Vacuum measuring device based on voltage frequency technology

Abstract

The utility model relates to the technical field of vacuum measurement, and discloses a vacuum measuring device based on the voltage frequency technology, which comprises a base structure, a driving structure is arranged at the upper end of the base structure, the driving structure is symmetrically distributed relative to the base structure, and a shell structure is arranged at the central axis of the base structure. Two sides of the shell structure are fixedly connected with the driving structure, detection structures are arranged at the front end and the rear end of the shell structure, the base structure comprises a control base, and a display screen is fixedly connected with the front end of the control base. Oscillation waveforms are digital signals, are strong in anti-interference capability and are not easy to receive external interference like analog signals, so that circuit processing is simple and reliable, cost is low, and due to the fact that digital signal processing is adopted, the vacuum degree measuring device is high in measuring sensitivity and precision and suitable for accurate vacuum degree measurement.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum measurement, and more specifically to a vacuum measurement device using a voltage-frequency technology. Background Art

[0002] The importance of thin films in modern science and technology is increasing day by day, and their application fields and scenarios are very numerous. Modern thin films are generally measured under vacuum conditions, so the measurement of vacuum degree is very necessary. A vacuum gauge is an instrument for measuring vacuum degree or air pressure. Generally, the air pressure is measured by using the change of a certain physical effect of gas under different air pressures. It is widely used in scientific research and industrial production. According to the different physical mechanisms used in the measurement principle of vacuum gauges, the main vacuum gauges can be divided into three categories, namely vacuum gauges that use mechanical properties, gas dynamic effects, and charged particle effects.

[0003] Typical vacuum gauges that utilize mechanical properties include Bourdon gauges and film capacitance gauges; typical vacuum gauges that utilize gas dynamic effects include Pirani resistance gauges and thermocouple gauges; typical vacuum gauges that utilize charged particle effects include hot cathode ionization gauges and cold cathode ionization gauges.

[0004] The conventional vacuum gauges mentioned above, regardless of the measurement principle adopted, have a relatively complex mechanical structure and require filtering, amplification and other processing of the analog small signals. Usually, analog signals are sensitive to environmental interference and are easily interfered by external signals, resulting in unstable measurement circuits or large deviations in measurement results. At the same time, the measurement circuits are more complex and the cost is increased.

[0005] This device proposes a new idea, which uses piezoelectric materials to respond to changes in vacuum pressure and output a frequency signal. The frequency signal is linearly related to the vacuum pressure. Therefore, as long as the change in the frequency signal is accurately measured, the change in vacuum pressure can be inferred, and thus the vacuum degree can be calculated.

[0006] The main components in the figure need to be marked with numbers, and there is no need to mark the size, tolerance, etc. The same component in different figures must be marked with the same number! Block diagrams can be used for electronic and communication products. Utility Model Content

[0007] In order to overcome the above-mentioned defects of the prior art, the utility model provides a vacuum measuring device using a voltage-frequency technology to solve the problems existing in the above-mentioned background technology.

[0008] The utility model provides the following technical solution: a vacuum measuring device using a pressure-frequency technology, comprising a base structure, a driving structure is arranged on the upper end of the base structure, the driving structure is symmetrically distributed about the base structure, a shell structure is arranged at the central axis of the base structure, the two sides of the shell structure are fixedly connected to the driving structure, and detection structures are arranged at the front and rear ends of the shell structure;

[0009] Furthermore, the base structure includes a control base, a display screen is fixedly connected to the front end of the control base, a connecting base is fixedly connected to the top end of the control base, and mounting holes are provided on both sides of the top end of the connecting base.

[0010] Furthermore, the driving structure includes a vacuum pump, the bottom end of the vacuum pump is fixedly connected to a stabilizing seat, the top of the stabilizing seat is provided with a fixing hole, a fixing nail is movably sleeved inside the fixing hole of the stabilizing seat, the fixing nail passes through the stabilizing seat and is fixedly connected to the connecting base, and the side of the vacuum pump is fixedly connected to a connecting port.

[0011] Furthermore, the outer shell structure includes a vacuum box, through holes are provided on both sides of the vacuum box, a connecting ring is fixedly connected to the outer side of the through hole of the vacuum box, sealing arms are fixedly connected to the front and rear ends of the vacuum box, a groove is provided on the side of the sealing arm close to the vacuum box, a fixing hole is provided on the side of the sealing arm close to the connecting ring, the sealing arm fixing hole is connected to the groove, and a fixing bolt is arranged inside the sealing arm fixing hole.

[0012] Furthermore, the detection structure includes a voltage-frequency diaphragm, and wing plates are fixedly connected to both sides of the voltage-frequency diaphragm. A fixing hole is opened at one end of the wing plate close to the voltage-frequency diaphragm, and a fixing rod is fixedly connected to one end of the wing plate away from the voltage-frequency diaphragm.

[0013] Furthermore, two electrode sheets are fixedly sleeved on the outer side of the fixed rod, and the two electrode sheets are symmetrical about the voltage-frequency diaphragm. The bottom end of the fixed rod is fixedly connected to an electric wire, the bottom end of the electric wire is fixedly connected to a frequency meter, and the bottom end of the frequency meter is fixedly connected to a connecting base.

[0014] Technical effects and advantages of the utility model:

[0015] 1. The utility model adopts a voltage-frequency diaphragm and an oscillation excitation circuit to generate an oscillation waveform, and its structure is simple.

[0016] 2. Since the oscillation waveform of the utility model is a digital signal, it has strong anti-interference ability and is not easily affected by external interference like an analog signal, so the circuit processing is simple and reliable, and the cost is low.

[0017] 3. Since the utility model adopts digital signal processing, the measurement sensitivity and accuracy of the invention are relatively high, and it is suitable for accurate vacuum degree measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0019] Figure 2 It is a schematic diagram of the base structure of the utility model.

[0020] Figure 3 It is a schematic diagram of the driving structure of the utility model.

[0021] Figure 4 It is a schematic diagram of the shell structure of the utility model.

[0022] Figure 5 It is a schematic diagram of the detection structure of the utility model.

[0023] Figure 6 It is the work flow chart of the utility model.

[0024] The accompanying drawings are marked as follows: 1. base structure; 101. control base; 102. display screen; 103. connecting base; 2. driving structure; 201. vacuum pump; 202. stabilizing seat; 203. fixing nail; 204. connecting port; 3. outer shell structure; 301. vacuum box; 302. connecting ring; 303. sealing arm; 304. fixing bolt; 4. detection structure; 401. voltage-frequency diaphragm; 402. wing plate; 403. fixing rod; 404. electrode sheet; 405. electric wire; 406. frequency measuring device. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative, and the vacuum measurement involved in the present invention is not limited to the various structures recorded in the following embodiments. All other implementations obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0026] Reference Figure 1-5 The utility model provides a vacuum measuring device of pressure-frequency technology, including a base structure 1, a driving structure 2 is arranged on the upper end of the base structure 1, the driving structure 2 is symmetrically distributed about the base structure 1, a shell structure 3 is arranged at the central axis of the base structure 1, both sides of the shell structure 3 are fixedly connected with the driving structure 2, and detection structures 4 are arranged at the front and rear ends of the shell structure 3;

[0027] The base structure 1 includes a control base 101 , a display screen 102 is fixedly connected to the front end of the control base 101 , a connecting base 103 is fixedly connected to the top of the control base 101 , and mounting holes are provided on both sides of the top of the connecting base 103 .

[0028] Among them, the driving structure 2 includes a vacuum pump 201, the bottom end of the vacuum pump 201 is fixedly connected to a stable seat 202, the top of the stable seat 202 is provided with a fixing hole, a fixing nail 203 is movably sleeved inside the fixing hole of the stable seat 202, the fixing nail 203 penetrates the stable seat 202 and is fixedly connected to the connecting base 103, and a connecting port 204 is fixedly connected to the side of the vacuum pump 201.

[0029] Among them, the outer shell structure 3 includes a vacuum box 301, through holes are opened on both sides of the vacuum box 301, a connecting ring 302 is fixedly connected to the outer side of the through hole of the vacuum box 301, and sealing arms 303 are fixedly connected to the front and rear ends of the vacuum box 301. A card slot is opened on the side of the sealing arm 303 close to the vacuum box 301, and a fixing hole is opened on the side of the sealing arm 303 close to the connecting ring 302. The fixing hole of the sealing arm 303 is connected with the card slot, and a fixing bolt 304 is arranged inside the fixing hole of the sealing arm 303.

[0030] The detection structure 4 includes a voltage-frequency diaphragm 401 , with wing plates 402 fixedly connected on both sides of the voltage-frequency diaphragm 401 . A fixing hole is provided at one end of the wing plate 402 close to the voltage-frequency diaphragm 401 , and a fixing rod 403 is fixedly connected at one end of the wing plate 402 away from the voltage-frequency diaphragm 401 .

[0031] Among them, two electrode sheets 404 are fixedly sleeved on the outer side of the fixed rod 403, and the two electrode sheets 404 are symmetrical about the voltage-frequency diaphragm 401. The bottom end of the fixed rod 403 is fixedly connected to a wire 405, the bottom end of the wire 405 is fixedly connected to a frequency meter 406, and the bottom end of the frequency meter 406 is fixedly connected to a connecting base 103.

[0032] The specific working process of the device is as follows:

[0033] 1. The sensor probe equipped with a pressure-frequency diaphragm is connected to the vacuum chamber to be measured at one end and the reference vacuum pressure is preset at the other end. When the measured vacuum pressure is different from the reference vacuum pressure, the pressure-frequency diaphragm will deform and bend to the side with lower pressure.

[0034] 2. The voltage-frequency diaphragm has two electrodes, which are connected to the oscillation excitation circuit. The oscillation excitation circuit generates an excitation signal, which is applied to the voltage-frequency diaphragm. When the pressures at both ends of the voltage-frequency diaphragm are different and the diaphragm is deformed by the pressure, the oscillation frequency of the voltage-frequency diaphragm will change. This changed frequency is fed back to the oscillation excitation circuit through the two electrodes. The oscillation excitation circuit outputs the changed frequency to the frequency measurement circuit in the form of a frequency waveform.

[0035] 3. The frequency measurement circuit counts the input frequency waveform and calculates the number of waveform pulses per unit time, thereby obtaining the frequency value of the frequency waveform.

[0036] 4. The frequency value is output to the frequency-vacuum conversion module, which converts the frequency value into a vacuum value to obtain the vacuum value of the vacuum chamber being measured at this time.

[0037] 5. Final vacuum value output.

[0038] The working principle of the utility model is as follows: before use, first check whether the device is normal to ensure that the device can operate normally when in use. When in use, the display screen 102 at the front end of the control base 101 is operated to control the value. The vacuum pump 201 is fixed to the top of the connecting base 103 through the stabilizing seat 202 and the fixing nail 203. The connecting port 204 is connected to the connecting ring 302. Since a pressure-frequency diaphragm 401 is fixed inside the vacuum box 301, a measured vacuum and a reference vacuum are formed on both sides of the vacuum box 301 respectively. Then the left-side driving structure 2 is started to change the vacuum value inside the measured vacuum. A pressure difference is formed between the measured vacuum and the reference vacuum. Since the pressure-frequency diaphragm 401 is connected to the reference vacuum through the wing plate 402, the sealing arm 303 and the fixing bolt 30 4 is fixed so that the pressure-frequency diaphragm 401 is deformed from the center point. The pressure-frequency diaphragm 401 is usually made of stainless steel, aluminum alloy, etc. The metal material has high pressure resistance and corrosion resistance, and can provide stable performance and reliable measurement results in a vacuum environment. The vibration frequency of the pressure-frequency diaphragm 401 is monitored by the fixing rod 403 and the electrode sheet 404. The wire 405 is energized so that the frequency detector 406 receives the signal. The frequency measurement circuit counts the input frequency waveform and calculates the number of waveform pulses per unit time, thereby obtaining the frequency value of the frequency waveform. The frequency value is output to the frequency-vacuum conversion module, and the frequency value is converted into a vacuum value to obtain the vacuum value of the vacuum chamber under test at this time. Finally, the vacuum value output is displayed on the display screen 102.

[0039] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A vacuum measuring device using voltage-frequency technology, comprising a base structure (1), characterized in that: A driving structure (2) is arranged at the upper end of the base structure (1), and the driving structure (2) is symmetrically distributed with respect to the base structure (1). A shell structure (3) is arranged at the central axis of the base structure (1), and both sides of the shell structure (3) are fixedly connected to the driving structure (2). Detection structures (4) are arranged at the front and rear ends of the shell structure (3).

2. A vacuum measuring device using voltage-frequency technology according to claim 1, characterized in that: The base structure (1) comprises a control base (101), the front end of the control base (101) is fixedly connected to a display screen (102), the top end of the control base (101) is fixedly connected to a connecting base (103), and mounting holes are provided on both sides of the top end of the connecting base (103).

3. A vacuum measuring device using voltage-frequency technology according to claim 1, characterized in that: The driving structure (2) comprises a vacuum pump (201), the bottom end of the vacuum pump (201) is fixedly connected to a stabilizing seat (202), the top end of the stabilizing seat (202) is provided with a fixing hole, a fixing nail (203) is movably sleeved inside the fixing hole of the stabilizing seat (202), the fixing nail (203) penetrates the stabilizing seat (202) and is fixedly connected to the connecting base (103), and a connecting port (204) is fixedly connected to the side of the vacuum pump (201).

4. A vacuum measuring device using voltage-frequency technology according to claim 1, characterized in that: The outer shell structure (3) comprises a vacuum box (301), through holes are provided on both sides of the vacuum box (301), a connecting ring (302) is fixedly connected to the outside of the through hole of the vacuum box (301), sealing arms (303) are fixedly connected to the front and rear ends of the vacuum box (301), a clamping groove is provided on the side of the sealing arm (303) close to the vacuum box (301), a fixing hole is provided on the side of the sealing arm (303) close to the connecting ring (302), the fixing hole of the sealing arm (303) is connected to the clamping groove, and a fixing bolt (304) is provided inside the fixing hole of the sealing arm (303).

5. The vacuum measuring device using voltage-frequency technology according to claim 1, characterized in that: The detection structure (4) comprises a voltage-frequency diaphragm (401), with wing plates (402) fixedly connected to both sides of the voltage-frequency diaphragm (401), a fixing hole being provided at one end of the wing plate (402) close to the voltage-frequency diaphragm (401), and a fixing rod (403) being fixedly connected to one end of the wing plate (402) away from the voltage-frequency diaphragm (401).

6. A vacuum measuring device using voltage-frequency technology according to claim 5, characterized in that: Two electrode sheets (404) are fixedly sleeved on the outer side of the fixed rod (403), and the two electrode sheets (404) are symmetrical about the voltage-frequency diaphragm (401). The bottom end of the fixed rod (403) is fixedly connected to an electric wire (405), and the bottom end of the electric wire (405) is fixedly connected to a frequency meter (406), and the bottom end of the frequency meter (406) is fixedly connected to a connecting base (103).

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