Reactor

Abstract

The present invention discloses a reactor, including a base, a furnace body, a reaction tube, a first power module and a heat dissipation module; the furnace body is connected to the base; the reaction tube is connected to the base and is used to place materials to be processed; the first power module is used to drive the furnace body and the reaction tube to have relative movement, so that the reaction tube located in the furnace body is separated from the furnace body; the heat dissipation module is used to dissipate heat for the separated reaction tube. In the above reactor, the first power module is used to drive the furnace body and the reaction tube to have relative movement, and when the furnace body is separated from the reaction tube, the heat dissipation module can dissipate heat for the reaction tube separately, so that the material (such as a wafer) can stay in the reaction tube for rapid heat dissipation to avoid being contaminated by impurities in the air, and the furnace body can be kept in a heated state, which can reduce the overall heat dissipation time, reduce or save the reheating time of the furnace body, and help improve efficiency and reduce energy consumption.

Description

Technical Field

[0001] The invention relates to the field of wafer manufacturing, in particular to a reaction furnace. Background Art

[0002] With the rapid development of the domestic semiconductor industry, the demand for semiconductor-related equipment is also increasing. In the medium and low temperature heat treatment process of wafers, the high-temperature wafers after heat treatment cannot be directly exposed to the air for cooling to prevent contamination by impurities in the air. They need to be cooled in a vacuum clean environment such as a reaction tube before they can be taken out. At present, if the wafers after heat treatment are to be naturally cooled to room temperature in the reaction tube, the entire reactor needs to be cooled before cooling. When the process is to be carried out next time, the heating furnace needs to be heated again, which takes a long time, greatly affecting production capacity and increasing energy consumption. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a reactor that can improve efficiency and reduce energy consumption.

[0004] The reaction furnace according to the embodiment of the present invention comprises

[0005] Pedestal;

[0006] A furnace body connected to the base;

[0007] A reaction tube, connected to the base, for placing materials to be processed;

[0008] A first power module is used to drive the furnace body and the reaction tube to move relative to each other, so that the reaction tube located in the furnace body is separated from the furnace body;

[0009] The heat dissipation module is used to dissipate heat from the reaction tube after separation.

[0010] The reactor according to the embodiment of the present invention has at least the following beneficial effects:

[0011] The first power module is used to drive the relative movement between the furnace body and the reaction tube, so that the reaction tube carrying the material to be processed enters the furnace body for processing, or the reaction tube in the furnace body is separated from the furnace body. When the furnace body is separated from the reaction tube, the heat dissipation module can dissipate heat for the reaction tube separately, so that the material (such as a wafer) can stay in the reaction tube for rapid heat dissipation to avoid being contaminated by impurities in the air, and the furnace body can be kept in a heated state, which can reduce the overall heat dissipation time, reduce or save the reheating time of the furnace body, and help improve efficiency and reduce energy consumption.

[0012] According to some embodiments of the present invention, a reaction tube fixing module is further included, which is used to fix one end of the reaction tube, and the first power module is connected to the furnace body to drive the furnace body to move.

[0013] According to some embodiments of the present invention, the reaction tube fixing module comprises:

[0014] A sleeve connector, connected to the base, the sleeve connector is sleeved on the outside of the reaction tube, and there is a gap between the sleeve connector and the reaction tube;

[0015] At least two flexible support members are sleeved on the outside of the reaction tube, located in the gap and respectively in contact with the reaction tube and the sleeve member, and each of the flexible support members is distributed along the axial direction of the reaction tube.

[0016] According to some embodiments of the present invention, the sleeve member has a first annular groove, and the flexible support member is disposed in the first annular groove;

[0017] The reaction furnace further includes a first connecting member, which is sleeved on the outer side of the reaction tube and connected to the sleeve member to restrict the flexible support member within the corresponding first annular groove.

[0018] According to some embodiments of the present invention, the first connecting member has an extrusion portion extending into the first annular groove, and along the extending direction of the extrusion portion, the distance between the groove wall of the first annular groove and the reaction tube gradually decreases.

[0019] According to some embodiments of the present invention, the reaction tube fixing module further includes a height adjusting member, which is connected to the sleeve member, supported below the reaction tube, and capable of moving in a vertical direction.

[0020] According to some embodiments of the present invention, the height adjustment member includes a mounting portion and an adjustment portion, the mounting portion is connected to the socket, the adjustment portion is connected to the mounting portion, and has a concave arc surface in contact with the reaction tube, and the hardness of the adjustment portion is less than the hardness of the mounting portion.

[0021] According to some embodiments of the present invention, the sleeve has a first heat dissipation cavity, and a first inlet and a first outlet connected to the first heat dissipation cavity, and the first inlet is used to allow a heat dissipation medium to dissipate heat for each of the flexible support members.

[0022] According to some embodiments of the present invention, the reaction tube fixing module further includes a flexible heat conductive member, which is filled in the gap and is in thermal contact with the reaction tube and the sleeve, respectively.

[0023] According to some embodiments of the present invention, the socket member includes a socket portion socketed on the reaction tube, and a protrusion connected to the socket portion, the protrusion extends beyond the open end of the reaction tube along the axial direction of the reaction tube, and the end face of the protrusion has a second annular groove, and the reaction furnace also includes a first sealing ring, which is located in the second annular groove.

[0024] According to some embodiments of the present invention, the protrusion has a second heat dissipation cavity, and a second inlet and a second outlet communicated with the second heat dissipation cavity, and the second inlet is used for introducing a heat dissipation medium to dissipate heat for the first sealing ring.

[0025] According to some embodiments of the present invention, the flexible support member facing the open end of the reaction tube is a second sealing ring.

[0026] According to some embodiments of the present invention, a furnace door is further included, wherein the furnace door is movable relative to the furnace body to close an opening of the furnace body after the reaction tube is separated from the furnace body.

[0027] According to some embodiments of the present invention, a movement direction of the furnace door is perpendicular to a direction of relative movement between the furnace body and the reaction tube.

[0028] According to some embodiments of the present invention, the heat dissipation module includes a fan and an air duct, the fan is connected to the air duct, and the air outlet of the air duct faces the reaction tube separated from the furnace body.

[0029] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0031] Figure 1 It is a three-dimensional schematic diagram of a reaction furnace in a separated state according to an embodiment of the present invention;

[0032] Figure 2 for Figure 1 A three-dimensional schematic diagram of the middle reactor in a docking state;

[0033] Figure 3 for Figure 1 A three-dimensional schematic diagram of the connection between the middle furnace body and the first power module;

[0034] Figure 4 for Figure 1 A three-dimensional schematic diagram of the connection between the middle furnace door and the second power module;

[0035] Figure 5 for Figure 1 A three-dimensional schematic diagram of the connection between the middle reaction tube fixing module and the reaction tube;

[0036] Figure 6 for Figure 5 A cross-sectional view of

[0037] Figure 7 for Figure 6 A magnified schematic diagram of the middle A area;

[0038] Figure 8 for Figure 5 A three-dimensional schematic diagram of the connection between the reaction tube fixing module and the reaction tube in another direction, with the sleeve part hidden;

[0039] Fig. 9 for Figure 5 A three-dimensional schematic diagram of the middle socket;

[0040] Fig.10 for Fig. 9 Cross-sectional view of the middle socket. DETAILED DESCRIPTION

[0041] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0042] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0043] In the description of the present invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0044] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific content of the technical solution.

[0045] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0046] Reference Figure 1 , Figure 2 The reactor of the embodiment of the present invention includes a base (not shown), a furnace body 800, a reaction tube 100, a first power module 900 and a heat dissipation module 1000, wherein the base is used as a bearing structure, and the furnace body 800, the reaction tube 100, the first power module 900 and the heat dissipation module 1000 are directly or indirectly connected to the base. The reaction tube 100 is used to place the material to be processed. The first power module 900 is used to drive the furnace body 800 and the reaction tube 100 to move relative to each other, so that the reaction tube 100 carrying the material to be processed enters the furnace body 800 for processing (such as Figure 2 ), or the reaction tube 100 in the furnace body 800 is separated from the furnace body 800 (as shown in Figure 1 When the furnace body 800 is separated from the reaction tube 100, the heat dissipation module 1000 can dissipate heat for the reaction tube 100 alone, so that the material (such as the wafer) can stay in the reaction tube 100 for rapid heat dissipation to avoid being contaminated by impurities in the air, and the furnace body 800 can be kept in a heated state, which can reduce the overall heat dissipation time, reduce or save the reheating time of the furnace body 800, and help improve efficiency and reduce energy consumption.

[0047] It should be noted that the “relative motion” referred to in the present application includes the furnace body 800 being stationary and the reaction tube 100 being in motion, the reaction tube 100 being stationary and the furnace body 800 being in motion, or both the furnace body 800 and the reaction tube 100 being in motion.

[0048] In the above scheme, the reactor further includes a reaction tube fixing module, which is used to fix one end of the reaction tube 100. The first power module 900 is connected to the furnace body 800 and is used to drive the furnace body 800 to move. That is, in this embodiment, the reaction tube 100 remains stationary and the furnace body 800 moves. Since the reaction tube 100 is usually made of quartz or other easily broken materials, keeping the reaction tube 100 fixed can prevent the reaction tube 100 from breaking due to inertia or collision with the fixing module during movement. The reaction tube fixing module is fixed to one end of the reaction tube 100 (such as the open end shown in the figure) to form a cantilever fixing structure. The furnace body 800 is located at the other end of the reaction tube 100, so that most of the reaction tube 100 can enter the furnace body 800.

[0049] As an improvement of the above scheme, the reactor also includes a furnace door 1100, which can be driven by the motor-screw drive mechanism shown in the figure to move relative to the furnace body 800, so as to close the opening of the furnace body 800 after the reaction tube 100 is separated from the furnace body 800. On the one hand, it can prevent the hot air in the furnace body 800 from flowing out and affecting the heat dissipation of the reaction tube 100. On the other hand, it can achieve heat preservation of the furnace body 800 and reduce or save the re-heating time of the furnace body 800.

[0050] It should be noted that in the above solution, the movement direction of the furnace door 1100 is perpendicular to the direction of relative movement of the furnace body 800 and the reaction tube 100. For example, if the furnace body 800 and the reaction tube 100 can move relative to each other in the front-to-back direction shown in the figure, the furnace door 1100 can move in the left-to-right direction shown in the figure. Figure 1 When the opening of the furnace body 800 needs to be closed, the furnace door 1100 is opened from Figure 2 In the state shown, the furnace door 1100 moves to the right, and fits with the opening end of the furnace body 800 in coordination with the forward and backward movement of the furnace body 800; when the opening of the furnace body 800 needs to be opened, the furnace door 1100 moves from Figure 1 The state shown moves to the right until it is outside the movement path of the furnace body 800 .

[0051] In the above solution, the heat dissipation module 1000 includes a fan and a duct 1010, which are not shown. The fan is connected to the duct 1010, and the air outlet of the duct 1010 faces the reaction tube 100 separated from the furnace body 800, and is specifically located above the reaction tube 100. When the furnace body 800 moves to expose the reaction tube 100, the fan is started to extract the hot air around the reaction tube 100, thereby accelerating the heat dissipation of the reaction tube 100. It should be noted that the heat dissipation module 1000 can also be combined with or independently adopt other solutions, such as a refrigeration device that can deliver cold air to the reaction tube 100.

[0052] Reference Figure 3 In the above scheme, the first power module 900 driving the furnace body 800 and the second power module 1200 driving the furnace door 1100 can both adopt a motor-screw drive mechanism. Taking the first power module 900 as an example, it includes a slide rail 910, a motor 920, a screw 930, a screw nut and a slider 940 not shown. The slide rail 910 and the screw 930 are both arranged in the front-to-back direction. The driving shaft of the motor 920 is connected to the screw 930, the furnace body 800 is connected to the screw nut, and is connected to the slide rail 910 through the slider 940. With the start of the motor 920, the furnace body 800 can accurately move in the front-to-back direction. Figure 1 , Figure 2 The second power module 1200 is located on one side of the slide rail 910 , and the slide rail and the screw rod included therein are perpendicular to the slide rail 910 and the screw rod 930 of the first power module 900 .

[0053] Reference Figure 4 In the above solution, the furnace door 1100 includes a connecting portion 1110 and a blocking portion 1120. The connecting portion 1110 may be a plate-shaped structure as shown in the figure, which is connected to the power output member of the second power module 1200 through a connecting plate, a connecting rod, etc. The blocking portion 1120 is located on the side of the connecting portion 1110 facing the furnace body 800, and may be a circular protruding structure suitable for the opening shape of the furnace body 800. The blocking portion 1120 can extend into the opening of the furnace body 800 to ensure a sealing effect.

[0054] Reference Figure 5 , Figure 6 The reaction tube fixing module includes a sleeve 200 and at least two flexible support members 300. The sleeve 200 is used to fix the reaction tube 100 and the base. The flexible support member 300 is located between the reaction tube 100 and the sleeve 200, so that the sleeve 200 can provide support for the reaction tube 100 without directly contacting the reaction tube 100, thereby avoiding the problem of the reaction tube 100 being broken due to hard contact with metal parts.

[0055] The reaction tube 100 may be a known structure, such as a round tube as shown in the figure, one end of which (such as the front end shown in the figure) is an open end 110, having an opening 120 for wafers to enter and exit the reaction chamber, and the other end is closed. In the improvement of the present invention, the open end 110 is supported by the sleeve 200 as a fixed end, and the other end of the reaction tube 100 (such as the rear end shown in the figure) is suspended as a suspended end, thereby forming a cantilever fixed structure, which is convenient for the docking and separation of the furnace body 800 and the reaction tube 100. It should be noted that the "open end", "fixed end" and "suspended end" referred to in the present invention are all used to illustrate the approximate positional relationship and cannot be understood as a limitation on a specific range.

[0056] The sleeve 200 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, which is sleeved on the outside of the reaction tube 100, and there is a gap 101 between the sleeve 200 and the reaction tube 100, so that the sleeve 200 is not in direct contact with the reaction tube 100. Taking the figure as an example, the sleeve 200 is sleeved on the outside of the open end 110. The sleeve 200 may be a metal component, such as a metal flange, so that it has sufficient strength to be connected to an external component.

[0057] The flexible support member 300 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, which is sleeved on the outside of the reaction tube 100, located in the gap 101 between the sleeve member 200 and the reaction tube 100, and in contact with the reaction tube 100 and the sleeve member 200 respectively, so that the sleeve member 200 supports the reaction tube 100 through the flexible support member 300. Since the hardness of the flexible support member 300 is relatively small, it will deform to a certain extent when subjected to force, thereby preventing the reaction tube 100 from breaking. The reactor of this embodiment includes at least two flexible support members 300, each of which is distributed along the axial direction of the reaction tube 100 to provide multiple support positions, so as to achieve stable support of the sleeve member 200 to the reaction tube 100. The flexible support member 300 may be made of a known flexible material, such as rubber, silicone, etc.

[0058] In the above-mentioned reaction tube fixing module, the socket 200 supports the reaction tube 100 through at least two flexible support members 300 distributed along the axial direction of the reaction tube 100. While realizing the cantilever fixation of the reaction tube 100, it can avoid the reaction tube 100 from directly contacting with the hard socket 200 and causing rupture. At least two flexible support members 300 can provide multiple supporting positions, which can balance the force on the reaction tube 100, reduce the pressure at the supporting position of the reaction tube 100, and realize the stable placement of the reaction tube 100.

[0059] Reference Figure 7 , the sleeve 200 has a first annular groove 210, the first annular groove 210 has at least a first opening disposed toward the reaction tube 100, and the flexible support 300 is located in the first annular groove 210, and can contact the reaction tube 100 through the first opening. Taking the figure as an example, the reaction furnace includes two flexible support members 300, and correspondingly, the sleeve 200 has two first annular grooves 210, which are respectively located at both ends of the sleeve portion 290 of the sleeve 200 covering the reaction tube 100, and each first annular groove 210 forms a second opening on the corresponding end surface of the sleeve portion 290.

[0060] The reaction tube fixing module also includes a first connecting member 400, which can be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, such as a collar, which is sleeved on the outside of the reaction tube 100 and connected to the sleeve 200 to restrict the flexible support member 300 in the corresponding first annular groove 210 to prevent the flexible support member 300 from falling out. Specifically, the end surface of the sleeve 290 has a first threaded hole 291, and the first connecting member 400 has an axial first through hole 410. The threaded fastener passes through the first through hole 410 and is screwed into the first threaded hole 291 to achieve fixed connection between the first connecting member 400 and the sleeve 200.

[0061] Reference Figure 7 , the first connecting member 400 can squeeze the corresponding flexible support member 300, so that the flexible support member 300 stretches along the radial direction of the reaction tube 100, and the flexible support member 300 is in close contact with the sleeve 200 and the reaction tube 100. Specifically, the first connecting member 400 has an extrusion portion 420 extending into the first annular groove 210, and along the extending direction of the extrusion portion 420, the distance between the groove wall of the first annular groove 210 and the reaction tube 100 gradually decreases. Figure 7 Taking the first annular groove 210 and the first connecting member 400 located at the front end of the sleeve portion 290 as an example, along the direction from front to back, the distance between the groove wall of the first annular groove 210 and the reaction tube 100 gradually decreases. When the extrusion portion 420 extends in, it pushes the flexible support member 300 to contact the inclined groove wall, thereby limiting the flexible support member 300.

[0062] It should be noted that the first connecting member 400 may not be provided with an extrusion portion 420 that can extend into the first annular groove 210. The axial dimension of the flexible support member 300 is larger than the axial dimension of the first annular groove 210, so that part of the flexible support member 300 is located outside the first annular groove 210. In this way, the flexible support member 300 can also be extruded when the first connecting member 400 is connected to the socket 200.

[0063] As an improvement of the above reaction tube fixing module, the reaction tube fixing module also includes a flexible heat conductive member not shown, which is filled in the gap 101. Taking the figure as an example, it is filled between two flexible support members 300 and contacts the reaction tube 100. The contact area between the flexible heat conductive member and the reaction tube 100 can be greater than the contact area between the flexible support member 300 and the reaction tube 100, so as to play a supporting and buffering role, and further avoid the reaction tube 100 from breaking. In some embodiments, the flexible heat conductive member can be a heat dissipating silica gel, which contacts the reaction tube 100 and the socket 200 respectively. The socket 200 can be made of a material with good thermal conductivity. The heat of the reaction tube 100 can be transferred to the socket 200 through the flexible heat conductive member, and the socket 200 then dissipates heat in an active or passive manner, so that the reaction tube 100 can be quickly cooled.

[0064] Reference Figure 8 As an improvement of the above reaction tube fixing module, the reaction tube fixing module also includes a height adjustment member 600, which is connected to the sleeve 200, supported below the reaction tube 100, and can move in the vertical direction to fine-tune the reaction tube 100 to ensure the horizontal placement of the reaction tube 100. Specifically, the height adjustment member 600 includes a mounting portion 610 and an adjustment portion 620, the mounting portion 610 is connected to the sleeve 200 through a structure such as a threaded fastener not shown, and the adjustment portion 620 is connected to the top of the mounting portion 610, and has a concave arc surface 621 in contact with the reaction tube 100. During adjustment, rotating the threaded fastener can drive the mounting portion 610 and the adjustment portion 620 to move up and down. The hardness of the adjusting part 620 is less than that of the mounting part 610 . For example, the mounting part 610 may be a metal component to ensure the mounting strength, and the adjusting part 620 may be made of materials such as polytetrafluoroethylene, or rubber, silicone, etc. to avoid direct contact between hard metal components and the reaction tube 100 .

[0065] It should be noted that a not-shown avoidance hole is provided on the socket 200 at a position corresponding to the adjusting portion 620 , and the adjusting portion 620 can pass through the avoidance hole to contact the reaction tube 100 .

[0066] Reference Figure 6 , Fig. 9 , Fig.10As an improvement of the above reaction tube fixing module, the sleeve 200 has a first heat dissipation cavity 220, and a first inlet 230 and a first outlet 240 connected to the first heat dissipation cavity 220. The heat dissipation medium (such as cooling water) can flow into the first heat dissipation cavity 220 through the first inlet 230, and then flow out from the first outlet 240 to dissipate heat for the sleeve 200, and then cool the flexible support member 300 in contact with the sleeve 200, so as to prevent the flexible support member 300 from aging rapidly due to high temperature. In addition, combined with the above-mentioned thermal conductive silica gel, cooling the sleeve 200 can also achieve heat dissipation of the reaction tube 100. In order to improve the cooling effect, the flexible support member 300 can be arranged adjacent to the first heat dissipation cavity 220. Taking the figure as an example, the first heat dissipation cavity 220 is axially located between the two flexible support members 300, which can achieve heat dissipation of the main part of the sleeve 200 (such as the sleeve portion 290).

[0067] Reference Figure 6 , Fig. 9 , Fig.10 , one end of the sleeve 200 extends beyond the open end 110 of the reaction tube 100 along the axial direction of the reaction tube 100, that is, the sleeve 200 includes a sleeve portion 290 covering the reaction tube 100, and a protrusion 2100 connected to the sleeve portion 290 and protruding from the reaction tube 100, and the end surface of the protrusion 2100 has a second annular groove 250, and the reactor also includes a first sealing ring, which is located in the second annular groove 250 and can cooperate with the external sealing cover to isolate the inner cavity of the protrusion 2100 from the outside. In addition, referring to Figure 7 The flexible support member 300 facing the open end 110 of the reaction tube 100 is a second sealing ring, which can realize a sealed connection between the socket 200 and the reaction tube 100. Combined with the sealed connection between the above-mentioned cover and the protrusion 2100, the inner cavity of the reaction tube 100 can be in a closed state, which is convenient for forming a vacuum environment.

[0068] It should be noted that when the sleeve 200 is not needed to achieve sealing, the sleeve 200 may not be provided with the protrusion 2100 .

[0069] Reference Fig. 9 , Fig.10 The socket 200 has a second heat dissipation cavity 260, and a second inlet 270 and a second outlet 280 connected to the second heat dissipation cavity 260. A heat dissipation medium (such as cooling water) can be introduced into the second heat dissipation cavity 260 through the second inlet 270, and then flow out from the second outlet 280 to dissipate heat for the socket 200, thereby cooling the first sealing ring in contact with the socket 200, and preventing the first sealing ring from aging rapidly due to high temperature. The second heat dissipation cavity 260 is arranged close to the protrusion 2100 to ensure the cooling effect on the first sealing ring.

[0070] Reference Figure 6 , Figure 7 The reaction tube fixing module also includes a positioning member 500 and a second connecting member 700. The positioning member 500 is connected to the sleeve member 200 through the second connecting member 700, and contacts the open end 110 of the reaction tube 100 for axial positioning to prevent axial displacement caused by the internal and external pressure difference after the reaction tube 100 is evacuated. The hardness of the positioning member 500 is less than that of the sleeve member 200. For example, the sleeve member 200 can be a metal component to ensure the installation strength. The positioning member 500 can be made of materials such as polytetrafluoroethylene, or made of materials such as rubber and silicone to avoid direct contact between hard metal components and the reaction tube 100.

[0071] The second connecting member 700 may be a sleeve structure adapted to the cross-sectional shape of the reaction tube 100, such as a collar, and its end surface facing the open end 110 has a third annular groove 710, and the positioning member 500 has a clamping portion 510 extending toward the end surface of the second connecting member 700, and the clamping portion 510 is clamped in the third annular groove 710 to achieve the connection between the positioning member 500 and the second connecting member 700. The end surface of the sleeve portion 290 has a second threaded hole (not shown), and the second threaded hole and the first threaded hole 291 are distributed along the circumference of the sleeve portion 290. The second connecting member 700 also has a second through hole 720, which is staggered from the first through hole 410, so that the second connecting member 700 can also be connected to the end surface of the sleeve portion 290 by a threaded fastener.

[0072] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. A reactor, characterized in that: include Pedestal; A furnace body connected to the base; A reaction tube, connected to the base, for placing materials to be processed; A first power module is used to drive the furnace body and the reaction tube to move relative to each other, so that the reaction tube located in the furnace body is separated from the furnace body; A heat dissipation module, used for dissipating heat from the reaction tube after separation; It also includes a reaction tube fixing module for fixing one end of the reaction tube, the first power module is connected to the furnace body and is used to drive the furnace body to move, and the reaction tube fixing module includes: A sleeve connector, connected to the base, the sleeve connector is sleeved on the outside of the reaction tube, and there is a gap between the sleeve connector and the reaction tube, and the sleeve connector is a metal component; At least two flexible support members, the flexible support members are sleeved on the outside of the reaction tube, located in the gap and respectively in contact with the reaction tube and the sleeve member, and the flexible support members are distributed along the axial direction of the reaction tube; The sleeve member has a first annular groove, and the flexible support member is arranged in the first annular groove; The reaction furnace further includes a first connecting member, which is sleeved on the outer side of the reaction tube and connected to the sleeve member to restrict the flexible support member in the corresponding first annular groove; The first connecting member has an extrusion portion extending into the first annular groove. Along the extending direction of the extrusion portion, the distance between the groove wall of the first annular groove and the reaction tube gradually decreases. The first connecting member can extrude the flexible support member so that the flexible support member extends along the radial direction of the reaction tube.

2. The reaction furnace according to claim 1, characterized in that: The reaction tube fixing module also includes a height adjusting member, which is connected to the sleeve member, supported below the reaction tube, and can move in a vertical direction.

3. The reaction furnace according to claim 2, characterized in that: The height adjustment member includes a mounting portion and an adjustment portion, the mounting portion is connected to the sleeve, the adjustment portion is connected to the mounting portion, and has an inner concave arc surface in contact with the reaction tube, and the hardness of the adjustment portion is less than that of the mounting portion.

4. The reaction furnace according to claim 1, characterized in that: The sleeve member has a first heat dissipation cavity, and a first inlet and a first outlet communicated with the first heat dissipation cavity. The first inlet is used for introducing a heat dissipation medium to dissipate heat for each of the flexible support members.

5. The reaction furnace according to claim 4, characterized in that: The reaction tube fixing module further comprises a flexible heat conductive member, which is filled in the gap and is in heat conductive contact with the reaction tube and the sleeve member respectively.

6. The reaction furnace according to claim 1, characterized in that: The sleeve connector includes a sleeve connector portion sleeved on the reaction tube, and a protrusion connected to the sleeve connector portion, the protrusion extends beyond the open end of the reaction tube along the axial direction of the reaction tube, and the end surface of the protrusion has a second annular groove. The reaction furnace also includes a first sealing ring, which is located in the second annular groove.

7. The reaction furnace according to claim 6, characterized in that: The protrusion has a second heat dissipation cavity, and a second inlet and a second outlet communicated with the second heat dissipation cavity. The second inlet is used for introducing a heat dissipation medium to dissipate heat for the first sealing ring.

8. The reaction furnace according to claim 6, characterized in that: The flexible support member facing the open end of the reaction tube is a second sealing ring.

9. The reaction furnace according to claim 1, characterized in that: A furnace door is also included, and the furnace door can move relative to the furnace body to close the opening of the furnace body after the reaction tube is separated from the furnace body.

10. The reaction furnace according to claim 9, characterized in that: The movement direction of the furnace door is perpendicular to the relative movement direction of the furnace body and the reaction tube.

11. The reaction furnace according to claim 1, characterized in that: The heat dissipation module comprises a fan and an air duct, wherein the fan is connected to the air duct, and an air outlet of the air duct faces the reaction tube separated from the furnace body.

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