Graphite heating element and crystal growth furnace
By using graphite as the heating element, the series heating structure and electrode hole arrangement are designed, the problems of high energy consumption and equipment deformation of high-temperature crystal growth furnace are solved, and the heating effect with low energy consumption and long life is achieved.
Patent Information
- Application Number
- CN201910002378.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-01-02
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2039-01-02
AI Technical Summary
In the field of high-temperature crystal growth, the use of refractory metals such as tungsten and molybdenum as heating bodies and heat insulation materials leads to high energy consumption and expensive cost in crystal growth furnaces, and is prone to damage to equipment due to high-temperature deformation, which increases replacement rate and production costs.
Graphite is used as the heating body, and a series of heating structures are formed by designing multiple heating side plates and bottom plates, and electrode holes are provided in the side wall heating section to form a conductive heating structure, reducing energy consumption and improving thermal efficiency, and avoiding high-temperature deformation.
It effectively reduces the energy consumption of crystal growth furnace equipment, extends the service life, reduces production costs, and avoids deformation of heating elements caused by high temperatures.
Smart Images
Figure CN109402728B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of crystal growth, and in particular to a graphite heating element and a crystal growth furnace. Background Art
[0002] In the current crystal growth field, especially in the field of high-temperature crystal growth, most of the refractory metals such as tungsten and molybdenum are used as heating elements and insulation materials. Although refractory metals have the advantages of high melting point, strong corrosion resistance, simple processing technology, and low production cost, in actual application, they cause high energy consumption of crystal production equipment. For enterprises engaged in large-scale crystal growth, electricity consumption is the main cost expenditure. The use of refractory metal materials is not conducive to enterprises reducing production costs. In addition, the refractory metal materials used in crystal growth furnaces, whether heating elements or insulation screens, are more likely to deform after multiple high temperatures. In the limited space in the furnace cavity, short circuits such as arcing are more likely to occur between deformed materials. Therefore, the replacement rate of consumable parts of crystal growth furnaces using refractory materials as hot zone materials is relatively high. It is quite unfavorable for saving production costs.
[0003] The KY crystal growth process (Kyropoulos method, also known as the Kyropoulos crystal growth method, abbreviated as KY method) is favored by many crystal growth companies due to its low defect density and high yield rate. However, its production cost remains high due to the use of tungsten and molybdenum materials as heating elements and thermal insulation. Summary of the invention
[0004] The invention provides a graphite heating element and a crystal growth furnace, which are used to solve the problem of high cost of KY crystal growth process.
[0005] In the first aspect, a graphite heating element is provided, comprising a graphite body and at least two electrode parts, wherein the graphite body comprises a heating bottom wall and a heating side wall. The heating bottom wall and the heating side wall jointly define a heating space: the heating side wall comprises at least four heating side plates, each of the at least four heating side plates has a first end and a second end opposite to each other; every two heating side plates of the at least four heating side plates constitute a side wall heating portion, the first ends of the two heating side plates in a side wall heating portion are connected to each other, and the second ends of the two heating side plates in a side wall heating portion are far away from each other; the first ends of the heating side plates close to each other of two adjacent side wall heating portions are far away from each other; the heating bottom wall comprises at least two heating bottom plates, each of the at least two heating bottom plates is spaced apart from each other, and the second ends of the two adjacent side wall heating portions are connected through the heating bottom plate. At least two electrode parts are respectively arranged on different side wall heating portions.
[0006] In the above scheme, in the KY crystal growth process, the crucible of the crystal growth furnace is placed in a heating space for heating. Among them, every two heating side plates in the heating side wall constitute a side wall heating part, and the two adjacent side wall heating parts are connected by a heating bottom plate, so that the graphite body constitutes a heating structure composed of multiple heating elements (each heating side plate and each heating bottom plate in the graphite body are heating elements) connected in series, wherein, when the electrode part is connected to an external power supply, the graphite body heats the crucible located in the heating space. Since graphite material is a conductive material, it has the characteristics of moderate resistance, stable performance, small deformation rate, low expansion coefficient, good corrosion resistance, and long service life. In the KY crystal growth process, it can reduce the energy consumption of the crystal growth furnace equipment while ensuring the heating effect, and can avoid the deformation of the heating element due to high temperature.
[0007] In a possible implementation manner, at least one of the at least two electrode portions includes an electrode hole opened on the side wall heating portion.
[0008] In the above technical solution, in one possible method, the electrode part is an electrode hole opened on the side wall heating part, that is, the graphite body. In terms of manufacturing process, the graphite body hole opening process is simple and low in cost, and the electrode hole is connected to the graphite electrode, which can conveniently connect the graphite heating element to electricity for heating.
[0009] Optionally, in a possible implementation manner, the electrode hole is located between two heating side walls in the side wall heating portion.
[0010] In the above technical solution, a feasible arrangement of electrode holes is provided, which has a neat appearance, and the electrode holes are opened between the two heating side walls so that there are multiple manufacturing methods for producing the electrode holes, such as directly opening the holes or the electrode holes are composed of two semicircular grooves, thereby reducing the manufacturing cost.
[0011] Optionally, the gap between the two first ends close to each other between two adjacent side wall heating parts is a first straight through groove, and the first straight through groove extends toward the heating bottom wall;
[0012] The gap between the two second ends of the two heating side plates in the side wall heating portion is in the form of a second linear through groove, and the second linear through groove extends toward the first end.
[0013] In the above technical scheme, the relative arrangement between each heating side plate is specifically given. By using a straight through groove (a first straight through groove and a second straight through groove), two adjacent side wall heating parts and two heating side plates in the side wall heating parts are spaced apart, so that the graphite body is a conductive heating structure composed of multiple heating elements (each heating side plate and each heating bottom plate in the graphite body are heating elements) connected in series in sequence. Since they are separated by straight through grooves, the manufacturing process is simple, the appearance is neat, and the structure is stable.
[0014] Optionally, the gap between two adjacent heating bottom plates is a third linear through groove, and the third linear through groove is connected to the second linear through groove;
[0015] The groove width of the third linear through groove is the same as the groove width of the second linear through groove.
[0016] Optionally, three electrode parts are included; the heated side wall includes at least six heated side plates, and the heated bottom wall includes at least four heated bottom plates;
[0017] The three electrode parts are respectively arranged on the three side wall heating parts.
[0018] In the above technical solution, the graphite heating element is powered by a triangle connection method through three electrode parts, which effectively improves the thermal efficiency of the graphite heating element.
[0019] In one possible implementation, the heated side wall includes 24 heated side plates, and the heated bottom wall includes 12 heated bottom plates;
[0020] Among them, the three electrode parts are distributed on the three side wall heating parts in an equilateral triangle array.
[0021] Furthermore, in a possible implementation, the heating bottom plate is in an arc-top trapezoidal shape, the arc-top trapezoidal shape has an upper top and a lower top relative to each other, and the lower top is connected to the second ends of two adjacent side wall heating parts. The first ends of at least two heating bottom plates are close to the axis of the heating space and jointly define a support through hole.
[0022] In the above technical solution, the arc-top trapezoid is a structure with a trapezoid as the basic shape, the upper and lower tops of the trapezoid are arc-shaped, the lower top is connected to the heating side wall, and the upper tops of multiple heating bottom plates are close to each other to form a supporting through hole for placing the crucible support column. Through the above design, the graphite body can be formed as a whole or manufactured separately during manufacturing.
[0023] Further, in a possible implementation, the heating side plate and the heating bottom plate have the same thickness.
[0024] In a second aspect, a crystal growth furnace is provided, the crystal growth furnace comprising the graphite heating element in the first aspect and any one of the implementable modes of the first aspect. The crucible in the crystal growth furnace is located in the heating space.
[0025] In the above technical solution, a crystal growth furnace is provided. In the KY crystal growth process, a graphite heating element is arranged in the crystal growth furnace. Since graphite material, as a conductive material, has the characteristics of moderate resistance, stable performance, small deformation rate, low expansion coefficient, good corrosion resistance, long service life, etc., it can reduce the energy consumption of the crystal growth furnace equipment while ensuring the heating effect, and can avoid the deformation of the heating element due to high temperature. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
[0027] Figure 1 This is a schematic diagram of the structure of a graphite heating element in an embodiment of the present invention at a first viewing angle;
[0028] Figure 2 Schematic diagram of the structure of the graphite heating element in the embodiment of the present invention at a second viewing angle;
[0029] Figure 3 Schematic diagram of the structure of the graphite heating element in the embodiment of the present invention at a third viewing angle;
[0030] Figure 4 Schematic diagram of the structure of a crystal growth furnace in an embodiment of the present invention.
[0031] Icons: 10-graphite heating element; 10a-graphite body; 10b-electrode part; 11-heating side wall; 11A-side wall heating part; 12-heating bottom wall; 20-crystal growth furnace; 21-crucible; 22-furnace chamber; 23-seed crystal rod; 60-support through hole; 71-upper top; 72-lower top; 81-first straight through groove; 82-second straight through groove; 83-third straight through groove; 90-heating space; 110-heating side plate; 110a-first end; 110b-second end; 120-heating bottom plate; 210-crucible support column. DETAILED DESCRIPTION
[0032] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.
[0033] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0034] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0035] In the description of the present invention, it should be noted that the terms "inside", "below", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the invention is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0036] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0037] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.
[0038] The technical solution in this application will be described below.
[0039] This embodiment provides a graphite heating element 10 for solving the problem of high cost of KY crystal growth process.
[0040] Please refer to Figure 1-Figure 3 , Figure 1The specific structure of the graphite heating element 10 in this embodiment at a first viewing angle is shown. Figure 2 The specific structure of the graphite heating element 10 in this embodiment at a second viewing angle is shown. Figure 3 The specific structure of the graphite heating element 10 in this embodiment at the third viewing angle is shown.
[0041] The graphite heating element 10 includes a graphite body 10 a and at least two electrode parts 10 b , wherein the graphite body 10 a includes a heating bottom wall 12 and a heating side wall 11 . The heating bottom wall 12 and the heating side wall 11 jointly define a heating space 90: the heating side wall 11 includes at least four heating side plates 110, each of the at least four heating side plates 110 has a first end 110a and a second end 110b opposite to each other; every two heating side plates 110 of the at least four heating side plates 110 constitute a side wall heating portion 11A, the first ends 110a of the two heating side plates 110 in one side wall heating portion 11A are connected to each other, and the second ends 110b of the two heating side plates 110 in one side wall heating portion 11A are far away from each other; the first ends 110a of the heating side plates 110 close to each other of two adjacent side wall heating portions 11A are far away from each other; the heating bottom wall 12 includes at least two heating bottom plates 120, each of the at least two heating bottom plates 120 is spaced apart from each other, and the second ends 110b of two adjacent side wall heating portions 11A are connected through the heating bottom plate 120. At least two electrode portions 10b are respectively disposed on different side wall heating portions 11A.
[0042] In the KY crystal growth process, the crucible of the crystal growth furnace is placed in the heating space 90 for heating. In the KY crystal growth process, every two heating side plates 110 in the heating side wall 11 constitute a side wall heating portion 11A, and two adjacent side wall heating portions 11A are connected by a heating bottom plate 120, so that the graphite body 10a constitutes a heating structure composed of multiple heating elements (each heating side plate 110 and each heating bottom plate 120 in the graphite body 10a are heating elements) connected in series, wherein when the electrode part 10b is connected to an external power supply, the graphite body 10a heats the crucible 21 located in the heating space 90. Since the graphite material is a conductive material, it has the characteristics of moderate resistance, stable performance, small deformation rate, low expansion coefficient, good corrosion resistance, and long service life. In the KY crystal growth process, it can reduce the energy consumption of the crystal growth furnace equipment while ensuring the heating effect, and can avoid the deformation of the heating element due to high temperature.
[0043] Furthermore, if Figure 1In some embodiments, at least one of the at least two electrode portions 10b includes an electrode hole provided on the side wall heating portion 11A. The electrode portion 10b is an electrode hole provided on the side wall heating portion 11A, that is, on the graphite body 10a. In terms of manufacturing process, the opening process of the graphite body 10a is simple and low in cost. Moreover, the electrode hole is connected to the graphite electrode, so that the graphite heating element 10 can be easily connected to electricity for heating. In this embodiment, the electrode hole can be matched with the graphite electrode thread.
[0044] Further, the electrode hole is located between two heating side walls 11 in the side wall heating portion 11A.
[0045] Among them, in the above embodiments, a feasible arrangement of electrode holes is provided, which has a neat appearance, and the electrode holes are opened between the two heating side walls 11 so that the production of the electrode holes can have a variety of manufacturing methods, such as directly opening the hole or the electrode hole is composed of two semicircular grooves, thereby reducing the manufacturing cost.
[0046] Optionally, in some embodiments, Figure 1 and Figure 2 The gap between the two first ends 110a close to each other between two adjacent side wall heating parts 11A is a first linear through groove 81, and the first linear through groove 81 extends toward the heating bottom wall 12; the gap between the two second ends 110b of the two heating side plates 110 in the side wall heating part 11A is a second linear through groove 82, and the second linear through groove 82 extends toward the first end 110a.
[0047] Among them, some of the above-mentioned embodiments specifically give the relative arrangement between each heating side plate 110, and separate the two adjacent side wall heating parts 11A and the two heating side plates 110 in the side wall heating part 11A by means of a straight through groove (a first straight through groove 81 and a second straight through groove 82), so that the graphite body 10a is a conductive heating structure composed of multiple heating elements (each heating side plate 110 and each heating bottom plate 120 in the graphite body 10a are heating elements) connected in series in sequence. Since they are separated by straight through grooves, the manufacturing process is simple, the appearance is neat, and the structure is stable.
[0048] Optionally, in some embodiments, Figure 3 The gap between two adjacent heating bottom plates 120 forms a third linear through groove 83 , the third linear through groove 83 is connected to the second linear through groove 82 , and the groove width of the third linear through groove 83 is the same as the groove width of the second linear through groove 82 .
[0049] Specifically, in some embodiments, three electrode parts 10b are included, the heating side wall 11 includes at least six heating side plates 110, and the heating bottom wall 12 includes at least four heating bottom plates 120, wherein the three electrode parts 10b are respectively arranged on the three side wall heating parts 11A. The three electrode parts 10b enable the power supply mode of the graphite heating element 10 to be a triangle connection method, which effectively improves the thermal efficiency of the graphite heating element 10.
[0050] Specifically, in some embodiments, the heated side wall 11 includes 24 heated side plates 110, and the heated bottom wall 12 includes 12 heated bottom plates 120; wherein the three electrode portions 10b are distributed in an equilateral triangle array on the three side wall heating portions 11A respectively.
[0051] Optionally, in some embodiments, Figure 3 The heating bottom plate 120 is in an arc-top trapezoidal shape, and the arc-top trapezoidal shape has an upper top 71 and a lower top 72 relative to each other, and the lower top 72 is connected to the second end 110b of the two adjacent side wall heating parts 11A. The first ends 110a of at least two heating bottom plates 120 are close to the axis of the heating space 90 and jointly define the support through hole 60. It should be noted that the arc-top trapezoidal shape is a structure with a trapezoid as the basic shape, and the upper top 71 and the lower top 72 of the trapezoid are arc-shaped, and the lower top 72 is connected to the heating side wall 11. The upper tops 71 of multiple heating bottom plates 120 are close to each other to form a support through hole 60 that can be used to place the crucible support column. Among them, through the above design, the graphite body 10a can be integrally formed or separately manufactured during manufacturing.
[0052] In this embodiment, the heating side plate 110 and the heating bottom plate 120 have the same thickness.
[0053] Furthermore, in this embodiment, a crystal growth furnace 20 is also provided. Figure 4 The crystal growth furnace 20 includes a graphite heating element 10 . The crucible 21 in the crystal growth furnace 20 is located in the heating space 90 .
[0054] exist Figure 4 In the figure, the crucible 21 is supported inside the graphite heating element 10 by the crucible support column 210 through the support through hole 60 and is located in the center of the furnace 22. The seed crystal rod 23 is a seed crystal clamping mechanism for crystal growth.
[0055] A crystal growth furnace 20 is provided. In the KY crystal growth process, a graphite heating element 10 is arranged in the crystal growth furnace 20. Since the graphite material, as a conductive material, has the characteristics of moderate resistance, stable performance, small deformation rate, low expansion coefficient, good corrosion resistance, long service life, etc., it can reduce the energy consumption of the crystal growth furnace 20 equipment while ensuring the heating effect, and can avoid the deformation of the heating element due to high temperature.
[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A graphite heating element, characterized in that: include: A graphite body, wherein the graphite body comprises a heating bottom wall and a heating side wall, wherein the heating bottom wall and the heating side wall jointly define a heating space: The heated side wall comprises at least four heated side panels, each of the at least four heated side panels having a first end and a second end opposite to each other; Every two of the at least four heating side plates constitute a side wall heating portion, the first ends of the two heating side plates in one side wall heating portion are connected to each other, and the second ends of the two heating side plates in one side wall heating portion are away from each other; The first ends of the heating side plates of two adjacent side wall heating parts that are close to each other are away from each other; The heating bottom wall comprises at least two heating bottom plates, each of the at least two heating bottom plates is spaced apart from each other, the second ends of two adjacent side wall heating parts are connected through the heating bottom plates, the heating bottom plates are in an arc-top trapezoidal shape, the arc-top trapezoidal shape has an upper top and a lower top opposite to each other, the lower top is connected to the second ends of two adjacent side wall heating parts, the first ends of the at least two heating bottom plates are close to the axis of the heating space and jointly define a supporting through hole, and the heating side plate has the same thickness as the heating bottom plate; as well as At least two electrode parts, wherein the at least two electrode parts are respectively arranged on different side wall heating parts; At least one of the at least two electrode portions comprises an electrode hole opened on the side wall heating portion; The electrode hole is located between the two heating side walls in the side wall heating portion; A gap between two mutually adjacent first ends of two adjacent side wall heating portions is in the form of a first straight through groove, and the first straight through groove extends toward the heating bottom wall; The gap between the two second ends of the two heating side plates in the side wall heating portion is a second straight through groove, and the second straight through groove extends toward the first end; The gap between two adjacent heating bottom plates is a third straight through groove, and the third straight through groove is connected to the second straight through groove; The slot width of the third linear through slot is the same as the slot width of the second linear through slot.
2. The graphite heating element according to claim 1, characterized in that: include: three of the electrode portions; The heated side wall includes at least six heated side plates, and the heated bottom wall includes at least four heated bottom plates; Wherein, the three electrode parts are respectively arranged on the three side wall heating parts.
3. The graphite heating element according to claim 2, characterized in that: The heating side wall includes 24 heating side plates, and the heating bottom wall includes 12 heating bottom plates; The three electrode portions are arranged in a regular triangle array and are respectively distributed on the three side wall heating portions.
4. A crystal growth furnace, characterized in that: The crystal growth furnace comprises the graphite heating element according to any one of claims 1 to 3; The crucible in the crystal growth furnace is located in the heating space.