A component for reducing the assembly height of a crystal growth furnace and a method of using the component

Abstract

The present invention relates to the field of semiconductor crystal growth technology, and discloses a component for reducing the assembly height of a crystal growth furnace and a method for using the component, wherein the component includes a load-bearing plate, the top of which is suitable for fixing the crystal growth furnace; a movable support component is installed at the bottom of the load-bearing plate, and can drive the load-bearing plate to perform lifting and lowering movements; a group of fixed support components can be fixedly supported at the bottom of the load-bearing plate and arranged on both sides of the movable support component when the load-bearing plate and the crystal growth furnace reach the designed height; the movable support component is suitable for being removed from the bottom of the load-bearing plate when the crystal growth furnace is installed to a preset position. The load-bearing plate and the crystal growth furnace can be installed and fixed at a lower position first, and then the crystal growth furnace and the load-bearing plate can be lifted to a suitable height by using a movable support, and then supported and fixed by using a fixed support component, which makes installation more convenient, improves assembly efficiency, does not require repeated installation, and can avoid damage to the crystal growth furnace.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor crystal growth, and in particular to a component for reducing the assembly height of a crystal growth furnace and a use method thereof. Background Art

[0002] After more than 60 years of continuous development, the development of global semiconductor materials has made continuous breakthroughs. The third-generation semiconductor materials such as silicon carbide (SiC) and aluminum nitride (AlN) are developing rapidly. Because of their wide bandgap, high breakdown field strength and high saturated electron drift rate, the third-generation semiconductor materials are mainly for the new generation of optoelectronic devices, and have very wide application scenarios in the fields of new generation of communication equipment, smart grid, new energy vehicles, consumer electronic devices, etc. Growth devices such as SiC and AlN are usually heavy crystal growth furnaces that occupy a large space.

[0003] The floor height in the laboratory is about 3-4 meters, while the equipment height of SiC and AlN crystal growth furnaces is about 2.2-2.8 meters. As the demand for crystal size develops, the size of the crystal growth furnace will become larger. Under normal laboratory conditions, normal assembly is difficult, and the height limit of the floor brings difficulties to the assembly of the crystal growth furnace. At present, the equipment of the crystal growth furnace is a more troublesome problem for small-scale scientific research units.

[0004] At present, the method of assembling a crystal growth furnace in a limited space is mainly to place the crystal growth furnace at the location required by the experiment by means of a forklift and the cooperation of the staff. However, this method has the following disadvantages:

[0005] 1. The efficiency is relatively low;

[0006] 2. Since the crystal growth furnace is heavy, when the crystal growth furnace is placed at a high place and deviates from the ideal position, it is difficult to adjust it manually, and the adjustment is troublesome;

[0007] 3. If the crystal growth furnace is placed at a high place and deviates greatly from the ideal position, it needs to be reassembled, which may easily cause damage to the furnace body of the crystal growth furnace. Summary of the invention

[0008] The technical problem to be solved by the present invention is to overcome the technical problems in the prior art of assembling a crystal growth furnace by combining a forklift with manual labor, which is inefficient, troublesome to adjust and easily causes damage to the furnace body, thereby providing a component and a method of use that can be used in a limited space, can avoid installation deviations caused by traditional methods, and can reduce the assembly height of the crystal growth furnace.

[0009] To this end, one of the objects of the present invention is to provide a component for reducing the assembly height of a crystal growth furnace, comprising:

[0010] A load-bearing plate, the top of which is provided with a fixed installation portion and the fixed installation portion is suitable for fixing the crystal growth furnace;

[0011] A movable support assembly is installed at the bottom of the load-bearing plate and can drive the load-bearing plate to perform lifting and lowering movements;

[0012] A set of fixed support components, which can be fixedly supported on the bottom of the load-bearing plate and are arranged on both sides of the movable support components when the load-bearing plate and the crystal growth furnace reach the designed height;

[0013] The movable support assembly is suitable for being removed from the bottom of the bearing plate when the crystal growth furnace is installed to a preset position.

[0014] Optionally, the component for reducing the assembly height of the crystal growth furnace further includes:

[0015] The adjusting component is movably mounted on the bottom of the fixed supporting component and is suitable for driving the fixed supporting component to move so as to drive the crystal growing furnace to move to the preset position when the assembly position of the crystal growing furnace deviates greatly from the preset position.

[0016] Optionally, the component for reducing the assembly height of the crystal growth furnace, the adjusting component comprises:

[0017] A roller, rotatably mounted on the bottom of the fixed support assembly;

[0018] A telescopic support rod, which is telescopically mounted on the bottom of the fixed support assembly by adjusting a conversion screw;

[0019] When there is a large deviation between the assembly position of the crystal growth furnace and the preset position, the telescopic support rod contracts toward the fixed support assembly so that the roller rolls in contact with the ground, and the roller drives the fixed support assembly to move and drives the crystal growth furnace to adjust to the preset position; when the assembly position of the crystal growth furnace matches the preset position, the telescopic support rod softly contacts the ground.

[0020] Optionally, the component for reducing the assembly height of the crystal growth furnace, the movable support component comprises:

[0021] A load-bearing platform, detachably mounted on the bottom of the load-bearing plate;

[0022] at least one telescopic rod mounted on the bottom of the load-bearing platform;

[0023] A power device is connected to the telescopic rod and is used to drive the telescopic rod to perform telescopic movement.

[0024] Optionally, in the assembly for lowering the assembly height of the crystal growth furnace, the telescopic rod is an electric telescopic rod, and the power device is electrically connected to the electric telescopic rod; and / or

[0025] The load-bearing platform is a square platform.

[0026] Optionally, the component for reducing the assembly height of the crystal growth furnace, the fixed support component comprises:

[0027] The furnace frame support rod is fixed to the bottom of the load-bearing plate, and a groove concave from inside to outside is opened on the top of the furnace frame support rod;

[0028] An elastic member is installed in the groove and has one end abutting against the bottom of the groove, and the other end extending to a preset length outside the groove and abutting against the bottom of the bearing plate when the furnace support frame is fixed to the bearing plate.

[0029] Optionally, in the component for reducing the assembly height of the crystal growth furnace, the elastic member is a spring, soft resin or hard resin.

[0030] Another object of the present invention is to provide a method for using a component for reducing the assembly height of a crystal growth furnace, comprising the following steps:

[0031] S1. Fix the load-bearing plate and the load-bearing platform, fix the electric telescopic rod to the load-bearing platform and the electric telescopic rod is at the shortest length;

[0032] S2. Use a forklift to move the crystal growth furnace to the fixed mounting portion on the load-bearing plate and fix it;

[0033] S3. Control the power device to drive the electric telescopic rod to rise, and lift the crystal growth furnace to a position slightly higher than the designed height;

[0034] S4. Place the elastic member in the groove of the grate support rod, and place the grate support rod at the preset position at the bottom of the bearing plate, control the power device to lower the electric telescopic rod, fix the bearing plate and the grate support rod, and continue to control the power device to lower the electric telescopic rod until the adjustment assembly at the bottom of the grate support rod is supported on the ground;

[0035] S5. Disassemble the electric telescopic rod and the load-bearing platform.

[0036] Optionally, the method for using a component for reducing the assembly height of a crystal growth furnace further includes the following steps:

[0037] S41. If there is a large deviation between the assembly position of the crystal growth furnace and the preset installation, the control adjustment component moves the furnace frame support rod to drive the crystal growth furnace to the preset position.

[0038] Optionally, the method for using a component for reducing the assembly height of a crystal growth furnace further includes the following steps:

[0039] S42. If the crystal growth furnace is tilted after assembly, the control adjustment component adjusts the horizontal state of the crystal growth furnace.

[0040] The technical solution of the present invention has the following advantages:

[0041] 1. The assembly for lowering the assembly height of the crystal growth furnace of the present invention can first install and fix the load-bearing plate and the crystal growth furnace at a lower position, and then use the movable support to lift the crystal growth furnace and the load-bearing plate to a suitable height, and then use the fixed support assembly to support and fix them. The installation is more convenient and the assembly efficiency is improved. Compared with the traditional forklift and manual installation, there are deviations and repeated installation is required, which may cause damage to the crystal growth furnace. The present application does not require repeated installation and can avoid damage to the crystal growth furnace.

[0042] 2. The assembly for reducing the assembly height of the crystal growth furnace of the present invention can be adjusted by adjusting the setting of the assembly when there is a large deviation between the assembly position and the preset position. At the same time, the horizontal state can be adjusted to ensure the horizontal state and stability of the load-bearing plate and the crystal growth furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0044] Figure 1 It is a schematic diagram of the front view of the structure of the component for reducing the assembly height of the crystal growth furnace according to an embodiment of the present invention;

[0045] Figure 2 A schematic diagram of a top view of a furnace support rod of a component for reducing the assembly height of a crystal growth furnace according to an embodiment of the present invention;

[0046] Figure 3 It is a bottom view structural schematic diagram of a load-bearing component of a component for reducing the assembly height of a crystal growth furnace according to an embodiment of the present invention;

[0047] Figure 4 It is a schematic structural diagram of an adjusting component for lowering the assembly height of a crystal growth furnace according to an embodiment of the present invention.

[0048] Description of reference numerals:

[0049] 1. Crystal growth furnace; 2. Load-bearing plate; 3. Power device; 4. Telescopic rod; 5. Fixed support assembly; 50. Groove; 51. Furnace support rod; 52. Elastic member; 6. Load-bearing platform; 7. Adjustment assembly; 71. Roller; 72. Adjustment conversion screw; 73. Telescopic support rod. DETAILED DESCRIPTION

[0050] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0051] Example 1

[0052] See also Figures 1 to 4 , a component for reducing the assembly height of a crystal growth furnace provided in this embodiment includes a load-bearing plate 2, a movable support component, a fixed support component 5 and an adjustment component 7. The load-bearing plate 2 is a square load-bearing plate 2, and the middle position of its top is suitable for fixing the crystal growth furnace 1. The movable support component is detachably mounted on the bottom of the load-bearing plate 2, and can drive the load-bearing plate 2 to perform lifting and lowering movements. The fixed support component 5 can be fixedly supported on the bottom of the load-bearing plate 2 and arranged on both sides of the movable support component when the load-bearing plate 2 and the crystal growth furnace 1 reach the designed height. The movable support component is suitable for being removed from the bottom of the load-bearing plate 2 when the crystal growth furnace 1 is installed to a preset position. The adjustment component 7 is movably mounted on the bottom of the fixed support component 5, and is suitable for driving the fixed support component 5 to move when the assembly position of the crystal growth furnace 1 deviates greatly from the preset position, so as to drive the crystal growth furnace 1 to move to the preset position. By using the components of this embodiment, the load-bearing plate 2 and the crystal growing furnace 1 can be installed and fixed at a lower position first, and then the crystal growing furnace 1 and the load-bearing plate 2 can be lifted to a suitable height using movable supports, and then supported and fixed using fixed support components 5. The installation is more convenient and the assembly efficiency is improved. Compared with the traditional forklift and manual installation, there are deviations and repeated installation is required, which may cause damage to the crystal growing furnace 1. The present application does not require repeated installation and can avoid damage to the crystal growing furnace 1.

[0053] Specifically, for the adjustment component 7, if Figure 1 and Figure 4As shown, the adjustment assembly 7 includes a roller 71 and a telescopic support rod 73. The roller 71 is rotatably mounted on the bottom of the furnace frame support rod 51. The telescopic support rod 73 is telescopically mounted on the bottom of the fixed support assembly 5 by adjusting the conversion screw 72. When there is a large deviation between the assembly position of the crystal growth furnace 1 and the preset position, the telescopic support rod 73 contracts toward the fixed support assembly 5 so that the roller 71 rolls and contacts the ground, and the roller 71 drives the fixed support assembly 5 to move and drive the crystal growth furnace 1 to adjust to the preset position. When the assembly position of the crystal growth furnace 1 matches the preset position, the telescopic support rod 73 is in soft contact with the ground. That is to say, a soft rubber pad is provided at the bottom of the telescopic support rod 73, which has a buffering effect and can effectively protect the crystal growth furnace 1 during the adjustment process. As for the adjustment conversion screw 72, it is meshed with the telescopic support rod 73, and a vertically extending guide groove is provided at the installation position of the telescopic support rod 73, or a fixing block is connected to the bottom of the telescopic support rod 73, and a guide groove is provided in the fixing block, or the telescopic support rod 73 is directly connected by a plurality of sleeves, and the adjustment conversion screw 72 and the middle one are also as follows. Figure 4 The topmost sleeve section shown is meshed. When the adjustment conversion screw 72 is rotated, the telescopic support rod 73 rotates synchronously to extend or retract in the guide groove. The roller 71 and the telescopic support rod 73 are respectively installed on both sides of the bottom of the fixed support assembly 5. When the assembly position of the crystal growth furnace 1 matches the preset position, the telescopic support rod 73 retracts upward into the guide groove so that the roller 71 contacts the ground, and the roller 71 is manually pushed to roll on the ground until the crystal growth furnace 1 reaches the preset position, and then the telescopic support rod 73 is driven to extend out of the guide groove, that is, move toward the ground, by adjusting the conversion screw 72, until the soft rubber pad at the bottom of the telescopic support rod 73 is in soft contact with the ground. It should be noted that the fixed support assembly 5 of this embodiment preferably includes four, which are arranged at the four corner positions of the load-bearing plate 2. Correspondingly, the adjustment assembly 7 also includes four. After the adjustment is completed, the crystal growth furnace 1 should be ensured to be in a horizontal state. The horizontal state of the load-bearing plate 2 can be detected with the help of a level meter, and then fine-tuning can be performed. As for the specific structure of the roller 71, it is a conventional supporting roller 71 structure in the existing market, and no detailed description or limitation is given. As an alternative embodiment, the adjustment component 7 may not be provided.

[0054] For the load-bearing plate 2, if Figure 3 As shown, it is a square load-bearing plate 2. The material can be stainless steel or galvanized steel. Optionally, a fixed installation part for fixing the crystal growth furnace 1 is provided on the top. For example, a fixed groove or a plurality of fixed holes arranged at intervals along the circumference of the bottom of the crystal growth furnace 1. Correspondingly, a fixed structure matching the fixed hole should be provided on the bottom peripheral wall of the crystal growth furnace 1, such as a fixed plate, and the fixed plate is provided with a corresponding fixed hole. The present embodiment is preferably a fixed groove.

[0055] For active support components, Figure 1 and Figure 3 As shown, it includes a load-bearing platform 6, at least one electric telescopic rod 4 and a power device 3. The load-bearing platform 6 is detachably mounted on the bottom of the load-bearing plate 2. The electric telescopic rod 4 is composed of a plurality of coaxially sleeved and telescopically connected sleeve rods, and is mounted on the bottom of the load-bearing platform 6. The power device 3 is electrically connected to the electric telescopic rod 4, and is used to drive the electric telescopic rod 4 to perform telescopic movement, that is, to drive the electric telescopic rod 4 to extend or shorten. It should be noted that the size of the load-bearing platform 6 is smaller than the load-bearing plate 2, so that the load-bearing platform 6 does not interfere with the fixed support assembly 5. Preferably, the load-bearing platform 6 is a square platform, which can increase the contact area between the load-bearing platform 6 and the load-bearing plate 2, and further ensure the smooth rise of the load-bearing plate 2 and the crystal growth furnace 1. Optionally, the load-bearing platform 6 can also be other shapes, such as circular, triangular or polygonal. Before installation, the level of the electric telescopic rod 4 or the load-bearing platform 6 can be detected with a level detector to reduce subsequent adjustment work. As for the number of telescopic rods 4, the present embodiment is preferably four, which are arranged at the four corners of the bottom of the load-bearing platform 6. That is to say, the number of telescopic rods 4 can also be other numbers, such as one, two, six, eight, etc., as long as the balance can be ensured. Optionally, the power device 3 can be placed directly on the ground or installed on the load-bearing platform 6. As a replaceable embodiment, the telescopic rod 4 of this embodiment can also be an existing conventional telescopic sleeve rod with threaded connection. The connection between the load-bearing platform 6 and the telescopic rod 4 is preferably detachable, such as connected by fasteners such as screws. As an option, the load-bearing platform 6 and the telescopic rod 4 can also be fixedly connected, such as directly welded.

[0056] For the fixed support assembly 5, Figure 1 and Figure 2 As shown, the fixed support assembly 5 includes a grate support rod 51 and an elastic member 52. The grate support rod 51 is fixed to the bottom of the load-bearing plate 2, and a groove 50 is provided on the top thereof, which is recessed from the inside to the outside. The elastic member 52 is installed in the groove 50, and one end abuts against the bottom of the groove 50, and the other end extends to a preset length outside the groove 50, such as 1-2 mm, and abuts against the bottom of the load-bearing plate 2 when the grate support frame is fixed to the load-bearing plate 2. For the elastic member 52, optionally, the elastic member 52 is one of a spring, a soft resin or a hard resin. As an option, other materials known to those skilled in the art and capable of making soft contact between the load-bearing platform and the fixed support assembly can also be used. This embodiment is preferably a spring, and optionally, the spring has a diameter of 5-15 mm and a length of 7-22 mm. As for the elastic coefficient of the spring, no specific description and limitation are given, and it is preferred to use a spring with a larger elastic coefficient. For the groove 50, such as Figure 2 As shown, the present embodiment is preferably a circular groove.

[0057] Example 2

[0058] The present embodiment provides a method for using a component for reducing the assembly height of a crystal growth furnace, comprising the following steps:

[0059] S1. The load-bearing plate 2 is fixed to the load-bearing platform 6, the electric telescopic rod 4 is fixed to the load-bearing platform 6 and the electric telescopic rod 4 is at the shortest length;

[0060] S2. Use a forklift to move the crystal growth furnace 1 to the fixed mounting portion on the load-bearing plate 2 and fix it;

[0061] S3. Control the power device 3 to drive the electric telescopic rod 4 to rise, and lift the crystal growth furnace 1 to a position slightly higher than the designed height;

[0062] S4. Place the elastic member 52 in the groove 50 of the grate support rod 51, and place the grate support rod 51 at the preset position at the bottom of the bearing plate 2, control the power device 3 to lower the electric telescopic rod 4, fix the bearing plate 2 and the grate support rod 51, and continue to control the power device 3 to lower the electric telescopic rod 4 until the adjustment assembly 7 at the bottom of the grate support rod 51 is supported on the ground;

[0063] S5. Disassemble the electric telescopic rod 4 and the load-bearing platform 6.

[0064] Preferably, the method further comprises the following steps:

[0065] S41. If there is a large deviation between the assembly position of the crystal growth furnace 1 and the preset installation, the control adjustment component 7 moves the furnace frame support rod 51 to drive the crystal growth furnace 1 to the preset position.

[0066] S42. If the crystal growth furnace 1 is tilted after assembly, the control adjustment component adjusts the horizontal state of the crystal growth furnace.

[0067] Specifically, in step S3, the load-bearing plate 2 is raised to a height of 2-3 mm above the top surface of the grate support rod 51 and then stops, and then the elastic member 52 is installed into the groove 50. Thereafter, the telescopic rod 4 is controlled to descend so that the top surface of the grate support rod 51 fits with the bottom surface of the load-bearing plate 2, and then the load-bearing plate 2 and the grate support rod 51 are fixed by a mechanical structure such as fastening screws.

[0068] It should be noted that, if after step S4, there is a large deviation between the assembly position of the crystal growing furnace 1 and the preset position, the adjusting component 7 is used to adjust so that the roller 71 contacts the ground, and the overall movement makes the crystal growing furnace 1 reach the preset position. Thereafter, the telescopic support rod 73 is adjusted until its bottom contacts the ground, and the roller 71 can continue to be supported on the ground or be suspended above the ground.

[0069] If after step S4, the assembled horizontal state of the crystal growth furnace 1 is tilted, the control adjustment assembly adjusts the horizontal state of the crystal growth furnace. By adjusting the telescopic support rods 73 of the multiple adjustment assemblies and simultaneously using a level detector to detect, it is ensured that the crystal growth furnace 1 is in a horizontal state in the final state.

[0070] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A component for reducing the assembly height of a crystal growth furnace, characterized in that: include: A load-bearing plate (2), the top of which is provided with a fixed installation portion, and the fixed installation portion is suitable for fixing the crystal growth furnace (1); A movable support assembly is installed at the bottom of the load-bearing plate (2) and can drive the load-bearing plate (2) to perform lifting actions; A set of fixed support components (5) can be fixedly supported on the bottom of the load-bearing plate (2) and arranged on both sides of the movable support components when the load-bearing plate (2) and the crystal growth furnace (1) reach a designed height; The movable support assembly is suitable for being removed from the bottom of the bearing plate (2) when the crystal growth furnace (1) is installed at a preset position.

2. The assembly for reducing the assembly height of a crystal growth furnace according to claim 1, characterized in that: Also includes; An adjusting component (7) is mounted on the bottom of the fixed support component (5) and is suitable for driving the fixed support component (5) to move so as to drive the crystal growth furnace (1) to move to the preset position when a large deviation occurs between the assembly position of the crystal growth furnace (1) and the preset position.

3. The assembly for reducing the assembly height of a crystal growth furnace according to claim 2, characterized in that: The regulating component (7) comprises: A roller (71) mounted on the bottom of the fixed support assembly (5); A telescopic support rod (73) is telescopically mounted on the bottom of the fixed support assembly (5) by adjusting a conversion screw (72); When there is a large deviation between the assembly position of the crystal growth furnace (1) and the preset position, the telescopic support rod (73) contracts toward the fixed support assembly (5) so that the roller (71) rolls and contacts the ground, and the roller (71) drives the fixed support assembly (5) to move and drives the crystal growth furnace (1) to adjust to the preset position; when the assembly position of the crystal growth furnace (1) matches the preset position, the telescopic support rod (73) softly contacts the ground.

4. The assembly for reducing the assembly height of a crystal growth furnace according to any one of claims 1 to 3, characterized in that: The movable support assembly comprises: A load-bearing platform (6) detachably mounted on the bottom of the load-bearing plate (2); At least one telescopic rod (4) mounted on the bottom of the load-bearing platform (6); The power device (3) is connected to the telescopic rod (4) and is used to drive the telescopic rod (4) to perform telescopic movement.

5. The assembly for reducing the assembly height of a crystal growth furnace according to claim 4, characterized in that: The telescopic rod (4) is an electric telescopic rod (4), and the power device (3) is electrically connected to the electric telescopic rod (4); and / or The load-bearing platform (6) is a square platform.

6. The assembly for reducing the assembly height of a crystal growth furnace according to any one of claims 1 to 3, characterized in that: The fixed support assembly (5) comprises: A furnace frame support rod (51) is fixed to the bottom of the load-bearing plate (2), and a groove (50) is formed on the top thereof, which is concave from the inside to the outside; An elastic member (52) is installed in the groove (50) with one end abutting against the bottom of the groove (50) and the other end extending to a preset length outside the groove (50) and abutting against the bottom of the load-bearing plate (2) when the furnace rack support rod (51) is fixed to the load-bearing plate (2).

7. The assembly for reducing the assembly height of a crystal growth furnace according to claim 6, characterized in that: The elastic member (52) is a spring, soft resin or hard resin.

8. A method for using a component for reducing the assembly height of a crystal growth furnace, characterized in that: The following steps are involved: S1. The load-bearing plate (2) is fixed to the load-bearing platform (6), the electric telescopic rod (4) is fixed to the load-bearing platform (6) and the electric telescopic rod (4) is at the shortest length; S2. Using a forklift, the crystal growth furnace (1) is moved to a fixed mounting portion on the load-bearing plate (2) and fixed; S3. The control power device (3) drives the electric telescopic rod (4) to rise, and the crystal growth furnace (1) is raised to a position slightly higher than the designed height; S4. Place the elastic member (52) in the groove (50) of the grate support rod (51), and place the grate support rod (51) at a preset position at the bottom of the load-bearing plate (2), control the power device (3) to lower the electric telescopic rod (4), fix the load-bearing plate (2) and the grate support rod (51), and continue to control the power device (3) to lower the electric telescopic rod (4) until the adjustment assembly (7) at the bottom of the grate support rod (51) is supported on the ground; S5. Disassemble the electric telescopic rod (4) and the load-bearing platform (6).

9. The method for using the assembly for reducing the assembly height of a crystal growth furnace according to claim 8, characterized in that: The following steps are also included: S41. If the assembly position of the crystal growth furnace (1) deviates greatly from the preset installation, the control adjustment component (7) moves the furnace frame support rod (51) to drive the crystal growth furnace (1) to the preset position.

10. A method for using a component for reducing the assembly height of a crystal growth furnace according to claim 8 or 9, characterized in that: The following steps are also included: S42. If the crystal growth furnace (1) is tilted after assembly, the control adjustment component (7) adjusts the horizontal state of the crystal growth furnace (1).

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