A developing nozzle

Abstract

The present invention discloses a developing nozzle, which structure includes a first fixed block. The present invention arranges an auxiliary mechanism at the lower end of the first fixed block, and cooperates with three torsion springs by bending three clamping blocks, so that the clamping blocks are opened and fixed to external components, thereby achieving the advantages of preventing the nozzle from falling and avoiding affecting work efficiency. By arranging a fixing device at the middle of the front end of the first fixed block, the threaded rod is rotated and inserted into the limiting groove, so that the spring is pushed out and the protrusion limits and fixes the fixing groove, thereby achieving the advantage of facilitating the auxiliary work of the auxiliary mechanism.

Description

Technical Field

[0001] The invention relates to a developing nozzle, belonging to the field of developing nozzles. Background Art

[0002] The developer is coated on the exposed wafer surface, and the exposed area of ​​the positive photoresist and the non-exposed area of ​​the negative photoresist are dissolved in the developer. After further washing away the reactive polymer and residual developer, the pattern in the photoresist can be revealed. With the development of semiconductor technology, the requirements for development are getting higher and higher; and a nozzle is needed to evenly spray the developer on the wafer.

[0003] The existing developing nozzle is usually fixed to the external developing machine by threads, and after a long time, water stains are likely to corrode the threads, resulting in poor fixing effect, which can easily cause the nozzle to fall off, thereby affecting work efficiency. Summary of the invention

[0004] In view of the problem that the existing developing nozzle is usually fixed to the external developing machine by a thread, and after a long time, water stains are likely to corrode the thread, resulting in poor fixing effect, which easily causes the nozzle to fall off, thereby affecting work efficiency.

[0005] In order to achieve the above-mentioned purpose, the present invention is implemented through the following technical scheme: a developing nozzle, including a first fixed block, an auxiliary mechanism and a fixing device, the middle part of the upper end of the first fixed block is fixed to the limiting shell, the middle part of the upper end of the limiting shell is provided with a nozzle, a limiting ring is provided on the lower surface of the limiting shell, the lower unit of the limiting shell is fixed to a fixing rod as a whole, the lower end surface of the fixing rod is provided with a thread, the upper end of the auxiliary mechanism is tightly fitted with the first fixed block, and the lower end of the fixing device is through-connected with the first fixed block.

[0006] Furthermore, the auxiliary mechanism includes a limit plate, a limit groove, a second fixed block, a first clamp block, a first torsion spring, a second clamp block, a second torsion spring, a third clamp block and a third torsion spring. A limit groove is provided at the upper end of the rear side of the limit plate, the lower right end of the limit plate is fixed to the second fixed block, the left and right sides of the second fixed block are rotatably connected to the first clamp block, the left end of the rear side of the first clamp block is fixed to the first torsion spring, the left end of the first torsion spring is fixed to the second clamp block as a whole, the left side of the rear end of the second clamp block is fixed to the second torsion spring by welding, the rear end of the second torsion spring is fixed to the third clamp block as a whole, the right end of the front side of the third clamp block is fixed to the third torsion spring, and the upper end of the limit plate is tightly fitted with the first fixed block.

[0007] Furthermore, the fixing device includes a third fixing block, a groove, a threaded rod and a limiting device. A groove is opened in the middle of the upper end of the third fixing block, the lower end of the third fixing block is fixed as a whole with the threaded rod, a limiting device is arranged on the side of the lower end of the threaded rod, and the lower end of the threaded rod is through-connected with the first fixing block.

[0008] Furthermore, the limiting device includes a shell, a spring, a limiting block and a protrusion, the inner bottom of the shell is fixed to the spring by welding, the upper end of the spring is fixed to the limiting block, the upper end of the limiting block is fixed to the protrusion as a whole, and the lower end of the protrusion is tightly fitted with the limiting groove.

[0009] Furthermore, there are two limiting grooves in total, and a fixing groove having the same shape as the semicircular arc of the protrusion is opened in the middle of the limiting groove.

[0010] Furthermore, the maximum extendable length of the first torsion spring is 3 cm, and the traction force set by the first torsion spring is 10N.

[0011] Furthermore, three second fixing blocks are provided in total, and the second fixing blocks are evenly distributed at the lower end of the limiting plate in a circular array along the center of the limiting plate.

[0012] Furthermore, the length of the threaded rod is set to 5 cm, and the thread pitch on the surface of the threaded rod is set to 1 mm.

[0013] Furthermore, the protrusion is semicircular, and the upper end of the protrusion is connected to the threaded rod, and the protrusion is symmetrically distributed along the transverse center axis of the threaded rod.

[0014] Furthermore, the first clamping block is made of aluminum alloy.

[0015] Furthermore, the shell is made of stainless steel.

[0016] Advantage 1: A developing nozzle of the present invention has an auxiliary mechanism arranged at the lower end of the first fixed block. The auxiliary mechanism can cooperate with three torsion springs by bending three clamping blocks, so that the clamping blocks are opened and fixed to external parts (such as the nozzle part of the developing machine), thereby achieving the advantage of preventing the nozzle from falling and avoiding affecting work efficiency.

[0017] Advantage 2: A developing nozzle of the present invention sets a fixing device at the middle of the front end of the first fixing block, and rotates the threaded rod to insert it into the limiting groove, so that the spring is pushed out to allow the protrusion to limit and fix the fixing groove, thereby achieving the advantage of facilitating the auxiliary work of the auxiliary mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0019] Figure 1 It is a structural schematic diagram of the present invention;

[0020] Figure 2 It is a schematic diagram of the explosion structure of the present invention;

[0021] Figure 3 It is a schematic diagram of the auxiliary mechanism structure of the present invention;

[0022] Figure 4 It is a schematic diagram of the structure of the fixing device of the present invention;

[0023] Figure 5 It is a schematic diagram of the structure of the limiting device of the present invention.

[0024] In the figure: the first fixed block -1, the auxiliary mechanism -2, the fixing device -3, the limiting shell -4, the nozzle -5, the limiting ring -6, the fixing rod -7, the thread -8, the limiting plate -21, the limiting groove -22, the second fixed block -23, the first clamping block -24, the first torsion spring -25, the second clamping block -26, the second torsion spring -27, the third clamping block -28, the third torsion spring -29, the third fixed block -31, the groove -32, the threaded rod -33, the limiting device -34, the shell -341, the spring -342, the limiting block -343, the protrusion -344. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0026] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The present invention provides a developing nozzle: comprising a first fixed block 1, an auxiliary mechanism 2 and a fixing device 3. The middle part of the upper end of the first fixed block 1 is fixed to a limiting shell 4, and a nozzle 5 is opened in the middle part of the upper end of the limiting shell 4. A limiting ring 6 is arranged on the lower surface of the limiting shell 4. The lower part of the limiting shell 4 is fixed to a fixing rod 7 as a whole, and a thread 8 is arranged on the lower end surface of the fixing rod 7. The upper end of the auxiliary mechanism 2 is tightly fitted with the first fixed block 1, and the lower end of the fixing device 3 is connected with the first fixed block 1, and the auxiliary mechanism 2 is used to be fixed with an external component to prevent the developing nozzle from falling.

[0027] The auxiliary mechanism 2 includes a limit plate 21, a limit groove 22, a second fixed block 23, a first clamp 24, a first torsion spring 25, a second clamp 26, a second torsion spring 27, a third clamp 28 and a third torsion spring 29. The limit groove 22 is provided at the upper end of the rear side of the limit plate 21. The lower right end of the limit plate 21 is fixed to the second fixed block 23. The left and right sides of the second fixed block 23 are rotatably connected to the first clamp 24, so that the first clamp 24 can work better. The left end of the rear side of the first clamp 24 is fixed to the first torsion spring 25, so that the first clamp 24 can work better. The left end of the first torsion spring 25 is fixed to the second clamp 26 as a whole. The left side of the rear end of the second clamp 26 is fixed to the second torsion spring 27 by welding, so that the second clamp 26 can work better. The rear end of the second torsion spring 27 is fixed to the third clamp 28 as a whole. The right end of the front side of the third clamp 28 is fixed to the third torsion spring 29. The upper end of the limiting plate 21 is tightly fitted to the first fixing block 1 .

[0028] The side surfaces of the first clamping block 24 , the second clamping block 26 and the third clamping block 28 are bent, similar to an S-shape, so as to achieve corresponding clamping effects.

[0029] The fixing device 3 includes a third fixing block 31, a groove 32, a threaded rod 33 and a limiting device 34. A groove 32 is provided in the middle of the upper end of the third fixing block 31, and the lower end of the third fixing block 31 is fixed to the threaded rod 33 as a whole. A limiting device 34 is provided on the side of the lower end of the threaded rod 33, and the lower end of the threaded rod 33 is connected to the first fixing block 1. The setting of the groove 32 facilitates the user to perform auxiliary work.

[0030] The limiting device 34 includes a housing 341, a spring 342, a limiting block 343 and a protrusion 344. The inner bottom of the housing 341 and the spring 342 can be fixed by welding. The upper end of the spring 342 is fixed to the limiting block 343, and the upper end of the limiting block 343 is fixed to the protrusion 344 as a whole. The lower end of the protrusion 344 is tightly fitted with the limiting groove 22. The spring 342 facilitates the protrusion 344 to work.

[0031] There are two limit grooves 22 in total, and a fixing groove (not marked) having the same semicircular arc as the protrusion 344 is opened in the middle of the limit groove 22 to facilitate better cooperation with the fixing device 3.

[0032] The maximum extendable length of the first torsion spring 25 is 3 cm, and the traction force set by the first torsion spring 25 is 10 N, which is convenient for driving the three clamping blocks to work.

[0033] There are three second fixing blocks 23 in total, and the second fixing blocks 23 are evenly distributed at the lower end of the limiting plate 21 in a circular array along the center of the limiting plate 21, so as to facilitate the three clamping blocks (the first clamping block 24, the second clamping block 26 and the third clamping block 28) to work.

[0034] The length of the threaded rod 33 is 5 cm, and the thread pitch on the surface of the threaded rod 33 is 1 mm, so that the threaded rod 33 can work better.

[0035] The protrusion 344 is semicircular, and the upper end of the protrusion 344 is connected to the threaded rod 33, and the protrusion 344 is symmetrically distributed along the transverse center axis of the threaded rod 33, so that the protrusion 344 can work better.

[0036] The first clamping block 24 is made of aluminum alloy, which enhances the hardness of the first clamping block 24 .

[0037] The shell 341 is made of stainless steel to avoid rust and increase the service life of the shell 341.

[0038] The spring 342 described in this patent is a mechanical part that uses elasticity to work. The part made of elastic material deforms under the action of external force and returns to its original shape after the external force is removed. It is also called a "spring" and is generally made of spring steel. The types of springs are complex and varied. According to their shapes, they mainly include coil springs, scroll springs, leaf springs, special-shaped springs, etc.

[0039] Here’s how it works:

[0040] First, the external screwdriver can be inserted into the groove 32 first, and then rotated clockwise, so that the threaded rod 33 is inserted into the limiting groove 22, and when the threaded rod 33 is inserted into the limiting groove 22, the spring 342 provided inside the shell 341 begins to compress, so that the protrusion 344 is compressed to the inside of the shell 341, and when the threaded rod 33 is inserted into the fixing groove provided in the limiting groove 22, the spring 342 is pushed out, so that the protrusion 344 is fixed to the fixing groove;

[0041] Second: the thread 8 provided at the lower end of the fixing rod 7 is then fixed to the external part (tube mouth) of the developing machine. In this process, the user can pull the first clamping block 24, the second clamping block 26 and the third clamping block 28 to cooperate with the first torsion spring 25, the second torsion spring 27 and the third torsion spring 29. When the user lets go, the three clamping blocks limit and fix the developing machine.

[0042] Third: when the developer is working, the developer will be sprayed out from the nozzle 5 in the middle of the limiting shell 4, and the limiting ring 6 can play a good limiting and fixing effect, and the limiting shell 4 can well prevent the developer from the nozzle 5 from splashing around.

[0043] Although this specification is described according to implementation modes, not every implementation mode includes only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A developing nozzle, comprising a first fixed block (1), wherein the middle of the upper end of the first fixed block (1) is fixed to a limiting shell (4), a nozzle (5) is provided in the middle of the upper end of the limiting shell (4), a limiting ring (6) is provided on the lower side surface of the limiting shell (4), the lower end of the limiting shell (4) is fixed to a fixing rod (7) as a whole, and a thread (8) is provided on the lower end surface of the fixing rod (7); Features: It also comprises an auxiliary mechanism (2) and a fixing device (3), wherein the upper end of the auxiliary mechanism (2) is tightly fitted with the first fixing block (1), and the lower end of the fixing device (3) is connected to the first fixing block (1), and the auxiliary mechanism is used to fix with an external component to prevent the developing nozzle from falling off; The auxiliary mechanism (2) comprises a limit plate (21), a limit groove (22), a second fixed block (23), a first clamping block (24), a first torsion spring (25), a second clamping block (26), a second torsion spring (27), a third clamping block (28) and a third torsion spring (29); the limit groove (22) is provided at the upper end of the rear side of the limit plate (21); the lower right end of the limit plate (21) is fixed to the second fixed block (23); the left and right sides of the second fixed block (23) are rotatably connected to the first clamping block (24); The left end of the rear side of the first clamping block (24) is fixed to the first torsion spring (25), the left end of the first torsion spring (25) is fixed to the second clamping block (26) as a whole, the left side of the rear end of the second clamping block (26) is fixed to the second torsion spring (27) by welding, the rear end of the second torsion spring (27) is fixed to the third clamping block (28) as a whole, the right end of the front side of the third clamping block (28) is fixed to the third torsion spring (29), and the upper end of the limiting plate (21) is tightly fitted with the first fixing block (1); The fixing device (3) comprises a third fixing block (31), a groove (32), a threaded rod (33) and a limiting device (34); the groove (32) is provided in the middle of the upper end of the third fixing block (31); the lower end of the third fixing block (31) is fixed to the threaded rod (33) as a whole; the side surface of the lower end of the threaded rod (33) is provided with the limiting device (34); the lower end of the threaded rod (33) is connected to the first fixing block (1); The limiting device (34) comprises a housing (341), a spring (342), a limiting block (343) and a protrusion (344); the inner bottom of the housing (341) is fixed to the spring (342) by welding; the upper end of the spring (342) is fixed to the limiting block (343); the upper end of the limiting block (343) is fixed to the protrusion (344) as a whole; and the lower end of the protrusion (344) is tightly fitted to the limiting groove (22); There are two limit grooves (22) in total, and a fixing groove having the same semicircular arc as the protrusion (344) is provided in the middle of the limit groove (22).

2. A developing nozzle according to claim 1, Features: The maximum extendable length of the first torsion spring (25) is 3 cm, and the traction force set by the first torsion spring (25) is 10N.

3. A developing nozzle according to claim 1, Features: A total of three second fixing blocks (23) are provided, and the second fixing blocks (23) are distributed equidistantly at the lower end of the limiting plate (21) in a circular array along the center of the limiting plate (21).

4. A developing nozzle according to claim 3, Features: The length of the threaded rod (33) is 5 cm, and the thread pitch on the surface of the threaded rod (33) is 1 mm.

5. A developing nozzle according to claim 4, Features: The protrusion (344) is semicircular, and the upper end of the protrusion (344) is connected to the threaded rod (33).

6. A developing nozzle according to claim 5, Features: The protrusions (344) are symmetrically distributed along the transverse center axis of the threaded rod (33).

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