A sample stage for ultrasonic scanning microscope

Abstract

The present invention relates to a sample stage for an ultrasonic scanning microscope, comprising: a sample rack for placing samples; a driving device for driving the sample rack to rotate, the sample rack being fixed on a power output shaft of the driving device; a lifting assembly for driving the driving device to rise or fall, the driving device being arranged on the lifting assembly; a limit position assembly being arranged on the lifting assembly, for limiting the maximum rotation angle of the sample rack. Based on the sample stage for an ultrasonic scanning microscope of the present invention, the sample rack can be rotated at a certain angle as required to achieve scanning detection of the object to be measured at different angles.

Description

Technical Field

[0001] The invention belongs to the technical field of ultrasonic scanning, and in particular relates to a fixing and rotating device for an ultrasonic scanning microscope. Background Art

[0002] Ultrasonic scanning microscope is a non-destructive testing device that uses ultrasound as a transmission medium to image microscopic objects. It uses the properties of ultrasonic pulse echoes to stimulate the piezoelectric transducer to emit multiple ultrasonic beams that are transmitted to the sample under test through a coupling liquid medium. It is widely used in various fields as a non-destructive test. Ultrasonic scanning microscope uses pulse echo technology. A specific acoustic component emits and receives short ultrasonic pulses with a high repetition rate. To form an acoustic image, the scanning mechanism needs to scan back and forth above the sample.

[0003] At present, when the scanning mechanism is working, the object to be tested is usually placed directly in a water tank. Once the object to be tested is placed in the water tank, it is difficult to change the height and observation angle of the object to be tested. Therefore, it is difficult to realize the state monitoring of the object to be tested at different angles without violently disturbing the coupling medium. Summary of the invention

[0004] The technical problem solved by the present invention is: to provide a sample stage for an ultrasonic scanning microscope, which solves the detection requirements of fixing the object to be tested and rotating it to a certain angle, and can also better prevent the ultrasonic circulator from being accidentally damaged during the rotation process, with a simple structure and low cost.

[0005] The sample stage for an ultrasonic scanning microscope based on the present invention comprises: a sample rack for placing samples; a driving device for driving the sample rack to rotate, wherein the sample rack is fixed to a power output shaft of the driving device; a lifting component for driving the driving device to rise or fall, wherein the driving device is arranged on the lifting component; and the lifting component is provided with the limit assembly for limiting the maximum rotation angle of the sample rack.

[0006] The scanning ultrasonic microscope works with pulse echo technology. Short ultrasonic pulses with high repetition rate are emitted and received by specific acoustic components. After the sound waves interact with the sample under test, the reflected waves are received and converted into video signals. By emitting high-frequency ultrasonic waves to the inside of the sample, when passing through the interface between two different materials, due to the different acoustic impedances of different materials, the absorption and reflection of the sound waves are different. The reflected or penetrating ultrasonic energy information or phase information changes are collected to check for defects such as delamination, cracks or cavities inside the sample. To form an acoustic image, the scanning mechanism needs to scan back and forth above the sample. The intensity and phase information of the reflected wave at each point of the sample are recorded synchronously in sequence and converted into pixels with a certain gray value, which are displayed on a high-resolution display.

[0007] The solution based on the present invention has the following beneficial technical effects:

[0008] (1) The sample to be tested can be rotated at a certain angle as needed to achieve scanning detection of the object to be tested at different angles. In particular, when the surface of the object is uneven, different microscopic images can be observed by adjusting a certain angle;

[0009] (2) The ultrasonic transducer (belonging to the scanning mechanism) is the most important part of the instrument. If the ultrasonic transducer is touched by hands or other hard objects, it is very easy to cause damage to the ultrasonic transducer. The maximum position of the sample rack is limited by the limit assembly to prevent the ultrasonic transducer from being damaged during the rotation of the sample rack;

[0010] (3) The focal length and signal limit of the ultrasonic transducer are determined by the transducer itself. Different transducer frequencies and focal lengths correspond to different penetration depths and theoretical resolutions. Generally speaking, the higher the frequency of the transducer, the smaller the penetration depth, the shorter the working distance, and the greater the theoretical resolution. When the Z-axis distance reaches the limit downward, in the prior art, such as the PVA ultrasonic scanning microscope SAM300, it is usually necessary to replace the corresponding ultrasonic transducer lens to meet the working distance requirement. The sample stage based on the present invention can adjust the sample to be tested (sample rack) in the Z-axis direction through the lifting assembly, without having to replace the low-frequency transducer due to the Z-axis limit. While ensuring a higher resolution, it can avoid accidental damage caused by frequent replacement of the transducer.

[0011] On the basis of the above scheme, the present invention can also be improved as follows:

[0012] Furthermore, the lifting assembly includes two relatively arranged first lifting devices and a second lifting device, the driving device is arranged on the first lifting device, the output shaft is fixedly connected to one end of the sample rack, and the other end of the sample rack is movably connected to the second lifting device.

[0013] Thus, the first lifting device drives the driving device to move up and down, thereby driving one end of the sample rack to move up and down, and at the same time, the second lifting device drives the other end of the sample rack to move up and down, thereby realizing the lifting of the sample rack.

[0014] Further, the first lifting device includes a first vertically arranged first support frame, a first slider connected to the first support frame for sliding up and down, and a first positioning assembly, the first positioning assembly is used to limit and fix the first slider located at different heights, the second lifting device includes a second vertically arranged second support frame, a second slider connected to the second support frame for sliding up and down, and a second positioning assembly, the second positioning assembly is used to limit and fix the second slider located at different heights, the output shaft passes through the first slider and is fixedly connected to one end of the sample rack, the other end of the sample rack is movably connected to the second slider, and the output shaft is rotatably connected to the first slider.

[0015] When the height of the sample rack needs to be adjusted, the first positioning assembly and the second positioning assembly are adjusted respectively, and then the first slider 32 or the second slider can be moved up and down to the required position, and finally the first positioning assembly and the positioning assembly are used to limit and fix the first slider and the second slider respectively.

[0016] Furthermore, the first positioning assembly includes several groups of positioning assemblies arranged in sequence from top to bottom along the first support frame, which are used to support and fix the first slider located at different heights, and the second positioning assembly includes several groups of positioning assemblies arranged in sequence from top to bottom along the second support frame, which are used to support and fix the second slider located at different heights.

[0017] Furthermore, each group of elastic positioning members includes two relatively arranged elastic return members, each of the elastic return members includes a spring and a limit block arranged at one end of the spring, and each of the support frames is provided with a plurality of accommodating cavities that can accommodate each of the elastic return members.

[0018] Therefore, when the height of the sample rack needs to be adjusted, the limit blocks on both sides of the first slider are pressed, and the limit blocks enter the accommodating cavity to move the first slider to the required height. The limit blocks return to their original state under the action of the spring restoring force, and the first slider is supported and fixed. At the same time, the height of the second slider is adjusted in the same way.

[0019] Furthermore, the limit assembly includes a first limit member and a second limit member, the first limit member is arranged on the first slider to limit the maximum clockwise rotation angle of the sample rack, and the second limit member is arranged on the second slider to limit the maximum counterclockwise rotation angle of the sample rack.

[0020] In this way, the sample holder can be better prevented from hitting the upper transducer during the forward and reverse rotation process.

[0021] Further, the first limiting member includes a first cylinder arranged on the first sliding block, a second cylinder threadedly connected to the first cylinder, and a first blocking member that can abut against the sample rack at the maximum rotation angle, and the second limiting member includes a third cylinder arranged on the second sliding block, a fourth cylinder threadedly connected to the third cylinder, and a second blocking member that can abut against the sample rack at the maximum rotation angle.

[0022] Thus, the second cylindrical barrel is rotated to change the maximum clockwise rotation angle of the sample rack that can be limited by the first blocking member, and the fourth barrel is rotated to change the maximum counterclockwise rotation angle of the sample rack that can be limited by the second blocking member. For objects of different sizes and materials, the distance between the ultrasonic transducer and the object is significantly different. When it is necessary to detect a specific object, a suitable maximum rotation angle can be set before the detection. Thus, while protecting the ultrasonic transducer, a larger angle detection range is provided for the object to be tested.

[0023] Further, the first blocking member includes a first supporting plate fixedly connected to one end of the second cylinder and a first blocking block arranged on the first supporting plate, a scale is arranged on the periphery of the first supporting plate, and a through hole is arranged at the center of the first supporting plate, and the output shaft passes through the first cylinder cavity, the second cylinder cavity, and the through hole of the first limiting member and is fixedly connected to one end of the sample rack.

[0024] Thus, the driving device can drive the output shaft to rotate in the first cylinder cavity, the second cylinder cavity and the through hole of the first limit member, thereby driving the sample rack to rotate. According to the set scale, the rotation angle of the sample rack can be observed intuitively, thereby facilitating the control of the rotation angle of the sample rack 1. After rotating to a suitable angle, the scanning mechanism is used for scanning.

[0025] Specifically, the second blocking member includes a second support plate fixedly connected to one end of the fourth cylinder and a second blocking block arranged on the second support plate, a scale is arranged on the periphery of the second support plate, and a through hole is arranged at the center of the second support plate.

[0026] Specifically, an external thread structure is provided on the output shaft, and the output shaft passes through the threaded hole of the first slider, the first cylinder cavity, the second cylinder cavity and the through hole in sequence and is fixedly connected to one end of the support frame. A rotating shaft is fixed on the other end of the support frame, and the rotating shaft passes through the through hole on the second support plate, the fourth cylinder cavity, the third cylinder cavity in sequence and is threadedly connected to the threaded hole of the second slider.

[0027] Therefore, the driving device with the output shaft rotates in the threaded hole of the first slider, and the rotating shaft rotates in the threaded hole of the second slider, thereby realizing the rotation of the sample rack, and the rotation angle of the sample rack can be continuously adjusted to meet the detection requirements of the object to be tested at a certain angle.

[0028] Furthermore, the sample rack is provided with a plurality of adjustable sample clamps for clamping and fixing samples of different structures.

[0029] Specifically, each adjustable sample clamp includes a third slider slidably connected to the sample rack, a clamp located above the third slider, and a screw, the clamp is provided with a through hole, the third slider is provided with a threaded hole, and the lower end of the screw passes through the through hole and is threadedly connected to the threaded hole.

[0030] Therefore, when the sample to be tested is a regular sheet structure or a plate structure with low or medium thickness, the third slider is adjusted to a suitable position, and each of the sample clamps is adjusted to clamp and fix the object to be tested by utilizing the gap formed by each clamp and each of the third sliders; when the sample is a plate structure with relatively high thickness or an irregular structure, the third slider is adjusted to a suitable position, and then the angle of each clamp is rotated so that it is respectively abutted and fixed against the outer wall of each object to be tested, and then the screws are tightened to fix the clamp, thereby achieving the fixation of the sample to be tested with a plate structure with relatively high thickness or an irregular structure.

[0031] Furthermore, the driving device includes a rotating handle located outside the water tank and a connecting rod connecting the rotating handle and the output shaft.

[0032] Thus, the handle can be slowly rotated to drive the output shaft to rotate through the connecting rod, thereby driving the sample holder to rotate counterclockwise or clockwise at a certain angle, which is easy to operate, simple in structure and has little disturbance to the medium.

[0033] Preferably, the sample stage for ultrasonic scanning microscope based on the present invention is suitable for PVA ultrasonic scanning microscope SAM300 series.

[0034] Therefore, the sample stage for ultrasonic scanning microscope of the present invention can be directly used on the original PVA ultrasonic scanning microscope SAM300 series to meet the testing requirements.

[0035] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the three-dimensional structure of a sample stage according to an embodiment of the present invention.

[0037] Figure 2It is a schematic diagram of the main structure of the sample stage according to an embodiment of the present invention.

[0038] Figure 3 It is a cross-sectional view of the elastic reset member according to the embodiment of the present invention.

[0039] Figure 4 It is a cross-sectional view of the elastic reset member in the embodiment of the present invention when it is in a pressed state.

[0040] Figure 5 Schematic diagram of the structure of an adjustable sample clamp 1 according to an embodiment of the present invention.

[0041] Attached Figure 1-5 In the figure, the names of the components represented by the reference numbers are as follows:

[0042] Sample rack 1;

[0043] Driving device 2; output shaft 21; connecting rod 22; rotating handle 23;

[0044] The first lifting device 3; the first support frame 31; the accommodating cavity 311; the first sliding block 32; the elastic reset member 33; the limit block 331; the spring 332;

[0045] A second lifting device 4; a second support frame 41;

[0046] The first stopper 5; the first cylinder 51; the second cylinder 52; the support plate 53; the first stopper 54;

[0047] A second limiting member 6; a second blocking block 61;

[0048] Adjustable sample clamp 7; third slide block 71; clamping plate 72; screw 73. DETAILED DESCRIPTION

[0049] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0050] like Figure 1 As shown in or 2, the sample stage for an ultrasonic scanning microscope based on the present invention includes: a sample rack 1 for placing samples; a driving device 2 for driving the sample rack 1 to rotate, and the sample rack 1 is fixed to a power output shaft 21 of the driving device 21; a lifting component for driving the driving device 2 to rise or fall, and the driving device 2 is arranged on the lifting component; a limit component, and the lifting component is provided with the limit component, which is used to limit the maximum rotation angle of the sample rack 1.

[0051] The sample stage for ultrasonic scanning microscope based on the present invention can realize scanning detection of the object to be measured at different angles, and can also better prevent the ultrasonic circulator from being accidentally damaged during rotation. It has a simple structure and low cost.

[0052] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the lifting assembly includes two relatively arranged first lifting devices 3 and a second lifting device 4, the driving device 2 is arranged on the first lifting device 3, the output shaft 21 is fixedly connected to one end of the sample holder 1, and the other end of the sample holder 1 is movably connected to the second lifting device 4.

[0053] Thus, the first lifting device 3 drives the driving device 2 to move up and down, thereby driving one end of the sample rack 1 to move up and down, and at the same time, the second lifting device 4 drives the other end of the sample rack 1 to move up and down, thereby realizing the lifting of the sample rack 1.

[0054] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the first lifting device 3 includes a vertically arranged first support frame 31, a first slider 32 slidably connected to the first support frame 31 up and down, and a first positioning component, the first positioning component is used to limit and fix the first slider 32 located at different heights, the second lifting device 4 includes a vertically arranged second support frame 41, a second slider slidably connected to the second support frame 41 up and down, and a second positioning component, the second positioning component is used to limit and fix the second slider located at different heights, the output shaft 21 passes through the first slider 32 and is fixedly connected to one end of the sample holder 1, the other end of the sample holder 1 is movably connected to the second slider, and the output shaft 21 is rotatably connected to the first slider 32.

[0055] When the height of the sample rack 1 needs to be adjusted, the first positioning assembly and the second positioning assembly are adjusted respectively, and then the first slider 32 or the second slider can be moved up and down to the required position, and finally the first positioning assembly and the positioning assembly are used to limit and fix the first slider and the second slider respectively.

[0056] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the first positioning component includes several groups of positioning components arranged in sequence from top to bottom along the first support frame, which are used to support and fix the first slider located at different heights, and the second positioning component includes several groups of positioning components arranged in sequence from top to bottom along the second support frame, which are used to support and fix the second slider located at different heights.

[0057] like Figure 1 , 3As shown in Figures 4 and 4, based on the sample stage for an ultrasonic scanning microscope of the present invention, each group of elastic positioning members includes two elastic reset members 33 arranged opposite to each other, each of the elastic reset members 33 includes a spring 332 and a limit block 331 arranged at one end of the spring 332, and each of the support frames 31 is provided with a plurality of accommodating cavities 311 for accommodating each of the elastic reset members.

[0058] Specifically, when the height of the sample rack 1 needs to be adjusted, the limit blocks 331 on both sides of the first slider 32 are pressed, and the limit blocks 331 enter the accommodating cavity 311 (as shown in FIG4 ), so that the first slider 32 can be moved to the required height, and the limit blocks 331 are restored to the original state (as shown in FIG4 ) under the action of the restoring force of the spring 332. Figure 3 As shown), the first slider 32 is supported and fixed, and at the same time, the height of the second slider is adjusted in the same way.

[0059] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the limiting assembly includes a first limiting member 5 and a second limiting member 6. The first limiting member 5 is arranged on the first slider 32 to limit the maximum clockwise rotation angle of the sample holder 1. The second limiting member 6 is arranged on the second slider 32 to limit the maximum counterclockwise rotation angle of the sample holder 1.

[0060] In this way, the sample holder can be better prevented from hitting the upper transducer during the forward and reverse rotation process.

[0061] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the first limiting member 5 includes a first cylinder 51 arranged on the first slider 32, a second cylinder 52 threadedly connected to the first cylinder 51, and a first blocking member that can abut against the sample holder 1 at the maximum rotation angle, and the second limiting member 6 includes a third cylinder arranged on the second slider, a fourth cylinder threadedly connected to the third cylinder, and a second blocking member that can abut against the sample holder at the maximum rotation angle.

[0062] Thus, the second cylindrical barrel 52 is rotated to change the maximum clockwise rotation angle of the sample rack 1 that can be limited by the first blocking member 54, and the fourth barrel is rotated to change the maximum counterclockwise rotation angle of the sample rack 1 that can be limited by the second blocking member. For objects of different sizes and materials, the distance between the ultrasonic transducer and the object is significantly different. When it is necessary to detect a specific object, a suitable maximum rotation angle can be set before the detection. Thus, while protecting the ultrasonic transducer, a larger angle detection range is provided for the object to be detected.

[0063] Based on the sample stage for an ultrasonic scanning microscope of the present invention, the first blocking member includes a first supporting plate 53 fixedly connected to one end of the second cylinder 52 and a first blocking block 54 arranged on the first supporting plate 53, a scale is arranged on the periphery of the first supporting plate 53, and a through hole is arranged at the center of the first supporting plate 53, and the output shaft 21 passes through the first cylinder cavity, the second cylinder cavity of the first limiting member 5, and the through hole is fixedly connected to one end of the sample rack 1.

[0064] Thus, the driving device can drive the output shaft 21 to rotate in the first cylinder cavity, the second cylinder cavity, and the through hole, thereby driving the sample rack 1 to rotate. According to the set scale, the rotation angle of the sample rack 1 can be observed intuitively, thereby facilitating the control of the rotation angle of the sample rack 1. After rotating to a suitable angle, the scanning mechanism is used for scanning.

[0065] Specifically, the second blocking member includes a second support plate fixedly connected to one end of the fourth cylinder and a second blocking block 61 arranged on the second support plate, a scale is arranged on the periphery of the second support plate, and a through hole is arranged at the center of the second support plate.

[0066] Specifically, an external thread structure is provided on the output shaft 21, and the output shaft 21 passes through the threaded hole of the first slider 32, the cavity of the first cylinder 51, the cavity of the second cylinder 52 and the through hole in sequence, and is fixedly connected to one end of the support frame 11. A rotating shaft is fixed to the other end of the support frame 11, and the rotating shaft passes through the through hole on the second support plate, the cavity of the fourth cylinder 52, the cavity of the third cylinder in sequence, and is threadedly connected to the threaded hole of the second slider.

[0067] Thus, the drive device 2 with the output shaft 21 rotates in the threaded hole of the first slider 32, and the rotating shaft rotates in the threaded hole of the second slider, thereby realizing the rotation of the sample rack 1. The rotation angle of the sample rack 1 can be continuously adjusted to meet the detection requirements of the object to be tested at a certain angle.

[0068] like Figure 1 As shown, based on the sample stage for ultrasonic scanning microscope of the present invention, a plurality of adjustable sample clamps 7 are arranged on the sample rack for clamping and fixing samples of different structures.

[0069] Specifically, Figure 5 As shown, each adjustable sample clamp 7 includes a third slider 71 slidably connected to the sample rack, a clamping plate 72 located above the third slider 71, and a screw 73. The clamping plate 72 is provided with a through hole, and the third slider 71 is provided with a threaded hole. The lower end of the screw 73 passes through the through hole and is threadedly connected to the threaded hole.

[0070] Therefore, when the sample to be tested is a regular sheet structure or a plate structure with low or medium thickness, the third slider is adjusted to a suitable position, and each of the sample clamps is adjusted to clamp and fix the object to be tested by utilizing the gap formed by each of the clamps 72 and each of the third sliders 71; when the sample is a plate structure with a relatively high thickness or an irregular structure, the third slider is adjusted to a suitable position, and then the angle of each of the clamps 72 is rotated so that they are respectively abutted and fixed against the outer walls of each of the objects to be tested, and then the screws 73 are tightened to fix the clamps, thereby achieving the fixation of the sample to be tested with a plate structure with a relatively high thickness or an irregular structure.

[0071] Based on the sample stage for ultrasonic scanning microscope of the present invention, the driving device 2 includes a rotating handle 23 located outside the water tank and a connecting rod 22 connecting the rotating handle 23 and the output shaft 21 .

[0072] Therefore, by rotating the handle 23, the output shaft 21 can be driven to rotate through the connecting rod 22, thereby driving the sample holder 1 to rotate counterclockwise or clockwise at a certain angle, which is easy to operate and has a simple structure.

[0073] Preferably, the sample stage for ultrasonic scanning microscope based on the present invention is suitable for PVA ultrasonic scanning microscope SAM300 series.

[0074] Therefore, the sample stage for ultrasonic scanning microscope of the present invention can be directly used on the original PVA ultrasonic scanning microscope SAM300 series to meet the testing requirements.

[0075] Although the embodiments of the present invention have been described in detail above, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A sample stage for an ultrasonic scanning microscope, characterized in that: include: a sample holder (1) for placing samples; A driving device (2) for driving the sample rack (1) to rotate, wherein the sample rack (1) is fixed on a power output shaft (21) of the driving device (2); A lifting component used to drive the driving device (2) to rise or fall, the driving device (2) being arranged on the lifting component; And a limit assembly, the lifting assembly is provided with the limit assembly, for limiting the maximum rotation angle of the sample holder (1); The lifting assembly comprises two first lifting devices (3) and a second lifting device (4) arranged opposite to each other, the driving device (2) is arranged on the first lifting device (3), the output shaft (21) is fixedly connected to one end of the sample rack (1), and the other end of the sample rack (1) is movably connected to the second lifting device (4); The first lifting device (3) comprises a first support frame (31) arranged vertically, a first slider (32) connected to the first support frame (31) in an up-and-down sliding manner, and a first positioning assembly, wherein the first positioning assembly is used to limit and fix the first slider (32) located at different heights, and the second lifting device (4) comprises a second support frame (41) arranged vertically, a second slider connected to the second support frame (41) in an up-and-down sliding manner, and a second positioning assembly, wherein the second positioning assembly is used to limit and fix the second slider located at different heights, the output shaft (21) passes through the first slider (32) and is fixedly connected to one end of the sample holder (1), the other end of the sample holder (1) is movably connected to the second slider, and the output shaft (21) is rotatably connected to the first slider (32); The limiting assembly comprises a first limiting member (5) and a second limiting member (6), wherein the first limiting member (5) is arranged on the first slider (32) and is used to limit the maximum clockwise rotation angle of the sample holder (1), and the second limiting member (6) is arranged on the second slider and is used to limit the maximum counterclockwise rotation angle of the sample holder (1); The sample rack comprises a plurality of adjustable sample clamps (7), each of the adjustable sample clamps (7) being used to clamp and fix samples of different structures.

2. The sample stage for ultrasonic scanning microscope according to claim 1, characterized in that: The first positioning assembly comprises a plurality of groups of elastic positioning members sequentially arranged from top to bottom along the first support frame, and used for supporting and fixing the first slider (32) located at different height positions; the second positioning assembly comprises a plurality of groups of elastic positioning members sequentially arranged from top to bottom along the second support frame, and used for supporting and fixing the second slider located at different height positions.

3. The sample stage for ultrasonic scanning microscope according to claim 2, characterized in that: Each group of elastic positioning members comprises two elastic reset members (33) arranged opposite to each other, each of the elastic reset members (33) comprises a spring (332) and a limit block (331) arranged at one end of the spring (332), and each of the first support frames (31) is provided with a plurality of accommodating cavities (311) capable of accommodating each of the elastic reset members.

4. The sample stage for ultrasonic scanning microscope according to claim 3, characterized in that: The first limiting member (5) comprises a first cylinder (51) arranged on the first sliding block (32), a second cylinder (52) threadedly connected to the first cylinder (51), and a first blocking member capable of abutting against the sample holder (1) at a maximum rotation angle, and the second limiting member (6) comprises a third cylinder arranged on the second sliding block, a fourth cylinder threadedly connected to the third cylinder, and a second blocking member capable of abutting against the sample holder at a maximum rotation angle.

5. The sample stage for ultrasonic scanning microscope according to claim 4, characterized in that: The first blocking member comprises a first support plate (53) fixedly connected to one end of the second cylinder (52) and a first blocking block (54) arranged on the first support plate (53); a scale is arranged on the periphery of the first support plate (53); a through hole is arranged at the center of the first support plate (53); the output shaft (21) passes through the first cylinder cavity and the second cylinder cavity of the first limiting member (5), and the through hole is fixedly connected to one end of the sample holder (1).

6. The sample stage for ultrasonic scanning microscope according to any one of claims 1 to 5, characterized in that: The driving device (2) comprises a rotating handle (23) located outside the water tank and a connecting rod (22) connecting the rotating handle (23) and the output shaft (21).

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