Diaphragm type pressure detection device, manufacturing method and semiconductor equipment

Abstract

The invention provides a diaphragm type pressure detection device, a manufacturing method and semiconductor equipment, relates to the technical field of semiconductor equipment, and is used for solving the problem of how to improve the consistency of diaphragm tightening of the diaphragm type pressure detection device. Specifically, the diaphragm type pressure detection device comprises a first shell, a diaphragm and a first outer frame, and the diaphragm is located on one side of the first shell; the first outer frame is connected to the side, facing the first shell, of the diaphragm, surrounds the first shell and is in interference fit with the first shell so as to tighten the diaphragm; a detection cavity is defined by the first outer frame, the first shell and the membrane, and the detection cavity is used for being communicated with a to-be-detected cavity.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and more particularly to diaphragm pressure sensing devices, manufacturing methods, and semiconductor equipment. Background Technology

[0002] Diaphragm pressure sensing devices typically include a diaphragm. The pressure difference across the diaphragm causes deformation, and the pressure is detected by the changes in parameters such as capacitance or resistance resulting from this deformation. During assembly, the diaphragm needs to be stretched taut to accurately measure the pressure based on the amount of deformation.

[0003] In the prior art, the diaphragm of the diaphragm pressure detection device is usually tightened by stretching, which will result in poor consistency of diaphragm tightening and affect the detection accuracy of the diaphragm pressure detection device. Summary of the Invention

[0004] This application discloses a diaphragm pressure sensing device, a manufacturing method, and a semiconductor device to solve the technical problem of how to improve the consistency of diaphragm tension in a diaphragm pressure sensing device.

[0005] In a first aspect, this application provides a diaphragm pressure detection device, which includes a first housing, a diaphragm, and a first outer frame. The diaphragm is located on one side of the first housing. The first outer frame is connected to the side of the diaphragm facing the first housing, surrounds the first housing, and is interference-fitted with the first housing to tighten the diaphragm. The first outer frame, the first housing, and the diaphragm form a detection cavity, which is used to communicate with the cavity to be detected.

[0006] According to the diaphragm pressure detection device provided in this application, a first outer frame is connected to the diaphragm. The first outer frame surrounds the first housing and is interference-fitted with the first housing. When assembling the diaphragm, the first outer frame, and the first housing, after the first housing is installed inside the first outer frame, due to the interference fit between the first housing and the first outer frame, the first housing can generate a compressive force away from the first housing at various positions on the inner circumferential surface of the first outer frame in the circumferential direction of the first housing. This causes the first outer frame to generate a radial tensile force on various positions of the diaphragm in the circumferential direction of the diaphragm, thereby tightening the diaphragm. In this way, during the diaphragm tightening process, various positions in the circumferential direction of the diaphragm can be stretched, resulting in more uniform diaphragm tightening, improving the consistency of diaphragm tightening, and enhancing the diaphragm tightening effect.

[0007] In one possible implementation, the first outer frame and the diaphragm are an integral structure. This ensures the overall structural strength of the first outer frame and the diaphragm, and guarantees the structural stability of the first outer frame and the diaphragm during tensioning.

[0008] In one possible implementation, the inner circumferential surface of the first outer frame and the outer circumferential surface of the first housing are both either straight cylindrical surfaces or conical cylindrical surfaces. This results in a more uniform compressive force between the first housing and the first outer frame in the circumferential direction, thereby improving the consistency of diaphragm tension.

[0009] In one possible implementation, the inner circumferential surface of the first outer frame is a first conical surface; the outer circumferential surface of the first housing is a second conical surface; the end of the first conical surface facing the diaphragm is the smaller end of the first opening, and the end of the first conical surface facing away from the diaphragm is the larger end of the first opening; the end of the second conical surface facing the diaphragm is the smaller end of the second opening, and the end of the second conical surface facing away from the diaphragm is the larger end of the second opening. In this way, when the first housing is installed into the first outer frame, the smaller end of the second opening of the second conical surface can be inserted into the larger end of the first opening of the first conical surface, and then the first housing can be pushed into the first outer frame along the direction from the larger end of the first opening towards the smaller end. Thus, the first conical surface can guide the first housing, thereby facilitating its installation into the first outer frame.

[0010] In one possible implementation, the diameter of the larger end of the second opening is greater than or equal to the diameter of the larger end of the first opening, the diameter of the larger end of the first opening is greater than the diameter of the smaller end of the second opening, and the diameter of the smaller end of the second opening is greater than the diameter of the smaller end of the first opening. In this way, when installing the first housing into the first outer frame, the smaller end of the second opening on the second conical surface can be inserted into the larger end of the first opening on the first conical surface, and then the first housing can be pushed into the first outer frame along the direction from the larger end of the first opening towards the smaller end. Thus, the first conical surface can guide the first housing, thereby facilitating its installation into the first outer frame.

[0011] In one possible implementation, the angle between the generatrix of the inner circumferential surface of the first outer frame and the axis of the inner circumferential surface of the first outer frame is a first included angle, and the angle between the generatrix of the outer circumferential surface of the first housing and the axis of the outer circumferential surface of the first housing is a second included angle; the first included angle is greater than or equal to the second included angle. In this way, during the process of installing the first housing into the first outer frame, the end of the first housing closer to the diaphragm always contacts the inner circumferential surface of the first outer frame first, thus making the position where the first housing exerts a compressive force on the first outer frame closer to the diaphragm, so that the direction of the tensile force on the diaphragm when it is tightened is closer to the radial direction, thereby ensuring the tightening effect of the diaphragm.

[0012] In one possible implementation, both the first included angle and the second included angle are greater than or equal to 0° and less than or equal to 5°. The first included angle and the second included angle being within the above range allows for smaller angles, ensuring the diaphragm's tension and making the connection between the first housing and the first outer frame more stable.

[0013] In one possible implementation, the diaphragm pressure detection device further includes a second housing connected to the side of the diaphragm opposite to the first housing. The second housing and the diaphragm define a reference chamber, the gas pressure within which is used as a reference pressure. Thus, when the pressure in the chamber to be detected changes, the pressure in the detection chamber changes accordingly. Since the pressure in the reference chamber remains constant, the pressure difference between the reference chamber and the detection chamber changes with the pressure in the chamber to be detected. This causes the diaphragm to bulge towards the side with lower pressure under the influence of the pressure difference between the reference and detection chambers. The pressure in the detection chamber can then be calculated from the change in diaphragm pressure to determine whether the pressure in the chamber to be detected, i.e., the second vacuum chamber, meets the requirements.

[0014] In one possible implementation, the diaphragm pressure detection device further includes a detection element disposed within a second housing. The detection element has a first electrode, and the diaphragm has a second electrode. The first and second electrodes form a detection capacitance. Thus, when the pressure in the chamber to be detected changes, the diaphragm bulges, causing a change in the distance between the first and second electrodes, which in turn changes the capacitance of the detection electrode. The pressure in the chamber to be detected can then be calculated based on this change in capacitance. This ensures the detection accuracy of the diaphragm pressure detection device.

[0015] In one possible implementation, a limiting protrusion is formed on the inner wall surface of the second housing. The pressure detection device also includes an elastic element. Along the thickness direction of the diaphragm, an elastic element is provided on one side of the detection element, and a limiting protrusion is provided on the other side of the detection element. The elastic element and the limiting protrusion limit and fix the detection element from opposite sides. The elastic force applied to the detection element by the elastic element towards the limiting protrusion ensures the accuracy of the installation position of the detection element, reduces deviations caused by installation errors, ensures the distance between the detection element and the diaphragm, and improves detection accuracy.

[0016] In one possible implementation, the reference chamber is a first vacuum chamber. This allows for a smaller pressure difference between the reference chamber and the chamber to be detected, such as a second vacuum chamber, to avoid excessive diaphragm bulging and deformation that could affect the detection results.

[0017] In one possible implementation, the reference cavity includes a first cavity located on the side of the detection element opposite to the diaphragm and a second cavity located between the detection element and the diaphragm, the first cavity and the second cavity being connected. Because the distance between the detection element and the diaphragm is small, the volume of the second cavity is small. Connecting the first cavity and the second cavity ensures that the pressure in both cavities remains consistent. When the diaphragm bulges, the pressure change in the second cavity caused by the spatial change is weakened by the first cavity, thereby mitigating the pressure change in the reference cavity caused by the diaphragm bulging and improving the accuracy of pressure detection in the cavity under test.

[0018] In one possible implementation, the detection element includes a support portion and a detection portion. Along the thickness direction of the diaphragm, an elastic element is provided on one side of the support portion, and a limiting protrusion is provided on the other side of the support portion. The detection portion is connected to the side of the support portion facing the diaphragm, and the radial dimension of the support portion is larger than the radial dimension of the detection portion.

[0019] Secondly, this application provides a semiconductor device, including the diaphragm-type pressure detection device and a vacuum chamber as described in the first aspect. The vacuum chamber has a second vacuum cavity and an opening communicating with the second vacuum cavity. The first housing of the diaphragm-type pressure detection device communicates with the second vacuum cavity and is used to detect the vacuum level of the second vacuum cavity. This allows the support portion to protrude radially relative to the detection portion, facilitating connection between the support portion and the second housing. It also reduces the material usage of the detection portion, saving costs. Furthermore, the detection portion is located on the side of the support portion facing the diaphragm, allowing the detection portion to be closer to the diaphragm, enabling the detection portion to more accurately detect the pressure of the cavity to be detected based on the deformation of the diaphragm.

[0020] Since the semiconductor device provided in this application includes the diaphragm-type pressure detection device of the first aspect, both can solve the same problem and achieve the same effect.

[0021] Thirdly, this application provides a manufacturing method for manufacturing the diaphragm-type pressure detection device of the first aspect. The manufacturing method includes: obtaining a diaphragm structure, the diaphragm structure including a diaphragm and a first outer frame connected to each other; installing a first housing into the space enclosed by the first outer frame, and making the first housing and the first outer frame interference fit to tighten the diaphragm.

[0022] Since the manufacturing method of the diaphragm pressure detection device provided in this application embodiment is used for the diaphragm pressure detection device of the first aspect, the two can solve the same problem and achieve the same effect.

[0023] In one possible implementation, installing the first housing into the space enclosed by the first outer frame and ensuring an interference fit between the first housing and the first outer frame includes: cooling the first housing at room temperature; placing the cooled first housing into the space enclosed by the first outer frame and gradually restoring the temperature of the first housing to room temperature to achieve an interference fit between the first housing and the first outer frame. By cooling the first housing at room temperature, it contracts due to the temperature drop, reducing the radial dimension of its outer circumference. This makes the radial dimension of the outer circumference of the first housing smaller than the radial dimension of the inner circumference of the first outer frame, facilitating placement of the first housing into the space enclosed by the first outer frame and reducing wear between the first housing and the first outer frame. Then, by gradually restoring the first housing to room temperature, the radial dimension of its outer circumference gradually recovers, achieving an interference fit between the first housing and the first outer frame. During this process, the diaphragm is only subjected to radial tension and not axial force (i.e., force perpendicular to the diaphragm), thus preventing diaphragm deformation and improving diaphragm tension.

[0024] In one possible implementation, installing the first housing into the space enclosed by the first outer frame, and ensuring an interference fit between the first housing and the first outer frame, includes: heating the diaphragm structure at room temperature; placing the first housing into the space enclosed by the first outer frame, and gradually allowing the temperature of the diaphragm structure to return to room temperature, thus achieving an interference fit between the first housing and the first outer frame. Heating the diaphragm structure causes it to undergo thermal impact, increasing the radial dimension of the inner circumferential surface of the first outer frame. This makes the radial dimension of the inner circumferential surface of the first outer frame larger than the radial dimension of the outer circumferential surface of the first housing, facilitating the placement of the first housing into the space enclosed by the first outer frame and reducing wear between the first housing and the first outer frame. Then, by gradually restoring the diaphragm structure to room temperature, the radial dimension of the inner circumferential surface of the first outer frame gradually recovers, achieving an interference fit between the first housing and the first outer frame. During this process, the diaphragm is only subjected to radial tension, not axial force, thus preventing diaphragm deformation and improving the diaphragm tension effect.

[0025] In one possible implementation, installing the first housing into the space enclosed by the first outer frame and ensuring an interference fit between the first housing and the first outer frame includes: machining the inner circumferential surface of the first outer frame into a first conical surface, wherein the end of the first conical surface facing the diaphragm is the smaller end of the first opening, and the end of the first conical surface facing away from the diaphragm is the larger end of the first opening; machining the outer circumferential surface of the first housing into a second conical surface, wherein the end of the second conical surface facing the diaphragm is the smaller end of the second opening, and the end of the second conical surface facing away from the diaphragm is the larger end of the second opening; and gradually pushing the first housing into the space enclosed by the first outer frame in a direction from the larger end of the first opening to the smaller end of the first opening until the first housing and the first outer frame are in an interference fit.

[0026] By machining the inner circumferential surface of the first outer frame into a first conical surface and the outer circumferential surface of the first housing into a second conical surface, and by gradually pushing the first housing into the space enclosed by the first outer frame along the direction from the larger end of the first opening to the smaller end of the first opening, the first conical surface can guide the first housing, thereby facilitating its installation into the space enclosed by the first outer frame. Furthermore, the radial preload of the diaphragm can be adjusted by regulating the contact position between the end of the first housing near the diaphragm and the inner circumferential surface of the first outer frame in a direction perpendicular to the diaphragm. This allows for convenient adjustment of the diaphragm's preload, enabling precise control of the diaphragm's preload. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of a semiconductor device provided in an embodiment of this application; Figure 2 for Figure 1 A schematic diagram of the diaphragm-type pressure detection device in the semiconductor equipment shown. Figure 3 for Figure 2 Schematic diagram of the sectional structure of the middle AA section; Figure 4 for Figure 3 An exploded view of one possible fit between the first outer frame and the first housing in the diaphragm pressure detection device shown; Figure 5 for Figure 3 An exploded view of another fitting relationship between the first outer frame and the first housing in the diaphragm pressure detection device shown. Figure 6 A flowchart illustrating a manufacturing method provided in an embodiment of this application.

[0029] Explanation of reference numerals in the attached figures: 100. Semiconductor equipment; 10. Vacuum chamber; 10A. Second vacuum chamber; 10B. Opening; 20. Diaphragm pressure detection device; 1. First housing; 11. Detection cavity; 12. Communicating channel; 13. Second conical surface; 131. Smaller end of the second opening; 132. Larger end of the second opening; 2. Diaphragm structure; 21. Diaphragm; 211. Second electrode; 22. First outer frame; 221. First conical surface; 2211. Smaller end of the first opening; 2212. Larger end of the first opening; 3. Second housing; 31. Reference cavity; 311. First cavity; 312. Second cavity; 32. Limiting protrusion; 5. Detection component; 51. First electrode; 52. Support part; 53. Detection part; 6. Elastic components. Detailed Implementation

[0030] In the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0031] In the embodiments of this application, it should be understood that the directional terms mentioned, such as "upper", "lower", "inner", "outer", etc., are only for reference to the direction of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this application, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0032] In the embodiments of this application, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," "third," and "fourth" may explicitly or implicitly include one or more of that feature.

[0033] In the embodiments of this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0034] In the embodiments of this application, "and / or" is merely a description of the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone.

[0035] Please see Figure 1 , Figure 1This is a schematic diagram of a semiconductor device 100 provided in an embodiment of this application. The semiconductor device 100 is used to process, inspect, and measure semiconductor products to ensure the pass rate of semiconductor products. Specifically, the semiconductor device 100 can be a semiconductor metrology device for inspecting and measuring semiconductor products, or a thin film deposition device, dry etching device, ion implantation device, etc., for processing semiconductor products.

[0036] It should be noted that when the semiconductor equipment 100 processes, tests, and measures semiconductor products, the semiconductor products usually need to be placed in a vacuum environment to avoid contamination of the semiconductor products by impurities, which would affect the accuracy of the processing, measurement, and testing of the semiconductor products.

[0037] In some embodiments, please continue reading Figure 1 The semiconductor device 100 may include a vacuum chamber 10 and a diaphragm pressure sensing device 20. The vacuum chamber 10 provides a vacuum environment for the semiconductor product. For example, the vacuum chamber 10 may have a second vacuum chamber 10A, which may be connected to a vacuum pump to create a vacuum environment within the second vacuum chamber 10A. The second vacuum chamber 10A is used to place semiconductor products, such as wafers, etc., so that the semiconductor products are in a vacuum environment.

[0038] The diaphragm-type pressure detection device 20 is used to detect the vacuum level of the second vacuum chamber 10A, so as to adjust the pressure of the second vacuum chamber 10A in a timely manner, so that the semiconductor product is in a more suitable vacuum environment. For example, the vacuum chamber 10 may also have an opening 10B communicating with the second vacuum chamber 10A. The diaphragm-type pressure detection device 20 communicates with the second vacuum chamber 10A through the opening 10B to detect the vacuum level of the second vacuum chamber 10A.

[0039] The diaphragm pressure detection device 20, in addition to detecting the vacuum level of the vacuum chamber 10 of the semiconductor device 100, can also be used to detect the pressure of other devices, such as gas pressure detection in pipelines, pressure detection of robots in industrial automation, and blood pressure measurement in medical devices. For example, the diaphragm pressure detection device 20 can be a capacitive thin-film vacuum gauge, a capacitive pressure gauge, a resistance pressure gauge, etc. This application uses a capacitive thin-film vacuum gauge as the diaphragm pressure detection device 20 and its application in the semiconductor device 100 as an example for illustrative purposes.

[0040] In some embodiments, please refer to Figure 2 , Figure 2 for Figure 1This is a schematic diagram of the diaphragm pressure sensing device 20 in the semiconductor device 100 shown. The diaphragm pressure sensing device 20 may include a first housing 1, a diaphragm structure 2, and a second housing 3. Please refer to [link / reference]. Figure 2 and Figure 3 , Figure 3 for Figure 2 The schematic diagram of the cross-sectional structure (AA) shows that the diaphragm structure 2 includes a diaphragm 21, which is disposed on one side of the first housing 1. The diaphragm structure 2 and the first housing 1 define a detection cavity 11, which is used to communicate with the cavity to be detected, so as to detect the pressure of the cavity to be detected by the diaphragm pressure detection device 20. At least a portion of the surface of the diaphragm 21 forms the inner wall surface of the detection cavity 11.

[0041] For example, the chamber to be detected can be the second vacuum chamber 10A described above, or it can be the internal space of a pipe, etc. This application uses the second vacuum chamber 10A described above as the chamber to be detected as an example. For example, the first housing 1 is connected to the second vacuum chamber 10A. Specifically, the first housing 1 is provided with a communication channel 12 that communicates with the internal space of the first housing 1, and the communication channel 12 communicates with the opening 10B of the vacuum chamber 10, so as to realize the communication between the first housing 1 and the second vacuum chamber 10A.

[0042] Please continue reading. Figure 3 The second housing 3 is located on the other side of the diaphragm 21 opposite to the first housing 1. Both the first housing 1 and the second housing 3 are connected to the diaphragm 21 and are used to fix and support the diaphragm 21.

[0043] The second housing 3 and the diaphragm structure 2 define a reference cavity 31, within which the gas pressure is used as a reference pressure. That is, the pressure within the reference cavity 31 is constant. At least a portion of the surface of the diaphragm 21 forms the inner wall of the reference cavity 31.

[0044] Thus, when the pressure in the chamber to be tested changes, the pressure in the detection chamber 11 will also change accordingly. At this time, since the pressure in the reference chamber 31 remains constant, the pressure difference between the pressure in the reference chamber 31 and the pressure in the detection chamber 11 will change with the pressure in the chamber to be tested. This causes the diaphragm 21 of the diaphragm structure 2 to bulge towards the side with lower pressure under the influence of the pressure difference between the pressure in the reference chamber 31 and the pressure in the detection chamber 11. The pressure in the detection chamber 11 can then be calculated from the change in the diaphragm 21 to determine whether the pressure in the chamber to be tested, i.e., the second vacuum chamber 10A, meets the requirements.

[0045] In some examples, the reference cavity 31 can be a first vacuum cavity, that is, the reference cavity 31 can also be a vacuum environment. This allows for a smaller pressure difference between the reference cavity 31 and the cavity to be detected, such as the second vacuum cavity 10A, to avoid excessive bulging and deformation of the diaphragm 21, which would affect the detection effect. The vacuum pressure of the first vacuum cavity and the vacuum pressure of the second vacuum cavity 10A can be different, so that the pressure difference between the first and second vacuum cavities 10A can cause the diaphragm 21 to bulge and deform, thereby detecting the vacuum level of the second vacuum cavity 10A.

[0046] In other examples, the reference cavity 31 can also be other pressure chambers, such as introducing a certain pressure of gas into the reference cavity 31 and ensuring that the pressure of the reference cavity 31 is at a constant value. This can also make the pressure of the reference cavity 31 and the second vacuum cavity 10A different, so as to detect the vacuum degree of the second vacuum cavity 10A.

[0047] In some other embodiments, the diaphragm pressure detection device 20 may only include the first housing 1 and the diaphragm structure 2, that is, without the second housing 3. In this case, the side of the diaphragm 21 of the diaphragm structure 2 facing away from the first housing 1 is the atmospheric environment, that is, atmospheric pressure is used as the reference pressure. In this way, the pressure can also be detected by the bulging deformation of the diaphragm 21 of the diaphragm pressure detection device 20.

[0048] In some examples, the diaphragm 21 can be a metal diaphragm such as a tearable steel diaphragm or an aluminum diaphragm. This gives the diaphragm 21 better self-healing capabilities and allows for better pressure detection. The diaphragm 21 can be a circular diaphragm, a square diaphragm, etc.; this application uses a circular diaphragm as an example for illustration.

[0049] In some examples, the thickness of the diaphragm 21 can be greater than or equal to 0.01 mm and less than or equal to 1 mm. For example, the thickness of the diaphragm 21 can be 0.01 mm, 0.05 mm, 0.1 mm, 0.2 mm, 0.5 mm, 0.8 mm, 1 mm, etc. A thickness within the above range ensures the structural strength of the diaphragm 21, prevents damage to the diaphragm 21, and allows the diaphragm 21 to bulge and deform under a small pressure difference, thereby improving the accuracy of pressure detection.

[0050] To ensure the accuracy of pressure detection by the diaphragm pressure detection device 20, the diaphragm needs to be stretched during assembly. This allows for more accurate detection of pressure changes in the chamber under test by measuring the deformation of the diaphragm 21 when it bulges or deforms. In existing technology, a stretching device is typically used to fix several positions along the circumference of the diaphragm 21, and then the diaphragm 21 is stretched radially to achieve tension. However, this method results in poor uniformity of force distribution on the diaphragm 21 due to only a few positions being stressed during tensioning, leading to inconsistent tension after tensioning. Furthermore, this method requires fixing several positions of the diaphragm 21, making the operation cumbersome and inefficient.

[0051] Therefore, in some embodiments, please refer to [the relevant documentation]. Figure 3 The diaphragm structure 2 in the diaphragm pressure detection device 20 provided in this application may include a diaphragm 21 and a first outer frame 22. The diaphragm 21 is used to bulge and deform to facilitate the detection of the pressure in the second vacuum chamber 10A.

[0052] The first outer frame 22 is connected to the side of the diaphragm 21 facing the first housing 1. The first outer frame 22 is used to support the diaphragm 21. In some examples, the first outer frame 22 and the diaphragm 21 can be an integral structure, for example, integrally formed by 3D printing, CNC machine tool processing, etc. This can ensure the overall structural strength of the first outer frame 22 and the diaphragm 21, and ensure the structural stability of the first outer frame 22 and the diaphragm 21 during the tensioning process. In other examples, the first outer frame 22 and the diaphragm 21 can also be connected by welding, screwing, snap-fitting, etc., so that the diaphragm 21 can also be supported by the first outer frame 22.

[0053] In some examples, the material of the first outer frame 22 can be stainless steel, aluminum alloy, iron, aluminum, etc. The material of the first outer frame 22 can be the same as or different from the material of the diaphragm 21.

[0054] Please continue reading. Figure 3 The first outer frame 22 surrounds the first housing 1 and is interference-fitted with the first housing 1 to tighten the diaphragm 21. At this time, the first outer frame 22, the first housing 1 and the diaphragm 21 form the detection cavity 11 described above.

[0055] In some examples, the first outer frame 22 can be a cylindrical structure, a frustum-shaped cylindrical structure, an elliptical cylindrical structure, a square cylindrical structure, etc. The first shell 1 can be a cylindrical structure, a frustum-shaped structure, an elliptical cylindrical structure, a square cylindrical structure, etc. This application does not impose specific limitations on this.

[0056] In some examples, at room temperature or at the same temperature, the radial dimension of the outer peripheral surface of the first housing 1 is greater than the radial dimension of the inner peripheral surface of the first outer frame 22, so as to ensure that the first housing 1 and the first outer frame 22 can be interference-fitted.

[0057] The diaphragm 21 is connected to the first outer frame 22, which surrounds the first housing 1 and is interference-fitted with the first housing 1. When assembling the diaphragm 21, the first outer frame 22 and the first housing 1, it is only necessary to place the first housing 1 inside the first outer frame 22 and interference-fit it with the first outer frame 22 to achieve the assembly of the diaphragm 21, the first outer frame 22 and the first housing 1. In the circumferential direction of the first housing 1, the first housing 1 can generate a compressive force away from the first housing 1 at each position of the inner circumferential surface of the first outer frame 22, so that the first outer frame 22 generates a radial tensile force on each position of the diaphragm 21 in the circumferential direction of the diaphragm 21, thereby tightening the diaphragm 21.

[0058] Thus, during the tensioning process of diaphragm 21, all positions in the circumferential direction of diaphragm 21 can be stretched, resulting in more uniform tensioning of diaphragm 21, improving the consistency of tensioning and enhancing the tensioning effect. Furthermore, the tensioning process of diaphragm 21 does not require a tensioning device; it can be achieved simply during the assembly of the first outer frame 22 and the first housing 1, thereby simplifying the tensioning process and improving the efficiency of diaphragm tensioning.

[0059] In some examples, the first housing 1 can be cooled in a low-temperature environment, such as liquid nitrogen, to shrink it until the radial dimension of the outer circumference of the first housing 1 is smaller than the radial dimension of the inner circumference of the first outer frame 22. Then, the shrunken first housing 1 is placed inside the first outer frame 22, and the first housing 1 is removed from the low-temperature environment. The temperature of the first housing 1 will gradually rise, thereby gradually increasing the radial dimension of the outer circumference of the first housing 1 to achieve an interference fit between the first housing 1 and the first outer frame 22. Thus, during the process of the first housing 1 and the first outer frame 22 tightening the diaphragm 21, the diaphragm 21 is only subjected to radial tension and not axial force (i.e., force perpendicular to the diaphragm 21), thereby preventing deformation of the diaphragm 21 and improving the tightening effect.

[0060] During the process of placing the first housing 1 into the first outer frame 22, a certain axial force (i.e., perpendicular to the diaphragm 21) can be applied to the first housing 1 by means of a press to assist the first housing 1 in entering the inner side of the first outer frame 22, so as to facilitate the assembly of the first housing 1 and the first outer frame 22.

[0061] In other examples, the diaphragm structure 2 can be heated, that is, the diaphragm 21 and the first outer frame 22 can be heated as a whole to cause the diaphragm structure 2 to expand due to heat. This increases the radial dimension of the inner circumferential surface of the first outer frame 22, making it larger than the radial dimension of the outer circumferential surface of the first housing 1. Then, the first housing 1 is placed inside the thermally expanded first outer frame 22, and heating of the diaphragm structure 2 is stopped, allowing the diaphragm structure 2 to gradually cool and shrink, so that the inner circumferential surface of the first outer frame 22 abuts against the outer circumferential surface of the first housing 1, thereby achieving an interference fit between the first housing 1 and the first outer frame 22. In this way, during the process of the first housing 1 and the first outer frame 22 tightening the diaphragm 21, the diaphragm 21 is only subjected to radial tension and not axial force, thus preventing deformation of the diaphragm 21 and improving the tightening effect of the diaphragm 21.

[0062] During the process of placing the first housing 1 into the first outer frame 22, a certain axial force can be applied to the first housing 1 by means of a press to assist the first housing 1 in entering the inner side of the first outer frame 22.

[0063] In other examples, an axial force can be directly applied to the first housing 1 by a press to push the first housing 1 into the inner side of the first outer frame 22 and make the first housing 1 and the first outer frame 22 interference fit. This can also tighten the diaphragm 21 and ensure the consistency of the diaphragm 21 bungee jump.

[0064] In some examples, the first housing 1 and the first outer frame 22 can also be welded. This can improve the strength of the connection between the first housing 1 and the first outer frame 22, and also improve the sealing between the outer peripheral surface of the first housing 1 and the inner peripheral surface of the first outer frame 22, so as to avoid gas leakage and ensure the accuracy of pressure detection of the chamber to be tested.

[0065] In other examples, the first housing 1 and the first outer frame 22 can be sealed by other means, such as using a sealing ring, filling with sealant, etc. This application does not specifically limit this.

[0066] In some embodiments, please refer to Figure 4 , Figure 4 for Figure 3 The diagram shows an exploded view of the fit between the first outer frame 22 and the first housing 1 in the diaphragm pressure detection device 20. Both the inner circumferential surface of the first outer frame 22 and the outer circumferential surface of the first housing 1 can be cylindrical. That is, both the inner circumferential surface of the first outer frame 22 and the outer circumferential surface of the first housing 1 are cylindrical. Thus, after the interference fit between the first housing 1 and the first outer frame 22, the compressive force exerted by the first housing 1 on the first outer frame 22 is more uniform in the circumferential direction of the first housing 1, thereby improving the consistency of the diaphragm 21's tension.

[0067] In some other embodiments, please refer to Figure 5 , Figure 5 for Figure 3 The diagram shows an exploded view of another fitting relationship between the first outer frame 22 and the first housing 1 in the diaphragm pressure detection device 20. Both the inner circumferential surface of the first outer frame 22 and the outer circumferential surface of the first housing 1 can be conical surfaces. That is, both the inner circumferential surface of the first outer frame 22 and the outer circumferential surface of the first housing 1 are frustoconical surfaces. Thus, after the interference fit between the first housing 1 and the first outer frame 22, the pressure exerted by the first housing 1 on various positions of the first outer frame 22 can be more uniform in the circumferential direction of the first housing 1, thereby better improving the consistency of the diaphragm 21's tension.

[0068] In some embodiments, please continue reading Figure 5 The inner circumferential surface of the first outer frame 22 is a first conical surface 221; the outer circumferential surface of the first housing 1 is a second conical surface 13. The end of the first conical surface 221 facing the diaphragm 21 is the end with the smaller opening 2211, and the end of the first conical surface 221 facing away from the diaphragm 21 is the end with the larger opening 2212. That is, the radial dimension of the end of the first conical surface 221 facing the diaphragm 21 is smaller than the radial dimension of the end of the first conical surface 221 facing away from the diaphragm 21.

[0069] The end of the second conical surface 13 facing the diaphragm 21 is the smaller end 131 of the second opening, and the end of the second conical surface 13 facing away from the diaphragm 21 is the larger end 132 of the second opening. That is, the radial dimension of the end of the second conical surface 13 facing the diaphragm 21 is smaller than the radial dimension of the end of the second conical surface 13 facing away from the diaphragm 21.

[0070] In this way, when the first housing 1 is installed into the first outer frame 22, the smaller end 131 of the second opening of the second conical surface 13 can be inserted into the larger end 2212 of the first opening of the first conical surface 221, and then the first housing 1 can be pushed into the first outer frame 22 along the direction from the larger end 2212 towards the smaller end 2211. In this way, the first conical surface 221 can guide the first housing 1, thereby facilitating the installation of the first housing 1 into the first outer frame 22.

[0071] In some examples, the first conical surface 221 and the second conical surface 13 are matched, that is, the generatrix of the first conical surface 221 and the generatrix of the second conical surface 13 are parallel. In this case, the radial dimension of the smaller end 2211 of the first opening is smaller than the radial dimension of the smaller end 131 of the second opening, and the radial dimension of the larger end 2212 of the first opening is smaller than the radial dimension of the larger end 132 of the second opening, so as to facilitate an interference fit between the first housing 1 and the first outer frame 22.

[0072] In other examples, the first conical surface 221 and the second conical surface 13 do not match; that is, the generatrix of the first conical surface 221 and the generatrix of the second conical surface 13 are not parallel. For examples, please refer to [link to relevant documentation]. Figure 5 The diameter of the larger end 132 of the second opening (e.g.) Figure 5 R1 shown in the figure is greater than or equal to the diameter of the larger end 2212 of the first opening (e.g., Figure 5 As shown in R2), the diameter of the larger end 2212 of the first opening is larger than the diameter of the smaller end 131 of the second opening (e.g., R2). Figure 5 As shown in R3), the diameter of the smaller end 131 of the second opening is larger than the diameter of the smaller end 2211 of the first opening (e.g., R3). Figure 5 (R4 shown in the figure). In this way, after the first housing 1 is installed inside the first outer frame 22, the larger end 2212 of the first opening abuts against the larger end 132 of the second opening, and the smaller end 2211 of the first opening abuts against the smaller end 131 of the second opening. Therefore, along the axial direction of the first housing 1, each position of the outer peripheral surface of the first housing 1 can abut against the inner peripheral surface of the first outer frame 22, thereby improving the abutment effect between the first housing 1 and the first outer frame 22 and improving the tensioning effect on the diaphragm 21.

[0073] For example, the diameter of the larger end 132 of the second opening can also be smaller than the diameter of the larger end 2212 of the first opening, and the diameter of the larger end 2212 of the first opening is larger than the diameter of the smaller end 131 of the second opening, and the diameter of the smaller end 131 of the second opening is larger than the diameter of the smaller end 2211 of the first opening. This also allows the first housing 1 to abut against the first outer frame 22, tightening the diaphragm 21. Specifically, along the direction perpendicular to the diaphragm 21, a position of the first conical surface 221 located between the smaller end 2211 and the larger end 2212 of the first opening is designated as a first intermediate position, and a position of the second conical surface 13 located between the smaller end 131 and the larger end 132 of the second opening is designated as a second intermediate position. The diameter of the second intermediate position is larger than the diameter of the first intermediate position, and the second intermediate position abuts against the first intermediate position. This also improves the abutment effect between the first housing 1 and the first outer frame 22, and enhances the tightening effect on the diaphragm 21.

[0074] In some embodiments, please continue reading Figure 5 The angle between the generatrix of the inner circumferential surface of the first outer frame 22 and the axis of the inner circumferential surface of the first outer frame 22 is the first included angle. The angle between the first included angle and the inclination angle of the generatrix of the inner circumferential surface of the first outer frame 22 (e.g., ...) Figure 5 The angles α shown are equal. That is, the size of the first included angle can reflect the degree of inclination of the generatrix of the inner circumferential surface of the first outer frame 22 relative to the axis of the first housing 1.

[0075] The angle between the generatrix of the outer peripheral surface of the first housing 1 and the axis of the outer peripheral surface of the first housing 1 is the second included angle. Wherein, the second included angle is the inclination angle of the generatrix of the outer peripheral surface of the first housing 1 (e.g., ...). Figure 5 The angle β shown is equal. That is, the size of the second included angle can reflect the degree of inclination of the generatrix of the outer peripheral surface of the first housing 1 relative to the axis of the first housing 1.

[0076] The first included angle is greater than or equal to the second included angle. That is, the inclination of the generatrix of the inner circumferential surface of the first outer frame 22 relative to the axis of the first housing 1 is greater than or equal to the inclination of the generatrix of the outer circumferential surface of the first housing 1 relative to the axis of the first housing 1. In this way, during the process of the first housing 1 being installed into the first outer frame 22, the end of the first housing 1 closer to the diaphragm 21, such as the end 131 with the smaller second opening, always contacts the inner circumferential surface of the first outer frame 22 first. This makes the position where the first housing 1 exerts a pressing force on the first outer frame 22 closer to the diaphragm 21, so that the direction of the tension force on the diaphragm 21 when it is tightened is closer to the radial direction, thereby ensuring the tightening effect of the diaphragm 21.

[0077] Furthermore, having the first included angle greater than or equal to the second included angle makes it easier to install the first housing 1 into the first outer frame 22, reducing the resistance to the assembly of the first housing 1 and the first outer frame 22 caused by the processing errors of the first housing 1 and the first outer frame 22, and reducing the impact on the tension consistency of the diaphragm 21.

[0078] Furthermore, the tension of the diaphragm 21 can be adjusted as needed, that is, the preload of the diaphragm 21 in the radial direction can be adjusted as needed. Specifically, the preload of the diaphragm 21 in the radial direction is adjusted by adjusting the contact position between the end of the first housing 1 near the diaphragm 21 and the inner circumferential surface of the first outer frame 22 in a direction perpendicular to the diaphragm 21. Since the diameter of the inner circumferential surface of the first outer frame 22 is smaller closer to the diaphragm 21, the closer the contact position between the end of the first housing 1 near the diaphragm 21 and the inner circumferential surface of the first outer frame 22 is to the diaphragm 21, the greater the radial preload generated on the diaphragm 21, that is, the tighter the diaphragm 21 is stretched.

[0079] This example illustrates adjusting the radial preload of the diaphragm 21 by cooling the first housing 1 to achieve an interference fit between the first housing 1 and the first outer frame 22. First, the desired radial preload of the diaphragm 21 is determined by setting a preset position where the inner circumferential surface of the first outer frame 22 should contact the end of the first housing 1 closest to the diaphragm 21. Then, the first housing 1 is placed in a low-temperature environment. By controlling the temperature of the environment, the first housing 1 cools and contracts, resulting in the diameter of the end of the first housing 1 closest to the diaphragm 21 being the same as the diameter at the preset position. Next, the cooled and contracted first housing 1 is installed into the first outer frame 22, ensuring the end of the first housing 1 closest to the diaphragm 21 contacts the preset position. Finally, the first housing 1 is gradually allowed to return to its pre-contraction state. At this point, the first housing 1, after tightening against the first outer frame 22, generates the required radial preload on the diaphragm 21. This allows for convenient adjustment of the preload of the diaphragm 21, enabling precise control of its preload.

[0080] In some embodiments, both the first included angle and the second included angle are greater than or equal to 0° and less than or equal to 5°. For example, the first included angle can be 0°, 1°, 2°, 3°, 4°, 5°, etc. The second included angle can be 0°, 1°, 2°, 3°, 4°, 5°, etc.

[0081] Within the aforementioned range, the angles of the first and second included angles can be smaller, ensuring the tension of the diaphragm 21 and making the connection between the first housing 1 and the first outer frame 22 more stable.

[0082] In some embodiments, please continue reading Figure 3 The second housing 3 is connected to the side of the diaphragm 21 facing away from the first housing 1. For example, the second housing 3 is welded to the diaphragm 21, which ensures a strong connection and a tight seal between them. Alternatively, the second housing 3 can also be connected to the diaphragm 21 by screwing, snap-fitting, or other methods, in which case sealing with sealant, sealing rings, or similar materials is required.

[0083] At this time, the second housing 3 is provided with a cavity and the cavity has a communication port. The diaphragm 21 covers the communication port to block the communication port, thereby forming a reference cavity 31 in the cavity.

[0084] In some embodiments, please continue reading Figure 3The diaphragm-type pressure detection device 20 also includes a detection element 5, which is used to detect the pressure of the chamber to be detected based on the amount of bulging deformation of the diaphragm 21. The detection element 5 can detect the pressure of the chamber to be detected by detecting the change in resistance caused by the deformation of the diaphragm 21, or by detecting the change in capacitance caused by the deformation of the diaphragm 21. Here, the detection element 5 detecting the pressure of the chamber to be detected by detecting the change in capacitance is used as an example for illustration.

[0085] Specifically, the detection element 5 is disposed within the second housing 3. The detection element 5 is provided with a first electrode 51, and the diaphragm 21 is provided with a second electrode 211. The first electrode 51 and the second electrode 211 form a detection capacitance. Thus, when the diaphragm pressure detection device 20 is operating, energizing the first electrode 51 and the second electrode 211 allows them to form a detection capacitance. When the pressure in the chamber to be detected, such as the second vacuum chamber 10A, changes, the diaphragm 21 bulges, causing a change in the distance between the first electrode 51 and the second electrode 211, thereby changing the capacitance of the detection electrode. The pressure in the chamber to be detected can then be calculated based on this change in capacitance. This ensures the detection accuracy of the thin-film pressure detection device.

[0086] In some examples, the detection element 5 can be a plate-like structure, a block-like structure, etc. This application does not specifically limit this. In some examples, the detection element 5 can be a ceramic part, and the surface of the ceramic part facing the diaphragm 21 is metallized to form a first electrode 51, that is, the first electrode 51 is an electrode made of conductive metal.

[0087] In some examples, the diaphragm 21 can be a conductive metal diaphragm such as copper, aluminum, stainless steel, Hastelloy, Inconel alloy, or nickel-cobalt alloy, in which case the diaphragm 21 can form the second electrode 211. In other examples, the diaphragm 21 can also be a non-conductive material such as ceramic, and conductive metal sheets such as copper, aluminum, gold, palladium, titanium, or silver can be disposed on the diaphragm 21 so that the conductive metal sheets form the second electrode 211.

[0088] In some embodiments, please continue reading Figure 3 The detection element 5 includes a support portion 52 and a detection portion 53. The support portion 52 is used to connect to the second housing 3 to connect the detection element 5 to the second housing 3 and ensure the stability of the detection element 5. The detection portion 53 is connected to the side of the support portion 52 facing the diaphragm 21 and is used to detect the pressure of the chamber to be tested by the amount of bulging deformation of the diaphragm 21. Both the support portion 52 and the detection portion 53 can be plate-shaped structures, block-shaped structures, etc.

[0089] The radial dimension of the support portion 52 is larger than that of the detection portion 53. That is, along the direction parallel to the diaphragm 21, the size of the support portion 52 is larger than that of the detection portion 53. This allows the support portion 52 to protrude radially relative to the detection portion 53, facilitating connection between the support portion 52 and the second housing 3. It also reduces the material usage of the detection portion 53, saving costs. Furthermore, the detection portion 53 is located on the side of the support portion 52 facing the diaphragm 21, allowing the detection portion 53 to be closer to the diaphragm 21, enabling more accurate detection of the pressure in the chamber under test based on the deformation of the diaphragm 21. Especially when detecting the pressure in the second vacuum chamber 10A, the deformation of the diaphragm 21 is very small, and the close proximity of the detection portion 53 to the diaphragm 21 improves detection accuracy.

[0090] In some embodiments, please continue reading Figure 3 The inner wall surface of the second housing 3 forms a limiting protrusion 32. For example, the limiting protrusion 32 surrounds the detection element 5. As another example, there may be multiple limiting protrusions 32, spaced apart circumferentially along the detection element 5. The diaphragm pressure detection device 20 also includes an elastic element 6. For example, the elastic element 6 may be a columnar spring, a wave spring, a rubber column, a latex column, etc.

[0091] Along the thickness direction of the diaphragm 21, an elastic element 6 is provided on one side of the detection element 5, and a limiting protrusion 32 is provided on the other side of the detection element 5. The elastic element 6 connects the detection element 5 and the second housing 3, and generates a spring force on the detection element 5 towards the limiting protrusion 32. For example, along the thickness direction of the diaphragm 21, an elastic element 6 is provided on one side of the support portion 52, and a limiting protrusion 32 is provided on the other side of the support portion 52.

[0092] The detection element 5 is limited and fixed from opposite sides by the elastic element 6 and the limiting protrusion 32. The elastic force applied to the detection element 5 by the elastic element 6 towards the limiting protrusion 32 ensures the accuracy of the installation position of the detection element 5, reduces the deviation of the detection element 5 due to installation error, ensures the distance between the detection element 5 and the diaphragm 21, and improves the detection accuracy.

[0093] Furthermore, when the diaphragm pressure detection device 20 is used in environments with high or low temperatures, if the second housing 3 expands or contracts due to heat, the position of the detection element 5 changes little as the second housing 3 expands or contracts due to the action of the elastic element 6. This can reduce the change in the distance between the detection element 5 and the diaphragm 21, thereby ensuring detection accuracy.

[0094] In some other embodiments, the detection element 5 and the second housing 3 can also be connected by welding, snap-fitting, screwing, or other methods. This application does not specifically limit this connection.

[0095] In some embodiments, please continue reading Figure 3 The reference cavity 31 may include a first cavity 311 located on the side of the detection element 5 opposite to the diaphragm 21 and a second cavity 312 located between the detection element 5 and the diaphragm 21. That is, after the detection element 5 is disposed inside the second housing 3, the reference cavity 31 can be divided into the first cavity 311 and the second cavity 312.

[0096] The first cavity 311 and the second cavity 312 are connected. For example, there is a gap between the detection element 5 and the inner wall of the second housing 3, through which the first cavity 311 and the second cavity 312 are connected. As another example, the detection element 5 is provided with a through hole, through which the first cavity 311 and the second cavity 312 can be connected.

[0097] Because the distance between the detection element 5 and the diaphragm 21 is small, the volume of the second cavity 312 is also small. Connecting the first cavity 311 and the second cavity 312 ensures that the pressure in both cavities remains consistent. When the diaphragm 21 bulges, the pressure change in the second cavity 312 caused by the spatial change is weakened by the first cavity 311, thereby reducing the pressure change in the reference cavity 31 caused by the bulging deformation of the diaphragm 21 and improving the accuracy of pressure detection in the cavity to be detected.

[0098] In some embodiments, this application also provides a manufacturing method for manufacturing the diaphragm pressure detection device 20 described above. See also... Figure 6 , Figure 6 A flowchart illustrating a manufacturing method for a diaphragm-type pressure detection device 20 provided in this application embodiment. The manufacturing method includes: S1: Obtain the diaphragm structure 2, which includes a diaphragm 21 and a first outer frame 22 connected to each other.

[0099] S2: Install the first housing 1 into the space enclosed by the first outer frame 22, and make the first housing 1 and the first outer frame 22 interference fit so that the diaphragm 21 is tightened.

[0100] Since the diaphragm 21 is connected to the first outer frame 22, by installing the first housing 1 into the space enclosed by the first outer frame 22 and ensuring an interference fit between the first housing 1 and the first outer frame 22, the first housing 1 can exert a pressure on the inner circumferential surface of the first outer frame 22 in a direction away from the first housing 1. This causes the first outer frame 22 to exert a radial tension on the diaphragm 21 in a circumferential direction, thereby tightening the diaphragm 21. This ensures more uniform tightening of the diaphragm 21 in a circumferential direction, improving the consistency and effectiveness of the diaphragm 21. Furthermore, no tensioning device is needed during the tightening process of the diaphragm 21, simplifying the tightening process and improving the efficiency of the diaphragm 21 tightening.

[0101] In some embodiments, installing the first housing 1 into the space enclosed by the first outer frame 22 and making the first housing 1 and the first outer frame 22 interference fit together includes: cooling the first housing 1 at room temperature, for example, placing the first housing 1 in a low-temperature environment such as a liquid nitrogen environment for cooling treatment; placing the cooled first housing 1 into the space enclosed by the first outer frame 22 and allowing the temperature of the first housing 1 to gradually return to room temperature, so that the first housing 1 and the first outer frame 22 are interference fit together.

[0102] By cooling the first housing 1 at room temperature using the above method, the first housing 1 will shrink due to the cooling, thereby reducing the radial dimension of the outer circumference of the first housing 1. This makes the radial dimension of the outer circumference of the first housing 1 smaller than the radial dimension of the inner circumference of the first outer frame 22, thus facilitating the placement of the first housing 1 into the space enclosed by the first outer frame 22 and reducing wear between the first housing 1 and the first outer frame 22. Then, as the first housing 1 is gradually restored to room temperature, the radial dimension of the outer circumference of the first housing 1 gradually recovers, achieving an interference fit between the first housing 1 and the first outer frame 22. During this process, the diaphragm 21 is only subjected to radial tension and not axial force (i.e., force perpendicular to the diaphragm 21), thereby preventing deformation of the diaphragm 21 and improving the tensioning effect of the diaphragm 21.

[0103] In some embodiments, installing the first housing 1 into the space enclosed by the first outer frame 22 and making the first housing 1 and the first outer frame 22 interference fit together includes: heating the diaphragm structure 2 at room temperature, that is, heating the diaphragm 21 and the first outer frame 22 as a whole; placing the first housing 1 into the space enclosed by the first outer frame 22 and allowing the temperature of the diaphragm structure 2 to gradually return to room temperature, so that the first housing 1 and the first outer frame 22 are interference fit together.

[0104] By heating the diaphragm structure 2 using the above method, the diaphragm structure 2 is subjected to thermal impact, thereby increasing the radial dimension of the inner circumferential surface of the first outer frame 22. This makes the radial dimension of the inner circumferential surface of the first outer frame 22 larger than the radial dimension of the outer circumferential surface of the first housing 1, thus facilitating the placement of the first housing 1 within the space enclosed by the first outer frame 22 and reducing wear between the first housing 1 and the first outer frame 22. Then, as the diaphragm structure 2 is gradually restored to room temperature, the radial dimension of the inner circumferential surface of the first outer frame 22 gradually recovers, achieving an interference fit between the first housing 1 and the first outer frame 22. During this process, the diaphragm 21 is only subjected to radial tension and not axial force, thereby preventing deformation of the diaphragm 21 and improving its tensioning effect.

[0105] In some embodiments, mounting the first housing 1 into the space enclosed by the first outer frame 22 and ensuring an interference fit between the first housing 1 and the first outer frame 22 includes: machining the inner peripheral surface of the first outer frame 22 into a first conical surface 221, wherein the end of the first conical surface 221 facing the diaphragm 21 is the smaller opening end 2211, and the end of the first conical surface 221 facing away from the diaphragm 21 is the larger opening end 2212. Machining the outer peripheral surface of the first housing 1 into a second conical surface 13, wherein the end of the second conical surface 13 facing the diaphragm 21 is the smaller opening end 131, and the end of the second conical surface 13 facing away from the diaphragm 21 is the larger opening end 132.

[0106] The first housing 1 is gradually pushed into the space enclosed by the first outer frame 22 along the direction from the larger end 2212 of the first opening to the smaller end 2211 of the first opening, until the first housing 1 and the first outer frame 22 are in an interference fit.

[0107] Using the above method, the inner circumferential surface of the first outer frame 22 is processed into a first conical surface 221, and the outer circumferential surface of the first housing 1 is processed into a second conical surface 13. The first housing 1 is gradually pushed into the space enclosed by the first outer frame 22 along the direction from the larger end 2212 of the first opening to the smaller end 2211 of the first opening. The first conical surface 221 can guide the first housing 1, thereby facilitating the installation of the first housing 1 into the space enclosed by the first outer frame 22.

[0108] Furthermore, the preload of the diaphragm 21 in the radial direction can be adjusted by adjusting the contact position between the end of the first housing 1 near the diaphragm 21 and the inner circumferential surface of the first outer frame 22 in a direction perpendicular to the diaphragm 21. In this way, the preload of the diaphragm 21 can be easily adjusted to achieve precise control of the preload of the diaphragm 21.

[0109] Based on this, the membrane structure 2 at room temperature can be heated first, and then the first housing 1 can be placed in the space enclosed by the first outer frame 22. Alternatively, the first housing 1 at room temperature can be cooled first, and then the first housing 1 can be placed in the space enclosed by the first outer frame 22. In this way, the inner circumferential surface of the first outer frame 22 is the first conical surface 221, and the outer circumferential surface of the first housing 1 is the second conical surface 13. This makes it easier to place the first housing 1 in the space enclosed by the first outer frame 22 and reduces the wear between the first housing 1 and the first outer frame 22.

[0110] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0111] The above-described preferred embodiments have further illustrated the purpose, technical solutions, and advantages of the present invention. It should be understood that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A diaphragm-type pressure detection device, characterized in that, include: First shell; A diaphragm located on one side of the first housing; A first outer frame is connected to the side of the diaphragm facing the first housing. The first outer frame surrounds the first housing and is interference-fitted with the first housing to tighten the diaphragm. The first outer frame, the first housing, and the diaphragm form a detection cavity, which is used to communicate with the cavity to be detected.

2. The diaphragm pressure detection device according to claim 1, characterized in that, The first outer frame and the diaphragm are an integral structure.

3. The diaphragm pressure detection device according to claim 1, characterized in that, The inner circumferential surface of the first outer frame and the outer circumferential surface of the first shell are both either straight cylindrical surfaces or conical cylindrical surfaces.

4. The diaphragm pressure detection device according to claim 3, characterized in that, The inner circumferential surface of the first outer frame is a first conical surface; the outer circumferential surface of the first shell is a second conical surface. The end of the first conical surface facing the diaphragm is the end with a smaller first opening, and the end of the first conical surface facing away from the diaphragm is the end with a larger first opening; the end of the second conical surface facing the diaphragm is the end with a smaller second opening, and the end of the second conical surface facing away from the diaphragm is the end with a larger second opening.

5. The diaphragm pressure detection device according to claim 4, characterized in that, The diameter of the larger end of the second opening is greater than or equal to the diameter of the larger end of the first opening, the diameter of the larger end of the first opening is greater than the diameter of the smaller end of the second opening, and the diameter of the smaller end of the second opening is greater than the diameter of the smaller end of the first opening.

6. The diaphragm pressure detection device according to claim 3, characterized in that, The angle between the generatrix of the inner circumferential surface of the first outer frame and the axis of the inner circumferential surface of the first outer frame is the first included angle, and the angle between the generatrix of the outer circumferential surface of the first housing and the axis of the outer circumferential surface of the first housing is the second included angle. The first included angle is greater than or equal to the second included angle.

7. The diaphragm pressure detection device according to claim 6, characterized in that, Both the first included angle and the second included angle are greater than or equal to 0° and less than or equal to 5°.

8. The diaphragm pressure detection device according to any one of claims 1-7, characterized in that, It also includes a second housing, which is connected to the side of the diaphragm opposite to the first housing; The second housing and the diaphragm define a reference chamber, the gas pressure within which is used as a reference pressure.

9. The diaphragm pressure detection device according to claim 8, characterized in that, It also includes a detection element, which is disposed inside the second housing. The detection element is provided with a first electrode, and the diaphragm is provided with a second electrode. The first electrode and the second electrode form a detection capacitor.

10. The diaphragm pressure detection device according to claim 9, characterized in that, The inner wall surface of the second housing forms a limiting protrusion, and the pressure detection device also includes an elastic element. Along the thickness direction of the diaphragm, the elastic element is provided on one side of the detection element, and the limiting protrusion is provided on the other side of the detection element.

11. The diaphragm pressure detection device according to claim 8, characterized in that, The reference cavity is the first vacuum cavity.

12. The diaphragm pressure detection device according to claim 9, characterized in that, The reference cavity includes a first cavity located on the side of the detector facing away from the diaphragm and a second cavity located between the detector and the diaphragm, the first cavity and the second cavity being in communication.

13. The diaphragm pressure detection device according to claim 10, characterized in that, The detection component includes: The support portion has the elastic element on one side along the thickness direction of the diaphragm, and the limiting protrusion on the other side of the support portion; A detection unit is connected to the support unit on the side facing the diaphragm, and the radial dimension of the support unit is larger than the radial dimension of the detection unit.

14. A semiconductor device, characterized in that, include: Diaphragm pressure detection device as described in any one of claims 1-13; and The vacuum chamber has a second vacuum chamber and an opening communicating with the second vacuum chamber. The first housing of the diaphragm pressure detection device is communicating with the second vacuum chamber and is used to detect the vacuum level of the second vacuum chamber.

15. A manufacturing method, characterized in that, The method for manufacturing the diaphragm-type pressure detection device according to any one of claims 1-13 comprises: Obtain a diaphragm structure, the diaphragm structure comprising a diaphragm connected to a first outer frame; The first housing is installed into the space enclosed by the first outer frame, and the first housing and the first outer frame are interference-fitted to tighten the diaphragm.

16. The manufacturing method according to claim 15, characterized in that, The step of installing the first housing into the space enclosed by the first outer frame, and making the first housing and the first outer frame interference fit, includes: The first casing at room temperature is cooled down. The first housing, after being cooled, is placed within the space enclosed by the first outer frame, and the temperature of the first housing is gradually restored to room temperature so that the first housing and the first outer frame are interference-fitted.

17. The manufacturing method according to claim 15, characterized in that, The step of installing the first housing into the space enclosed by the first outer frame, and making the first housing and the first outer frame interference fit, includes: The membrane structure at room temperature was subjected to heat treatment; The first housing is placed within the space enclosed by the first outer frame, and the temperature of the diaphragm structure is gradually restored to room temperature so that the first housing and the first outer frame are interference-fitted.

18. The manufacturing method according to any one of claims 15-17, characterized in that, The step of installing the first housing into the space enclosed by the first outer frame, and making the first housing and the first outer frame interference fit, includes: The inner circumferential surface of the first outer frame is machined into a first conical surface, wherein the end of the first conical surface facing the diaphragm is the end with a smaller first opening, and the end of the first conical surface facing away from the diaphragm is the end with a larger first opening. The outer peripheral surface of the first housing is machined into a second conical surface, wherein the end of the second conical surface facing the diaphragm is the end with a smaller second opening, and the end of the second conical surface facing away from the diaphragm is the end with a larger second opening. The first housing is gradually pushed into the space enclosed by the first outer frame in the direction from the larger end of the first opening to the smaller end of the first opening, until the first housing and the first outer frame are in an interference fit.

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