Storage device and management system for photomask

Abstract

The embodiment of the invention provides a storage device and a management system for a photomask, and the storage device comprises a storage housing; the window is arranged on the storage shell, directly faces a first identifier coupled to the storage shell, and is configured to transmit light in a preset wavelength range, and the transmittance of the light in the preset wavelength range is greater than a first threshold value; wherein the first identifier is configured to bear photomask identifier information; and the passive display is arranged on the storage shell and is configured to display the photomask state information corresponding to the photomask identification information carried by the first identification. By adopting the scheme, automatic management of the photomask can be realized, so that the probability of photomask management errors can be reduced, and the production efficiency of an integrated circuit can be improved.

Description

Technical Field

[0001] The disclosed embodiments relate to the technical field of integrated circuit manufacturing, and more particularly to a storage device and management system for photomasks. Background Art

[0002] Masks are important tools in integrated circuit production, so they need to be managed.

[0003] The storage and transportation of masks is an important part of mask management. However, due to the limitations of existing mask storage devices, a large amount of work usually needs to be performed manually, which is not only time-consuming and labor-intensive, but also prone to errors, thus affecting the production efficiency of integrated circuits.

[0004] Therefore, how to provide a storage device for photomasks to provide a basis for automated management of photomasks has become a technical problem that those skilled in the art need to solve urgently. Summary of the invention

[0005] In view of this, the embodiments of the present disclosure provide a storage device and management system for photomasks, which can realize automated management of photomasks, thereby reducing the probability of photomask management errors and improving the production efficiency of integrated circuits.

[0006] First, an embodiment of the present disclosure provides a storage device for a photomask, comprising:

[0007] A storage housing;

[0008] A window is disposed on the storage housing and directly opposite to a first mark coupled to the storage housing, and is configured to transmit light within a preset wavelength range, and a transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first mark is configured to carry mask identification information;

[0009] The passive display is disposed in the storage housing and is configured to display the mask status information corresponding to the mask identification information carried by the first identification.

[0010] Optionally, the preset wavelength range is the visible light band.

[0011] Optionally, the preset wavelength range is a red light band.

[0012] Optionally, the viewing window is provided with a cover plate movable relative to the first mark, and the first mark is provided on the inner wall surface of the viewing window.

[0013] Optionally, the window comprises transparent plastic.

[0014] Optionally, the window comprises high-transmittance glass.

[0015] Optionally, the passive display includes an ink screen electronic tag.

[0016] The present disclosure also provides a management system for photomasks, which is communicatively coupled to a manufacturing execution system, and includes:

[0017] A storage device, comprising: a storage shell; a window, arranged on the storage shell and facing a first mark coupled to the storage shell, configured to transmit light within a preset wavelength range, and the transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first mark is configured to carry mask identification information; a passive display, arranged on the storage shell, configured to display mask status information corresponding to the mask identification information carried by the first mark;

[0018] a scanning device configured to use light within the preset wavelength range to scan the first mark through the window to obtain the mask mark information, and transmit the mask mark information to the manufacturing execution system;

[0019] A processing device is communicatively coupled to the passive display and configured to write the mask status information into the passive display after the manufacturing execution system acquires the mask status information based on the mask identification information.

[0020] Optionally, the first identifier includes a barcode.

[0021] Optionally, the preset wavelength range is a red light band.

[0022] Optionally, the scanning device comprises a barcode scanner.

[0023] By using the storage device for the mask provided by the embodiment of the present disclosure, by setting a window that can transmit light within a preset wavelength range on the storage shell, it is further possible to use the light within the preset wavelength range to scan the first mark through the window to obtain the mask identification information, so that the mask identification information can be automatically acquired. By ensuring that the transmittance of the window to the light within the preset wavelength range is greater than the first threshold, the recognition rate of the mask identification information carried by the first mark can be improved, thereby improving the efficiency of mask management. The mask status information corresponding to the mask identification information carried by the first mark is displayed by a passive display. On the one hand, the passive display can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the passive display can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of the mask status information. As can be seen from the above, the storage device described in the embodiment of the present disclosure can realize the automatic management of the mask, reduce the probability of mask management errors, improve the production efficiency of integrated circuits, and has a simple structure and low energy consumption, which is very conducive to mass production.

[0024] The management system for photomasks provided by the embodiment of the present disclosure is adopted. By setting a window that can transmit light within a preset wavelength range on the storage shell of the storage device, the scanning device further uses the light within the preset wavelength range to scan the first mark through the window to obtain the photomask identification information, and transmits the photomask identification information to the manufacturing execution system, so that the photomask identification information can be automatically acquired. By ensuring that the transmittance of the window to the light within the preset wavelength range is greater than the first threshold, the recognition rate of the photomask identification information carried by the first mark can be improved, thereby improving the efficiency of photomask management. After the manufacturing execution system obtains the photomask status information corresponding to the photomask identification information based on the photomask identification information, the processing device writes the photomask status information into the passive display, and then displays the photomask status information through the passive display. On the one hand, the passive display can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the passive display can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of the photomask status information. It can be seen from the above that the management system described in the embodiment of the present disclosure can realize the automated management of masks, reduce the probability of errors in mask management, and improve the production efficiency of integrated circuits. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0026] Figure 1 An exemplary diagram of a storage device for a photomask consistent with some embodiments of the present disclosure is shown in an embodiment of the present disclosure.

[0027] Figure 2 Another exemplary diagram of a storage device for a photomask consistent with some embodiments of the present disclosure is shown in an embodiment of the present disclosure.

[0028] Figure 3 An exemplary diagram of a management system for a photomask consistent with some embodiments of the present disclosure is shown in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned purposes, features and advantages of the present disclosure more obvious and easy to understand, the specific implementation methods of the present disclosure are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure. However, the present disclosure can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present disclosure, so the present disclosure is not limited by the specific implementation disclosed below.

[0030] As described in the background art, due to the limitations of existing mask storage devices, a large amount of work usually needs to be performed manually, which is not only time-consuming and labor-intensive, but also prone to errors, thereby affecting the production efficiency of integrated circuits.

[0031] In view of the above problems, the embodiment of the present disclosure provides a storage device for a photomask. By setting a window that can transmit light within a preset wavelength range on the storage housing, it is further possible to use the light within the preset wavelength range to scan the first mark through the window to obtain the photomask identification information, so that the photomask identification information can be automatically acquired. By ensuring that the transmittance of the window to light within the preset wavelength range is greater than the first threshold, the recognition rate of the photomask identification information carried by the first mark can be improved, thereby improving the efficiency of photomask management. The photomask status information corresponding to the photomask identification information carried by the first mark is displayed by a passive display. On the one hand, the passive display can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the passive display can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of the photomask status information. As can be seen from the above, the storage device described in the embodiment of the present disclosure can realize the automatic management of the photomask, reduce the probability of error in photomask management, improve the production efficiency of integrated circuits, and has a simple structure and low energy consumption, which is very conducive to mass production.

[0032] In order to enable those skilled in the art to better understand and implement the embodiments of the present disclosure, the embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0033] First, the present disclosure provides a storage device for a photomask, referring to Figure 1 An example diagram of a storage device for a photomask consistent with some embodiments of the present disclosure is shown, and the storage device T may include:

[0034] Storage housing T0.

[0035] In some embodiments of the present disclosure, the storage housing may be made of a static dissipative material, thereby avoiding the generation of particles due to friction and reducing pollution sources.

[0036] For example, the storage housing may be made of a conductive metal material.

[0037] As another example, the storage housing may be made of conductive polycarbonate.

[0038] It is understood that the storage housing is not specifically limited in the embodiments of the present disclosure. The above embodiments are only exemplary. In some embodiments of the present disclosure, the storage housing may be made of glass material.

[0039] The window T1 is arranged on the storage shell T0 and is opposite to the first mark T2 coupled to the storage shell T0. It is configured to transmit light within a preset wavelength range, and the transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first mark T2 is configured to carry the mask identification information.

[0040] In some embodiments of the present disclosure, the size of the window is at least consistent with the size of the first identifier.

[0041] For example, refer to Figure 1 The size of the window T1 is larger than the first mark T2, so that the window T1 can completely cover the first mark T2.

[0042] In some embodiments of the present disclosure, the window can transmit visible light. In this embodiment, light in the visible light band is used to scan the first mark through the window to obtain the mask mark information, so that the mask mark information can be automatically obtained. On the one hand, since light in the visible light band is easy to obtain and has low hardware requirements, the cost of mask management can be reduced; on the other hand, light in the visible light band is relatively safe for human eyes and can meet safety requirements.

[0043] In some embodiments of the present disclosure, the window can transmit red light. In this embodiment, light in the red light band is used to scan the first mark through the window to obtain the mask mark information. On the one hand, since the wavelength of red light is longer, the reflectivity of most surfaces is higher, which helps to improve the recognition rate of the mask mark information; on the other hand, the hardware technology of emitting red light band is mature, highly reliable, and has a long life, which is suitable for long-term continuous work and is very suitable for the mask management process with high frequency of use.

[0044] In some embodiments of the present disclosure, the transmittance of the window to light within a preset wavelength range is greater than a first threshold.

[0045] When the storage device in the embodiment of the present disclosure is used as a storage device for photomask management, the transmittance of the window to light within a preset wavelength range will affect the recognition rate of the photomask identification information carried by the first identification, thereby reducing the efficiency of photomask management. For example, after the storage device has been used for a period of time, the transmittance of the window on the storage device may decrease due to wiping, aging, and other issues, thereby affecting the efficiency of photomask management. Therefore, in order to further improve the efficiency of photomask management, it is necessary to ensure that the transmittance of the window to light within a preset wavelength range is always greater than the first threshold.

[0046] For example, the transmittance of the window may be detected regularly, and when the transmittance of the window is less than a first threshold, the window may be replaced in time to ensure that the transmittance of the window is always greater than the first threshold.

[0047] In some embodiments of the present disclosure, the size of the first threshold is set based on experimental verification. For example, an experiment can be designed to compare the information recognition rate when the window is set and when the window is not set, so as to obtain the influence of the window setting on the information recognition rate, and then the transmittance of the window corresponding to the maximum acceptable influence can be set as the first threshold. For example, the first threshold can be any value greater than or equal to 80%, such as 80%, 85%, 90%, 93%, 95% or 97%, etc.

[0048] In some embodiments of the present disclosure, the window may specifically include transparent plastic.

[0049] In some embodiments of the present disclosure, the window may specifically include high-transmittance glass.

[0050] It can be understood that the above embodiments are only for illustrative purposes. The embodiments of the present disclosure do not impose specific restrictions on the material of the window and the setting of the first threshold. Those skilled in the art can select the material of the window and design relevant experiments to set the first threshold according to the requirements for information recognition rate.

[0051] In some embodiments of the present disclosure, the first identification may be a barcode. In this embodiment, the barcode can carry a variety of information, and the barcode can be scanned by light within a preset wavelength range to obtain the mask identification information, which is not only convenient to operate, but also uses light within a preset wavelength range to scan the barcode, which is not limited by the collection environment and is flexible to operate.

[0052] In some embodiments of the present disclosure, the mask identification information may include information such as the ID information of the mask and the version information of the mask.

[0053] In some embodiments of the present disclosure, continue to refer to Figure 1The window T1 is directly opposite to the first mark T2, and the first mark T2 can be set on the inner wall surface of the storage shell T0. In this embodiment, by setting the first mark on the inner wall surface of the storage shell, the probability of the first mark being worn can be reduced. On the one hand, the recognition rate of the mask mark information carried by the first mark can be improved, and on the other hand, the service life of the first mark can be extended.

[0054] In some embodiments of the present disclosure, reference Figure 2 In another example diagram of a storage device for a photomask consistent with some embodiments of the present disclosure, the window T1 is opposite to the first mark T2, and the window T1 is provided with a cover plate T11 movable relative to the first mark T2, and the first mark T2 is provided on the inner wall surface of the window T2. In this embodiment, in the working state, the cover plate can be moved to expose the first mark, and the first mark is scanned by light within a preset wavelength range to obtain the mask mark information. After the mask mark information is collected, the cover plate can be moved to cover the first mark, so as to prevent the first mark from affecting the information recognition of the adjacent first mark.

[0055] In some embodiments of the present disclosure, the cover of the window may be sliding.

[0056] In some embodiments of the present disclosure, the cover of the window may be a flip-up type.

[0057] In some embodiments of the present disclosure, the first mark may be set on the first photomask on the top layer stored in the storage housing.

[0058] In some embodiments of the present disclosure, the first mark may be disposed on the outer wall surface of the window.

[0059] It is understandable that the embodiment of the present disclosure does not impose any specific limitation on the location of the first mark, and the above embodiment is only used as an illustrative description. As long as the first mark is scanned with light within a preset wavelength range, the mask mark information can be obtained.

[0060] The passive display T3 is disposed in the storage housing T0 and is configured to display the mask status information corresponding to the mask identification information carried by the first identification.

[0061] In some embodiments of the present disclosure, the passive display may specifically include an ink screen electronic tag. In this embodiment, an ink screen electronic tag is used to display the mask status information. On the one hand, the ink screen electronic tag can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the ink screen electronic tag can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of the mask status information corresponding to the mask identification information carried by the first identifier.

[0062] In some embodiments of the present disclosure, the mask status information may include usage information of the mask, damage condition of the mask, machine information to which the mask is bound, and the like.

[0063] In some embodiments of the present disclosure, the mask status information corresponding to the mask identification information carried by the first identifier may include usage information of the mask corresponding to the mask, damage status of the mask, and machine information bound to the mask confirmed based on the ID information of the mask.

[0064] In some embodiments of the present disclosure, the mask status information corresponding to the mask identification information carried by the first identifier may include usage information of the mask corresponding to the mask, damage to the mask, and machine information bound to the mask, based on the ID information of the mask and the version information of the mask. It is understandable that the embodiments of the present disclosure do not impose specific restrictions on the information displayed by the passive display. In some embodiments of the present disclosure, other information such as the production date, expiration date, and number of uses of the mask may also be displayed on the passive display.

[0065] By adopting the storage device described in the above embodiment, by setting a window that can transmit light within a preset wavelength range on the storage shell, it is further possible to use the light within the preset wavelength range to scan the first mark through the window to obtain the mask identification information, so that the mask identification information can be automatically acquired. By ensuring that the transmittance of the window to light within the preset wavelength range is greater than the first threshold, the recognition rate of the mask identification information carried by the first mark can be improved, thereby improving the efficiency of mask management. The mask status information corresponding to the mask identification information carried by the first mark is displayed by a passive display. On the one hand, the passive display can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the passive display can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of mask status information. It can be seen from the above that the storage device described in the embodiment of the present disclosure can realize the automatic management of masks, reduce the probability of errors in mask management, and improve the production efficiency of integrated circuits. It has a simple structure and low energy consumption, which is very conducive to mass production.

[0066] For ease of implementation, the present disclosure also provides a management system for photomasks, referring to Figure 3 An example diagram of a management system for a photomask consistent with some embodiments of the present disclosure is shown. The management system X for a photomask may include:

[0067] The storage device T comprises: a storage shell T0; a window T1, which is arranged on the storage shell T0 and is directly opposite to a first identifier T2 coupled to the storage shell T0, and is configured to transmit light within a preset wavelength range, and the transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first identifier T2 is configured to carry mask identification information; a passive display T3, which is arranged on the storage shell T0 and is configured to display mask status information corresponding to the mask identification information carried by the first identifier T2.

[0068] In some embodiments of the present disclosure, the first identification may be a barcode. In this embodiment, the barcode can carry a variety of information, and the barcode can be scanned by light within a preset wavelength range to obtain the mask identification information, which is not only convenient to operate, but also uses light within a preset wavelength range to scan the barcode, which is not limited by the collection environment and is flexible to operate.

[0069] In some embodiments of the present disclosure, the mask identification information may include information such as the ID information of the mask and the version information of the mask.

[0070] In the embodiment of the present disclosure, the storage device may be the storage device for the mask described in any of the aforementioned embodiments. The specific structure may refer to the aforementioned embodiments and will not be described again here.

[0071] In some embodiments of the present disclosure, the window can transmit visible light. In this embodiment, light in the visible light band is used to scan the first mark through the window to obtain the mask mark information, so that the mask mark information can be automatically obtained. On the one hand, since light in the visible light band is easy to obtain and has low hardware requirements, the cost of mask management can be reduced; on the other hand, light in the visible light band is relatively safe for human eyes and can meet safety requirements.

[0072] In some embodiments of the present disclosure, the window can transmit red light. In this embodiment, light in the red light band is used to scan the first mark through the window to obtain the mask mark information. On the one hand, since the wavelength of red light is longer, the reflectivity of most surfaces is higher, which helps to improve the recognition rate of the mask mark information; on the other hand, the hardware technology of emitting red light band is mature, highly reliable, and has a long life, which is suitable for long-term continuous work and is very suitable for the mask management process with high frequency of use.

[0073] The scanning device X1 is configured to use the light within the preset wavelength range to scan the first mark T2 through the window T0 to obtain the mask mark information, and transmit the mask mark information to the manufacturing execution system.

[0074] In some embodiments of the present disclosure, the scanning device may specifically include a barcode scanner.

[0075] For example, a scanner gun.

[0076] The processing device X2 is communicatively coupled to the passive display T3 and is configured to write the mask status information into the passive display T0 after the manufacturing execution system acquires the mask status information based on the mask identification information.

[0077] In some embodiments of the present disclosure, the passive display may specifically include an ink screen electronic tag. In this embodiment, the ink screen electronic tag is used to display the mask status information corresponding to the mask identification information carried by the first identifier. On the one hand, the ink screen electronic tag can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the ink screen electronic tag can not only automatically write information, but also be updated in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption.

[0078] In some embodiments of the present disclosure, the processing device may include at least one of an integrated circuit with a processing function, a processor, etc. For example, the processor may be a central processing unit (CPU), a microprocessor, or a field programmable gate array (FPGA), etc.

[0079] In some embodiments of the present disclosure, the mask status information may include usage information of the mask, damage condition of the mask, machine information to which the mask is bound, and the like.

[0080] It is understandable that the information displayed by the passive display is not specifically limited in the embodiments of the present disclosure. In some embodiments of the present disclosure, the passive display may also display other information such as the production date, expiration date, and number of times the mask is used.

[0081] The management system described in the above embodiment is adopted, by setting a window that can transmit light within a preset wavelength range on the storage shell of the storage device, further using the light within the preset wavelength range through the scanning device, scanning the first mark through the window to obtain the mask identification information, and transmitting the mask identification information to the manufacturing execution system, so that the mask identification information can be automatically acquired. By ensuring that the transmittance of the window to the light within the preset wavelength range is greater than the first threshold, the recognition rate of the mask identification information carried by the first mark can be improved, thereby improving the efficiency of mask management. After the manufacturing execution system obtains the mask status information corresponding to the mask identification information based on the mask identification information, the processing device writes the mask status information into the passive display, and then displays the mask status information through the passive display. On the one hand, the passive display can be used and maintained wirelessly, which is conducive to simplifying the structure of the storage device; on the other hand, the passive display can not only automatically write information, but also update it in real time, is compatible with various manufacturing execution systems, and has extremely low energy consumption, so it can realize the automatic display of the mask status information. It can be seen from the above that the management system described in the embodiment of the present disclosure can realize the automated management of masks, reduce the probability of errors in mask management, and improve the production efficiency of integrated circuits.

[0082] The terms "or" and "and / or" in the present disclosure are used to describe the relationship between associated objects, which represents non-exclusive inclusion. For example, "A and / or B" and "A or B" may include: "A alone", "B alone", or "A and B", where "A" and "B" may include a single object or multiple objects. For another example, "A, B and / or C", "A, B or C" and "A, B and C" may include: "A alone", "B alone", "C alone", "A and B", "A and C", "B and C", or "A, B and C", where "A", "B" and "C" may include a single object or multiple objects. In addition, " / " in the present disclosure is used to represent the "or" relationship between the associated objects before and after. In the present disclosure, "at least one of A or B" and "one or more of A and B" have the same meaning as the above "A or B", and "one or more of A, B and C" and "at least one of A, B or C" have the same meaning as the above "A, B or C". "One or more of A, B and C" has the same meaning as the above "A, B or C".

[0083] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments. In addition, the above embodiments can be freely combined as needed. Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure.

Claims

1. A storage device for a photomask, characterized in that: include: A storage housing; A window is disposed on the storage housing and directly opposite to a first mark coupled to the storage housing, and is configured to transmit light within a preset wavelength range, and a transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first mark is configured to carry mask identification information; The passive display is disposed in the storage housing and is configured to display the mask status information corresponding to the mask identification information carried by the first identification.

2. The storage device according to claim 1, characterized in that The preset wavelength range is the visible light band.

3. The storage device according to claim 2, characterized in that: The preset wavelength range is the red light band.

4. The storage device according to claim 3, characterized in that: The viewing window is provided with a cover plate movable relative to the first mark, and the first mark is arranged on the inner wall surface of the viewing window.

5. The storage device according to claim 4, characterized in that: The viewing window comprises transparent plastic.

6. The storage device according to claim 4, characterized in that: The viewing window comprises high-transmittance glass.

7. The storage device according to claim 1, characterized in that: The passive display includes an ink screen electronic tag.

8. A management system for photomasks, communicatively coupled to a manufacturing execution system, characterized in that: include: A storage device, comprising: a storage shell; a window, arranged on the storage shell and facing a first mark coupled to the storage shell, configured to transmit light within a preset wavelength range, and the transmittance of the light within the preset wavelength range is greater than a first threshold; wherein the first mark is configured to carry mask identification information; a passive display, arranged on the storage shell, configured to display mask status information corresponding to the mask identification information carried by the first mark; a scanning device configured to use light within the preset wavelength range to scan the first mark through the window to obtain the mask mark information, and transmit the mask mark information to the manufacturing execution system; A processing device is communicatively coupled to the passive display and configured to write the mask status information into the passive display after the manufacturing execution system acquires the mask status information based on the mask identification information.

9. The management system according to claim 8, characterized in that: The first identifier includes a barcode.

10. The management system according to claim 9, characterized in that: The preset wavelength range is the red light band.

11. The management system according to claim 10, characterized in that: The scanning device includes a barcode scanner.

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