Oxide target continuous circulating sintering furnace

Abstract

The utility model relates to the technical field of sintering furnaces, in particular to an oxide target material continuous type circulation sintering furnace which comprises a furnace body and an extraction device, the lower surface of the furnace body is fixedly connected with a placing table, the surface of the furnace body is provided with a furnace cover, the surface of the placing table is provided with a controller, the surface of the furnace cover is fixedly connected with a handle, and the handle is fixedly connected with the extraction device. The extraction device is arranged on the side face of the furnace body and comprises an extraction block and an extractor. According to the utility model, through the arrangement of the extraction device, waste gas generated when the furnace body is opened is effectively extracted, the effect of discharging the waste gas is achieved, and the problems that when equipment is used and a user opens the furnace cover to take materials in the furnace body, harmful gas is easily generated due to high-temperature firing of the materials in the furnace body, and the furnace body is damaged are solved. And when the furnace body is opened to take materials, harmful waste gas quickly flows out, so that a user easily absorbs the harmful waste gas to cause certain damage to body health, and the practicability of the equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, in particular to a continuous circulating sintering furnace for oxide target materials. Background Art

[0002] A sintering furnace refers to a special equipment that allows powder compacts to obtain the required physical, mechanical properties and microstructure through sintering; the sintering furnace is used to dry the slurry on the silicon wafer, remove the organic components in the slurry, and complete the sintering of the aluminum back field and the gate line. The sintering furnace generally requires continuous cycle firing when firing oxide targets.

[0003] However, the existing processing equipment has the following shortcomings:

[0004] When the user opens the furnace cover to take the materials inside the furnace body, harmful gases are easily generated due to the high-temperature burning of the materials inside the furnace body. As the furnace body is opened to take the materials, the harmful exhaust gas flows out quickly, and the user is likely to absorb the harmful exhaust gas, causing certain damage to his health; the extracted exhaust gas is discharged into the air at will, and the harmful substances in the exhaust gas are likely to pollute the environment.

[0005] Therefore, we proposed a continuous circulating sintering furnace for oxide targets in order to solve the above-mentioned problems. Utility Model Content

[0006] The utility model aims to solve the disadvantage of the prior art that harmful waste gas easily causes certain damage to the user's body, and proposes a continuous circulating sintering furnace for oxide target materials.

[0007] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a continuous circulating sintering furnace for oxide targets, comprising a furnace body and an extraction device, the lower surface of the furnace body is fixedly connected to a placing table, the surface of the furnace body is provided with a furnace cover, the surface of the placing table is provided with a controller, the surface of the furnace cover is fixedly connected to a handle, the extraction device is arranged on the side of the furnace body, the extraction device comprises an extraction block and an extractor, the extraction block is fixedly connected to the surface of the furnace body, the extractor is fixedly connected to the side of the furnace body, and a plurality of shunt pipes are used to communicate with the extraction block.

[0008] Furthermore, a motor is fixedly connected to the surface of the extractor, and a connecting pipe is fixedly connected to the end of the extractor away from the diversion pipe. The device motor can generate suction inside the extractor, thereby reducing the situation where it is difficult to generate suction inside the extractor when the device is in use, and the exhaust gas cannot be extracted.

[0009] Furthermore, a plurality of partitions are fixedly connected inside the extraction block, and the partitions are provided to facilitate the diversion of the exhaust gas.

[0010] Furthermore, a flow groove is provided inside the extraction block, and the flow groove is provided to facilitate the collection of waste gas when it is absorbed.

[0011] Furthermore, a filtering device is provided on the side of the furnace body, and the filtering device includes a filter box and a discharge hole. The discharge hole is opened at one end of the filter box. The filter box is provided on the side of the furnace body and is fixedly connected to the connecting pipe. A filter bin is provided on the inner wall of the filter plate, and a limiting groove is provided at the bottom of the filter bin. A filter plate is provided inside the filter bin. By setting the filter plate, the discharged exhaust gas can be filtered, thereby reducing the situation where the exhaust gas is directly discharged and pollutes the environment when the equipment is in use.

[0012] Furthermore, the filter plate is clamped with the inside of the limiting groove, and one end of the filter plate away from the limiting groove is fixedly connected with a connecting plate. The limiting groove is provided to facilitate limiting the filter plate.

[0013] Furthermore, the connecting plate is snap-fitted to the surface of the filter box, and a pull handle is fixedly connected to the upper surface of the connecting plate, and the pull handle is provided to facilitate the movement of the connecting plate.

[0014] Compared with the prior art, the advantages and positive effects of the utility model are:

[0015] 1. In the utility model, when the equipment is in use, the user places the material to be fired into the furnace body, then covers the furnace cover, starts the equipment to fire the material in the furnace body, and after the equipment is fired, when the user opens the furnace cover, starts the equipment motor to drive the extractor to operate, and the extractor generates suction to the inside of the shunt pipe, and then the suction is extracted through the extraction block to the waste gas flowing out when the furnace body is opened, and the waste gas enters the shunt pipe in an orderly manner through the partition, enters the extractor and discharges the waste gas through the connecting pipe. By arranging the extraction device, the waste gas generated by the opening of the furnace body is effectively extracted, which plays a role in discharging the waste gas, reduces the situation that when the equipment is in use, when the user opens the furnace cover to take the material inside the furnace body, the material is easily generated due to the high-temperature firing inside the furnace body, and when the furnace body is opened to take the material, the harmful waste gas flows out quickly, and the user is easy to absorb the harmful waste gas, which causes certain damage to the health, thereby improving the practicality of the equipment.

[0016] 2. In the utility model, by setting a filtering device, when the equipment is in use, the extracted exhaust gas is discharged into the interior of the filter box, and then the exhaust gas is filtered through the filter plate inside the filter bin, and the filtered exhaust gas is discharged through the discharge hole. By setting the filtering device, the discharged exhaust gas is effectively filtered, which plays a role in filtering harmful gases in the exhaust gas, reduces the risk of the extracted exhaust gas being discharged into the air at will when the equipment is in use, and the harmful substances in the exhaust gas are easy to pollute the environment, thereby improving the safety of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A three-dimensional structural schematic diagram of a continuous circulating sintering furnace for oxide targets is provided for the utility model;

[0018] Figure 2 The utility model provides a side view of the structure of a continuous circulating sintering furnace for oxide targets;

[0019] Figure 3 A partial structural schematic diagram of a continuous circulating sintering furnace for oxide targets proposed in the utility model;

[0020] Figure 4 The utility model proposes a continuous circulating sintering furnace for oxide targets. Figure 3 Schematic diagram of the structure at A in the middle;

[0021] Figure 5 The utility model provides a structural schematic diagram of a filtering device for a continuous circulating sintering furnace for oxide targets.

[0022] Legend: 1. Furnace body; 2. Placement table; 3. Controller; 4. Furnace cover; 5. Handle; 6. Extraction device; 61. Extraction block; 62. Diverter pipe; 63. Extractor; 64. Motor; 65. Connecting pipe; 66. Partition; 67. Flow slot; 7. Filter device; 71. Filter box; 72. Filter bin; 73. Limiting slot; 74. Connecting plate; 75. Filter plate; 76. Discharge hole; 77. Pull handle. DETAILED DESCRIPTION

[0023] See also Figure 1-5 The utility model provides a technical solution: a continuous circulating sintering furnace for oxide targets, comprising a furnace body 1 and an extraction device 6, a placing table 2 is fixedly connected to the lower surface of the furnace body 1, a furnace cover 4 is arranged on the surface of the furnace body 1, a controller 3 is arranged on the surface of the placing table 2, and a handle 5 is fixedly connected to the surface of the furnace cover 4.

[0024] The specific configuration and functions of the extraction device 6 and the filtering device 7 will be described in detail below.

[0025] In this embodiment: the extraction device 6 is arranged on the side of the furnace body 1, and the extraction device 6 includes an extraction block 61 and an extractor 63. The extraction block 61 is fixedly connected to the surface of the furnace body 1, and the extractor 63 is fixedly connected to the side of the furnace body 1. A plurality of shunt pipes 62 are used to communicate between the extractor 63 and the extraction block 61.

[0026] Specifically, a motor 64 is fixedly connected to the surface of the extractor 63 , and a connecting pipe 65 is fixedly connected to one end of the extractor 63 away from the shunt pipe 62 .

[0027] In this embodiment: suction can be generated inside the extractor 63 through the device motor 64, which reduces the situation where it is difficult to generate suction inside the extractor 63 when the device is in use and the exhaust gas cannot be extracted.

[0028] Specifically, a plurality of partitions 66 are fixedly connected inside the extraction block 61, and the partitions 66 are provided to facilitate the diversion of the exhaust gas.

[0029] Specifically, a flow groove 67 is provided inside the extraction block 61, and the flow groove 67 is provided to facilitate the collection of the exhaust gas when it is absorbed.

[0030] In this embodiment: a filter device 7 is provided on the side of the furnace body 1, and the filter device 7 includes a filter box 71 and a discharge hole 76. The discharge hole 76 is provided at one end of the filter box 71. The filter box 71 is provided on the side of the furnace body 1 and is fixedly connected to the connecting pipe 65. A filter bin 72 is provided on the inner wall of the filter plate 75. A limiting groove 73 is provided at the bottom of the filter bin 72. A filter plate 75 is provided inside the filter bin 72.

[0031] In this embodiment, by providing the filter plate 75, the discharged waste gas can be filtered, thereby reducing the pollution to the environment caused by direct discharge of waste gas when the equipment is in use.

[0032] Specifically, the filter plate 75 is clamped with the inside of the limiting groove 73 , and one end of the filter plate 75 away from the limiting groove 73 is fixedly connected with the connecting plate 74 . The limiting groove 73 is provided to facilitate limiting the filter plate 75 .

[0033] Specifically, the connecting plate 74 is snap-fitted to the surface of the filter box 71 , and a pull handle 77 is fixedly connected to the upper surface of the connecting plate 74 . The pull handle 77 is provided to facilitate the movement of the connecting plate 74 .

[0034] Working principle: When the equipment is in use, the user places the material to be fired into the furnace body 1, then covers the furnace cover 4, starts the equipment to fire the material inside the furnace body 1, and after the equipment is fired, when the user opens the furnace cover 4, starts the equipment motor 64 to drive the extractor 63 to operate, and the extractor 63 generates suction inside the shunt pipe 62, and then the suction is extracted through the extraction block 61 to the exhaust gas flowing out when the furnace body 1 is opened, and the exhaust gas enters the shunt pipe 62 in an orderly manner through the partition 66 and enters The extractor 63 discharges exhaust gas through the connecting pipe 65. By setting up the extraction device 6, the exhaust gas generated by the opening of the furnace body 1 can be effectively extracted, thereby playing the role of exhausting the exhaust gas and reducing the situation when the equipment is in use. When the user opens the furnace cover 4 to take the materials inside the furnace body 1, harmful gases are easily generated due to the high-temperature burning of the materials inside the furnace body 1. As the furnace body 1 is opened to take the materials, the harmful exhaust gas flows out quickly, and the user is easy to absorb the harmful exhaust gas, causing certain damage to the health, thereby improving the practicability of the equipment.

[0035] When the equipment is in use, the extracted exhaust gas is discharged into the interior of the filter box 71, and then the exhaust gas is filtered through the filter plate 75 in the filter bin 72, and the filtered exhaust gas is discharged through the discharge hole 76. By setting the filter device 7, the discharged exhaust gas is effectively filtered, which plays a role in filtering harmful gases in the exhaust gas, reduces the risk of the extracted exhaust gas being discharged into the air at will when the equipment is in use, and the harmful substances in the exhaust gas are easy to pollute the environment, thereby improving the safety of the equipment.

Claims

1. A continuous circulating sintering furnace for oxide targets, comprising a furnace body (1) and an extraction device (6), characterized in that: The lower surface of the furnace body (1) is fixedly connected to a placement table (2), the surface of the furnace body (1) is provided with a furnace cover (4), the surface of the placement table (2) is provided with a controller (3), the surface of the furnace cover (4) is fixedly connected to a handle (5), the extraction device (6) is provided on the side of the furnace body (1), the extraction device (6) comprises an extraction block (61) and an extractor (63), the extraction block (61) is fixedly connected to the surface of the furnace body (1), the extractor (63) is fixedly connected to the side of the furnace body (1), and the extractor (63) is connected to the extraction block (61) by using a plurality of shunt pipes (62).

2. The continuous circulating sintering furnace for oxide targets according to claim 1, characterized in that: A motor (64) is fixedly connected to the surface of the extractor (63), and a connecting pipe (65) is fixedly connected to one end of the extractor (63) away from the shunt pipe (62).

3. The continuous circulating sintering furnace for oxide targets according to claim 2, characterized in that: A plurality of partitions (66) are fixedly connected inside the extraction block (61).

4. The continuous circulating sintering furnace for oxide targets according to claim 3, characterized in that: A circulation groove (67) is provided inside the extraction block (61).

5. The continuous circulating sintering furnace for oxide targets according to claim 1, characterized in that: A filter device (7) is provided on the side of the furnace body (1), the filter device (7) comprising a filter box (71) and a discharge hole (76), the discharge hole (76) being provided at one end of the filter box (71), the filter box (71) being provided on the side of the furnace body (1) and fixedly connected to the connecting pipe (65), a filter bin (72) being provided on the inner wall of the filter box (71), a limiting groove (73) being provided at the bottom of the filter bin (72), and a filter plate (75) being provided inside the filter bin (72).

6. The continuous circulating sintering furnace for oxide targets according to claim 5, characterized in that: The filter plate (75) is clamped with the interior of the limiting groove (73), and one end of the filter plate (75) away from the limiting groove (73) is fixedly connected to a connecting plate (74).

7. The continuous circulating sintering furnace for oxide targets according to claim 6, characterized in that: The connecting plate (74) is snap-fitted to the surface of the filter box (71), and a pull handle (77) is fixedly connected to the upper surface of the connecting plate (74).

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