Heatable valve for vacuum cavity

Abstract

The utility model relates to the field of valves for vacuum cavities, in particular to a heatable valve for a vacuum cavity, which comprises a valve body, a transmission port is formed in the side wall of the valve body and penetrates through the valve body, and one side of the valve body is used for being mounted on the vacuum cavity. A heating mechanism used for increasing the temperature in the valve body is arranged in the valve body and comprises a base and a heating piece, the base is installed in the valve body, the heating piece is installed on the base, a cooling water channel is further formed in the valve body, the interior of the cooling water channel is used for conveying cooling liquid, and the cooling water channel is used for being connected with an external cooling liquid source. The problem of low processing efficiency of the silicon wafer in a traditional mode is solved, and the effect of improving the processing efficiency of the silicon wafer can be achieved.

Description

Technical Field

[0001] The present application relates to the field of valves for vacuum chambers, and in particular to a heatable valve for vacuum chambers. Background Art

[0002] As the global demand for renewable energy increases, solar cell technology has developed rapidly. In solar cells, silicon wafers are a relatively important component. During the processing of silicon wafers, vacuum coating equipment is usually required to coat them so that the silicon wafers can meet the process requirements.

[0003] The traditional processing method is usually to place several silicon wafers on a carrier, and then transport the carrier to the vacuum chamber of the vacuum coating equipment for processing. A valve is usually installed at the end outside the vacuum chamber to close the vacuum chamber to maintain the vacuum degree of the vacuum chamber. In addition, during the processing of the silicon wafer, it is necessary to increase the temperature in the vacuum chamber while maintaining a certain vacuum degree in the vacuum chamber so that the silicon wafer can reach the temperature required for processing. After the silicon wafer processing is completed, the valve is opened so that the carrier drives the silicon wafer through the valve to enter the next process.

[0004] Since the valve is arranged outside the vacuum chamber and components for controlling the opening and closing of the valve are installed inside the valve, the valve inevitably occupies a certain space. When the temperature inside the vacuum chamber is increased, it is difficult for heat to enter the valve, which leads to a temperature difference between the valve and the vacuum chamber. When the carrier passes through the valve, the temperature of the silicon wafer on the carrier will decrease. When the carrier enters the next process, the silicon wafer on the carrier needs to be heated again before the next processing can be carried out, which leads to low processing efficiency of the silicon wafer. Utility Model Content

[0005] In order to improve the processing efficiency of silicon wafers, the present application provides a heatable valve for a vacuum chamber.

[0006] The present application provides a heatable valve for a vacuum chamber, which adopts the following technical solution:

[0007] A heatable valve for a vacuum chamber comprises a valve body, a transmission port is provided on the side wall of the valve body, the transmission port penetrates the valve body, and one side of the valve body is used to be installed on the vacuum chamber, a heating mechanism for raising the temperature inside the valve body is provided in the valve body, the heating mechanism comprises a base and a heating element, the base is installed in the valve body, the heating element is installed on the base, a cooling water channel is also provided on the valve body, the cooling water channel is used to transport cooling liquid, and the cooling water channel is used to be connected to an external cooling liquid source.

[0008] By adopting the above technical solution, when the carrier is sent from the transmission port of the valve body to the next process, the temperature inside the valve body is increased by the heating element, so that when the carrier passes through the valve body, the silicon wafer on the carrier is auxiliary heated by the heating element, thereby reducing the heat loss of the silicon wafer when passing through the valve body, so that it needs to be heated again in the next process, thereby facilitating the improvement of the processing efficiency of the silicon wafer. And during the operation of the heating element, the coolant is transported to the cooling water channel through the external coolant source, thereby facilitating the control of the temperature in the valve body, so that the temperature in the valve body can reach the design requirements.

[0009] In a specific feasible implementation scheme, a quick-release mechanism connected to the base is also installed in the valve body, and the quick-release mechanism includes a quick-release assembly, and the quick-release assembly includes a quick-release seat, a quick-release rod and a reset member. The quick-release seat is installed in the valve body, and a quick-release groove for the base to be plugged into is provided on the top wall of the quick-release seat, and an installation groove is also provided on the base at the quick-release groove, and the installation groove is communicated with the quick-release groove, and the quick-release rod is installed in the installation groove, and the cross-section of the quick-release rod is C-shaped, and one end of the quick-release rod extends into the quick-release groove, and the other end passes through the side wall of the quick-release seat and extends outward, and a limiting groove for one end of the quick-release rod to be plugged into is provided on the side wall of the base, and the reset member is installed on the quick-release rod, and the reset member is connected to the quick-release seat.

[0010] By adopting the above technical solution, when the heating element needs to be replaced and repaired, the upper end of the quick-release rod is separated from the base by pushing the quick-release rod and compressing the reset member, thereby releasing the limit on the base, so as to facilitate the disassembly of the base, thereby facilitating the replacement and repair of the heating element. After the heating element is replaced, the base is plugged into the quick-release slot, so that the lower end of the base contacts the upper end of the quick-release rod, thereby pushing the quick-release rod so that the quick-release rod can slide along the side wall of the lower end of the base to the limit slot, so that the upper end of the quick-release rod can be plugged into the limit slot under the action of the reset member, thereby facilitating the limit of the base.

[0011] In a specific possible implementation scheme, the reset member includes a reset spring, which is mounted on the quick-release rod, with one end of the reset spring connected to the quick-release seat and the other end connected to the quick-release rod.

[0012] By adopting the above technical solution, when the quick release lever is pushed, the quick release lever compresses the reset spring, so that the reset spring generates an elastic force on the quick release lever, so as to facilitate the reset of the quick release lever.

[0013] In a specific feasible implementation scheme, the quick release mechanism also includes a lifting assembly, which includes a top plate and a lifting spring. An avoidance hole is provided on the top wall of the quick release rod. The top plate is installed in the avoidance hole in a vertical direction, and the length of the avoidance hole is greater than the length of the top plate. The top plate is used to lift the base inserted in the quick release slot. The lifting spring is installed in the quick release slot, and one end of the lifting spring is connected to the bottom wall of the quick release slot, and the other end is connected to the bottom wall of the top plate.

[0014] By adopting the above technical solution, when the base is inserted into the quick release slot, the lower end of the base contacts the top plate and presses down the top plate, so that the top plate compresses the lifting spring, so that when the base is limited by the quick release rod, the lifting spring is in a compressed state. When the quick release rod releases the limit on the base, the lifting spring can restore its deformation, thereby driving the top plate to lift the base upward, so as to facilitate the removal of the base from the quick release seat, so as to realize the disassembly of the base.

[0015] In a specific possible implementation scheme, a closing mechanism is also installed in the valve body away from the vacuum chamber, and the closing mechanism includes a closing plate and a driving assembly. The closing plate and the driving assembly are both installed in the valve body, the driving assembly is connected to the closing plate, and the driving assembly is used to drive the closing plate to close the transmission port.

[0016] By adopting the above technical solution, when a certain vacuum degree needs to be maintained in the vacuum chamber, the driving component drives the closing plate to close the transmission port of the valve body, thereby facilitating the sealing of the valve body and the vacuum chamber, thereby facilitating the maintenance of the vacuum degree in the vacuum chamber. When the carrier needs to be transported, the driving component drives the closing plate to open the transmission port, thereby facilitating the carrier to enter the next process through the transmission port.

[0017] In a specific feasible implementation scheme, the driving assembly includes a cylinder, a rotating shaft, a pull rod and a connecting rod. The rotating shaft is installed in the valve body along the length direction of the valve body, and the rotating shaft is located above the transmission port. One end of the closing plate is connected to the rotating shaft, and the other end extends downward. One end of the pull rod is installed in the valve body above the transmission port, and the other end extends toward the closing plate. A section of the connecting rod is hinged to one end of the pull rod close to the closing plate, and the other end is connected to the closing plate. The cylinder is installed on the top wall of the valve body, and the piston rod of the cylinder passes downward through the top wall of the valve body and is slidably connected to the pull rod.

[0018] By adopting the above technical solution, when the transmission port needs to be opened, the cylinder pulls the rod to rotate upward, so that the rod drives the connecting rod to move upward, and the connecting rod pulls the closing plate to rotate upward, thereby opening the transmission port, so as to facilitate the delivery of the carrier. When the transmission port needs to be closed, the cylinder pushes the rod to rotate downward, so that the rod pushes the connecting rod to move downward, so that the connecting rod pushes the closing plate to rotate downward, so that the closing plate closes the transmission port, so as to facilitate the sealing of the vacuum chamber.

[0019] In a specific feasible implementation scheme, the cooling water channel includes a first water channel and a second water channel, the first water channel is arranged in the side wall above the transmission port along the length direction of the valve body, the valve body is provided with first joints at both ends of the first water channel, and the first joints are used to be connected to an external cooling liquid source, the second water channel is arranged in the side wall below the transmission port along the length direction of the valve body, the valve body is provided with second joints at both ends of the second water channel, and the second joints are used to be connected to an external cooling liquid source.

[0020] By adopting the above technical solution, when the heating element performs auxiliary heating work, the cooling liquid is transported to the first water channel and the second water channel through the external cooling liquid source, so as to dissipate the heat of the valve body, so as to control the temperature inside the valve body, so that the temperature inside the valve body can be kept stable.

[0021] In a specific possible implementation scheme, the cooling water channel includes a third water channel, the cross-section of the third water channel is C-shaped, and the transmission port is located in the area surrounded by the third water channel, and third connectors for connecting to an external cooling liquid source are installed at both ends of the third water channel on the valve body.

[0022] By adopting the above technical solution and setting a C-shaped third water channel, the coolant delivered to the valve body from the external coolant source can flow over a longer distance, thereby improving the cooling effect of the valve body and facilitating better control of the heat in the valve body.

[0023] In a specific possible implementation manner, the heating element comprises an infrared lamp tube, which is detachably mounted on a base and is connected to an external power source.

[0024] By adopting the above technical solution, the infrared lamp is connected to an external power supply, thereby conveniently realizing auxiliary heating of the silicon wafer on the carrier.

[0025] In a specific possible implementation manner, the heating element comprises an electric heating wire, the electric heating wire is detachably mounted on the base, and the electric heating wire is connected to an external power source.

[0026] By adopting the above technical solution, the electric heating wire is connected to an external power source, thereby facilitating auxiliary heating of the silicon wafer on the carrier.

[0027] In summary, the present application includes at least one of the following beneficial effects:

[0028] 1. The present application provides a heating mechanism in the valve body to increase the temperature inside the valve body through the heating mechanism, thereby facilitating auxiliary heating of the silicon wafers on the carrier passing through the valve body, thereby facilitating reducing the heat loss of the silicon wafers on the carrier, thereby facilitating improving the processing efficiency of the silicon wafers.

[0029] 2. The present application provides a quick-release mechanism to facilitate rapid disassembly of the base, thereby facilitating repair and replacement of the heating element.

[0030] 3. The present application sets a cooling water channel to facilitate an external cooling liquid source to transport cooling liquid into the cooling water channel, thereby lowering the temperature inside the valve body, thereby facilitating cooperation with a heating element to keep the temperature inside the valve body stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the structure of a valve for a heatable vacuum chamber of the present application.

[0032] Figure 2 It is a structural schematic diagram of the heating mechanism in Example 1 of the present application.

[0033] Figure 3 It is a structural schematic diagram of the quick release mechanism in Example 1 of the present application.

[0034] Figure 4 It is an exploded view of the quick release mechanism in Example 1 of the present application.

[0035] Figure 5 It is a schematic diagram of the structure of the cooling water channel in Example 1 of the present application.

[0036] Figure 6 It is a structural schematic diagram of the closing mechanism in Example 1 of the present application.

[0037] Figure 7 It is a schematic diagram of the connection relationship between the cylinder and the pull rod in Example 1 of the present application.

[0038] Figure 8 It is a schematic diagram of the structure of the cooling water channel in the second embodiment of the present application.

[0039] Description of reference numerals:

[0040] 1. Valve body; 11. Transmission port; 12. First water channel; 13. Second water channel; 14. Third water channel; 2. Heating mechanism; 21. Heating element; 22. Base; 221. Limiting groove; 3. Quick release mechanism; 31. Quick release assembly; 311. Quick release seat; 3111. Quick release groove; 312. Quick release rod; 3121. Baffle; 3122. Avoidance hole; 313. Reset spring; 32. Lifting assembly; 321. Top plate; 322. Lifting spring; 4. First joint; 5. Second joint; 6. Third joint; 7. Closing mechanism; 71. Closing plate; 72. Driving assembly; 721. Cylinder; 722. Rotating shaft; 723. Pull rod; 7231. Slide groove; 7232. Waist-shaped groove; 724. Connecting rod; 725. Mounting plate; 726. Slide rod; 8. Vacuum chamber. DETAILED DESCRIPTION

[0041] The present application is further described in detail below in conjunction with the accompanying drawings.

[0042] The present application embodiment discloses a heatable vacuum chamber valve, referring to Figure 1 and Figure 2 , including a valve body 1, a side wall on one side of the length direction of the valve body 1 is used to connect with the end of the vacuum chamber 8, and a transmission port 11 is opened on the side wall of the length direction of the valve body 1, the transmission port 11 penetrates the valve body 1, and the transmission port 11 is connected with the vacuum chamber 8, and the upper end of the valve body 1 can also be detachably installed with a top cover. A heating mechanism 2 and a quick release mechanism 3 are installed in the valve body 1, and the heating mechanism 2 is connected to the quick release mechanism 3. A cooling water channel is also opened in the side wall of the valve body 1, and the cooling water channel is used to connect with an external cooling liquid source, so as to reduce the temperature in the valve body 1.

[0043] Reference Figure 1 and Figure 2 When the carrier plate processed by the vacuum chamber 8 passes through the valve body 1 and is about to be transported to the next process, the temperature inside the valve body 1 is increased by the heating mechanism 2, so as to assist the heating of the silicon wafer on the carrier plate passing through the valve body 1, thereby reducing the heat loss of the silicon wafer when passing through the valve body 1, so that it is necessary to heat it up again in the next process, thereby affecting the processing efficiency of the silicon wafer. And by transporting the coolant in the external coolant source to the cooling water channel, the temperature inside the valve body 1 is controlled, so that the temperature inside the valve body 1 can be balanced. When the heating mechanism 2 is damaged, the heating mechanism 2 can be replaced and repaired in time through the quick release mechanism 3.

[0044] Reference Figure 2The heating mechanism 2 includes a heating element 21 and a base 22, the base 22 is mounted on the quick release mechanism 3, the heating element 21 includes an infrared lamp tube, the infrared lamp tube is detachably mounted on the base 22, and the infrared lamp tube is connected to an external power supply. The infrared lamp tube is a prior art in the art and will not be described in detail here. In another embodiment of the present application, the heating element 21 includes an electric heating wire, the electric heating wire is detachably mounted on the base 22, and the electric heating wire is also connected to an external power supply. The electric heating wire is also a prior art in the art and will not be described in detail here.

[0045] Reference Figure 3 and Figure 4 The quick release mechanism 3 includes a quick release assembly 31, and the quick release assembly 31 includes a quick release seat 311, a quick release rod 312 and a reset member. The quick release seat 311 is fixedly mounted on the inner bottom wall of the valve body 1, and a quick release groove 3111 is provided on the top wall of the quick release seat 311. The quick release groove 3111 is used for the base 22 to be plugged in. A mounting groove is also provided in the quick release seat 311, and the mounting groove is connected to the quick release groove 3111. The cross-section of the quick release rod 312 is C-shaped, and the quick release rod 312 is slidably mounted in the mounting groove, and the upper end of the quick release rod 312 extends into the quick release groove 3111, and a limiting groove 221 for the upper end of the quick release rod 312 to be plugged in is provided on the side wall of the base 22, and an inclined surface for contacting the lower end of the base 22 is provided on the top wall of the upper end of the quick release rod 312. The lower end of the quick-release rod 312 passes through the side wall of the quick-release seat 311 and extends outward, and the end of the quick-release rod 312 located outside the quick-release seat 311 is fixedly installed with a baffle 3121, and the reset member includes a reset spring 313. The reset spring 313 is installed on the quick-release rod 312, and one end of the reset spring 313 is in contact with the side wall of the baffle 3121, and the other end is in contact with the side wall of the quick-release seat 311.

[0046] Reference Figure 3 and Figure 4 The quick release mechanism 3 also includes a lifting component 32, which includes a top plate 321 and a lifting spring 322. An avoidance hole 3122 is provided on the top wall of the portion of the quick release rod 312 located in the quick release slot 3111. The avoidance hole 3122 is in the shape of a long strip and is located below the upper end of the quick release rod 312. The top plate 321 is slidably installed in the avoidance hole 3122 along the vertical direction, and the length of the avoidance hole 3122 is greater than the length of the top plate 321. The lifting spring 322 is installed in the quick release slot 3111, and one end of the lifting spring 322 is fixedly connected to the bottom wall of the quick release slot 3111, and the other end is fixedly connected to the bottom wall of the top plate 321. The top plate 321 is used to lift the base 22.

[0047] Reference Figure 3 and Figure 4When the heating mechanism 2 needs to be replaced and repaired, the baffle plate 3121 is pushed to compress the return spring 313, and the quick release rod 312 is driven to move, so that the upper end of the quick release rod 312 moves away from the base 22, thereby separating from the base 22, thereby releasing the limit on the base 22. In addition, during the movement of the quick release rod 312, the quick release rod 312 is displaced relative to the top plate 321, so that the top plate 321 slides along the inner wall of the avoidance hole 3122. When the upper end of the quick release rod 312 is separated from the base 22, the top plate 321 moves upward under the action of the lifting spring 322, so that the top plate 321 lifts the base 22, thereby facilitating the removal of the base 22 from the quick release seat 311, so as to facilitate the removal and replacement of the heating mechanism 2 by disassembling the base 22. Then, the baffle 3121 is released, so that the quick release rod 312 is reset under the action of the reset spring 313 , so that the upper end of the quick release rod 312 moves back into the quick release slot 3111 .

[0048] Reference Figure 3 and Figure 4 When the heating mechanism 2 needs to be reinstalled, the base 22 is inserted into the quick-release slot 3111 of the quick-release seat 311, and the lower end of the base 22 is made to contact the inclined surface of the upper end of the quick-release rod 312, so that the quick-release rod 312 is pushed away from the base 22, thereby driving the baffle 3121 to compress the reset spring 313, so that the end of the quick-release rod 312 slides along the side wall of the base 22. The cam 321 is engaged with the first and second cams 324 and 325, respectively, and the cam 322 is engaged with the first and second cams 324. When the cam 324 is in the working state, the cam 322 is engaged with the first and second cams 325. When the cam 324 is in the working state, the cam 322 is engaged with the first and second cams 325.

[0049] Reference Figure 5 The cooling water channel includes a first water channel 12 and a second water channel 13. The first water channel 12 is opened in the side wall of the valve body 1, and the first water channel 12 is located above the transmission port 11 and is arranged along the length direction of the valve body 1, and the first water channel 12 runs through the valve body 1, one end of the first water channel 12 is a liquid inlet end, and the other end is a liquid outlet end, and the first connector 4 is fixedly installed at the liquid inlet end and the liquid outlet end of the first water channel 12 on the side wall of the valve body 1, and the two first connectors 4 are connected to an external cooling liquid source (not shown in the figure).

[0050] Reference Figure 5The second water channel 13 is also opened in the side wall of the valve body 1, and the second water channel 13 is located below the transmission port 11 and is also arranged along the length direction of the valve body 1, and the second water channel 13 also runs through the valve body 1, and one end of the second water channel 13 is a liquid inlet end, and the other end is a liquid outlet end. Second connectors 5 are fixedly installed on the side wall of the valve body 1 at the liquid inlet end and the liquid outlet end of the second water channel 13, and the two second connectors 5 connect the second water channel 13 to an external cooling liquid source (not shown in the figure). A circulation pump and a cooling device are provided in the external cooling liquid source. The liquid inlet end of the circulation pump is connected to the first joint 4 of the liquid outlet end of the first water channel 12 and the second joint 5 of the liquid outlet end of the second water channel 13. The liquid outlet end of the circulation pump is connected to the cooling device. The liquid outlet end of the cooling device is connected to the first joint 4 of the liquid inlet end of the first water channel 12 and the second joint 5 of the liquid inlet end of the second water channel 13, so that the first water channel 12 and the external cooling liquid source form a cycle, and the second water channel 13 and the external cooling liquid source also form a cycle. The circulation pump and the cooling device in the external cooling liquid source are all existing technologies in the field and will not be elaborated here.

[0051] Reference Figure 6 and Figure 7 A closing mechanism 7 is also installed inside the valve body 1, and the closing mechanism 7 is used to close the transmission port 11 on the valve body 1. The closing mechanism 7 includes a closing plate 71 and a driving assembly 72, and the driving assembly 72 includes a cylinder 721, a rotating shaft 722, a pull rod 723 and a connecting rod 724. The rotating shaft 722 is fixedly installed in the valve body 1 along the length direction of the valve body 1, and the rotating shaft 722 is located above the transmission port 11 of the valve body 1. A mounting plate 725 is rotatably installed on the rotating shaft 722, and one end of the mounting plate 725 extends downward to the transmission port 11. The closing plate 71 is fixedly installed on the side wall of the mounting plate 725, and the closing plate 71 is located between the transmission port 11 and the mounting plate 725, and the area of ​​the closing plate 71 is larger than the area of ​​the transmission port 11. One end of the pull rod 723 is rotatably mounted in the inner wall of the valve body 1 away from the rotating shaft 722, and the other end extends toward the mounting plate 725. The portion where the pull rod 723 is connected to the valve body 1 is located above the transmission port 11. One end of the connecting rod 724 is hinged to one end of the pull rod 723 close to the mounting plate 725, and the other end of the connecting rod 724 is hinged to the side wall of the mounting plate 725 away from the closing plate 71.

[0052] Reference Figure 6 and Figure 7The cylinder 721 is fixedly mounted on the top wall of the valve body 1, and the piston rod of the cylinder 721 passes downward through the top wall of the valve body 1 and extends into the valve body 1. A sliding groove 7231 is provided on the top wall of the pull rod 723 along the length direction of the pull rod 723 for the piston rod of the cylinder 721 to be inserted. A sliding rod 726 is fixedly mounted on the side wall of one end of the piston rod of the cylinder 721 located in the sliding groove 7231 of the pull rod 723. A waist-shaped groove 7232 is provided on the inner wall of the sliding groove 7231 of the pull rod 723 for the sliding rod 726 to slide. The waist-shaped groove 7232 is arranged along the length direction of the pull rod 723.

[0053] The working principle of the embodiment of the present application is as follows: when the silicon wafer on the carrier plate in the vacuum chamber 8 needs to be sent to the next process after processing, the cylinder 721 pulls the slide bar 726 to move upward, so that the slide bar 726 pulls the pull rod 723 to rotate upward, thereby driving the connecting rod 724 to move upward, so that the connecting rod 724 drives the mounting plate 725 to rotate upward, thereby driving the closing plate 71 to rotate upward to a horizontal state, thereby opening the transmission port 11, so that the carrier plate can be sent out of the vacuum chamber 8. At the same time, by energizing the infrared lamp tube or the electric heating wire, the temperature in the valve body 1 is increased, so that when the carrier plate passes through the valve body 1, the silicon wafer on the carrier plate can be auxiliary heated, thereby reducing the heat loss generated when the silicon wafer passes through the valve body 1, thereby facilitating the improvement of the processing efficiency of the silicon wafer. At the same time, the cooling liquid is transported to the first water channel 12 and the second water channel 13 through the external cooling liquid source, so as to facilitate the temperature in the valve body 1 to be stable and meet the set requirements.

[0054] After the carrier plate is sent out of the vacuum chamber 8, the infrared lamp is powered off, and the slide rod 726 is driven downward by the cylinder 721, so that the slide rod 726 drives the pull rod 723 to rotate downward, so that the pull rod 723 pushes the mounting plate 725 to rotate downward through the connecting rod 724, so that the mounting plate 725 drives the closing plate 71 to rotate to a vertical state, and the closing plate 71 contacts the inner wall of the valve body 1 at the transmission port 11, thereby closing the transmission port 11, so that the vacuum chamber 8 can maintain the set vacuum degree in the subsequent working state.

[0055] When the infrared lamp tube or the electric heating wire is damaged and needs to be repaired or replaced, the top cover is removed, and then the baffle 3121 is pushed toward the quick-release seat 311 and the reset spring 313 is compressed, so that the upper end of the quick-release rod 312 is separated from the base 22, thereby releasing the limit on the base 22. At the same time, the top plate 321 lifts the base 22 upward under the action of the lifting spring 322, thereby facilitating the removal and replacement of the base 22 from the quick-release seat 311. After replacing the new infrared lamp tube or electric heating wire, the base 22 is inserted into the quick-release slot 3111 of the quick-release seat 311, so that the lower end of the base 22 contacts the upper end of the quick-release rod 312 and pushes the quick-release rod 312, so that the baffle 3121 compresses the reset spring 313. Then, as the base 22 continues to move downward, the base 22 contacts the top plate 321 and compresses the lifting spring 322. When the base 22 moves to make the upper end of the quick-release rod 312 located at the limiting slot 221 of the base 22, the quick-release rod 312 moves under the action of the reset spring 313, so that the upper end of the quick-release rod 312 is inserted into the limiting slot 221, thereby limiting the base 22, so that the infrared lamp tube or the electric heating wire can be stably installed in the valve body 1.

[0056] Embodiment 2:

[0057] Reference Figure 8 The difference between the embodiment of the present application and the first embodiment is that the cooling water channel includes a third water channel 14, the cross-section of the third water channel 14 is C-shaped, and the upper end of the third water channel 14 is located above the transmission port 11, and the lower end of the third water channel 14 is located below the transmission port 11, so that the transmission port 11 is located in the area surrounded by the third water channel 14, the upper end of the third water channel 14 is the liquid inlet end, and the lower end of the third water channel 14 is the liquid outlet end. The side wall of the valve body 1 is fixedly installed with third joints 6 at the liquid inlet end and the liquid outlet end of the third water channel 14, and the two third joints 6 are connected to an external cooling liquid source (not shown in the figure). The external cooling liquid source is also a prior art in the field and will not be elaborated here.

[0058] The working principle of the embodiment of the present application is: when the valve body 1 needs to be cooled, the coolant is input into the third water channel 14 from the third joint 6 at the liquid inlet end of the third water channel 14 through an external coolant source, and the coolant is made to flow back to the external coolant source from the third joint 6 at the liquid outlet end of the third water channel 14, thereby realizing the circulation of the coolant and cooling the valve body 1, thereby facilitating the control of the temperature inside the valve body 1.

[0059] The above are preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A heatable vacuum chamber valve, comprising a valve body (1), a transmission port (11) being provided on a side wall of the valve body (1), the transmission port (11) penetrating the valve body (1), and one side of the valve body (1) being used for mounting on a vacuum chamber (8), characterized in that: The valve body (1) is provided with a heating mechanism (2) for increasing the temperature inside the valve body (1), the heating mechanism (2) comprising a base (22) and a heating element (21), the base (22) being mounted inside the valve body (1), the heating element (21) being mounted on the base (22), the valve body (1) also being provided with a cooling water channel, the cooling water channel being used for conveying a cooling liquid, and the cooling water channel being used for connecting to an external cooling liquid source.

2. A heatable vacuum chamber valve according to claim 1, characterized in that: A quick release mechanism (3) connected to the base (22) is also installed in the valve body (1), the quick release mechanism (3) comprising a quick release assembly (31), the quick release assembly (31) comprising a quick release seat (311), a quick release rod (312) and a reset member, the quick release seat (311) being installed in the valve body (1), a quick release groove (3111) for the base (22) to be plugged into is provided on the top wall of the quick release seat (311), the base (22) is also provided with an installation groove at the quick release groove (3111), and the installation groove (3111) is provided on the bottom wall of the valve body (1). The mounting groove is communicated with the quick-release groove (3111), the quick-release rod (312) is mounted in the mounting groove, the cross section of the quick-release rod (312) is C-shaped, one end of the quick-release rod (312) extends into the quick-release groove (3111), and the other end passes through the side wall of the quick-release seat (311) and extends outwards, a limiting groove (221) for inserting one end of the quick-release rod (312) is provided on the side wall of the base (22), the reset member is mounted on the quick-release rod (312), and the reset member is connected to the quick-release seat (311).

3. A heatable vacuum chamber valve according to claim 2, characterized in that: The reset member comprises a reset spring (313), which is mounted on the quick-release rod (312), and one end of the reset spring (313) is connected to the quick-release seat (311), and the other end is connected to the quick-release rod (312).

4. The heatable vacuum chamber valve according to claim 2, characterized in that: The quick release mechanism (3) further comprises a lifting assembly (32), the lifting assembly (32) comprising a top plate (321) and a lifting spring (322); a relief hole (3122) is provided on the top wall of the quick release rod (312); the top plate (321) is installed in the relief hole (3122) along the vertical direction, and the length of the relief hole (3122) is greater than the length of the top plate (321); the top plate (321) is used to lift up the base (22) inserted in the quick release slot (3111); the lifting spring (322) is installed in the quick release slot (3111), and one end of the lifting spring (322) is connected to the bottom wall of the quick release slot (3111), and the other end is connected to the bottom wall of the top plate (321).

5. The heatable vacuum chamber valve according to claim 1, characterized in that: A sealing mechanism (7) is also installed in the valve body (1) away from the vacuum chamber (8), and the sealing mechanism (7) comprises a sealing plate (71) and a driving assembly (72). Both the sealing plate (71) and the driving assembly (72) are installed in the valve body (1), and the driving assembly (72) is connected to the sealing plate (71), and the driving assembly (72) is used to drive the sealing plate (71) to close the transmission port (11).

6. The heatable vacuum chamber valve according to claim 5, characterized in that: The driving assembly (72) comprises a cylinder (721), a rotating shaft (722), a pull rod (723) and a connecting rod (724); the rotating shaft (722) is installed in the valve body (1) along the length direction of the valve body (1), and the rotating shaft (722) is located above the transmission port (11); one end of the closing plate (71) is connected to the rotating shaft (722), and the other end extends downward; one end of the pull rod (723) is installed in the valve body (1) above the transmission port (11), and the other end extends toward the closing plate (71); a section of the connecting rod (724) is hinged to one end of the pull rod (723) close to the closing plate (71), and the other end is connected to the closing plate (71); the cylinder (721) is installed on the top wall of the valve body (1), and the piston rod of the cylinder (721) passes downward through the top wall of the valve body (1) and is slidably connected to the pull rod (723).

7. The heatable vacuum chamber valve according to claim 1, characterized in that: The cooling water channel comprises a first water channel (12) and a second water channel (13); the first water channel (12) is arranged in the side wall above the transmission port (11) along the length direction of the valve body (1); first connectors (4) are installed at both ends of the first water channel (12) on the valve body (1), and the first connectors (4) are used to connect to an external cooling liquid source; the second water channel (13) is arranged in the side wall below the transmission port (11) along the length direction of the valve body (1); second connectors (5) are installed at both ends of the second water channel (13) on the valve body (1), and the second connectors (5) are used to connect to an external cooling liquid source.

8. The heatable vacuum chamber valve according to claim 1, characterized in that: The cooling water channel comprises a third water channel (14), the cross section of the third water channel (14) is C-shaped, the transmission port (11) is located in the area surrounded by the third water channel (14), and third connectors (6) for connecting to an external cooling liquid source are installed at both ends of the third water channel (14) on the valve body (1).

9. The heatable vacuum chamber valve according to claim 1, characterized in that: The heating element (21) comprises an infrared lamp tube, which is detachably mounted on a base (22) and is connected to an external power source.

10. The heatable vacuum chamber valve according to claim 1, characterized in that: The heating element (21) comprises an electric heating wire, which is detachably mounted on a base (22) and is connected to an external power source.

Images