Cleaning device for sapphire substrate

Abstract

The cleaning device comprises a cleaning basket, a cleaning box and a base, the cleaning box is fixed to the base, the cleaning basket is arranged in the cleaning box and movably connected with the cleaning box, a plurality of evenly distributed water filtering holes are formed in the periphery of the inner wall of the cleaning basket, a transverse plate is arranged at the top end of the cleaning basket, and an electric push rod is arranged on the base. A water outlet pipe is arranged on one side of the cleaning box, a valve is arranged on the water outlet pipe, a collecting area is arranged at a water outlet of the water outlet pipe, a collecting box is arranged in the collecting area, a water inlet pipe is arranged on one side of the collecting box, and the water inlet pipe is connected with the water outlet pipe; according to the sapphire substrate cleaning device, the electric push rod is started to lift the cleaning basket from the cleaning box, the cleaning basket and the cleaning box are separated in the vertical direction, waste liquid generated after cleaning is discharged from the water filtering holes of the cleaning basket, and due to the fact that the sapphire substrate is placed in the cleaning basket, the waste liquid is convenient to collect after being discharged out of the cleaning basket.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate cleaning, in particular to a cleaning device for a sapphire substrate. Background Art

[0002] Sapphire is the general name for corundum gemstones other than ruby, and its main component is aluminum oxide (Al2O3). Sapphire can be pink, yellow, green, white, and even in the same stone. The blue sapphire is due to the presence of a small amount of titanium (Ti) and iron (Fe) impurities. The biggest feature of sapphire is its uneven color. You can see parallel hexagonal prisms arranged in different shades of straight color bands and growth lines, polysynthetic twins, common louver-type twin lines, cracks mostly split along the twin planes, and strong dichroism. The color of sapphire is closely related to the impurity ions in it. In the mass production of substrates, the cleaning process is an indispensable and important link in removing impurities.

[0003] With the continuous improvement of the growth process, the quality of GaN epitaxial film crystals grown on sapphire substrates has been greatly improved. At present, high-quality GaN materials can be grown on sapphire, and GaN-based blue light-emitting diodes and laser diodes have been developed. In the epitaxial growth of hexagonal GaN, sapphire is the most commonly used substrate material.

[0004] Existing sapphire substrates require a cleaning basket when cleaning, but the existing cleaning basket still has certain defects when used. It is often unable to quickly filter and collect water from the cleaned sapphire substrate. Generally, after cleaning, the water needs to be manually filtered and collected, which reduces the cleaning efficiency. Utility Model Content

[0005] In view of the above situation, it is necessary to provide a cleaning device for sapphire substrates to solve the problem of low cleaning efficiency caused by manual water filtering and collection after cleaning in the prior art.

[0006] A cleaning device for sapphire substrates comprises a cleaning basket, a cleaning box and a base, wherein the cleaning box is fixed on the base, the cleaning basket is arranged in the cleaning box, the cleaning basket is movably connected to the cleaning box, the cleaning box is used to hold cleaning liquid, a plurality of distributed water filter holes are arranged around the inner wall of the cleaning basket, a cross plate is arranged at the top of the cleaning basket, an electric push rod is arranged on the base, the top of the electric push rod is fixedly connected to the cross plate, the electric push rod is used to move the cleaning basket up and down in a vertical direction, a water outlet pipe is arranged on one side of the cleaning box, a valve is arranged on the water outlet pipe, a collection area is arranged at the water outlet of the water outlet pipe, a collection box is arranged in the collection area, a water inlet pipe is arranged on one side of the collection box, and the water inlet pipe is connected to the water outlet pipe.

[0007] In the utility model, the sapphire substrate is placed in the cleaning basket, the cleaning basket is movably connected with the cleaning box, the cleaning liquid is added to the cleaning box for cleaning, and after cleaning for a period of time, the electric push rod is started to lift the cleaning basket from the cleaning box, so that the cleaning basket and the cleaning box are separated in the vertical direction, and the waste liquid after cleaning is discharged from the water filter hole of the cleaning basket. Since the sapphire substrate is placed in the cleaning basket, after the waste liquid is discharged from the cleaning basket, the valve is opened to discharge the waste liquid after cleaning from the water outlet pipe, and then the waste liquid is discharged into the collection box through the water inlet pipe. After the collection is full, the waste liquid is processed by taking the collection box out of the collection area, thereby facilitating the collection of the waste liquid.

[0008] Furthermore, in the cleaning device for sapphire substrates, a plurality of evenly distributed ultrasonic generators are provided at the inner bottom of the cleaning basket, and an ultrasonic transducer is fixedly connected to the upper end of the ultrasonic generator.

[0009] In the utility model, the high-frequency oscillation signal emitted by the ultrasonic generator is converted into high-frequency mechanical oscillation by the ultrasonic transducer and propagated into the cleaning liquid. The ultrasonic wave radiates forward in the cleaning liquid in a sparse and dense manner, causing the liquid to flow and generate tens of thousands of tiny bubbles. The tiny bubbles in the liquid vibrate under the action of the sound field, destroying the adsorption of dirt and the surface of the cleaning object, causing fatigue damage to the dirt layer and being refuted, and the vibration of the gas-type bubbles cleans the solid surface. Thus, the purpose of purifying the cleaning object is achieved.

[0010] Furthermore, in the cleaning device for sapphire substrates, a support rod is fixedly connected to one side of the base, the top of the support rod is fixedly connected to a controller, the controller is provided with control buttons for the electric push rod and the ultrasonic generator, and the controller is electrically connected to the electric push rod and the ultrasonic generator respectively.

[0011] In the utility model, the lifting and lowering of the electric push rod and the start and stop of the ultrasonic generator are controlled by corresponding buttons of the controller, so that automatic operation is realized.

[0012] Furthermore, in the cleaning device for sapphire substrates, the cleaning basket, the cleaning box and the cross plate are all made of polyvinyl fluoride material.

[0013] In the utility model, the polyvinyl fluoride material is odorless, non-toxic, has insulation performance, high toughness, anti-aging, corrosion resistance, can withstand -73 ~ + 121 ° C, and has general acid and alkali resistance.

[0014] Furthermore, in the cleaning device for sapphire substrates, the cleaning basket, the cleaning box and the cross plate are welded by polyvinyl fluoride material.

[0015] In the utility model, the welding at the joints is also seamlessly welded using polyvinyl fluoride material, which ensures the stability of the cleaning basket and prevents it from being deformed during long-term operation; and does not use metal material to avoid corrosion by the cleaning liquid.

[0016] Furthermore, in the cleaning device for sapphire substrates, support columns are fixed around the bottom of the base.

[0017] In the utility model, the base can be fixed on a plane by means of the provided supporting legs, thereby improving the overall stability of the cleaning device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of a cleaning device for a sapphire substrate according to an embodiment of the utility model.

[0019] Figure 2 It is a side view of a cleaning device for a sapphire substrate according to an embodiment of the utility model.

[0020] Figure 3 It is a schematic diagram of the internal structure of the cleaning basket according to an embodiment of the utility model.

[0021] Reference numerals:

[0022] 1. Cleaning basket; 2. Cleaning box; 3. Base; 4. Water filter hole; 5. Horizontal plate; 6. Electric push rod; 7. Ultrasonic generator; 8. Ultrasonic transducer; 9. Support rod; 10. Controller; 11. Water outlet pipe; 12. Valve; 13. Support column; 14. Collection area; 15. Collection box; 16. Water inlet pipe; 101. Electric push rod up button; 102. Electric push rod down button; 103. Ultrasonic generator start button; 104. Ultrasonic generator stop button. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The drawings provide embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing this embodiment is to make the disclosure of the present invention more thorough and comprehensive.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. In addition, the various embodiments of the present invention, the features in the embodiments, and the features of the embodiments can be freely combined without obvious conflicts or contradictions.

[0026] like Figures 1 to 3 As shown, a cleaning device for a sapphire substrate comprises a cleaning basket 1, a cleaning box 2 and a base 3, wherein the base 3 is fixedly connected to the cleaning box 2, a cleaning basket 1 is arranged in the cleaning box 2, the cleaning basket 1 is movably connected to the cleaning box 2, a plurality of evenly distributed water filtering holes 4 are arranged around the inner wall of the cleaning basket 1, two oppositely arranged transverse plates 5 are arranged on the top of the cleaning basket 1, the transverse plates 5 extend in a direction away from the cleaning basket 1, an electric push rod 6 is arranged on the base 3, the top of the electric push rod 6 is fixedly connected to the transverse plate 5, a plurality of evenly distributed ultrasonic generators 7 are arranged on the bottom of the inner side of the cleaning basket 1, the upper end of the ultrasonic generator 7 is fixedly connected to an ultrasonic transducer 8, a support rod 9 is fixedly connected to one side of the base, and the top of the support rod 9 is fixedly connected to a controller 10 The controller 10 is provided with control buttons for the electric push rod 6 and the ultrasonic generator 7, which are respectively an electric push rod rise button 101, an electric push rod drop button 102, an ultrasonic generator start button 103, and an ultrasonic generator stop button 104. The controller 10 is electrically connected to the electric push rod 6 and the ultrasonic generator 7 respectively. A water outlet pipe 11 is provided on one side of the cleaning box, and a valve 12 is provided on the water outlet pipe 11. A collecting area 14 is provided at the water outlet of the water outlet pipe 11, and a collecting box 15 is provided in the collecting area 14. A water inlet pipe 16 is provided on one side of the collecting box, and the water inlet pipe 16 is connected to the water outlet pipe 11. Support columns 13 are fixed around the bottom of the base, and the bottom of the support column 13 is at the same horizontal height as the collecting area 14.

[0027] The working principle of the utility model is as follows:

[0028] The cleaning liquid is poured into the cleaning box 2, and then the sapphire substrate is poured into the cleaning basket 1. The ultrasonic generator 7 is started by the ultrasonic generator start button 103. The high-frequency oscillation signal emitted is converted into high-frequency mechanical oscillation by the ultrasonic transducer 8 and propagated into the cleaning liquid. The ultrasonic wave radiates forward in the cleaning liquid in a sparse and dense manner, causing the liquid to flow and generate tens of thousands of tiny bubbles with a diameter of 50-500μm. The tiny bubbles in the liquid vibrate under the action of the sound field. These bubbles are formed and grow in the negative pressure area of ​​the longitudinal propagation of the ultrasonic wave. In the positive pressure area, when the sound pressure reaches a certain value, the bubbles increase rapidly and then suddenly close. When the bubbles close, shock waves are generated, and thousands of atmospheres of pressure are generated around them, destroying insoluble dirt and dispersing them in the cleaning liquid. When the group particles are wrapped in oil and adhere to When cleaning the surface of the workpiece, the oil is emulsified and the solid particles are separated, thereby achieving the purpose of cleaning and purification. At this time, the ultrasonic generator 7 is stopped by the ultrasonic generator stop button 104. After cleaning, the cleaning basket 1 is lifted from the cleaning box 2, and the cleaning water is filtered into the cleaning box 2 through the filter hole 4. The cleaned sapphire substrate can be quickly filtered and collected, thereby improving the cleaning efficiency. The electric push rod rising button 101 is used to start the electric push rod 6 to lift the cleaning basket 1 from the cleaning box 2, so that the cleaning basket 1 and the cleaning box 2 are separated in the vertical direction, and the waste liquid after cleaning is discharged from the filter hole 4 of the cleaning basket 1. Because the sapphire substrate is placed in the cleaning basket 1, it is convenient to collect the sapphire substrate after the waste liquid is discharged from the cleaning basket 1, and then the electric push rod 6 is dropped by the electric push rod lowering button 102 to reset the cleaning box 2.

[0029] By opening the valve 12, the waste liquid after cleaning is discharged from the outlet pipe 11 and discharged into the collection box 15 through the inlet pipe 16. After the collection is full, the collection box 15 is taken out from the collection area 14 to treat the waste liquid, thereby facilitating the collection of the waste liquid. The support column 13 is provided to fix the base 3 on a plane, thereby improving the overall stability of the cleaning device.

[0030] It is understood that if cleaning does not achieve the desired effect, repeated cleaning may be performed multiple times.

[0031] The cleaning basket 1, the cleaning box 2 and the cross plate 5 are all made of polyvinyl fluoride materials. The cleaning basket 1, the cleaning box 2 and the cross plate 5 are welded by polyvinyl fluoride materials. The polyvinyl fluoride material is odorless, non-toxic, has insulating properties, high toughness, anti-aging, corrosion resistance, can withstand -73 ~ + 121 ° C, and has general acid and alkali resistance properties, ensuring the stability of the cleaning basket 1, and will not be deformed during long-term operation. No metal material is used to avoid corrosion by the cleaning liquid.

[0032] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0033] The above-mentioned embodiments only express the implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A cleaning device for a sapphire substrate, characterized in that: The cleaning basket comprises a cleaning box, a cleaning box and a base, wherein the cleaning box is fixed on the base, the cleaning basket is arranged in the cleaning box, the cleaning basket is movably connected with the cleaning box, the cleaning box is used to hold cleaning liquid, a plurality of distributed water filtering holes are arranged around the inner wall of the cleaning basket, a horizontal plate is arranged on the top of the cleaning basket, an electric push rod is arranged on the base, the top of the electric push rod is fixedly connected with the horizontal plate, the electric push rod is used to push the cleaning basket to move up and down in a vertical direction, a water outlet pipe is arranged on one side of the cleaning box, a valve is arranged on the water outlet pipe, a collection area is arranged at the water outlet of the water outlet pipe, a collection box is arranged in the collection area, a water inlet pipe is arranged on one side of the collection box, and the water inlet pipe is connected with the water outlet pipe.

2. The cleaning device for sapphire substrate according to claim 1, characterized in that: A plurality of evenly distributed ultrasonic generators are arranged at the inner bottom of the cleaning basket, and the upper ends of the ultrasonic generators are fixedly connected to ultrasonic transducers.

3. The cleaning device for sapphire substrate according to claim 2, characterized in that: A support rod is fixedly connected to one side of the base, and a controller is fixedly connected to the top of the support rod. The controller is provided with control buttons of the electric push rod and the ultrasonic generator, and the controller is electrically connected to the electric push rod and the ultrasonic generator respectively.

4. The cleaning device for sapphire substrate according to claim 1, characterized in that: The cleaning basket, the cleaning box and the cross plate are all made of polyvinyl fluoride material.

5. The cleaning device for sapphire substrate according to claim 1, characterized in that: The cleaning basket, the cleaning box and the transverse plate are welded by polyvinyl fluoride material.

6. The cleaning device for sapphire substrate according to claim 1, characterized in that: Support columns are fixed around the bottom of the base.

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