Processing device and method for laser and spray electrochemical discharge compounding

Abstract

The invention discloses a processing device and method for laser and spray electrochemical discharge compounding, and relates to the field of composite micro processing in special processing technology. The device comprises a hollow laser irradiation system, an electrochemical spray processing system and a motion control system; the two kinds of energy synergistically act on the surface of an insulating high-hard brittle material, an electrochemical discharge loop is formed in an electrolyte through an auxiliary electrode and a tool electrode, meanwhile, a laser light beam generates focus on the surface of a sample, the processing efficiency is improved under the condition of not generating hot etching and fusing, and the processing and sizing property is improved. Compared with a traditional electrochemical discharge processing method, the atomization of the electrolyte can effectively reduce the absorption of electrolyte on discharge energy, thereby saving the electrochemical energyconsumption required by gas film formation and increasing the proportion of spark discharge energy. Meanwhile, the flowing electrolyte can take away the impurities generated by the material etching intime, so that the good micro processing quality is obtained.

Description

technical field

[0001] The invention relates to the field of composite micromachining in special processing technology, in particular to a laser and spray electrochemical discharge composite processing device and method, which are suitable for microfabrication and manufacture of insulating hard and brittle materials. Background technique

[0002] Insulating hard and brittle materials have the characteristics of good insulation, corrosion resistance, high temperature resistance, and high hardness. They are currently widely used in aerospace, information and communication, biomedical, and precision instruments. Due to its high hardness and high brittleness, it is difficult to complete the processing of fine structures by traditional mechanical cutting methods. Electrochemical discharge machining and laser processing are currently more suitable processing methods.

[0003] The actual discharge of electrochemical discharge technology processing is carried out between the tool el...

Examples

Embodiment Construction

[0042] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited thereto.

[0043] Such as figure 1 As shown, a laser and spray electrochemical discharge composite processing device includes a hollow laser irradiation system, a spray electrochemical processing system and a motion control system; the hollow laser irradiation system includes a pulse laser 9, a positive prism 7, and a negative prism 8 , mirror 6 and focusing lens 10, the pulsed laser light sent by pulse laser 9 is modulated into hollow laser through negative prism 8 and positive prism 7 in turn, the optical path is changed by reflecting mirror 6, and finally focused by focusing lens 10.

[0044] The spray electrochemical machining system includes a DC pulse power supply 2, a current probe 3, an oscilloscope 4, an electrode fixture 12, a tool electrode 13, a fine atomizer 14, an x-y-...

technical field

[0001] The invention relates to the field of composite micromachining in special processing technology, in particular to a laser and spray electrochemical discharge composite processing device and method, which are suitable for microfabrication and manufacture of insulating hard and brittle materials. Background technique

[0002] Insulating hard and brittle materials have the characteristics of good insulation, corrosion resistance, high temperature resistance, and high hardness. They are currently widely used in aerospace, information and communication, biomedical, and precision instruments. Due to its high hardness and high brittleness, it is difficult to complete the processing of fine structures by traditional mechanical cutting methods. Electrochemical discharge machining and laser processing are currently more suitable processing methods.

[0003] The actual discharge of electrochemical discharge technology processing is carried out between the tool el...

Examples

Embodiment Construction

[0042] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited thereto.

[0043] Such as figure 1 As shown, a laser and spray electrochemical discharge composite processing device includes a hollow laser irradiation system, a spray electrochemical processing system and a motion control system; the hollow laser irradiation system includes a pulse laser 9, a positive prism 7, and a negative prism 8 , mirror 6 and focusing lens 10, the pulsed laser light sent by pulse laser 9 is modulated into hollow laser through negative prism 8 and positive prism 7 in turn, the optical path is changed by reflecting mirror 6, and finally focused by focusing lens 10.

[0044] The spray electrochemical machining system includes a DC pulse power supply 2, a current probe 3, an oscilloscope 4, an electrode fixture 12, a tool electrode 13, a fine atomizer 14, an x-y-...

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