A graphite boat automatic disassembly and assembly system and automatic disassembly and assembly method
By designing an automated graphite boat disassembly and assembly system, the automatic disassembly and loading of graphite clamps is achieved using vision modules and robotic arms, which solves the problem of silicon wafer placement caused by the smaller size of graphite boat clamps in the existing technology, and reduces the problem of silicon wafer placement due to the reduction of the size of graphite boat clamps in the existing technology. The cost of manual operation and health hazards are improved, and the production efficiency and accuracy are improved.
Patent Information
- Application Number
- CN202011439820.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-12-10
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2040-12-10
AI Technical Summary
In the prior art, after multiple coatings of graphite boats, the size of the jagged groove becomes smaller, resulting in the silicon wafer being unable to be placed, and the manual disassembly and assembly process is cumbersome and costly, the workers are not accurate in operation and are health hazards.
Design a graphite boat automatic disassembly and assembly system, including graphite boat positioning mechanism, clamp point disassembly mechanism, clamp point loading mechanism and clamp point pressing mechanism, and use visual modules and mechanical arms to realize automatic disassembly and assembly of clamp points. Precise control of operations through transmission mechanism and control system.
The fully automated disassembly and assembly of graphite clamp points is realized, which improves accuracy and efficiency, reduces labor costs, reduces graphite boat page damage rate, and avoids health hazards for workers.
Smart Images

Figure CN112518663B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of graphite boat disassembly and assembly, and in particular to an automatic graphite boat disassembly and assembly system and an automatic disassembly and assembly method. Background Art
[0002] As the cost of photovoltaic power generation continues to decrease, solar power generation will have a broader market space. As a carrier for anti-reflection film coating of solar cells, the structure and size of the graphite boat directly affect the conversion efficiency and production efficiency of silicon wafers. The automatic loading and unloading machine of the graphite boat places the uncoated silicon wafers on the card point of the graphite boat page through the robot suction cup, and a fixed number of silicon wafers can be placed on each boat. After placing all the silicon wafers, the graphite boat is driven into the PECVD coating machine through the belt line. The silicon wafers on the graphite boat undergo a specific chemical reaction under high temperature conditions inside the PECVD coating machine to achieve the coating process on the surface of the silicon wafers. After the silicon wafers are coated, the graphite boat exits the PECVD and is then transported to the automatic loading and unloading machine through the belt line. The robot of the automatic loading and unloading machine unloads the finished silicon wafers from the graphite boat.
[0003] like Figure 1-2 As shown, it is a structural diagram of a graphite boat in the prior art, wherein 1 is a graphite boat leaf, 2 is a ceramic rod, 3 is a graphite clamping point, 4 is a graphite nut, and 5 is a graphite boat base. The graphite boat leaf 1 is a rectangular sheet with several square holes in the middle. The graphite clamping point 3 will be installed on the graphite boat leaf 1. The graphite clamping point 3 is mainly used to hold the silicon wafer to ensure that the silicon wafer is close to the graphite boat leaf 1. The graphite boat leaves 1 are separated by ceramic sleeves, and finally all the graphite boat leaves 1 are fixed by the ceramic rod 2. The two ends of the ceramic rod 2 are then installed with graphite nuts 4. The assembled graphite boat is composed of a large number of graphite boat leaves that are placed vertically and parallel to each other, and the upper and lower widths of the graphite boat are consistent, the spacing between the graphite boat leaves is fixed and equal, and the graphite boat leaves are perpendicular to the ground. After the graphite boat goes in and out of PECVD many times, the surface of the graphite boat, the graphite boat pages, the graphite card points, and the grooves between the protrusions at the end of the graphite card points and the graphite boat pages will change in thickness and size due to multiple coatings. The size of the groove between the protrusions at the end of the graphite card points and the graphite boat pages will become smaller due to multiple coatings. When the size of the groove is reduced to a certain extent, the uncoated silicon wafer can no longer be placed in this groove, causing the silicon wafer to fall out of the graphite boat. At the same time, because the diameter of the groove at the graphite card point is very small, after repeated placement and removal of silicon wafers, the diameter of this groove will be worn, and in severe cases, the graphite card point will break from the groove.
[0004] Therefore, after multiple coatings, the graphite boats must be taken out from the PECVD or automatic loading and unloading machine regularly, and put into a special cleaning device to clean the excess coating on the surface. At the same time, the graphite boats must be manually disassembled, and all the card points on each graphite boat page must be replaced. Since there are a large number of graphite card points on each graphite boat page (for example, an eight-slot graphite boat page has 24 graphite card points on a graphite boat page), all the graphite boat pages on a graphite boat need to be manually disassembled, and then the card points are manually installed and pressed into the card points with a special pressure fixture. Therefore, this situation requires a large number of operators to specialize in card point replacement work, which brings great labor costs to production.
[0005] Currently, the industry is manually disassembling and assembling checkpoints. A factory needs seven or eight people to specialize in this work. At the same time, because graphite is fragile, manual operation often leads to inaccurate assembly and damage to the graphite boat pages. In addition, graphite dust has extremely strong pollution characteristics and is extremely harmful to the workers' lungs, making it difficult to recruit workers in this industry.
[0006] Therefore, the industry urgently needs to develop an efficient, fully automatic, and precise disassembly and assembly system and assembly method to automatically disassemble and assemble the graphite boat, replace manual assembly, improve the degree of automation in production, reduce the damage to the graphite boat caused by this process, save production costs, and avoid the health hazards of this production process to workers. Summary of the invention
[0007] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a graphite boat automatic disassembly and assembly system and an automatic disassembly and assembly method.
[0008] To achieve the above objectives, the present invention is implemented through the following technical solutions: The present invention provides a graphite boat automatic disassembly and assembly system, comprising: a frame, a conveying track is provided on the frame, and the frame is installed with:
[0009] A graphite boat positioning mechanism is used to lock and fix the graphite boat pages, and the graphite boat pages are driven by the transmission mechanism to slide along the conveying track;
[0010] The card point removal mechanism is used to locate and remove the old graphite card points on the graphite boat pages conveyed by the graphite boat positioning mechanism;
[0011] A card point loading mechanism is located at a downstream station of the card point removal mechanism, and is used to load new graphite card points into the holes of the graphite boat;
[0012] A card point pressing mechanism is located at a downstream station of the card point loading mechanism, and presses the new graphite card points loaded into the holes of the graphite boat into the graphite boat pages;
[0013] A transmission mechanism, driving the graphite boat positioning mechanism to move along the conveying track;
[0014] The control mechanism is respectively connected to the graphite boat positioning mechanism, the card point disassembly mechanism, the card point installation mechanism, the card point pressing mechanism and the transmission mechanism for communication.
[0015] Furthermore, the graphite boat positioning mechanism includes: a positioning plate and a plurality of positioning cylinders, the positioning plate is connected to the power output end of the transmission mechanism, a plurality of sliders are provided at the bottom of the positioning plate, the plurality of sliders cooperate with the conveying track so that the positioning plate slides along the conveying track; the plurality of positioning cylinders are provided on both sides of the positioning plate to press and fix the graphite boat pages placed on the positioning plate.
[0016] Furthermore, the graphite boat positioning mechanism also includes a plurality of guide blocks, and the plurality of guide blocks are installed on both sides of the positioning plate, wherein any side of the positioning plate is provided with a plurality of pairs of mounting holes along the width direction, and a guide block is fixed to the positioning plate through any pair of mounting holes. Furthermore, the card point disassembly mechanism includes a first visual module, a first pressing fixture, a first bracket and a second bracket, the first bracket having a first axis in the Y-axis direction, and the first visual module is installed on the first axis; the second bracket includes a second axis in the X-axis direction and a third axis in the Y-axis direction, the second axis is provided with a first slider, the third axis is provided with a first slide rail, the slider of the second axis slides along the slide rail of the third axis, and the first pressing fixture is slidably installed on the second axis.
[0017] Furthermore, the first pressing fixture comprises: a pressing cylinder and a pressing rod, the pressing rod is installed on the piston end of the pressing cylinder, and the pressing cylinder is slidably installed on the second shaft through a vertical plate.
[0018] Furthermore, the card point loading mechanism includes: a second vision module, a card point grabbing fixture and a multi-joint robotic arm, the card point grabbing fixture and the second vision module are both installed on the multi-joint robotic arm, and the card point grabbing fixture and the second vision module both move along the X-axis, Y-axis and Z-axis with the multi-joint robotic arm.
[0019] Furthermore, the first visual module and the second visual module both include: a CCD camera, a lens, a light source and a light source bracket, one end of the light source bracket is fixed to an external device, the CCD camera is fixed on the upper part of the other end, the lens is installed below the CCD camera, a horizontal plate is provided at the lower part of the other end of the light source bracket, a through hole is provided in the middle of the horizontal plate, the lens passes through the through hole, and the light source is provided around the through hole of the horizontal plate.
[0020] Furthermore, the card point grabbing fixture includes: a gripper cylinder and a clamping part, the gripper cylinder is an air claw, and the clamping part is two clamping plates, and the two clamping plates are arranged on two piston ends of the air claw.
[0021] Furthermore, the card point pressing mechanism includes: a third visual module, a second pressing jig, a third bracket and a fourth bracket. The structure of the third visual module is the same as that of the first visual module and the second visual module. The second pressing jig is the same as that of the first pressing jig. The third bracket and the fourth bracket are the same as the first bracket and the second bracket, respectively.
[0022] The present invention also provides a method for automatically disassembling and assembling a graphite boat, comprising the following steps:
[0023] Step a, placing the graphite boat page into the graphite boat positioning mechanism, a number of positioning cylinders press and position the graphite boat page, and the transmission mechanism drives the graphite boat positioning mechanism to run on the conveying track;
[0024] Step b, the graphite boat positioning mechanism drives the first slot of the graphite boat page to run below the card point disassembly mechanism, the transmission mechanism stops, the first visual module locates the card point position of the first slot in the graphite boat page, and the control mechanism controls the first pressing fixture to move above each graphite card point position, presses down the old graphite card point, and realizes the disassembly of the old graphite card point in the first slot;
[0025] Step c, the transmission mechanism is restarted to transport the first slot of the graphite boat sheet to the bottom of the card point loading mechanism, the transmission mechanism stops, the second visual module locates the positions of each card point hole on the first slot, and the control mechanism controls the card point grabbing fixture to grab the new graphite card point and put the new graphite card point into each card point hole in turn;
[0026] Step d, the transmission mechanism restarts to transport the first slot of the graphite boat page to the bottom of the card point pressing mechanism, the transmission mechanism stops, the third visual module locates the position of the new graphite card point in the first slot, the control mechanism controls the second pressing fixture to move to the top of each new graphite card point position, and presses the new graphite card point down to achieve the pressing of the new graphite card point.
[0027] By adopting the above scheme, the present invention provides a graphite boat automatic disassembly and assembly system and automatic disassembly and assembly method, which has the following beneficial effects:
[0028] (1) The disassembly and pressing of graphite card points are fully automated, completely replacing manual operations, reducing labor costs, and avoiding harm to workers' health.
[0029] (2) The three visual modules take precise photos and locate the card points before disassembly, installation and pressing, and use the control mechanism to control the corresponding mechanism to the accurate position for operation, which greatly improves the assembly accuracy and can reach 0.01mm.
[0030] (3) Thoroughly solving the pain points of the industry, automated operation greatly reduces the damage rate of graphite boat pages, saves production resources, reduces assembly time, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 It is a three-dimensional schematic diagram of a graphite boat in the prior art.
[0032] Figure 2 It is a top view of a graphite boat in the prior art.
[0033] Figure 3 It is a front schematic diagram of the automatic disassembly and assembly system of the graphite boat of the present invention.
[0034] Figure 4 It is a three-dimensional diagram of the automatic disassembly and assembly system of the graphite boat of the present invention.
[0035] The markings in the accompanying drawings are:
[0036] 10-frame, 11-metal plate, 12-conveying track, 20-graphite boat positioning mechanism, 21-positioning plate, 22-positioning cylinder, 23-slider, 24-guide block, 25-mounting hole, 30-card point disassembly mechanism, 31-first visual module, 32-first pressing fixture, 33-first bracket, 34-second bracket, 301-first axis, 302-second axis, 303-third axis, 311-CCD camera, 312-lens, 313-light source And 314-light source bracket, 315-horizontal plate, 321-pressing cylinder, 322-pressing rod, 323-vertical plate, 40-card point loading mechanism, 41-card point grabbing fixture, 42-second visual module, 43-multi-joint robotic arm, 411-gripper cylinder, 412-clamping part, 50-pressing mechanism, 51-third visual module, 52-second pressing fixture, 53-third bracket, 54-fourth bracket, 60-graphite boat page, 341-XY axis motor. DETAILED DESCRIPTION
[0037] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0038] The present invention actively responds to the concept of Smart Manufacturing 2025 advocated by the country, adopts the concept of digital factory, greatly upgrades traditional equipment, realizes automated operation of disassembly and assembly of graphite card points, and truly realizes dark factory. The present invention specifically provides a graphite boat automatic disassembly and assembly system, which uses a graphite boat positioning mechanism to transport and position the graphite boat pages, a card point disassembly mechanism to locate the card points of the graphite boat pages and press each card point down for disassembly, a card point loading mechanism to place new card points into the graphite boat holes, and a card point pressing mechanism to press down the card points in the graphite boat holes to complete the installation. The card point disassembly mechanism, the card point loading mechanism and the card point pressing mechanism are all provided with visual modules to locate the graphite boat card points and the card point holes, so that the disassembly and assembly accuracy is greatly improved, and the problem of high damage rate of graphite boat pages during manual disassembly and assembly is solved. Please refer to Figure 3-4 The graphite boat automatic disassembly and assembly system includes: a frame 10, the upper surface of the frame 10 is a metal plate 11, the metal plate 11 is provided with a conveying track 12, the metal plate 11 is installed with: a graphite boat positioning mechanism 20, a card point disassembly mechanism 30, a card point loading mechanism 40 and a card point pressing mechanism 50, the system also includes a transmission mechanism (not shown) and a control mechanism (not shown), wherein the transmission mechanism includes a servo motor for providing power to drive the graphite boat positioning mechanism 20 to move on the conveying track 12, the transmission mechanism includes but is not limited to belt and screw module transmission, as long as it is used to convert the rotational motion of the servo motor into linear motion, thereby driving the graphite boat positioning mechanism 20 to move along the conveying track, the requirements can be met. In addition, the control mechanism runs on an industrial computer and is used to communicate with the graphite boat positioning mechanism 20, the card point disassembly mechanism 30, the card point loading mechanism 40, the card point pressing mechanism 50 and the transmission mechanism so as to control the speed and direction of their respective motors. At the same time, the control mechanism receives the position information of the graphite card points or graphite holes from the visual modules of the card point disassembly mechanism 30, the card point loading mechanism 40 and the card point pressing mechanism 50, and sends the position information to the corresponding disassembly and assembly fixture after calculation, and at the same time controls the action of the respective drive motors in the card point disassembly mechanism 30, the card point loading mechanism 40 and the card point pressing mechanism 50, thereby realizing the precise disassembly and assembly of the graphite card points.
[0039] Specifically, Figure 3As shown, the graphite boat positioning mechanism 20 includes: a positioning plate 21 and a plurality of positioning cylinders 22, and the positioning plate 21 can be customized according to the shape and length of the graphite boat page 60. The positioning plate 21 is connected to the power output end of the transmission mechanism, and a plurality of sliders 23 are provided at the bottom of the positioning plate 21, and the plurality of sliders 23 cooperate with the conveying track 12, so that the positioning plate 21 slides along the conveying track 12 under the action of the transmission mechanism; the plurality of positioning cylinders 22 are provided on both sides of the positioning plate 21 to press and fix the graphite boat page 60 placed on the positioning plate 21, wherein the positioning cylinder 22 is a rotating clamping cylinder, and its piston end is connected to a vertically installed fixing rod, and when the fixing rod moves downward with the piston, the bottom of the fixing rod is pressed on the graphite boat page 60 to fix the graphite boat page 60, and preferably, the positioning cylinder 22 is provided with a plurality of them, which are evenly distributed on both sides of the positioning plate 21, so as to evenly position the graphite boat page 60. In addition, the graphite boat positioning mechanism 20 further includes a plurality of guide blocks 24, which are also installed on both sides of the positioning plate 21. When the graphite boat leaf 60 is placed on the graphite boat positioning mechanism 20, the graphite boat leaf 60 can automatically align with the positioning plate 21 during the falling process. Among them, a plurality of pairs of mounting holes 25 are provided on any side of the positioning plate 21 along the width direction, and a guide block 24 is fixed to the positioning plate 21 through any pair of mounting holes 25. The installation position of the guide block 24 can be adjusted according to the width of the graphite boat leaf 60, so that the positioning plate 12 is suitable for graphite boat leaves 60 of different widths, thereby improving the versatility of the equipment.
[0040] Furthermore, the card point disassembly mechanism 30 includes a first visual module 31, a first pressing fixture 32, a first bracket 33 and a second bracket 34. The first bracket 33 has a first axis 301 in the Y-axis direction, and the first visual module 31 is installed on the first axis 301. The second bracket 34 includes a second axis 302 in the X-axis direction and a third axis 303 in the Y-axis direction. A slider (not marked) is provided on the second axis 302, and a slide rail (not marked) is provided on the third axis 303. The slider of the second axis 302 slides along the slide rail of the third axis 303. The first pressing fixture 32 is slidably installed on the second axis 302, so that the first pressing fixture 32 can move along the Y-axis and the X-axis to disassemble corresponding to the position of each graphite card point. Preferably, the second bracket 34 is also provided with an XY axis motor 341, and the XY motor 341 receives the control information of the control mechanism and drives the first pressing fixture 32 to move along the X or Y axis of the second bracket 34 to reach the accurate position of each graphite card point. The first visual module 31 includes: a CCD camera 311, a lens 312, a light source 313 and a light source bracket 314, one end of the light source bracket 314 is movably connected to the first shaft 301, and the upper part of the other end is fixed with the CCD camera 311, and the lens 312 is installed below the CCD camera 311. The lower part of the other end of the light source bracket 314 is provided with a horizontal plate 315, and a through hole is provided in the middle of the horizontal plate 315. The lens 312 takes a photo of the graphite boat page 60 below and uploads it to the control mechanism through the through hole. The control mechanism is provided with an image analysis module, which performs calculation and analysis on the photos to obtain the position coordinates of each old graphite card point on the first slot of the graphite boat page 60. And the position coordinates are sent to the XY axis motor 341, and the XY axis motor 341 controls the first pressing fixture 32 to run to the position coordinates of each card point, performs a pressing operation, and realizes the removal of the old graphite card point in the first groove of the graphite boat page. The light source 313 is provided on the periphery of the through hole of the horizontal plate 315, and the light source 313 is used to illuminate the graphite boat page 60 below to ensure that the imaging of the graphite boat page is clear and visible. Specifically, the first pressing fixture 32 includes: a pressing cylinder 321 and a pressing fixture 322, and the pressing fixture 322 is a pressing rod, which is driven by the pressing cylinder 321 to press down on the graphite card point and press the graphite card point out of the card point hole. Specifically, the pressing fixture 322 is installed on the piston end of the pressing cylinder 321, and the pressing cylinder 321 is slidably installed on the second shaft 302 through a vertical plate 323. The pressing cylinder 321 and the second axis 302 are also respectively connected to a driver (not shown), and the driver is used to receive the position coordinates of each graphite stuck point and control the pressing cylinder 321 to move along the second axis 302 or control the second axis 302 to move along the third axis 303 to reach each graphite stuck point position.When the pressing cylinder 321 reaches a graphite stuck point, the piston of the pressing cylinder 321 descends, driving the pressing fixture 322 to descend, and the pressing fixture 322 contacts the graphite stuck point. The piston of the pressing cylinder 321 continues to descend until the graphite stuck point is pressed down from the stuck point hole and detached from the graphite boat page 60. Then the piston of the pressing cylinder 321 rises, driving the pressing fixture 322 to rise. The pressing cylinder 321 moves to the next graphite stuck point under the action of the XY-axis motor 341, and the above operation is repeated until all the graphite stuck points in the first groove of the graphite boat page are disassembled.
[0041] The card point loading mechanism 40 is arranged below the assembly line of the card point disassembly mechanism 30. Specifically, the card point loading mechanism 40 includes: a second vision module 42, a card point grabbing fixture 41 and a multi-joint robotic arm 43. The card point grabbing fixture 41 is installed on the multi-joint robotic arm 43. The second vision module 42 has the same structure as the first vision module 31. The second vision module 42 is fixed to the multi-joint robotic arm 43 through its light source bracket. The card point grabbing fixture 41 and the second vision module 42 both move along the X-axis, Y-axis and Z-axis with the multi-joint robotic arm 43. The second visual module 42 takes a photo of the card point hole position of the old graphite card point removed from the first slot of the graphite boat page and uploads it to the control mechanism. The control mechanism calculates and analyzes the photo to obtain the position coordinates of each card point hole position on the first slot, and sends the position coordinates to the multi-joint mechanical arm 43. The multi-joint mechanical arm 43 uses the card point grasping fixture 41 to grasp the new graphite card point and then runs to the position coordinates of each card point hole position, and puts the new graphite card point into each of the card point holes to realize the loading of the new graphite card point in the first slot of the graphite boat page. Preferably, the card point grasping fixture 41 includes: a gripper cylinder 411 and a clamping part 412, the gripper cylinder 411 is an air claw, and the clamping part 412 is two splints, which are arranged at the two piston ends of the air claw. The two splints realize the opening and closing operation under the action of the air claw piston, grasp the new graphite card point and put it into the card point hole position. Until all the clamping point holes in the first groove of the graphite boat page are loaded with new graphite clamping points.
[0042] The card point pressing mechanism 50 is arranged below the assembly line of the card point loading mechanism 40. Preferably, the card point pressing mechanism 50 is the same mechanical structure as the card point removal mechanism 20, and its working principle is also the same as the card point removal mechanism 20. The card point removal mechanism 20 is to press the old graphite card point out of the graphite boat page, and the card point pressing mechanism 50 is to press the new graphite card point into the graphite boat page. The card point pressing mechanism 50 includes: a third visual module 51, a second pressing fixture 52, a third bracket 53 and a fourth bracket 54. The structure of the third visual module 51 is the same as that of the first visual module 31 and the second visual module 42. The second pressing fixture 52 is the same as that of the first pressing fixture 32. The third bracket 53 and the fourth bracket 54 are the same as the first bracket 33 and the second bracket 34, respectively. The third visual module 51 takes a photo of the loaded new graphite card point and uploads it to the control mechanism, which calculates and analyzes the photo to obtain the position coordinates of the new graphite card point on the first groove of the graphite boat page. The position coordinates are sent to the XY axis motor of the second pressing fixture 52, and the XY axis motor of the second pressing fixture 52 drives the second pressing fixture 52 to move above each new graphite card point position, and presses the new graphite card point into the card point hole position to achieve the pressing of the new graphite card point until all the new graphite card points in the first groove of the graphite boat page are pressed into the graphite boat page. The pressing cylinders of the first pressing fixture 32 and the second pressing fixture 52 have different settings, such as different piston descending heights can be set, so that in the pressing operation, the pressure rod of the first pressing fixture 32 can press down the old graphite card point to make it detach from the graphite boat page, and the pressure rod of the second pressing fixture 52 can properly press the new graphite card point into the card point hole position without pressing it out.
[0043] In addition, it is worth mentioning that when the next process is carried out on the first groove of the graphite boat page, the previous process can be carried out on the second groove of the graphite boat page at the same time. For example, when the old graphite card point in the first groove has been dismantled and enters the card point loading mechanism, the second groove also enters under the card point disassembly mechanism along with the graphite boat positioning mechanism. When the card point loading process is being carried out in the first groove, the card point disassembly process is also being carried out in the second groove. In this way, multiple processes are carried out simultaneously, which greatly improves the work efficiency of graphite card point disassembly and assembly.
[0044] Corresponding to the above-mentioned graphite boat automatic disassembly and assembly system, the present invention also provides a graphite boat automatic disassembly and assembly method, which comprises the following steps:
[0045] Step a, placing the graphite boat into the graphite boat positioning mechanism 20, the fixing rods of the positioning cylinders 22 press down to compact and position the graphite boat, the transmission mechanism is started, and the graphite boat positioning mechanism 20 is driven to run on the conveying track 12;
[0046] Step b, when the graphite boat positioning mechanism 20 drives the first slot of the graphite boat page to run below the card point disassembly mechanism 30, the transmission mechanism stops, the control mechanism controls the card point disassembly mechanism 30 to run, the first visual module 31 takes a photo and sends the photo to the control mechanism, the image analysis module inside the control mechanism calculates and analyzes the photo, obtains the position coordinates of each old graphite card point on the first slot of the graphite boat page, and sends the position coordinates to the XY axis motor 341 of the first pressing fixture 32, the XY axis motor 341 drives the first pressing fixture 32 to move above the position of each old graphite card point, presses down the old card point, and realizes the disassembly of the old graphite card point in the first slot of the graphite boat page;
[0047] Step c, after the disassembly of the old graphite card point of the first slot is completed, the transmission mechanism is restarted to transport the first slot of the graphite boat page to the bottom of the card point loading mechanism 40, the transmission mechanism stops, and the second visual module 42 takes a photo of the card point hole position of the old graphite card point in the first slot of the graphite boat page after disassembly and uploads it to the control mechanism, the control mechanism calculates and analyzes the photo to obtain the position coordinates of each card point hole position on the first slot. And send the position coordinates to the multi-joint mechanical arm 43, the multi-joint mechanical arm 43 uses the card point grabbing fixture 41 to grab the new graphite card point and then runs to the position coordinates of each card point hole position, puts the new graphite card point into each of the card point holes, and realizes the loading of the new graphite card point in the first slot of the graphite boat page. While this step is being performed, the second slot of the graphite boat page arrives below the card point removal mechanism 30, and the card point removal mechanism 30 repeats step b to remove the old graphite card point of the second boat slot.
[0048] Step d, after the new graphite card point is loaded into the first slot, the transmission mechanism restarts to transport the first slot of the graphite boat page to the bottom of the card point pressing mechanism 50, the transmission mechanism stops, and the third visual module 51 takes a photo of the loaded new graphite card point and uploads it to the control mechanism, the control mechanism calculates and analyzes the photo to obtain the position coordinates of the new graphite card point on the first slot of the graphite boat page. And send the position coordinates to the XY axis motor of the second pressing fixture 52, the XY axis motor of the second pressing fixture 52 drives the second pressing fixture 52 to move above each new graphite card point position, and press the new graphite card point into the card point hole position, to achieve the pressing of each new graphite card point, until all new graphite card points in the first slot of the graphite boat page are pressed into the graphite boat page. While this step is being carried out, the third slot of the graphite boat page reaches under the card point disassembly mechanism 30, and the card point disassembly mechanism 30 repeats step b to disassemble the old graphite card point of the third boat slot; at the same time, the second slot of the graphite boat page reaches under the card point loading mechanism 40, and the card point loading mechanism 40 repeats step c to load a new graphite card point into the second boat slot.
[0049] The same process is repeated until all the boat slots on the graphite boat page 60 have been disassembled of the old card points and installed with new card points. Then the assembled graphite boat page is taken out, and another graphite boat page is disassembled and assembled.
[0050] In summary, the present invention provides a graphite boat automatic disassembly and assembly system and automatic disassembly and assembly method, which transmits the graphite boat page through the graphite boat positioning mechanism, and integrates the card point disassembly mechanism, the card point loading mechanism and the card point pressing mechanism on an assembly line, and sequentially disassembles the old graphite card points of each slot on the transmitted graphite boat page and installs the new graphite card points, completely replacing the manual disassembly and assembly of the graphite card points, reducing labor costs, and avoiding harm to the workers' bodies. The present invention thoroughly solves the industry pain points, has a high degree of automation, greatly reduces the damage rate of the graphite boat page, saves production resources, reduces disassembly and assembly time, and improves work efficiency.
[0051] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A graphite boat automatic disassembly and assembly system, characterized in that: include: A frame, wherein a conveying track is provided on the frame, and the frame is equipped with: A graphite boat positioning mechanism is used to lock and fix the graphite boat pages, and the graphite boat pages are driven by the transmission mechanism to slide along the conveying track; The card point removal mechanism is used to locate and remove the old graphite card points on the graphite boat pages conveyed by the graphite boat positioning mechanism; A card point loading mechanism is located at a downstream station of the card point removal mechanism, and is used to load new graphite card points into the holes of the graphite boat; A card point pressing mechanism is located at a downstream station of the card point loading mechanism, and presses the new graphite card points loaded into the holes of the graphite boat into the graphite boat pages; A transmission mechanism, driving the graphite boat positioning mechanism to move along the conveying track; A control mechanism is respectively connected to the graphite boat positioning mechanism, the card point disassembly mechanism, the card point installation mechanism, the card point pressing mechanism and the transmission mechanism for communication; The graphite boat positioning mechanism comprises: a positioning plate and a plurality of positioning cylinders, the positioning plate is connected to the power output end of the transmission mechanism, a plurality of sliders are provided at the bottom of the positioning plate, the plurality of sliders cooperate with the conveying track, so that the positioning plate slides along the conveying track; the plurality of positioning cylinders are provided on both sides of the positioning plate to press and fix the graphite boat pages placed on the positioning plate; The card point disassembly mechanism includes a first visual module, a first pressing fixture, a first bracket and a second bracket, the first bracket has a first axis in the Y-axis direction, and the first visual module is installed on the first axis; the second bracket includes a second axis in the X-axis direction and a third axis in the Y-axis direction, a slider is provided on the second axis, a slide rail is provided on the third axis, the slider of the second axis slides along the slide rail of the third axis, and the first pressing fixture is slidably installed on the second axis; The card point loading mechanism includes: a second visual module, a card point grabbing fixture and a multi-joint robotic arm, the card point grabbing fixture and the second visual module are both installed on the multi-joint robotic arm, and the card point grabbing fixture and the second visual module both move along the X-axis, Y-axis and Z-axis with the multi-joint robotic arm; The card point pressing mechanism includes: a third visual module, a second pressing jig, a third bracket and a fourth bracket. The structure of the third visual module is the same as that of the first visual module and the second visual module. The second pressing jig is the same as that of the first pressing jig. The third bracket and the fourth bracket are the same as the first bracket and the second bracket, respectively.
2. The graphite boat automatic disassembly and assembly system according to claim 1, characterized in that: The graphite boat positioning mechanism also includes a plurality of guide blocks, which are installed on both sides of the positioning plate, wherein a plurality of pairs of mounting holes are provided on either side of the positioning plate along the width direction, and a guide block is fixed to the positioning plate through a pair of mounting holes according to the width of the graphite boat page.
3. The graphite boat automatic disassembly and assembly system according to claim 1, characterized in that: The first pressing fixture comprises: a pressing cylinder and a pressing rod, wherein the pressing rod is mounted on the piston end of the pressing cylinder, and the pressing cylinder is slidably mounted on the second shaft through a vertical plate.
4. The graphite boat automatic disassembly and assembly system according to claim 1, characterized in that: The first visual module and the second visual module both include: a CCD camera, a lens, a light source and a light source bracket, wherein one end of the light source bracket is fixed to an external device, the CCD camera is fixed on the upper part of the other end, the lens is installed below the CCD camera, a horizontal plate is provided at the lower part of the other end of the light source bracket, a through hole is provided in the middle of the horizontal plate, the lens passes through the through hole, and the light source is provided around the through hole of the horizontal plate.
5. The graphite boat automatic disassembly and assembly system according to claim 4, characterized in that: The card point grabbing fixture comprises: a gripper cylinder and a clamping part, the gripper cylinder is an air claw, the clamping part is two clamping plates, and the two clamping plates are arranged on the two piston ends of the air claw.
6. A method for automatically disassembling and assembling a graphite boat, characterized in that: The method is applied to the graphite boat automatic disassembly and assembly system according to any one of claims 1 to 5, and the method comprises the following steps: Step a, placing the graphite boat page into the graphite boat positioning mechanism, a number of positioning cylinders press and position the graphite boat page, and the transmission mechanism drives the graphite boat positioning mechanism to run on the conveying track; Step b, the graphite boat positioning mechanism drives the first slot of the graphite boat page to run below the card point disassembly mechanism, the transmission mechanism stops, the first visual module locates the card point position of the first slot in the graphite boat page, and the control mechanism controls the first pressing fixture to move above each graphite card point position, presses down the old graphite card point, and realizes the disassembly of the old graphite card point in the first slot; Step c, the transmission mechanism is restarted to transport the first slot of the graphite boat sheet to the bottom of the card point loading mechanism, the transmission mechanism stops, the second visual module locates the positions of each card point hole on the first slot, and the control mechanism controls the card point grabbing fixture to grab the new graphite card point and put the new graphite card point into each card point hole in turn; Step d, the transmission mechanism restarts to transport the first slot of the graphite boat page to the bottom of the card point pressing mechanism, the transmission mechanism stops, the third visual module locates the position of the new graphite card point in the first slot, the control mechanism controls the second pressing fixture to move to the top of each new graphite card point position, and presses the new graphite card point down to achieve the pressing of the new graphite card point.
