Rotating stand device for vacuum coating

Abstract

The utility model relates to a rotating stand device for vacuum coating, which comprises a rotating stand body for assembling a tool clamp, a magnetofluid device and a driving mechanism, the magnetofluid device and the driving mechanism are positioned outside a coating chamber, and a mounting hole is formed in a chamber bottom plate of the coating chamber. The magnetofluid device comprises a magnetofluid body, an upper connecting shaft part and a lower connecting shaft part, the upper connecting shaft part and the lower connecting shaft part are arranged at the upper end and the lower end of the magnetofluid body respectively, the magnetofluid body is installed on the cavity bottom plate through an insulation sealing assembly, the upper connecting shaft part penetrates through the installation hole to be connected with the rotating frame body, and the lower connecting shaft part is in transmission connection with the driving mechanism. According to the scheme provided by the utility model, the problem that the bearing in the magnetic fluid device is easy to wear in a vacuum state can be solved, and the service life and the reliability of coating equipment are improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a rotating rack device for vacuum coating. Background Art

[0002] During the vacuum coating process, the workpiece is placed on a turntable in the vacuum coating equipment for coating. The turntable is connected to the drive mechanism outside the coating chamber using a magnetic fluid device, and the magnetic fluid device is used to achieve the requirement of sealed rotation assembly. Traditional vacuum coating equipment installs the magnetic fluid device in the coating chamber. Since the coating environment in the coating chamber is generally a high-temperature vacuum environment, the installation of the magnetic fluid device requires a vacuum bearing, which is prone to wear and jamming in a high-temperature vacuum environment. In addition, when the weight of the workpiece to be coated is large, the bearing will bear a larger load, and the failure rate will increase further. Moreover, when the turntable is stuck, it will lead to an increase in the defective rate of the coated product and increase production costs. Therefore, it is necessary to solve this problem. Summary of the Invention

[0003] The purpose of the utility model is to provide a rotary rack device for vacuum coating, which can solve the problem that traditional rotary rack devices are prone to failure and improve the reliability of the vacuum coating device.

[0004] In order to achieve the above-mentioned purpose, the present invention is implemented according to the technical solution described below.

[0005] A turret device for vacuum coating, characterized in that it includes a turret body for assembling tooling fixtures, and a magnetic fluid device and a driving mechanism located outside the coating chamber. A mounting hole is provided on the chamber bottom plate of the coating chamber. The magnetic fluid device includes a magnetic fluid body and an upper connecting shaft portion and a lower connecting shaft portion respectively provided at the upper and lower ends of the magnetic fluid body. The magnetic fluid body is installed on the chamber bottom plate through an insulating sealing assembly. The upper connecting shaft portion passes through the mounting hole and is connected to the turret body, and the lower connecting shaft portion is transmission-connected to the driving mechanism.

[0006] An A1 mounting plate is fixedly installed on the outside of the chamber bottom plate, and an assembly part is provided on the magnetic fluid body. The insulating sealing assembly includes an insulating plate located between the A1 mounting plate and the assembly part. A assembly holes are arranged on the assembly part along its circumferential intervals. The assembly part, the insulating plate and the A1 mounting plate are arranged in a superimposed manner. Assembly bolts for achieving a fixed connection between the magnetic fluid body and the A1 mounting plate are provided in the A assembly hole, and an insulating sleeve is provided on the assembly bolt.

[0007] The insulating sealing component also includes an insulating sleeve which is hollowly sleeved on the upper connecting shaft portion, the lower end of the insulating sleeve is fixedly assembled and connected to the insulating plate, and the upper end of the insulating sleeve extends into the coating cavity.

[0008] The shaft body of the upper connecting shaft portion is located in the coating chamber and is sleeved with a dust cover, which is fixedly mounted on the chamber bottom plate.

[0009] A transmission wheel A is provided on the lower connecting shaft, the driving mechanism includes a driving motor, and a transmission wheel B is provided on the output shaft of the driving motor. The transmission wheel A and the transmission wheel B are connected in transmission. The transmission wheel A is installed on the lower connecting shaft through the A insulating member, the pressure cover and the coupling.

[0010] The lower connecting shaft is a variable diameter shaft, including an A1 shaft segment and an A2 shaft segment arranged upper and lower. The outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment. The A transmission wheel is installed on the A1 shaft segment and also includes a copper sleeve for power connection. The copper sleeve and the A2 shaft segment are concentric and connected in rotational contact. The copper sleeve is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate.

[0011] The A transmission wheel and the B transmission wheel are connected by a transmission belt, and a guide mechanism for guiding the transmission belt is provided between the drive motor and the magnetic fluid device.

[0012] The power connection mounting bracket includes a horizontal mounting plate arranged horizontally and a vertical mounting plate arranged vertically. The vertical mounting plate is located inside the transmission belt, and the vertical mounting plate is suspended on the chamber bottom plate. The horizontal mounting plate is fixedly mounted on the lower end of the vertical mounting plate. An insulating mounting plate is fixedly mounted on the horizontal mounting plate, and the lower end of the copper sleeve is fixedly mounted on the insulating mounting plate. A suspended induction switch bracket is also provided on the insulating mounting plate. The induction switch bracket is used to install the induction switch. An induction block is provided next to the induction switch, and the induction block is fixedly mounted on the lower end of the lower connecting shaft through the induction mounting piece.

[0013] The belt surface of the transmission belt is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the inner and outer belt bodies of the transmission belt respectively. The guide sub-units include upper guide rollers and lower guide rollers arranged correspondingly on the upper and lower sides. The upper guide rollers and lower guide rollers are rotatably installed on the ends of the upper mounting shaft and the lower mounting shaft respectively. The upper guide rollers and the lower guide rollers clamp and guide the belt body. The upper mounting shaft and the lower mounting shaft are fixedly installed on the guide bracket. The guide bracket consists of a vertically arranged A1 connector and a horizontally arranged A2 connector. The guide bracket is fixedly installed on the chamber bottom plate through the A2 mounting plate.

[0014] The driving motor is fixedly mounted on the chamber bottom plate through a motor bracket, and a pressing member for pressing the B driving wheel is provided on the output shaft of the driving motor.

[0015] The above-mentioned solution provided by the present invention moves the guiding and sealing structure of the magnetic fluid device from the vacuum end to the atmospheric end, which can solve the problem of easy wear of the bearings inside the magnetic fluid device under vacuum conditions; the transmission structure is replaced by a combined structure from a traditional integrated structure, which can not only directly transmit the bias high-voltage current of the coating equipment to the inside of the vacuum chamber through the magnetic fluid device, but also enable the driving motor to drive the magnetic fluid to rotate through the isolation of the insulating parts; the addition of the guiding structure can adjust the problem of the two transmission wheels not being in the same horizontal plane due to the uneven chamber bottom plate, the processing and assembly errors of the assembly, and the deflection of the synchronous belt caused by later operation wear; thereby improving the service life and reliability of the coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the present utility model.

[0017] Figure 2 for Figure 1 Schematic cross-sectional view of .

[0018] Figure 3 A cross-sectional view of the guide mechanism.

[0019] Figure 4 for Figure 2 Enlarged schematic diagram of point A in the middle.

[0020] Explanation of the figure numbers: 10-chamber bottom plate, 11-rotating frame body, 20-magnetic fluid body, 21-assembly part, 22-insulating plate, 23-A1 mounting plate, 24-insulating sleeve, 25-dust cover, 26-assembly bolt, 27-insulating sleeve, 30-drive motor, 31-motor bracket, 32-B transmission wheel, 33-pressing part, 34-A transmission wheel, 35-transmission belt, 41-vertical mounting plate, 42-horizontal mounting plate, 43-insulating mounting plate, 44-copper sleeve, 45-induction switch bracket, 46-induction block, 47-induction mounting part, 48-pressure cover, 51-upper guide roller, 52-lower guide roller, 53-upper mounting shaft, 54-lower mounting shaft, 55-A1 connecting piece, 56-A2 connecting piece. DETAILED DESCRIPTION

[0021] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.

[0022] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include reasonable and inconsistent allowances for machining or human errors.

[0023] like Figures 1 to 3 A turret device for vacuum coating is shown. It includes a turret body 11 for assembling fixtures, a magnetic fluid device (MFD) and a drive mechanism located outside the coating chamber. The chamber floor 10 of the coating chamber is provided with mounting holes. The MFD device includes a MFD body 20 and upper and lower connecting shafts, respectively, located at the upper and lower ends of the MFD body 20. The MFD body 20 is mounted on the chamber floor 10 via an insulating seal assembly. The upper connecting shaft extends through the mounting hole and connects to the turret body 11, while the lower connecting shaft is in driving connection with the drive mechanism. The turret body 11 is bolted to the top of the MFD device and is used to support fixtures or workpiece carriers within the vacuum chamber. The upper connecting shaft extends into the vacuum chamber and connects to the turret body 11. The bearing end of the MFD body 20 is mounted outside the chamber. The bearing inside the MFD body 20 is sealed to prevent contact with the vacuum. The MFD device also includes a heat dissipation structure to dissipate heat from the upper connecting shaft (MFD body 20) after it is exposed to high temperatures.

[0024] The specific solution is as follows: an A1 mounting plate 23 is fixedly mounted on the outside of the chamber bottom plate 10, an assembly portion 21 is provided on the magnetic fluid body 20, an insulating sealing assembly includes an insulating plate 22 located between the A1 mounting plate 23 and the assembly portion 21, and A assembly holes are provided on the assembly portion 21 at intervals along its circumference. The assembly portion 21, the insulating plate 22, and the A1 mounting plate 23 are arranged in a superimposed manner. The A assembly holes are provided in the A assembly holes to achieve a fixed connection between the magnetic fluid body 20 and the A1 mounting plate 23, and the assembly bolts 26 are provided with an insulating sleeve 27. Specifically, the assembly portion 21 can be formed by a flange provided on the magnetic fluid body 20, and the A1 mounting plate 23 can be fixedly connected to the chamber bottom plate 10 by welding. The assembly bolts 26 are installed in the insulating sleeve 27 to prevent electrical conduction. The magnetic fluid body 20 is isolated by the insulating plate 22 to prevent the current of the magnetic fluid body 20 from being conducted into the vacuum chamber.

[0025] like Figure 2 、 4 As shown: the insulating sealing assembly also includes an insulating sleeve 27 tube 24 that is hollowly sleeved on the upper connecting shaft portion. The lower end of the insulating sleeve 27 tube 24 is fixedly assembled and connected to the insulating plate 22, and the upper end of the insulating sleeve 27 tube 24 extends into the coating chamber. Specifically, the insulating sleeve 27 tube 24 and the insulating plate 22 can be fixedly connected by a bolt assembly. A dust cover 25 is sleeved on the shaft body of the upper connecting shaft portion located in the coating chamber, and the dust cover 25 is fixedly mounted on the chamber bottom plate 10. The function of the dust cover 25 is to prevent dust from entering the gap between the insulating sleeve 27 tube 24 and the upper connecting shaft portion. The dust cover 25 is fixed to the chamber bottom plate 10 by a bolt assembly.

[0026] like Figure 2As shown, the lower connecting shaft is provided with a transmission wheel A 34 . The drive mechanism includes a drive motor 30 . The output shaft of the drive motor 30 is provided with a transmission wheel B 32 . The transmission wheel A 34 is connected to the transmission wheel B 32 in a driving manner. The transmission wheel A 34 is mounted on the lower connecting shaft via an insulating member A, a gland 48 , and a coupling. Specifically, the coupling is connected to the lower connecting shaft via a flat key. The coupling is fixedly connected to the insulating member A and the transmission wheel A 34 via bolts. The gland 48 then secures the coupling to the step on the lower connecting shaft. The isolation provided by the insulating member A isolates the high-voltage current of the magnetic fluid body 20 . The lower connecting shaft portion is a variable diameter shaft portion, including an A1 shaft segment and an A2 shaft segment arranged upper and lower. The outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment. The A transmission wheel 34 is installed on the A1 shaft segment and also includes a copper sleeve 44 for connecting to the power supply. The copper sleeve 44 and the A2 shaft segment are concentric and in rotational contact connection. The copper sleeve 44 is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate 10.

[0027] like Figure 3 As shown, drive pulleys A 34 and B 32 are connected via a transmission belt 35. A guide mechanism is provided between the drive motor 30 and the magnetic fluid device to guide the transmission belt 35. The transmission belt 35 (synchronous belt) connects drive pulleys A 34 and B 32. The advantages of the transmission belt 35 are precise, smooth transmission, low error, and low noise. Made of high-strength, wear-resistant non-metallic materials, the transmission belt 35 is durable and insulated. It requires no assembly or splicing, making installation and adjustment simple and easy to maintain. A guide mechanism is installed along the transmission belt 35's path to prevent excessive horizontality between the master and slave pulleys, which can lead to synchronous belt deflection due to wear and tear. The power connection mounting bracket includes a horizontal mounting plate 42 and a vertical mounting plate 41. The vertical mounting plate 41 is located within the transmission belt 35 and is suspended from the chamber floor 10. The horizontal mounting plate 42 is fixedly mounted to the lower end of the vertical mounting plate 41. An insulating mounting plate 43 is fixedly mounted to the horizontal mounting plate 42. The lower end of the copper sleeve 44 is fixedly mounted to the insulating mounting plate 43. A suspended inductive switch bracket 45 is also provided on the insulating mounting plate 43. The inductive switch bracket 45 is used to mount an inductive switch. An inductive block 46 is provided next to the inductive switch and is fixedly mounted to the lower end of the lower connecting shaft via an inductive mounting member 47. The vertical mounting plate 41 in the power connection mounting bracket is bolted to the A2 mounting plate. The insulating mounting plate 43 is bolted to the horizontal mounting plate 42 and the copper sleeve 44. The insulating mounting plate 43 serves to isolate the copper sleeve 44 from the current. The copper sleeve 44 fits in contact with the magnetic fluid body 20 and is used to power the magnetic fluid device. The induction switch bracket 45 is installed at the bottom of the insulating mounting plate 43, and the induction block 46 and the mounting piece are fixed to the bottom of the magnetic fluid body 20 and rotate with the magnetic fluid body 20. The induction switch (photoelectric sensor) installed on the induction switch bracket 45 can detect the position and count.

[0028] The belt surface of the transmission belt 35 is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the inner and outer belt bodies of the transmission belt 35 respectively. The guide sub-units include upper guide rollers 51 and lower guide rollers 52 arranged correspondingly at the upper and lower ends. The upper guide rollers 51 and lower guide rollers 52 are rotatably mounted on the ends of the upper mounting shaft 53 and lower mounting shaft 54 ​​respectively. The upper guide rollers 51 and lower guide rollers 52 sandwich and guide the belt body. The upper mounting shaft 53 and lower mounting shaft 54 ​​are fixedly mounted on the guide bracket. The guide bracket consists of a vertically arranged A1 connector 55 and a horizontally arranged A2 connector 56. The guide bracket is fixedly mounted on the chamber bottom plate 10 via the A2 mounting plate. The A2 mounting plate can be fixedly mounted on the chamber bottom plate 10 by welding. The guide mechanism is fixedly connected to the A2 mounting plate via bolts. The upper mounting shaft 53, the lower mounting shaft 54, the upper guide roller 51, the lower guide roller 52, the upper mounting shaft 53, the lower mounting shaft 54, the A1 connector 55, and the A2 connector 56 are fixed together via bolts. The upper guide roller 51 and the lower guide roller 52 are pressed against the sides of the transmission belt 35. The drive motor 30 is fixedly mounted on the chamber floor 10 via a motor bracket 31. A clamping member 33 for clamping the B transmission wheel 32 is provided on the output shaft of the drive motor 30. Specifically, the drive motor 30 is fixed to the A3 mounting plate, which is fixedly mounted to the chamber floor 10 by welding. The motor bracket 31 is fixed to the A3 mounting plate via bolts. The B transmission wheel 32 is keyed to the output shaft of the drive motor 30. If the load of the rotating frame body 11 is large, the belt size needs to be set larger, resulting in the B transmission wheel 32 being larger than the output shaft of the driving motor 30. Therefore, a clamping member 33 is installed on the upper end of the B transmission wheel 32 for tightening.

[0029] The above scheme moves the guiding and sealing structure of the magnetic fluid device from the vacuum end to the atmospheric end, which can solve the problem of easy wear of the bearings inside the magnetic fluid device under vacuum conditions; the transmission structure is replaced from a traditional integrated structure to a combined structure, which can not only directly transmit the bias high-voltage current of the coating equipment to the inside of the vacuum chamber through the magnetic fluid device, but also enable the drive motor 30 to drive the magnetic fluid to rotate through the isolation of the insulating parts; adding a guiding structure can adjust the problem of synchronous belt deflection caused by the unevenness of the chamber bottom plate 10, the processing and assembly errors of the assembly causing the two transmission wheels to be not in the same horizontal plane, and the wear and tear of the later operation; thereby improving the service life and reliability of the coating equipment.

[0030] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A rotary rack device for vacuum coating, characterized in that: It includes a turret body for assembling tooling fixtures, and a magnetic fluid device and a driving mechanism located outside the coating chamber. A mounting hole is provided on the chamber bottom plate of the coating chamber. The magnetic fluid device includes a magnetic fluid body and an upper connecting shaft and a lower connecting shaft respectively provided at the upper and lower ends of the magnetic fluid body. The magnetic fluid body is installed on the chamber bottom plate through an insulating sealing assembly. The upper connecting shaft passes through the mounting hole and is connected to the turret body, and the lower connecting shaft is connected to the driving mechanism.

2. The rotary rack device for vacuum coating according to claim 1, characterized in that: An A1 mounting plate is fixedly installed on the outside of the chamber bottom plate, and an assembly part is provided on the magnetic fluid body. The insulating sealing assembly includes an insulating plate located between the A1 mounting plate and the assembly part. A assembly holes are arranged on the assembly part along its circumferential intervals. The assembly part, the insulating plate and the A1 mounting plate are arranged in a superimposed manner. Assembly bolts for achieving a fixed connection between the magnetic fluid body and the A1 mounting plate are provided in the A assembly hole, and an insulating sleeve is provided on the assembly bolt.

3. The rotary rack device for vacuum coating according to claim 2, characterized in that: The insulating sealing component also includes an insulating sleeve which is hollowly sleeved on the upper connecting shaft portion, the lower end of the insulating sleeve is fixedly assembled and connected to the insulating plate, and the upper end of the insulating sleeve extends into the coating cavity.

4. The rotary rack device for vacuum coating according to claim 2, characterized in that: The shaft body of the upper connecting shaft portion is located in the coating chamber and is sleeved with a dust cover, which is fixedly mounted on the chamber bottom plate.

5. The rotary rack device for vacuum coating according to claim 1, characterized in that: A transmission wheel A is provided on the lower connecting shaft, the driving mechanism includes a driving motor, and a transmission wheel B is provided on the output shaft of the driving motor. The transmission wheel A and the transmission wheel B are connected in transmission. The transmission wheel A is installed on the lower connecting shaft through the A insulating member, the pressure cover and the coupling.

6. The rotary rack device for vacuum coating according to claim 5, characterized in that: The lower connecting shaft is a variable diameter shaft, including an A1 shaft segment and an A2 shaft segment arranged upper and lower. The outer diameter of the A1 shaft segment is larger than the outer diameter of the A2 shaft segment. The A transmission wheel is installed on the A1 shaft segment and also includes a copper sleeve for power connection. The copper sleeve and the A2 shaft segment are concentric and connected in rotational contact. The copper sleeve is installed on the power connection mounting bracket, and the power connection mounting bracket is fixedly installed on the chamber bottom plate.

7. The rotary rack device for vacuum coating according to claim 5 or 6, characterized in that: The A transmission wheel and the B transmission wheel are connected by a transmission belt, and a guide mechanism for guiding the transmission belt is provided between the drive motor and the magnetic fluid device.

8. The rotary rack device for vacuum coating according to claim 6, characterized in that: The power connection mounting bracket includes a horizontal mounting plate arranged horizontally and a vertical mounting plate arranged vertically. The vertical mounting plate is located inside the transmission belt, and the vertical mounting plate is suspended on the chamber bottom plate. The horizontal mounting plate is fixedly mounted on the lower end of the vertical mounting plate. An insulating mounting plate is fixedly mounted on the horizontal mounting plate, and the lower end of the copper sleeve is fixedly mounted on the insulating mounting plate. A suspended induction switch bracket is also provided on the insulating mounting plate. The induction switch bracket is used to install the induction switch. An induction block is provided next to the induction switch, and the induction block is fixedly mounted on the lower end of the lower connecting shaft through the induction mounting piece.

9. The rotary rack device for vacuum coating according to claim 7, characterized in that: The belt surface of the transmission belt is arranged vertically, and the guide mechanism includes two guide sub-units for guiding the inner and outer belt bodies of the transmission belt respectively. The guide sub-units include upper guide rollers and lower guide rollers arranged correspondingly on the upper and lower sides. The upper guide rollers and lower guide rollers are rotatably installed on the ends of the upper mounting shaft and the lower mounting shaft respectively. The upper guide rollers and the lower guide rollers clamp and guide the belt body. The upper mounting shaft and the lower mounting shaft are fixedly installed on the guide bracket. The guide bracket consists of a vertically arranged A1 connector and a horizontally arranged A2 connector. The guide bracket is fixedly installed on the chamber bottom plate through the A2 mounting plate.

10. The rotary rack device for vacuum coating according to claim 1, characterized in that: The driving motor is fixedly mounted on the chamber bottom plate through a motor bracket, and a pressing member for pressing the B driving wheel is provided on the output shaft of the driving motor.

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