Semiconductor target material detection device and detection method thereof

Abstract

The invention belongs to the field of target material production, particularly relates to a semiconductor target material detection device and a detection method thereof, and aims to solve the problems that only one type can be detected at one time, the detection efficiency is low, the target material is easy to damage due to frequent clamping operation and the use is not convenient enough in the conventional detection mode adopting detection tools such as a micrometer and a vernier caliper. According to the technical scheme, the device comprises a workbench and a target material, a rotating disc for bearing the target material is rotationally arranged at the top of the workbench, four telescopic rods are arranged on the outer wall of the rotating disc in a sliding mode, and a motor, a first electric push rod, a second electric push rod and other driving components and a first contact switch, a second contact switch and other detection elements are integrated; and efficient and automatic detection of the semiconductor target material is realized. Through unified control of the controller, multiple steps of positioning, rotating, outer wall detection, rectangular opening detection, through hole detection and the like of the target material can be automatically completed, and the detection efficiency and accuracy are greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of target material production, and in particular to a semiconductor target material detection device and a detection method thereof. Background Art

[0002] Metal targets, especially metal or alloy targets with relatively low melting points and strength, are prone to creep during sputtering, which affects sputtering. These targets need to be bonded to another material with high strength and low creep using a low-melting-point metal (solder or brazing material) that is easily deformed, thus making a composite target. After production, the holes, slots, and diameters need to be inspected.

[0003] Existing detection methods usually use detection instruments such as micrometers and vernier calipers, but they can only detect one type at a time, and the detection efficiency is low. In addition, there is a method of detection through detection equipment, but it still requires multiple clamping, and reciprocating clamping is easy to damage the target material, and the operation is not convenient enough. Summary of the invention

[0004] The purpose of the present invention is to solve the problems existing in the prior art of using detection instruments such as micrometers and vernier calipers for detection, but they can only detect one type at a time, the detection efficiency is low, the reciprocating clamping can easily cause damage to the target material, and the use is not convenient. A semiconductor target material detection device and a detection method are proposed.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A semiconductor target material detection device comprises a workbench and a target material, wherein a rotating disk for carrying the target material is rotatably provided on the top of the workbench, and four telescopic rods are slidably provided on the outer wall of the rotating disk, and a positioning rod is fixedly provided on the top of the telescopic rod, and a limiting bar used in conjunction with a plurality of positioning rods is slidably provided on the top of the workbench, and a first electric push rod is fixedly provided on the top of the workbench, and an output end of the first electric push rod is fixedly connected to the limiting bar, so as to drive a plurality of positioning rods to approach each other to position and clamp the target material;

[0007] A motor is fixedly provided at the bottom of the workbench, and the output end of the motor is fixedly connected to the rotating disk to drive the target material to rotate;

[0008] A support frame, the support frame is fixedly arranged on the top of the workbench, a second electric push rod is fixedly arranged on the top of the support frame, an output end of the second electric push rod passes through the bottom of the support frame and is fixedly provided with a stop cylinder for detecting the outer wall of the target material;

[0009] A connecting frame, the connecting frame is fixedly arranged at the output end of the first electric push rod, the connecting frame is movably provided with a first detection head for detecting the rectangular opening, and the top of the connecting frame is fixedly provided with a first contact switch for detecting the position of the first detection head, and is used to determine whether the rectangular opening is qualified according to the position of the first detection head;

[0010] A lifting rod, which is movably arranged on the outside of the stop cylinder and is transmission-connected with the connecting frame to drive the lifting rod to move up and down, and a second detection head for detecting the through hole is movably arranged at the output end of the lifting rod, and a second contact switch for detecting the second detection head is fixedly arranged through the bottom of the lifting rod to determine whether the through hole is qualified according to the position of the second detection head;

[0011] The controller is fixed on the top of the support frame and is connected to the motor, the first electric push rod, the second electric push rod, the first contact switch and the second contact switch through a wire.

[0012] In a possible design, a plurality of guide rails are fixedly provided on the top of the workbench, and a sliding block is provided on the outer wall sliding sleeve of the guide rail. The plurality of sliding blocks are fixedly connected to the limit bar, and the output end of the first electric push rod is fixedly connected to one of the sliding blocks. The connecting frame is fixedly provided on one of the sliding blocks, and extension parts are provided at both ends of the limit bar. The two extension parts are in an eight-shaped shape and are used to guide the positioning rod.

[0013] In a possible design, two second guide rods are slidably provided on one side of the connecting frame, and the same fixing bar is fixedly provided at one end of the two second guide rods. The fixing bar is located above the first contact switch, and a second spring is sleeved on the outer wall of the second guide rod. The two ends of the second spring are respectively fixedly connected to the fixing bar and the side of the connecting frame close to each other, and the first detection head is fixedly provided on the other side of the fixing bar.

[0014] In a possible design, a rotating shaft is rotatably provided on the inner wall of the rotating disk, a first gear is fixedly sleeved on the outer wall of the rotating shaft, a first rack meshing with the first gear is fixedly provided on one end of the telescopic rod located in the rotating disk, and is used to simultaneously drive the four telescopic rods to move relative to each other, and a torsion spring is sleeved on the outer wall of the rotating shaft, and two ends of the torsion spring are respectively fixedly connected to the bottom of the first gear and the bottom wall of the rotating disk, so as to provide reset power for the first gear.

[0015] In a possible design, the output end of the second electric push rod is rotatably sleeved with a rotating frame located at the top of the stop cylinder, the lifting rod is slidably arranged on the top of the rotating frame, a nut ring is rotatably arranged on the top of the rotating frame, the nut ring is threadedly sleeved on the outer wall of the lifting rod, the outer wall of the nut ring is fixedly sleeved with a second gear, the top of the rotating frame is slidably provided with a second rack, and the top of the connecting frame is provided with a clamping piece, and the second rack can be clamped with the connecting frame during the downward movement of the rotating frame.

[0016] In a possible design, the clamping part includes a top plate fixed on the top of the connecting frame, a positioning block is slidably provided through the top of the top plate, two third guide rods are slidably provided through the top of the positioning block, the top of the third guide rod is fixedly provided on the bottom of the top plate, the outer wall of the third guide rod is sleeved with a third spring, the two ends of the third spring are respectively fixedly connected to the top of the positioning block and the bottom end of the third guide rod to provide reset power for the positioning block, and a positioning hole is provided at the bottom of the second rack for use in conjunction with the positioning block.

[0017] In a possible design, a limit plate used in conjunction with the second gear is fixedly provided at one end of the second rack for limiting the position of the second rack, a fixed seat is fixedly provided on the top of the rotating frame, a fourth guide rod is slidably provided through one side of the fixed seat, one end of the fourth guide rod is fixedly connected to the limit plate, a fourth spring is sleeved on the outer wall of the fourth guide rod, and two ends of the fourth spring are respectively fixedly connected to one side of the fixed seat and the outer wall of the other end of the fourth guide rod to provide reset power for the second rack.

[0018] In a possible design, the top end of the second detection head is slidably disposed in a lifting rod, and a fifth spring is disposed in the lifting rod. The two ends of the fifth spring are respectively fixedly connected to the top wall of the lifting rod and the top of the second detection head to provide reset power for the second detection head.

[0019] In a possible design, a first guide rod is slidably provided through the top of the support frame, and the bottom end of the first guide rod is fixedly connected to the rotating frame to guide the rotating frame.

[0020] A detection method for a semiconductor target detection device comprises the following steps:

[0021] S1. First, place the target on the rotating disk, then start the first electric push rod to drive the limit bar to move. During the movement of the limit bar, the four telescopic rods are driven to move to clamp the target;

[0022] S2, then start the second electric push rod to drive the stop tube to move downward to detect the outer wall of the target material. If the stop tube can be completely covered on the target material, it means that the diameter of the target material is qualified, otherwise it is unqualified;

[0023] S3, restart the first electric push rod to drive the lifting rod to move downward to detect the through hole. When the second contact switch cannot detect the second detection head, the through hole is unqualified, otherwise it is qualified;

[0024] S4. Simultaneously, the first detection head is driven to move to detect the rectangular opening. When the first contact switch cannot detect the fixed strip, the rectangular opening is unqualified, otherwise it is qualified.

[0025] Beneficial effects: In the present invention, the semiconductor target material detection device can realize accurate positioning and stable clamping of the target material through the telescopic rod and the positioning rod on the rotating disk, the limit bar and the first electric push rod on the top of the workbench, and will not affect the rotation of the target material driven by the rotating disk, which not only ensures the stability of the target material during the detection process, but also improves the accuracy and reliability of the detection;

[0026] In the present invention, the semiconductor target material detection device is used to detect the rectangular opening and the through hole of the target material through the first detection head and the second detection head, respectively, and the design of the through-stop cylinder can realize all-round detection of the outer wall of the target material. This multifunctional design enables the device to meet multiple detection requirements for the target material and improves the detection efficiency;

[0027] In the present invention, the semiconductor target material detection device can detect the positions of the first detection head and the second detection head in real time through the setting of the first contact switch and the second contact switch, and intelligently determine the eligibility of the rectangular opening and the through hole according to the position information. The intelligent determination and feedback mechanism not only improves the accuracy of the detection, but also reduces the degree of manual intervention.

[0028] In the present invention, the semiconductor target material detection device realizes the lifting and lowering movement of the lifting rod by setting a rotating frame, a nut ring, a second gear and a second rack. In addition, the design of the clamping member enables the second rack to be stably clamped with the connecting frame, ensuring that the lifting rod can accurately perform the lifting and lowering operation, so that the first detection head and the second detection head can move synchronously, thereby improving the detection efficiency and reducing the use cost.

[0029] In the present invention, driving components such as a motor, a first electric push rod, a second electric push rod, and detection elements such as a first contact switch and a second contact switch are integrated to realize efficient and automated detection of semiconductor targets. Through the unified control of the controller, multiple steps such as target positioning, rotation, outer wall detection, rectangular opening detection, and through-hole detection can be automatically completed, greatly improving detection efficiency and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of the three-dimensional structure of a semiconductor target material detection device proposed by the present invention;

[0031] Figure 2 A schematic diagram of the installation structure of a limit bar of a semiconductor target material detection device proposed by the present invention;

[0032] Figure 3 This is a schematic diagram of the installation structure of a through-stop cylinder of a semiconductor target material detection device proposed by the present invention;

[0033] Figure 4 This is a schematic diagram of the installation structure of a telescopic rod and a rotating seat of a semiconductor target material detection device proposed by the present invention;

[0034] Figure 5 This is a schematic diagram of the installation structure of the first detection head of a semiconductor target material detection device proposed by the present invention;

[0035] Figure 6 This is a schematic diagram of the installation structure of a positioning block of a semiconductor target material detection device proposed by the present invention;

[0036] Figure 7 A schematic diagram of the installation structure of a lifting rod and a rotating frame of a semiconductor target material detection device proposed by the present invention;

[0037] Figure 8 for Figure 7 Another perspective structural diagram;

[0038] Fig. 9 This is a schematic structural diagram of a lifting rod and a second detection head of a semiconductor target material detection device proposed in the present invention.

[0039] In the figure: 1, workbench; 2, limit strip; 3, target; 4, first electric push rod; 5, connecting frame; 6, first detection head; 7, rectangular opening; 8, through hole; 9, support frame; 10, second electric push rod; 11, stop cylinder; 12, rotating frame; 13, lifting rod; 14, controller; 15, first guide rod; 16, sliding block; 17, guide rail; 18, rotating disk; 19, telescopic rod; 20, positioning rod; 21, extension part; 22, rotating shaft; 23, first gear; 2 4. torsion spring; 25. first rack; 26. fixing bar; 27. second guide rod; 28. second spring; 29. ​​first contact switch; 30. top plate; 31. positioning block; 32. third guide rod; 33. third spring; 34. nut ring; 35. second gear; 36. second rack; 37. limit plate; 38. fixing seat; 39. fourth guide rod; 40. fourth spring; 41. positioning hole; 42. second detection head; 43. fifth spring; 44. second contact switch. DETAILED DESCRIPTION

[0040] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0041] Example 1: Reference Figure 1 - Fig. 9 , a semiconductor target material detection device, which is used in the field of target material production, includes: a workbench 1 and a target material 3. On the top of the workbench 1, a rotating disk 18 carrying the target material 3 is rotatably arranged. Four telescopic rods 19 are slidably arranged on the outer wall of the rotating disk 18, and positioning rods 20 are fixedly arranged on the top of the four telescopic rods 19. In addition, on the top of the workbench 1, a limit bar 2 is also slidably arranged, and the limit bar 2 can be used in conjunction with a plurality of positioning rods 20. In order to drive the limit bar 2 to slide, thereby driving the plurality of positioning rods 20 to approach each other and position and clamp the target material 3, a first electric push rod 4 is fixedly arranged on the top of the workbench 1, and its output end is fixedly connected to the limit bar 2.

[0042] A motor is fixedly installed at the bottom of the workbench 1 , and the output end of the motor is fixedly connected to the rotating disk 18 , so as to drive the target material 3 to rotate.

[0043] A support frame 9 is also fixedly arranged on the top of the workbench 1, and a second electric push rod 10 is fixedly arranged on the top of the support frame 9. The output end of the second electric push rod 10 passes through the bottom of the support frame 9, and a stop cylinder 11 for detecting the outer wall of the target material 3 is fixedly arranged.

[0044] In order to detect the rectangular opening 7 on the target material 3, a connecting frame 5 is fixedly provided at the output end of the first electric push rod 4, and a first detection head 6 is movably provided on the connecting frame 5 for detecting the rectangular opening 7. A first contact switch 29 is also fixedly provided on the top of the connecting frame 5 for determining whether the rectangular opening 7 is qualified according to the position of the first detection head 6. When the rectangular opening 7 is unqualified, the first detection head 6 cannot be inserted, so that the first detection head 6 will be displaced.

[0045] On the outside of the stop tube 11, a lifting rod 13 is movably provided, and the lifting rod 13 is transmission-connected with the connecting frame 5, and can drive the lifting rod 13 to move up and down. A second detection head 42 is movably provided at the output end of the lifting rod 13, and is used to detect the through hole 8 on the target material 3. A second contact switch 44 is fixedly provided through the bottom of the lifting rod 13, and is used to determine whether the through hole 8 is qualified according to the position of the second detection head 42. When the through hole 8 is unqualified, the second detection head 42 cannot be inserted and is displaced.

[0046] In addition, a controller 14 is fixedly installed on the top of the support frame 9. The controller 14 is connected to the motor, the first electric push rod 4, the second electric push rod 10, the first contact switch 29 and the second contact switch 44 through wires to realize the control of the entire detection device. There are also three alarms inside, corresponding to the stop tube 11, the first detection head 6, and the second detection head 42, and the sounds they emit are different.

[0047] A plurality of guide rails 17 are fixedly arranged on the top of the workbench 1. Sliding blocks 16 are slidably mounted on the outer wall of the guide rails 17. The plurality of sliding blocks 16 are fixedly connected to the limit bar 2. The output end of the first electric push rod 4 is fixedly connected to one of the sliding blocks 16 to drive the limit bar 2 to slide. At the same time, the connecting frame 5 is also fixedly arranged on one of the sliding blocks 16 to achieve synchronous movement with the limit bar 2. In order to guide the positioning rod 20, an extension portion 21 in an eight-shaped shape is arranged at both ends of the limit bar 2 so that the positioning rod will not be loose when it rotates around the rotating disk 18.

[0048] On one side of the connecting frame 5, two second guide rods 27 are slidably arranged, and one end of the two second guide rods 27 is fixedly arranged with a same fixing bar 26, and the fixing bar 26 is located above the first contact switch 29. The outer wall of the second guide rod 27 is sleeved with a second spring 28, and the two ends of the second spring 28 are respectively fixedly connected to the fixing bar 26 and the side of the connecting frame 5 close to each other to provide reset power. The first detection head 6 is fixedly arranged on the other side of the fixing bar 26.

[0049] A rotating shaft 22 is rotatably arranged on the inner wall of the rotating disk 18, and a first gear 23 is fixedly sleeved on the outer wall of the rotating shaft 22. A first rack 25 meshing with the first gear 23 is fixedly arranged at one end of the telescopic rod 19 located in the rotating disk 18, so as to drive the four telescopic rods 19 to move relative to each other at the same time. In order to provide a reset power for the first gear 23, a torsion spring 24 is also sleeved on the outer wall of the rotating shaft 22, and the two ends of the torsion spring 24 are respectively fixedly connected to the bottom of the first gear 23 and the bottom wall of the rotating disk 18, which can provide a reset power for the rotating shaft 22.

[0050] A nut ring 34 is rotatably arranged on the top of the rotating frame 12, and the nut ring 34 is threadedly sleeved on the outer wall of the lifting rod 13. When the nut ring 34 rotates, it moves up and down along the thread of the lifting rod 13, thereby driving the lifting rod 13 to move up and down. In order to drive the nut ring 34 to rotate, a second rack 36 is also slidably arranged on the top of the rotating frame 12, and the second rack 36 can mesh with a second gear 35 fixedly sleeved on the outer wall of the nut ring 34.

[0051] A clamping piece is designed at the top of the connecting frame 5, which is used to enable the second rack 36 to be clamped with the connecting frame 5 when the second electric push rod 10 drives the rotating frame 12 to move downward. This clamping piece includes a top plate 30 fixedly arranged on the top of the connecting frame 5, and a positioning block 31 is slidably arranged through the top of the top plate 30. Two third guide rods 32 are also slidably arranged through the top of the positioning block 31, and the top ends of the two third guide rods 32 are fixedly arranged at the bottom of the top plate 30 to guide the positioning block 31. A third spring 33 is sleeved on the outer wall of the third guide rod 32, and the two ends of the third spring 33 are respectively fixedly connected to the top of the positioning block 31 and the bottom end of the third guide rod 32, so as to provide a reset force for the positioning block 31. When the rotating frame 12 moves downward, the bottom of the second rack 36 will resist the positioning block 31 and move downward. The second rack 36 defines a positioning hole 41 for use with the positioning block 31. During the resetting movement of the connecting frame 5, the positioning block 31 can be inserted into the positioning hole 41 under the action of the third spring 33, and a positioning hole 41 for use with the positioning block 31 is defined, so that the positioning block 31 can be inserted therein, thereby achieving snap connection.

[0052] Example 2: Reference Figure 1 - Fig. 9 , based on the improvement of Example 1: the output end of the second electric push rod 10 is rotatably sleeved with a rotating frame 12 located at the top of the stop cylinder 11. The rotating frame 12 can move up and down with the output end of the second electric push rod 10. The lifting rod 13 is slidably arranged on the top of the rotating frame 12 to realize the lifting function.

[0053] In addition, a limiting plate 37 used in conjunction with the second gear 35 is fixedly provided at one end of the second rack 36 to limit the second rack 36 and prevent it from excessive movement. A fixed seat 38 is also fixedly provided on the top of the rotating frame 12, and a fourth guide rod 39 is slidably provided through one side of the fixed seat 38, and one end of the fourth guide rod 39 is fixedly connected to the limiting plate 37. A fourth spring 40 is sleeved on the outer wall of the fourth guide rod 39, and the two ends of the fourth spring 40 are respectively fixedly connected to one side of the fixed seat 38 and the outer wall of the other end of the fourth guide rod 39, so as to provide a reset force for the second rack 36.

[0054] The design of the lifting rod 13 is also optimized. The top end of the second detection head 42 is slidably arranged in the lifting rod 13, and can slide within a certain range in the lifting rod 13. A fifth spring 43 is arranged in the lifting rod 13, and the two ends of the fifth spring 43 are respectively fixedly connected to the top wall of the lifting rod 13 and the top of the second detection head 42, so as to provide a reset force for the second detection head 42.

[0055] Finally, in order to guide the rotating frame 12, a first guide rod 15 is slidably provided through the top of the support frame 9, and the bottom end of the first guide rod 15 is fixedly connected to the rotating frame 12. When the rotating frame 12 moves up and down, the first guide rod 15 will slide along the support frame 9, thereby ensuring that the moving direction of the rotating frame 12 is always correct.

[0056] A detection method for a semiconductor target detection device comprises the following steps:

[0057] S1. First, place the target 3 on the rotating disk 18, then start the first electric push rod 4 to drive the limit bar 2 to move, and during the movement of the limit bar 2, the four telescopic rods 19 are driven to move to clamp the target 3;

[0058] S2, then start the second electric push rod 10 to drive the stop tube 11 to move downward to detect the outer wall of the target 3. If the stop tube 11 can be completely covered on the target 3, it means that the diameter of the target 3 is qualified, otherwise it is unqualified;

[0059] S3, restart the first electric push rod 4 to drive the lifting rod 13 to move downward to detect the through hole 8. When the second contact switch 44 cannot detect the second detection head 42, the through hole 8 is unqualified, otherwise it is qualified;

[0060] S4. Simultaneously, the first detection head 6 is driven to move to detect the rectangular opening 7. When the first contact switch 29 cannot detect the fixing strip 26, the rectangular opening 7 is unqualified, otherwise it is qualified.

[0061] In the present application, first, the target material 3 is placed on the rotating disk 18, and then the first electric push rod 4 is started to extend. During the extension of the first electric push rod 4, the corresponding sliding block 16 can be driven to move, and the movement of the sliding block 16 can drive the limit bar 2 to move. The movement of the limit bar 2 can drive the corresponding positioning rod 20 to move toward the rotating disk 18, thereby driving the corresponding telescopic rod 19 to slide into the rotating disk 18. During the sliding of the telescopic rod 19, the first rack 25 can be driven to move, and the movement of the first rack 25 can drive the first gear 23 to rotate. While the first gear 23 rotates, the remaining first racks 25 can be driven to move, thereby positioning and clamping the target material 3 through multiple telescopic rods 19 and positioning rods 20, and the torsion spring 24 can be compressed during the rotation of the first gear 23. When the first electric push rod 4 is retracted, , the first gear 23 can be reset and rotated under the action of the torsion spring 24, and drive the multiple telescopic rods 19 to reset and move, and release the clamped target 3. During the movement of the first electric push rod 4, the connecting frame 5 can be driven to move through the corresponding sliding block 16, and the first detection head 6 can be driven to approach the target 3. When the first detection head 6 is misaligned with the rectangular opening 7, the first detection head 6 will contact the outer edge of the target 3, and drive the fixing bar 26 to approach the connecting frame 5, while compressing the second spring 28, and then start the motor at the bottom of the workbench 1 to drive the rotating disk 18 to rotate. The rotation of the rotating disk 18 can drive the target 3 to rotate. When one of the rectangular openings 7 corresponds to the first detection head 6, the first detection head 6 can be reset and moved under the action of the second spring 28, and inserted into the corresponding rectangular opening 7 to position the target 3;

[0062] Then, the second electric push rod 10 is started to drive the stop cylinder 11 to move downward to detect the outer wall of the target material 3. When the stop cylinder 11 can be completely sleeved on the target material 3, it means that the diameter of the target material 3 is qualified. When the stop cylinder 11 is stuck on the outer wall of the target material 3, the second electric push rod 10 cannot be fully extended, and it can be judged as unqualified by the controller 14; during the extension of the second electric push rod 10, the rotating frame 12 can be driven to move downward, and the lifting rod 13 can be driven to move to the top of the through hole 8. During the downward movement of the rotating frame 12, the second rack 36 can be driven to move downward. During the process, the positioning block 31 can be abutted against and driven to move downwardly by the positioning block 31. The downward movement of the positioning block 31 can drive the third guide rod 32 to move downwardly and compress the third spring 33. Then, the first electric push rod 4 is started to retract. During the retraction of the first electric push rod 4, the corresponding sliding block 16 can be driven. The movement and reset of the sliding block 16 can drive the connecting frame 5 to move backward. The movement of the connecting frame 5 can drive the positioning block 31 to move. When the positioning block 31 corresponds to the positioning hole 41, the positioning block 31 can be reset upwardly under the action of the third spring 33 and inserted into the corresponding positioning hole 41.

[0063] Then, the first electric push rod 4 is started to extend, driving the connecting frame 5 to move so that the first detection head 6 is close to and inserted into the rectangular opening 7. At this time, the movement of the connecting frame 5 can drive the positioning block 31 to move through the top plate 30, and the movement of the positioning block 31 can drive the second rack 36 to move. The movement of the second rack 36 can drive the second gear 35 to rotate, and the rotation of the second gear 35 can drive the nut ring 34 to rotate. During the rotation of the nut ring 34, the lifting rod 13 can be driven to move downward in the rotating frame 12, thereby driving the second detection head 42 to move downward. When the second contact switch 44 cannot detect the second detection head 42, the second detection head 42 cannot be inserted into the through hole 8 at this time, and the controller 14 issues an alarm to determine that the through hole 8 is unqualified.

[0064] Then start the first electric push rod 4 to retract, drive the lifting rod 13 and the first detection head 6 to reset and move, and start the motor at the bottom of the workbench 1 to drive the target material 3 to rotate, adjust the position of the through hole 8, and continue to start the first electric push rod 4 for detection. When the first contact switch 29 cannot detect the fixed strip 26, the controller 14 sends an alarm to determine that the rectangular opening 7 is unqualified, and then detect it in sequence.

[0065] However, as is well known to those skilled in the art, the working principles and wiring methods of the first electric push rod 4, the second electric push rod 10, the controller 14, the first contact switch 29 and the second contact switch 44 are commonplace, and are conventional means or common knowledge, and will not be elaborated here. Those skilled in the art may make any optional selections according to their needs or convenience.

[0066] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A semiconductor target material detection device, characterized in that: The invention comprises a workbench (1) and a target material (3), wherein a rotating disk (18) for carrying the target material (3) is rotatably provided on the top of the workbench (1), and four telescopic rods (19) are slidably provided on the outer wall of the rotating disk (18), and a positioning rod (20) is fixedly provided on the top of the telescopic rod (19), and a limiting bar (2) for use with a plurality of positioning rods (20) is slidably provided on the top of the workbench (1), and a first electric push rod (4) is fixedly provided on the top of the workbench (1), and an output end of the first electric push rod (4) is fixedly connected to the limiting bar (2) for driving a plurality of positioning rods (20) to approach each other to position and clamp the target material (3); A motor is fixedly provided at the bottom of the workbench (1), and the output end of the motor is fixedly connected to the rotating disk (18) for driving the target material (3) to rotate; A support frame (9), the support frame (9) is fixedly arranged on the top of the workbench (1), a second electric push rod (10) is fixedly arranged on the top of the support frame (9), an output end of the second electric push rod (10) passes through the bottom of the support frame (9) and is fixedly provided with a stop cylinder (11) for detecting the outer wall of the target material (3); A connecting frame (5), the connecting frame (5) being fixedly arranged at the output end of the first electric push rod (4), the connecting frame (5) being movably provided with a first detection head (6) for detecting the rectangular opening (7), the top of the connecting frame (5) being fixedly provided with a first contact switch (29) for detecting the position of the first detection head (6), and being used for determining whether the rectangular opening (7) is qualified according to the position of the first detection head (6); A lifting rod (13), the lifting rod (13) is movably arranged on the outside of the stop cylinder (11) and is transmission-connected to the connecting frame (5) for driving the lifting rod (13) to move up and down, the output end of the lifting rod (13) is movably provided with a second detection head (42) for detecting the through hole (8), and the bottom of the lifting rod (13) is fixedly provided with a second contact switch (44) for detecting the second detection head (42) and is used to determine whether the through hole (8) is qualified according to the position of the second detection head (42); A controller (14), wherein the controller (14) is fixedly arranged on the top of the support frame (9), and the controller (14) is connected to the motor, the first electric push rod (4), the second electric push rod (10), the first contact switch (29) and the second contact switch (44) through wires.

2. A semiconductor target material detection device according to claim 1, characterized in that: A plurality of guide rails (17) are fixedly provided on the top of the workbench (1), and a sliding block (16) is slidingly sleeved on the outer wall of the guide rail (17). The plurality of sliding blocks (16) are fixedly connected to the limit bar (2). The output end of the first electric push rod (4) is fixedly connected to one of the sliding blocks (16). The connecting frame (5) is fixedly provided on one of the sliding blocks (16). Both ends of the limit bar (2) are provided with extension parts (21), and the two extension parts (21) are in an eight-shaped shape and are used to guide the positioning rod (20).

3. A semiconductor target material detection device according to claim 1, characterized in that: Two second guide rods (27) are slidably provided on one side of the connecting frame (5), one end of the two second guide rods (27) is fixedly provided with a same fixing bar (26), the fixing bar (26) is located above the first contact switch (29), the outer wall of the second guide rod (27) is sleeved with a second spring (28), the two ends of the second spring (28) are respectively fixedly connected to the fixing bar (26) and the side of the connecting frame (5) close to each other, and the first detection head (6) is fixedly provided on the other side of the fixing bar (26).

4. A semiconductor target material detection device according to claim 1, characterized in that: The inner wall of the rotating disk (18) is rotatably provided with a rotating shaft (22), the outer wall of the rotating shaft (22) is fixedly sleeved with a first gear (23), one end of the telescopic rod (19) located in the rotating disk (18) is fixedly provided with a first rack (25) meshing with the first gear (23) for simultaneously driving the four telescopic rods (19) to move relative to each other, the outer wall of the rotating shaft (22) is sleeved with a torsion spring (24), the two ends of the torsion spring (24) are respectively fixedly connected to the bottom of the first gear (23) and the bottom wall of the rotating disk (18), so as to provide a reset force for the first gear (23).

5. The semiconductor target material detection device according to claim 1, characterized in that: The output end of the second electric push rod (10) is rotatably sleeved with a rotating frame (12) located at the top of the stop cylinder (11); the lifting rod (13) penetrates and slides on the top of the rotating frame (12); a nut ring (34) is rotatably provided on the top of the rotating frame (12); the nut ring (34) is threadedly sleeved on the outer wall of the lifting rod (13); a second gear (35) is fixedly sleeved on the outer wall of the nut ring (34); a second rack (36) is slidably provided on the top of the rotating frame (12); a clamping piece is provided on the top of the connecting frame (5); and the second rack (36) can be clamped with the connecting frame (5) during the downward movement of the rotating frame (12).

6. A semiconductor target material detection device according to claim 5, characterized in that: The clamping member comprises a top plate (30) fixedly arranged on the top of the connecting frame (5); a positioning block (31) is slidably provided on the top of the top plate (30); two third guide rods (32) are slidably provided on the top of the positioning block (31); the top ends of the third guide rods (32) are fixedly arranged on the bottom of the top plate (30); a third spring (33) is sleeved on the outer wall of the third guide rod (32); two ends of the third spring (33) are respectively fixedly connected to the top of the positioning block (31) and the bottom end of the third guide rod (32) to provide a reset force for the positioning block (31); and a positioning hole (41) for use with the positioning block (31) is provided at the bottom of the second rack (36).

7. The semiconductor target material detection device according to claim 5, characterized in that: A limiting plate (37) used in conjunction with the second gear (35) is fixedly provided at one end of the second rack (36) for limiting the position of the second rack (36); a fixing seat (38) is fixedly provided at the top of the rotating frame (12); a fourth guide rod (39) is slidably provided through one side of the fixing seat (38); one end of the fourth guide rod (39) is fixedly connected to the limiting plate (37); an outer wall of the fourth guide rod (39) is sleeved with a fourth spring (40); two ends of the fourth spring (40) are respectively fixedly connected to one side of the fixing seat (38) and the outer wall of the other end of the fourth guide rod (39) to provide a reset force for the second rack (36).

8. The semiconductor target material detection device according to claim 1, characterized in that: The top end of the second detection head (42) is slidably arranged in the lifting rod (13), and a fifth spring (43) is arranged in the lifting rod (13). The two ends of the fifth spring (43) are respectively fixedly connected to the top wall of the lifting rod (13) and the top of the second detection head (42), so as to provide a reset force for the second detection head (42).

9. The semiconductor target material detection device according to claim 1, characterized in that: A first guide rod (15) is slidably provided through the top of the support frame (9), and the bottom end of the first guide rod (15) is fixedly connected to the rotating frame (12) to guide the rotating frame (12).

10. A detection method for a semiconductor target detection device according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1. First, place the target material (3) on the rotating disk (18), then start the first electric push rod (4) to drive the limit bar (2) to move, and during the movement of the limit bar (2), drive the four telescopic rods (19) to move to clamp the target material (3); S2, then starting the second electric push rod (10) to drive the stop tube (11) to move downward, and inspecting the outer wall of the target material (3). If the stop tube (11) can be completely covered on the target material (3), it means that the diameter of the target material (3) is qualified, otherwise it is unqualified; S3, restarting the first electric push rod (4) to drive the lifting rod (13) to move downward to detect the through hole (8). When the second contact switch (44) cannot detect the second detection head (42), the through hole (8) is unqualified, otherwise it is qualified; S4. Simultaneously, the first detection head (6) is driven to move to detect the rectangular opening (7). When the first contact switch (29) cannot detect the fixing strip (26), the rectangular opening (7) is unqualified, otherwise it is qualified.

Images