Handling system

Abstract

A transport system is provided, which transports processed objects to multiple processing devices respectively, and is easy to construct. The transport system transports processed objects to multiple processing devices respectively, and includes: a line, which is fixed to the upper part of the processing device in the entire range of the multiple processing devices; an unmanned guided vehicle, which travels along the line, and has a storage part, a driving part, a driving mechanism, a lifting mechanism, and a receiver, wherein the storage part has a storage space for storing processed objects, the driving part is connected to the storage part from above, the driving mechanism is arranged on the driving part, and the lifting mechanism is arranged on the driving part, and the storage part is suspended from above to lift the storage part, and the receiver of the unmanned guided vehicle receives a control signal; a storage unit, which has a storage part holding table and a receiver, and the storage part holding table holds the storage part when the processed object is handed over from the processed object storage device storing the processed object to the storage part of the unmanned guided vehicle, and the receiver of the storage unit receives the control signal.

Description

Technical Field

[0001] The present invention relates to a transport system for transporting a workpiece to a processing device. Background Art

[0002] In the manufacturing process of device chips assembled in electronic devices, a plate-shaped workpiece represented by a semiconductor wafer or a resin package substrate is processed by various processing devices. When the workpiece is transported to the processing device, a transport box capable of accommodating a plurality of workpieces is generally used.

[0003] However, in the above method of storing a plurality of workpieces in a box and transporting them to a processing device at one time, when the processing device stops due to some reasons, the unprocessed workpieces stored in the box will all be put on standby. That is, it is also impossible to process the unprocessed workpieces using other processing devices, so the processing efficiency is greatly reduced.

[0004] To overcome this problem, for example, the workpieces can be transported to the processing device one by one according to the operating conditions of the processing device. Therefore, the following transport system is proposed: a plurality of processing devices are connected by a transport path, so that the workpieces can be transported to each processing device at any time (for example, see Patent Document 1).

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 6-177244

[0006] However, since the side of each processing device is provided with a pipe connection part for connecting the pipes or a door for maintenance, when constructing the above-mentioned conveying system, it is necessary to design the conveying path in a manner that does not interfere with these parts. Therefore, it is not necessarily easy to construct the conveying system, and the conveying path is also likely to become longer. Summary of the invention

[0007] The present invention has been made in view of the above problem, and an object of the present invention is to provide a transport system which can transport workpieces to a plurality of processing devices respectively and which can be easily constructed.

[0008] According to one embodiment of the present invention, a transport system is provided, which transports workpieces to multiple processing devices respectively, wherein the transport system includes: a line, which is fixed to the upper part of the processing devices throughout the entire range of the multiple processing devices; an unmanned guided vehicle, which travels along the line and has a storage portion, a traveling portion, a traveling mechanism, a lifting mechanism and a receiver, wherein the storage portion has a storage space for storing the workpiece, the traveling portion is connected to the storage portion from above, the traveling mechanism is arranged on the traveling portion, the lifting mechanism is configured on the traveling portion, the storage portion is suspended from above to raise and lower the storage portion, and the receiver of the unmanned guided vehicle receives a control signal; a storage unit, which has a storage portion holding platform and a receiver, wherein the storage portion holding platform delivers the workpiece from a workpiece storage device that stores the workpiece to the storage portion of the unmanned guided vehicle. The storage unit is maintained at the same time, and the receiver of the storage unit receives a control signal; and a control unit, which has a transmitter, a receiver and a control signal generating unit, wherein the transmitter sends a control signal to the processing device, the unmanned guided vehicle and the storage unit, the receiver of the control unit receives a notification signal sent from the processing device, the control signal generating unit generates a control signal sent from the transmitter, the control signal generating unit of the control unit generates a control signal sent from the transmitter of the control unit according to the notification signal received by the receiver of the control unit, the transmitter of the control unit sends the control signal generated by the control signal generating unit of the control unit to the processing device, the unmanned guided vehicle and the storage unit, and the unmanned guided vehicle travels along the route according to the control signal received by the receiver of the unmanned guided vehicle.

[0009] In the above-mentioned transport system, the line may be formed by connecting a plurality of rails, and the unmanned guided vehicle may travel along the rails in a state where the storage unit is arranged below the rails.

[0010] In addition, in the above-mentioned transport system, the line may have a leg, and the leg has a suction portion for suctioning the processing device, and the line may be fixed to the processing device by the suction portion.

[0011] A transport system of one embodiment of the present invention includes a line, an unmanned transport vehicle and a storage unit. The line is fixed to the upper part of a processing device throughout the entire range of multiple processing devices. The unmanned transport vehicle has a lifting mechanism. The lifting mechanism suspends a storage portion having a storage space for storing workpieces from above to lift and lower the storage portion. The unmanned transport vehicle travels along the line in a state where the storage portion is arranged below the line. The storage unit has a storage portion holding table. The storage portion holding table holds the storage portion when the workpiece is handed over from a workpiece storage device that stores the workpiece to the storage portion.

[0012] Therefore, after the workpiece stored in the workpiece storage is transported to the storage section held on the storage section holding table, the unmanned transport vehicle is driven along the line, so that the workpiece can be transported to each of the plurality of processing devices. In addition, in a transport system of one embodiment of the present invention, the line is fixed to the upper part of the processing device. Therefore, when designing the transport system including the line, it is not necessary to consider the structure of the side of each processing device. That is, the construction of the transport system becomes easy. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a top view showing a configuration example of the transport system according to the first embodiment.

[0014] Figure 2 This is a functional block diagram showing an example of the connection relationship of the conveying system according to the first embodiment.

[0015] Figure 3 It is a side view schematically showing a configuration example of the storage unit according to the first embodiment.

[0016] Figure 4 (A) is a perspective view showing a structural example of the unmanned workpiece transport vehicle according to the first embodiment. Figure 4 (B) is a perspective view showing a state in which the storage section of the unmanned workpiece transport vehicle is raised and lowered.

[0017] Figure 5 This is a perspective view showing the appearance of the cutting device, circuit, etc. according to the first embodiment.

[0018] Figure 6 It is a perspective view showing a structural example of a cutting device.

[0019] Figure 7 It is a perspective view showing a state of setting a line to a cutting device.

[0020] Figure 8 (A) is a plan view showing a first example of a track used for a railway line, Figure 8 (B) is a plan view showing the second example of the track. Figure 8 (C) is a plan view showing the third example of the track.

[0021] Fig. 9 (A) is a partial cross-sectional side view of the unmanned workpiece transport vehicle traveling in the area above the cutting device as viewed from the Y-axis direction. Fig. 9 (B) is a partial cross-sectional side view showing the state when the storage unit is lowered as viewed from the Y-axis direction.

[0022] Fig.10 (A) is viewed from the X-axis direction Fig. 9 A partial cross-sectional side view of the state shown in (A), Fig.10 (B) is viewed from the X-axis direction Fig. 9 (B) is a partial sectional side view of the state shown.

[0023] Fig.11 This is a functional block diagram for explaining an example of a control method of the conveying system according to the first embodiment.

[0024] Fig.12 (A) and Fig.12 (B) is a partial cross-sectional side view showing a structural example of the unmanned workpiece transport vehicle and the like according to the second embodiment.

[0025] Fig.13 It is a side view showing a structural example of a storage unit according to the third embodiment.

[0026] Fig.14 It is a plan view schematically showing the internal structure of the storage unit according to the third embodiment.

[0027] Fig.15 It is a side view schematically showing a state where the first temporary stage and the second temporary stage of the storage unit according to the third embodiment are moved in the second direction to exchange the position of the first temporary stage and the position of the second temporary stage.

[0028] Fig.16 (A) and Fig.16 (B) is a plan view schematically showing an example of the operation of the storage unit according to the third embodiment.

[0029] Fig.17 (A) and Fig.17 (B) is a plan view schematically showing an example of the operation of the storage unit according to the third embodiment.

[0030] Description of symbols

[0031] 2: transport system; 4: cutting device (processing device); 6: line; 8: storage unit; 10: unmanned workpiece transport vehicle (unmanned transport vehicle); 12: control unit; 16: housing; 16a: ceiling; 16b: opening; 18: box holding table; 20: box (workpiece storage); 21: piping; 22: push-pull arm; 24: guide rail; 26: storage unit holding table; 32: control device; 34: receiver; 36: transmitter; 38: storage unit; 38a: space (storage space); 38b: side; 38c: opening; 39: travel unit; 39a: base; 39b: protrusion; 39c: terminal; 40 : lifting mechanism; 40a: line; 41: wheel (traveling mechanism); 42: control device; 44: receiver; 46: transmitter; 102: track; 102a: upper plate; 102b: side plate; 102c: lower plate; 104: track holding structure; 104a: foot; 104b: holding part; 104c: adsorption part; 106: track; 106a: first path; 106b: second path; 108: track; 110: track; 112: track holding structure; 114: track holding structure; 116: information providing part; 118: reader; 122: control unit; 124: receiver; 126: transmitter. DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described with reference to the accompanying drawings. In addition, in each of the following embodiments, a conveying system for conveying a workpiece to a plurality of cutting devices is described, but the conveying system of the present invention only needs to be configured to convey the workpiece to a plurality of processing devices. That is, the conveying destination of the workpiece may be a processing device other than a cutting device.

[0033] For example, the transport system of the present invention is sometimes configured to be able to transport the workpiece to multiple laser processing devices. In addition, the transport system of the present invention is sometimes configured to be able to sequentially transport the workpiece to multiple processing devices used in a series of processing. In addition, in this specification, all devices that can be used in a series of steps for processing the workpiece are expressed as processing devices. That is, the processing device of the present invention includes a tape sticking device, an ultraviolet irradiation device, a cleaning device, etc. that are not necessarily intended for processing the workpiece.

[0034] (Implementation Method 1)

[0035] Figure 1 2 is a plan view showing a configuration example of a conveying system 2 according to the present embodiment. Figure 2 2 is a functional block diagram showing an example of the connection relationship of the transport system 2. Figure 1 As shown, the conveying system 2 of this embodiment includes a plate-shaped workpiece 11 (see Figure 4 Line 6 used for transportation (B, etc.).

[0036] The workpiece 11 is, for example, a disk-shaped wafer formed of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of small areas by a plurality of intersecting predetermined dividing lines (spacers), and components such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each small area.

[0037] A tape (scribing tape) 13 having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11. The outer peripheral portion of the tape 13 is fixed to an annular frame 15 surrounding the workpiece 11. The workpiece 11 is conveyed to the cutting device 4 while being supported by the tape 13 on the frame 15.

[0038] In addition, in the present embodiment, a disk-shaped wafer formed of a semiconductor material such as silicon is used as the workpiece 11, but there is no limitation on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate formed of other semiconductors, ceramics, resins, metals, etc. may be used as the workpiece 11.

[0039] Likewise, there is no limitation on the type, number, shape, structure, size, and arrangement of the device. The device may not be formed on the workpiece 11. In addition, in the present embodiment, the workpiece 11 supported by the frame 15 via the tape 13 is the object of transportation, but sometimes the workpiece 11 to which the tape 13 is not attached, the workpiece 11 not supported by the frame 15, etc. may also be the object of transportation.

[0040] The cutting device 4 for processing the workpiece 11 is connected to the conveying system 2 as a conveying destination of the workpiece 11, but is not necessarily a component of the conveying system 2. Therefore, the cutting device 4 can be changed or omitted according to the use mode of the conveying system 2 as described above.

[0041] And, in Figure 1 In the figure, for the sake of convenience, only one cutting device 4a is shown. Figure 2 In the figure, two cutting devices 4a and 4b are shown, but in the present embodiment, two or more cutting devices 4 are required as the conveying destination of the workpiece 11. That is, the number of processing devices connected to the conveying system 2 is two or more.

[0042] The line 6 is provided in the plurality of cutting devices 4 so as to be able to convey the workpiece 11 to each cutting device 4. That is, the plurality of cutting devices 4 are connected to each other via the line 6. In addition, the line 6 is fixed to the upper portion of the cutting device 4. Therefore, the line 6 does not interfere with the pipe 21 connected to the side of each cutting device 4.

[0043] Below the line 6, in addition to the cutting device 4, there is also a storage unit 8 that can store a plurality of workpieces 11. The workpieces 11 stored in the storage unit 8 are transported to an unmanned workpiece transport vehicle (unmanned transport vehicle) 10 at any time. The unmanned workpiece transport vehicle 10 travels along the line 6 and transports the workpieces 11 to each cutting device 4. Figure 1 In FIG. 1 , three unmanned workpiece transport vehicles 10a, 10b, and 10c are shown. Figure 2 In the figure, two unmanned object transport vehicles 10a and 10b are shown, but there is no limit to the number of unmanned object transport vehicles 10.

[0044] like Figure 2 As shown, the cutting device 4, the storage unit 8, and the unmanned workpiece transport vehicle 10 are wirelessly connected to a control unit 12 for controlling their actions. The control unit 12 only needs to be configured to control the actions of the cutting device 4, the storage unit 8, and the unmanned workpiece transport vehicle 10, and may be connected to them in a wired manner.

[0045] Figure 3 FIG. 8 is a side view schematically showing a structural example of the storage unit 8. Figure 3 As shown, the storage unit 8 includes a housing 16 for storing various components. Figure 3 In the figure, for the convenience of explanation, only the outline of the housing 16 is shown.

[0046] A cassette holding table 18 that is raised and lowered by, for example, a first lifting mechanism (not shown) of a ball screw type is provided in the housing 16. A cassette (workpiece storage container) 20 that can store a plurality of workpieces 11 is placed on the upper surface of the cassette holding table 18. The cassette 20 stores the workpieces 11 that are supported on the frame 15 via the belt 13 as described above.

[0047] A push-pull arm 22 is disposed on the side of the box holding table 18, and the push-pull arm 22 can move while holding the frame 15. For example, if the height of the frame 15 stored in the box 20 is made consistent with the height of the push-pull arm 22 by the first lifting mechanism and the frame 15 in the box 20 is held by the push-pull arm 22, the frame 15 can be pulled out of the box 20.

[0048] A pair of guide rails 24 are provided at positions across the push-pull arm 22, approaching and moving away from each other while maintaining a mutually parallel state. Each guide rail 24 has a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface, and each guide rail 24 sandwiches the frame 15 pulled out of the box 20 by the push-pull arm 22 and aligns it at a predetermined position.

[0049] A storage unit holding platform 26 that is raised and lowered by a second lifting mechanism (not shown) of a ball screw type is provided at a position on the opposite side of the push-pull arm 22 and the pair of guide rails 24 from the box holding platform 18. A storage unit 38 of the unmanned workpiece transport vehicle 10 that can store the workpiece 11 (frame 15) is placed on the upper surface of the storage unit holding platform 26.

[0050] The frame 15, which is positioned at a predetermined position by the pair of guide rails 24, is again held by the push-pull arm 22 and inserted from the side into the storage section 38 on the storage section holding platform 26 whose height is adjusted by the second lifting mechanism. In other words, the workpiece 11 is delivered to the storage section 38 held by the storage section holding platform 26.

[0051] In addition, a position limiting portion (not shown) for limiting the position of the storage portion 38 is provided on the upper surface of the storage portion holding table 26. Thus, when the workpiece 11 is transferred from the box 20 storing the workpiece 11 to the storage portion 38 of the unmanned workpiece transport vehicle 10, the storage portion 38 is positioned at a predetermined position determined by the position limiting portion on the storage portion holding table 26.

[0052] An opening 16b that passes through the ceiling 16a of the housing 16 from top to bottom is provided in the area directly above the storage section holding table 26. The opening 16b is formed in a shape and size that allows at least the storage section 38 of the unmanned workpiece transport vehicle 10 placed on the storage section holding table 26 to pass through. The storage section 38 is transported from the outside to the inside of the housing 16 through the opening 16b, or from the inside to the outside of the housing 16 through the opening 16b.

[0053] The first lifting mechanism, the push-pull arm 22, the pair of guide rails 24, the second lifting mechanism and other components are connected to a control device 32 for controlling the operation of the storage unit 8. The control device 32 is typically composed of a computer including a processing device such as a CPU (Central Processing Unit) and a storage device such as a flash memory. The processing device and the like are operated according to the software stored in the storage device, thereby realizing the functions of the control device 32.

[0054] The control device 32 is also connected to a receiver 34 and a transmitter 36. The receiver 34 receives a control signal (control signal) sent from the control unit 12 of the transport system 2, and the transmitter 36 sends a notification signal (notification signal) to the control unit 12. The control device 32 controls the operation of the storage unit 8 based on the signal received by the receiver 34. In addition, the control device 32 sends a required signal to the control unit 12 via the transmitter 36.

[0055] Figure 4 (A) is a perspective view showing a structural example of an unmanned workpiece transport vehicle 10. Figure 4 (B) is a perspective view showing the state in which the storage section 38 of the unmanned workpiece transport vehicle 10 is raised and lowered. Figure 4 (A) and Figure 4 As shown in FIG. 2 (B), the unmanned workpiece transport vehicle 10 includes, for example, a rectangular parallelepiped storage portion 38, and the storage portion 38 is configured to store one workpiece 11 (and the frame 15).

[0056] A space (storage space) 38a for storing the workpiece 11 (and the frame 15) is formed inside the storage section 38. An opening 38c of a size that allows the workpiece 11 (and the frame 15) to pass through is provided on a pair of side surfaces 38b of the storage section 38, and the space 38a of the storage section 38 is connected to the outside through the opening 38c. Thus, the workpiece 11 (and the frame 15) is moved into the space 38a of the storage section 38 through the opening 38c, and is moved out of the space 38a of the storage section 38 through the opening 38c.

[0057] A travel portion 39 is disposed above the storage portion 38. The travel portion 39 includes a flat plate-shaped base portion 39a having the same size as the storage portion 38 in a plan view. A lifting mechanism 40 ( Figure 4 Each lifting mechanism 40 includes a wire 40a having a front end connected to the upper surface of the storage portion 38 and a winch (not shown) fixed to the lower surface of the base 39a and winding the wire 40a. The lifting mechanism 40 suspends the storage portion 38 and raises and lowers it.

[0058] That is, the traveling part 39 is connected to the storage part 38 from above via the lifting mechanism 40. For example, if the winch is operated in such a way as to pull out the wire 40a, Figure 4 As shown in (B) of FIG. 3 , the storage section 38 can be lowered relative to the traveling section 39. In addition, if the winch is operated so as to wind up the wire 40a, the storage section 38 can be raised.

[0059] A rectangular protrusion 39b is disposed on the upper surface side of the base 39a, and a plurality of (four in this embodiment) wheels (travel mechanisms) 41 are disposed on the side of the protrusion 39b. Each wheel 41 is connected to a rotation drive source such as a motor and rotates. In addition, a terminal 39c is disposed on the upper surface of the protrusion 39b. Power is supplied from the outside to each component of the unmanned workpiece transport vehicle 10 through the terminal 39c.

[0060] A control device 42 for controlling the operation of the unmanned workpiece transport vehicle 10 is provided inside the base 39a. The control device 42 is typically composed of a computer including a processing device such as a CPU and a storage device such as a flash memory. The function of the control device 42 is realized by operating the processing device and the like according to the software stored in the storage device.

[0061] The control device 42 is connected to a receiver 44 and a transmitter 46. The receiver 44 receives a control signal (control signal) sent from the control unit 12 of the transport system 2, and the transmitter 46 sends a notification signal (notification signal) to the control unit 12. The control device 42 controls the operation of the unmanned workpiece transport vehicle 10 based on the signal received by the receiver 44. In addition, the control device 42 sends a required signal to the control unit 12 via the transmitter 46.

[0062] In addition, a secondary battery, for example, may be connected to each component of the unmanned workpiece transport vehicle 10. In this case, each component of the unmanned workpiece transport vehicle 10 is operated by the power supplied from the secondary battery. The power supply (charging) to the secondary battery is performed in a contact manner using the terminal 39c, but may also be performed in a non-contact (wireless, contactless) manner without using the terminal 39c or the like.

[0063] Figure 5 1 is a perspective view showing the appearance of the cutting device 4 and the circuit 6, etc. Figure 6 4 is a perspective view showing a structural example of the cutting device 4. Figure 5 and Figure 6 As shown, the cutting device 4 has a base 48 for supporting various components. An opening 48a is formed at a corner of the base 48, and a storage portion holding table 50 is provided in the opening 48a to be raised and lowered by a lifting mechanism (not shown).

[0064] The storage section 38 of the unmanned workpiece transport vehicle 10 is placed on the upper surface of the storage section holding platform 50. In addition, a position limiting portion (not shown) for limiting the position of the storage section 38 is provided on the upper surface of the storage section holding platform 50, and the storage section 38 on the storage section holding platform 50 is positioned at a predetermined position determined by the position limiting portion.

[0065] like Figure 6 As shown, an opening 48b that is long in the X-axis direction (front-rear direction, processing feed direction) is formed on the side of the opening 48a. A ball screw type X-axis moving mechanism (processing feed unit) 52 and a dust and drip-proof cover 54 covering the upper part of the X-axis moving mechanism 52 are arranged in the opening 48b. The X-axis moving mechanism 52 has an X-axis moving table 52a, and the X-axis moving mechanism 52 moves the X-axis moving table 52a in the X-axis direction.

[0066] A chuck table (holding table) 56 for attracting and holding the workpiece 11 is provided on the X-axis moving table 52a. The chuck table 56 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction, cutting feed direction). In addition, the chuck table 56 is moved in the X-axis direction (processing feed) by the above-mentioned X-axis moving mechanism 52.

[0067] The upper surface of the chuck table 56 is a holding surface 56a for holding the workpiece 11. The holding surface 56a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 56. In addition, four clamps 58 are provided around the chuck table 56 for fixing the frame 15 supporting the workpiece 11 from all sides.

[0068] A pair of guide rails (temporary storage area) 60 is provided above the opening 48b, which approach and move away while maintaining a state parallel to the Y-axis direction (left-right direction, indexing feed direction). The pair of guide rails 60 each have a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface, and the pair of guide rails 60 sandwich the frame 15 pulled out of the storage portion 38 in the X-axis direction and align it at a predetermined position.

[0069] A gate-shaped first support structure 62 is arranged above the base 48 so as to span the opening 48b. A first rail 64 along the Y-axis direction is fixed to the front surface (surface on the guide rail 60 side) of the first support structure 62, and the first rail 64 is connected to the first holding unit 68 by means of a first moving mechanism 66 or the like.

[0070] The first holding unit 68, for example, contacts the upper surface of the frame 15 to adsorb and hold the frame 15, and the first holding unit 68 is raised and lowered by the first moving mechanism 66 and moves in the Y-axis direction along the first rail 64. A holding mechanism 68a for holding the frame 15 is provided on the opening 48a side of the first holding unit 68.

[0071] For example, if the frame 15 is gripped by the gripping mechanism 68a and the first holding unit 68 is moved in the Y-axis direction, the frame 15 in the storage section 38 can be pulled out onto the pair of guide rails 60 or the frame 15 on the pair of guide rails 60 can be inserted into the storage section 38. In addition, after the frame 15 is aligned by the pair of guide rails 60, the frame 15 (workpiece 11) is sucked and held by the first holding unit 68 and carried into the chuck table 56.

[0072] In addition, a second rail 70 along the Y-axis direction is fixed on the front surface of the first support structure 62 above the first rail 64. The second rail 70 is connected to a second holding unit 74 by means of a second moving mechanism 72 or the like. The second holding unit 74, for example, contacts the upper surface of the frame 15 to adsorb and hold the frame 15, and the second holding unit 74 is raised and lowered by the second moving mechanism 72 and moves in the Y-axis direction along the second rail 70.

[0073] A gate-shaped second support structure 76 is arranged behind the first support structure 62. Two sets of cutting units (machining units) 80 are provided on the front surface (surface on the first support structure 62 side) of the second support structure 76 by means of Y-axis and Z-axis moving mechanisms (indexing feeding unit, cut-in feeding unit) 78. Each cutting unit 80 moves in the Y-axis direction (indexing feeding) and moves in the Z-axis direction (cut-in feeding) by the corresponding Y-axis and Z-axis moving mechanisms 78.

[0074] Each cutting unit 80 has a spindle (not shown) as a rotation axis substantially parallel to the Y-axis direction. A circular ring-shaped cutting tool 82 is mounted on one end of each spindle. A rotation drive source such as a motor (not shown) is connected to the other end of each spindle. In addition, a nozzle for supplying a cutting fluid such as pure water to the workpiece 11 and the cutting tool 82 is arranged next to the cutting tool 82.

[0075] The rotating cutting tool 82 cuts into the workpiece 11 held by the chuck table 56 while supplying cutting fluid from the nozzle, thereby processing (cutting) the workpiece 11. A photographing unit (camera) 84 for photographing the workpiece 11 held by the chuck table 56 is provided at a position adjacent to the cutting unit 80. The photographing unit 84 is also moved in the Y-axis direction by the Y-axis Z-axis moving mechanism 78, and is moved in the Z-axis direction.

[0076] A cleaning unit 86 is disposed at a position on the opposite side of the opening 48a relative to the opening 48b. The cleaning unit 86 has a rotating table 88 in a cylindrical cleaning space for sucking and holding the workpiece 11. A rotation drive source (not shown) is connected to the lower part of the rotating table 88 to rotate the rotating table 88 at a predetermined speed.

[0077] A spray nozzle 90 is disposed above the rotary table 88 for spraying a cleaning fluid (typically a mixed fluid of water and air) toward the workpiece 11 held by the rotary table 88. The workpiece 11 can be cleaned by rotating the rotary table 88 holding the workpiece 11 and spraying the cleaning fluid from the spray nozzle 90.

[0078] After the workpiece 11 is processed by the cutting unit 80, the frame 15 is sucked and held by, for example, the second holding unit 74 and carried into the cleaning unit 86. After the workpiece 11 is cleaned by the cleaning unit 86, the frame 15 is sucked and held by, for example, the first holding unit 68 and placed on the pair of guide rails 60, and then the frame 15 is held by the holding mechanism 68a and stored in the storage portion 38.

[0079] like Figure 5 As shown, the upper surface side of the base 48 is covered by a cover 92, and the above-mentioned components are stored inside the cover 92. An opening 92b that passes through the ceiling 92a of the cover 92 from top to bottom is provided in the area directly above the opening 48a. The storage section 38 of the unmanned workpiece transport vehicle 10 is transported from the outside to the inside of the cover 92 through the opening 92b, or from the inside to the outside of the cover 92 through the opening 92b. There is no particular limitation on the shape and size of the opening 92b, but the opening 92b needs to be configured to at least allow the storage section 38 to pass through.

[0080] Each component of the cutting device 4 is connected to the control device 96 ( Figure 5 The control device 96 is typically composed of a computer including a processing device such as a CPU and a storage device such as a flash memory. The functions of the control device 96 are realized by operating the processing device and the like according to the software stored in the storage device.

[0081] The control device 96 is also connected to a receiver 98 and a transmitter 100. The receiver 98 receives a control signal (control signal) sent from the control unit 12 of the conveying system 2, and the transmitter 100 sends a notification signal (notification signal) to the control unit 12. The control device 96 controls the components of the cutting device 4 according to the signal received by the receiver 98, for example.

[0082] A pipe connection portion 48c ( Figure 5 In addition, a door 92c ( Figure 5 ). In addition, an operation panel (not shown) or a display (not shown) etc. may be provided on the side wall of the cover 92.

[0083] Figure 7 2 is a perspective view showing a state where the line 6 of the transport system 2 is provided to the cutting device 4. Figure 5 , Figure 7 As shown in FIG. 1 , the line 6 of the transport system 2 of the present embodiment is attached to the upper surface side of the ceiling 92a of the cover 92 provided in the cutting device 4. That is, the line 6 is provided in the space directly above the cutting device 4.

[0084] Thus, the line 6 does not interfere with the pipe connection portion 48c and the door 92c provided on the side of the cutting device 4. That is, when designing the line 6, it is not necessary to consider the side structure of the cutting device 4. Therefore, the transport system 2 can be easily constructed.

[0085] The circuit 6 includes a plurality of rails 102 made of metal or other materials and connected to each other. Each rail 102 has an upper plate 102a having a substantially flat upper surface. The upper ends of the side plates 102b are connected to a pair of side ends of the upper plate 102a. The side ends of the lower plates 102c having a substantially flat upper surface are connected to the lower ends of the two sets of side plates 102b.

[0086] That is, the track 102 includes an upper plate 102a, two sets of side plates 102b, and two sets of lower plates 102c. The two sets of lower plates 102c are arranged at a predetermined gap so as not to contact each other, and the protrusion 39b of the unmanned workpiece transport vehicle 10 is inserted into the gap. With the protrusion 39b inserted into the gap between the two sets of lower plates 102c, the wheels 41 contact the upper surface of each lower plate 102c, so that the unmanned workpiece transport vehicle 10 travels along the track 102 in a state where the storage portion 38 is arranged below the track 102.

[0087] In addition, the line 6 includes a rail holding structure 104 fixed to the upper part of the cutting device 4. The rail holding structure 104 has a plurality of legs 104a. A flat holding portion 104b is connected to the upper end of each leg 104a, and each leg 104a is connected to each other via the holding portion 104b. An adsorption portion 104c is provided at the lower end of each leg 104a. The adsorption portion 104c includes, for example, a plurality of suction cups (not shown), which are adsorbed to the ceiling 92a of the cover 92 of the cutting device 4.

[0088] Therefore, if the suction cup of the adsorption portion 104c is adsorbed on the ceiling 92a of the cover 92, the rail holding structure 104 can be fixed to the upper part of the cutting device 4. The upper plate 102a of the rail 102 is fixed to the lower surface side of the holding portion 104b of the rail holding structure 104. When the rail holding structure 104 is fixed to the upper part of the cutting device 4, the rail 102 is held on the rail holding structure 104 in a state where the two sets of lower plates 102c face the ceiling 92a. In addition, a power supply device (not shown) for supplying power to the unmanned workpiece transport vehicle 10 is connected to the rail 102.

[0089] Figure 8 (A) is a plan view showing a first example of a rail 102 used in the line 6, Figure 8 (B) is a plan view showing a second example of the track 102. Figure 8 (C) is a plan view showing a third example of the track 102. For example, the track 6 is Figure 8 (A) Figure 8 (B) and Figure 8 The plurality of rails 106, 108, and 110 shown in (C) are connected to form a structure.

[0090] Figure 8 The track 106 shown in (A) includes a first path 106a and a second path 106b, and is provided directly above the cutting device 4. By using the track 106, for example, when a workpiece 11 is being transferred between a certain unmanned workpiece transport vehicle 10 (the first vehicle) and the cutting device 4, another workpiece transport vehicle 10 (the second vehicle) can overtake the unmanned workpiece transport vehicle 10 (the first vehicle). Figure 1 As shown, it is arranged in a manner such that it passes directly above the opening 92b of the cutting device 4.

[0091] in addition, Figure 8 The track 108 shown in (B) is formed in a straight line. Figure 8 The rail 110 shown in (C) is formed into an arc shape (curve shape) suitable for turning corners. The rail 108 is provided, for example, just above the storage unit 8 or the like. The rail 110 is used to connect two adjacent rails 106 and 108, for example.

[0092] The rail 106 including the first path 106a and the second path 106b is supported by a large rail holding structure 104 ( Figure 1 In contrast, the track 108 consisting of only one path is held by a small track holding structure 104 ( Figure 1 The track retaining structure 114) is maintained.

[0093] In addition, an information providing unit 116 (see FIG. 1 ) such as an identification code represented by a two-dimensional code or a wireless tag is provided on the rails 106 and 108 disposed directly above the cutting device 4 and the storage unit 8. Figure 1 The information provided by the information providing unit 116 is used, for example, to confirm the position of the unmanned object transport vehicle 10.

[0094] In addition, there is no limitation on the type, number, and arrangement (connection relationship) of the tracks and track holding structures constituting the line 6. For example, any two tracks may be connected by using the track 106, the track 108, etc. In addition, for example, a right-angle track may be used instead of the arc-shaped track 110.

[0095] Next, the operation of moving the storage section 38 of the unmanned workpiece transport vehicle 10 between the area above the cutting device 4 and the storage section holding table 50 of the cutting device 4 will be described in detail. Fig. 9 (A) is a partial cross-sectional side view of the unmanned workpiece transport vehicle 10 traveling in the area above the cutting device 4 as viewed from the Y-axis direction. Fig. 9 (B) is a partial cross-sectional side view showing a state when the storage section 38 is lowered as viewed from the Y-axis direction.

[0096] in addition, Fig.10 (A) is viewed from the X-axis direction Fig. 9 A partial cross-sectional side view of the state shown in (A), Fig.10 (B) is viewed from the X-axis direction Fig. 9 A partial cross-sectional side view of the state shown in (B). Fig. 9 (A) and Fig.10 As shown in (A), for example, after the unmanned object transport vehicle 10 is driven along the track 102, the unmanned object transport vehicle 10 is stopped right above the opening 92b.

[0097] Then, if Fig. 9 (B) and Fig.10 As shown in (B), the winch of the lifting mechanism 40 is operated to pull out the wire 40a. As a result, the storage section 38 can be lowered in a manner passing through the opening 92b and placed on the storage section holding platform 50. In other words, the storage section 38 can be held by the storage section holding platform 50. After the storage section 38 is held by the storage section holding platform 50, the workpiece 11 (frame 15) is moved out of the storage section 38.

[0098] For example, after the cutting device 4 has finished processing the workpiece 11, the workpiece 11 (frame 15) is moved into the storage section 38. Thereafter, the winch of the lifting mechanism 40 is operated to wind up the wire 40a. Thus, the storage section 38 can be raised in a manner passing through the opening 92b, and the storage section 38 can be moved out to the area above the cutting device 4 (i.e., outside the cover 92). After the storage section 38 is moved out to the area above the cutting device 4, the wheels 41 are rotated to allow the unmanned workpiece transport vehicle 10 to travel along the track 102.

[0099] In addition, here, the action when transporting the storage section 38 between the area above the cutting device 4 and the storage section holding table 50 of the cutting device 4 is described, but the action when transporting the storage section 38 between the area above the storage unit 8 and the storage section holding table 26 of the storage unit 8 is the same.

[0100] Next, an example of a control method of the conveying system 2 according to the present embodiment will be described. Fig.11 This is a functional block diagram for explaining an example of a control method of the transport system 2. For example, when a new workpiece 11 (unprocessed workpiece 11) is required, the control device 96 of the cutting device 4 generates a notification signal (workpiece request signal) for notifying this fact. The notification signal (workpiece request signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12.

[0101] like Fig.11 As shown, the control unit 12 has a control unit (control signal generating unit) 122 that generates control signals for performing various controls. The control unit 122 is typically composed of a computer including a processing device such as a CPU and a storage device such as a flash memory. The functions of the control unit 122 are realized by operating the processing device and the like according to the software stored in the storage device.

[0102] The control unit 122 is connected to a receiver 124 and a transmitter 126. The receiver 124 receives notification signals sent from the cutting device 4, the storage unit 8, the unmanned workpiece transport vehicle 10, etc., and the transmitter 126 sends control signals to the cutting device 4, the storage unit 8, the unmanned workpiece transport vehicle 10, etc.

[0103] When the receiver 124 of the control unit 12 receives the notification signal (workpiece request signal) transmitted from the transmitter 100 of the cutting device 4, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (workpiece request signal) from the cutting device 4, it issues an instruction to the unmanned workpiece transport vehicle 10 to move to the position directly above the opening 16b of the storage unit 8 and transport the storage section 38 to the storage section holding table 26 of the storage unit 8. Specifically, the control unit 122 generates a control signal (first transport instruction signal) corresponding to the instruction and transmits it from the transmitter 126 to the unmanned workpiece transport vehicle 10.

[0104] When the receiver 44 of the unmanned workpiece transport vehicle 10 receives the control signal (first transport instruction signal) from the control unit 12, the control signal is sent to the control device 42. The control device 42 controls the movement of the wheels (travel mechanism) 41 and the like according to the control signal (first transport instruction signal), thereby causing the unmanned workpiece transport vehicle 10 to travel along the route 6.

[0105] In addition, if Fig.11 As shown, a reader 118 for reading information from an information providing unit 116 provided on the line 6 is connected to the control device 42 of the unmanned workpiece transport vehicle 10. Therefore, by reading the information from the information providing unit 116 through the reader 118, the control device 42 can confirm the position of itself (the unmanned workpiece transport vehicle 10).

[0106] When the control device 42 confirms that the unmanned workpiece transport vehicle 10 has moved to the position directly above the opening 16b of the storage unit 8, the control device 42 operates the winch of the lifting mechanism 40 to pull out the wire 40a. As a result, the storage section 38 is lowered so as to pass through the opening 16b, and the storage section 38 can be placed on the storage section holding table 26.

[0107] After the storage section 38 is placed on the storage section holding table 26, the control device 42 generates a notification signal (first transfer completion signal) for notifying that the storage section 38 has been transferred to the storage unit 8. The notification signal (first transfer completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0108] When the receiver 124 of the control unit 12 receives the notification signal (first transport completion signal) transmitted from the transmitter 46 of the unmanned workpiece transport vehicle 10, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (first transport completion signal) from the unmanned workpiece transport vehicle 10, it issues an instruction to the storage unit 8 to carry the new workpiece 11 into the storage unit 38 on the storage unit holding table 26. Specifically, the control unit 122 generates a control signal (first carry-in instruction signal) corresponding to the instruction and transmits it to the storage unit 8 from the transmitter 126.

[0109] When the receiver 34 of the storage unit 8 receives the control signal (first carry-in instruction signal) from the control unit 12, the control signal is sent to the control device 32. The control device 32 controls the operation of the first lifting mechanism, the push-pull arm 22, the pair of guide rails 24, the second lifting mechanism, etc. according to the control signal (first carry-in instruction signal), and carries the new workpiece 11 into the storage section 38.

[0110] When a new workpiece 11 is loaded into the storage section 38, the control device 32 generates a notification signal (first loading completion signal) for notifying that loading of the workpiece 11 into the storage section 38 has been completed. The notification signal (first loading completion signal) generated by the control device 32 is transmitted from the transmitter 36 to the control unit 12.

[0111] When the receiver 124 of the control unit 12 receives the notification signal (first carry-in completion signal) transmitted from the transmitter 36 of the storage unit 8, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (first carry-in completion signal) from the storage unit 8, it issues an instruction to the unmanned workpiece transport vehicle 10 to move to the position just above the opening 16b of the cutting device 4 and transport the storage portion 38 to the storage portion holding table 50 of the cutting device 4. Specifically, the control unit 122 generates a control signal (second transport instruction signal) corresponding to the instruction and transmits it from the transmitter 126 to the unmanned workpiece transport vehicle 10.

[0112] When the receiver 44 of the unmanned workpiece transport vehicle 10 receives the control signal (second transport instruction signal) from the control unit 12, the control signal is sent to the control device 42. The control device 42 raises the storage section 38 according to the control signal (second transport instruction signal) and carries the storage section 38 out of the storage unit 8. Then, the movement of the wheels 41 and the like is controlled to make the unmanned workpiece transport vehicle 10 travel along the route 6.

[0113] When the control device 42 confirms that the control device 42 (unmanned workpiece transport vehicle 10) has moved to the position directly above the opening 16b of the cutting device 4, the control device 42 operates the winch of the lifting mechanism 40 to pull out the wire 40a. As a result, the storage section 38 is lowered to pass through the opening 92b, so that the storage section 38 can be placed on the storage section holding table 50.

[0114] After the storage section 38 is placed on the storage section holding table 50, the control device 42 generates a notification signal (a second transfer completion signal) for notifying that the transfer of the storage section 38 to the cutting device 4 has been completed. The notification signal (the second transfer completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0115] When the receiver 124 of the control unit 12 receives the notification signal (second transport completion signal) transmitted from the transmitter 46 of the unmanned workpiece transport vehicle 10, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (second transport completion signal) from the unmanned workpiece transport vehicle 10, it issues an instruction to the cutting device 4 to carry out the new workpiece 11 from the storage section 38 on the storage section holding table 50. Specifically, the control unit 122 generates a control signal (first carry-out instruction signal) corresponding to the instruction and transmits it to the cutting device 4 from the transmitter 126.

[0116] When the receiver 98 of the cutting device 4 receives the control signal (first unloading instruction signal) from the control unit 12, the control signal is sent to the control device 96. The control device 96 controls the operation of each component according to the control signal (first unloading instruction signal) to unload the new workpiece 11 from the storage section 38.

[0117] When a new workpiece 11 is unloaded from the storage section 38, for example, the control device 96 generates a notification signal (a first unloading completion signal) for notifying that the unloading of the workpiece 11 from the storage section 38 has been completed. The notification signal (the first unloading completion signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12.

[0118] According to such steps, the workpiece 11 stored in the storage unit 8 can be transported to any cutting device 4. In addition, here, the steps when the workpiece 11 is transported from the storage unit 8 to the cutting device 4 are mainly described, but the steps when the workpiece 11 is transported from the cutting device 4 to the storage unit 8 are also the same.

[0119] Specifically, for example, when the control device 96 of the cutting device 4 completes the processing of the workpiece 11, a notification signal (processing completion signal) is generated to notify the completion of the processing. The notification signal (processing completion signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12. When the receiver 124 of the control unit 12 receives the notification signal (processing completion signal) transmitted from the transmitter 100 of the cutting device 4, the notification signal is transmitted to the control unit 122.

[0120] When the control unit 122 confirms the notification signal (processing completion signal) from the cutting device 4, it issues an instruction to the unmanned workpiece transport vehicle 10 to move to the position directly above the opening 16b of the cutting device 4 and transport the storage section 38 to the storage section holding table 50 of the cutting device 4. Specifically, the control unit 122 generates a control signal (third transport instruction signal) corresponding to the instruction and transmits it to the unmanned workpiece transport vehicle 10 from the transmitter 126.

[0121] When the receiver 44 of the unmanned workpiece transport vehicle 10 receives the control signal (third transport instruction signal) from the control unit 12, the control signal is sent to the control device 42. The control device 42 controls the movement of the wheels 41 and the like according to the control signal (third transport instruction signal), so that the unmanned workpiece transport vehicle 10 travels along the route 6.

[0122] When the control device 42 confirms that the control device 42 (unmanned workpiece transport vehicle 10) has moved to the position directly above the opening 16b of the cutting device 4, the control device 42 operates the winch of the lifting mechanism 40 to pull out the wire 40a. As a result, the storage section 38 is lowered so as to pass through the opening 16b, and the storage section 38 can be placed on the storage section holding table 26.

[0123] After the storage section 38 is placed on the storage section holding table 50, the control device 42 generates a notification signal (third transport completion signal) for notifying that the transport of the storage section 38 to the cutting device 4 has been completed. The notification signal (third transport completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0124] When the receiver 124 of the control unit 12 receives the notification signal (third transport completion signal) transmitted from the transmitter 46 of the unmanned workpiece transport vehicle 10, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (third transport completion signal) from the unmanned workpiece transport vehicle 10, it issues an instruction to the cutting device 4 to carry the processed workpiece 11 into the storage section 38 on the storage section holding table 50. Specifically, the control unit 122 generates a control signal (second carry-in instruction signal) corresponding to the instruction and transmits it to the cutting device 4 from the transmitter 126.

[0125] When the receiver 98 of the cutting device 4 receives the control signal (second carry-in instruction signal) from the control unit 12, the control signal is sent to the control device 96. The control device 96 controls the operation of each component according to the control signal (second carry-in instruction signal) and carries the processed workpiece 11 into the storage section 38.

[0126] When the processed workpiece 11 is carried into the storage section 38, the control device 96 generates a notification signal (a second carrying completion signal) for notifying that the carrying of the workpiece 11 into the storage section 38 has been completed. The notification signal (the second carrying completion signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12.

[0127] When the receiver 124 of the control unit 12 receives the notification signal (second carry-in completion signal) transmitted from the transmitter 100 of the cutting device 4, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (second carry-in completion signal) from the cutting device 4, it issues an instruction to the unmanned workpiece transport vehicle 10 to move to the position directly above the opening 16b of the storage unit 8 and transport the storage section 38 to the storage section holding table 26 of the storage unit 8. Specifically, the control unit 122 generates a control signal (fourth transport instruction signal) corresponding to the instruction and transmits it to the unmanned workpiece transport vehicle 10 from the transmitter 126.

[0128] When the receiver 44 of the unmanned workpiece transport vehicle 10 receives the control signal (the fourth transport instruction signal) from the control unit 12, the control signal is sent to the control device 42. The control device 42 raises the storage section 38 according to the control signal (the fourth transport instruction signal) and carries the storage section 38 out of the cutting device 4. Then, the movement of the wheels 41 and the like is controlled to make the unmanned workpiece transport vehicle 10 travel along the route 6.

[0129] When the control device 42 confirms that the unmanned workpiece transport vehicle 10 has moved to the position directly above the opening 16b of the storage unit 8, the control device 42 operates the winch of the lifting mechanism 40 to pull out the wire 40a. As a result, the storage section 38 is lowered so as to pass through the opening 16b, and the storage section 38 can be placed on the storage section holding table 26.

[0130] After the storage section 38 is placed on the storage section holding table 26, the control device 42 generates a notification signal (fourth transfer completion signal) for notifying that the transfer of the storage section 38 to the storage unit 8 has been completed. The notification signal (fourth transfer completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0131] When the receiver 124 of the control unit 12 receives the notification signal (the fourth transport completion signal) transmitted from the transmitter 46 of the unmanned workpiece transport vehicle 10, the notification signal is transmitted to the control unit 122. When the control unit 122 confirms the notification signal (the fourth transport completion signal) from the unmanned workpiece transport vehicle 10, it issues an instruction to the storage unit 8 to carry out the processed workpiece 11 from the storage unit 38 on the storage unit holding table 26. Specifically, the control unit 122 generates a control signal (the second carry-out instruction signal) corresponding to the instruction, and transmits it to the storage unit 8 from the transmitter 126.

[0132] When the receiver 34 of the storage unit 8 receives the control signal (second unloading instruction signal) from the control unit 12, the control signal is sent to the control device 32. The control device 32 controls the operation of the first lifting mechanism, the push-pull arm 22, the pair of guide rails 24, the second lifting mechanism, etc. according to the control signal (second unloading instruction signal), and unloads the processed workpiece 11 from the storage portion 38.

[0133] When the processed workpiece 11 is unloaded from the storage section 38, for example, the control device 32 generates a notification signal (a second unloading completion signal) for notifying that the unloading of the workpiece 11 from the storage section 38 has been completed. The notification signal (the second unloading completion signal) generated by the control device 32 is transmitted from the transmitter 36 to the control unit 12. According to such a procedure, the workpiece 11 processed by the cutting device 4 can be transported to the storage unit 8.

[0134] In addition, the above steps can be arbitrarily changed within the range that the workpiece 11 can be appropriately transported. For example, multiple steps included in the above steps can be performed simultaneously, and the order of the steps can be changed within the range that does not hinder the transport of the workpiece 11. Similarly, any steps can be added, changed, or omitted within the range that does not hinder the transport of the workpiece 11.

[0135] As described above, the conveying system 2 of the present embodiment includes: a line 6, which is arranged within the entire range of a plurality of cutting devices (processing devices) 4 and is fixed to the upper part of the cutting device 4; an unmanned workpiece conveying vehicle (unmanned conveying vehicle) 10, which has a lifting mechanism 40 for suspending from above a storage section 38 having a space (storage space) 38a for storing a workpiece 11 and raising and lowering the storage section 38, and the unmanned workpiece conveying vehicle 10 travels along the line 6 in a state in which the storage section 38 is arranged below the line 6; a storage unit 8, which has a storage section holding platform 26 for holding the storage section 38 when the workpiece 11 is handed over from a box (workpiece storage container) 20 containing the workpiece 11 to the storage section 38.

[0136] Therefore, after transporting the workpiece 11 stored in the cassette 20 to the storage section 38 held on the storage section holding table 26 , the unmanned workpiece transport vehicle 10 travels along the route 6 , so that the workpiece 11 can be transported to each of the plurality of cutting devices 4 .

[0137] In the transport system 2 of the present embodiment, the line 6 is fixed to the upper part of the cutting device 4. Therefore, when designing the transport system 2 including the line 6, it is not necessary to consider the side structure of each cutting device 4. That is, the construction of the transport system becomes easy.

[0138] (Implementation Method 2)

[0139] In this embodiment, a circuit 6 and an unmanned object transport vehicle (unmanned transport vehicle) 10 having structures different from those of the circuit 6 and the unmanned object transport vehicle (unmanned transport vehicle) 10 of Embodiment 1 are described. In addition, the basic structure of the transport system and the like for assembling the circuit 6 and the unmanned object transport vehicle of this embodiment is the same as the transport system 2 and the like of Embodiment 1. Therefore, the same reference numerals are given to the same structures, and detailed description is omitted.

[0140] Fig.12 (A) and Fig.12 (B) is a partial cross-sectional side view showing a structural example of the unmanned workpiece transport vehicle 130 and the like according to this embodiment. Fig.12 (A) and Fig.12 As shown in (B), the unmanned workpiece transport vehicle 130 of this embodiment includes, for example, a rectangular storage unit 138 configured to store one workpiece 11 (and frame 15). The structure of the storage unit 138 may be the same as the storage unit 38 of the first embodiment.

[0141] A travel unit 139 is disposed above the storage unit 138. The travel unit 139 includes a flat plate-shaped base 139a having the same size as the storage unit 138 in a plan view. A lifting mechanism 140 ( Fig.12 Each lifting mechanism 140 includes a wire 140a having a front end connected to the upper surface side of the storage portion 138 and a winch (not shown) fixed to the lower surface side of the base 139a and winding the wire 140a. The lifting mechanism 140 suspends the storage portion 138 and raises and lowers it.

[0142] That is, the traveling part 139 is connected to the storage part 138 from above via the lifting mechanism 140. For example, if the winch is operated in a manner of pulling out the wire 140a, Fig.12As shown in (B) of FIG. 1 , the storage section 138 can be lowered relative to the traveling section 139. In addition, if the winch is operated so as to wind up the wire 140a, the storage section 138 can be raised.

[0143] A rectangular parallelepiped protrusion 139b is disposed on the upper surface side of the base 139a, and a plurality of wheels (travel mechanisms) 141 are provided on the side of the protrusion 139b. Each wheel 141 is connected to a rotation drive source such as an electric motor and rotates. In addition, a terminal (not shown) is provided at a position adjacent to the wheel 141 of the protrusion 139b. Electricity is supplied from the outside to each component of the unmanned workpiece transport vehicle 130 through the terminal. In addition, in the present embodiment, the wheel 141 is provided only on one side of the protrusion 139b in the Y-axis direction.

[0144] A control device (not shown) for controlling the operation of the unmanned workpiece transport vehicle 130 is provided inside the base 139a. The control device is typically composed of a computer including a processing device such as a CPU and a storage device such as a flash memory. The processing device and the like are operated according to the software stored in the storage device, thereby realizing the function of the control device.

[0145] The control device is connected to a receiver (not shown) and a transmitter (not shown). The receiver receives a control signal (control signal) sent from the control unit 12 of the transport system, and the transmitter sends a notification signal (notification signal) to the control unit 12. The control device controls the operation of the unmanned workpiece transport vehicle 130 based on the signal received by the receiver. In addition, the control device sends the required signal to the control unit 12 via the transmitter.

[0146] In addition, a secondary battery, for example, may be connected to each component of the unmanned workpiece transport vehicle 130. In this case, each component of the unmanned workpiece transport vehicle 130 is operated by the power supplied from the secondary battery. The power supply (charging) to the secondary battery is performed by a contact method using a terminal, but it may also be performed by a non-contact (wireless, contactless) method without using the terminal or the like.

[0147] On the other hand, the line 156 of this embodiment includes a plurality of rails 162 made of a material such as metal and connected to each other. Each rail 162 has an upper plate 162a, and the upper plate 162a has a substantially flat upper surface. The upper end of the first side plate 162b is connected to one side end of the upper plate 162a. The lower end of the first side plate 162b is connected to one side end of a lower plate 162c, and the lower plate 162c has a substantially flat upper surface. The upper end of the second side plate 162d is connected to the other side end of the upper plate 162a, and the lower end of the third side plate 162e is connected to the other side end of the lower plate 162c.

[0148] That is, the track 162 includes an upper plate 162a, a first side plate 162b, a lower plate 162c, a second side plate 162d, and a third side plate 162e. The second side plate 162d and the third side plate 162e are arranged with a predetermined gap therebetween so as not to contact each other, and the rotation axis of the wheel 141 is inserted into the gap. The wheel 141 contacts the upper surface of the lower plate 162c, so that the unmanned workpiece transport vehicle 130 travels along the track 162 in a state where the storage section 138 is arranged below the track 162.

[0149] In addition, the line 156 includes a rail holding structure 164 fixed to the upper part of the cutting device 4. The rail holding structure 164 has a plurality of legs 164a. A flat holding portion 164b is connected to the upper end of each leg 164a, and each leg 164a is connected to each other via the holding portion 164b. An adsorption portion 164c is provided at the lower end of each leg 164a. The adsorption portion 164c includes, for example, a plurality of suction cups (not shown), which are adsorbed to the ceiling 92a of the cover 92 of the cutting device 4.

[0150] Therefore, if the suction cup of the adsorption portion 164c is adsorbed on the ceiling 92a of the cover 92, the rail holding structure 164 can be fixed to the upper part of the cutting device 4. The upper plate 162a of the rail 102 is fixed to the lower surface side of the holding portion 164b of the rail holding structure 164. When the rail holding structure 164 is fixed to the upper part of the cutting device 4, the rail 162 is held on the rail holding structure 164 in a state where the lower plate 162c faces the ceiling 92a. In addition, a power supply device (not shown) for supplying power to the unmanned workpiece transport vehicle 10 is connected to the rail 162.

[0151] (Implementation 3)

[0152] In this embodiment, a storage unit having a structure different from the storage unit 8 is described. In addition, the basic structure of the transport system etc. in which the storage unit of this embodiment is assembled is the same as the transport system 2 etc. of Embodiment 1. Therefore, the same reference numerals are attached to the same components, and detailed description is omitted.

[0153] Fig.13 is a side view schematically showing a structural example of the storage unit 308 of this embodiment, Fig.14 308 is a top view schematically showing the internal structure of the storage unit 308. Fig.13 As shown, the storage unit 308 includes a housing 316 for storing various components. Fig.13 In the figure, for the convenience of explanation, only the outline of the housing 316 is shown.

[0154] A box holding table 318 that is raised and lowered by, for example, a first lifting mechanism (not shown) of a ball screw type is provided in the housing 316. A box (workpiece storage container) 20 that can store a plurality of workpieces 11 is placed on the upper surface of the box holding table 318. The box 20 stores, for example, the workpieces 11 that are supported on the frame 15 via the belt 13 as described above.

[0155] like Fig.14 As shown, a first workpiece moving unit 320 for holding and moving the frame 15 is arranged at a first position facing the box holding table 318 (box 20). The first workpiece moving unit 320 includes: a holding portion 322 that holds the frame 15 up and down; and a driving portion 324 that moves the holding portion 322 in a substantially horizontal direction.

[0156] The driving unit 324 has a slit-shaped opening 324a extending substantially horizontally toward the cassette holding table 318 on its upper surface, and the driving unit 324 moves the gripping unit 322 in a first direction along the opening 324a. That is, the gripping unit 322 moves toward or away from the cassette holding table 318.

[0157] Therefore, for example, if the height of the frame 15 stored in the box 20 is made to coincide with the height of the gripping portion 322 by the first lifting mechanism and the gripping portion 322 is brought close to the box holding table 318, the frame 15 in the box 20 can be gripped by the gripping portion 322. In addition, if the gripping portion 322 is moved away from the box holding table 318 after the frame 15 in the box 20 is gripped by the gripping portion 322, the frame 15 can be pulled out of the box 20.

[0158] A first temporary placement table 326 for temporarily placing the frame 15 removed from the box 20 is arranged around the first workpiece moving unit 320. The first temporary placement table 326 includes a pair of guide portions 326a, each of which is long in a first direction, and a base portion 326b, which is long in a second direction perpendicular to the first direction and horizontal to the first direction. The pair of guide portions 326a are connected by the base portion 326b in a manner that the longitudinal directions are parallel to each other. The frame 15 pulled out of the box 20 by the first workpiece moving unit 320 is placed on the pair of guide portions 326a.

[0159] The first temporary stage 326 is supported by a first temporary stage moving unit 328 that moves the first temporary stage 326 in the second direction. The first temporary stage moving unit 328 has a guide rail 330 that is long in the second direction. A moving member 332 is slidably mounted on the guide rail 330.

[0160] The moving member 332 is provided with a nut portion (not shown), and a ball screw (not shown) is screwed on the nut portion and is substantially parallel to the guide rail 330. A pulse motor 334 is connected to one end of the ball screw. When the ball screw is rotated by the pulse motor 334, the moving member 332 moves along the guide rail 330 in the second direction.

[0161] The base 326b of the first temporary table 326 is fixed to the upper part of the moving member 332. Therefore, the first temporary table 326 moves in the second direction together with the moving member 332. In addition, the first temporary table moving part 328 is configured to be able to move the first temporary table 326 between the first position and the second position next to the first position.

[0162] The second workpiece moving unit 336 is disposed at the second position to hold and move the frame 15. That is, the second workpiece moving unit 336 is disposed next to the first workpiece moving unit 320. The second workpiece moving unit 336 has the same structure as the first workpiece moving unit 320.

[0163] Specifically, the second workpiece moving unit 336 includes a gripping portion 338 that grips the frame 15 up and down, and a driving portion 340 that moves the gripping portion 338 in a substantially horizontal direction. A slit-shaped opening 340a that is long in the first direction is formed on the upper surface of the driving portion 340, and the driving portion 340 moves the gripping portion 338 along the opening 340a.

[0164] A second temporary table 342 having the same structure as the first temporary table 326 is arranged around the second workpiece moving unit 336. That is, the second temporary table 342 includes: a pair of guide portions 342a, each of which is long in the first direction; and a base portion 342b, which is long in the second direction perpendicular to the first direction and horizontal. The pair of guide portions 342a are connected by the base portion 342b in a manner that the longitudinal directions thereof are parallel to each other.

[0165] The second temporary stage 342 is supported by a second temporary stage moving unit 344 that moves the second temporary stage 342 in the second direction and the vertical direction. The second temporary stage moving unit 344 has a guide rail 346 that is long in the second direction. A moving member 348 is slidably mounted on the guide rail 346.

[0166] The moving member 348 is provided with a nut portion (not shown), and a ball screw (not shown) is screwed on the nut portion and is substantially parallel to the guide rail 346. A pulse motor 350 is connected to one end of the ball screw. When the ball screw is rotated by the pulse motor 350, the moving member 348 moves along the guide rail 346 in the second direction.

[0167] The base 342b of the second temporary table 342 is fixed to the upper part of the moving member 348 by means of a lifting mechanism 352 composed of a cylinder or the like. Therefore, the second temporary table 342 moves in the second direction together with the moving member 348 and the lifting mechanism 352, and is lifted and lowered by the lifting mechanism 352. In addition, the second temporary table moving part 344 is configured to enable the second temporary table 342 to move between the second position and the first position next to the second position.

[0168] Fig.15 3 is a side view schematically showing a situation in which the first temporary table 326 and the second temporary table 342 are moved in the second direction to exchange the position of the first temporary table 326 and the position of the second temporary table 342. When exchanging the position of the first temporary table 326 and the position of the second temporary table 342, the second temporary table 342 is first raised by the lifting mechanism 352. Specifically, the second temporary table 342 is positioned in a raised position in which the height of the lower end of the second temporary table 342 is higher than the height of the upper end of the first temporary table 326.

[0169] Then, in the state where the second temporary stage 342 is positioned at the raised position, the second temporary stage moving unit 344 moves the second temporary stage 342 to the first position side. Also, at the same time, the first temporary stage moving unit 328 moves the first temporary stage 326 to the second position side. Fig.15 , there is shown a situation where the first temporary stage 326 is moved from the first position to the second position, and the second temporary stage 342 is moved from the second position to the first position.

[0170] After the movement of the first temporary table 326 and the second temporary table 342 is completed, the second temporary table 342 is lowered by the lifting mechanism 352, and the second temporary table 342 is positioned at a reference position where the height of the lower end of the second temporary table 342 is substantially equal to the height of the lower end of the first temporary table 326. In this way, in the storage unit 308, the first temporary table 326 and the second temporary table 342 can be moved in a manner of exchanging between the first position and the second position by the first temporary table moving unit 328 and the second temporary table moving unit 344.

[0171] A storage section holding table 354 is provided at a position facing the second position where the second workpiece moving unit 336 is arranged. The storage section 38 of the unmanned workpiece transport vehicle 10 and the unmanned workpiece transport vehicle 130 (hereinafter referred to as the unmanned workpiece transport vehicle 10, etc.) is placed on the upper surface of the storage section holding table 354. Fig.13As shown, an opening 316b that vertically penetrates the ceiling 316a of the housing 316 is provided in the area directly above the storage unit holding platform 354. The opening 316b is formed in a shape and size that allows the storage unit 38 placed on the storage unit holding platform 354 to pass through.

[0172] A control device 362 for controlling the operation of the storage unit 308 is connected to the first lifting mechanism for lifting the cassette holding table 318, the first workpiece moving unit 320, the first temporary table moving part 328, the second workpiece moving unit 336, the second temporary table moving part 344, the lifting mechanism 352, and the second lifting mechanism for lifting the storage unit holding table 354. The control device 362 is typically composed of a computer including a processing device such as a CPU and a storage device such as a flash memory, and the functions of the control device 362 are realized by operating the processing device and the like according to the software stored in the storage device.

[0173] The control device 362 is also connected to a receiver 364 for receiving a control signal (control signal) sent from the control unit 12 of the transport system, and a transmitter 366 for sending a notification signal (notification signal) to the control unit 12. The control device 362 controls the operation of the storage unit 308 based on the signal received by the receiver 364. In addition, the control device 362 sends a required signal to the control unit 12 via the transmitter 366.

[0174] Next, the operation of the storage unit 308 according to this embodiment will be described. Fig.16 (A) Fig.16 (B) Fig.17 (A) and Fig.17 (B) is a top view schematically showing an example of the operation of the storage unit 308. In addition, in the present embodiment, the operation is described for the case where the first temporary stage 326 is positioned at the first position and the second temporary stage 342 is positioned at the second position, but the operation is the same for the case where the first temporary stage 326 is positioned at the second position and the second temporary stage 342 is positioned at the first position.

[0175] For example, the unmanned workpiece transport vehicle 10 or the like places the storage section 38 or the like storing the workpiece 11 (frame 15) after processing on the storage section holding table 354. Also, the cassette 20 storing the workpiece 11 (frame 15) before processing is placed on the cassette holding table 318 in advance.

[0176] Then, if Fig.16As shown in (A), the gripping portion 322 is brought close to the box 20 on the box holding table 318, and the frame 15 stored in the box 20 is gripped by the gripping portion 322. At the same time, the gripping portion 338 is brought close to the storage portion 38 on the storage portion holding table 354, and the frame 15 stored in the storage portion 38 is gripped by the gripping portion 338.

[0177] After the frame 15 inside the box 20 is held by the holding portion 322, as shown in FIG. Fig.16 As shown in (B), the holding portion 322 is moved away from the box holding platform 318. Similarly, after the frame 15 inside the storage portion 38 and the like is held by the holding portion 338, as shown in FIG. Fig.16 As shown in (B), the gripping portion 338 is moved away from the storage portion holding table 354. Thus, the workpiece 11 before processing is pulled out from the cassette 20 to the first temporary stage 326, and the workpiece 11 after processing is pulled out from the storage portion 38 to the second temporary stage 342.

[0178] Then, if Fig.17 As shown in (A), the first temporary stage 326 and the second temporary stage 342 are moved in a manner of switching between the first position and the second position. That is, the second temporary stage 342 is raised by the lifting mechanism 352 and positioned at the raised position. Furthermore, the second temporary stage 342 is moved to the first position side along the second direction.

[0179] In addition, at the same time, the first temporary table 326 is moved along the second direction to the second position side. After the movement of the first temporary table 326 and the second temporary table 342 is completed, the second temporary table 342 is lowered by the lifting mechanism 352 and positioned at the reference position. As a result, the first temporary table 326 is positioned at the second position facing the storage unit holding table 354, and the second temporary table 342 is positioned at the first position facing the box holding table 318.

[0180] Then, if Fig.17 As shown in (B), the frame 15 on the first temporary stage 326 is grasped by the grasping portion 338, and the grasping portion 338 is brought close to the storage portion 38 on the storage portion holding table 354. Thus, the frame 15 on the first temporary stage 326 supporting the workpiece 11 before processing is stored in the storage portion 38 on the storage portion holding table 354.

[0181] At the same time, the frame 15 on the second temporary stage 342 is grasped by the grasping portion 322, and the grasping portion 338 is brought close to the cassette 20 on the cassette holding table 318. Thus, the frame 15 on the second temporary stage 342 supporting the processed workpiece 11 is stored in the cassette 20 on the cassette holding table 318.

[0182] After the unmanned workpiece transport vehicle 10 or the like stores the frame 15 on the first temporary placement table 326 in the storage section 38 or the like on the storage section holding table 354, the storage section 38 or the like is transported from the storage section holding table 354. In the above manner, the workpiece 11 after processing can be transported from the unmanned workpiece transport vehicle 10 or the like to the storage unit 308, and the workpiece 11 before processing can be transported from the storage unit 308 to the unmanned workpiece transport vehicle 10 or the like.

[0183] In addition, the first temporary table 326 and the second temporary table 342 have the same function, and the frame 15 unloaded from the box 20 can be temporarily placed on any of the first temporary table 326 and the second temporary table 342. For example, when the second temporary table 342 is positioned at the first position, the frame 15 unloaded from the box 20 can be temporarily placed on the second temporary table 342.

[0184] In addition, the first workpiece moving unit 320 moves the workpiece 11 between the first temporary table 326 or the second temporary table 342 positioned at the first position and the box holding table 318 (box 20). Similarly, the second workpiece moving unit 336 moves the workpiece 11 between the second temporary table 342 or the first temporary table 326 positioned at the second position and the storage section holding table 354 (storage section 38, etc.).

[0185] In addition, the present invention is not limited to the above-mentioned embodiments, and various modifications can be made and implemented. For example, the unmanned workpiece transport vehicle 10 and the like can be allowed to travel in only one direction of the line 6 (so-called one-way traffic), or the unmanned workpiece transport vehicle 10 and the like can be allowed to travel in both directions of the line 6. When only one direction of travel is allowed, the line 6 for the outbound route and the line 6 for the return route can be provided on the cutting device (processing device) 4.

[0186] In addition, the structures, methods, and the like of the above-described embodiments and modifications may be appropriately modified and implemented without departing from the scope of the purpose of the present invention.

Claims

1. A transport system for transporting workpieces to a plurality of processing devices respectively, characterized in that: The handling system includes: A circuit, which is fixed to the upper part of the processing device throughout the entire range of the plurality of processing devices; An unmanned guided vehicle travels along the route, and comprises a storage portion, a travel portion, a travel mechanism, a lifting mechanism, and a receiver, wherein the storage portion has a storage space for storing the workpiece, the travel portion is connected to the storage portion from above, the travel mechanism is arranged on the travel portion, the lifting mechanism is arranged on the travel portion, the storage portion is suspended from above to be lifted and lowered, and the receiver of the unmanned guided vehicle receives a control signal; a storage unit having a storage holding platform and a receiver, wherein the storage holding platform holds the storage portion when the workpiece is transferred from a workpiece storage device storing the workpiece to the storage portion of the unmanned guided vehicle, and the receiver of the storage unit receives a control signal; and A control unit having a transmitter, a receiver, and a control signal generating unit, wherein the transmitter sends a control signal to the processing device, the unmanned guided vehicle, and the storage unit, the receiver of the control unit receives a notification signal sent from the processing device, and the control signal generating unit generates a control signal sent from the transmitter, The control signal generating unit of the control unit generates a control signal to be transmitted from the transmitter of the control unit according to the notification signal received by the receiver of the control unit. The transmitter of the control unit sends the control signal generated by the control signal generating unit of the control unit to the processing device, the unmanned guided vehicle and the storage unit. The unmanned guided vehicle travels along the route according to the control signal received by the receiver of the unmanned guided vehicle, The line is made up of multiple tracks connected together. The automated guided vehicle travels along the track in a state in which the storage unit is arranged below the track.

2. The transport system according to claim 1, characterized in that: The line has a foot, and the foot has an adsorption portion for adsorbing the processing device, and the line is fixed to the processing device through the adsorption portion.

Images