Temperature control system for liquid heater and semiconductor process equipment

Abstract

The application discloses a temperature control system of a liquid heater and a semiconductor process equipment, and relates to the technical field of semiconductors. The temperature control system comprises a first temperature acquisition module, a second temperature acquisition module and a power adjustment module. The power adjustment module is connected with the first temperature acquisition module, the second temperature acquisition module and a heating device in the liquid heater. The first temperature acquisition module acquires the temperature of liquid in a process cavity and outputs a corresponding first voltage value. The second temperature acquisition module acquires the temperature of the heating device and outputs a corresponding second voltage value. The power adjustment module generates a first voltage control signal according to the first voltage value and a first voltage threshold value, and generates a second voltage control signal according to the second voltage value and a second voltage threshold value. The first and second voltage control signals are used for adjusting the power of the heating device. The application adopts a double adjustment (i.e. two-way temperature control) algorithm, and the temperature control speed is faster and the deviation is smaller.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a temperature control system for a liquid heater and semiconductor process equipment. Background Technology

[0002] Liquid heaters, as heating devices for liquids in semiconductor process equipment, play a crucial role in the study of thermodynamic and kinetic effects. Furthermore, the monitoring and control of liquid temperature is particularly important in industrial control systems.

[0003] In related technologies, such as Figure 1 As shown, the temperature measurement module 110 measures the water temperature and transmits the temperature data to the control module 120. The control module 120 performs proportional-integral-derivative (PID) calculations on the received temperature data and drives the heating element 130 based on the calculation results. For example, it controls the heating time of the heating element 130 according to different temperature differences to achieve the purpose of controlling the water temperature. However, the above method only has one temperature control channel, resulting in slow temperature control speed and large deviation. Utility Model Content

[0004] The purpose of this application is to provide a temperature control system for a liquid heater and semiconductor process equipment to solve the problems of slow temperature control speed and large deviation in related technologies.

[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions: In a first aspect, embodiments of this application provide a temperature control system for a liquid heater, comprising: a first temperature acquisition module, a second temperature acquisition module, and a power adjustment module; the power adjustment module is connected to the first temperature acquisition module, the second temperature acquisition module, and a heating device in the liquid heater, respectively; the first temperature acquisition module is used to acquire the temperature of the liquid in the process chamber and output a corresponding first voltage value; the second temperature acquisition module is used to acquire the temperature of the heating device and output a corresponding second voltage value; the power adjustment module is used to generate a first voltage control signal based on the first voltage value and a preset first voltage threshold, and to generate a second voltage control signal based on the second voltage value and a preset second voltage threshold, wherein the first voltage control signal and the second voltage control signal are respectively used to adjust the power of the heating device.

[0006] In a second aspect, embodiments of this application provide a semiconductor process apparatus, including: a liquid heater and a temperature control system as described in the first aspect, wherein the liquid heater is connected to the temperature control system, and the temperature control system is used to adjust the power of the heating device in the liquid heater.

[0007] The above-described technical solutions adopted in the embodiments of this application can achieve the following beneficial effects: The temperature control system for the liquid heater in this embodiment acquires the temperature of the liquid in the process chamber through a first temperature acquisition module and outputs a corresponding first voltage value. It also acquires the temperature of the heating element through a second temperature acquisition module and outputs a corresponding second voltage value. The power adjustment module adjusts the power of the heating element based on the two voltage values. This embodiment employs a dual-adjustment (i.e., dual-path temperature control) algorithm, which, compared to the single-adjustment algorithm in related technologies, results in faster temperature control and smaller deviations. Attached Figure Description

[0008] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the structure of a temperature control system in related technologies; Figure 2 A schematic diagram of a temperature control system for a liquid heater is provided as an embodiment of this application; Figure 3 A schematic diagram illustrating the principle of dual PID control provided for one embodiment of this application; Figure 4 A schematic diagram of the structure of a temperature control system for a liquid heater is provided for another embodiment of this application; Figure 5 A circuit diagram of a temperature control alarm module provided in one embodiment of this application; Figure 6 A schematic diagram of a temperature conversion circuit provided in one embodiment of this application; Figure 7 A schematic diagram of a temperature conversion circuit is provided for another embodiment of this application; Figure 8 A schematic diagram of a signal processing circuit provided in one embodiment of this application; Figure 9 A circuit schematic diagram of a voltage conversion circuit provided for one embodiment of this application; Figure 10 A circuit diagram of a voltage divider circuit provided for one embodiment of this application; Figure 11 A circuit schematic diagram of an operational amplifier circuit provided for one embodiment of this application; Figure 12 A circuit schematic diagram of a bias circuit provided for one embodiment of this application; Figure 13 A circuit schematic diagram of a voltage follower circuit provided for one embodiment of this application; Figure 14 A circuit schematic diagram of a multi-channel analog-to-digital converter is provided for one embodiment of this application; Figure 15 This is a schematic diagram of the structure of a semiconductor process apparatus provided in one embodiment of this application. Detailed Implementation

[0009] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0010] The terms "first," "second," etc., used in this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein. Furthermore, "and / or" in this application indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship. It should be noted that all data involved in this application was obtained with the user's authorization.

[0011] The technical solutions provided by the various embodiments of this application are described in detail below with reference to the accompanying drawings.

[0012] Figure 2 This is a schematic diagram of a temperature control system for a liquid heater provided as an embodiment of this application. Figure 2 As shown, the temperature control system of the liquid heater in this embodiment of the application may specifically include: a first temperature acquisition module 210, a second temperature acquisition module 220, and a power adjustment module 230.

[0013] The power adjustment module 230 is connected to the first temperature acquisition module 210, the second temperature acquisition module 220, and the heating element 241 in the liquid heater 240. The heating element in the liquid heater 240 can be a heating tube; however, this embodiment does not impose excessive restrictions on the type of heating element in the liquid heater 240.

[0014] The first temperature acquisition module 210 is used to acquire the temperature T1 of the liquid in the process chamber and output the corresponding first voltage value Vs1.

[0015] The second temperature acquisition module 220 is used to acquire the temperature T2 of the heating device 241 and output the corresponding second voltage value Vs2.

[0016] The power adjustment module 230 is used to generate a first voltage control signal based on a first voltage value Vs1 and a preset first voltage threshold Vs1', and to generate a second voltage control signal based on a second voltage value Vs2 and a preset second voltage threshold Vs2'. The first voltage control signal and the second voltage control signal are used to adjust the power of the heating device 241 so that the liquid heater 240 continues to heat up.

[0017] Taking the heating element 241 in the liquid heater 240 as a heating tube as an example, the heating tube heats the liquid flowing through the liquid heater 240. The liquid flowing through the liquid heater 240 flows out from the outlet of the liquid heater 240 and is transported to the process chamber through the pipeline. That is, by adjusting the temperature T2 of the heating tube, the temperature T1 of the liquid in the process chamber can be indirectly adjusted.

[0018] The aforementioned "first voltage control signal" and "second voltage control signal" can specifically be 0~380 volts (V) alternating current (AC) voltage control signals.

[0019] The power regulation module 230, based on the data of "temperature T1 of the liquid in the process chamber - first voltage value Vs1", indirectly controls the temperature T2 of the heating device 241 through PID regulation, thereby indirectly controlling the temperature T1 of the liquid in the process chamber. However, due to external interference such as heat loss from pipelines, the actual temperature T1 of the liquid in the process chamber differs from the temperature T2 of the heating device 241. This difference causes a temperature deviation when the temperature T1 of the liquid in the process chamber is controlled by PID regulation. To solve this problem, this embodiment employs a dual PID regulation method for control, such as... Figure 3 As shown: The power regulation module 230 can generate a first voltage control signal using a PID algorithm based on the first voltage value Vs1 corresponding to the temperature T1 of the liquid in the process chamber and a set value (i.e., a preset first voltage threshold Vs1'), thereby achieving first-channel temperature control. The power regulation module 230 can also generate a second voltage control signal using a PID algorithm based on the second voltage value Vs2 corresponding to the temperature T2 of the heating device 241 and a set value (i.e., a preset second voltage threshold Vs2'), thereby achieving second-channel temperature control. Compared to the single-control algorithm in related technologies, the above dual-regulation (i.e., two-channel temperature control) algorithm provides faster temperature control and smaller deviations.

[0020] Specifically, the temperature difference T1 of the liquid inside the process chamber and the temperature T2 of the heating device 241 is expressed by the relationship T1=αT2, where α is the proportionality coefficient between T1 and T2. This is combined with the relationship between the thermistor Rs and temperature t: Rs=R(t)= R0(1+At+Bt) 2 (For details, please refer to the relevant description of formula (4) later, which will not be repeated here). At this time, the corrected thermistor Rs' is: Rs'= R0(1+Aαt+Bαt 2 (1) The following relationship exists between the voltage Vs corresponding to the thermistor Rs and the thermistor Rs. (For details, please refer to the relevant description of formula (9) later, which will not be repeated here), to obtain the voltage corresponding to the corrected thermistor Rs': (2) The second voltage threshold Vs2' corresponding to the temperature T2 of the heating device 241 can be set according to the above correction formula (2). The power adjustment module 230 is adjusted by secondary PID according to Vs' to avoid deviation of the actual temperature T1 of the liquid in the process chamber.

[0021] Furthermore, such as Figure 4 As shown, Figure 2 The first temperature acquisition module 210 may specifically include a first temperature sensor 211 and a first temperature conversion circuit 212; the first temperature sensor 211 is connected to the power regulation module 230 through the first temperature conversion circuit 212. Wherein: The first temperature sensor 211 is used to acquire the temperature T1 of the liquid in the process chamber and output the corresponding first temperature data. For example, when the first temperature sensor 211 is a first thermistor, the first temperature data is the first resistance value Rs1.

[0022] The first temperature conversion circuit 212 is used to convert the input first temperature data into a first voltage value Vs1.

[0023] Correspondingly, such as Figure 4 As shown, Figure 2 The second temperature acquisition module 220 may specifically include a second temperature sensor 221 and a second temperature conversion circuit 222; the second temperature sensor 221 is connected to the power regulation module 230 through the second temperature conversion circuit 222. Wherein: The second temperature sensor 221 is used to acquire the temperature T2 of the heating device 241 and output the corresponding second temperature data. For example, when the second temperature sensor 221 is a second thermistor, the second temperature data is the second resistance value Rs2.

[0024] The second temperature conversion circuit 222 is used to convert the input second temperature data into a second voltage value Vs2.

[0025] Furthermore, such as Figure 4 As shown, Figure 2 The power regulation module 230 may specifically include a controller 231 and a regulation circuit 232. The controller 231 is connected to the first temperature acquisition module 210 and the second temperature acquisition module 220, respectively, and the controller 231 is connected to the heating device 241 through the regulation circuit 232. Controller 231 is configured to generate a first adjustment signal based on a first voltage value Vs1 and a first voltage threshold Vs1', and to generate a second adjustment signal based on a second voltage value Vs2 and a preset second voltage threshold Vs2'. Specifically, the first and second adjustment signals can be pulse width modulation (PWM) signals. Controller 231 can specifically be a microcontroller unit (MCU).

[0026] The regulating circuit 232 is used to generate a first voltage control signal based on the input first regulating signal, and to generate a second voltage control signal based on the input second regulating signal.

[0027] Furthermore, such as Figure 4 As shown, the regulating circuit 232 may specifically include a current generating unit 2321 and a rectifier 2322; the current generating unit 2321 is connected to the controller 231, and the current generating unit 2321 is connected to the heating device 241 through the rectifier 2322. Wherein: The current generation unit 2321 is used to generate a first current control signal within a preset current range based on the input first adjustment signal, and to generate a second current control signal within a preset current range based on the input second adjustment signal. Specifically, the first current control signal and the second current control signal can be current control signals of 4 to 20 milliamperes (mA).

[0028] Rectifier 2322 is used to generate a first voltage control signal based on an input first current control signal, and to generate a second voltage control signal based on an input second current control signal. Specifically, rectifier 2322 can be a silicon controlled rectifier (SCR) rectifier.

[0029] Furthermore, the temperature control system of the liquid heater in this embodiment may further include a third temperature acquisition module; the third temperature acquisition module is connected to the power regulation module 230, specifically to the controller 231 in the power regulation module 230. Wherein: The third temperature acquisition module is used to acquire the temperature T3 at the outlet of the liquid heater 240 and output the corresponding third voltage value Vs3; The power adjustment module 230 is also used to generate a third voltage control signal if the third voltage value Vs3 is greater than the preset third voltage threshold Vs3' (i.e., T3 is greater than the upper limit threshold T3'). The third voltage control signal is used to adjust the power of the heating device to 0, i.e., to forcibly interrupt the operation of the liquid heater 240, so as to prevent the abnormal high temperature of the liquid heater 240 from affecting electrical safety.

[0030] Furthermore, such as Figure 4 As shown, the third temperature acquisition module may specifically include a third temperature sensor 251 and a third temperature conversion circuit 252; the third temperature sensor 251 is connected to the power regulation module 230 through the third temperature conversion circuit 252. Wherein: The third temperature sensor 251 is used to acquire the temperature T3 at the outlet of the liquid heater 240 and output the corresponding third temperature data. For example, when the third temperature sensor 251 is a third thermistor, the third temperature data is the third resistance value Rs3.

[0031] The third temperature conversion circuit 252 is used to convert the input third temperature data into a third voltage value Vs3.

[0032] Furthermore, such as Figure 4 As shown, the temperature control system of the liquid heater in this embodiment of the application may further include a temperature control alarm module 260; the temperature control alarm module 260 is connected to the power regulation module 230, specifically connected to the controller 231 in the power regulation module 230. Wherein: The power regulation module 230 is also used to: output a fourth voltage control signal if the third voltage value is greater than the third voltage threshold, so as to control the temperature control alarm module 260 to output a temperature control abnormality alarm signal; and output a fifth voltage control signal if the third voltage value is less than or equal to the third voltage threshold, so as to control the temperature control alarm module 260 to stop outputting the temperature control abnormality alarm signal.

[0033] Specifically, controller 231 is further configured to generate a third adjustment signal if the third voltage value Vs3 is greater than a preset third voltage threshold Vs3'; adjustment circuit 232 is configured to generate a third voltage control signal based on the input third adjustment signal. Controller 231 is further configured to generate a fourth voltage control signal if the third voltage value Vs3 is greater than the preset third voltage threshold Vs3', and temperature control alarm module 260 outputs a temperature control abnormality alarm signal based on the input fourth voltage control signal. Controller 231 is further configured to generate a fifth voltage control signal if the third voltage value Vs3 is less than or equal to the preset third voltage threshold Vs3', and temperature control alarm module 260 stops outputting the temperature control abnormality alarm signal based on the input fifth voltage control signal.

[0034] The temperature control alarm module 260 outputs a temperature control abnormality alarm signal, which can be in the form of sound, light, or text. For example, when the output temperature control abnormality alarm signal is a light alarm signal, the circuit diagram of the temperature control alarm module 260 can be as follows: Figure 5 As shown, when the third voltage value Vs3 is greater than the preset third voltage threshold Vs3', that is, when the temperature T3 at the outlet of the liquid heater is abnormal (i.e., T3 is greater than the upper limit threshold T3'), the controller 231 provides a 3.3V voltage through the LED1 port, and the indicator light D14 lights up red. When the third voltage value Vs3 is less than or equal to the preset third voltage threshold Vs3', that is, when the temperature T3 at the outlet of the liquid heater returns to normal (i.e., T3 is less than or equal to the upper limit threshold T3'), the controller 231 provides a 0V voltage through the LED1 port, and the indicator light D14 turns off.

[0035] Furthermore, such as Figure 6 As shown, Figure 4 The first temperature conversion circuit 212 in the module may specifically include a first signal processing circuit 2121 and a first analog-to-digital (A / D) converter 2122. The first signal processing circuit 2121 is connected to the first temperature sensor 211, and the first signal processing circuit 2121 is connected to the power regulation module 230 through the first A / D converter 2122, specifically to the controller 231 in the power regulation module 230. The first signal processing circuit 2121 is used to convert the input first temperature data into a first analog voltage value Vs (1).

[0036] The first analog-to-digital converter 2122 is used to convert the first voltage value Vs(1) of the input analog quantity into the first voltage value Vs1 of the digital quantity.

[0037] Correspondingly, such as Figure 6 As shown, Figure 4 The second temperature conversion circuit 222 may also include a second signal processing circuit 2221 and a second analog-to-digital converter 2222; the second signal processing circuit 2221 is connected to the second temperature sensor 221, and the second signal processing circuit 2221 is connected to the power regulation module 230 through the second analog-to-digital converter 2222, specifically connected to the controller 231 in the power regulation module 230.

[0038] Correspondingly, such as Figure 6 As shown, Figure 4The third temperature conversion circuit 252 may also include a third signal processing circuit 2521 and a third analog-to-digital converter 2522; the third signal processing circuit 2521 is connected to the third temperature sensor 251, and the third signal processing circuit 2521 is connected to the power regulation module 230 through the third analog-to-digital converter 2522, specifically connected to the controller 231 in the power regulation module 230.

[0039] In practical applications, such as Figure 7 As shown, the three signal processing circuits (i.e., the first signal processing circuit 2121, the second signal processing circuit 2221, and the third signal processing circuit 2521) can be integrated. For example, the three signal processing circuits can share an external DC power input port 710. The three analog-to-digital converters can also be integrated. For example, the three analog-to-digital converters can be replaced by a multi-channel analog-to-digital converter 720. The three signal processing circuits are connected to the power conditioning module 230 through the multi-channel analog-to-digital converter 720, specifically to the controller 231 in the power conditioning module 230.

[0040] Furthermore, such as Figure 8 As shown, Figure 7 The first signal processing circuit 2121 may specifically include a first voltage conversion circuit 810, a first voltage divider circuit 820, a first operational amplifier circuit 830, a first bias circuit 840, and a first voltage follower circuit 850 connected in sequence. The first voltage divider circuit 820 is connected to the first thermistor Rs1. Figure 8 The first terminal of the first thermistor Rs1 (not shown) is connected to ground, and the second terminal of the first voltage follower circuit 850 is connected to the first analog-to-digital converter 2122 (not shown). Figure 8 (not shown in the image) or multi-channel analog-to-digital converter 720 ( Figure 8 (Not shown in the image) Connection. Where: The first voltage conversion circuit 810 is used to convert the input DC power supply signal into the required first DC voltage signal Vin (1).

[0041] The first voltage divider circuit 820 is used to divide the input first DC voltage signal Vin (1) and convert the first resistance value Rs1 into the corresponding first voltage divider value Vi (1).

[0042] The first operational amplifier circuit 830 is used to amplify the first voltage divider value Vi (1) to obtain the amplified first voltage divider value βVi (1).

[0043] The first bias circuit 840 is used to bias the amplified first voltage divider value βVi (1) to obtain the biased first voltage divider value Vs (1).

[0044] The first voltage follower circuit 850 is used to follow the biased first voltage divider value Vs(1) to obtain the first voltage value Vs(1) of the analog quantity.

[0045] Correspondingly, Figure 7 The specific structures of the second signal processing circuit 2221 and the third signal processing circuit 2521 are the same as those of the first signal processing circuit 2121, and will not be described again here.

[0046] in, Figure 8 The first voltage conversion circuit 810 in the middle can be as follows Figure 9 As shown, it includes a high-precision, low-ripple voltage conversion chip U29 (to reduce the ripple of the DC power signal) and an external circuit consisting of three capacitors C84, C85, and C86.

[0047] Figure 8 The first voltage divider circuit 820 in the middle can be as follows Figure 10 As shown, it includes a first thermistor Rs1 and a high-precision low-temperature drift resistor R124, etc.

[0048] Figure 8 The first operational amplifier circuit 830 in the middle can be as follows Figure 11 As shown, it includes an operational amplifier U32A and peripheral circuits consisting of resistors R125 and R126, capacitor C96, etc.

[0049] Figure 8 The first bias circuit 840 in the middle can be as follows Figure 12 As shown, it includes operational amplifier U32B, bias voltage Vref5 port, and peripheral circuits consisting of resistors R127, R128, R129, and R132.

[0050] Figure 8 The first voltage follower circuit 850 in the middle can be as follows Figure 13 As shown, it includes an operational amplifier U26A and peripheral circuits consisting of capacitors C93 and C97, resistors R130 and R131, diode D13, etc.

[0051] Specifically, the three temperature sensors mentioned above can be PT1000 platinum thermistors. The PT1000 platinum thermistor has a resistance of 1000 ohms (Ω) at a temperature of 0℃, and a resistance of approximately 1385.005 ohms at a temperature of 100℃.

[0052] The PT1000 platinum thermistor exhibits excellent temperature-resistance linearity, as shown below: R(t) = R0(1 + At + Bt) 2 (3) Where R(t) represents the resistance of the thermistor at temperature t, in Ω. t represents temperature, in degrees Celsius (°C). A and B represent the scale constants, which are fixed values, where A = 0.0038623139728 and B = -0.00000065314932626.

[0053] Based on the linear relationship between temperature and resistance, assuming the resistance of a PT1000 platinum thermistor is Rs at temperature t, then: Rs=R(t)= R0(1+At+Bt 2 (4) The temperature sensor's temperature acquisition range is 0~a1, based on the heating capacity of the liquid heater. Assuming Rs ranges from 0~b1, then: b1=R0(1+A*a1+B*a1) 2 (5) A high-precision, low-ripple voltage converter chip is selected to build a DC-DC voltage conversion circuit to obtain the required DC voltage signal Vin. Considering that the operating current allowed by the PT1000 platinum thermistor is ≤0.5mA, a PT1000 voltage divider circuit is connected at the back end. This is achieved by connecting a high-precision, low-temperature drift resistor R1 in series with the PT1000 platinum thermistor for voltage division. The resistance value of R1 is selected according to the following formula: Vin / 0.0005 (A) = 2000Vin, and a resistor with a similar resistance value is selected. At this time, the voltage division value Vi corresponding to the PT1000 platinum thermistor is in the range of 0~Vin, then: Vi=Vin*(Rs / (R1+Rs))(6) Vi is typically a millivolt (mV) level voltage signal. To meet the input voltage range requirements of the downstream multi-channel analog-to-digital converter, Vi needs to be amplified and biased. To enhance the load-carrying capacity of the load, a voltage follower circuit is added after the bias circuit.

[0054] Assumption Figure 11 If the operational amplifier circuit amplifies voltage Vi by a factor of β, then: β=(R125+R126) / R126(7) Assuming the bias voltage is Vref5 and the input voltage to the multi-channel analog-to-digital converter is Vs, then Vs=β*Vi-Vref5(8) Combining the above formulas (6) to (8), the final calculation yields: (9) Furthermore, Figure 7 The multi-channel analog-to-digital converter 720 in the middle can be like Figure 14As shown, the peripheral circuit includes an analog-to-digital converter chip U6 and capacitors C18, C19, C20, etc. The voltage values ​​Vs1, Vs2 and Vs3 corresponding to the three temperature sensors enter the analog-to-digital converter chip U6. The analog-to-digital converter chip U6 delivers the converted signal ADDATA to the back-end controller for processing.

[0055] In summary, the temperature control system for the liquid heater in this embodiment acquires the temperature of the liquid within the process chamber via a first temperature acquisition module and outputs a corresponding first voltage value. It also acquires the temperature of the heating element via a second temperature acquisition module and outputs a corresponding second voltage value. The power adjustment module adjusts the power of the heating element based on these two voltage values. This embodiment employs a dual-PID control (i.e., dual-path temperature control) algorithm, which, compared to the single-PID control algorithm in related technologies, results in faster temperature control and smaller deviations. By acquiring a third voltage value corresponding to the heater outlet temperature, the system can interrupt the liquid heater's operation when an abnormal temperature occurs but is not effectively detected. A temperature control alarm signal is then output through the temperature control alarm module to ensure electrical safety.

[0056] This application also provides a semiconductor process apparatus. Figure 15 This is a schematic diagram of a semiconductor process apparatus provided in one embodiment of this application. Figure 15 As shown, the semiconductor process equipment 1500 includes a liquid heater 240 and a temperature control system 1501 as described in any of the preceding embodiments. The liquid heater 240 is connected to the temperature control system 1501, which is used to adjust the power of the heating element 241 in the liquid heater 240.

[0057] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0058] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0059] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0060] This application can be described in the general context of computer-executable instructions, such as program modules, that are executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc., that perform a specific task or implement a specific abstract data type. This application can also be practiced in distributed computing environments where tasks are performed by remote processing devices connected via a communication network. In distributed computing environments, program modules can reside in local and remote computer storage media, including storage devices.

[0061] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

[0062] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A temperature control system for a liquid heater, characterized in that, include: The system comprises a first temperature acquisition module, a second temperature acquisition module, and a power regulation module; the power regulation module is connected to the first temperature acquisition module, the second temperature acquisition module, and the heating element in the liquid heater, respectively. The first temperature acquisition module is used to acquire the temperature of the liquid inside the process chamber and output the corresponding first voltage value; The second temperature acquisition module is used to acquire the temperature of the heating device and output the corresponding second voltage value; The power adjustment module is used to generate a first voltage control signal based on the first voltage value and a preset first voltage threshold, and to generate a second voltage control signal based on the second voltage value and a preset second voltage threshold. The first voltage control signal and the second voltage control signal are used to adjust the power of the heating device, respectively.

2. The temperature control system according to claim 1, characterized in that, The first temperature acquisition module includes a first temperature sensor and a first temperature conversion circuit; the first temperature sensor is connected to the power regulation module through the first temperature conversion circuit. The first temperature sensor is used to collect the temperature of the liquid inside the process chamber and output the corresponding first temperature data; The first temperature conversion circuit is used to convert the input first temperature data into the first voltage value.

3. The temperature control system according to claim 1, characterized in that, The second temperature acquisition module includes a second temperature sensor and a second temperature conversion circuit; the second temperature sensor is connected to the power regulation module through the second temperature conversion circuit. The second temperature sensor is used to collect the temperature of the heating device and output the corresponding second temperature data; The second temperature conversion circuit is used to convert the input second temperature data into the second voltage value.

4. The temperature control system according to claim 1, characterized in that, The power regulation module includes a controller and a regulation circuit; the controller is connected to the first temperature acquisition module and the second temperature acquisition module respectively, and the controller is connected to the heating device through the regulation circuit. The controller is configured to generate a first adjustment signal based on the first voltage value and the first voltage threshold, and to generate a second adjustment signal based on the second voltage value and a preset second voltage threshold; The regulating circuit is configured to generate a first voltage control signal based on the input first regulating signal, and to generate a second voltage control signal based on the input second regulating signal.

5. The temperature control system according to claim 4, characterized in that, The regulating circuit includes a current generating unit and a rectifier; the current generating unit is connected to the controller, and the current generating unit is connected to the heating device through the rectifier. The current generation unit is used to generate a first current control signal within a preset current range according to the input first adjustment signal, and to generate a second current control signal within a preset current range according to the input second adjustment signal. The rectifier is configured to generate a first voltage control signal based on the input first current control signal, and to generate a second voltage control signal based on the input second current control signal.

6. The temperature control system according to claim 1, characterized in that, Also includes: Third temperature acquisition module; The third temperature acquisition module is connected to the power regulation module; The third temperature acquisition module is used to acquire the temperature at the outlet of the liquid heater and output the corresponding third voltage value; The power adjustment module is further configured to: if the third voltage value is greater than a preset third voltage threshold, generate a third voltage control signal, the third voltage control signal being used to adjust the power of the heating device to 0.

7. The temperature control system according to claim 6, characterized in that, It also includes a temperature control alarm module; the temperature control alarm module is connected to the power regulation module; The power regulation module is further configured to: if the third voltage value is greater than the third voltage threshold, output a fourth voltage control signal to control the temperature control alarm module to output a temperature control abnormality alarm signal; if the third voltage value is less than or equal to the third voltage threshold, output a fifth voltage control signal to control the temperature control alarm module to stop outputting the temperature control abnormality alarm signal.

8. The temperature control system according to claim 2, characterized in that, The first temperature conversion circuit includes a first signal processing circuit and a first analog-to-digital converter; the first signal processing circuit is connected to the first temperature sensor, and the first signal processing circuit is connected to the power regulation module through the first analog-to-digital converter; The first signal processing circuit is used to convert the input first temperature data into a first voltage value of an analog quantity; The first analog-to-digital converter is used to convert the first voltage value of the input analog quantity into a first voltage value of the digital quantity.

9. The temperature control system according to claim 8, characterized in that, The first temperature sensor is a first thermistor. The first signal processing circuit includes a first voltage conversion circuit, a first voltage divider circuit, a first operational amplifier circuit, a first bias circuit, and a first voltage follower circuit connected in sequence. The first voltage divider circuit is connected to the first end of the first thermistor, the second end of the first thermistor is grounded, the first voltage follower circuit is connected to the first analog-to-digital converter, and the first temperature data is the first resistance value. The first voltage conversion circuit is used to convert the input DC power supply signal into the required first DC voltage signal; The first voltage divider circuit is used to divide the input first DC voltage signal and convert the first resistance value into a corresponding first voltage divider value; The first operational amplifier circuit is used to amplify the first voltage divider value to obtain the amplified first voltage divider value; The first bias circuit is used to bias the amplified first voltage divider value to obtain the biased first voltage divider value. The first voltage follower circuit is used to follow the biased first voltage divider value to obtain the first voltage value of the analog quantity.

10. A semiconductor process apparatus, characterized in that, include: A liquid heater and a temperature control system as described in any one of claims 1-9, wherein the liquid heater is connected to the temperature control system, and the temperature control system is used to adjust the power of the heating element in the liquid heater.

Images