Bushing assembly and thin film deposition equipment

Abstract

The utility model discloses a lining assembly and thin film deposition equipment, the thin film deposition equipment comprises a reaction chamber, the reaction chamber comprises a chamber body, a heating disc and a lining assembly, the lining assembly comprises a lining and an adjusting structure, the lining is provided with at least three mounting parts, the three mounting parts are distributed along the circumferential direction of the lining, and the adjusting structure is arranged on the lining. Each mounting part is provided with a group of adjusting structures, each group of adjusting structures comprises an eccentric part and a fastening part, the eccentric part is mounted in the mounting part of the bushing, the fastening part is eccentrically connected with the eccentric part, the fastening part is further fastened with the positioning hole in the cavity, and the bushing is fixed on the cavity through the fastening part. Therefore, the position of the eccentric part in the mounting part is adjustable, the relative position of the lining is determined by adjusting the positions of the eccentric parts of the three groups of adjusting structures, errors during centering adjustment of the heating disc are compensated, it is guaranteed that gaps between the lining and the heating disc are circumferentially and uniformly distributed, and the film deposition effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a bushing component and a thin film deposition device. Background Art

[0002] In the design and manufacturing process of thin film deposition equipment, it is crucial to ensure the uniformity of the gap between the heating plate and the bushing. This is because the uniformity of the gap value directly affects the effect of thin film deposition, and thus affects the quality of the final product. At present, the existing thin film deposition machines have obvious limitations in dealing with this problem. On the one hand, some machines use three circumferential positioning grooves to ensure the position of the bushing. Although this method is simple, the position of the bushing cannot be adjusted. Therefore, it is necessary to rely on the absolute center position of the heating plate to ensure the uniformity of the gap. Any slight deviation will cause uneven gaps, which in turn affects the uniformity of thin film deposition. On the other hand, another existing technology uses a floating bushing. Although a certain adjustment is allowed, in the actual process, factors such as airflow may cause the bushing to deviate slightly, resulting in uneven gaps. Utility Model Content

[0003] The embodiments of the utility model provide a bushing assembly and a thin film deposition device, which are intended to solve the problem of uneven gap between the heating disk and the bushing when the existing heating disk is not absolutely centered.

[0004] In the first aspect, the utility model provides a bushing assembly, comprising: a bushing and an adjustment structure, wherein the bushing is provided with at least three mounting parts along its own circumferential direction, each mounting part is configured with a group of the adjustment structures, each group of the adjustment structures comprises an eccentric piece and a fastener, the eccentric piece is installed in the mounting part and has a clearance fit with the mounting part, and the fastener passes through the eccentric piece and is eccentrically connected to the eccentric piece.

[0005] Further, the bushing includes an annular body, and the annular body includes an annular upper surface and an annular lower surface facing each other;

[0006] Wherein, the mounting portion is a mounting hole penetrating the annular upper surface and the annular lower surface; or, the mounting portion is a mounting groove provided on the annular lower surface.

[0007] Furthermore, the mounting hole comprises a first arc-shaped hole segment, a second arc-shaped hole segment and a straight hole segment, the straight hole segment extends radially along the annular body, and the first arc-shaped hole segment and the second arc-shaped hole segment are respectively arranged on both sides of the extension direction of the straight hole segment.

[0008] Furthermore, the mounting groove includes an arc-shaped groove body and a straight groove body, the straight groove body extends radially along the annular body, one end of the straight groove body away from the center of the annular body passes through the outer ring edge of the annular body, and the arc-shaped groove body is arranged on a side of the straight groove body close to the center of the annular body.

[0009] Furthermore, the bushing assembly also includes a centering tool, which includes an annular tool body and tool holes. The number of the tool holes matches the number of the mounting parts. A plurality of the tool holes are arranged on the annular tool body along the circumferential direction of the annular tool body. The tool holes are used to fit with the eccentric member clearance.

[0010] Further, the distance between the inner ring edge of the annular tooling body and its center is a first distance, and the distance between the inner ring edge of the annular body and its center is a second distance, wherein the first distance is smaller than the second distance.

[0011] Furthermore, the eccentric member includes an eccentric block and an eccentric hole, the eccentric hole is opened on the eccentric block, the eccentric hole and the eccentric block are both circular, and the center of the eccentric hole is eccentrically arranged with respect to the center of the eccentric block.

[0012] In a second aspect, the utility model further provides a centering adjustment method, the method comprising:

[0013] The eccentric piece is placed in the mounting hole of the bushing, and the fastener is passed through the positioning hole of the eccentric piece and the reaction chamber for pre-tightening;

[0014] The gap between the heating plate and the bushing is measured by a gap measuring tool, and the position of the eccentric piece is adjusted based on the measurement result to keep the gap between the bushing and the heating plate in the circumferential direction uniform, and the fastener is fastened to the positioning hole.

[0015] In a third aspect, the utility model further provides a centering adjustment method, the method comprising:

[0016] The eccentric piece is placed in the tooling hole of the centering tooling, and the fastener is passed through the positioning hole of the eccentric piece and the reaction chamber for pre-tightening;

[0017] Measuring the gap between the heating plate and the centering fixture by a gap measuring tool, and adjusting the position of the eccentric member based on the measurement result so that the gap between the centering fixture and the heating plate in the circumferential direction remains uniform, and fastening the fastener to the positioning hole;

[0018] Take out the centering tool, and install the bushing so that the mounting groove is aligned with the eccentric member.

[0019] In a fourth aspect, the utility model also provides a thin film deposition device, comprising a reaction chamber, wherein the reaction chamber comprises a cavity body, a heating plate and a bushing assembly, wherein the bushing assembly is the bushing assembly of the first aspect, wherein the heating plate and the bushing assembly are arranged in the cavity body, and the bushing is arranged on the periphery of the heating plate.

[0020] The utility model provides a bushing assembly and a thin film deposition device. The thin film deposition device comprises a reaction chamber, wherein the reaction chamber comprises a cavity body, a heating plate and a bushing assembly. The bushing assembly comprises a bushing and an adjustment structure. At least three mounting parts are provided on the bushing. The three mounting parts are distributed along the circumferential direction of the bushing. Each mounting part is equipped with a group of adjustment structures. Each group of adjustment structures comprises an eccentric piece and a fastener. The eccentric piece is installed in the mounting part of the bushing. The fastener is eccentrically connected to the eccentric piece. The fastener is also fastened to a positioning hole on the cavity body. The bushing is fixed to the cavity body by the fastener. During centering adjustment, since the eccentric piece and the mounting part are clearance-matched, the position of the eccentric piece in the mounting part is adjustable. By adjusting the positions of the eccentric pieces of the three groups of adjustment structures, the relative position of the bushing is determined, the error during centering adjustment of the heating plate is compensated, the circumference of the gap between the bushing and the heating plate is ensured to be uniform, and the effect of thin film deposition is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic top view of a thin film deposition device according to an embodiment of the utility model is shown;

[0023] Figure 2 Shown Figure 1 A magnified view of part A;

[0024] Figure 3 Shown Figure 1 A cross-sectional view of

[0025] Figure 4 A schematic top view of a bushing / centering tool of a bushing assembly according to an embodiment of the utility model is shown;

[0026] Figure 5 Shown Figure 4 A magnified view of part B;

[0027] Figure 6 Shown Figure 4 A cross-sectional view of

[0028] Figure 7A schematic top view of a bushing of a bushing assembly according to another embodiment of the utility model is shown;

[0029] Figure 8 Shown Figure 7 Enlarged view of part C;

[0030] Fig. 9 Shown Figure 7 A cross-sectional view of

[0031] Fig.10 A schematic top view of an eccentric member of a bushing assembly according to an embodiment of the utility model is shown;

[0032] Fig.11 Shown Fig.10 A cross-sectional view of

[0033] Reference numerals:

[0034] 1. Bushing; 11. Annular body; 12. Mounting hole; 121. First arc-shaped hole section; 122. Second arc-shaped hole section; 123. Straight hole section; 13. Mounting slot; 131. Arc-shaped slot body; 132. Straight slot body; 2. Eccentric piece; 21. Eccentric block; 22. Eccentric hole; 3. Fastener; 4. Centering tool; 41. Annular tool body; 42. Tool hole; 5. Heating plate; 6. Cavity. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] The directional terms mentioned in the present invention, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only for reference to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In addition, in the drawings, structures with similar or identical structures are represented by the same reference numerals.

[0037] The gap between the heating disk and the bushing is required to be evenly distributed in the circumferential direction, because a non-uniform gap will lead to uneven film deposition on the substrate. This non-uniformity will affect the growth process of the film, resulting in differences in the microstructure and macroscopic properties of the film. For example, if the gap is uneven, some areas of the substrate may receive more deposition material, while other areas may receive less, resulting in inconsistent film thickness, affecting the electrical and mechanical properties of the film. To this end, the existing bushing determines the position of the bushing by three positioning structures distributed in the circumferential direction, so that the center of the bushing coincides with the center of the heating disk, thereby achieving centering of the two. However, this centering method relies on the heating disk being in an absolutely centered position, and if the heating disk is not in an absolutely centered position, it is difficult to ensure that the gap between the two is uniform.

[0038] To this end, the embodiment of the utility model provides a bushing assembly and a thin film deposition device to solve the problem of uneven gap between the heating plate and the bushing when the existing heating plate is not absolutely centered. The gap between the bushing and the heating plate is adjusted through three groups of adjustment structures to compensate for the error in the centering adjustment of the heating plate, thereby ensuring that the gap between the heating plate and the bushing is uniform.

[0039] In order to solve the problem of uneven gap, the present invention adopts two different technical solutions to solve the problem. The two solutions are as follows:

[0040] The first solution is to open three through holes on the bushing, and the three through holes are evenly distributed along the circumferential direction of the bushing, and each through hole is equipped with a pair of eccentric blocks and positioning pins. When adjusting the centering, first put the eccentric block into the through hole of the bushing, then pass the positioning pin through the eccentric block and connect it to the threaded hole on the cavity but do not tighten it, and then use a feeler gauge to measure the gap between the bushing and the heating plate. Since the eccentric block and the through hole are clearance-matched, the eccentric block has a movable gap in the through hole, making the position of the eccentric block adjustable. The gap between the bushing and the heating plate is adjusted by adjusting the position of the three eccentric blocks to ensure that the gap between the bushing and the heating plate is uniform. Finally, tighten the positioning pin to complete the centering of the bushing and the heating plate. Even if the heating plate is not absolutely centered, the error during the centering adjustment of the heating plate can be compensated in this way to ensure that the gap between the bushing and the heating plate in the circumferential direction is evenly distributed.

[0041] The second solution is: compared with the first solution, a centering tool is added, and three grooves are opened on the lower surface of the bushing to replace the three through holes on the bushing. The three grooves are also evenly distributed along the circumferential direction of the bushing. The shape structure of the centering tool is the same as that of the bushing. The centering tool is also provided with three through holes. The three through holes are evenly distributed along the circumferential direction of the centering tool. The centering tool mainly plays the role of adjusting the position of the eccentric block. During the centering adjustment, first place the eccentric block into the through hole of the centering tooling, then pass the locating pin through the eccentric block and connect it to the threaded hole on the cavity but do not tighten it, then use a feeler gauge to measure the gap between the centering tooling and the heating plate. Since the eccentric block and the through hole are clearance-matched, the eccentric block has a movable gap in the through hole, making the position of the eccentric block adjustable. The gap between the centering tooling and the heating plate is adjusted by adjusting the positions of the three eccentric blocks to ensure that the gap between the centering tooling and the heating plate is uniform, and then tighten the locating pin to determine the position of the eccentric block, thereby completing the debugging of the eccentric block position by the centering tooling, and finally take out the entire centering tooling, and then align the three grooves on the lower surface of the bushing with the three eccentric blocks to install the bushing, and the bushing covers the upper side of the three eccentric blocks. Since the positions of the three eccentric blocks have been debugged by the centering tooling, the positions of the three eccentric blocks have compensated for the error during the centering adjustment of the heating plate, so the mounting grooves on the bushing are installed corresponding to the eccentric blocks to ensure that the gap between the bushing and the heating plate in the circumferential direction is evenly distributed.

[0042] The difference between the two solutions is that the first solution is to adjust the gap directly, that is, to directly open a through hole on the bushing, place an eccentric block in the through hole, and directly fine-tune the bushing by adjusting the position of the eccentric block, so as to complete the adjustment and installation in one piece. The second solution is to adjust the gap indirectly, that is, to first use the centering tool to debug the position of the eccentric block, and then put the bushing on the eccentric block after determining the position of the eccentric block, so as to indirectly determine the position of the bushing. This method does not require opening a through hole on the bushing, but only requires opening a groove on the lower surface of the bushing, and the groove can be installed corresponding to the eccentric block. Because adjusting the position of the eccentric block in the through hole will cause friction between the two, resulting in the generation of particles, which may affect the process PA requirements, while this method avoids opening a through hole on the bushing, which satisfies both the adjustable gap and the process PA requirements. In addition, the centering fixture in the second idea can be designed to have an inner diameter slightly smaller than the inner diameter of the bushing, so that the gap between the centering fixture and the heating plate is smaller than the gap between the bushing and the heating plate. The smaller the gap to be measured, the higher the accuracy and the smaller the error. Therefore, the use of the centering fixture can improve the adjustment accuracy of the circumferential gap between the bushing and the heating plate, thereby improving the centering accuracy.

[0043] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0044] See also Figure 1-Figure 11 The utility model embodiment shows a bushing assembly, including: a bushing 1 and an adjustment structure, the bushing 1 is provided with at least three mounting parts along its own circumferential direction, each mounting part is configured with a group of the adjustment structure, each group of the adjustment structure includes an eccentric member 2 and a fastener 3, the eccentric member 2 is installed in the mounting part and is clearance-matched with the mounting part, and the fastener 3 passes through the eccentric member 2 and is eccentrically connected to the eccentric member 2.

[0045] Reference Figure 1-Figure 3 Specifically, the bushing 1 is an annular structure. The bushing 1 can be a ceramic ring or other materials. The bushing 1 is arranged on the outer periphery of the heating plate 5. The number of mounting parts is at least three. The number of mounting parts in this embodiment is three. Of course, it can be understood that it can also be other numbers. The three mounting parts are evenly distributed on the bushing 1 along the circumferential direction of the bushing 1, and the angle spanned between two adjacent mounting parts is 120 degrees. A set of adjustment structures is correspondingly installed on each mounting part, that is, three sets of adjustment structures are provided, and the adjustment structures are used to compensate for the centering error of the heating plate 5. The adjustment structure includes an eccentric member 2 and a fastener 3. The eccentric member 2 and the mounting part are clearance-matched, so that the eccentric member 2 has a movable gap in the mounting part, so that the eccentric member 2 can have a certain degree of freedom of movement in the mounting part. This design allows the position of the eccentric member 2 to be fine-tuned. Then, by adjusting the positions of the three eccentric members 2, the center of the bushing 1 can be determined to ensure that the center of the bushing 1 is aligned with the center of the heating plate 5. Because the center of the bushing 1 is determined with the heating disk 5 as a reference, even if the heating disk 5 is not absolutely centered, the two can be aligned to ensure the uniformity of the circumferential gap between the two. Specifically, when it is necessary to adjust the center of the bushing 1 to align with the center of the heating disk 5, the radial position of the bushing 1 relative to the heating disk 5 can be changed by rotating the eccentric 2. Because the center of mass of the eccentric 2 is not on its rotation axis, the outer wall of the eccentric 2 is in close contact with the inner wall of the mounting portion, so rotating the eccentric 2 will cause the thrust on one side of the bushing 1 to change, thereby causing the overall position of the bushing 1 to be finely adjusted. In this way, the center position of the bushing 1 can be finely adjusted to align with the center of the heating disk 5. The eccentric design of the eccentric 2 essentially forms a simple lever system. By adjusting the position of the eccentric 2, a large displacement change can be generated with a small force, thereby achieving precise control of the position of the bushing 1. Once the bushing 1 is adjusted to the ideal centering position by the eccentric 2, it can be fixed by passing the fastener 3 through the eccentric 2, so that the position of the bushing 1 is fixed and does not move.

[0046] Through this embodiment, the positions of the three eccentric members 2 are finely adjusted so that the center of the bushing 1 is aligned with the center of the heating disk 5, the error during the centering adjustment of the heating disk 5 is compensated, the gap is evenly distributed around the circumference, and the effect of thin film deposition is improved.

[0047] Reference Figure 4-Figure 6 In one embodiment, the bushing 1 includes an annular body 11, and the annular body 11 includes an annular upper surface and an annular lower surface facing each other; wherein the mounting portion is a mounting hole 12 that passes through the annular upper surface and the annular lower surface. Specifically, the bushing 1 includes an annular body 11 in the shape of a circular ring, and the annular body 11 has a certain width. The mounting hole 12 is provided on the annular body 11 and is close to the outer ring edge of the annular body 11. The mounting hole 12 is a through hole that passes through the upper surface and the lower surface of the annular body 11. The mounting hole 12 can be in various shapes, such as a waist-shaped hole, an elliptical hole, a fan-shaped hole, a crescent hole or other special-shaped holes. No matter what shape the mounting hole 12 is, as long as it can be gap-matched with the eccentric member 2, it is not limited here. In the mounting hole 12, the outer wall of the eccentric member 2 fits with the inner wall of the mounting hole 12. When the eccentric member 2 rotates, the bushing 1 can be pushed to fine-tune the position of the bushing 1. By opening a mounting hole 12 on the bushing 1 to cooperate with the eccentric piece 2, the position of the bushing 1 can be directly fine-tuned, and then the gap between the bushing 1 and the heating plate 5 can be directly adjusted, so that the gap can be directly adjusted, and the adjustment is simple and convenient; at the same time, after the position of the eccentric piece 2 is determined, the eccentric piece 2 is fixed to the cavity body 6 of the reaction chamber by passing the fastener 3 through the eccentric piece 2. After the three eccentric pieces 2 are fixed, the bushing 1 is also fixed and does not move, so that the adjustment and installation are completed in one piece, and the installation and debugging efficiency is improved.

[0048] In this embodiment, the mounting hole 12 includes a first arc-shaped hole segment 121, a second arc-shaped hole segment 122 and a straight hole segment 123. The straight hole segment 123 extends in the radial direction of the annular body 11. The first arc-shaped hole segment 121 and the second arc-shaped hole segment 122 are respectively arranged on both sides of the extension direction of the straight hole segment 123. Specifically, the first arc-shaped hole segment 121, the second arc-shaped hole segment 122 and the straight hole segment 123 form a closed-loop mounting hole 12. The first arc-shaped hole segment 121 and the second arc-shaped hole segment 122 can be, for example, semicircular hole segments, and the two semicircular hole segments are respectively located on both sides of the straight hole segment 123. The center extension line of the straight hole segment 123 passes through the center of the annular body 11 and the center of the two semicircular hole segments, that is, the straight hole segment 123 and the two semicircular hole segments are both located in the radial direction of the annular body 11. In this way, when the three eccentric members 2 are positioned, it is convenient to fix the bushing 1 and prevent the bushing 1 from moving. The eccentric piece 2 is in close contact with at least one of the first arc hole section 121, the second arc hole section 122 and the straight hole section 123 in the mounting hole 12. The three eccentric pieces 2 are in close contact with different hole sections in different mounting holes 12 to adjust the position of the bushing 1, so that the bushing 1 can be finely adjusted up and down and left and right. After the position of the bushing 1 is adjusted, the eccentric piece 2 is fastened by the fastener 3. After the eccentric piece 2 is fixed, the bushing 1 is also fixed, and the bushing 1 will not move.

[0049] Reference Figure 7-Figure 9In another embodiment, the bushing 1 includes an annular body 11, and the annular body 11 includes an annular upper surface and an annular lower surface facing each other; wherein the mounting portion is a mounting groove 13 provided on the annular lower surface. Specifically, the bushing 1 of this embodiment is also an annular body 11 in the shape of a circular ring, and the annular body 11 has a certain width. The difference between this embodiment and the previous embodiment is that the mounting portion is a mounting groove 13, and the mounting groove 13 is provided on the lower surface of the annular body 11, and the upper surface of the annular body 11 is flat, and the mounting groove 13 does not penetrate the upper surface of the annular body 11. The mounting groove 13 can be of various shapes, and no limitation is made here as long as it can be clearance-matched with the eccentric member 2 regardless of the shape of the mounting hole 12. The eccentric member 2 and the mounting groove 13 are also clearance-matched, and the outer wall of the eccentric member 2 is in close contact with the groove wall of the mounting groove 13. However, the difference between this embodiment and the previous embodiment is that the eccentric piece 2 is not fine-tuned in the installation groove 13, but the position of the three eccentric pieces 2 is adjusted before the bushing 1 is installed. After the position of the three eccentric pieces 2 is adjusted, the center of the bushing 1 is determined, and then the installation groove 13 on the lower surface of the bushing 1 is aligned with the eccentric piece 2 for installation, so that the bushing 1 can be centered. This method avoids directly adjusting the eccentric piece 2 in the bushing 1, avoids the generation of particles due to friction between the eccentric piece 2 and the bushing 1, and can meet the process PA requirements. It should be noted that the position adjustment of the three eccentric pieces 2 can be achieved in various ways, for example, the position of the three eccentric pieces 2 can be adjusted by the centering tool 4, or the position of the three eccentric pieces 2 can be calculated by geometric and mathematical formulas and adjusted based on this, or the position of the three eccentric pieces 2 can be obtained by computer visual simulation and adjusted based on this. Of course, it can be understood that other methods can also be used. No matter what method is used, as long as it can achieve the position adjustment of the three eccentric pieces 2 to ensure that the center of the bushing 1 is aligned with the center of the heating plate 5, it is not limited here. After the positions of the three eccentric pieces 2 are determined, the three mounting grooves 13 on the lower surface of the bushing 1 are installed one by one with the three eccentric pieces 2 respectively, the outer walls of the three eccentric pieces 2 are tightly attached to the groove walls of the three mounting grooves 13 respectively, and the three eccentric pieces 2 jointly position the bushing 1 so that the bushing 1 is fixed and does not move, and the upper surface of the bushing 1 covers the three eccentric pieces 2.

[0050] In this embodiment, the mounting groove 13 includes an arcuate groove body 131 and a straight groove body 132, wherein the straight groove body 132 extends in the radial direction of the annular body 11, and the end of the straight groove body 132 away from the center of the annular body 11 passes through the outer ring edge of the annular body 11, and the arcuate groove body 131 is arranged on the side of the straight groove body 132 close to the center of the annular body 11. Specifically, the arcuate groove body 131 can be, for example, a semicircular groove body, and the center extension line of the straight groove body 132 passes through the center of the annular body 11 and the center of the semicircular groove body, that is, the straight groove body 132 and the semicircular groove body are both located in the radial direction of the annular body 11, and the semicircular groove body is located at the end of the straight groove body 132 close to the center of the annular body 11, and the end of the straight groove body 132 away from the center of the annular body 11 passes through the outer ring edge of the annular body 11. In this way, when the three eccentric members 2 are positioned, it is convenient to fix the bushing 1 to prevent the bushing 1 from moving, and one end of the straight slot body 132 is through, which is convenient for installing the eccentric member 2.

[0051] In this embodiment, the bushing assembly further includes a centering tool 4, which includes an annular tool body 41 and tool holes 42. The number of the tool holes 42 matches the number of the mounting parts. A plurality of the tool holes 42 are arranged on the annular tool body 41 along the circumferential direction of the annular tool body 41, and the tool holes 42 are used to fit with the eccentric member 2 in a clearance. Specifically, the centering tool 4 has the same shape and structure as the bushing 1, and both are annular. The centering tool 4 includes an annular tool body 41, and the annular tool body 41 is provided with tool holes 42 having the same number as the mounting parts, for example, three tool holes 42, and the tool holes 42 are also through holes that penetrate the upper and lower surfaces of the annular tool body 41. The three tool holes 42 are evenly arranged along the circumferential direction of the annular tool body 41, and the angle between two adjacent tool holes 42 is 120 degrees. The centering tool 4 is a debugging tool for adjusting the positions of the three eccentric pieces 2. The tooling hole 42 on the centering tool 4 is in clearance with the eccentric piece 2. The eccentric piece 2 has a movable clearance in the tooling hole 42, so that the eccentric piece 2 can have a certain degree of freedom of movement in the tooling hole 42. This design allows the position of the eccentric piece 2 to be fine-tuned. Then, by adjusting the positions of the three eccentric pieces 2, the center of the centering tool 4 can be determined to ensure that the center of the centering tool 4 is aligned with the center of the heating plate 5, and the circumferential clearance between the centering tool 4 and the heating plate 5 is uniform. The method of fine-tuning the position of the eccentric piece 2 in the tooling hole 42 is the same as the method of fine-tuning the eccentric piece 2 in the mounting hole 12. For the sake of brevity of the specification, it will not be repeated here. After using the centering tool 4 to determine the positions of the three eccentric pieces 2, the entire centering tool 4 is taken out, and then the three installation grooves 13 of the bushing 1 are aligned with the three eccentric pieces 2 for installation, so that the installed bushing 1 is aligned with the center of the heating plate 5, and the circumferential gap between the bushing 1 and the heating plate 5 is evenly distributed. By adjusting the gap between the centering tool 4 and the heating plate 5, the gap between the bushing 1 and the heating plate 5 is indirectly adjusted. The centering tool 4 is equivalent to replacing the bushing 1 for adjustment, so there is no need to open the installation hole 12 on the bushing 1, avoiding the generation of particles due to friction between the eccentric piece 2 and the bushing 1, and meeting the process PA requirements.

[0052] In a specific implementation, the distance between the inner ring edge of the annular tooling body 41 and its center is a first distance, and the distance between the inner ring edge of the annular body 11 and its center is a second distance, wherein the first distance is smaller than the second distance.

[0053] Specifically, the first distance between the inner ring edge of the annular tool body 41 and its center refers to the inner diameter of the centering tool 4, and the second distance between the inner ring edge of the annular body 11 and its center refers to the inner diameter of the bushing 1. The first distance is smaller than the second distance, that is, the inner diameter of the centering tool 4 is smaller than the inner diameter of the bushing 1. In this way, the gap between the centering tool 4 and the heating plate 5 is smaller than the gap between the bushing 1 and the heating plate 5. Usually, the gap between the bushing 1 and the heating plate 5 is 1mm, which has a large error, while the gap between the centering tool 4 and the heating plate 5 can be 0.25mm or less, which has higher accuracy. The smaller the gap, the higher the measurement accuracy and the smaller the error. Therefore, by designing the size of the centering tool 4, the gap between the centering tool 4 and the heating plate 5 is smaller than the gap between the bushing 1 and the heating plate 5, the adjustment accuracy of the circumferential gap between the bushing 1 and the heating plate 5 can be improved, thereby improving the centering accuracy.

[0054] Reference Fig.10 and Fig.11 In one embodiment, the eccentric member 2 includes an eccentric block 21 and an eccentric hole 22. The eccentric hole 22 is provided on the eccentric block 21. The eccentric hole 22 and the eccentric block 21 are both circular, and the center of the eccentric hole 22 is eccentric to the center of the eccentric block 21. Specifically, the eccentric block 21 and the eccentric hole 22 are both circular, and the center of the eccentric hole 22 is not coaxial with the center of the eccentric block 21. The fastener 3 is a positioning pin, which passes through the eccentric hole 22 so that the positioning pin is eccentrically connected to the eccentric block 21, and the positioning pin cooperates with the threaded hole on the cavity body 6 of the reaction chamber. The eccentric member 2 of this embodiment has a simple structure, is easy to install, and has low cost.

[0055] The embodiment of the utility model further provides a centering adjustment method, which includes steps: S101-S102.

[0056] S101, placing the eccentric member 2 into the mounting hole 12 of the bushing 1, and passing the fastener 3 through the positioning hole between the eccentric member 2 and the reaction chamber for pre-fastening.

[0057] Specifically, the eccentric member 2 is an eccentric block 21, the fastener 3 is a positioning pin, and the positioning hole is a threaded hole. First, before installing the bushing 1, the horizontal centering of the heating plate 5 has been adjusted, and the bushing 1 is installed on the periphery of the heating plate 5. Then, the three eccentric blocks 21 are respectively placed in the three mounting holes 12 on the bushing 1, and the positioning pin is passed through the eccentric hole 22 on the eccentric block 21 and screwed into the threaded hole on the cavity 6 of the reaction chamber for pre-tightening. Pre-tightening means not tightening the positioning pin to ensure that the eccentric block 21 is adjustable.

[0058] S102, measuring the gap between the heating plate 5 and the bushing 1 by a gap measuring tool, and adjusting the position of the eccentric member 2 based on the measurement result so that the gap between the bushing 1 and the heating plate 5 in the circumferential direction remains uniform, and fastening the fastener 3 to the positioning hole.

[0059] Specifically, the gap measuring tool can be a feeler gauge, a rubber sheet of fixed size, or other measuring tools. After placing the eccentric block 21, raise the heating plate 5 to be flush with the bushing 1, adjust the position of the eccentric block 21, insert the feeler gauge into the gap between the bushing 1 and the heating plate 5, and draw the feeler gauge along the gap to ensure that the circumferential gap between the bushing 1 and the heating plate 5 is uniform. If it is uneven, continue to adjust the position of the eccentric block 21 until the gap is uniform. Finally, tighten the positioning pin to complete the centering adjustment of the bushing 1 and fix the bushing 1.

[0060] According to this embodiment, the bushing 1 is directly adjusted through the eccentric block 21, so that the gap can be directly adjusted, the adjustment is simple and convenient, and the adjustment and installation are completed in one piece.

[0061] Another embodiment of the present invention further provides a centering adjustment method, which includes steps: S201-S203.

[0062] S201, placing the eccentric member 2 into the tooling hole 42 of the centering tooling 4, and passing the fastener 3 through the positioning hole between the eccentric member 2 and the reaction chamber for pre-fastening.

[0063] Specifically, the eccentric member 2 is an eccentric block 21, the fastener 3 is a positioning pin, and the positioning hole is a threaded hole. First, before installing the centering fixture 4, the horizontal centering of the heating plate 5 has been adjusted, and the centering fixture 4 is installed on the periphery of the heating plate 5. Then, the three eccentric blocks 21 are respectively placed in the three fixture holes 42 on the centering fixture 4, and the positioning pin is passed through the eccentric hole 22 on the eccentric block 21 and screwed into the threaded hole on the cavity body 6 of the reaction chamber for pre-tightening. Pre-tightening means not tightening the positioning pin to ensure that the eccentric block 21 is adjustable.

[0064] S202, measuring the gap between the heating disk 5 and the centering tool 4 by a gap measuring tool, and adjusting the position of the eccentric member 2 based on the measurement result so that the gap between the centering tool 4 and the heating disk 5 in the circumferential direction remains uniform, and fastening the fastener 3 to the positioning hole.

[0065] Specifically, the gap measuring tool can be a feeler gauge, a rubber sheet of fixed size, or other measuring tools. The centering tool 4 can be selected to work with high precision. For example, the gap between the centering tool 4 and the heating plate 5 is 0.25 mm or less. After placing the eccentric block 21, raise the heating plate 5 to be flush with the centering tool 4, adjust the position of the eccentric block 21, insert the feeler gauge into the gap between the heating plate 5 and the centering tool 4, and draw the feeler gauge along the gap to ensure that the circumferential gap between the centering tool 4 and the heating plate 5 is uniform. If it is uneven, continue to adjust the position of the eccentric block 21 until the gap is uniform, and finally tighten the positioning pin.

[0066] S203, taking out the centering tool 4, and aligning the mounting groove 13 of the bushing 1 with the eccentric member 2 for installation.

[0067] Specifically, after completing the alignment of the centering tool 4 and the heating plate 5, the entire centering tool 4 is taken out. Since the three eccentric blocks 21 have been fastened by the positioning pins, taking away the centering tool 4 will not change the position of the eccentric blocks 21. Finally, the three mounting grooves 13 on the lower surface of the bushing 1 are aligned with the three eccentric blocks 21 for installation. Since the centers of the three eccentric blocks 21 are aligned with the center of the heating plate 5 at the current positions, when the bushing 1 is installed on the three eccentric blocks 21, it is ensured that the centers of the bushing 1 and the heating plate 5 are aligned, and the circumferential gap between the bushing 1 and the heating plate 5 is evenly distributed.

[0068] Through this embodiment, the gap between the centering tool 4 and the heating plate 5 is first adjusted to determine the position of the eccentric block 21, and then the bushing 1 is aligned with the eccentric block 21 for installation. The gap can be adjusted indirectly to avoid directly adjusting the bushing 1 to produce particulate matter, meet the process PA requirements, and have high adjustment accuracy.

[0069] The embodiment of the utility model further provides a thin film deposition device, comprising a reaction chamber, wherein the reaction chamber comprises a chamber body 6, a heating plate 5 and a bushing assembly, wherein the bushing assembly is the bushing assembly described in the above embodiment, wherein the heating plate 5 and the bushing assembly are arranged in the chamber body 6, and the bushing 1 is arranged at the periphery of the heating plate 5. The thin film deposition device of the embodiment improves the effect of thin film deposition.

[0070] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the utility model, and these modifications or replacements should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A bushing assembly, characterized in that: include: A bushing and an adjustment structure, wherein the bushing is provided with at least three mounting parts along its own circumferential direction, each mounting part is configured with a group of the adjustment structures, each group of the adjustment structures includes an eccentric piece and a fastener, the eccentric piece is installed in the mounting part and is clearance-matched with the mounting part, and the fastener passes through the eccentric piece and is eccentrically connected to the eccentric piece.

2. The bushing assembly according to claim 1, characterized in that The bushing comprises an annular body, wherein the annular body comprises an annular upper surface and an annular lower surface facing each other; Wherein, the mounting portion is a mounting hole that passes through the annular upper surface and the annular lower surface.

3. The bushing assembly according to claim 2, characterized in that The mounting hole comprises a first arc-shaped hole segment, a second arc-shaped hole segment and a straight hole segment, the straight hole segment extends radially along the annular body, and the first arc-shaped hole segment and the second arc-shaped hole segment are respectively arranged on both sides of the extension direction of the straight hole segment.

4. The bushing assembly according to claim 1, characterized in that The bushing comprises an annular body, and the annular body comprises an annular upper surface and an annular lower surface facing each other; the mounting portion is a mounting groove arranged on the annular lower surface.

5. The bushing assembly according to claim 4, characterized in that The mounting groove includes an arc-shaped groove body and a straight groove body, the straight groove body extends radially along the annular body, one end of the straight groove body away from the center of the annular body passes through the outer ring edge of the annular body, and the arc-shaped groove body is arranged on one side of the straight groove body close to the center of the annular body.

6. The bushing assembly according to claim 5, characterized in that The bushing assembly also includes a centering tool, which includes an annular tool body and tool holes. The number of the tool holes matches the number of the mounting parts. A plurality of the tool holes are arranged on the annular tool body along the circumferential direction of the annular tool body. The tool holes are used to fit with the eccentric member in a clearance manner.

7. The bushing assembly according to claim 6, characterized in that The distance between the inner ring edge of the annular tooling body and its center is a first distance, and the distance between the inner ring edge of the annular body and its center is a second distance, wherein the first distance is smaller than the second distance.

8. The bushing assembly according to any one of claims 1 to 7, characterized in that: The eccentric piece comprises an eccentric block and an eccentric hole. The eccentric hole is formed on the eccentric block. Both the eccentric hole and the eccentric block are circular. The center of the eccentric hole is eccentrically arranged with respect to the center of the eccentric block.

9. The bushing assembly according to any one of claims 1 to 7, characterized in that: The fastener is a positioning pin.

10. A thin film deposition device, characterized in that: It comprises a reaction chamber, which comprises a cavity body, a heating plate and a bushing assembly, wherein the bushing assembly is the bushing assembly according to any one of claims 1 to 9, the heating plate and the bushing assembly are arranged in the cavity body, and the bushing is arranged on the periphery of the heating plate.

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