Modularized high-temperature tubular heating assembly and tubular heating furnace

Abstract

The utility model discloses a modularized high-temperature tubular heating assembly and a tubular heating furnace. The device comprises a furnace tube, an annular heating body and a contact electrode, when the modular high-temperature tubular heating assembly is combined, the annular heating body is arranged outside the furnace tube in a sleeving mode and can slide in the axial direction of the furnace tube, and the contact electrode is arranged in the axial direction, so that multiple positions where the annular heating body slides in the axial direction can make conductive contact with the contact electrode. The utility model provides a brand-new tube furnace design, the modularized annular heating bodies are adopted and can be arranged on the periphery of the furnace tube in a sleeving manner and slide in the radial direction of the furnace tube, and the positions and the number of the annular heating bodies can be flexibly set; the contact electrode arranged along the axial direction can ensure that the annular heating body at different positions is in conductive contact with the contact electrode, so that the flexible adjustment of the heating area and position is realized, the modular design enables the heating element to be easier to install and replace, various limitations of the traditional tube furnace are overcome, and the performance and the applicability of the tube furnace are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment, in particular to a modular high-temperature tubular heating component and a tubular heating furnace. Background Art

[0002] As a widely used heating equipment in the field of heat treatment and laboratory, tube furnace has made significant progress in many aspects, but it still has some limitations in the face of special needs and technical challenges. The traditional tube furnace design has some shortcomings in some aspects, and more innovative solutions are needed to meet the increasingly complex industrial and laboratory needs.

[0003] The shortcomings of traditional tube furnaces are as follows:

[0004] The problem of difficulty in setting the heating temperature zone of the traditional tube furnace in detail: Since the heating elements of the traditional tube furnace have been fixed in the furnace, it is not easy to achieve modular heating, and the area and position adjustment of the heating area are extremely difficult; the problem of limited heating speed of the traditional tube furnace: when the traditional tube furnace needs to reach an ultra-high temperature, the heating speed is not good, which limits its application in some special experiments and processes. The problem of relatively high energy consumption of the traditional tube furnace: the traditional tube furnace cannot reach the target heating temperature in a short time, and it takes a long time to preheat to reach the target temperature, resulting in high energy consumption, especially in the scene with high requirements for rapid heating, its performance is relatively unfavorable. Limited temperature range: the traditional tube furnace cannot effectively heat to more than 3000 degrees Celsius, forcing the need to turn to other heating instruments, such as graphite furnaces, in high-temperature experiments and processes, but this also introduces new problems, such as the large size of the graphite furnace and the slow heating speed. High maintenance cost: the traditional tube furnace uses resistance wire as the heating element and embeds it in the tube furnace. When the resistance wire is damaged, the maintenance cost is greatly increased. Utility Model Content

[0005] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a modular high-temperature tubular heating assembly and a tubular heating furnace.

[0006] In order to achieve the above-mentioned utility model purpose, the technical solution adopted by the utility model includes:

[0007] In the first aspect, the utility model provides a modular high-temperature tubular heating component, comprising a furnace tube, an annular heating body and a contact electrode; when the modular high-temperature tubular heating component is assembled, the annular heating body is sleeved outside the furnace tube and can slide along the axial direction of the furnace tube, and the contact electrode is arranged along the axial direction so that the annular heating body can be in conductive contact with the contact electrode at multiple positions when sliding in the axial direction.

[0008] In a second aspect, the utility model also provides a modular high-temperature tubular heating furnace, comprising a temperature control component and the above-mentioned modular high-temperature tubular heating component; the temperature control component is electrically connected to the contact electrodes in the modular high-temperature tubular heating component.

[0009] Based on the above technical solution, compared with the prior art, the beneficial effects of the utility model at least include:

[0010] The utility model proposes a brand-new tubular furnace design. By adopting a modular annular heating body, it can be sleeved on the outer circumference of the furnace tube and slide along the radial direction of the furnace tube, and the position and number of the annular heating body can be flexibly set. The contact electrodes arranged along the axial direction can ensure that the annular heating body at different positions is in conductive contact with the contact electrodes, thereby realizing flexible adjustment of the heating area and position. The modular design makes the heating element easier to install and replace, overcomes various limitations of traditional tubular furnaces, and greatly improves its performance and applicability.

[0011] The above description is only an overview of the technical solution of the utility model. In order to enable those skilled in the art to more clearly understand the technical means of the present application and implement them according to the contents of the specification, the following is a preferred embodiment of the utility model with detailed drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of a modular high-temperature tubular heating furnace provided by a typical implementation case of the utility model;

[0013] Figure 2 It is a partial structural schematic diagram of a modular high-temperature tubular heating assembly provided in a typical implementation case of the utility model;

[0014] Figure 3 It is a partial structural schematic diagram of a modular high-temperature tubular heating assembly provided in a typical implementation case of the utility model;

[0015] Figure 4 It is a partial structural schematic diagram of a modular high-temperature tubular heating assembly provided in a typical implementation case of the utility model;

[0016] Figure 5 It is a structural schematic diagram of an annular heating body in a modular high-temperature tubular heating assembly provided in a typical implementation case of the utility model;

[0017] Figure 6 It is a structural schematic diagram of an annular heat-insulating accessory in a modular high-temperature tubular heating assembly provided in a typical implementation case of the utility model.

[0018] Description of reference numerals:

[0019] 1. Temperature regulator; 2. Time regulator; 3. Frequency regulator; 4. Temperature control component; 5. First insulation body; 6. First electrode; 7. Second electrode; 8. Second insulation body; 9. Furnace tube; 10. Annular heating body; 11. Annular insulation accessories; 12. Ceramic inner wall; 13. Carbon material heating element; 14. Ceramic outer wall; 15. Conductive electrode; 16. Conductive electrode. DETAILED DESCRIPTION

[0020] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the utility model after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0022] Moreover, relational terms such as “first” and “second” are merely used to distinguish one component or method step from another with the same name, but do not necessarily require or imply any such actual relationship or order between these components or method steps.

[0023] During the research and development of the present invention, it was found that the tubular CVD furnace used for preparing materials such as carbon nanotubes has many disadvantages, including but not limited to:

[0024] 1. Inability to perform pulse heating: Traditional tube furnaces have limited performance in pulse heating, which limits their application in some special processes, such as the field of nanomaterials.

[0025] 2. It is not easy to carry out modular heating: Since the heating elements of the traditional tube furnace have been fixed in the furnace, it is not easy to implement modular heating. The size and position of the heating zone are difficult to adjust, and it is impossible to achieve detailed control of the temperature field distribution.

[0026] 3. Limited heating speed: Traditional tubular furnaces have limitations on heating speed, especially when high temperatures need to be reached, which limits their application in some special experiments and processes.

[0027] 4. Relatively high energy consumption: Traditional tubular furnaces cannot reach the target heating temperature in a short time and require a long time of preheating to reach the target temperature, which results in high energy consumption and is relatively unfavorable in scenarios with high requirements for rapid heating.

[0028] 5. Limited temperature range: Traditional tube furnaces cannot effectively heat above 3000 degrees Celsius, resulting in the need to turn to other heating instruments such as graphite furnaces in high-temperature experiments and processes, but this also introduces new problems, such as the large size of graphite furnaces and slow heating rates.

[0029] 6. High maintenance cost: Traditional tube furnaces use resistance wire as heating elements and embed it into the tube furnace. When the resistance wire is damaged, the maintenance cost is greatly increased.

[0030] In response to the above disadvantages, the utility model aims to design a modular heating assembly so that the heating part can be easily installed and replaced, and the flexibility and maintenance convenience of the furnace body can be improved. The utility model aims to provide a tubular furnace with excellent heating speed, which can reach the target temperature more quickly and efficiently in the scene with high temperature requirements, and can more finely control the temperature field distribution in the furnace.

[0031] See here Figure 1 The embodiment of the utility model provides a modular high-temperature tubular heating furnace as a whole, which includes a temperature control component 4 and a modular high-temperature tubular heating component provided by any of the following embodiments; the temperature control component 4 is conductively connected to the contact electrodes in the modular high-temperature tubular heating component.

[0032] See also Figure 2-Figure 6 An embodiment of the utility model provides a modular high-temperature tubular heating component, which includes a furnace tube 9, an annular heating body 10 and a contact electrode; when the modular high-temperature tubular heating component is assembled, the annular heating body 10 is sleeved outside the furnace tube 9 and can slide along the axial direction of the furnace tube 9, and the contact electrode is arranged along the axial direction so that the multiple positions of the annular heating body 10 when sliding in the axial direction can all be in conductive contact with the contact electrode.

[0033] In the above technical solution, the annular heating body 10 can be set with different widths and quantities accordingly, and the sliding sleeve is arranged outside the furnace tube 9, thereby realizing modular temperature zone control that is easy to adjust and combine.

[0034] Furthermore, in order to achieve more refined temperature field control, the utility model also provides a technical solution in which an annular heating body 10 is matched with an annular heat insulation accessory 11. Specifically, the modular high-temperature tubular heating assembly also includes an annular heat insulation accessory 11, which is used to combine with the annular heating body 10 to adjust the temperature field in the furnace tube 9.

[0035] The annular heat-insulating fittings 11 can be arranged in a variety of ways, one of which is to be directly sleeved outside the furnace tube 9 and arranged in parallel with the annular heating body 10 along the axial direction, so that the annular heating body 10 is spaced and positioned and the furnace tube 9 is regionally insulated, and the temperature field distribution therein is adjusted; or, some annular heat-insulating fittings 11 are sleeved outside the annular heating body 10, wrapping the annular heating body 10, forming additional insulation for the annular heating body 10, and also reducing its heat loss, thereby increasing the proportion of its heat acting on the corresponding area of ​​the furnace tube 9, and finely regulating the temperature distribution. Or there are multiple annular heat-insulating fittings 11, some of which play the first role, and the other part plays the second role.

[0036] As for the material of the annular heat-insulating accessory 11, it can be made of insulating and heat-retaining inorganic porous foam and other materials.

[0037] As for the specific conduction method, in some embodiments, the annular heating body 10 includes an annular carbon material heating element 13 and conductive electrodes 15 and 16 electrically contacting the carbon material heating element 13; when the modular high-temperature tubular heating assembly is combined, the contact electrode contacts the conductive electrodes 15 and 16.

[0038] Of course, if the conducting electrodes 15 and 16 are not provided, and the contact electrode is directly in contact with the carbon material heating element 13, the same conduction effect can be achieved, but this method is not conducive to the sealing protection of the carbon material heating element 13 and may be more suitable for heating scenarios at lower temperatures.

[0039] Among them, the material of the carbon material heating element 13 is preferably graphene or carbon nanotubes, etc. The excellent performance of graphene gives the furnace body excellent pulse heating capability, the convenience of modular heating, excellent heating speed, more energy-saving operation and expanded temperature range, making it capable of meeting a wider range of experimental and process requirements.

[0040] As for the spatial distribution of the conducting electrodes 15 and 16, in some embodiments, the conducting electrodes 15 and 16 are arranged on the outer peripheral surface of the annular heating body 10, and the number of the conducting electrodes 15 and 16 is multiple, and the multiple conducting electrodes 15 and 16 are arranged far away from each other on the annular heating body. In this way, the electrodes are far apart, which is convenient for arranging the circuit and has higher safety.

[0041] As for the specific arrangement of the contact electrode, in some embodiments, the contact electrode includes a plurality of strip electrodes, the length direction of the strip electrodes is parallel to the axial direction, and the spatial arrangement corresponds to the spatial position of the plurality of the conducting electrodes 15 and 16. Thus, the position of one or more annular heating bodies 10 can be infinitely adjusted along the axial direction, which is very flexible. However, the feasible implementation of the utility model is not limited to this. If a plurality of contacts arranged linearly are arranged in the general direction of the axial direction so that the position can be adjusted between a plurality of fixed positions, the same modular effect can be achieved, which also falls within the protection scope of the utility model.

[0042] In some more preferred embodiments, the annular heating body 10 can be selectively set to one or more combinations, and its position can be flexibly adjusted; the contact surface of the conductive electrodes 15, 16 and the strip electrodes is provided with a mosaic structure to fix the relative position of the conductive electrodes 15, 16 after they collide with the strip electrodes.

[0043] The interlocking structure is, for example, a strip electrode surface with some raised rails, and the contact points of the conducting electrodes 15 and 16 have corresponding grooves, which are interlocked with each other so that the relative position is fixed, the conduction stability and assembly convenience are improved, and the contact is good.

[0044] In order to fully protect the carbon material at high temperature, in some embodiments, the annular heating body 10 may also include an annular shell that completely encloses the carbon material heating element 13, and the conductive electrodes 15 and 16 radially pass through the annular shell from the carbon material heating element 13 and are exposed outside the annular shell.

[0045] More specifically, in some embodiments, the annular shell includes a ceramic inner wall 12 arranged on the inner circumference of the annular heating body 10, a ceramic outer wall 14 arranged on the outer circumference, and ceramic end walls arranged on both end surfaces. The ceramic inner wall 12, the ceramic outer wall 14 and the ceramic end walls are melt-welded to form an overall enclosed space, and the conductive electrodes 15 and 16 are melt-welded and sealed with the ceramic outer wall 14; and the overall enclosed space is in a vacuum state.

[0046] In addition, in some embodiments, the modular high-temperature tubular heating assembly also includes a heat-insulating fixing structure for fixing the relative positions of the furnace tube 9, the annular heating body 10, the contact electrode, and the annular insulation accessory 11, and performing heat insulation.

[0047] For details, see Figure 2-Figure 4As shown, in some embodiments, the thermal insulation fixing structure includes a first thermal insulation body 5 and a second thermal insulation body 8, which are combined to form a accommodating chamber, and both ends of the accommodating chamber have through holes so that the furnace tube 9 can pass through the accommodating chamber; the annular heating body 10 and the contact electrode are arranged in the accommodating chamber, and the contact electrode includes a first electrode 6 and a second electrode 7, the first electrode 6 is fixed on the surface of the first thermal insulation body 5, and the second electrode 7 is fixed on the surface of the second thermal insulation body 8.

[0048] In combination with the above technical solutions, some key features of a tubular furnace and a heating assembly used therein provided by the embodiment of the utility model are:

[0049] Graphene protection measures: Select high-quality graphene, carbon nanotubes and other carbon materials to ensure their thermal conductivity and high-temperature stability. Use an annular double-layer quartz tube, fill the two layers of quartz wall with graphene to form a graphene barrier. After filling with graphene, evacuate the tube with protective gas and seal the quartz tube to ensure the stability of graphene when heated.

[0050] Electrode design and sealing: Tungsten material is embedded in the outer surface of the quartz tube as an electrode to ensure good current conduction and stability at high temperatures. Through welding and sealing, the tungsten electrode is tightly combined with the ceramic to ensure the sealing of the heating element. The electrode shape is optimized to increase the contact area with graphene and improve the conductivity efficiency.

[0051] Modular structure design: The annular heating body 10 is designed as a modular structure, and each module contains graphene, quartz tube, electrodes and other components. Each module can be controlled independently, which is convenient for adjusting the heating area and temperature distribution and improving the flexibility of heating.

[0052] Contact electrode design: upper and lower contact electrodes are arranged in the upper second heat preservation body 8, so that they can conduct electricity after contacting with the upper and lower electrodes of the heating module, ensuring good physical contact between the electrodes and the graphene, and reducing the contact resistance. The electrode surface is specially treated to increase the high temperature resistance and corrosion resistance.

[0053] Power supply design: In some implementation cases, a new power supply control system is designed to support the switching between pulse heating and constant temperature heating. Advanced current regulation technology is introduced to ensure that the intensity and frequency of the current can be accurately controlled in pulse mode. Rapid temperature rise during pulse heating and stable temperature maintenance during constant temperature heating are achieved.

[0054] The technical solution of the utility model is further described in detail below through several embodiments and in combination with the accompanying drawings. However, the selected embodiments are only used to illustrate the utility model, and do not limit the scope of the utility model.

[0055] Example 1

[0056] This embodiment provides a tubular furnace, comprising the following components: a first heat preservation body 5 , a second heat preservation body 8 , a quartz furnace tube 9 , a modular annular heating body 10 , an annular heat insulation accessory 11 , and a temperature control component 4 .

[0057] The first heat-insulating body 5 and the second heat-insulating body 8 are connected by hinges for opening and closing, wherein the heat-insulating layer is made of high-temperature resistant materials such as ceramic fiber or rock wool, and a space for the heating element and the quartz tube is reserved in the middle, and the strip-shaped first electrode 6 and the second electrode 7 are embedded in the heat-insulating layer with high-temperature resistant conductive materials, respectively on the first heat-insulating body 5 and the second heat-insulating body 8. A modular heating element is used as shown in the figure, and the heating area is adjusted by adding modules.

[0058] The modular annular heating body 10 is a graphene heating module, which adopts a cylindrical sealed package. The outer layer material is made of high-temperature resistant quartz. If it is to be heated to above 3000 degrees Celsius, other high-temperature resistant materials must be used. The electrodes on the cylinder are directly contacted and connected with the graphene, and the electrodes can be made of high-temperature resistant materials such as tungsten and molybdenum.

[0059] After placing an appropriate amount of annular heating body 10 and annular heat-insulating accessories 11 at the selected positions of the quartz furnace tube 9, put them into the heating table, align and abut the protruding conductive electrodes 15 and 16 with the contact electrodes in the insulation body, then put in the heated material, and then use the temperature regulator 1, time regulator 2, and frequency regulator 3 on the main control panel to set the temperature, time, and frequency.

[0060] As for the specific structure of the annular heating body 10, this embodiment adopts Figure 5 The annular device shown seals the graphene, which can keep the graphene's physical and chemical properties at over 300 degrees. The electrode material is selected according to the required heating temperature. Molybdenum can be selected below 2600 degrees Celsius, and tungsten can be selected below 3400 degrees Celsius. If the heating temperature is below 1000 degrees Celsius, copper, silver and other electrodes can also be selected.

[0061] As for the temperature control component 4, this embodiment can use pulse current, and the purpose of pulse heating and constant temperature heating can be achieved by adjusting the frequency knob.

[0062] Compared with the prior art, it brings many significant advantages and positive effects, which are mainly due to the introduction of innovative modular annular heating body 10, annular heat insulation accessories 11 and modular design. In this embodiment, modular heating achieves flexibility and maintenance convenience: the modular design makes the annular heating body 10 easier to install and replace. This flexibility not only improves the practicality of the tube furnace, but also reduces maintenance costs and reduces downtime caused by component damage.

[0063] And, the heating speed is significantly improved: through structural optimization and reasonable selection of heating materials, the utility model realizes a significant improvement in the heating speed of the tube furnace. The fast heating speed enables the tube furnace to more efficiently cope with the heating requirements in experiments and processes, and improves production efficiency.

[0064] And, energy-saving design reduces energy consumption: using the excellent performance of graphene, the utility model effectively reduces the energy consumption of the tube furnace. It can quickly reach the target temperature in a short time, reduce the preheating time, improve energy utilization efficiency, and conform to the energy-saving concept of sustainable development.

[0065] And it can achieve ultra-high heating temperature: by adopting the annular heating body 10, the utility model successfully expands the temperature range of the tube furnace and can effectively heat to above 3000 degrees Celsius.

[0066] Different from the present embodiment, based on the basic technical concept provided by the present invention, the heating material can be replaced by other types of heating materials, such as graphene film, carbon nanotube film, printed and sprayed carbon heating materials, etc., depending on different heating requirements. The electrode material can be selected as high melting point metals such as molybdenum and tungsten; graphite; it can also be replaced by copper, which can be used for heating below 1000 degrees, etc. The heating module and the corresponding furnace tube 9 can adopt other shapes, such as rectangular parallelepiped, triangular prism, etc. The present embodiment realizes pulse heating. By adopting pulse power supply and graphene heating material, the pulse heating conditions required in nanomaterial research are realized. Of course, in addition to pulse heating, continuous heating can also be selected.

[0067] The above-mentioned different implementations can all realize the replaceability of modular heating elements: reduce the difficulty and cost of replacing elements, reduce maintenance costs, and improve the maintainability and service life of the equipment.

[0068] Therefore, it can be clearly seen that the embodiment of the utility model proposes a new tubular furnace design. By adopting modular annular heating bodies 10 and annular thermal insulation accessories 11, they can be sleeved on the outer periphery of the furnace tube 9 and slide radially along the furnace tube 9, and the positions and numbers of the annular heating bodies 10 and the annular thermal insulation accessories 11 can be flexibly set. The contact electrodes arranged along the axial direction can ensure that the annular heating bodies 10 at different positions are in conductive contact with the contact electrodes, thereby realizing flexible adjustment of the heating area and position, and more finely adjusting the heating temperature field distribution. The modular design makes the heating elements easier to install and replace, overcomes the various limitations of traditional tubular furnaces, and greatly improves its performance and applicability.

[0069] It should be understood that the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A modular high temperature tubular heating assembly, characterized in that: It includes a furnace tube, a ring-shaped heating body and a contact electrode; When the modular high-temperature tubular heating assembly is assembled, the annular heating body is sleeved outside the furnace tube and can slide along the axial direction of the furnace tube. The contact electrode is arranged along the axial direction so that the multiple positions of the annular heating body when sliding in the axial direction can all be in conductive contact with the contact electrode.

2. The modular high temperature tubular heating assembly according to claim 1, characterized in that: Also included is an annular heat-insulating accessory, which is used to be combined with the annular heating body to adjust the temperature field in the furnace tube; The annular heat-insulating accessory is sleeved outside the furnace tube and arranged in parallel with the annular heating body along the axial direction, and / or sleeved outside the annular heating body to wrap the annular heating body.

3. The modular high temperature tubular heating assembly according to claim 1, characterized in that: The annular heating body comprises an annular carbon material heating element and a conducting electrode electrically contacting the carbon material heating element; When the modular high-temperature tubular heating assembly is assembled, the contact electrode abuts against the conductive electrode.

4. The modular high temperature tubular heating assembly according to claim 3, characterized in that: The conducting electrode is arranged on the outer peripheral surface of the annular heating body, and the number of the conducting electrodes is multiple, and the multiple conducting electrodes are dispersedly arranged away from each other on the annular heating body.

5. The modular high temperature tubular heating assembly according to claim 4, characterized in that: The contact electrode includes a plurality of strip electrodes, the length direction of the strip electrodes is parallel to the axial direction, and the spatial arrangement of the strip electrodes corresponds to the spatial positions of the plurality of conducting electrodes.

6. The modular high temperature tubular heating assembly according to claim 5, characterized in that: The annular heating body may be optionally provided as one or more; The contact surface between the conducting electrode and the strip electrode is provided with an interlocking structure so that the relative position between the conducting electrode and the strip electrode is fixed after the conducting electrode and the strip electrode collide with each other.

7. The modular high temperature tubular heating assembly according to claim 3, characterized in that: The annular heating body further comprises an annular shell which completely encloses the carbon material heating element. The conducting electrode passes through the annular shell in radial direction from the carbon material heating element and is exposed outside the annular shell.

8. The modular high temperature tubular heating assembly according to claim 7, characterized in that: The annular shell comprises a ceramic inner wall arranged on the inner circumference of the annular heating body, a ceramic outer wall arranged on the outer circumference, and ceramic end walls arranged on both end surfaces, the ceramic inner wall, the ceramic outer wall and the ceramic end walls are melt-welded to form an integral closed space, and the conducting electrode is melt-welded and sealed with the ceramic outer wall; And the whole enclosed space is in a vacuum state.

9. The modular high temperature tubular heating assembly according to claim 3, characterized in that: The modular high-temperature tubular heating assembly also includes a heat-insulating fixing structure for fixing the relative positions of the furnace tube, the annular heating body and the contact electrode, and performing heat insulation; The heat-insulating fixing structure comprises a first heat-insulating body and a second heat-insulating body, wherein the first heat-insulating body and the second heat-insulating body are combined to form a containing chamber, and through holes are provided at both ends of the containing chamber so that the furnace tube can pass through the containing chamber; The annular heating body and the contact electrode are arranged in the accommodating chamber, and the contact electrode includes a first electrode and a second electrode. The first electrode is fixedly arranged on the surface of the first heat-insulating body, and the second electrode is fixedly arranged on the surface of the second heat-insulating body.

10. A modular high temperature tubular heating furnace, characterized in that: It comprises a temperature control component and a modular high-temperature tubular heating component as described in any one of claims 1 to 9; The temperature control component is electrically connected to the contact electrodes in the modular high-temperature tubular heating component.

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