Full-automatic material changing structure and working method thereof

Abstract

The invention provides a full-automatic material changing structure which enables transfer of modules to be carried out through automatic operation, improves the transfer efficiency of the modules and ensures the personal safety of workers. One end of the sliding table translation module in the length direction is set as a to-be-processed product taking and placing position, and the other end of the sliding table translation module in the length direction is set as a to-be-processed product working position; the rotating platform comprises a base and a rotating output table, the rotating output table is rotationally arranged through a rotating shaft, and the rotating shaft is arranged perpendicular to the horizontal plane; the module placing mechanism comprises a die holder, at least one end face of the die holder is provided with a positioning placing mechanism, and the positioning placing mechanism is used for placing a module; the positioning rotating mechanism comprises a holding frame and a rotating driving mechanism, and the output end of the rotating driving mechanism and the module are in butt joint and then synchronously rotate and output; the invention further provides a working method of the full-automatic material changing structure.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, in particular to a fully automatic material changing structure. The present invention also provides a working method of the fully automatic material changing structure. Background Art

[0002] The existing method for transferring modules such as REEL trays, carriers, material frames, and pallets is manual. When the main equipment needs to be loaded, the REEL tray, carrier, material frame, and pallet are manually placed at the corresponding workstation, and the machine begins operation. After the operation is completed, the REEL tray, carrier, material frame, and pallet are removed and manually transported to the recycling storage location. This manual operation carries certain risks in loading and unloading, and untimely material changes can cause the main equipment to be idle.

[0003] With the progress of industrialized production, the manual loading and unloading method can no longer meet the needs of large-scale production. Therefore, it is urgent to develop a fully automatic material changing structure to improve the transfer efficiency of the modules and enhance the personal safety of workers. Summary of the Invention

[0004] In response to the above problems, the present invention provides a fully automatic material changing structure, which enables the transfer of modules to be performed through automated operations, thereby improving the transfer efficiency of modules and ensuring the personal safety of workers.

[0005] A fully automatic material changing structure, characterized in that it comprises:

[0006] The slide translation module has one end in the longitudinal direction as a pick-up and placement position for the product to be processed, and the other end in the longitudinal direction as a working position for the product to be processed;

[0007] The rotating platform includes a base and a rotating output platform, wherein the rotating output platform is rotatably arranged by a rotating shaft, and the rotating shaft is arranged perpendicular to the horizontal plane;

[0008] A module placement mechanism includes a module base, at least one end surface of the module base is provided with a positioning placement mechanism, and the positioning placement mechanism is used to place the module;

[0009] and a positioning and rotating mechanism, the positioning and rotating mechanism comprising a gripping frame and a rotating drive mechanism, wherein the output end of the rotating drive mechanism is connected to the module and rotates and outputs synchronously;

[0010] The base of the rotating platform is installed on the output end of the slide translation module, and a mold base is fixed on the rotating output table of the rotating platform. The positioning and placement mechanism under the initial position of the mold base corresponds to the pick-up and placement position of the product to be processed, and the positioning and rotating mechanism is arranged at the corresponding position of the working position of the product to be processed.

[0011] It is further characterized by:

[0012] It also includes a vertical mounting plate, the bottom and top of which are respectively fixed with a first slide translation module and a second slide translation module, and the positions of the vertical mounting plate corresponding to each group of slide translation modules are respectively provided with a through avoidance notch that imitates the shape of the module, the first slide translation module is correspondingly provided with a first rotating platform, a first module placement mechanism, and a first positioning and rotating mechanism, and the second slide translation module is correspondingly provided with a second rotating platform, a second module placement mechanism, and a second positioning and rotating mechanism, which enables the entire mechanism to have two automatic material changing stations, thereby improving production efficiency;

[0013] The two facing end surfaces of the first module placement mechanism and the second module placement mechanism are respectively provided with corresponding positioning placement mechanisms, which enable the loading operation of the module at the position where the product to be processed is placed to be completed without rotating the rotating platform during resetting, thereby saving energy and improving material replacement efficiency;

[0014] Preferably, the positioning and placement mechanism is a forward-convex positioning rod, which corresponds to the positioning hole of the module for insertion operation in the working state;

[0015] The rotation of the first rotating platform and the second rotating platform is 180° clockwise or 180° counterclockwise, which can be set according to the actual situation of the motor or the site;

[0016] The module is a REEL tray, carrier, material frame or tray, which is a carrier for placing products;

[0017] The positioning and placement mechanism is further matched with a first push block, and the positioning and rotation mechanism is matched with a second push block. Both the first push block and the second push block push the module through the front and rear telescopic mechanism to complete the axial handshake transfer action of the module.

[0018] A working method of a fully automatic material changing structure is characterized in that it comprises the following steps:

[0019] S1, a positioning and placement mechanism that places the module at the pick-up and placement position of the product to be processed;

[0020] S2, the rotating platform rotates the module placement mechanism 180°;

[0021] S3, the slide moves the module to the working position of the product to be processed;

[0022] S4. The module at the working position of the product to be processed shakes hands with the positioning and rotating mechanism and transfers. The positioning and rotating mechanism rotates with the module and starts normal operation.

[0023] S5. The slide translation module returns to its initial position, and the device interacts with the EAP to notify the placement module.

[0024] S6. The working position of the product to be processed is processed by rotating the module. The slide translation module is moved to the working position of the product to be processed and shakes hands with the module of the positioning rotation mechanism again. The empty module is placed on the positioning placement mechanism.

[0025] S7, the slide translation module returns to a safe place and rotates. The slide translation module moves the new module to the working position of the product to be processed. The new module shakes hands with the positioning rotation mechanism at the working position of the product to be processed. The positioning rotation mechanism rotates with the module and starts normal operation.

[0026] S8. The slide translation module returns to its initial position. The device interacts with the EAP to notify the recovery module and reinstall the module to be processed.

[0027] After adopting the present invention, the module with the product is positioned in the positioning and placement position of the product to be processed, the rotating platform rotates 180° through the rotating shaft, and the slide translation module drives the mold base to move to the working position of the product to be processed. The module with the product is arranged toward the surface of the positioning and rotating mechanism, and the module is transferred to the positioning and rotating mechanism. After the output end of the rotating drive mechanism is docked with the module, the synchronous rotation output is carried out to carry out product processing. After the product processing operation is completed, the module is transferred back to the positioning and placement mechanism of the module placement mechanism, the slide translation module is reset, the rotating platform rotates 180°, the module is removed from the positioning and placement mechanism of the module placement mechanism, and then a new module is placed again, and the action is cyclically repeated. It effectively solves the problems of long waiting time and low operating efficiency of existing equipment in the production process, and significantly improves the overall efficiency and utilization rate of the semiconductor production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A perspective view of a specific embodiment of the present invention;

[0029] Figure 2 A perspective view of the assembly of the first slide translation module, the first rotating platform, the first module placement mechanism, and the module according to a specific embodiment of the present invention;

[0030] The names corresponding to the serial numbers in the figure are as follows:

[0031] Slide translation module 10, first slide translation module 11, second slide translation module 12, pick-up and placement position 101 for products to be processed, working position 102 for products to be processed, rotating platform 20, first rotating platform 21, second rotating platform 22, base 201, rotating output platform 202, module placement mechanism 30, first module placement mechanism 31, second module placement mechanism 32, mold base 301, positioning placement mechanism 302, first push block 303, positioning rotation mechanism 40, first positioning rotation mechanism 41, second positioning rotation mechanism 42, holding frame 401, rotation drive mechanism 402, second push block 403, vertical mounting plate 50, through avoidance gap 51, module 60. DETAILED DESCRIPTION

[0032] A fully automatic material changing structure, see Figure 1 and Figure 2 , which includes a slide translation module 10, a rotating platform 20, a module placement mechanism 30, and a positioning rotation mechanism 40;

[0033] One end of the slide translation module 10 in the longitudinal direction is set as a position 101 for placing the product to be processed, and the other end in the longitudinal direction is set as a working position 102 for the product to be processed;

[0034] The rotating platform 20 includes a base 201 and a rotating output platform 202. The rotating output platform 202 is rotatably arranged by a rotating shaft, and the rotating shaft is arranged perpendicular to the horizontal plane.

[0035] The module placement mechanism 30 includes a module base 301 , and at least one end surface of the module base 301 is provided with a positioning and placement mechanism 302 , which is used to place the module 60 ;

[0036] The positioning and rotating mechanism 40 includes a gripping frame 401 and a rotating driving mechanism 402. The output end of the rotating driving mechanism 402 is connected to the module 60 and rotates and outputs synchronously.

[0037] The base 201 of the rotating platform 20 is installed on the output end of the slide translation module 10, and the mold base 301 is fixed on the rotating output platform 202 of the rotating platform 20. The positioning and placement mechanism 302 in the initial position of the mold base 301 corresponds to the pick-up and placement position 101 of the product to be processed, and the positioning and rotation mechanism 40 is arranged at the corresponding position of the working position 102 of the product to be processed.

[0038] In a specific embodiment, it also includes a vertical mounting plate 50, and the bottom and top of the vertical mounting plate 50 are respectively fixed with a first slide translation module 11 and a second slide translation module 12. The vertical mounting plate 50 is respectively provided with a through avoidance gap 51 that imitates the shape of the module at the position corresponding to each group of slide translation modules 10. The first slide translation module 11 is correspondingly provided with a first rotating platform 21, a first module placement mechanism 31, and a first positioning rotation mechanism 41. The second slide translation module 12 is correspondingly provided with a second rotating platform 22, a second module placement mechanism 32, and a second positioning rotation mechanism 42. The holding frames 401 of the first positioning rotation mechanism 41 and the second positioning rotation mechanism 42 are welded to the corresponding positions on the back side of the vertical mounting plate 50, which enables the entire mechanism to have two automatic material changing stations, thereby improving production efficiency.

[0039] The module 60 is specifically a REEL tray, a carrier, a material frame or a tray, which is a carrier for placing products.

[0040] When each module placement mechanism 30 has only one positioning placement mechanism 302, its working process is as follows: the module 60 with the product is positioned in the positioning placement mechanism 302 at the product pick-up and placement position 101 to be processed, the rotating platform 20 rotates 180° through the rotating shaft, and the slide translation module 10 drives the mold base 301 to move to the working position 102 of the product to be processed. The module 60 with the product is arranged toward the surface of the positioning rotation mechanism 40, and the module 60 is transferred to the positioning rotation mechanism 40. After the output end of the rotating drive mechanism is docked with the module 60, the synchronous rotation output is carried out for product processing. After the product processing operation is completed, the module 60 is transferred back to the positioning placement mechanism 302 of the module placement mechanism 30, the slide translation module 10 is reset, the rotating platform 20 rotates 180°, and the module 60 is removed from the positioning placement mechanism 302 of the module placement mechanism 30, and then a new module 60 is placed again, and the action is cyclically performed.

[0041] Preferred embodiment, see Figure 1 and Figure 2 The two facing end surfaces of the first module placement mechanism 31 and the second module placement mechanism 32 are respectively provided with corresponding positioning placement mechanisms 302, which make it possible to complete the loading operation of the module at the position where the product to be processed is placed without rotating the rotating platform 20 during resetting, thereby saving energy and improving the efficiency of material replacement;

[0042] The positioning and placement mechanism 302 is a forward-convex positioning rod, which corresponds to the positioning hole of the module 60 for insertion operation in the working state;

[0043] The first rotating platform 21 and the second rotating platform 22 rotate 180° clockwise or 180° counterclockwise, which can be set according to the actual situation of the motor or the site;

[0044] The positioning and placement mechanism 302 is further matched with a first push block 303 , and the positioning and rotation mechanism 40 is matched with a second push block 403 . Both the first push block 303 and the second push block 403 push the module 60 through the front and rear telescopic mechanism to complete the axial handshake transfer action of the module.

[0045] The first module placement mechanism 31 and the second module placement mechanism 32 are provided with corresponding positioning placement mechanisms 302 on their opposite end faces. At this time, the working method of the fully automatic material replacement structure, in which the upper and lower workstations are staggered or performed simultaneously without interference, includes the following steps:

[0046] S1, placing the module 60 on the positioning and placing mechanism 302 of the product to be processed pick-up and placement position 101;

[0047] S2, rotating the platform 20 to rotate the module placement mechanism 180°;

[0048] S3, the slide translation module 10 moves the module 60 to the working position 102 of the product to be processed;

[0049] S4, the module 60 at the work position 102 of the product to be processed shakes hands with the positioning and rotating mechanism 40 and transfers, and the positioning and rotating mechanism 40 rotates with the module and starts normal operation;

[0050] S5, the slide translation module 10 returns to the initial position, the device interacts with the EAP, and notifies the placement module 60;

[0051] S6. The work position 102 of the product to be processed is processed by the module rotation. The slide translation module 10 is moved to the work position 102 of the product to be processed and shakes hands with the module 60 of the positioning rotation mechanism 40 again. The empty module is placed on the positioning placement mechanism 302.

[0052] S7, the slide translation module 10 returns to a safe place and rotates. The slide translation module 10 transfers the new module 60 to the work position 102 of the product to be processed. The new module 60 shakes hands with the positioning and rotating mechanism 40 at the work position 102 of the product to be processed. The positioning and rotating mechanism 40 rotates with the module and starts normal operation.

[0053] S8, the slide translation mold 10 returns to the initial position, the device interacts with the EAP, notifies the recovery module 60, and reinstalls the module 60 to be processed.

[0054] It effectively solves the problems of long waiting time and low operating efficiency of existing equipment in the production process, and significantly improves the overall efficiency and utilization rate of semiconductor production lines.

[0055] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0056] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A fully automatic material changing structure, characterized in that: It includes: The slide translation module has one end in the longitudinal direction as a pick-up and placement position for the product to be processed, and the other end in the longitudinal direction as a working position for the product to be processed; The rotating platform includes a base and a rotating output platform, wherein the rotating output platform is rotatably arranged by a rotating shaft, and the rotating shaft is arranged perpendicular to the horizontal plane; A module placement mechanism includes a module base, at least one end surface of the module base is provided with a positioning placement mechanism, and the positioning placement mechanism is used to place the module; and a positioning and rotating mechanism, the positioning and rotating mechanism comprising a gripping frame and a rotating drive mechanism, wherein the output end of the rotating drive mechanism is connected to the module and rotates and outputs synchronously; The base of the rotating platform is installed on the output end of the slide translation module, and a mold base is fixed on the rotating output table of the rotating platform. The positioning and placement mechanism under the initial position of the mold base corresponds to the pick-up and placement position of the product to be processed, and the positioning and rotating mechanism is arranged at the corresponding position of the working position of the product to be processed.

2. The fully automatic material changing structure according to claim 1, characterized in that: It also includes a vertical mounting plate, the bottom and top of which are respectively fixed with a first slide translation module and a second slide translation module; the vertical mounting plate is respectively provided with a through avoidance notch that imitates the shape of the module at the position corresponding to each group of slide translation modules; the first slide translation module is correspondingly provided with a first rotating platform, a first module placement mechanism, and a first positioning and rotating mechanism; the second slide translation module is correspondingly provided with a second rotating platform, a second module placement mechanism, and a second positioning and rotating mechanism.

3. The fully automatic material changing structure according to claim 2, characterized in that: Two facing end surfaces of the first module placement mechanism and the second module placement mechanism are respectively provided with corresponding positioning placement mechanisms.

4. The fully automatic material changing structure according to claim 3, characterized in that: The positioning and placing mechanism is a forward-convex positioning rod, which corresponds to the positioning hole of the module for insertion operation in the working state.

5. The fully automatic material changing structure according to claim 2, characterized in that: The rotation of the first rotating platform and the second rotating platform is 180° clockwise or 180° counterclockwise, which can be set according to the actual situation of the motor or the site.

6. The fully automatic material changing structure according to claim 1, characterized in that: The module is a REEL tray, a carrier, a material frame or a tray, which is a carrier for placing products.

7. A fully automatic material changing structure according to claim 1 or 2, characterized in that: The positioning and placement mechanism is further matched with a first push block, and the positioning and rotation mechanism is matched with a second push block. Both the first push block and the second push block push the module through the front and rear telescopic mechanism to complete the axial handshake transfer action of the module.

8. A working method of a fully automatic material changing structure, which adopts the fully automatic material changing structure according to claim 3, characterized in that: The upper and lower workstations are staggered or work is performed simultaneously. Each workstation includes the following steps: S1, a positioning and placement mechanism that places the module at the pick-up and placement position of the product to be processed; S2, the rotating platform rotates the module placement mechanism 180°; S3, the slide moves the module to the working position of the product to be processed; S4. The module at the working position of the product to be processed shakes hands with the positioning and rotating mechanism and transfers. The positioning and rotating mechanism rotates with the module and starts normal operation. S5. The slide translation module returns to its initial position, and the device interacts with the EAP to notify the placement module. S6. The working position of the product to be processed is processed by rotating the module. The slide translation module is moved to the working position of the product to be processed and shakes hands with the module of the positioning rotation mechanism again. The empty module is placed on the positioning placement mechanism. S7, the slide translation module returns to a safe place and rotates. The slide translation module moves the new module to the working position of the product to be processed. The new module shakes hands with the positioning rotation mechanism at the working position of the product to be processed. The positioning rotation mechanism rotates with the module and starts normal operation. S8. The slide translation module returns to its initial position. The device interacts with the EAP to notify the recovery module and reinstall the module to be processed.

Images