Limiting vibration isolation device of optical device

Abstract

The utility model discloses a limit vibration isolation device of an optical device, which comprises an upper fixed disc, and further comprises a vibration isolation inflatable rubber ring, a lower fixed disc and a limit lock, the upper fixed disc is positioned above the lower fixed disc, the vibration isolation inflatable rubber ring is clamped between the upper fixed disc and the lower fixed disc, the limit lock comprises a longitudinal piece and a transverse piece, and the longitudinal piece and the transverse piece are arranged in parallel. The side portion of the lower fixing disc is fixed to the bottom of the longitudinal piece, a transverse limiting piece is arranged in the middle of the longitudinal piece, and the edge of the upper fixing disc is located between the transverse piece and the transverse limiting piece. The vibration isolator is simple and compact in overall structure and good in vibration isolation effect; by arranging the limiting lock, the horizontal displacement and the longitudinal displacement of the upper fixing disc relative to the lower fixing disc can be effectively limited; and a single or multiple vibration isolators can be used at the same time to meet different vibration isolation requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of passive air-floating vibration isolation for precision optics, and in particular to a position-limiting vibration isolation device for optical devices, which is suitable for vibration environment isolation in the fields of physical optics, optical precision measurement, laser interferometer, laser ultra-stable cavity, etc. Background Art

[0002] Air-floating vibration isolation platforms are widely used in physics, chemistry and biology laboratories, especially in equipment that requires extremely high stability, such as optical precision measurement, laser ultra-stable cavity and laser interferometer, and can significantly reduce the impact of environmental vibration on experimental accuracy.

[0003] The air flotation damping principle of the air flotation platform is based on isolating and suppressing vibrations through the control of gas pressure. Air flotation damping technology uses air as a supporting medium to reduce the impact of external vibrations on precision equipment. Air flotation platforms are generally divided into two categories: active vibration isolation and passive vibration isolation. Passive air flotation platforms rely on fixed air pressure support to absorb vibrations. Active air flotation platforms monitor vibrations in real time through sensors, automatically adjust air pressure and platform posture, and more effectively suppress vibrations of various frequencies.

[0004] Traditional passive air-floating platforms are usually equipped with air-floating supports, which require the design of external rigid structures to support and stabilize the internal air cushion or airbag, and are equipped with pressure regulating valves and air pumps to form a complex vibration isolation device. They are usually used to support medium and large optical platforms, but there is a lack of suitable compact air-floating vibration isolation devices for small and micro optical precision measurement and laser ultra-stable cavity vibration isolation. Utility Model Content

[0005] The purpose of the utility model is to provide a position limiting vibration isolation device for an optical device in view of the above problems existing in the prior art.

[0006] The above-mentioned purpose of the utility model is achieved by the following technical means:

[0007] A limit vibration isolation device for an optical device comprises an upper fixed plate, a vibration isolation inflatable rubber ring, a lower fixed plate and a limit lock.

[0008] The upper fixed plate is located above the lower fixed plate, the vibration isolation inflatable rubber ring is clamped between the upper fixed plate and the lower fixed plate, the limit lock includes a longitudinal member and a transverse member, the transverse member is arranged on the top of the longitudinal member, the side of the lower fixed plate is fixed to the bottom of the longitudinal member, a transverse limit member is arranged in the middle of the longitudinal member, and the edge of the upper fixed plate is located between the transverse member and the transverse limit member.

[0009] As mentioned above, the plate side of the lower fixing plate is provided with a side threaded hole, and the side fixing bolt passes through the bottom through hole provided on the bottom side of the longitudinal member and is screwed into the side threaded hole.

[0010] As mentioned above, a top threaded hole is provided on the top surface of the lower fixing plate, a fixing block is provided at the bottom of the longitudinal member, and a top fixing bolt passes through the longitudinal through hole on the fixing block and is screwed into the top threaded hole.

[0011] As described above, a transverse member through hole is provided on the transverse member, a limit rod through hole is provided on the upper fixed plate, a limit rod threaded hole is provided on the top surface of the lower fixed plate, and the bottom threaded end of the limit rod passes through the transverse member through hole and the limit rod through hole in turn and is screwed into the limit rod threaded hole.

[0012] As mentioned above, the transverse member through hole and the limiting rod through hole are not in contact with the limiting rod.

[0013] As described above, annular grooves are provided on the bottom surface of the upper fixed plate and the top surface of the lower fixed plate. The top of the horizontally arranged vibration isolation and inflatable rubber ring is embedded in the annular groove on the bottom surface of the upper fixed plate, and the bottom of the horizontally arranged vibration isolation and inflatable rubber ring is embedded in the annular groove on the top surface of the lower fixed plate.

[0014] As mentioned above, the top surface of the upper fixing plate is connected to the upper connecting plate through the upper connecting member, and the upper connecting plate is connected to the optical panel through the connecting bolts.

[0015] As mentioned above, the bottom surface of the lower fixing plate is connected to the lower connecting plate through the lower connecting member, and the lower connecting plate is connected to the reference plate through the connecting bolts.

[0016] Compared with the prior art, the utility model has the following beneficial effects and advantages:

[0017] 1. The overall structure of the utility model is simple and compact, easy to miniaturize, and has good vibration isolation effect.

[0018] 2. The utility model can effectively limit the horizontal and longitudinal displacement of the upper fixed plate relative to the lower fixed plate by setting a limit lock, thereby limiting the horizontal and longitudinal displacement of the equipment on the optical panel, and can also prevent the optical panel from overloading or uneven pressure causing large up and down fluctuations, causing risks such as equipment slipping.

[0019] 3. The utility model can be used individually or in multiples at the same time to meet different vibration isolation requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is a structural schematic diagram of the upper fixed plate of the utility model;

[0022] Figure 3 It is a structural schematic diagram of the limit lock of the utility model;

[0023] Figure 4It is a schematic diagram of a case in which the utility model is used for vibration isolation of an optical platform.

[0024] In the figure: 1-vibration isolation inflatable rubber ring; 2-upper fixed plate; 3-lower fixed plate; 4-limit lock; 401-longitudinal member; 402-transverse member; 403-transverse limit member; 404-bottom side through hole; 405-fixed block; 406-longitudinal through hole; 407-transverse member through hole; 5-limit rod; 6-connecting bolt; 7-limit rod through hole; 8-ring groove; 9-optical panel; 10-reference plate; 11-upper connecting member; 12-upper connecting plate; 13-lower connecting member; 14-lower connecting plate. DETAILED DESCRIPTION

[0025] In order to facilitate ordinary technicians in this field to understand and implement the present invention, the present invention is further described in detail below in conjunction with embodiments. It should be understood that the implementation examples described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0026] like Figure 1-4 As shown, a position-limiting vibration isolation device for an optical device comprises: a vibration-isolating inflatable rubber ring 1, an upper fixing plate 2, a lower fixing plate 3 and a position-limiting lock 4.

[0027] The upper fixed plate 2 is located above the lower fixed plate 3, and the vibration-isolating inflatable rubber ring 1 is clamped between the upper fixed plate 2 and the lower fixed plate 3. The vibration-isolating inflatable rubber ring 1 plays a role of buffering and vibration isolation between the upper fixed plate 2 and the lower fixed plate 3. The limit lock 4 includes a longitudinal member 401 and a transverse member 402. The transverse member 402 is arranged on the top of the longitudinal member 401. The side of the lower fixed plate 3 is fixed to the bottom of the longitudinal member 401. A transverse limiting member 403 is arranged in the middle of the longitudinal member 401. The edge of the upper fixed plate 2 is located between the transverse member 402 and the transverse limiting member 403. Under the elastic buffering and vibration reduction effect of the vibration-isolating inflatable rubber ring 1, the upper fixed plate 2 will move up and down relative to the lower fixed plate 3, and the upper fixed plate 2 is limited by the transverse member 402 and the transverse limiting member 403.

[0028] In some embodiments, a side threaded hole is provided on the plate side of the lower fixing plate 3, a top threaded hole is provided on the top surface of the lower fixing plate 3, a side fixing bolt passes through a bottom through hole 404 provided on the bottom side of the longitudinal member 401 and is screwed into the side threaded hole, a fixing block 405 is further provided at the bottom of the longitudinal member 401, and a top fixing bolt passes through a longitudinal through hole 406 on the fixing block 405 and is screwed into the top threaded hole. The bottom of the longitudinal member 401 and the lower fixing plate 3 are fixed together from two dimensions by the side fixing bolts and the top fixing bolts, thereby increasing the stability of the connection.

[0029] In some embodiments, a transverse member through hole 407 is provided on the transverse member 402, a limit rod through hole 7 is provided on the upper fixed disk 2, and a limit rod threaded hole is provided on the top surface of the lower fixed disk 3. The bottom threaded end of the limit rod 5 passes through the transverse member through hole 407 and the limit rod through hole 7 in sequence and is screwed into the limit rod threaded hole. The limit rod 5 plays a limiting guiding role, and the upper fixed disk 2 and the lower fixed disk 3 will not be misaligned in the horizontal direction. Under the joint action of the limit rod 5, the transverse member 402, and the transverse limit member 403, the relative displacement of the upper fixed disk 2 relative to the lower fixed disk 3 in the horizontal direction and the longitudinal direction is limited. Preferably, the limit rod 5 does not contact the transverse member through hole 407 and the limit rod through hole 7.

[0030] In some embodiments, an annular groove 8 is provided on the bottom surface of the upper fixed plate 2 and the top surface of the lower fixed plate 3, the top of the horizontally arranged vibration-isolating inflatable rubber ring 1 is embedded in the annular groove 8 on the bottom surface of the upper fixed plate 2, and the bottom of the horizontally arranged vibration-isolating inflatable rubber ring 1 is embedded in the annular groove 8 on the top surface of the lower fixed plate 3. The annular groove 8 provided on the bottom surface of the upper fixed plate 2 and the top surface of the lower fixed plate 3 limits the horizontal displacement of the vibration-isolating inflatable rubber ring 1 relative to the upper fixed plate 2 and the lower fixed plate 3.

[0031] The top surface of the upper fixed plate 2 is connected to the upper connecting plate 12 through the upper connecting member 11, the upper connecting plate 12 is connected to the optical panel 9 through the connecting bolts 6, the bottom surface of the lower fixed plate 3 is connected to the lower connecting plate 14 through the lower connecting member 13, and the lower connecting plate 14 is connected to the reference plate 10 through the connecting bolts 6.

[0032] In this embodiment, after the vibration-isolating inflatable rubber ring 1 is inflated, the ratio of the longitudinal cross-sectional diameter R2 to the overall diameter R1 of the vibration-isolating inflatable rubber ring 1 is 1:7.5. The overall height of the limit lock 4 is 1.3-1.5 times the sum of the thicknesses of the upper fixed plate 2, the lower fixed plate 3, and the vibration-isolating inflatable rubber ring 1.

[0033] like Figure 4 As shown, in the present embodiment, four position-limiting vibration isolation devices can be used to achieve vibration isolation of the optical panel 9 relative to the reference plate 10. A compact vibration isolation system is implemented by using four position-limiting vibration isolation devices to achieve vibration isolation of the optical panel 9.

[0034] This embodiment only demonstrates the vibration isolation of the optical panel 9. Vibration isolation of these precision instruments and equipment can be achieved by placing precision optical instruments such as laser ultra-stable cavity, precision optical path, laser interferometer, etc. on the optical panel 9. In addition, vibration isolation of equipment and instruments of different masses and volumes can be achieved by reasonably configuring the number and position of the limit vibration isolation devices.

[0035] It should be noted that the embodiments described in the present invention are merely examples of the spirit of the present invention. Those skilled in the art of the present invention may make various modifications or additions to the embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the attached claims.

Claims

1. A position limiting vibration isolation device for an optical device, comprising an upper fixed plate (2), characterized in that: It also includes a vibration-isolating inflatable rubber ring (1), a lower fixing plate (3) and a limit lock (4). The upper fixing plate (2) is located above the lower fixing plate (3); the vibration-isolating inflatable rubber ring (1) is clamped between the upper fixing plate (2) and the lower fixing plate (3); the limit lock (4) comprises a longitudinal member (401) and a transverse member (402); the transverse member (402) is arranged on the top of the longitudinal member (401); the side of the lower fixing plate (3) is fixed to the bottom of the longitudinal member (401); a transverse limit member (403) is arranged in the middle of the longitudinal member (401); and the edge of the upper fixing plate (2) is located between the transverse member (402) and the transverse limit member (403).

2. The position limiting vibration isolation device for an optical device according to claim 1, characterized in that: A side threaded hole is provided on the plate side of the lower fixing plate (3), and a side fixing bolt passes through a bottom through hole (404) provided on the bottom side of the longitudinal member (401) and is screwed into the side threaded hole.

3. The position limiting vibration isolation device for an optical device according to claim 2, characterized in that: A top threaded hole is provided on the top surface of the lower fixing plate (3), a fixing block (405) is provided at the bottom of the longitudinal member (401), and a top fixing bolt passes through a longitudinal through hole (406) on the fixing block (405) and is screwed into the top threaded hole.

4. The position limiting vibration isolation device for an optical device according to claim 1, characterized in that: The transverse member (402) is provided with a transverse member through hole (407), the upper fixed plate (2) is provided with a limit rod through hole (7), the top surface of the lower fixed plate (3) is provided with a limit rod threaded hole, and the bottom threaded end of the limit rod (5) passes through the transverse member through hole (407) and the limit rod through hole (7) in sequence and is screwed into the limit rod threaded hole.

5. The position limiting vibration isolation device for an optical device according to claim 4, characterized in that: The transverse member through hole (407) and the limiting rod through hole (7) are not in contact with the limiting rod (5).

6. The position limiting vibration isolation device for an optical device according to claim 1, characterized in that: The bottom surface of the upper fixed plate (2) and the top surface of the lower fixed plate (3) are both provided with an annular groove (8); the top of the horizontally arranged vibration-isolating inflatable rubber ring (1) is embedded in the annular groove (8) on the bottom surface of the upper fixed plate (2); and the bottom of the horizontally arranged vibration-isolating inflatable rubber ring (1) is embedded in the annular groove (8) on the top surface of the lower fixed plate (3).

7. The position limiting vibration isolation device for an optical device according to claim 1, characterized in that: The top surface of the upper fixing plate (2) is connected to the upper connecting plate (12) via an upper connecting piece (11), and the upper connecting plate (12) is connected to the optical panel (9) via connecting bolts (6).

8. The position limiting vibration isolation device for an optical device according to claim 7, characterized in that: The bottom surface of the lower fixing plate (3) is connected to the lower connecting plate (14) via a lower connecting member (13), and the lower connecting plate (14) is connected to the reference plate (10) via connecting bolts (6).

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