Multi-lens group object image plane parfocal device

Abstract

The utility model provides a multi-lens group object image plane parfocal device, comprising a multi-lens group, the multi-lens group comprises a plurality of imaging lenses arranged side by side, each imaging lens is installed on an independent lens installation fixing plate, the lens installation fixing plate is installed at the output end of an up-down adjusting module, and the up-down adjusting module is installed on the multi-lens group. A workbench capable of moving up and down is arranged below the multi-lens group, a mask table capable of translating is arranged above the multi-lens group, and the position of the workbench is determined according to the focal plane value of one imaging lens. The position of the imaging lens is adjusted through the up-down adjusting module, the position of the workbench is synchronously adjusted, the descending value of the position of the working surface is equal to the up-shift value of the imaging lens * multiplying power 2, and each lens is adjusted to have the same amplification factor under the same focal plane, so that the object-image plane of the multi-lens group is parfocal, and the sizes of photoetched patterns are consistent; according to the utility model, the coverage range and the resolution of the pattern can be improved, the problem of view limitation in large-format plate making is solved, and the cost is reduced.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of object-image plane parfocality, and in particular to a device for parfocality of object-image planes of a multi-lens group. Background Art

[0002] In the field of scanning large-format graphic lithography, in order to improve the plate-making capacity, there are generally two methods: one is to use a single lithography lens, and the field of view matches the field of view of the graphic to be produced; the other is to use a multi-lens group splicing method to match the field of view of the produced graphic. The former has a large working format, and the lens is required to be telecentric, which will cause the lens aperture and size to become large, which is not conducive to processing and assembly, and the cost will also rise sharply. The latter can use multiple lenses with small fields of view to match the working field of view side by side or staggered splicing. The difficulty lies in: for an overall object surface (mask surface), how to adjust each lens to have the same magnification (accurate to the fourth decimal place) under the same focal plane, so that the size of the lithography can be consistent. The utility model proposes a device for the object and image plane of a multi-lens group to be focused. Utility Model Content

[0003] 1. Technical problems to be solved by the utility model:

[0004] The utility model provides a device for achieving par-focus of an object and image plane of a multi-lens group, which is used to solve the technical problems existing in the above-mentioned background technology.

[0005] 2. Technical solution:

[0006] To achieve the above-mentioned purpose, the technical solution provided by the utility model is: a device for parfocality of an object and image plane of a multi-lens group, comprising a multi-lens group, wherein the multi-lens group comprises a plurality of imaging lenses arranged side by side, each of the imaging lenses is mounted on an independent lens mounting fixing plate, the lens mounting fixing plate is mounted on the output end of an up-and-down adjustment module, the up-and-down adjustment module is used to adjust the height of the imaging lens, the last lens of the imaging lens is a magnification adjustment lens, when the magnification adjustment lens is adjusted upward, the magnification becomes smaller, and when it is adjusted downward, the magnification becomes larger, a workbench is arranged below the multi-lens group, and a mask table is arranged above the multi-lens group, both the workbench and the mask table can move up and down, the object plane of the multi-lens group is an integral mask surface, the mask surface is fixed on the mask table and moves with the mask table, and the upper surface of the workbench is the working surface.

[0007] Preferably, a calibration camera is provided on the workbench.

[0008] Preferably, the up and down adjustment module includes a mounting frame, on which a screw is rotatably mounted, the screw is connected to the output shaft of the motor, a moving block is threadedly mounted on the screw, a mounting plate is provided on the moving block, and the lens mounting plate is fixed on the mounting plate.

[0009] Preferably, the mounting plate is "U"-shaped, two parallel guide rails are arranged on the mounting frame, two slide grooves are provided on the mounting plate, and the slide grooves are slidably sleeved on the guide rails.

[0010] 3. Beneficial effects:

[0011] Compared with the prior art, the technical solution provided by the utility model has the following beneficial effects:

[0012] The utility model adjusts the position of the imaging lens by adjusting the module up and down, and adjusts the position of the workbench synchronously. The lowering value of the working surface position is the imaging lens upward displacement value * magnification ^ 2 (or the upper displacement value of the working surface position is the imaging lens lowering value * magnification ^ 2), and each lens is adjusted to have the same magnification under the same focal plane, so that the multi-lens group object image plane is in focus, and the size of the photoetched graphics can be consistent. The utility model can improve the efficiency of platemaking and reduce the platemaking time. By using multiple lenses for scanning at the same time, the platemaking time can be greatly shortened and the efficiency of platemaking can be improved. Secondly, the splicing of multiple lens groups can improve the resolution and quality of the image. Due to the splicing of multiple lenses, higher resolution images can be obtained, the precision and accuracy of platemaking can be improved, and the cost can be reduced. The utility model can improve the coverage and resolution of the graphics, and solve the problem of field of view limitation in large-format platemaking. The method of the utility model splices the images of multiple imaging lenses to achieve continuous field of view coverage, so that a larger platemaking area can be scanned. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0014] Figure 2 It is a side structural schematic diagram of the utility model;

[0015] Figure 3 This is a schematic diagram of the structure of the up and down adjustment module of the utility model;

[0016] Figure 4 This is a schematic diagram of the structure of a single imaging lens of the utility model;

[0017] Figure 5 It is a schematic diagram of the principle of the utility model.

[0018] Reference numerals:

[0019] 1. Imaging lens; 11. Magnification adjustment lens; 2. Lens mounting plate; 3. Up and down adjustment module; 31. Mounting frame; 32. Motor; 33. Screw; 34. Moving block; 35. Mounting plate; 36. Guide rail; 37. Slide; 4. Workbench; 5. Mask table; 6. Calibration camera; 7. Mask surface; 8. Work surface. DETAILED DESCRIPTION

[0020] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0023] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] It should be noted that the structures not introduced in the present invention are not related to the design points and improvement directions of the present invention, and are the same as the prior art or can be implemented by using the prior art, and will not be described in detail here. Example

[0025] See attached Figures 1 to 5 A device for achieving parfocality of an object and image of a multi-lens group includes a multi-lens group. The multi-lens group includes a plurality of imaging lenses 1 arranged side by side. Each imaging lens 1 is mounted on an independent lens mounting plate 2. The lens mounting plate 2 is mounted on the output end of an up-and-down adjustment module 3. The up-and-down adjustment module 3 is used to adjust the height of the imaging lens 1. The last lens of the imaging lens 1 is a magnification adjustment lens 11. When the magnification adjustment lens 11 is adjusted upward, the magnification becomes smaller, and when it is adjusted downward, the magnification becomes larger. A workbench 4 that can move up and down is arranged below the multi-lens group, and a mask table 5 that can be translated is arranged above it. The position of the workbench 4 is determined by the focal plane value of an imaging lens 1. This imaging lens 1 is used as a reference lens, and the upper surface of the workbench 4 is a working surface 8. The object surface of the multi-lens group is an integral mask surface 7. The mask surface 7 is fixed on the mask table 5 and moves with the mask table 5. The mask table 5 is shared by the multi-lens group. A calibration camera 6 is arranged on the workbench 4. By calibrating the camera 6 , the internal parameters of the camera (such as focal length and principal point) can be determined. The size and position of the imaging lens 1 can be calculated through accurate parameters to improve the measurement accuracy.

[0026] The up-down adjustment module 3 includes a mounting frame 31, on which a screw rod 33 is rotatably mounted, the screw rod 33 is connected to the output shaft of the motor 32, a moving block 34 is threadedly mounted on the screw rod 33, a mounting plate 35 is arranged on the moving block 34, and the lens mounting fixing plate 2 is fixed on the mounting plate 35. The mounting plate 35 is "U"-shaped, and two parallel guide rails 36 are arranged on the mounting frame 31, and two slide grooves 37 are provided on the mounting plate 35, and the slide grooves 37 are slidably sleeved on the guide rails 36. The screw rod 33 is driven to rotate by the motor 32, and the moving block 34 is driven to move up and down along the screw rod 33 under the action of the thread, thereby driving the mounting plate 35 to move up and down, thereby adjusting the up and down position of the imaging lens 1. At the same time, the slide groove 37 and the guide rail 36 are used as a guiding mechanism to make the imaging lens 1 body move in the desired direction and prevent it from deviating from the predetermined path.

[0027] A method for achieving par-focus of an object and image plane of a multi-lens assembly comprises the following steps:

[0028] S1: measure the magnification and optimal focal plane value of N imaging lenses 1 respectively and record the data;

[0029] S2: Adjust the up and down position of the magnification adjustment lens 11 of the imaging lens 1, and first adjust the magnifications of N lenses to theoretical values;

[0030] S3: Based on the magnification and focal plane value of one of the imaging lenses 1, adjust the magnification and focal plane of the other N-1 imaging lenses 1;

[0031] S4: Compared with the reference, if the position of the working surface 8 is too high, the imaging lens 1 needs to be moved up. At this time, the magnification of the imaging lens 1 will become smaller. The upward movement value of the working surface 8 is the lowering value of the imaging lens 1 * the magnification^2. The magnification is adjusted to the theoretical value by adjusting the magnification adjustment lens 11 downward.

[0032] S5: Compared with the reference, if the position of the working surface 8 is too low, the imaging lens 1 needs to be moved down. At this time, the magnification of the imaging lens 1 will become larger. The lowering value of the working surface 8 position is the upward moving value of the imaging lens 1 * the magnification ^ 2. The magnification is adjusted to the theoretical value by adjusting the magnification adjustment lens 11 upward.

[0033] S6: repeat steps S4-S5 until the magnifications and focal plane values ​​of all lenses are adjusted to theoretical values;

[0034] S7: Perform final calibration on all lenses to ensure the accuracy of magnification and focal plane values;

[0035] S8: Test the imaging effect of each lens, make adjustments and corrections to achieve the best imaging quality;

[0036] S9: Record the calibration and adjustment results of each lens for subsequent reference and maintenance.

[0037] Working principle:

[0038] The utility model adjusts the position of the imaging lens 1 by adjusting the module 3 up and down, and simultaneously adjusts the position of the workbench 4, such as Figure 5 As shown, the displacement of the imaging lens 1 is Δl, the displacement of the working surface 8 is ΔL, the magnification of the magnification adjustment lens is M, ΔL=Δl*M², that is, the lowering value of the working surface 8 is the upper displacement value of the imaging lens 1*magnification^2 (or the upper displacement value of the working surface 8 is the lowering value of the imaging lens 1*magnification^2), and each lens is adjusted to have the same magnification under the same focal plane, so that the multi-lens group object image plane is focused, and the size of the photolithography pattern can be consistent. The efficiency of platemaking can be improved, the platemaking time can be reduced, and the platemaking time can be greatly shortened and the efficiency of platemaking can be improved by using multiple lenses for scanning at the same time. Secondly, the splicing of multiple lens groups can improve the resolution and quality of the image. Due to the splicing of multiple lenses, higher resolution images can be obtained, the precision and accuracy of platemaking can be improved, and the cost can be reduced. The utility model can improve the coverage and resolution of the graphics, and solve the problem of field of view limitation in large-format platemaking. The method of the utility model splices the images of multiple imaging lenses 1 to achieve continuous field of view coverage, so that a larger platemaking area can be scanned.

[0039] The above-described embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the patent of the utility model shall be based on the attached claims.

Claims

1. A device for achieving parfocality of an object and image on a multi-lens assembly, characterized in that: The invention comprises a multi-lens group, wherein the multi-lens group comprises a plurality of imaging lenses (1) arranged side by side, each of the imaging lenses (1) being mounted on an independent lens mounting fixing plate (2), the lens mounting fixing plate (2) being mounted on the output end of an up-and-down adjustment module (3), the up-and-down adjustment module (3) being used to adjust the height of the imaging lens (1), the last lens of the imaging lens (1) being a magnification adjustment lens (11), the magnification being reduced when the magnification adjustment lens (11) is adjusted upward, and being increased when the magnification is adjusted downward, a workbench (4) which can be moved up and down is arranged below the multi-lens group, and a mask table (5) which can be translated is arranged above the workbench, the position of the workbench (4) being determined by the focal plane value of an imaging lens (1), the object plane of the multi-lens group being an integral mask surface (7), the mask surface (7) being fixed on the mask table (5) and moving with the mask table (5), and the upper surface of the workbench (4) being a working surface (8).

2. The device for achieving parfocality of a multi-lens assembly object and image plane according to claim 1, characterized in that: A calibration camera (6) is arranged on the workbench (4).

3. The device for achieving parfocality of a multi-lens assembly object and image plane according to claim 2, characterized in that: The up-and-down adjustment module (3) comprises a mounting frame (31), a screw rod (33) being rotatably mounted on the mounting frame (31), the screw rod (33) being connected to an output shaft of a motor (32), a moving block (34) being threadedly mounted on the screw rod (33), a mounting plate (35) being arranged on the moving block (34), and the lens mounting fixing plate (2) being fixed on the mounting plate (35).

4. The device for achieving parfocality of a multi-lens assembly object and image plane according to claim 3, characterized in that: The mounting plate (35) is U-shaped, and two parallel guide rails (36) are arranged on the mounting frame (31). Two slide grooves (37) are provided on the mounting plate (35), and the slide grooves (37) are slidably sleeved on the guide rails (36).

Images