Pressure maintaining suction tool system for silicon crystal bar

Abstract

The utility model relates to the technical field of vacuum suction tools, in particular to a pressure maintaining suction tool system for a silicon crystal bar, which comprises a mounting plate and a plurality of suction cups fixed on the bottom surface of the mounting plate, a plurality of air passages are arranged in the mounting plate, the air passages are communicated with the suction cups in a one-to-one manner, each air passage is provided with a vacuum port and a vacuum breaking port, and the vacuum ports are communicated with the suction cups in a one-to-one manner. The vacuum port is connected with a vacuum generator through a one-way valve, a check valve is arranged in the vacuum port, and the vacuum breaking port of each air channel is connected with a vacuum breaking electromagnetic valve. The device can adapt to adsorption work of silicon crystal bars with various lengths, is good in universality, can achieve long-time pressure maintaining under the condition of sudden power failure, and reduces the possibility that the silicon crystal bars fall off.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum grippers, in particular to a pressure-maintaining gripper system for silicon crystal rods. Background Art

[0002] Silicon ingot is one of the most common ingots. It has excellent electrical properties and controllable crystal structure and is widely used in semiconductor industry and optoelectronic applications, such as integrated circuits, solar cells, optical fibers, etc. The round silicon ingot is squared by a squarer to form a square silicon ingot. The square silicon ingot can be sliced ​​to obtain thin silicon wafers of the required size, and the thin silicon wafers can be processed to obtain the required products.

[0003] Whether it is the upstream manufacturer of silicon crystal rods or the downstream manufacturer that uses silicon crystal rods to produce specific products, the silicon crystal rods need to be moved many times during the production process. For example, the square silicon crystal rods need to be moved out of the square cutting machine and moved to the assembly line before slicing.

[0004] There are various types of clamps for silicon crystal rods in existing handling equipment. The most common one is to use multiple vacuum suction cups to build a gripper system, which sucks the square silicon crystal rod during handling, and then lifts and carries it. Due to the characteristics of the vacuum suction cup, the handling process causes almost no damage to the silicon crystal rod itself, and the response speed is fast and the adsorption is firm. However, the existing gripper systems for silicon crystal rods have the following problems: 1. The gripper system is often designed for silicon crystal rods of specific lengths. When the length of the silicon crystal rod changes, the gripper system needs to be replaced. 2. If there is a sudden power outage during handling, the suction cup cannot maintain pressure or it is difficult to maintain pressure for a long time, which may cause the silicon crystal rod to fall and cause damage. The above problems need to be solved urgently. Summary of the invention

[0005] In order to overcome the deficiencies in the background technology, the utility model provides a pressure-maintaining clamp system for silicon crystal rods, which aims to be able to adapt to the adsorption work of silicon crystal rods of various lengths and has good versatility. Another purpose is to be able to maintain pressure for a longer time in the event of a sudden power outage and reduce the possibility of the silicon crystal rod falling.

[0006] The technical solution adopted by the utility model is as follows:

[0007] A pressure-maintaining gripper system for silicon crystal rods comprises a mounting plate and a plurality of suction cups fixed on the bottom surface thereof, wherein a plurality of air passages are provided in the mounting plate, the air passages are connected to the suction cups one-to-one, each air passage is provided with a vacuum port and an air-breaking port, the vacuum port is connected to a vacuum generator via a one-way valve, a check valve is provided in the vacuum port, and the air-breaking port of each air passage is connected to a vacuum-breaking solenoid valve.

[0008] In a further solution, each airway is provided with a detection port, and the detection port is connected to a vacuum gauge.

[0009] In a further embodiment, the vacuum generator operates in a normally open mode.

[0010] The utility model has the following beneficial effects: a check valve is arranged in the vacuum port of each airway. When a suction cup is vacant due to the length of the silicon crystal rod, the check valve will be closed under the action of the external atmospheric pressure, thereby avoiding negative pressure leakage and ensuring the suction force of other suction cups. Therefore, it can adapt to the adsorption work of silicon crystal rods of various lengths and has good versatility. A one-way valve is arranged in the vacuum port of each airway, and the vacuum generator adopts the normally open mode. When the power is suddenly cut off and the gas is cut off, the vacuum generator stops vacuuming, and the one-way valve further prevents the external atmosphere from entering the airway, thereby maintaining the pressure of the airway for a long time and reducing the possibility of the silicon crystal rod falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a main structural schematic diagram of an embodiment of the utility model.

[0012] Figure 2 yes Figure 1 AA section view.

[0013] Figure 3 It is a schematic diagram of the top structure of an embodiment of the utility model.

[0014] Figure numerals: vacuum generator 1, vacuum breaking solenoid valve 2, mounting plate 3, vacuum gauge 4, suction cup 5, one-way valve 6, check valve 7, airway 8, air breaking port 9, detection port 10, vacuum extraction pipe 11, vacuum breaking pipe 12, vacuum port 13, connecting hole 14. DETAILED DESCRIPTION

[0015] In order to enable ordinary technicians in the field to more clearly understand the purpose, technical solutions and advantages of the utility model, the utility model is further explained below in conjunction with the accompanying drawings and embodiments, but the utility model is not limited to the following embodiments.

[0016] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0017] like Figures 1 to 3As shown, this embodiment provides a pressure-maintaining fixture system for silicon crystal rods, including a long strip mounting plate 3, the top of which is provided with two groups of connection holes 14, the connection holes 14 are used to connect an external driving mechanism, and the bottom of the mounting plate 3 is fixedly provided with a row of suction cups 5 along the length extension direction, and the specifications of the suction cups 5 and the spacing between the suction cups 5 can be determined according to the specifications of the silicon crystal rod and the application scenario. Obviously, two or more rows of suction cups 5 can also be provided.

[0018] The mounting plate 3 is provided with an exhaust duct 8, and a certain distance is maintained between the air ducts 8. How to open the air duct 8 is a conventional technique and will not be described in detail. These air ducts 8 are connected one-to-one with the suction cups 5 at the bottom of the mounting plate 3, and each air duct 8 is provided with a vacuum port 13, a break port 9 and a detection port 10.

[0019] The upper end of the vacuum port 13 is connected to the vacuum generator 1 through a one-way valve 6 and a vacuum pipe 11. The one-way valve 6 only allows air to flow from the airway 8 to the vacuum generator 1, but not in the opposite direction, so that when the vacuum generator 1 is working, negative pressure can be formed in the airway 8 and the suction cup 5 connected thereto. In practical applications, each vacuum port 13 can be equipped with a vacuum generator 1, or two or more vacuum ports 13 can share a vacuum generator 1. A check valve 7 is provided in the vacuum port 13, which opens when the air pressure at both ends is basically balanced, and closes when the air pressure in the airway 8 is greater than the air pressure on one side of the one-way valve 6. The air-breaking port 9 of each airway 8 is connected to a vacuum-breaking solenoid valve 2 through a vacuum-breaking pipe 12. A vacuum gauge 4 is connected to the detection port 10 of each airway 8.

[0020] The working modes of the vacuum generator 1 mainly include normally closed mode and normally open mode, and the difference lies in whether the gas circuit is opened when controlling the vacuum degree; the normally closed mode means that the gas circuit is opened only during the period when the control signal is in effect, and the gas circuit is closed at other times; the normally open mode means that as long as the power is on, the gas circuit is always open, outputting a stable vacuum degree, and the gas circuit is closed when the power is off. The vacuum generator 1 of this embodiment is recommended to use the normally open mode.

[0021] When this embodiment is working, the external driving mechanism drives the entire gripper system to move, so that the suction cup 5 is pressed against the surface of the silicon crystal rod, the vacuum generator 1 is evacuated, and the check valve 7 is in an open state. When the vacuum degree reaches a certain level, the suction cup 5 can stably hold the silicon crystal rod, and the external driving mechanism drives the entire gripper system to move together with the silicon crystal rod.

[0022] In this process, if a suction cup 5 is vacant due to the length of the silicon crystal rod, the external atmospheric pressure acts on one end of the valve core of the check valve 7 through the suction cup 5, the airway 8 and the vacuum port 13. Since the vacuum port 13 is connected to the vacuum generator 1 through the one-way valve 6, the pressure at the other end of the valve core is less than the atmospheric pressure. Under the action of the atmospheric pressure, the valve core moves, and the check valve 7 closes the vacuum port 13, thereby avoiding negative pressure leakage and ensuring the suction of other suction cups 5 that share the vacuum generator 1 with the vacuum port 13. Therefore, this embodiment allows some suction cups 5 to be vacant during operation, which can adapt to the adsorption of silicon crystal rods of various lengths and has good versatility.

[0023] When the silicon crystal rod is transported to the right place, the vacuum breaking solenoid valve 2 is activated, the negative pressure in the airway 8 is broken, and the silicon crystal rod adsorbed by the suction cup 5 is released. When the power is suddenly cut off and the gas is cut off, the gas path of the vacuum generator 1 is closed, and the one-way valve 6 can prevent the external atmosphere from entering the airway 8 from the side of the vacuum generator 1, thereby maintaining the negative pressure in the airway 8 and the suction cup 5 for a long time, reducing the possibility of the silicon crystal rod falling.

[0024] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pressure-maintaining gripper system for a silicon ingot, comprising a mounting plate (3) and a plurality of suction cups (5) fixed to the bottom surface thereof, characterized in that: The mounting plate (3) is provided with a plurality of air passages (8), the air passages (8) being connected to the suction cups (5) in a one-to-one manner, each air passage (8) being provided with a vacuum port (13) and an air-breaking port (9), the vacuum port (13) being connected to the vacuum generator (1) via a one-way valve (6), a check valve (7) being provided in the vacuum port (13), and the air-breaking port (9) of each air passage (8) being connected to a vacuum-breaking solenoid valve (2).

2. A pressure-maintaining fixture system for silicon ingots according to claim 1, characterized in that: Each air passage (8) is provided with a detection port (10), and the detection port (10) is connected to a vacuum gauge (4).

3. A pressure-maintaining fixture system for silicon ingots according to claim 1 or 2, characterized in that: The working mode of the vacuum generator (1) is a normally open mode.

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