Furnace tube device

Abstract

The utility model provides a furnace tube device which comprises a furnace tube body, a cover body and a vacuum heat preservation mechanism embedded in the furnace tube body and close to the cover body, the furnace tube body comprises a shell, a heat preservation layer, a heating wire and a quartz tube which are sequentially arranged from outside to inside, and the vacuum heat preservation mechanism is provided with a through cavity in the axial direction. The cavity is used for allowing the quartz boat to pass through, the vacuum heat preservation mechanism comprises a cylinder part and a vacuum part arranged on the inner side of the cylinder part, and the outer diameter of the cylinder part is matched with the inner diameter of the quartz tube. The vacuum heat preservation mechanism is embedded in the position, close to the cover body, of the furnace tube body, and a local vacuum heat insulation area is formed between the furnace opening and the internal containing position of the furnace tube body, so that when the furnace door is opened and closed, heat loss in the furnace tube body is effectively reduced, the temperature in the furnace is kept stable, and energy consumption is reduced.

Description

Technical Field

[0001] The utility model relates to the field of photovoltaic component production, in particular to a furnace tube device. Background Art

[0002] In high-tech fields such as semiconductor and photovoltaic industries, furnace tube equipment is a key equipment for heat treatment processes. These furnace tubes are usually large in size and long in length to accommodate quartz boats of different specifications and to process silicon wafers of various sizes. Traditional furnace tube designs have some inherent problems, especially in terms of thermal efficiency. When the furnace door is opened or closed, heat is easily lost due to the large internal space of the furnace tube body, making temperature control difficult and increasing energy consumption.

[0003] In the prior art, furnace tubes are usually large cylindrical structures with a diameter of about 400 mm and a length of about 3000 mm. Although such a size can accommodate quartz boats and silicon wafers of different sizes, the high temperature inside can be easily lost quickly during the production process, especially when the furnace door is opened / closed, affecting production efficiency and product quality. At the same time, this design also leads to higher energy consumption, because after each door opening and closing, the system needs additional energy to restore the set temperature.

[0004] Therefore, it is necessary to design a furnace tube device to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a furnace tube device which can improve energy utilization efficiency and maintain normal operation of a production line.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a furnace tube device, which includes a furnace tube body, a cover body, and a vacuum insulation mechanism embedded in the furnace tube body near the cover body, the furnace tube body includes a shell, an insulation layer, a heating wire and a quartz tube arranged in sequence from the outside to the inside, in the axial direction, the vacuum insulation mechanism has a through cavity, the cavity is used for the quartz boat to pass through, the vacuum insulation mechanism includes a cylindrical part and a vacuum part arranged on the inner side of the cylindrical part, the outer diameter of the cylindrical part matches the inner diameter of the quartz tube.

[0007] As a further improved technical solution of the utility model, the vacuum part includes an axial plate arranged along the axial direction of the cylindrical part and two radial plates arranged at both ends of the axial plate to seal the axial plate and the cylindrical part, and a vacuum chamber is formed between the axial plate, the radial plate and the cylindrical part.

[0008] As a further improved technical solution of the utility model, there are two vacuum parts, and the two vacuum parts are symmetrically arranged on both sides of the inside of the cylindrical part, and the cavity is between the two vacuum parts.

[0009] As a further improved technical solution of the utility model, the distance between the two axial plates is 280 mm to 350 mm.

[0010] As a further improved technical solution of the utility model, the length of the quartz tube is 6 to 8 times the length of the cylindrical part.

[0011] As a further improved technical solution of the utility model, the length of the quartz tube is 3000-3500 mm, and the inner diameter is 400-450 mm.

[0012] As a further improved technical solution of the utility model, the length of the cylindrical portion is 350-450 mm.

[0013] As a further improved technical solution of the utility model, the vacuum insulation mechanism is integrally formed.

[0014] As a further improved technical solution of the utility model, the vacuum insulation mechanism is made of quartz.

[0015] It can be seen from the above technical scheme that the furnace tube device of the utility model achieves the following effects by embedding a vacuum insulation mechanism in the furnace tube body near the cover body, thereby forming a local vacuum insulation area between the furnace mouth and the internal accommodating position: when opening and closing the furnace door, the heat loss in the furnace tube body is effectively reduced, and the temperature in the furnace is kept stable; further, the amount of heating required for the furnace tube during operation is reduced, thereby reducing energy consumption, and the power consumption of a single-round process can be reduced by 15%, greatly reducing production costs; in addition, the vacuum insulation mechanism of the utility model has a simple structure and is easy to install and disassemble, and will not affect the normal operation and maintenance of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a cross-sectional schematic diagram of a furnace tube device according to an embodiment of the present utility model.

[0017] Figure 2 for Figure 1 Schematic diagram of the vacuum insulation mechanism. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] Please refer to Figure 1As shown, the utility model provides a furnace tube device, which includes a furnace tube body 10, a cover body 20 and a vacuum insulation mechanism 30. The furnace tube body 10 includes a shell 11, an insulation layer 12, a heating wire 13 and a quartz tube 14 arranged in sequence from the outside to the inside. The length of the quartz tube 14 is 3000-3500 mm, and the inner diameter is 400-450 mm. The cover body 20 is arranged at the furnace mouth at one end of the furnace tube body 10.

[0020] The vacuum insulation mechanism 30 is embedded in the furnace tube body 10 near the cover 20 . In the axial direction, the vacuum insulation mechanism 30 has a through cavity 301 . The cavity 301 is used for the quartz boat to pass through so as to transfer the silicon wafers to the inside of the furnace tube body 10 .

[0021] Please also refer to Figure 2 As shown, the vacuum insulation mechanism 30 includes a cylindrical portion 31 and a vacuum portion 32 disposed inside the cylindrical portion 31. The outer diameter of the cylindrical portion 31 matches the inner diameter of the quartz tube 14. Specifically, the length of the quartz tube 14 is 6 to 8 times the length of the cylindrical portion 31, and the length of the cylindrical portion 31 is 350 to 450 mm. The vacuum portion 32 includes an axial plate 321 disposed along the axial direction of the cylindrical portion 31 and two radial plates 322 disposed at both ends of the axial plate 321 to seal the axial plate 321 and the cylindrical portion 31. A vacuum chamber is formed between the axial plate 321, the radial plate 322 and the cylindrical portion 31.

[0022] In this embodiment, there are two vacuum parts 32, which are symmetrically arranged on both sides of the cylinder part 31, and the cavity 301 is located between the two vacuum parts 32. According to the size of the quartz boat of the production line, the height of the paddle position, the size of the silicon wafer and other factors, the distance between the axial plates 321 of the two vacuum parts 32 is set to 280mm to 350mm.

[0023] The vacuum insulation mechanism 30 adopts an integrated design. In order to ensure high temperature resistance and maintain vacuum performance, quartz is preferably used as the material.

[0024] When the furnace tube device opens / closes the furnace door, the vacuum insulation mechanism 30 blocks part of the passage between the furnace mouth and the inside of the furnace tube, effectively reducing the internal heat loss of the furnace tube body 10, and increasing the temperature control system needs to be heated to a certain temperature. By installing the vacuum insulation mechanism 30, the improved furnace tube device consumes 25.5 kWh of electricity to run a round of process, compared with 29.9 kWh of electricity of the traditional device, the energy consumption is reduced by 15%, which can effectively save costs; it is also convenient to install and disassemble, and will not affect the normal operation of the quartz boat and the paddle.

[0025] The terms used herein to indicate spatial relative positions are used for the purpose of convenience to describe the relationship of one feature relative to another feature as shown in the drawings. It is understood that, depending on the different positions of the products, the terms of spatial relative positions may be intended to include different orientations in addition to the orientations shown in the drawings, and should not be construed as limitations on the claims.

[0026] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A furnace tube device, characterized in that: The invention comprises a furnace tube body, a cover body, and a vacuum insulation mechanism embedded in the furnace tube body near the cover body. The furnace tube body comprises a shell, an insulation layer, a heating wire and a quartz tube which are arranged in sequence from the outside to the inside. In the axial direction, the vacuum insulation mechanism has a through cavity for the quartz boat to pass through. The vacuum insulation mechanism comprises a cylindrical part and a vacuum part arranged inside the cylindrical part. The outer diameter of the cylindrical part matches the inner diameter of the quartz tube.

2. The furnace tube device according to claim 1, characterized in that: The vacuum part includes an axial plate arranged along the axial direction of the cylindrical part and two radial plates arranged at both ends of the axial plate to seal the axial plate and the cylindrical part. A vacuum chamber is formed between the axial plate, the radial plate and the cylindrical part.

3. The furnace tube device according to claim 2, characterized in that: There are two vacuum parts, which are symmetrically arranged on both sides of the cylindrical part, and the cavity is between the two vacuum parts.

4. The furnace tube device according to claim 3, characterized in that: The distance between the two axial plates is 280 mm to 350 mm.

5. The furnace tube device according to claim 1, characterized in that: The length of the quartz tube is 6 to 8 times the length of the cylindrical portion.

6. The furnace tube device according to claim 1, characterized in that: The length of the quartz tube is 3000-3500 mm, and the inner diameter is 400-450 mm.

7. The furnace tube device according to claim 1, characterized in that: The length of the cylindrical portion is 350 to 450 mm.

8. The furnace tube device according to claim 1, characterized in that: The vacuum heat preservation mechanism is integrally formed.

9. The furnace tube device according to claim 1, characterized in that: The vacuum insulation mechanism is made of quartz.

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