Liner Tube and Electron Microscope

a liner tube and electron microscope technology, applied in the direction of electric discharge tubes, basic electric elements, electrical apparatus, etc., can solve the problems of degrading the resolution of the electron microscope, sensitive (vulnerable) to disturbances in the interior of this plane, and quantitative and other analyses, so as to reduce the effect of reducing the effect of magnetic field variations on an electron beam

Active Publication Date: 2018-06-14
JEOL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0006]In view of the foregoing problem, the present invention has been made. One object associated with some aspects of the present invention is to provide a liner tube capable of reducing the effects of magnetic field variations on an electron beam. Another object associated with some aspects of the invention is to provide an electron microscope capable of reducing the effects of magnetic field variations on an electron beam.

Problems solved by technology

This presents problems in quantitative and other analyses.
The interior of this plane is sensitive (vulnerable) to disturbances.
Quite small noises within this plane due chiefly to magnetic field variations bring about displacements of the electron beam on the order of pm on the sample, thus resulting in noise.
Consequently, the resolution of the electron microscope is degraded greatly.

Method used

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  • Liner Tube and Electron Microscope
  • Liner Tube and Electron Microscope
  • Liner Tube and Electron Microscope

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

1. First Embodiment

1.1. Electron Microscope

[0039]An electron microscope associated with a first embodiment of the present invention is first described by referring to FIG. 1, which schematically shows the electron microscope, 100, associated with the first embodiment.

[0040]The electron microscope 100 is a transmission electron microscope (TEM). That is, the electron microscope 100 is an instrument for focusing electrons transmitted through a sample S and obtaining a transmission electron microscope (TEM) image. Furthermore, the electron microscope 100 has scan coils 16 for scanning an electron beam (electron probe) as described later and thus the microscope also acts as a scanning transmission electron microscope (STEM).

[0041]Referring still to FIG. 1, the electron microscope 100 includes a liner tube 10, an electron beam source 12, condenser lenses 14, the scan coils 16, an aberration corrector 20, an objective lens 22, a sample stage 24, a sample holder 25, an intermediate lens 26...

second embodiment

2. Second Embodiment

2.1. Electron Microscope

[0077]An electron microscope associated with a second embodiment is next described by referring to FIGS. 13 and 14. FIG. 13 is a schematic view of the electron microscope, 200, associated with the second embodiment. FIG. 14 is a schematic cross section of the liner tube 10 of the electron microscope 200 associated with the second embodiment, and corresponds to FIG. 3.

[0078]Those members of the electron microscope 200 associated with the second embodiment which are similar in function to their respective counterparts of the electron microscope 100 associated with the first embodiment are indicated by the same reference numerals as in the above-referenced figures and a description thereof is omitted.

[0079]In the above-described electron microscope 100, the liner tube 10 is made of the first cylindrical member 110 as shown in FIGS. 1-3. In contrast, in the electron microscope 200, as shown in FIGS. 13 and 14, the liner tube 10 has the first c...

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Abstract

There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube (10) is disposed inside the electron optical column (2) of an electron microscope (100). The interior of the tube (10) forms a path for the electron beam (EB). The liner tube (10) has a first cylindrical member (110) that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

Description

BACKGROUND OF THE INVENTIONField of the Invention[0001]The present invention relates to a liner tube and an electron microscope.Description of Related Art[0002]In recent years, the resolutions of electron microscopes have improved greatly owing to the use of spherical aberration correctors. A spherical aberration corrector has a multipole element which produces a negative spherical aberration to cancel out a positive spherical aberration in an objective lens (see, for example, JP-A-2011-243409). In a spherical aberration corrector, the electron beam creates an orbit spreading out from above the axis within the multipole element in order to produce a sufficiently strong aberration correcting force.[0003]Generally, in an electron microscope, a multipole element constituting a spherical aberration corrector is mounted outside the vacuum. Since an electron beam passes through the vacuum, a liner tube is used. The liner tube is a structure that allows for evacuation of the region through...

Claims

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Application Information

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Patent Type & AuthorityApplications(United States)
IPC IPC(8): H01J37/153H01J37/26H01J37/22H01J37/10H01J37/147
CPCH01J37/153H01J37/26H01J37/22H01J2237/1534H01J37/1474H01J2237/182H01J37/10H01J37/28H01J2237/0268H01J2237/153H01J2237/2802
InventorSAWADA, HIDETAKAJIMBO, YUSHIMIZU, MASASHI
OwnerJEOL LTD