A contactless fully automatic cleaning device based on carbon dioxide

Abstract

The present invention discloses a contactless full-automatic cleaning device based on carbon dioxide, which belongs to the field of cleaning equipment, and includes a support body, a tray separation mechanism, a transfer flow channel, a first grabbing device, a second grabbing device, a detection mechanism, a cleaning mechanism, a material taking device and a removal mechanism; the tray separation mechanism is installed on the support body, and the transfer flow channel is installed on the outside of the tray separation mechanism; the first grabbing device is installed between the tray separation mechanism and the transfer flow channel, and is used to grab the material on the tray separation mechanism to the transfer flow channel for loading or grab the material on the transfer flow channel to the tray separation mechanism for unloading; the detection mechanism and are installed at the center position above the support body. The full-automatic cleaning device can effectively clean small products without contact, effectively avoiding damage to the product caused by manual contact cleaning, while improving the efficiency of product cleaning and reducing the manpower input of product cleaning.

Description

Technical Field

[0001] The invention belongs to the technical field of cleaning equipment, and in particular relates to a contactless full-automatic cleaning equipment based on carbon dioxide. Background Art

[0002] At present, the pollution problems of small products such as lenses and semiconductor components, such as tiny particles and residual glue, are generally removed by manual scrubbing with alcohol. However, cleaning media and manual contact cleaning can cause product damage, and the cleaning efficiency is low. When the number of products is large, the labor demand rises sharply, affecting the cost of material cleaning.

[0003] Therefore, a contactless, high-efficiency, fully automatic cleaning device is provided to replace manual work, thereby improving the efficiency and safety of cleaning small products. Summary of the invention

[0004] The purpose of the present invention is to provide a contactless fully automatic cleaning device based on carbon dioxide to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A contactless and fully automatic cleaning device based on carbon dioxide, comprising a support body, a disc separation mechanism, a transfer channel, a first grasping device, a second grasping device, a detection mechanism, a cleaning mechanism, a material taking device and a removal mechanism;

[0007] The tray separation mechanism is installed on the support body, and the transfer channel is installed on the outside of the tray separation mechanism;

[0008] The first grabbing device is installed between the tray separation mechanism and the transfer channel, and is used to grab the material on the tray separation mechanism and place it on the transfer channel for loading, or grab the material on the transfer channel and place it on the tray separation mechanism for unloading;

[0009] The detection mechanism is installed at the center position above the support body, and the second grabbing device is installed between the detection mechanism and the transfer channel, and is used to place the material on the transfer channel onto the detection mechanism for appearance inspection;

[0010] The cleaning mechanism is installed on one side of the detection mechanism, and is used to receive materials that fail the appearance detection and perform cleaning treatment by blowing air;

[0011] The material taking device is installed between the detection mechanism and the cleaning mechanism, and is used to grab the material that fails the detection and put it into the cleaning mechanism for cleaning;

[0012] The removal mechanism is installed above the detection mechanism and is used to remove products that fail the detection after repeated cleaning.

[0013] Preferably, two of the disc dividing mechanisms and the transfer channels are provided, the two disc dividing mechanisms are symmetrically installed at both ends of the support body, and the two transfer channels are symmetrically installed on the outsides of the two disc dividing mechanisms.

[0014] Preferably, the tray dividing mechanism includes a first support frame fixedly mounted on the support body, a feeding frame fixedly mounted above the first support frame for dividing materials, a material rack located above the feeding frame, a first slide cylinder fixedly mounted on the material rack for pushing materials, a support bar located inside the material rack for supporting materials, and a lifting mechanism located below the first support frame for adjusting the support bar up and down;

[0015] The feeding frame includes a first fixed frame, first rollers are rotatably mounted inside both ends of the first fixed frame, a first conveyor belt for conveying materials is arranged between two first rollers located on the same side of both ends of the first fixed frame, a first servo motor is fixedly mounted below one end of the first fixed frame, and an output shaft of the first servo motor is connected to the first roller at one end of the first conveyor belt through a first transmission belt;

[0016] A first support rod for supporting the first conveyor belt is fixedly mounted on the inner wall of the first fixed frame;

[0017] The lifting mechanism comprises a positioning plate fixedly mounted below the first support frame, a lifting motor fixedly mounted on the bottom surface of the positioning plate, a lead screw penetrating the positioning plate and fixedly connected to the output shaft of the lifting motor, a lifting plate located between the positioning plate and the first support frame and threadedly connected to the lead screw, a connecting column fixedly mounted on the lifting plate penetrating the bottom surface of the first support frame and fixedly connected to the support bar, and the connecting column is slidably connected to the first support frame.

[0018] Preferably, the transfer channel includes a second fixing frame fixedly mounted on the support body, second rollers are rotatably mounted inside both ends of the second fixing frame, a second conveyor belt for conveying materials is arranged between two second rollers located on the same side inside both ends of the second fixing frame, a second servo motor is fixedly mounted below the second fixing frame, and an output shaft of the second servo motor is connected to the second roller at one end of the second conveyor belt through a second transmission belt;

[0019] A second support rod for supporting the second conveyor belt is fixedly mounted on the inner wall of the second fixing frame.

[0020] Preferably, the first grasping device comprises a second support frame fixedly mounted on the support body, a translation mechanism fixedly mounted on the top of the second support frame, a first cylinder mounted on the translation mechanism, and a grasping mechanism fixedly mounted on the piston rod of the first cylinder;

[0021] The translation mechanism includes a translation cross frame fixed on the top of the second support frame, a threaded rod rotatably mounted on the translation cross frame, a movable block threadedly sleeved on the threaded rod, a connecting plate fixedly mounted on a side of the movable block away from the translation cross frame, and a third servo motor fixedly mounted at one end of the translation cross frame for driving the threaded rod;

[0022] The first cylinder is fixedly mounted on a side of the connecting plate away from the movable block;

[0023] The grabbing mechanism includes a support plate fixedly connected to the piston rod of the first cylinder, a second slide cylinder symmetrically installed at both ends of the support plate, and a gripper fixedly installed on the slide of the second slide cylinder for grabbing materials.

[0024] Preferably, the detection mechanism includes a camera, a hanging plate for hanging the camera at the center position above the support body, a placement plate located at the center position above the support body, and a first translation module fixedly installed on the upper surface of the support body for driving the placement plate to move;

[0025] The lens end of the camera is downward and is used to collect images of materials on the placement board and transmit the collected image information to the control end. A communication socket connected to the control end is fixedly installed on the camera.

[0026] Preferably, the cleaning mechanism comprises a fixing frame fixedly mounted on the inner sides of the two feeding frames, a third slide cylinder fixedly mounted on the upper surface of the fixing frame, a second cylinder fixedly mounted on the slide of the third slide cylinder, a cleaning base fixedly mounted above the fixing frame, and a tray fixedly mounted on the piston rod of the second cylinder for holding materials and closing the mold with the cleaning base to form a closed cleaning space;

[0027] The cleaning base is provided with at least two spray guns connected with the enclosed cleaning space, and the spray guns are provided with a fluid meter for detecting gas flow;

[0028] A guide body connected to the cleaning space and used for gas discharge is fixedly installed on the top surface of the cleaning base. The top end of the guide body is covered with an exhaust plate connected to an exhaust device, and the exhaust plate is provided with holes for gas circulation.

[0029] Preferably, the material taking device comprises a first mounting plate fixedly mounted between the detection mechanism and the cleaning mechanism, a screw rotatably mounted on a side of the first mounting plate close to the cleaning mechanism, and a guide rail fixedly mounted on the first mounting plate and parallel to the screw;

[0030] A moving block is threadedly connected to the screw rod, a sliding block is slidably connected to the guide rail, and a fixing plate is fixedly installed between the moving block and the sliding block;

[0031] The fixed plate is fixedly provided with a first material taking head for placing the material on the placing plate into the tray or placing the material in the tray onto the placing plate.

[0032] Preferably, the removal mechanism comprises a second mounting plate fixedly mounted between the detection mechanism and the cleaning mechanism, a second translation module fixedly mounted on the second mounting plate, and a fourth slide cylinder fixedly mounted on the translation plate of the second translation module;

[0033] A temporary storage platform for storing materials is fixedly installed on one side of the second mounting plate corresponding to the fourth slide cylinder, the slide of the fourth slide cylinder is downward, and a second material picking head is fixedly installed on the slide of the fourth slide cylinder for placing unqualified materials on the placement plate that have been repeatedly cleaned and tested onto the temporary storage platform.

[0034] Preferably, at least one guide rod for guiding the lifting plate is provided between the positioning plate and the first support frame, and the guide rod is located on the outside of the lead screw.

[0035] This fully automatic cleaning equipment can effectively clean small products without any contact, effectively avoiding damage to the products caused by manual contact cleaning, while improving the efficiency of product cleaning and reducing the manpower investment in product cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a structural schematic diagram of a carbon dioxide-based contactless fully automatic cleaning device;

[0037] Figure 2 It is a structural schematic diagram of a disc separation mechanism in a carbon dioxide-based contactless fully automatic cleaning device;

[0038] Figure 3 It is a schematic diagram of the structure of a transfer channel in a carbon dioxide-based contactless fully automatic cleaning device;

[0039] Figure 4 It is a structural schematic diagram of a first gripping mechanism in a carbon dioxide-based contactless fully automatic cleaning device;

[0040] Figure 5 It is a structural schematic diagram of a detection and cleaning component in a carbon dioxide-based contactless fully automatic cleaning device;

[0041] Figure 6 It is a structural schematic diagram of a camera based on a detection mechanism in a carbon dioxide contactless fully automatic cleaning device;

[0042] Figure 7 It is a schematic diagram of the structure of a cleaning component in a cleaning mechanism in a carbon dioxide-based contactless fully automatic cleaning device;

[0043] Figure 8 It is a structural schematic diagram of a material taking mechanism in a carbon dioxide-based contactless fully automatic cleaning device;

[0044] Fig. 9 It is a structural schematic diagram of a removal mechanism in a carbon dioxide-based contactless fully automatic cleaning device. DETAILED DESCRIPTION

[0045] The present invention will be further described below in conjunction with the embodiments.

[0046] The following examples are used to illustrate the present invention, but they cannot be used to limit the scope of protection of the present invention. The conditions in the examples can be further adjusted according to specific conditions. Simple improvements to the method of the present invention under the premise of the concept of the present invention belong to the scope of protection claimed in the present invention.

[0047] like Figure 1-9 As shown, the present invention provides a contactless fully automatic cleaning device based on carbon dioxide, comprising a support body 1, a disc separation mechanism 2, a transfer channel 3, a first grasping device 4, a second grasping device 5, a detection mechanism 6, a cleaning mechanism 7, a material taking device 8 and a removal mechanism 9;

[0048] The tray separation mechanism 2 is installed on the support body 1, and the transfer channel 3 is installed on the outer side of the tray separation mechanism 2;

[0049] The first grabbing device 4 is installed between the tray separation mechanism 2 and the transfer channel 3, and is used to grab the material on the tray separation mechanism 2 and put it on the transfer channel 3 for loading, or grab the material on the transfer channel 3 and put it on the tray separation mechanism 2 for unloading;

[0050] The detection mechanism 6 is installed at the center position above the support body 1, and the second grabbing device 5 is installed between the detection mechanism 6 and the transfer channel 3, and is used to place the material on the transfer channel 3 onto the detection mechanism 6 for appearance inspection;

[0051] The cleaning mechanism 7 is installed on one side of the detection mechanism 6, and is used to receive materials that fail the appearance detection and clean them by blowing air;

[0052] The material taking device 8 is installed between the detection mechanism 6 and the cleaning mechanism 7, and is used to grab the material that fails the detection and put it into the cleaning mechanism 7 for cleaning;

[0053] The removal mechanism 9 is installed above the detection mechanism 6 and is used to remove products that fail the detection after repeated cleaning.

[0054] During use, the staff will place the material on the dividing plate mechanism 2, grab the material to the running channel 3 through the first material grabbing device 4, and run the material to the middle position of the transfer channel 3 through the running channel 3, and then the second grabbing device 5 grabs the material to the detection mechanism 6 for appearance inspection. When it is detected that there are foreign matters or stains on the product, the detection mechanism 6 pushes the material to the bottom of the material taking device 8, and the material taking device 8 grabs the product with foreign matters and stains on the surface into the cleaning mechanism 7, and the cleaning mechanism 7 cleans the surface of the product; after the product is cleaned, the material taking device 8 grabs the product to the detection mechanism 6 again, and the detection mechanism 6 performs appearance inspection again. When foreign matters and stains are still found in the inspection, the product is grabbed to the cleaning mechanism 7 for cleaning treatment again. After the cleaning treatment, the appearance inspection is performed again. If there are still foreign matters and stains on the surface of the product, the removal mechanism 9 removes the product to complete the cleaning, inspection and grading of the product.

[0055] Further, such as Figure 1 As shown, two of the tray-dividing mechanisms 2 and the transfer channels 3 are provided, the two tray-dividing mechanisms 2 are symmetrically installed at the two ends of the support body 1, and the two transfer channels 3 are symmetrically installed on the outside of the two tray-dividing mechanisms 2;

[0056] When cleaning products, two sets of conveying mechanisms can be composed of two sets of tray separation mechanisms 2, transfer mechanisms 3, first grabbing mechanisms 4 and second grabbing mechanisms 5. When there is material on one of the conveying mechanisms, the other conveying mechanism will work, effectively ensuring the efficiency of product cleaning.

[0057] Furthermore, Figure 1 and Figure 2 As shown, the tray separation mechanism 2 includes a first support frame 21 fixedly mounted on the support body 1, a feeding frame 22 fixedly mounted above the first support frame 21 for material separation, a material frame 23 located above the feeding frame 22, a first slide cylinder 24 fixedly mounted on the material frame 23 for pushing materials, a support bar 26 located inside the material frame 23 for supporting materials, and a lifting mechanism 25 located below the first support frame 21 for adjusting the support bar 26 up and down;

[0058] When loading, the staff puts the material tray filled with products on the material rack 23 to support the material tray, and then starts the lifting mechanism 25. When the lifting structure 25 drives the support bar 26 to contact the material tray, the first slide cylinder 24 is controlled to release the material tray, and then the material tray is moved downward to the middle position of the feeding rack 22 through the lifting mechanism 25, and the material is transported to the end position of the feeding rack 23 through the feeding rack 22 for separation on both sides.

[0059] Here, it is worth mentioning that the feeding rack 22 is a bidirectional feeding device.

[0060] Further, if Figure 2 As shown, the feeding frame 22 includes a first fixed frame 221, and first rollers 222 are rotatably installed inside both ends of the first fixed frame 221. A first conveyor belt 223 for conveying materials is arranged between the two first rollers 222 located on the same side of the two ends of the first fixed frame 221. A first servo motor 224 is fixedly installed below one end of the first fixed frame 221, and the output shaft of the first servo motor 224 is connected to the first roller 222 at one end of the first conveyor belt 223 through a first transmission belt 225.

[0061] When the lifting mechanism 25 moves the support bar 26 downward until the material tray contacts the first conveyor belt 223, when there is product unloading material at one end of the first conveyor belt 223, the first servo motor 224 is relatively reversed to transport the material at one end of the first conveyor belt 223 to the middle position of the first conveyor belt 223, and move the newly loaded product to the other end of the first conveyor belt 223, and the first grabbing device 4 corresponding to this end grabs the material to the transfer channel 3 on this side for loading; and after the unloading product reaches the middle position of the first conveyor belt 223, the lifting mechanism 25 lifts the material to the material rack 23, and the unloading work is carried out manually.

[0062] In order to improve the stability of the feeding frame 22 structure, a first support rod 226 for supporting the first conveyor belt 223 is fixedly installed on the inner wall of the first fixed frame 221;

[0063] By arranging a first support rod 226 between two first rollers 222 on the inner wall of the same side of the first fixed frame 221, the first support rod 226 supports the feeding surface of the first conveyor belt 223, thereby improving the feeding stability of the first conveyor belt 223 and preventing the first conveyor belt 223 from affecting product loading due to relaxation.

[0064] Here, it should be noted that the first servo motor 224 is a forward and reverse motor, which is used to drive the first conveyor belt 223 to convey materials back and forth, thereby realizing the functions of side loading and unloading.

[0065] Further, if Figure 2As shown, the lifting mechanism 25 is fixedly mounted on a positioning plate 251 below the first support frame 21, a lifting motor 252 is fixedly mounted on the bottom surface of the positioning plate 251, a lead screw that passes through the positioning plate 251 and is fixedly connected to the output shaft of the lifting motor 252, and a lifting plate 253 that is located between the positioning plate 251 and the first support frame 21 and is threadedly connected to the lead screw, and a connecting column that passes through the bottom surface of the first support frame 21 and is fixedly connected to the support bar 26 is fixedly mounted on the lifting plate 253, and the connecting column is slidably connected to the first support frame 21;

[0066] The lifting motor 252 is fixed to the bottom of the first support frame 21 through the positioning plate 251, and a lifting plate 253 is arranged between the first support frame 21 and the positioning plate 251. The lifting motor 252 drives the lead screw to rotate, and the lead screw drives the lifting plate 253 to move between the positioning plate 251 and the first support frame 21, thereby driving the support bar 26 installed on the lifting plate 253 by the connecting column to move up and down, thereby realizing the lifting or lowering of the material.

[0067] Among them, in order to ensure that the lifting plate 253 can move vertically up and down, at least one guide rod 254 for guiding the lifting plate 253 is arranged between the positioning plate 251 and the first support frame 21, and the guide rod 254 is located on the outside of the lead screw; through the simultaneous action of the guide rod 254 and the lead screw, the lifting plate 253 is lifted upward under the joint action of the thread on the lead screw and the thread in the hole through which the lifting plate 253 passes, and by setting the guide rod 254, it is possible to effectively avoid the lifting plate 253 from rotating when the lead screw rotates, thereby ensuring that the lifting plate 253 can stably move up and down.

[0068] Here, it should be noted that the lifting motor 252 is a forward and reverse motor, which is used to cooperate with the lead screw and the lifting plate 253 to drive the lifting plate 253 to move up and down.

[0069] Further, such as Figure 1 , Figure 3 and Figure 5 As shown, the transfer channel 3 includes a second fixed frame 31 fixedly mounted on the support body 1, and second rollers 32 are rotatably mounted inside both ends of the second fixed frame 31. A second conveyor belt 33 for conveying materials is arranged between the two second rollers 32 located on the same side of the two ends of the second fixed frame 31, and a second servo motor is fixedly mounted below the second fixed frame 31. The output shaft of the second servo motor is connected to the second roller 32 at one end of the second conveyor belt 33 through a second transmission belt.

[0070] When feeding, the running channel 3 cooperates with the feeding rack 22. When the material runs to one end of the second conveyor belt 33, the second servo motor is started to transport the material at this end to the middle position of the second conveyor belt 33. The second grabbing device 5 grabs the material to the detection mechanism 6 for appearance inspection, and the inspected material is transported from the middle position of the second conveyor belt 33 to the other end for unloading.

[0071] Furthermore, in order to improve the stability of the second conveyor belt 33 in transporting materials, a second support rod 34 for supporting the second conveyor belt 33 is fixedly installed on the inner wall of the second fixed frame 31 .

[0072] Further, such as Figure 1 and Figure 4 As shown, the first grasping device 4 includes a second support frame 41 fixedly mounted on the support body 1, a translation mechanism 43 fixedly mounted on the top of the second support frame 41, a first cylinder 44 mounted on the translation mechanism 43, and a grasping mechanism 42 fixedly mounted on the piston rod of the first cylinder 44;

[0073] When grabbing materials, the first cylinder 44 and the grabbing mechanism 42 are driven by the translation mechanism 43 to move to the top of the material tray, and then the grabbing mechanism 42 is driven by the first cylinder 44 to move downward, and the grabbing mechanism 42 grabs the material tray, and then the material tray is driven by the translation mechanism 43 to move, and the material tray is placed from the first conveyor belt 223 to the second conveyor belt 33 or the material tray is placed from the second conveyor belt 33 to the first conveyor belt 223, thereby completing the loading or unloading of the product.

[0074] Furthermore, Figure 4 As shown, the translation mechanism 43 includes a translation cross frame 431 fixed on the top of the second support frame 41, a threaded rod 432 rotatably mounted on the translation cross frame 431, a movable block 433 threadedly sleeved on the threaded rod 432, a connecting plate 434 fixedly mounted on a side of the movable block 433 away from the translation cross frame 431, and a third servo motor fixedly mounted at one end of the translation cross frame 431 for driving the threaded rod 432;

[0075] During translation, the threaded rod 432 is driven to rotate by the third servo motor, so that the movable block 433 cooperates with the threads on the threaded rod 432 and the threads in the through-holes of the threaded rod 432 passing through the movable block 433 to drive the movable block 433 to move on the translation cross frame 431, thereby driving the first cylinder 44 and the grasping mechanism 42 to translate on the translation cross frame.

[0076] The first cylinder 44 is fixedly mounted on a side of the connecting plate 434 away from the movable block 433;

[0077] When the grabbing mechanism 42 translates to above the material tray, the piston rod of the first cylinder 44 is controlled to extend from the cylinder body so that the grabbing mechanism 42 approaches the material tray. When the grabbing mechanism 42 reaches the position of the material tray, the grabbing mechanism 42 is started to clamp the material tray. Then, the piston rod of the first cylinder 44 is controlled to retract into the cylinder body so that the material tray is separated from the first conveyor belt 233 or the second conveyor belt 33. The translation mechanism 43 then moves the material to above the position where the material needs to be placed. Then, the first cylinder 44 is controlled so that the piston rod of the first cylinder 44 extends, driving the material tray to descend and contact the placement point. The grabbing mechanism 42 is controlled to release the material tray to complete the loading or unloading work.

[0078] Further, if Figure 4 As shown, the grabbing mechanism 42 includes a support plate 421 fixedly connected to the piston rod of the first cylinder 44, a second slide cylinder 422 symmetrically mounted at both ends of the support plate 421, and a gripper fixedly mounted on the slide of the second slide cylinder 422 for grabbing materials;

[0079] When grabbing the material, the second slide cylinder 422 is controlled to start, so that the slides of the two second slide cylinders 422 are close to each other, and the material tray is clamped, thereby completing the material grabbing work; when releasing, the second slide cylinder 422 is controlled, so that the slides of the two second slide cylinders 422 are away from each other, thereby releasing the material tray.

[0080] Further, such as Figure 1 , Figure 5 and Figure 6 As shown, the detection mechanism 6 includes a camera 62, a hanging plate 61 for hanging the camera at the center position above the support body 1, a placement plate 64 located at the center position above the support body 1, and a first translation module 65 fixedly installed on the upper surface of the support body 1 for driving the placement plate 64 to move;

[0081] The camera 62 has a lens end facing downwards and is used to collect images of materials on the placement plate 64 and transmit the collected image information to the control end. A communication socket 63 connected to the control end is fixedly installed on the camera 62;

[0082] After the second grabbing device 5 grabs the material tray and places it on the placement plate 64, the control end controls the camera 62 to start shooting the products on the material tray and transmits the captured information back to the control end, and the control end compares and finds out the products that need to be cleaned; when there are products on the material tray that need to be cleaned, the placement plate 64 is moved to the bottom of the material picking mechanism 8 by controlling the first translation module 65.

[0083] Further, such as Figure 1 , Figure 5 ,and Figure 8As shown, the material taking device 8 includes a first mounting plate 81 fixedly mounted between the detection mechanism 6 and the cleaning mechanism 7, a screw 83 rotatably mounted on the first mounting plate 81 close to the cleaning mechanism 7, and a guide rail 82 fixedly mounted on the first mounting plate 81 and parallel to the screw 83;

[0084] A moving block 84 is threadedly connected to the screw rod 83, a sliding block 85 is slidably connected to the guide rail 82, and a fixing plate 86 is fixedly installed between the moving block 84 and the sliding block 85;

[0085] A first material taking head 87 for placing materials on the placing plate 64 into the tray or placing materials in the tray onto the placing plate 64 is fixedly mounted on the fixing plate 86 .

[0086] When the product to be cleaned moves to the bottom of the material picking mechanism 8, the driving device controls the screw 83 to move, so that the moving block 84 drives the slider 85 and the fixed plate 86 to move on the first mounting plate 81, so that the first material picking head 87 contacts the product to pick up the material.

[0087] Further, such as Figure 1 , Figure 5 and Figure 7 As shown, the cleaning mechanism 7 includes a fixing frame 71 fixedly mounted on the inner sides of the two feeding frames 31, a third slide cylinder 72 fixedly mounted on the upper surface of the fixing frame 71, a second cylinder 73 fixedly mounted on the slide of the third slide cylinder 72, a cleaning base 75 fixedly mounted above the fixing frame 71, and a tray fixedly mounted on the piston rod of the second cylinder 73 for holding materials and closing the mold with the cleaning base 75 to form a closed cleaning space;

[0088] After the first material picking head 87 picks up the product, the third slide cylinder 73 is controlled to push the tray to the bottom of the first material picking head 87, so that the first material picking head 87 places the product into the tray, and then the slide plate of the third slide cylinder 73 is controlled to return, and the second cylinder 73 is started, so that the movable rod of the second cylinder 73 extends out of the cylinder body, thereby making the tray contact and mold with the cleaning base 75 to form a closed cleaning space.

[0089] Furthermore, Figure 7 As shown, at least two spray guns 76 connected to the closed cleaning space are arranged on the cleaning base 75, and the spray gun 76 has a fluid meter 77 for detecting the gas flow rate;

[0090] One of the two spray guns 76 is connected to the carbon dioxide cleaning gas input conduit. When cleaning, the carbon dioxide gas is sprayed through the spray gun 76 to clean the outside of the product; the other spray gun 76 is connected to the external air input conduit. When cleaning, air is filled into the cleaning space through the spray gun 76. When the carbon dioxide gas cleans the frost, the frost is removed by the air.

[0091] Further, if Figure 7 As shown, a guide body 78 connected to the cleaning space and used for gas discharge is fixedly installed on the top surface of the cleaning base 75. The top end of the guide body 78 is covered with an exhaust plate 79 connected to the exhaust device, and the exhaust plate 79 is provided with holes for gas circulation.

[0092] During cleaning, the waste gas generated by cleaning enters the guide body 78 under the action of the air pressure in the closed cleaning space, and is discharged into the external waste gas duct through the perforations on the guide body 78 for tail gas discharge.

[0093] Further, the removal mechanism 9 includes a second mounting plate 91 fixedly mounted between the detection mechanism 6 and the cleaning mechanism 7, a second translation module 92 fixedly mounted on the second mounting plate 91, and a fourth slide cylinder 95 fixedly mounted on the translation plate 93 of the second translation module 92;

[0094] A temporary storage platform 94 for storing materials is fixedly installed on one side of the second mounting plate 91 corresponding to the fourth slide cylinder 95. The slide of the fourth slide cylinder 95 is downward, and a second material picking head 96 for placing unqualified materials on the placement plate 64 that have been repeatedly cleaned and tested on the temporary storage platform 94 is fixedly installed on the slide of the fourth slide cylinder 95.

[0095] If the product after repeated cleaning is still unqualified after detection by the detection structure 6, the second translation module 92 is controlled to drive the fourth slide cylinder 95 to move, so that the second material picking head 96 is above the unqualified product, and then the second material picking head 86 is driven by the fourth slide cylinder 95 to pick up the unqualified product, and the unqualified product is placed on the temporary storage platform 94, and the unqualified product is removed from the material tray, thereby completing the detection and screening of the product.

[0096] It is worth mentioning that the cleaning equipment adopts two sets of disc separation mechanisms 2, two sets of transfer channels 3, two sets of first grasping devices 4 and two sets of second grasping devices 5. Through the two sets of disc separation mechanisms 2, two sets of transfer channels 3, two sets of first grasping devices 4 and two sets of second grasping devices 5, the loading, inspection, cleaning and screening of the products are completed by cross-loading and loading. It has a simple structure and is easy to use, which effectively improves the efficiency of cleaning semiconductor products.

[0097] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A non-contact, fully automatic cleaning device based on carbon dioxide, characterized in that: It comprises a support body (1), a tray separation mechanism (2), a transfer channel (3), a first grasping device (4), a second grasping device (5), a detection mechanism (6), a cleaning mechanism (7), a material taking device (8) and a removal mechanism (9); The tray separation mechanism (2) is mounted on the support body (1), and the transfer flow channel (3) is mounted on the outside of the tray separation mechanism (2); two tray separation mechanisms (2) and two transfer flow channels (3) are each provided, the two tray separation mechanisms (2) are symmetrically mounted at the two end positions of the support body (1), and the two transfer flow channels (3) are symmetrically mounted on the outside of the two tray separation mechanisms (2); The first grabbing device (4) is installed between the disc separation mechanism (2) and the transfer channel (3), and is used to grab the material on the disc separation mechanism (2) and place it on the transfer channel (3) for loading, or grab the material on the transfer channel (3) and place it on the disc separation mechanism (2) for unloading; The transfer channel (3) comprises a second fixed frame (31) fixedly mounted on the support body (1), second rollers (32) are rotatably mounted on the inner sides of both ends of the second fixed frame (31), a second conveyor belt (33) for conveying materials is arranged between two second rollers (32) located on the same side of the inner sides of both ends of the second fixed frame (31), a second servo motor is fixedly mounted below the second fixed frame (31), and an output shaft of the second servo motor is connected to the second roller (32) at one end of the second conveyor belt (33) via a second transmission belt; A second support rod (34) for supporting the second conveyor belt (33) is fixedly mounted on the inner wall of the second fixed frame (31); The first grasping device (4) comprises a second support frame (41) fixedly mounted on the support body (1), a translation mechanism (43) fixedly mounted on the top of the second support frame (41), a first cylinder (44) mounted on the translation mechanism (43), and a grasping mechanism (42) fixedly mounted on the piston rod of the first cylinder (44); The detection mechanism (6) is installed at the center position above the support body (1), and the second grabbing device (5) is installed between the detection mechanism (6) and the transfer channel (3) and is used to place the material on the transfer channel (3) onto the detection mechanism (6) for appearance inspection; The cleaning mechanism (7) is installed on one side of the detection mechanism (6) and is used to receive materials that fail the appearance detection and clean them by blowing air; the cleaning mechanism (7) comprises a fixing frame (71) fixedly installed on the inner side of the two second fixing frames (31), a third slide cylinder (72) fixedly installed on the upper surface of the fixing frame (71), a second cylinder (73) fixedly installed on the slide of the third slide cylinder (72), a cleaning base (75) fixedly installed above the fixing frame (71), and a tray fixedly installed on the piston rod of the second cylinder (73) for holding materials and closing the mold with the cleaning base (75) to form a closed cleaning space; The cleaning base (75) is provided with at least two spray guns (76) in communication with the enclosed cleaning space, and the spray guns (76) are provided with a fluid meter (77) for detecting gas flow; A guide body (78) connected to the cleaning space and used for gas discharge is fixedly mounted on the top surface of the cleaning base (75); a top end of the guide body (78) is sealed with a gas extraction plate (79) used for connecting to a gas extraction device; and a through hole for gas circulation is provided on the gas extraction plate (79); The material taking device (8) is installed between the detection mechanism (6) and the cleaning mechanism (7), and is used to take the material that fails the detection and put it into the cleaning mechanism (7) for cleaning; The removal mechanism (9) is installed above the detection mechanism (6) and is used to remove products that fail the detection after repeated cleaning.

2. The carbon dioxide-based contactless fully automatic cleaning device according to claim 1 is characterized in that: The tray separation mechanism (2) comprises a first support frame (21) fixedly mounted on the support body (1), a material feeding frame (22) fixedly mounted above the first support frame (21) and used for material separation, a material frame (23) located above the material feeding frame (22), a first slide cylinder (24) fixedly mounted on the material frame (23) and used for pushing materials, a support bar (26) located inside the material frame (23) and used for supporting materials, and a lifting mechanism (25) located below the first support frame (21) and used for adjusting the support bar (26) up and down; The feeding frame (22) comprises a first fixed frame (221), first rollers (222) are rotatably mounted on the inner sides of both ends of the first fixed frame (221), a first conveyor belt (223) for conveying materials is arranged between two first rollers (222) located on the same side of the two ends of the first fixed frame (221), a first servo motor (224) is fixedly mounted below one end of the first fixed frame (221), and an output shaft of the first servo motor (224) is connected to the first roller (222) at one end of the first conveyor belt (223) via a first transmission belt (225); A first support rod (226) for supporting the first conveyor belt (223) is fixedly mounted on the inner wall of the first fixed frame (221); The lifting mechanism (25) is fixedly mounted on a positioning plate (251) below the first support frame (21), a lifting motor (252) is fixedly mounted on the bottom surface of the positioning plate (251), a lead screw that passes through the positioning plate (251) and is fixedly connected to an output shaft of the lifting motor (252), and a lifting plate (253) that is located between the positioning plate (251) and the first support frame (21) and is threadedly connected to the lead screw; a connecting column that passes through the bottom surface of the first support frame (21) and is fixedly connected to the support bar (26) is fixedly mounted on the lifting plate (253); the connecting column is slidably connected to the first support frame (21).

3. The carbon dioxide-based contactless fully automatic cleaning device according to claim 1 is characterized in that: The translation mechanism (43) comprises a translation cross frame (431) fixed to the top of the second support frame (41), a threaded rod (432) rotatably mounted on the translation cross frame (431), a movable block (433) threadedly sleeved on the threaded rod (432), a connecting plate (434) fixedly mounted on a side of the movable block (433) away from the translation cross frame (431), and a third servo motor fixedly mounted at one end of the translation cross frame (431) for driving the threaded rod (432); The first cylinder (44) is fixedly mounted on a side of the connecting plate (434) away from the movable block (433); The grabbing mechanism (42) comprises a support plate (421) fixedly connected to the piston rod of the first cylinder (44), a second slide cylinder (422) symmetrically mounted at both ends of the support plate (421), and a gripper fixedly mounted on the slide of the second slide cylinder (422) and used for grabbing materials.

4. The carbon dioxide-based contactless fully automatic cleaning device according to claim 1 is characterized in that: The detection mechanism (6) comprises a camera (62), a hanging plate (61) for hanging the camera at a central position above the support body (1), a placement plate (64) located at a central position above the support body (1), and a first translation module (65) fixedly mounted on the upper surface of the support body (1) for driving the placement plate (64) to move; The camera (62) has a lens end facing downwards and is used to collect images of materials on the placement plate (64) and transmit the collected image information to the control end. A communication socket (63) connected to the control end is fixedly mounted on the camera (62).

5. The carbon dioxide-based contactless fully automatic cleaning device according to claim 4 is characterized in that: The material taking device (8) comprises a first mounting plate (81) fixedly mounted between the detection mechanism (6) and the cleaning mechanism (7), a screw rod (83) rotatably mounted on a side of the first mounting plate (81) close to the cleaning mechanism (7), and a guide rail (82) fixedly mounted on the first mounting plate (81) and parallel to the screw rod (83); A moving block (84) is threadedly connected to the screw rod (83), a sliding block (85) is slidably connected to the guide rail (82), and a fixing plate (86) is fixedly installed between the moving block (84) and the sliding block (85); The fixed plate (86) is fixedly provided with a first material taking head (87) for placing the material on the placement plate (64) into the tray or placing the material in the tray onto the placement plate (64).

6. The carbon dioxide-based contactless fully automatic cleaning device according to claim 5 is characterized in that: The removal mechanism (9) comprises a second mounting plate (91) fixedly mounted between the detection mechanism (6) and the cleaning mechanism (7), a second translation module (92) fixedly mounted on the second mounting plate (91), and a fourth slide cylinder (95) fixedly mounted on a translation plate (93) of the second translation module (92); A temporary storage platform (94) for storing materials is fixedly mounted on one side of the second mounting plate (91) corresponding to the fourth slide cylinder (95); the slide of the fourth slide cylinder (95) faces downward, and a second material removal head (96) is fixedly mounted on the slide of the fourth slide cylinder (95) for placing unqualified materials on the placement plate (64) that have been repeatedly cleaned and tested onto the temporary storage platform (94).

7. The carbon dioxide-based contactless fully automatic cleaning device according to claim 2 is characterized in that: At least one guide rod (254) for guiding the lifting plate (253) is provided between the positioning plate (251) and the first support frame (21), and the guide rod (254) is located outside the lead screw.

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