A stirring evaporation source

Abstract

The present invention discloses a stirring evaporation source, including an evaporation source body and a crucible; the crucible is arranged in the evaporation source body, the crucible includes a cavity, and the cavity is used as an evaporation place for the evaporation material; it also includes a stirring device and a driving unit; the stirring device includes a central axis, a cross bar, a connecting rod and a stirring head, one end of the central axis is connected to the cavity, the other end of the central axis is connected to the cross bar, one end of the connecting rod is connected to the cross bar, and the other end of the connecting rod is connected to the stirring head; the driving unit is arranged on the cavity, and is used to drive the stirring device to rotate to stir the evaporation material. The above technical solution is provided with a driving unit and a stirring device in the cavity of the crucible, and the driving unit drives the stirring device to rotate to fully stir the evaporation material, so that the evaporation material is evenly heated, which can avoid the probability of local agglomeration of the evaporation material, improve the stability of the plating rate, and improve the film quality.

Description

Technical Field

[0001] The invention relates to the field of evaporation equipment, and in particular to a stirring evaporation source. Background Art

[0002] Organic Light Emitting Diode (OLED) is a technology with great development prospects in the field of display technology today. Evaporation technology is a key process in OLED. Its working principle is to heat the evaporation source filled with molten or sublimation evaporation materials in a vacuum system to vaporize or sublimate them, and then deposit them on the substrate after passing through the hollow area of ​​the mask plate on the top, and finally form the RGB film layer required by the display device to achieve single-color or full-color display.

[0003] A linear crucible or a point source crucible is placed in the evaporation source. The crucible is filled with evaporation materials. As the evaporation materials continue to vaporize or sublimate and escape, the evaporation materials in the crucible gradually decrease. The mean free path between the evaporation materials and the substrate becomes longer, resulting in unstable evaporation rates and affecting film quality.

[0004] Due to the nature of some evaporation materials and the increased space between the evaporation materials and the substrate, the evaporation materials are heated unevenly, causing local agglomeration of the evaporation materials, affecting the evaporation rate and uniformity of the film layer. In addition, gas molecules are prone to condense at the outlet position and block the through holes (outlet holes), resulting in a decrease in the plating rate. Summary of the invention

[0005] Therefore, it is necessary to provide a stirring evaporation source to solve the problem of uneven heating of the evaporation material during evaporation in the crucible.

[0006] To achieve the above-mentioned purpose, this embodiment provides a stirring evaporation source, including an evaporation source body and a crucible;

[0007] The crucible is arranged in the evaporation source body, and the crucible includes a cavity, and the cavity is used as an evaporation place for the evaporation material;

[0008] It is characterized in that it also includes a stirring device and a driving unit;

[0009] The stirring device comprises a central shaft, a cross bar, a connecting rod and a stirring head, one end of the central shaft is connected to the cavity, the other end of the central shaft is connected to the cross bar, one end of the connecting rod is connected to the cross bar, and the other end of the connecting rod is connected to the stirring head;

[0010] The driving unit is arranged on the cavity, and is used for driving the stirring device to rotate to stir the evaporated material.

[0011] Furthermore, the stirring head is a magnetic stirring head, the magnetic stirring head is magnetic, and the connecting rod is rotatably connected to the cross bar;

[0012] The driving unit includes a magnetic object, the driving unit is connected to the cavity, and the magnetic object is used to drive the magnetic stirring head and the connecting rod to rotate to stir the evaporated material.

[0013] Furthermore, the driving unit also includes a base and a motor;

[0014] The motor is placed at the bottom of the cavity, the rotating shaft of the motor is connected to the bottom surface of the base, and the upper surface of the base is provided with the magnetic object.

[0015] Further, the driving unit includes a motor;

[0016] The rotating shaft of the motor is connected to one end of the central shaft, and the motor is used to drive the central shaft to rotate, thereby driving the cross bar, the connecting rod and the stirring head to rotate to stir the vapor deposition material.

[0017] Furthermore, the stirring head includes a rotating head and a rotating head motor, and a rotating shaft of the rotating head motor is connected to the rotating head.

[0018] Furthermore, it also includes a heating coil, which is wound around the cross bar or the connecting rod.

[0019] Furthermore, the heating coil generates an alternating magnetic field, and the cross bar or the connecting rod is a conductor.

[0020] Further, it also includes a through hole and an anti-blocking device;

[0021] The through hole is arranged at the top of the crucible, and the through hole is communicated with the cavity;

[0022] The anti-clogging device is arranged at the through hole and is used for cleaning the evaporation material that is blocked in the through hole.

[0023] Furthermore, the anti-blocking device is a vibration device.

[0024] Further, it also includes a packing chamber, a movable baffle and a piston;

[0025] The filling cavity is arranged on one side of the crucible, and the filling cavity is communicated with the cavity of the crucible;

[0026] The movable baffle is arranged in the filling cavity or the crucible and is located at the connection between the filling cavity and the crucible;

[0027] The filling cavity is provided with a material injection port, and the piston is arranged in the filling cavity and located at one side of the material injection port.

[0028] Different from the prior art, the above technical solution is provided with a driving unit and a stirring device in the cavity of the crucible. The driving unit drives the stirring device to rotate to fully stir the evaporated material so that the evaporated material is heated evenly, which can avoid the probability of local agglomeration of the evaporated material, improve the stability of the plating rate, and improve the film quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a schematic diagram of the cross-sectional structure of the evaporation source described in Example 1;

[0030] Figure 2 This is a schematic cross-sectional structure diagram of the stirring device described in Example 1;

[0031] Figure 3 It is a schematic cross-sectional structure diagram of the movable baffle in the open state according to the first embodiment;

[0032] Figure 4 This is a schematic cross-sectional view of the structure of the vapor deposition material at the through hole cleaned by the vibration device described in Example 1;

[0033] Figure 5 It is a schematic diagram of the cross-sectional structure of the evaporation source described in Example 2;

[0034] Figure 6 This is a schematic cross-sectional structure diagram of the stirring device described in Example 2;

[0035] Figure 7 It is a schematic cross-sectional structure diagram of the movable baffle in the open state according to the second embodiment;

[0036] Figure 8 This is a schematic cross-sectional structure diagram of the vibration device described in Example 2 for cleaning the evaporated material at the through hole.

[0037] Description of reference numerals:

[0038] 1. Evaporation source body;

[0039] 11. Vent hole;

[0040] 2. Crucible;

[0041] 21. Through hole;

[0042] 3. Stirring device;

[0043] 31. Central axis;

[0044] 32. horizontal bar;

[0045] 33. Connecting rod;

[0046] 34. Mixing head;

[0047] 35. Motor;

[0048] 36. Base;

[0049] 4. Heating coil;

[0050] 5. Vibration device;

[0051] 6. Filling cavity;

[0052] 61. Injection port;

[0053] 62. Movable baffle;

[0054] 63. Piston. DETAILED DESCRIPTION

[0055] In order to explain the technical content, structural features, achieved objectives and effects of the technical solution in detail, the following is a detailed description in conjunction with specific embodiments and accompanying drawings.

[0056] See also Figures 1 to 8 , this embodiment provides a stirring evaporation source, including an evaporation source body 1 and a crucible 2, wherein the crucible 2 is arranged inside the evaporation source body 1, and the crucible 2 has a cavity, wherein the cavity is used to be filled with a molten or sublimated evaporation material, and the cavity is used as an evaporation place for the evaporation material. The stirring evaporation source also includes a stirring device 3 and a driving unit. The stirring device 3 includes a central axis 31, a cross bar 32, a connecting rod 33 and a stirring head 34, wherein one end of the central axis 31 is connected to the cavity, and the other end of the central axis 31 is connected to the cross bar 32, one end of the connecting rod 33 is connected to the cross bar 32, and the other end of the connecting rod 33 is connected to the stirring head 34. The driving unit is arranged on the cavity, and is used to drive the stirring device 3 to rotate to stir the evaporation material.

[0057] In the prior art, the evaporation material in the crucible is heated unevenly, which will affect the evaporation rate and the uniformity of the film layer. The above technical solution is provided with a driving unit and a stirring device in the cavity of the crucible. The driving unit drives the stirring device to rotate to fully stir the evaporation material, so that the evaporation material is heated evenly, which can avoid the probability of local agglomeration of the evaporation material, improve the stability of the plating rate, and improve the film quality.

[0058] This embodiment provides two embodiments of the stirring device 3, which are Embodiment 1 and Embodiment 2 respectively, and the two stirring devices 3 can be equipped with different driving units to achieve different heating methods.

[0059] In the first embodiment, the driving unit includes a motor 35, and the motor 35 is used as a power source for the stirring device 3. The rotating shaft of the motor 35 is connected to one end of the central shaft 31, and the motor 35 is used to drive the central shaft 31 to rotate, thereby driving the cross bar 32, the connecting rod 33 and the stirring head 34 to rotate to stir the evaporation material. Figure 1 and Figure 2 As shown. The motor 35 is such as a stepper motor, and the motor 35 can be placed at the bottom or on the side wall of the cavity. Preferably, the motor 35 is arranged at the bottom, and the central axis 31 is arranged vertically, so that the rotation direction of the central axis 31 is horizontal. Generally, the motor 35 is electrically connected to a control system and a power supply, and the staff controls the rotation of the motor 35 through the control system. After the motor 35 is powered on, it drives the central axis 31 to rotate in a clockwise or counterclockwise direction at a certain speed. Through the transmission of force, the central axis 31 drives the cross bar 32 to rotate. This is the rotation of the first part.

[0060] In embodiment one, in order to stir the evaporation material to a greater extent, a rotation of the second part is also provided. The stirring head 34 includes a rotating head motor and a rotating head, and the rotating head motor has a rotating shaft connected to the rotating head. The rotating head motor can be arranged in the end of the connection, and the rotating head is located on the outside. The rotating head can be a fan blade or a part with a spacing and protrusion, and the rotating head motor drives the rotating head to rotate to stir the evaporation material. Similarly, the rotating head motor is also electrically connected to a control system and a power supply. The present application evenly stirs the evaporation material through the rotation of the two parts to avoid the evaporation material from clumping, thereby ensuring that the evaporation material is evenly heated, which can avoid the probability of local agglomeration of the evaporation material, improve the stability of the plating rate, and improve the film quality.

[0061] In the first embodiment, a heating device is provided to match the stirring device 3. The heating device is provided in the form of a heating coil 4, which is wound around the stirring device 3 (such as the cross bar 32, the connecting rod 33 and the central axis 31). The heating coil 4 is used to heat the evaporation material after connecting to a power source. The structure is as follows: Figure 1 and Figure 2 As shown. In order to achieve electrical connection of the heating coil when the central shaft or the connecting rod rotates, a rotating electrical connector or a conductive slip ring can be used for connection at the rotating part. Preferably, the central shaft 31, the cross bar 32, the connecting rod 33 and the stirring head 34 are made of high temperature resistant materials with a small thermal expansion coefficient, such as stainless steel, Invar alloy or other materials with similar properties. When a certain alternating current is passed through the heating coil 4, the evaporated material in the crucible 2 can be heated. Since the heating device is in direct contact with the evaporated material, the heating efficiency is higher and the heat loss is avoided during the heating process.

[0062] The heating coil can be a resistance wire or the heating coil 4 generates an alternating magnetic field, and the cross bar 32 or the connecting rod 33 is a conductor. The alternating magnetic field is located at the cavity, and the stirring device 3 is located in the alternating magnetic field. The stirring device 3 is a stirring device 3 of a conductor, that is, the central axis 31, the cross bar 32 and the connecting rod 33 are placed in the alternating magnetic field. The conductor material is heated by a high-frequency alternating magnetic field, thereby converting the electrical energy in the electric field into thermal energy. Since the heat is generated inside the conductor, the dielectric heating has a fast heating speed and high thermal efficiency compared to other external heating. In addition, the evaporation material is also heated evenly, and no agglomeration occurs.

[0063] In the second embodiment, the present application designs another stirring device 3 (magnetic stirring device 3) to stir the vapor deposition material. The stirring head 34 is a magnetic stirring head 34, and the magnetic stirring head 34 is magnetic. The connecting rod 33 is rotatably connected to the cross bar 32, and the rotatable connection method is a ball hinge connection or a universal coupling connection, so that the connecting rod 33 can be rotated at any angle on the cross bar 32, and it is convenient to disassemble when damaged. The structure is as follows Figure 5 and Figure 6 As shown. The driving unit includes a magnetic substance, and the driving unit is connected to the cavity, and the magnetic substance is used to drive the magnetic stirring head 34 and the connecting rod 33 to rotate to stir the evaporated material. It should be noted that both the magnetic substance and the magnetic stirring head 34 are magnetic, so that the two can attract each other, or repel each other. In this way, when the magnetic substance moves, it can drive the magnetic stirring head 34 to move as well, thereby realizing the function of the magnetic stirring head 34 to stir the evaporated material. It should be noted that the magnetic substance is a permanent magnet with relatively stable magnetism. Of course, the magnetic substance can also be an energized coil to achieve magnetic adjustment.

[0064] In the second embodiment, the driving unit further comprises a base 36 and a motor, the motor is placed at the bottom of the cavity, the rotating shaft of the motor is connected to the bottom surface of the base 36, and the upper surface of the base 36 is provided with the magnetic material. Preferably, the rotating shaft of the motor is connected to the bottom center of the base 36. When the motor rotates, it drives the base 36 to rotate, and the magnetic material also rotates accordingly. The rotation of the base 36 also changes the position of the magnetic material, thereby pulling the magnetic rotating head and the movable connecting rod 33 to rotate in a clockwise or counterclockwise direction at a certain speed according to the characteristics of opposite magnetic attraction (same magnetic repulsion), thereby stirring the evaporation material to make it evenly heated. Preferably, the base, the motor and the magnetic material are arranged in the groove at the bottom of the crucible and separated from the crucible cavity by the side wall of the bottom of the crucible, so as to avoid the influence of the evaporation material on the operation of the motor when it is arranged in the cavity.

[0065] Or in some embodiments, the magnetic object is arranged on the base 36, and the base 36 is slidably arranged in the slide rail. When the base 36 moves in the slide rail, the position of the magnetic object also changes. According to the characteristics of opposite magnetic attraction (same magnetic repulsion), the magnetic rotating head and the movable connecting rod 33 are pulled to rotate in a clockwise or counterclockwise direction at a certain speed, thereby stirring the evaporation material so that it is evenly heated.

[0066] At the same time, the magnetic stirring device 3 is matched with a corresponding magnetic field so that the stirring device 3 is located in the magnetic field. The basic principle of the magnetic stirring device 3 is to follow the Coulomb's law of magnetism, that is, two magnets separated by a certain distance, due to the induction effect of the magnetic field, they do not need any traditional mechanical components, through the coupling force of the magnets, power can be transferred from one magnet to another magnet, forming a non-contact torque transmission mechanism, thereby achieving the purpose of stirring the material. By adjusting the intensity and direction of the bottom magnetic field, the speed and direction of rotation of the connecting rod 33 and the magnetic rotating head can be controlled. A heating temperature control system is assembled thereon, and the heating temperature control system is also connected to the control system. The heating temperature control system can heat different types of evaporation materials at different temperatures, which can also achieve the purpose of making the material heated more evenly and improving the film quality.

[0067] In the second embodiment, the heating coil 4 may also be wound around the cross bar 32 , the connecting rod 33 and the central axis 31 .

[0068] In the second embodiment, the central shaft may also be connected to the motor 35. The motor 35 may be a stepping motor, which can achieve precise alignment. When the motor drives the central shaft to rotate and then stops, the rotating head should be stopped just above the base, so that the magnetic object can drive the rotating head to rotate.

[0069] In Example 1 and Example 2, preferably, the central axis 31 is connected to the middle of the cross bar 32, so that the balance of rotation can be ensured. The two ends of the cross bar 32 are respectively connected to one end of the connecting rod 33, and the other end of the connecting rod 33 is connected to a stirring head 34. A plurality of connecting rods 33 and stirring heads 34 can improve the efficiency of stirring. The cross bar 32 and the central axis 31 can be connected by bolts and screw holes or welded as one, preferably connected by bolts and screw holes, which is convenient for disassembly when damaged. The fixed connection relationship between the connecting rod and the cross bar is also as above. In some cases, the number of the connecting rods 33 can be more, not limited to one or two, such as three, four or five or even more. Preferably, the plurality of connecting rods 33 and the plurality of rotating heads are arranged symmetrically with the central axis 31, so that the force of the cross bar 32 is balanced.

[0070] It should be noted that the central shaft 31, the crossbar 32 and the connecting rod 33 may be regular columnar (cylindrical, prism) structures. Alternatively, in some examples, the upper portion of the central shaft 31 (located in the inner cavity and used for stirring) and the crossbar 32 may be protruding structures, such as spiral structures, etc., through which the evaporation material can be stirred to a greater extent.

[0071] It should be noted that, because the cavity is an evaporation place with a relatively high temperature, the motor should not be placed directly in the cavity. A motor room is provided at the bottom of the cavity, and the motor is provided in the motor room. The motor room is a closed space, isolating the high temperature in the cavity from affecting the motor, and preventing the motor from overheating. The lower part of the central shaft 31 extends into the motor room and is connected to the motor.

[0072] It should be noted that the solution of the first embodiment can also be provided in the solution of the second embodiment. For example, the motor can still drive the central shaft to rotate, and heating coils can be provided in both embodiments.

[0073] In the first and second embodiments, the vapor of the evaporation material escapes from the top of the crucible 2 and the top of the evaporation source body 1. The top of the crucible 2 also includes a through hole 21 and an anti-clogging device. The through hole 21 is arranged at the top of the crucible 2, and the through hole 21 is connected to the cavity. The anti-clogging device is arranged at the through hole 21, and is used to clean the evaporation material blocked in the through hole 21. The evaporation source body 1 is also arranged on the top of the evaporation source body 1. After the vapor of the evaporation material escapes from the through hole 21 of the crucible 2, it escapes through the evaporation source body 1 at the top of the evaporation source body 1. Generally, a plurality of through holes 21 are arranged on the top of the crucible 2, and one evaporation source body 1 is arranged above the plurality of through holes 21. The caliber of the evaporation source body 1 should be large enough to accommodate these plurality of through holes 21.

[0074] The gas molecules of the evaporation material are easy to condense at the position of the through hole 21 and block the through hole 21. An anti-blocking device is provided at the through hole 21 to clean the evaporation material blocked in the through hole 21. The structure is as follows: Figure 4 and Figure 8 As shown. Specifically, the anti-clogging device is a vibration device 5. The vibration device 5, such as ultrasonic vibration or electromagnetic vibration, generates kinetic energy in the material molecules through high-frequency vibration, and makes them move through physical methods. Secondly, the vibration can generate a certain amount of heat energy, which is converted into temperature and transferred to the molecules of the evaporated material, so that the gas of the evaporated material will not condense due to uneven temperature when passing through the through hole 21, effectively improving the plugging phenomenon. It should be noted that there are multiple through holes 21, and the vibration device 5 is generally placed on the outside of the through hole 21, so that the evaporated material at the through hole 21 can be cleaned by high-frequency vibration.

[0075] Or in some embodiments, the anti-clogging device is a heating element, which is in the form of a heating coil 4 or an infrared heater, which heats and melts the evaporation material blocked in the through hole 21, thereby stabilizing the evaporation coating rate.

[0076] In this embodiment, in order to solve the problem that the mean free path between the evaporation material and the substrate becomes longer, resulting in an unstable evaporation coating rate, an independent filling chamber 6, a movable baffle 62 and a piston 63 are provided to replenish the corresponding evaporation material in time. The filling chamber 6 is arranged on one side of the crucible 2, and the filling chamber 6 has an injection port 61. Generally, the injection port 61 is arranged at the top of the filling chamber 6. The filling chamber 6 is connected to the cavity of the crucible, and the evaporation material can be injected into the filling chamber 6 through the injection port 61. The movable baffle 62 is arranged in the filling chamber 6 or the crucible, and is located at the connection between the filling chamber 6 and the crucible, playing the role of connecting the filling chamber 6 and the cavity. The piston 63 is arranged in the filling chamber 6 and connected to the surrounding side wall, and is located on one side of the injection port 61. When the material is gradually consumed to the point where the stability of the plating rate is affected, the baffle is opened, and the evaporation material is pressed into the crucible from the injection port 61 of the filling chamber 6 by means of the gas compression at the top of the filling chamber 6 or the piston 63 compressed by the mechanical mechanism. Figure 3 and Figure 7 When the volume of the evaporation material meets the requirements of the evaporation process, the movable baffle 62 will disconnect the filling chamber 6 and the crucible 2. Figure 4 and Figure 8 shown.

[0077] On the one hand, it can achieve the purpose of real-time compensation of the material in the crucible, so that the distance between the surface of the material in the crucible and the substrate above the evaporation source body remains unchanged, thereby ensuring the stability of the evaporation coating rate, thereby improving the film quality and device effect. On the other hand, it can extend the single feeding process time and avoid the problem of frequent cavity opening causing the cavity environment to deteriorate and affect the film quality.

[0078] In this embodiment, the movable baffle 62 is placed in the filling cavity 6, and a groove is provided on the filling cavity 6 near the cavity body, so that the movable baffle 62 can enter the groove to realize the opening and closing of the movable baffle 62. Of course, the size of the groove must be compatible with the size of the movable baffle 62 so that the evaporation material does not leak. The size of the movable baffle 62 must be larger than the size of the passage from the filling cavity 6 to the inner cavity, so that when the movable baffle 62 is closed (blocking the passage from the filling cavity 6 to the inner cavity), the filling cavity 6 and the inner cavity can form independent spaces from each other; when the movable baffle 62 is opened (the movable baffle 62 moves into the groove), the filling cavity 6 is connected to the inner cavity.

[0079] It should be noted that the heating coil 4, stirring device 3, anti-clogging device, movable baffle 62, piston 63 and other components are connected to the control system and power supply through circuits. The control system is such as a programmable logic controller (PLC), etc. The staff manages these devices or components by operating the control system.

[0080] It should be noted that, although the above embodiments have been described in this article, the patent protection scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, changes and modifications made to the embodiments described herein, or equivalent structures or equivalent process changes made using the contents of the present invention specification and drawings, directly or indirectly applying the above technical solutions to other related technical fields, are all included in the patent protection scope of the present invention.

Claims

1. A stirring evaporation source, comprising an evaporation source body and a crucible; The crucible is arranged in the evaporation source body, and the crucible includes a cavity, and the cavity is used as an evaporation place for the evaporation material; It is characterized in that Also includes a stirring device and a drive unit; The stirring device comprises a central shaft, a cross bar, a connecting rod and a stirring head, one end of the central shaft is connected to the cavity, the other end of the central shaft is connected to the cross bar, one end of the connecting rod is connected to the cross bar, and the other end of the connecting rod is connected to the stirring head; The driving unit is arranged on the cavity, and is used for driving the stirring device to rotate to stir the evaporated material.

2. A stirring evaporation source according to claim 1, characterized in that: The stirring head is a magnetic stirring head, which has magnetism, and the connecting rod is rotatably connected to the cross rod; The driving unit includes a magnetic object, the driving unit is connected to the cavity, and the magnetic object is used to drive the magnetic stirring head and the connecting rod to rotate to stir the evaporated material.

3. A stirring evaporation source according to claim 2, characterized in that: The driving unit also includes a base and a motor; The motor is placed at the bottom of the cavity, the rotating shaft of the motor is connected to the bottom surface of the base, and the upper surface of the base is provided with the magnetic object.

4. A stirring evaporation source according to claim 1, characterized in that: The driving unit comprises a motor; The rotating shaft of the motor is connected to one end of the central shaft, and the motor is used to drive the central shaft to rotate, thereby driving the cross bar, the connecting rod and the stirring head to rotate to stir the vapor deposition material.

5. A stirring evaporation source according to claim 1 or 4, characterized in that: The stirring head comprises a rotating head and a rotating head motor, and a rotating shaft of the rotating head motor is connected to the rotating head.

6. A stirring evaporation source according to claim 1, characterized in that: It also includes a heating coil, which is wound around the cross bar or the connecting rod.

7. A stirring evaporation source according to claim 6, characterized in that: The heating coil generates an alternating magnetic field, and the cross bar or the connecting rod is a conductor.

8. The stirring evaporation source according to claim 1, characterized in that: Also included are through holes and anti-clogging devices; The through hole is arranged at the top of the crucible, and the through hole is communicated with the cavity; The anti-clogging device is arranged at the through hole and is used for cleaning the evaporation material that is blocked in the through hole.

9. A stirring evaporation source according to claim 8, characterized in that: The anti-blocking device is a vibrating device.

10. The stirring evaporation source according to claim 1, characterized in that: It also includes a packing chamber, a movable baffle and a piston; The filling cavity is arranged on one side of the crucible, and the filling cavity is communicated with the cavity of the crucible; The movable baffle is arranged in the filling cavity or the crucible and is located at the connection between the filling cavity and the crucible; The filling cavity is provided with a material injection port, and the piston is arranged in the filling cavity and located at one side of the material injection port.

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