FFU air filter and wafer processing equipment

Abstract

The utility model discloses an FFU air filter and wafer processing equipment, and relates to the technical field of wafer processing device.The FFU air filter comprises a machine shell, a cavity is formed in the machine shell, an air inlet communicated with the cavity is formed in the upper surface of the machine shell, an air outlet communicated with the cavity is formed in the lower surface of the machine shell, and an efficient filter screen is installed on the lower surface of the machine shell; the efficient filter screen covers the air outlet and is connected with the air outlet in a sealed mode, a fan in butt joint with the air inlet and a current induction switch used for detecting the power-on condition of the fan are fixedly installed in the cavity, and the fan is connected with the air inlet in a sealed mode, so that the FFU air filter can achieve uniform air supply and has the fan abnormity feedback function.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing devices, in particular to an FFU air filter and wafer processing equipment. Background Art

[0002] During the wafer processing process, FFU fan filters are used to provide clean air for the wafer process chamber. FFU fan filter, referred to as FFU, is a self-powered terminal air supply device with filtering function. It can inhale air and, after filtering, evenly deliver the clean air from the air outlet surface, thereby achieving the purpose of purifying the air.

[0003] The existing FFU does not have a fan abnormality feedback function. When the fan stops working due to an abnormality (such as a short circuit), the staff cannot be informed in time. In addition, the existing FFU has poor sealing and cannot form static pressure in the cavity, which is not conducive to uniform air output. Utility Model Content

[0004] The utility model aims to provide an FFU air filter and wafer processing equipment, which solve at least one of the problems in the prior art that the FFU does not have a fan abnormality feedback function and that the FFU has poor sealing performance.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] In the first aspect, the utility model provides an FFU air filter, comprising a casing, a cavity being provided in the casing, an air inlet connected to the cavity being provided on the upper surface of the casing, an air outlet connected to the cavity being provided on the lower surface of the casing, a high-efficiency filter being installed on the lower surface of the casing, the high-efficiency filter covering the air outlet and being sealed to the air outlet, a fan docked with the air inlet and a current sensing switch for detecting the power-on status of the fan being fixedly installed in the cavity, and the fan and the air inlet being sealed to each other.

[0007] In one embodiment of the utility model: the high-efficiency filter screen is sealed and connected to the lower surface of the casing via an airtight gasket.

[0008] In an embodiment of the utility model: the fan and the casing are sealed by a sealant.

[0009] In one embodiment of the utility model: the fan is a DC fan.

[0010] In one embodiment of the utility model: an AC power terminal and a DC transformer are fixedly installed in the cavity, a stepless speed regulator for adjusting the wind speed of the fan is fixedly installed on a side wall of the casing, the AC power terminal and the DC transformer are electrically connected through a first circuit, the DC transformer and the fan are electrically connected through a second circuit, and the stepless speed regulator is electrically connected to the second circuit.

[0011] In one embodiment of the utility model: the current sensing switch is provided with a sensing hole, and the second line between the stepless speed regulator and the fan passes through the sensing hole.

[0012] In one embodiment of the utility model: a fuse electrically connected to the fan is fixedly mounted on a side wall of the casing.

[0013] In one embodiment of the utility model: the casing includes a top wall, a side wall bent downward from the outer edge of the top wall, and a bottom wall bent inward from the lower edge of the side wall, the bottom wall is annularly surrounding the air outlet, the top wall, the side wall and the bottom wall form the cavity, and the cavity is rectangular.

[0014] In one embodiment of the utility model: the high-efficiency filter includes a fixing frame and a filter base disposed in the fixing frame, an airtight pad is provided between the fixing frame and the bottom wall, and is fixedly connected by bolts, and the filter base covers the air outlet along the axial direction.

[0015] In the second aspect, the utility model provides a wafer processing equipment, including a wafer processing chamber and the FFU air filter mentioned above, wherein the wafer processing chamber is provided with a wafer processing component, and an air supply port is opened at the top of the wafer processing chamber, and the FFU air filter is installed at the top of the wafer processing chamber for uniformly supplying air to the inside of the wafer processing chamber through the air supply port.

[0016] One or more of the above embodiments of the utility model have at least one or more of the following beneficial effects: The present application seals the fan to the air inlet and the high-efficiency filter to the air outlet to ensure sufficient airtightness in the cavity, so that static pressure can be formed in the cavity during subsequent air purification to ensure uniformity of air output. By setting a current sensing switch, it can quickly provide feedback on fan anomalies, promptly reminding staff to come and check, and avoiding abnormal operation of the FFU air filter interfering with the operation of other equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings.

[0018] Figure 1This is a schematic diagram of the structure of an FFU air filter in one embodiment of the utility model;

[0019] Figure 2 It is a cross-sectional view of an FFU air filter in one embodiment of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure inside the casing in one embodiment of the utility model;

[0021] Figure 4 It is a structural schematic diagram of a wafer processing device in one embodiment of the utility model.

[0022] Description of reference numerals:

[0023] 10. Casing; 101. Cavity; 102. Top wall; 103. Side wall; 104. Bottom wall; 11. High-efficiency filter; 111. Fixing frame; 112. Filter base; 12. Air inlet; 13. Air outlet; 14. Fan; 15. Current sensing switch; 151. Sensing hole; 16. Protective net; 17. AC power terminal; 18. DC transformer; 19. Stepless speed regulator; 20. Mounting frame; 21. Fuse; 22. Sealant; 23. Airtight pad; 24. Start switch; 100. FFU air filter; 200. Wafer processing equipment; 201. Cabinet; 202. Wafer processing chamber; 203. Cabinet cavity. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] It should be noted that the words "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The descriptions of the present invention regarding directions such as "left", "right", "left side", "right side", "upper", "lower", "top", and "bottom" are all defined based on the relationship between the orientations or positions shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0026] In the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] See also Figure 1-4 As shown, the utility model is a FFU air filter 100, comprising a housing 10 and a high-efficiency filter 11 disposed below the housing 10. A cavity 101 is disposed in the housing 10, an air inlet 12 connected to the cavity 101 is disposed on the upper surface of the housing 10, and an air outlet 13 connected to the cavity 101 is disposed on the lower surface of the housing 10. A fan 14 docked with the air inlet 12 and a current sensing switch 15 for detecting the power-on status of the fan 14 are fixedly installed in the cavity 101, and the fan 14 is sealed and fixedly connected to the air inlet 12. The high-efficiency filter 11 is installed on the lower surface of the housing 10, and the high-efficiency filter 11 covers the air outlet 13 and is sealed and connected to the air outlet 13.

[0028] When the FFU air filter 100 is working, the fan 14 sucks the air outside the housing 10 into the cavity 101 through the air inlet 12, and then blows it out through the high-efficiency filter 11, so that the air sucked into the cavity 101 forms static pressure in the cavity 101, so that the air can be blown out evenly through the high-efficiency filter 11, and the FFU air filter 100 can achieve uniform air output. The high-efficiency filter 11 purifies the output air to ensure the air purification effect of the FFU air filter 100.

[0029] The current sensing switch 15 provided in the cavity 101 will send out an alarm signal when an abnormality (such as a short circuit) occurs in the circuit connected to the fan 14, to remind the staff to come and check, so as to avoid abnormal operation of the FFU air filter 100 and interference with the operation of other equipment.

[0030] Specifically, the fan 14 is a DC fan, which has an ultra-thin thickness, so as to reduce the overall thickness of the FFU air filter 10. Only one fan 14 is provided, and the number of the air inlets 12 corresponds to the number of the fans 14. Of course, in other embodiments, the fan 14 may also be an AC fan, and the number of the fans 14 may also be multiple, as long as the overall thickness of the FFU air filter 100 meets the design requirements and the air can form static pressure in the cavity 101.

[0031] The housing 10 is generally a flat square box, having a top wall 102, a side wall 103 and a bottom wall 104. The top wall 102 is rectangular, and the air inlet 12 is circular and opened in the middle of the top wall 102. There are four side walls 103, which are formed by bending downward from the outer edges of the top wall 102, and the four side walls 103 are arranged perpendicular to the top wall 102. The bottom wall 104 is formed by bending inward from the lower edge of the side wall 103, and the bottom wall 104 is arranged perpendicular to the side wall 103. The top wall 102, the side wall 103 and the bottom wall 104 enclose a generally square cavity 101. The air outlet 13 is opened in the middle of the bottom wall 104. In the present application, the shape of the air outlet 13 is rectangular, and is arranged corresponding to the shape of the high-efficiency filter 11. Of course, in other embodiments, the shape of the air outlet 13 can also be circular, polygonal, etc.

[0032] The diameter of the air outlet 13 is larger than that of the air inlet 12, and the air outlet 13 is coaxially arranged with the air inlet 12, so that the air flowing into the cavity 101 from the air inlet 12 is diffused in the cavity 101 and then blown out from the air outlet 13, which is beneficial to the smoothness of the air passing through the FFU air filter 100 and further improves the uniformity of the air output of the FFU air filter 100.

[0033] The fan 14 is fixedly mounted on the lower surface of the top wall 102 by bolts, the inner diameter of the fan 14 is equal to the diameter of the air inlet 12, and the inner diameter of the fan 14 is connected to the air inlet 12, and the fan 14 is used to suck the air outside the housing 10 into the housing 10 through the air inlet 12. The outer edge of the fan 14 is sealed with the top wall 102 by a sealant 22 to avoid air leakage between the fan 14 and the top wall 102, thereby ensuring the static pressure effect in the subsequent cavity 101.

[0034] A protective net 16 for covering the air inlet 12 is fixedly mounted on the upper surface of the top wall 102 . The protective net 16 can protect the fan 14 and prevent large objects from hitting the fan 14 .

[0035] The FFU air filter 100 also includes an AC power terminal 17 and a DC transformer 18 disposed in the cavity 101. The AC power terminal 17 and the DC transformer 18 are both fixedly mounted on the lower surface of the top wall 102 and are respectively located at two adjacent corners of the cavity 101. The AC power terminal 17 and the DC transformer 18 are electrically connected via a first circuit, and the DC transformer 18 and the fan 14 are electrically connected via a second circuit. The external power supply supplies power to the FFU air filter 100 via the AC power terminal 17, and the DC transformer 18 converts the AC power provided by the external power supply into DC power, and reduces the 220V voltage to 24V before providing it to the fan 14.

[0036] The FFU air filter 100 also includes a stepless speed regulator 19 fixedly mounted on a side wall 103, and the stepless speed regulator 19 is electrically connected to a second circuit. The staff can change the current supplied to the fan 14 by rotating the stepless speed regulator 19, thereby achieving stepless speed regulation of the wind force of the fan 14 and making the regulation of the wind force of the fan 14 more refined.

[0037] The current sensing switch 15 is a DC sensing switch, and has a sensing hole 151. The second line between the stepless speed regulator 19 and the fan 14 passes through the sensing hole 151 to sense the current in the line to determine whether the fan 14 is abnormal. The cavity 101 is also provided with an L-shaped mounting frame 20 fixedly mounted on the lower surface of the top wall 102. The current sensing switch 15 is fixedly mounted on the L-shaped mounting frame 20 by bolts, so that both ends of the sensing hole 151 have gaps to facilitate the second line to pass through the sensing hole 151.

[0038] The FFU air filter 100 also includes a start switch 24 and a fuse 21, and the start switch and the fuse 21 are connected between the external power supply and the AC power supply terminal 17. When the fan 14 needs to be started, the start switch 24 is first turned on to allow the external power supply to power the fan 14, and then the wind force of the fan 14 is adjusted by the stepless speed regulator 19. The fuse 21 provides overload protection for the circuit in the FFU air filter 100. In this embodiment, the start switch 24, the fuse 21 and the stepless speed regulator 19 are all installed on the same side wall 103.

[0039] The high-efficiency filter 11 includes a rectangular frame-shaped fixing frame 111 and a filter matrix 112 arranged in the fixing frame 111. The bottom wall 104 is generally rectangular and annularly surrounds the air outlet 13. The projections along the axis between the bottom wall 104 and the fixing frame 111 overlap, which improves the aesthetic appearance of the FFU air filter 100. The filter matrix 112 covers the air outlet 13 in the axial direction, so that the air blown out from the air outlet 13 can directly pass through the filter matrix 112 in the axial direction, ensuring the smoothness of the air passing through the cavity 101 and the uniformity of the air outlet of the FFU air filter 100. An airtight pad 23 is provided between the bottom wall 104 and the fixing frame 111, so that the bottom wall 104 and the fixing frame 111 are sealed and connected, ensuring the sealing of the cavity 101, facilitating the air to generate static pressure in the cavity 101, and ensuring the uniformity of the air outlet. The bottom wall 104 and the fixing frame 111 are fixedly connected by bolts, so as to facilitate the assembly and disassembly of the two.

[0040] The present application also discloses a wafer processing device 200, which includes a cabinet 201, a wafer processing chamber 202 disposed in the cabinet 201, and the above-mentioned FFU air filter 100. The cabinet 201 has a plurality of cabinet cavities 203 distributed along the height direction, each cabinet cavity 203 is provided with a wafer processing chamber 202 and an FFU air filter 100, wherein each wafer processing chamber 202 is provided with a wafer processing component (not shown). The wafer processing components may be one or more of a wafer cleaning component, a wafer etching component, and a wafer photolithography component. An air supply port (not shown) is provided on the top of the wafer processing chamber 202. The FFU air filter 100 is fixedly mounted on the top of the wafer processing chamber 202 to block the air supply port, and is used to evenly deliver the purified air outside the wafer processing chamber 202 into the wafer processing chamber 202 through the air supply port, so as to replenish clean air in the wafer processing chamber 202.

[0041] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A FFU air filter, characterized in that: The invention comprises a casing, wherein a cavity is provided in the casing, an air inlet connected to the cavity is provided on the upper surface of the casing, an air outlet connected to the cavity is provided on the lower surface of the casing, a high-efficiency filter is installed on the lower surface of the casing, the high-efficiency filter covers the air outlet and is sealed to the air outlet, a fan connected to the air inlet and a current sensing switch for detecting the power-on status of the fan are fixedly installed in the cavity, and the fan is sealed to the air inlet.

2. A FFU air filter according to claim 1, characterized in that: The high-efficiency filter screen is sealed and connected to the lower surface of the casing via an airtight gasket.

3. The FFU air filter according to claim 1, characterized in that: The fan is sealed and connected to the casing via a sealant.

4. The FFU air filter according to claim 1, characterized in that: The fan is a DC fan.

5. The FFU air filter according to claim 4, characterized in that: An AC power terminal and a DC transformer are fixedly installed in the cavity, and a stepless speed regulator for adjusting the wind speed of the fan is fixedly installed on a side wall of the casing. The AC power terminal and the DC transformer are electrically connected through a first circuit, and the DC transformer and the fan are electrically connected through a second circuit, and the stepless speed regulator is electrically connected to the second circuit.

6. The FFU air filter according to claim 5, characterized in that: The current sensing switch is provided with a sensing hole, and the second line between the stepless speed regulator and the fan passes through the sensing hole.

7. The FFU air filter according to claim 1, characterized in that: A fuse electrically connected to the fan is fixedly mounted on one side wall of the housing.

8. An FFU air filter according to any one of claims 1 to 7, characterized in that: The casing includes a top wall, a side wall bent downward from the outer edge of the top wall, and a bottom wall bent inward from the lower edge of the side wall, the bottom wall is annularly surrounding the air outlet, the top wall, the side wall and the bottom wall form the cavity, and the cavity is rectangular.

9. The FFU air filter according to claim 8, characterized in that: The high-efficiency filter includes a fixing frame and a filter base disposed in the fixing frame. An airtight pad is provided between the fixing frame and the bottom wall and is fixedly connected by bolts. The filter base covers the air outlet in the axial direction.

10. A wafer processing equipment, characterized in that: It includes a cabinet, a wafer processing chamber arranged in the cabinet, and an FFU air filter as described in any one of claims 1 to 9, wherein a wafer processing component is arranged in the wafer processing chamber, an air supply port is opened at the top of the wafer processing chamber, and the FFU air filter is installed at the top of the wafer processing chamber for uniformly supplying air to the inside of the wafer processing chamber through the air supply port.

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