for vacuumizing. According to the film coating method of the batch film coating equipment, through close cooperation of the four cabins, different machining steps are conducted at the same time, the problems that existing equipment is low in production efficiency, low in equipment utilization rate and the like can be solved, and the product production efficiency is greatly improved on the premise that the film coating quality is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of optical coating equipment, and in particular to a coating method for batch coating equipment. Background Art

[0002] As an important component of precision optical elements, optical filters have extremely strict requirements on specific optical properties such as transmittance and refractive index. These properties are often achieved by sputtering multiple layers of coatings with different properties on a substrate.

[0003] For example, the preparation process of SiO2 layer, as a coating with a low refractive index, usually requires sputtering a thin Si film from a Si target and depositing it on a substrate. Subsequently, oxygen is introduced into different plasma source areas or the oxygen partial pressure in the area is increased to induce an oxidation reaction, thereby generating a SiO2 film. Since the reaction depth of the oxidation reaction is very shallow, only an extremely thin metal component film can be formed before contacting with the reaction gas (i.e., oxygen). This process needs to be repeated many times until the thickness of the SiO2 layer reaches the requirement.

[0004] To achieve the formation of this target film layer, the substrate can be suspended on a rapidly rotating drum or turntable and exposed to different functional areas multiple times. Repeated coating and oxidation reactions are the preferred method for manufacturing such films.

[0005] The existing coating equipment has exposed two significant drawbacks in actual application, which directly affect its overall efficiency. The primary problem is that the preparation time is too long, which includes multiple links such as loading and unloading of substrates, pretreatment, vacuuming, and preheating and debugging of coating equipment. These steps are time-consuming and cumbersome; the second is the low utilization efficiency of the equipment. Since the coating chamber is completely separated from other supporting chambers, other equipment is in standby mode during the coating process and cannot fully exert its production capacity.

[0006] Therefore, there is an urgent need for a coating method for batch coating equipment that can increase production and reduce costs. Summary of the invention

[0007] The object of the present invention is to overcome the above-mentioned shortcomings and provide a coating method for batch coating equipment which can improve the output and reduce the cost.

[0008] The object of the present invention is achieved in that:

[0009] A coating method for batch coating equipment comprises the following steps:

[0010] S1, the substrate is suspended on the roller A by a mechanical arm, wherein a substrate conveying device is respectively provided on both sides of the mechanical arm, and the substrate conveying devices rotate in the same direction;

[0011] S2, roller A moves to the vacuum exchange chamber for vacuuming, the vacuum exchange chamber is provided with a gate valve, and the gate valve is in a closed state during the vacuuming process. At this time, the robot arm has hung the substrate on roller B;

[0012] S3, the central processing unit transports the roller A in the vacuum exchange chamber to the pretreatment chamber for pretreatment, at which time the roller B moves to the vacuum exchange chamber for vacuuming, and the robot arm has hung the substrate on the roller C;

[0013] S4, the central processing unit transports the roller A in the pretreatment chamber to the first batch coating machine for coating the substrate. At this time, the central processing unit transports the roller B in the vacuum exchange chamber to the pretreatment chamber for pretreatment, and the roller C moves to the vacuum exchange chamber for vacuuming. The robot arm has hung the substrate on the roller D;

[0014] S5, when the coating time of roller A in the first batch coating machine is halfway, the central processing unit transports roller B in the pretreatment chamber to the second batch coating machine to coat the substrate, and the central processing unit transports roller C in the vacuum exchange chamber to the pretreatment chamber for pretreatment, and moves roller D to the vacuum exchange chamber for vacuuming;

[0015] S6. After the coating of roller A in the first batch coating machine is completed, roller A is transported to the vacuum exchange chamber by the central processing unit, and then moved from the vacuum exchange chamber to the robot arm, and the robot arm unloads the substrate and re-hangs a new substrate. After hanging a new substrate, roller A is moved to the vacuum exchange chamber again for vacuuming, and the unloaded substrate is transported away by the substrate conveying device. At this time, roller C in the pretreatment chamber is transported to the first batch coating machine by the central processing unit to coat the substrate, and roller D in the vacuum exchange chamber is transported to the pretreatment chamber for pretreatment by the central processing unit;

[0016] S7. After the coating of roller B in the second batch coating machine is completed, the central processing unit transports roller B to the vacuum exchange chamber, and then moves it from the vacuum exchange chamber to the robot arm, and the robot arm unloads the substrate and re-hangs a new substrate. After hanging the new substrate, roller B moves to the vacuum exchange chamber again for vacuuming, and the unloaded substrate is transported away by the substrate conveying device. At this time, the central processing unit transports roller D in the pretreatment chamber to the second batch coating machine for coating the substrate, and the central processing unit transports roller A in the vacuum exchange chamber to the pretreatment chamber for pretreatment, and repeats the above process.

[0017] Preferably, the vacuum exchange cabin is provided with two gate valves, one gate valve is located between the robot arm and the vacuum exchange cabin, and the other gate valve is located between the vacuum exchange cabin and the central processing unit.

[0018] Preferably, process separation valves are provided between the central processing unit and the first batch coating machine and the second batch coating machine.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The present invention provides a coating method for batch coating equipment. By setting two batch coating machines, a vacuum exchange chamber and a pretreatment chamber, the four chambers cooperate closely to enable different processing steps to be carried out simultaneously. This can solve the problems of low production efficiency and low equipment utilization rate of existing equipment, and greatly improve product production efficiency while ensuring coating quality.

[0021] 2. A coating method for batch coating equipment of the present invention reduces the number of gate valves used and reduces costs by setting gate valves between the vacuum exchange chamber and the robot arm and the central processing unit. Process separation valves are set between the central processing unit and the first batch coating machine and the second batch coating machine to prevent sputtering ions from crossing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of equipment distribution of a coating method for batch coating equipment of the present invention.

[0023] Among them: a robot arm 1, a substrate conveying device 2, a vacuum exchange chamber 3, a gate valve 4, a central processing unit 5, a pretreatment chamber 6, a first batch coating machine 7, a second batch coating machine 8, and a process separation valve 9. DETAILED DESCRIPTION

[0024] See also Figure 1 The present invention relates to a batch coating equipment, including at least two batch coating machines, and the batch coating machines are communicated with a central processing unit 5, the central processing unit 5 is also connected to a vacuum exchange cabin 3 and a pretreatment cabin 6, the central processing unit 5 is used to transfer the roller to each processing chamber, and the vacuum exchange cabin 3 is provided with two gate valves 4, one gate valve 4 is located between the vacuum exchange cabin 3 and the central processing unit 5, and a robot arm 1 is arranged outside the other gate valve 4, and a substrate conveying device 2 is respectively arranged on both sides of the robot arm 1, and the substrate conveying device 2 rotates in the same direction. The function of the substrate conveying device 2 on one side is to convey the uncoated substrate to the robot arm 1, and the function of the substrate conveying device 2 on the other side is to convey the coated substrate unloaded from the roller.

[0025] In order to prevent the sputtering ions from crossing, process separation valves 9 are provided between the central processing unit 5 and the first batch coating machine 7 and the second batch coating machine 8 .

[0026] There are four rollers in total in the device, namely roller A, roller B, roller C and roller D, wherein the robot arm 1 is responsible for loading the substrate onto the rollers and unloading the substrate from the rollers.

[0027] The coating method of the batch coating equipment comprises the following steps:

[0028] S1, the substrate is suspended on the roller A by the robot arm 1, wherein a substrate conveying device 2 is respectively provided on both sides of the robot arm 1;

[0029] S2, roller A moves to the vacuum exchange chamber 3 for vacuuming. The vacuum exchange chamber 3 is provided with a gate valve 4, and the gate valve 4 is in a closed state during the vacuuming process. At this time, the robot arm 1 has hung the substrate on roller B;

[0030] S3, the central processing unit 5 transports the roller A in the vacuum exchange chamber 3 to the pretreatment chamber 6 for pretreatment. At this time, the roller B moves to the vacuum exchange chamber 3 for vacuuming, and the robot arm 1 has hung the substrate on the roller C;

[0031] S4, the central processing unit 5 transports the roller A in the pretreatment chamber 6 to the first batch coating machine 7 for coating the substrate. At this time, the central processing unit 5 transports the roller B in the vacuum exchange chamber 3 to the pretreatment chamber 6 for pretreatment, and the roller C moves to the vacuum exchange chamber 3 for vacuuming. The robot arm 1 has hung the substrate on the roller D;

[0032] S5, when the coating time of roller A in the first batch coating machine 7 is halfway, the central processing unit 5 transports roller B in the pretreatment chamber 6 to the second batch coating machine 8 for coating the substrate, and the central processing unit 5 transports roller C in the vacuum exchange chamber 3 to the pretreatment chamber 6 for pretreatment, and roller D moves to the vacuum exchange chamber 3 for vacuuming;

[0033] S6, after the coating of roller A in the first batch coating machine 7 is completed, the central processing unit 5 transports roller A to the vacuum exchange cabin 3, and then moves it from the vacuum exchange cabin 3 to the robot 1, and the robot 1 unloads the substrate and re-hangs a new substrate. After hanging the new substrate, roller A moves to the vacuum exchange cabin 3 again for vacuuming, and the unloaded substrate is transported away by the substrate conveying device 2. At this time, the central processing unit 5 transports roller C in the pretreatment cabin 6 to the first batch coating machine 7 for coating the substrate, and the central processing unit 5 transports roller D in the vacuum exchange cabin 3 to the pretreatment cabin 6 for pretreatment;

[0034] S7. After the coating of roller B in the second batch coating machine 8 is completed, the central processing unit 5 transports roller B to the vacuum exchange cabin 3, and then moves it from the vacuum exchange cabin 3 to the robot 1, and the robot 1 unloads the substrate and re-hangs a new substrate. After hanging the new substrate, roller B moves to the vacuum exchange cabin 3 again for vacuuming, and the unloaded substrate is transported away by the substrate conveying device 2. At this time, the central processing unit 5 transports roller D in the pretreatment cabin 6 to the second batch coating machine 8 for coating the substrate, and the central processing unit 5 transports roller A in the vacuum exchange cabin 3 to the pretreatment cabin 6 for pretreatment, and repeats the above process.

[0035] In addition: It should be noted that the above specific implementation is only an optimization scheme of this patent. Any changes or improvements made by technicians in this field based on the above concept are within the scope of protection of this patent.

Claims

1. A coating method for batch coating equipment, characterized in that: The following steps are involved: S1. A mechanical arm (1) suspends a substrate on a roller A, wherein a substrate conveying device (2) is provided on each side of the mechanical arm (1), and the substrate conveying devices (2) rotate in the same direction; S2, the roller A moves to the vacuum exchange chamber (3) for vacuuming, the vacuum exchange chamber (3) is provided with a gate valve (4), and the gate valve (4) is in a closed state during the vacuuming process. At this time, the robot arm (1) has suspended the substrate on the roller B; S3, the central processing unit (5) transports the roller A in the vacuum exchange chamber (3) to the pretreatment chamber (6) for pretreatment. At this time, the roller B moves to the vacuum exchange chamber (3) for vacuuming, and the robot arm (1) has hung the substrate on the roller C; S4, the central processing unit (5) transports the roller A in the pretreatment chamber (6) to the first batch coating machine (7) to coat the substrate. At this time, the central processing unit (5) transports the roller B in the vacuum exchange chamber (3) to the pretreatment chamber (6) for pretreatment, and the roller C moves to the vacuum exchange chamber (3) for vacuuming. The robot arm (1) has hung the substrate on the roller D; S5, when the coating time of roller A in the first batch coating machine (7) is halfway through, the central processing unit (5) transports roller B in the pretreatment chamber (6) to the second batch coating machine (8) to coat the substrate, and the central processing unit (5) transports roller C in the vacuum exchange chamber (3) to the pretreatment chamber (6) for pretreatment, and roller D moves to the vacuum exchange chamber (3) for vacuuming; S6. After the coating of roller A in the first batch coating machine (7) is completed, the central processing unit (5) transports roller A to the vacuum exchange chamber (3), and then moves it from the vacuum exchange chamber (3) to the robot arm (1), and the robot arm (1) unloads the substrate and re-hangs a new substrate. After hanging the new substrate, roller A moves to the vacuum exchange chamber (3) again for vacuuming. The unloaded substrate is transported away by the substrate conveying device (2). At this time, the central processing unit (5) transports roller C in the pretreatment chamber (6) to the first batch coating machine (7) to coat the substrate, and the central processing unit (5) transports roller D in the vacuum exchange chamber (3) to the pretreatment chamber (6) for pretreatment; S7. After the coating of roller B in the second batch coating machine (8) is completed, the central processing unit (5) transports roller B to the vacuum exchange chamber (3), and then moves it from the vacuum exchange chamber (3) to the robot arm (1), and the robot arm (1) unloads the substrate and re-hangs a new substrate. After hanging the new substrate, roller B moves to the vacuum exchange chamber (3) again for vacuuming. The unloaded substrate is transported away by the substrate conveying device (2). At this time, the central processing unit (5) transports roller D in the pretreatment chamber (6) to the second batch coating machine (8) to coat the substrate. The central processing unit (5) transports roller A in the vacuum exchange chamber (3) to the pretreatment chamber (6) for pretreatment, and repeats the above process.

2. A coating method for batch coating equipment according to claim 1, characterized in that: The vacuum exchange chamber (3) is provided with two gate valves (4), one gate valve (4) is located between the robot arm (1) and the vacuum exchange chamber (3), and the other gate valve (4) is located between the vacuum exchange chamber (3) and the central processing unit (5).

3. A coating method for batch coating equipment according to claim 1, characterized in that: A process separation valve (9) is provided between the central processing unit (5) and the first batch coating machine (7) and the second batch coating machine (8).

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