Substrate processing equipment

Abstract

The present invention provides a substrate processing device that can easily confirm whether it is constructed according to the specifications required by the user. The judgment unit (89) compares the machine information from the camera (77) with the detection position information from the arm control unit (97) to judge whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the camera (77) with the user specification information in the user specification information storage unit (87) to judge whether the machine information is consistent with the user specification information. When the judgment result is inconsistent, the notification unit (91) issues an alarm. Therefore, the correctness of the construction can be confirmed based on whether the notification unit (91) issues an alarm, so it is easy to confirm whether it is constructed according to the user's specifications.

Description

Technical Field

[0001] The present invention relates to a substrate processing device for processing substrates such as semiconductor wafers, substrates for liquid crystal displays or organic EL (Electroluminescence) display devices, glass substrates for masks, substrates for optical disks, substrates for magnetic disks, ceramic substrates, and substrates for solar cells (hereinafter referred to as substrates for short). Background Art

[0002] Conventionally, as such an apparatus, there is an apparatus including a loading block, a processing block, a transfer block, and an exposure device (for example, refer to Patent Document 1).

[0003] The loading block has four carrier loading sections, which are used to load carriers containing substrates before processing or empty carriers containing substrates after processing. In addition, the loading block is equipped with two indexing robots at positions opposite to the carrier loading sections. The two indexing robots have transfer arms, which take out substrates from carriers placed on the carrier loading sections or place substrates in empty carriers placed on the carrier loading sections. A passage is arranged between the two indexing robots, which is used to transfer substrates to and from the processing block.

[0004] The processing block consists of 6 blocks. Each block has a coating unit for coating a photoresist liquid on a substrate or a developing unit for developing a developing process, and a processing unit such as a heating unit for heating a substrate. When viewed from above, each block has a central robot in the center, a liquid processing unit on one side of the transport path of the arm of the central robot, and a processing unit such as a heating unit on the other side.

[0005] The transfer block is responsible for transporting the substrate between the processing block and the exposure device.

[0006] Generally speaking, the composition of the processing block varies according to different user requirements of the substrate processing apparatus. That is, the type or number of processing units assembled in the processing block, the assembly position of the processing units in the processing block, etc. generally vary according to the type of processing the substrate processing apparatus is used for or the required level of output, etc.

[0007] [Background Technology Literature]

[0008] [Patent Document]

[0009] [Patent Document 1]

[0010] Japanese Patent Laid-Open No. 2013-69117 Summary of the invention

[0011] [Problems to be solved by the invention]

[0012] However, in the case of conventional examples having such a configuration, there are the following problems.

[0013] That is, in the conventional apparatus, the operator visually compares the user's specification sheet with the types and positions of each processing unit assembled in the processing block to confirm whether the processing block is assembled according to the user's specifications. Therefore, the problem is that it is very complicated to confirm that the configuration is in accordance with the user's requirements.

[0014] The present invention has been made in view of such circumstances, and an object of the present invention is to provide a substrate processing apparatus that can easily confirm whether or not the apparatus is configured to meet the specifications required by a user.

[0015] [Technical means to solve the problem]

[0016] In order to achieve the above object, the present invention adopts the following configuration.

[0017] That is to say, the invention of technical solution 1 is a substrate processing device for processing substrates, and is characterized in that it comprises: a loading block, which has a carrier loading portion for loading and storing a carrier for the substrate, and a dividing robot, which takes out the substrate from the carrier of the carrier loading portion and stores the substrate in the carrier of the carrier loading portion; a processing block, which has a plurality of processing units for processing the substrate, and a central robot for transferring the substrate between the loading block and the processing units; a reading mechanism, which reads machine information, and the machine information at least includes category information indicating the processing category of the processing units, and position information indicating the position where the processing units are installed in the processing block; an output mechanism, which outputs The position of the reading mechanism within the processing block when the reading mechanism reads the machine information is output as detection position information; a storage unit stores user specification information, the user specification information is equivalent to the machine information corresponding to the user's specification; a judgment unit compares the machine information from the reading mechanism with the detection position information from the output mechanism to judge whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the reading mechanism with the user specification information of the storage unit to judge whether the machine information is consistent with the user specification information; and a notification unit issues an alarm when the judgment result of the judgment unit is inconsistent.

[0018] [Function and Effect] According to the invention of technical solution 1, the judging mechanism compares the machine information from the reading mechanism with the detection position information from the output mechanism to judge whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the reading mechanism with the user specification information of the storage unit to judge whether the machine information is consistent with the user specification information. When the judgment result is inconsistent, the notification mechanism issues an alarm. Therefore, the correctness of the configuration can be confirmed by whether the notification mechanism issues an alarm, so it can be easily confirmed whether the configuration is in accordance with the specifications required by the user.

[0019] In addition, in the present invention, it is preferred that the machine information is recorded on a label, and the label is attached to the central robot side of each processing unit (technical solution 2).

[0020] Since the label recording the machine information including the category information and the position information is attached to the central robot side of each processing unit, there is space on the label side. Therefore, the machine information on the label attached to each processing unit can be easily read by the reading mechanism.

[0021] In addition, in the present invention, it is preferred that the machine information is composed of a string (technical solution 3).

[0022] Since the machine information is composed of a string of characters, the conversion process can be reduced compared to the case where the machine information is composed of an image other than a string of characters. Therefore, the load of information processing can be reduced. In addition, the operator can also easily make additional confirmations by visual inspection.

[0023] In addition, in the present invention, it is preferred that the reading mechanism is installed in the central robot (technical solution 4).

[0024] Since a reading mechanism is installed in the central robot of the processing block, the machine information of all the processing units in the processing block can be read by moving the central robot.

[0025] In addition, in the present invention, it is preferred that the central robot has an arm that can move forward and backward relative to each processing unit and hold the substrate, and has a frame, the frame is arranged on the upper part of the arm and is equipped with a sensor for detecting the position of the substrate in the arm, and the reading mechanism is installed on the front end side of the arm in the frame (Technical Solution 5).

[0026] Some center robots have a frame body on which a sensor for detecting the position of a substrate in its arm is mounted. By using this frame body, there is no need to provide a mounting structure only for the reading mechanism, and the cost of the device can be suppressed. In addition, since the front end side of the frame body is closest to each processing unit, the machine information can be read with high accuracy.

[0027] In addition, in the present invention, it is preferred that the reading mechanism is a photographing mechanism that images the device information (Technical Solution 6).

[0028] Since the device information is read after being imaged by the photographing mechanism, the device information can be accurately read through image processing.

[0029] In addition, in the present invention, it is preferred that the storage unit stores the user specification information from a server via a network (technical solution 7).

[0030] Since the user specification information is stored in the storage unit from the server, user specification information of different substrate processing apparatuses is not mistakenly stored.

[0031] [Effects of the Invention]

[0032] According to the substrate processing device of the present invention, the discrimination mechanism compares the machine information from the reading mechanism with the detection position information from the output mechanism to discriminate whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the reading mechanism with the user specification information of the storage unit to discriminate whether the machine information is consistent with the user specification information. When the discrimination result is inconsistent, the notification mechanism issues an alarm. Therefore, the correctness of the configuration can be confirmed by whether the notification mechanism issues an alarm, so it can be easily confirmed whether the configuration is in accordance with the user's specifications. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a perspective view showing the overall structure of a substrate processing apparatus according to an embodiment.

[0034] Figure 2 This is an exploded perspective view showing a state in which the substrate processing apparatus is exploded for each block.

[0035] Figure 3 It is a top view of the substrate processing apparatus and is a diagram showing an upper layer in an upper stage of a processing block.

[0036] Figure 4 is a side view of a substrate processing apparatus.

[0037] Figure 5 This is a block diagram showing the main parts of the configuration for confirming the configuration of the device.

[0038] Figure 6 This is a flowchart showing the operation of confirming the machine configuration. DETAILED DESCRIPTION

[0039] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0040] Figure 1is a perspective view showing the overall structure of a substrate processing apparatus according to an embodiment. Figure 2 is an exploded perspective view showing a state in which the substrate processing apparatus is decomposed into each block. Figure 3 is a top view of a substrate processing apparatus, and is a diagram showing an upper layer of an upper stage of a processing block, Figure 4 is a side view of a substrate processing apparatus.

[0041] The substrate processing apparatus 1 of the present embodiment is, for example, an apparatus capable of performing a coating process for forming a photoresist film on a substrate W and a heat treatment for heating or cooling the substrate W before and after the coating process.

[0042] The substrate processing apparatus 1 includes a loading block 3, a processing block 7 including a passage portion 5, a transfer block 9, and a physical block 11. The substrate processing apparatus 1 is connected to a host computer HC via a network.

[0043] In addition, the host HC is equivalent to the "server" in the present invention.

[0044] The loading block 3 delivers the substrate W to be processed between the loading block 3 and the processing block 7. The processing block 7 has a passage 5 on the loading block 3 side. The passage 5 only carries the substrate W and does not process it. The transport block 9 transports the substrate W between the passage 5 and the processing block 7 or in the processing block 7. The processing block 7, for example, includes a heat treatment unit BU for heat-treating the substrate W, and a coating treatment unit for supplying a photoresist liquid to the substrate W to form a photoresist film or a developing treatment unit for supplying a developer liquid to the exposed photoresist film to perform a developing treatment. The physical block 11 includes a structure for supplying a treatment liquid such as a chemical solution or pure water, a gas such as nitrogen or air, etc. to the processing block 7.

[0045] The substrate processing apparatus 1 is configured such that a loading block 3 , a processing block 7 (a passage portion 5 and a transfer block 9 ), and a physical block 11 are arranged in this order.

[0046] In the following description, the direction in which the loading block 3, the processing block 7 (the passage portion 5 and the conveying block 9), and the physical block 11 are arranged is set as the "front-back direction X" (horizontal direction). In particular, the direction from the physical block 11 toward the loading block 3 is set as the "front XF", and the opposite direction of the front XF direction is set as the "back XB". The direction orthogonal to the front-back direction X in the horizontal direction is set as the "width direction Y". Furthermore, when observed from the front of the loading block 3, one direction of the width direction Y is appropriately set as the "right YR", and the other direction opposite to the right YR is set as the "left YL". In addition, the vertical direction is set as the "up and down direction Z" (height direction, vertical direction). In addition, when it is only recorded as "lateral" or "lateral", etc., it is not limited to any direction in the front-back direction X and the width direction Y.

[0047] The loading block 3 includes a carrier loading unit 13, a transfer space AID, and a dividing robot TID. The substrate processing device 1 in this embodiment, for example, includes four carrier loading units 13. Specifically, four carrier loading units 13 are provided in the width direction Y. Each carrier loading unit 13 is provided to carry a carrier C. The carrier C stores multiple (for example, 25) substrates W in layers, and each carrier loading unit 13 transfers the carrier C, for example, to an OHT (Overhead Hoist Transport: also called an overhead unmanned transport vehicle) not shown in the figure. The OHT uses the top wall of the clean room to transport the carrier C. As a carrier C, for example, a FOUP (Front Opening Unified Pod) can be cited.

[0048] The transfer space AID is arranged at the rear XB of the carrier placement portion 13. An index robot TID is arranged in the transfer space AID. The index robot TID transfers the substrate W to and from the carrier C and to and from the passage portion 5. Only one index robot TID is arranged in the transfer space AID.

[0049] like Figure 3 and Figure 4 As shown, the indexing robot TID includes a guide rail 15, a base 17, a multi-joint arm 19, and a hand 21. The guide rail 15 is arranged in the longitudinal direction in the up-down direction Z, and the base 17 is raised and lowered by the driving of a driving unit (not shown), and the base 17 is guided in the up-down direction Z. The position of the guide rail 15 in the front-to-back direction X and the width direction Y is fixed. The multi-joint arm 19 includes three rotation axes, and is configured so that the hand 21 can move freely in the front-to-back direction X and the width direction Y. The hand 21 is configured to be movable in the up-down direction Z by being raised and lowered along the guide rail 15 by the base 17. The indexing robot TID configured in this way can enter and exit relative to the four carriers C and the passage 5 through the multi-joint arm 19.

[0050] like Figure 3 As shown in FIG. 1 , the passage portion 5 is integrally mounted on the processing block 7 on the loading block 3 side of the processing block 7. The passage portion 5 includes, for example, three support pins 5a, which are used to abut against the lower surface of the substrate W to support the substrate W in a horizontal posture. The support pins 5a are arranged in multiple stages. Figure 4 As shown, the passage portion 5 includes an upper passage portion 33 and a lower passage portion 35 .

[0051] Each processing block 7 has two layers of processing units PU, for example, in the upper section T and the lower section B. In addition, each processing block 7 has two processing units PU in the front-back direction X. That is, one processing block 7 has eight processing units PU, and two processing blocks 7 have 16 processing units PU in total.

[0052] In addition, in the following description, when it is necessary to distinguish each processing unit PU, such as Figure 2 As shown, the four processing units PU arranged on the left side YL from the bottom toward the top of the processing unit PU of the front XF are respectively set as processing units PU11 to PU14, the four processing units PU arranged on the right side YR from the bottom toward the top of the processing unit PU of the front XF are respectively set as processing units PU21 to PU24, the four processing units PU arranged on the left side YL from the bottom toward the top of the processing unit PU of the rear XB are respectively set as processing units PU31 to PU34, and the four processing units PU arranged on the right side YR from the bottom toward the top of the processing unit PU of the rear XB are respectively set as processing units PU41 to PU44.

[0053] In addition, the four processing units PU11~PU14 on the left YL and in front of XF are called tower units TW1, the four processing units PU21~PU24 on the right YR and in front of XF are called tower units TW2, the four processing units PU31~PU34 on the left YL and in the back XB are called tower units TW3, and the four processing units PU41~PU44 on the right YR and in the back XB are called tower units TW4.

[0054] The processing block 7 on the left YL including the towers TW1 and TW3 is, for example, Figure 3 As shown in FIG. 1 , a total of 8 heat treatment units BU are provided. The heat treatment unit BU includes a heat treatment plate 49 having a diameter larger than that of the substrate W. The heat treatment plate 49 is heated or cooled to a treatment temperature corresponding to the heat treatment. The 8 heat treatment units BU may all be of the same specification, or may be of different specifications, or some of the 8 units may be of the same specification and the rest may be of different specifications, depending on the needs of the user.

[0055] The treatment block 7 including the right RL of the towers TW2 and TW4 is, for example, Figure 3 As shown in the figure, a total of 8 rotating units SU are provided. That is, when viewed from above, the processing block 7 is provided with a heat treatment unit BU and a rotating unit SU at a position opposite to the transfer block 9. The rotating unit SU includes, for example, a suction cup 51, a protective member 53, and a nozzle 55. The suction cup 51 adsorbs the vicinity of the center of the lower surface of the substrate W by vacuum suction. The suction cup 51 is driven to rotate by an electric motor not shown in the figure, thereby causing the substrate W to be driven to rotate in a horizontal plane. The protective member 53 is configured to surround the suction cup 51 to prevent the photoresist liquid or the developer liquid supplied from the nozzle 55 to the substrate W from splashing around. Here, the rotating unit SU supplied with the photoresist liquid from the nozzle 55 is referred to as a coating processing unit CU, and the rotating unit SU supplied with the developer liquid from the nozzle 55 is referred to as a developing processing unit DU.

[0056] like Figure 4As shown, the transport block 9 has central robots CR1 and CR2 respectively arranged at positions corresponding to the upper section T and the lower section B. The transport block 9 has no partition plate or the like arranged at the boundary between the upper section T and the lower section B, so that the downward flow in the device can flow from the upper section T to the lower section B.

[0057] The central robot CR1 transports the substrate W between the upper passage 33 in the passage 5 and each processing unit PU in the upper section T, and between each processing unit PU in the upper section T. In addition, the central robot CR2 transports the substrate W between the lower passage 35 in the passage 5 and each processing unit PU in the lower section B, and between each processing unit PU in the lower section B.

[0058] Since the center robot CR1 and the center robot CR2 have the same structure, the center robot CR1 is taken as an example for description.

[0059] The center robot CR1 includes a fixed frame 63, a movable frame 65, a base 67, a rotating base 69, an arm 71, and a sensor frame 73. The fixed frame 63 includes an opening that covers all the processing units PU in the upper section T. The movable frame 65 is installed in the fixed frame 63 so as to be movable in the front-rear direction X. The base 67 is installed in the lower frame of the four frames constituting the movable frame 65. The rotating base 69 is mounted on the upper part of the base 67, and is configured so that the rotating base 69 can rotate in a horizontal plane relative to the base 67. The arm 71 is mounted on the upper part of the rotating base 69 so as to be able to move forward and backward relative to the rotating base 69. The arm 71 is configured such that the arm body 71b is overlapped on the upper part of the arm body 71a. The arm 71 is configured so as to be able to move forward and backward across a first position overlapping the rotating base 69 and a second position protruding from the rotating base 69. Through this structure, when the central robot CR1 enters and exits the processing unit PU, for example, it can use the arm body 71a to receive the processed substrate W in the processing unit PU, and hand over the unprocessed substrate W supported by the arm body 71b to the processing unit PU while the rotating base 69 is facing the processing unit PU.

[0060] The sensor frame 73 is mounted on the rotary base 69. The sensor frame 73 includes a frame body 75 extending substantially parallel to the arm 71 on the upper portion of the arm 71. A plurality of sensors (not shown) are mounted on the lower surface of the frame body 75, and the outer periphery of the substrate W is detected by these sensors. Based on the position of the outer periphery detected by these sensors, the center position of the substrate W held by the arm 71 is obtained. Thus, even if the substrate W is held by the arm 71 in a positionally displaced state, the substrate W can be transported to the center of the placement position in the processing unit PU.

[0061] A camera 77 is installed on the side of the frame 75 corresponding to the front end side of the arm 71. The camera 77 images the field of view and outputs the data. The camera 77 is composed of an image sensor such as a CCD (Charge Coupled Device). The sensor frame 73 is fixed to the upper part of the rotating base 69, and the sensor frame 73 also rotates as the rotating base 69 rotates relative to the base part 67. Therefore, the camera 77 can bring the side of the conveying block 9 side of each processing block 7 arranged on both sides of the conveying block 9 into the field of view. In this way, since the camera 77 is installed on the central robots CR1 and CR2, the machine information of all the processing units PU of the processing block 7 can be read by moving the central robots CR1 and CR2.

[0062] Since the central robots CR1 and CR2 use the frame 75 on which the sensor for detecting the position of the substrate W in the robot arm is mounted, there is no need to provide a mounting structure only for the camera 77, and the device cost can be suppressed. In addition, since the front end side of the frame 75 is closest to each processing unit PU, the machine information can be read with high accuracy. Since the machine information is read in the form of an image by the camera 77, the machine information can be read accurately by image processing.

[0063] In addition, the camera 77 is equivalent to the "reading mechanism" and the "photographing mechanism" in the present invention.

[0064] like Figure 2 to Figure 4 As shown, a plurality of processing units PU constituting the processing block 7 are attached with labels 81 on the side of the transport block 9. The label 81 is attached to a specific position of each processing unit PU. In this example, when the processing unit PU is viewed from the transport block 9 side, the label 81 is attached to the lower right side of the side.

[0065] The label 81 records the machine information. More specifically, the machine information is recorded in a human-readable string, for example. The machine information includes at least category information indicating the processing category of each processing unit PU, and location information indicating the location where each processing unit PU is installed in the processing block 7. In the present embodiment, for example, the machine information is composed of the block number / distinction of the upper segment T or the lower segment B / type of the processing unit PU, and the configuration location (installation location) of the processing unit PU in the processing block 7.

[0066] Here, the block number is, for example, a number indicating the arrangement order of the blocks from the front XF to the rear XB of the substrate processing device 1. That is, the block number of the loading block 3 is 1, the block number of the processing block 7 is 2, and the block number of the physical block 11 is 3. The distinction of the upper section T or the lower section B is, for example, as shown by its symbol, the upper section T is T, and the lower section B is B. The types of the processing unit PU are, for example, B for the heat treatment unit BU and S for the rotation unit SU. In the rotation unit SU, when it is necessary to distinguish, the coating processing unit CU is C and the developing processing unit DU is D.

[0067] Regarding the arrangement position of the processing unit PU in the processing block 7, for example, when the substrate processing apparatus 1 is observed from the front, from the bottom of the lower stage B of the left front position (tower unit TW1) to the top, 11, 12, ... are set. Similarly, from the bottom of the upper stage T of the left front position (tower unit TW1) to the top, 11, 12, ... are set. In addition, when the substrate processing apparatus 1 is observed from the front, from the bottom of the lower stage of the right front position (tower unit TW2) to the top, 11, 12, ... are set. Similarly, from the bottom of the upper stage T of the right front position (tower unit TW2) to the top, 11, 12, ... are set. Furthermore, when the substrate processing apparatus 1 is observed from the front, from the bottom of the lower stage B of the left back position (tower unit TW3) to the top, 11, 12, ... are set, and similarly, from the bottom of its upper stage T to the top, 11, 12, ... are set. When the substrate processing apparatus 1 is viewed from the front, 11, 12, ... are indicated from the bottom of the lower section B of the right inner position (tower unit TW4) toward the top, and similarly, 11, 12, ... are indicated from the bottom of the upper section T toward the top.

[0068] If the positions of the processing units PU11 to 14, 21 to 24, 31 to 34, and 41 to 44 are expressed in accordance with this arrangement position expression method, for example, they are as follows: In addition, x represents the type of the processing unit PU such as B, S, or C.

[0069] Tower unit TW1

[0070] Processing unit PU14: B2 / T / x12

[0071] Processing unit PU13: B2 / T / x11

[0072] Processing unit PU12: B2 / B / x12

[0073] Processing unit PU11: B2 / B / x11

[0074] Tower unit TW2

[0075] Processing unit PU24: B2 / T / x22

[0076] Processing unit PU23: B2 / T / x21

[0077] Processing unit PU22: B2 / B / x22

[0078] Processing unit PU21: B2 / B / x21

[0079] Tower unit TW3

[0080] Processing unit PU34: B2 / T / x32

[0081] Processing unit PU33: B2 / T / x31

[0082] Processing unit PU32: B2 / B / x32

[0083] Processing unit PU31: B2 / B / x31

[0084] Tower unit TW4

[0085] Processing unit PU44: B2 / T / x42

[0086] Processing unit PU43: B2 / T / x41

[0087] Processing unit PU42: B2 / B / x42

[0088] Processing unit PU41: B2 / B / x41

[0089] Here, refer to Figure 1 and Figure 5 .also, Figure 5 This is a block diagram showing the main parts of the configuration for confirming the configuration of the device.

[0090] The substrate processing apparatus 1 is provided with a control unit 85, for example, on the side of the right RL. The control unit 85 is connected to the host computer HC via a network. The control unit 85 is composed of a CPU (Central Processing Unit) or a memory. Specifically, the control unit 85 includes a user specification information storage unit 87, a determination unit 89, a notification unit 91, an information recognition unit 93, and a reading machine information storage unit 95. The control unit 85 is connected to a camera 77, an arm control unit 97, and an input unit 99.

[0091] The camera 77 outputs the image information within the field of view to the information recognition unit 93. The arm control unit 97 moves the central robots CR1 and CR2 to the attachment position of the label 81 of each processing unit PU based on the scanning start instruction for reading the machine information from the control unit 85. At this time, the camera 77 photographs each label 81. The arm control unit 97 outputs the position information in the processing block 7 when the label 81 is photographed by the camera 77 as the detection position information. The detection position information, for example, corresponds to the configuration position of the upper section T or the lower section B and the following 11, 12, ... in the processing block 7 as described above. The input unit 99 is composed of a keyboard or pointing device, a data input unit, etc., which can be used by the operator of the device to give various instructions, and is used to indicate the recipe for processing the substrate W, or to indicate the start of processing, or to give the following user specification information to the control unit 85.

[0092] The user specification information storage unit 87 stores user specification information via a network or an input unit 99. The user who places an order for the substrate processing apparatus 1 or the manufacturer who uses the substrate processing apparatus 1 is regarded as a user, and the user specification information is information indicating the configuration in the processing block 7 required by the user. Specifically, the user specification information at least includes: category information indicating the processing category (heat treatment, coating treatment, developing treatment, etc.) of each processing unit PU in the processing block 7; and position information indicating the position in the processing block 7 where each of these processing units PU is installed. In addition to the processing category or position information, the user specification information may also include information related to the processing capacity of the processing unit PU, such as yield information indicating the processing speed. Since the user specification information is stored in the user specification information storage unit 87 from the host HC, the user specification information of different substrate processing apparatuses 1 is not stored by mistake. In addition, as the user specification information, the standard configuration or recommended configuration in the processing block 7 prepared in advance by the manufacturer (seller side) of the substrate processing apparatus 1 may be indicated.

[0093] The image information is given to the information recognition unit 93 from the camera 77. The information recognition unit 93 recognizes the device information of the tag 81 based on the image information. Specifically, for example, if the device information written on the tag 81 is a character string, the device information is acquired from the tag 81 by performing character recognition processing.

[0094] The reading machine information storage unit 95 stores the machine information acquired by the information recognition unit 93 for each processing unit PU. In addition, the reading machine information storage unit 95 is given the position information in the processing block 7 when the label 81 is photographed by the camera 77 output from the arm control unit 97 as the detection position information. The reading machine information storage unit 95 stores the machine information read from the processing unit PU in pairs with the detection position information at that time.

[0095] The determination unit 89 is given the machine information and the detection position information by the read machine information storage unit 95, and performs a specific determination. Specifically, the determination unit 89 compares the machine information from the read machine information storage unit 95 with the corresponding detection position information. Then, it is determined whether the configuration position in the machine information is consistent with the detection position information. In addition, the determination unit 89 compares the machine information from the read machine information storage unit 95 with the user specification information of the user specification information storage unit 87 and determines whether they are consistent.

[0096] The notification unit 91 is composed of a display device such as a lamp, a buzzer, or a display capable of displaying an image. The notification unit 91 is operated by the determination unit 89 to perform a specific notification action. For example, based on the inconsistency between the configuration position in the device information and the detection position information, or the consistency / inconsistency between the device information from the read device information storage unit 95 and the user specification information of the user specification information storage unit 87, the determination unit 89 operates the notification unit 91 to perform a specific notification action such as a warning notification.

[0097] In addition, the discrimination unit 89 is equivalent to the "discrimination means" of the present invention, the arm control unit 97 is equivalent to the "output means" of the present invention, the user specification information storage unit 87 is equivalent to the "storage unit" of the present invention, and the notification unit 91 is equivalent to the "notification means" of the present invention.

[0098] Here, an example of the user specification information is described. The user specification information is information indicating the arrangement configuration of the plurality of processing blocks PU in the processing block 7 required by the user who ordered the substrate processing apparatus 1.

[0099] User Specification Information

[0100] Tower unit TW1 (example with 4 heat treatment units BU)

[0101] Processing unit PU14: B2 / T / B12

[0102] Processing unit PU13: B2 / T / B11

[0103] Processing unit PU12: B2 / B / B12

[0104] Processing unit PU11: B2 / B / B11

[0105] Tower unit TW2 (example with 4 coating processing units CU)

[0106] Processing unit PU24: B2 / T / C22

[0107] Processing unit PU23: B2 / T / C21

[0108] Processing unit PU22: B2 / B / C22

[0109] Processing unit PU21: B2 / B / C21

[0110] Tower unit TW3 (example with 4 heat treatment units BU)

[0111] Processing unit PU34: B2 / T / B32

[0112] Processing unit PU33: B2 / T / B31

[0113] Processing unit PU32: B2 / B / B32

[0114] Processing unit PU31: B2 / B / B31

[0115] Tower unit TW4 (example with 4 development processing units DU)

[0116] Processing unit PU44: B2 / T / D42

[0117] Processing unit PU43: B2 / T / D41

[0118] Processing unit PU42: B2 / B / D42

[0119] Processing unit PU41: B2 / B / D41

[0120] The user specification information storage unit 87 stores the user specification information as described above. The determination unit 89 compares the device information read from the device information storage unit 95 with the user specification information in the user specification information storage unit 87 to determine whether they match.

[0121] Here, refer to Figure 6 , the process of confirming whether the substrate processing apparatus 1 is configured according to the user's specifications is described. Figure 6 This is a flowchart showing the operation of confirming the machine configuration.

[0122] Step S1

[0123] For example, the final assembly confirmation operator of the substrate processing apparatus 1 operates the input unit 99 to instruct the confirmation operation. Then, the control unit 85 receives the user specification information from the host HC. Here, for example, the “user specification information” is stored in the user specification information storage unit 87.

[0124] Step S2

[0125] The control unit 85 operates the central robots CR1 and CR2 to move the camera 77 to capture images of the labels 81 of all the processing units PU. The information recognition unit 93 recognizes the information recorded on the labels 81 of each processing unit PU based on the output from the camera 77, and stores the information in the reading device information storage unit 95. At this time, the information is paired with the detection position information from the arm control unit 97 and stored in the reading device information storage unit 95.

[0126] Step S3

[0127] The determination unit 89 compares the position information in the device information stored in the reading device information storage unit 95 with the paired detected position information. Furthermore, the determination unit 89 compares the device information in the reading device information storage unit 95 with the user specification information in the user specification information storage unit 87.

[0128] Step S4

[0129] The determination unit 89 branches the process according to the comparison result in step S3. That is, when the comparison result is a match, the process branches to step S5, and when it is not a match, the process branches to step S6.

[0130] Step S5

[0131] Since the determination result of the determination unit 89 is normal, the notification unit 91 notifies this fact. When the notification unit 91 is constituted by a display, for example, a display such as "the device configuration is normal" is performed.

[0132] Step S6

[0133] Since the determination result of the determination unit 89 is abnormal, the notification unit 91 notifies the abnormality. When the notification unit 91 is constituted by a display, for example, a warning such as "there is a problem with the device configuration" is displayed.

[0134] According to the present embodiment, the determination unit 89 compares the machine information from the camera 77 with the detection position information from the arm control unit 97 to determine whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the camera 77 with the user specification information of the user specification information storage unit 87 to determine whether the machine information is consistent with the user specification information. When the determination result is inconsistent, the notification unit 91 issues an alarm. Therefore, the correctness of the configuration can be confirmed by whether the notification unit 91 issues an alarm, so it can be easily confirmed whether the configuration is in accordance with the specifications required by the user.

[0135] In addition, since the tag 81 recording the machine information including the category information and the position information is attached to the central robots CR1 and CR2 of each processing unit PU, there is a space on the tag 81 side. Therefore, the machine information of the tag 81 can be easily read by the camera 77. Furthermore, since the machine information is composed of a string, the conversion process can be reduced compared to the case where the machine information is composed of an image other than a string. Therefore, the load of information processing can be reduced. In addition, the operator can easily make additional confirmation by visual inspection.

[0136] The present invention is not limited to the above-described embodiment, and can be implemented in the following modified forms.

[0137] (1) In the above-described embodiment, the machine information is recorded as a human-readable string. However, the machine information may be displayed as a barcode or a QR (Quick Response) code (registered trademark) or other graphic information instead of a string. This can suppress a decrease in the reading rate due to contamination or the like.

[0138] (2) In the above embodiment, a slash ( / ) is used as a separator for each information in the machine information, but the present invention is not limited to this symbol. In other words, any symbol that can distinguish each information, for example, a blank or other symbol may be used.

[0139] (3) In the above embodiment, the label 81 is attached to the lower right side of each processing unit PU, but the attachment position of the label 81 is not limited to the lower right side as long as it is controlled within the field of view of the camera 77.

[0140] (4) In the above-described embodiment, the device information is recorded on the label 81, but the device information may be recorded directly on the side of each processing unit PU.

[0141] (5) In the above embodiment, the camera 77 as the photographing means is used as the reading means, but the present invention is not limited to such means. For example, when the device information is a barcode, a barcode reader may be used instead of the camera 77.

[0142] (6) In the above-described embodiment, the camera 77 is mounted on the frame 75 of the sensor frame 73 of the central robots CR1 and CR2. However, the camera 77 may be mounted on the rotary base 69.

[0143] (7) In the above embodiment, the user specification information is stored in the user specification information storage unit 87 from the host computer HC via the network. However, the user specification information may be stored in the user specification information storage unit 87 via the input unit 99, for example.

[0144] (8) In the above embodiment, an example is given in which the processing block 7 includes two layers of processing units PU in the upper stage T and the lower stage B, but the present invention is not limited to this configuration.

[0145] [Industrial Applicability]

[0146] As described above, the present invention is suitable for a substrate processing apparatus that processes a substrate using a processing block having a plurality of processing units.

[0147] [Explanation of Symbols]

[0148] W substrate

[0149] 1 Substrate processing device

[0150] 3 Loading Blocks

[0151] 5. Channel Department

[0152] 7 Processing Blocks

[0153] 9 Transport Block

[0154] 11 Physical Blocks

[0155] HC Host

[0156] BU Heat Treatment Unit

[0157] SU Rotation Unit

[0158] CU Coating Processing Unit

[0159] DU Development Unit

[0160] T upper section

[0161] B Lower section

[0162] CR1, CR2 center robots

[0163] 71 Arm

[0164] 73 Sensor frame

[0165] 75 Frame

[0166] 77 Camera

[0167] 81 Tags

[0168] 85 Control Department

[0169] 87 User specification information storage unit

[0170] 89 Discrimination Department

[0171] 93 Information Identification Department

[0172] 95 Reading machine information storage unit

[0173] 97 Arm control unit

[0174] 99 Input unit.

Claims

1. A substrate processing device for processing a substrate, characterized in that have: A loading block including a carrier loading portion for loading a carrier storing a substrate, and an indexing robot for taking out a substrate from a carrier of the carrier loading portion and storing a substrate in a carrier of the carrier loading portion; A processing block, comprising a plurality of processing units for processing substrates, and a central robot for transferring substrates between the loading block and the processing units; A reading mechanism for reading machine information, wherein the machine information includes at least category information indicating a processing category of each processing unit and position information indicating a position in the processing block where each processing unit is installed; an output mechanism that outputs the position of the reading mechanism within the processing block when the reading mechanism reads the machine information as detection position information; a storage unit storing user specification information, the user specification information being equivalent to the machine information corresponding to the user's specification; a determination mechanism that compares the machine information from the reading mechanism with the detection position information from the output mechanism to determine whether the position information of the machine information is consistent with the detection position information, and compares the machine information from the reading mechanism with the user specification information of the storage unit to determine whether the machine information is consistent with the user specification information; as well as A notification mechanism is provided to issue an alarm when the discrimination results of the discrimination mechanism are inconsistent.

2. The substrate processing device according to claim 1, characterized in that: The device information is recorded on a label, and the label is attached to the central robot side of each processing unit.

3. The substrate processing device according to claim 1, characterized in that: The machine information is composed of a character string.

4. The substrate processing device according to claim 2, characterized in that: The machine information is composed of a character string.

5. The substrate processing device according to claim 1, characterized in that: The reading mechanism is installed in the central robot.

6. The substrate processing device according to claim 2, characterized in that: The reading mechanism is installed in the central robot.

7. The substrate processing device according to claim 3, characterized in that: The reading mechanism is installed in the central robot.

8. The substrate processing device according to any one of claims 5 to 7, characterized in that: The central robot includes an arm capable of advancing and retreating relative to each processing unit and holding a substrate, and includes a frame body, the frame body being arranged on an upper portion of the arm and equipped with a sensor for detecting a position of the substrate in the arm. The reading mechanism is mounted on the front end side of the arm in the frame.

9. The substrate processing device according to any one of claims 1 to 7, characterized in that: The reading means is a photographing means for imaging the device information.

10. The substrate processing device according to any one of claims 1 to 7, characterized in that: The storage unit stores the user specification information from a server via a network.

Images