A vacuum suction pen

Abstract

The present invention is a vacuum suction pen, which includes a vacuum suction head, a vacuum suction head multi-angle adjustment mechanism and a vacuum detection system. The vacuum suction head multi-angle adjustment mechanism includes A vacuum metal capillary, B vacuum metal capillary, rubber hose, fixed metal tube, screws, and rotating guide rails; the vacuum detection system includes a vacuum indicator light, a micro power supply and a vacuum detection sensor, and the vacuum indicator light, the micro power supply and the vacuum detection sensor are connected in series. Advantages: 1. The vacuum suction head multi-angle adjustment mechanism can adjust the rotation and fixation to meet the needs of various equipment and manual handling. 2. The vacuum detection system of the vacuum suction pen can avoid the scrapping of chips due to vacuum tube blockage or switch damage.

Description

Technical Field

[0001] The invention relates to a vacuum suction pen, belonging to the technical field of wafer suction. Background Art

[0002] In the semiconductor manufacturing industry, the process must be anti-fouling and dust-proof, but it is inevitable to touch or manually move the wafers during processing and product circulation. Especially in some compound process, due to the low degree of automation, the probability of manual contact with the wafer will be greatly increased. Since the cost of gallium arsenide and gallium nitride is much higher than that of silicon wafers, it is not only necessary to ensure anti-fouling and dust-proof, but more importantly, to ensure the safety of the wafer. Summary of the invention

[0003] The invention provides a vacuum suction pen, aiming to provide a vacuum suction pen with a vacuum suction head that can be adjusted, rotated and fixed and prevents wafer damage.

[0004] The technical solution of the present invention:

[0005] A vacuum suction pen, whose structure includes a vacuum suction head 9 and a vacuum suction head multi-angle adjustment mechanism, wherein the vacuum suction head multi-angle adjustment mechanism includes A vacuum metal capillary 10, B vacuum metal capillary 18, a rubber hose 11, a fixed metal tube 12, a screw 13, and a rotating guide rail 14; wherein the vacuum suction head 9 is connected to the A end of the A vacuum metal capillary 10, the B end of the A vacuum metal capillary 10 is connected to the A end of the B vacuum metal capillary 18 through the rubber hose 11, the A end of the fixed metal tube 12 is connected to the A vacuum metal capillary 10, and the B end is provided with a screw 13, the B end of the fixed metal tube 12 can adjust the angle along the guide rail 14 and is fixed by the screw 13, and the guide rail 14 is connected to the B vacuum metal capillary 18; the B end of the B vacuum metal capillary 18 is provided with an internal threaded connecting joint 15.

[0006] Beneficial effects of the present invention:

[0007] 1. The multi-angle adjustment mechanism of the vacuum suction head can be adjusted and rotated to meet the needs of various equipment and manual handling.

[0008] 2. The vacuum detection system of the vacuum pen can avoid the scrapping of chips due to vacuum tube blockage or switch damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a partial front view of a vacuum suction pen.

[0010] Figure 2 The utility model relates to a multi-angle adjustment mechanism of a vacuum pen.

[0011] Figure 3 It is a schematic diagram of a vacuum detection system of a vacuum suction pen.

[0012] In the figure, 1 is the vacuum switch; 2 is the vacuum indicator light; 3 is the vacuum pipeline at the front end of the vacuum switch; 4 is the branch pipeline; 5 is the vacuum detection system; 6 is the vacuum pipeline at the rear end of the vacuum switch; 7 is the vacuum hose; 8 is the vacuum suction head connection thread; 9 is the vacuum suction head; 10 is the vacuum metal tube; 11 is the rubber hose connection; 12 is the fixed metal tube; 13 is the locking screw; 14 is the rotating guide rail; 15 is the internal thread connection joint; 16 is the micro power supply; 17 is the vacuum detection sensor; 18 is the vacuum metal tube. DETAILED DESCRIPTION

[0013] A vacuum suction pen, whose structure includes a vacuum suction head 9 and a vacuum suction head multi-angle adjustment mechanism, wherein the vacuum suction head multi-angle adjustment mechanism includes A vacuum metal capillary 10, B vacuum metal capillary 18, a rubber hose 11, a fixed metal tube 12, a screw 13, and a rotating guide rail 14; wherein the vacuum suction head 9 is connected to the A end of the A vacuum metal capillary 10, the B end of the A vacuum metal capillary 10 is connected to the A end of the B vacuum metal capillary 18 through the rubber hose 11, the A end of the fixed metal tube 12 is connected to the A vacuum metal capillary 10, and the B end is provided with a screw 13, the B end of the fixed metal tube 12 can adjust the angle along the guide rail 14 and is fixed by the screw 13, and the guide rail 14 is connected to the B vacuum metal capillary 18; the B end of the B vacuum metal capillary 18 is provided with an internal threaded connecting joint 15.

[0014] The guide rails 14 are provided in two pieces, and the screws 13 are provided in two pieces.

[0015] The vacuum suction pen also includes a pen body, a vacuum switch 1, a vacuum pipeline 3 at the front end of the vacuum switch, and a vacuum pipeline 6 at the rear end of the vacuum switch; wherein, the vacuum switch 1 is arranged in the middle of the pen body, the front end of the vacuum switch 1 in the pen body is the vacuum pipeline 3 at the front end of the vacuum switch, and the rear end of the vacuum switch 1 is the vacuum pipeline 6 at the rear end of the vacuum switch. A vacuum suction head connecting thread 8 is provided at the end of the vacuum pipeline 3 at the front end of the vacuum switch of the pen body, and the vacuum suction head connecting thread 8 is threadedly connected to the internal thread connecting joint 15, and the vacuum pipeline 6 at the rear end of the vacuum switch of the pen body is connected to a vacuum hose.

[0016] It also includes a branch pipeline 4 and a vacuum detection system, which includes a vacuum indicator light 2, a micro power supply 16 and a vacuum detection sensor 17, and the vacuum indicator light 2, the micro power supply 16 and the vacuum detection sensor 17 are connected in series; wherein the branch pipeline 4 is located inside the pen body, connecting the vacuum pipeline 3 at the front end of the vacuum switch and the vacuum detection system.

[0017] The micro power source 16 is an external power source.

[0018] The technical solution of the present invention is further described below in conjunction with the accompanying drawings.

[0019] Compare with Figure 1A vacuum suction pen comprises a pen body, a vacuum switch 1, a vacuum indicator light 2, a vacuum pipeline 3 at the front end of the vacuum switch, a branch pipeline 4, a vacuum detection system 5, a vacuum pipeline 6 at the rear end of the vacuum switch, a vacuum hose 7 and a vacuum suction head connecting thread 8; wherein, the vacuum switch 1 is arranged in the middle of the pen body, the front end of the vacuum switch 1 in the pen body is the vacuum pipeline 3 at the front end of the vacuum switch, the rear end of the vacuum switch 1 is the vacuum pipeline 6 at the rear end of the vacuum switch, the vacuum suction head connecting thread 8 is provided at the end of the vacuum pipeline 3 at the front end of the vacuum switch of the pen body, the vacuum suction head connecting thread 8 is threadedly connected to the internal thread connection joint 15, the vacuum pipeline 6 at the rear end of the vacuum switch of the pen body is connected to the vacuum hose 7, the branch pipeline 4 is located in the pen body, and connects the vacuum pipeline 3 at the front end of the vacuum switch and the vacuum detection system 5.

[0020] Compare with Figure 2 A vacuum suction pen comprises a vacuum suction head 9 and a vacuum suction head multi-angle adjustment mechanism, wherein the vacuum suction head multi-angle adjustment mechanism comprises an A vacuum metal tube 10, a B vacuum metal tube 18, a rubber hose 11, a fixed metal tube 12, a screw 13, and a rotating guide rail 14; wherein, the vacuum suction head 9 is connected to the A end of the A vacuum metal tube 10, the B end of the A vacuum metal tube 10 is connected to the A end of the B vacuum metal tube 18 through the rubber hose 11, the A end of the fixed metal tube 12 is connected to the A vacuum metal tube 10, and the B end is provided with a screw 13, the B end of the fixed metal tube 12 can adjust the angle along the guide rail 14 and be fixed by the screw 13, and the guide rail 14 is connected to the B vacuum metal tube 18; the B end of the B vacuum metal tube 18 is provided with an internal threaded connecting joint 15; there are two guide rails 14 and two screws 13.

[0021] Compare with Figure 3 The vacuum detection system includes a vacuum indicator light 2, a micro power source 16 and a vacuum detection sensor 17, which are connected in series. The micro power source 16 can also be an external power source.

[0022] Example 1

[0023] The vacuum detection sensor in the vacuum detection system 5 is preset with a preset value. When the installed vacuum suction pen releases the vacuum switch 1 to suck the wafer, a voltage is output when the vacuum value in the vacuum pipeline 3 at the front end of the vacuum switch reaches the preset value, and the vacuum indicator light 2 attached to the vacuum pipeline 3 at the front end of the vacuum switch lights up. The operator can judge whether the wafer is safe and whether the vacuum suction pen has a fault according to the vacuum indicator light 2.

[0024] Loosen screw 13, adjust the angle required in actual operation along guide rail 14, and tighten screw 13. The horizontal and angled vacuum suction head can meet most equipment and handling requirements.

[0025] The micro power supply (can also be external) 16 increases the power supply to the indicator light and the vacuum detection sensor 17. When the detected vacuum reaches the set value, the vacuum detection sensor is equivalent to a conducting wire, and the indicator light 2 becomes brighter.

[0026] Vacuum suction head connection thread 8 and Figure 2 The internal thread connection joint 15 is connected by threads.

Claims

1. A vacuum pen, characterized in that Its structure includes a vacuum suction head and a vacuum suction head multi-angle adjustment mechanism, wherein the vacuum suction head multi-angle adjustment mechanism includes A vacuum metal capillary, B vacuum metal capillary, rubber hose, fixed metal tube, screws, and a rotating guide rail; wherein the vacuum suction head is connected to the A end of the A vacuum metal capillary, the B end of the A vacuum metal capillary is connected to the A end of the B vacuum metal capillary through the rubber hose, the A end of the fixed metal tube is connected to the A vacuum metal capillary, the B end of the fixed metal tube is provided with a screw, the B end of the fixed metal tube can adjust the angle along the rotating guide rail and is fixed by the screw, and the rotating guide rail is connected to the B vacuum metal capillary; the B vacuum An internal threaded connection joint is provided at the B end of the metal tube; there are two rotating guide rails and two screws; the vacuum suction pen also includes a pen body, a vacuum switch, a vacuum pipeline at the front end of the vacuum switch, and a vacuum pipeline at the rear end of the vacuum switch; wherein, the vacuum switch is arranged in the middle of the pen body, the front end of the vacuum switch in the pen body is the vacuum pipeline at the front end of the vacuum switch, and the rear end of the vacuum switch is the vacuum pipeline at the rear end of the vacuum switch, and a vacuum suction head connecting thread is provided at the vacuum pipeline end at the front end of the vacuum switch of the pen body, and the vacuum suction head connecting thread is connected to the internal threaded connection joint through a thread, and the vacuum pipeline end at the rear end of the vacuum switch of the pen body is connected to a vacuum hose.

2. A vacuum pen according to claim 1, characterized in that: It also includes a branch pipeline and a vacuum detection system, which includes a vacuum indicator light, a micro power supply and a vacuum detection sensor, and the vacuum indicator light, the micro power supply and the vacuum detection sensor are connected in series; wherein the vacuum indicator light is arranged at the vacuum pipeline section at the front end of the vacuum switch of the pen body, and the branch pipeline is located inside the pen body, and the branch pipeline connects the vacuum pipeline at the front end of the vacuum switch and the vacuum detection system.

3. A vacuum pen according to claim 2, characterized in that: The micro power source is an external power source.

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