Vacuum pump and control device of vacuum pump

Abstract

Provided are a vacuum pump and a control device for the vacuum pump, which have a structure that is inexpensive and difficult for water droplets to enter without using a sealing member, and have a structure that allows the pump body and a control device to be easily separated and easily maintained. Water droplets leaking from the periphery of the base portion (129) invade the gap (220). In particular, water droplets are likely to enter when the cover (219) is removed. In this case, there is a possibility that water droplets flow toward the recess (200b), but the hollow plate-like portion (221a) is sealed and fixed to each other between the metal surfaces relative to the recess (200b), so water droplets do not invade the interior of the control device (200). In addition, the tubular member (221) is formed to penetrate the gap (220) and is higher than the thickness of the gap (220), so water droplets overflowing from the gap (220) do not invade from the inside of the tubular member (221). Furthermore, even if water drops on the upper surface of the plate (150), since the tubular member (221) is protruding higher than the upper surface of the plate (150), the possibility of water intrusion beyond the tubular member (221) is small.

Description

Technical Field

[0001] The present invention relates to a vacuum pump and a control device for the vacuum pump, and in particular, to a vacuum pump and a control device for the vacuum pump, which can realize a structure that is difficult for water droplets to penetrate at a low cost without using a sealing member, and have a structure that allows the pump body and the control device to be easily separated and easily maintained. Background Art

[0002] With the development of electronics in recent years, the demand for semiconductors such as memory and integrated circuits has increased dramatically.

[0003] These semiconductors are manufactured by doping an extremely high-purity semiconductor substrate with impurities to impart electrical properties, or by forming a precise circuit on the semiconductor substrate by etching.

[0004] Furthermore, these operations need to be performed in a chamber in a high vacuum state in order to avoid the influence of dust in the air, etc. The chamber is generally evacuated using a vacuum pump, but a turbomolecular pump is often used as a vacuum pump because of the small amount of residual gas and easy maintenance.

[0005] Furthermore, in the semiconductor manufacturing process, there are many steps in which various process gases are applied to a semiconductor substrate, and a turbomolecular pump is used not only to evacuate a chamber but also to exhaust these process gases from the chamber.

[0006] The turbomolecular pump is composed of a pump body and a control device for controlling the pump body. In addition, in order to omit the external cable connecting the pump body and the control device, a structure in which the control device is integrated with the side and bottom of the pump body is known as Patent Documents 1 and 2.

[0007] Patent Document 1: Japanese Patent Application Publication No. 2006-250033.

[0008] Patent document 2: Japanese Patent Application Publication No. 2018-115631.

[0009] However, cooling mechanisms based on water cooling are often provided at the pump body and semiconductor manufacturing equipment. Therefore, when the control device is integrated with the side of the pump body, water droplets may enter the control device when there is water leakage or condensation around the pump body. Therefore, the control device needs to have a drip-proof structure. In the case of Patent Document 1, a watertight sealing member is provided between the box and the base of the control device.

[0010] However, the watertight sealing member is expensive, which causes the cost increase.

[0011] In addition, the integrated pump body and control device may need to be separated on site for maintenance such as changing the internal circuit. Therefore, it is desirable to provide a structure that has a drip-proof structure as described above and is also easy to separate and handle.

[0012] Furthermore, when a gap σ is provided between the bottom surface (lower surface) of the pump body and the cover plate of the control unit for the purpose of heat insulation of the pump body and the control unit as in Patent Document 2, when the control device is separated, there is a possibility that water leakage from the cooling mechanism or water droplets caused by condensation or the like may penetrate the gap σ and intrude into the control device. Summary of the invention

[0013] The present invention is made in view of such conventional problems, and its object is to provide a vacuum pump and a control device for the vacuum pump which can inexpensively realize a structure that makes it difficult for water droplets to penetrate without using a sealing member, and which has a structure that allows the pump body and the control device to be easily separated and easily maintained.

[0014] Therefore, the present invention (technical solution 1) is a vacuum pump, in which a pump body and a control device for controlling the pump body are integrated, and is characterized in that a cylindrical portion is provided at the aforementioned control device, and the aforementioned cylindrical portion protrudes from the housing of the control device, and a cable connecting the aforementioned pump body and the aforementioned control device is passed through the inner side of the aforementioned cylindrical portion, and the height of the cylindrical portion exceeds the height of the gap formed between the bottom of the aforementioned pump body and the housing of the aforementioned control device.

[0015] Condensation may occur around the pump body due to cooling of the water cooling pipe. In addition, water droplets may leak from the water cooling pipe during maintenance. There is a high possibility that the leaked water droplets will enter the gap. The height of the cylindrical part exceeds the height of the gap formed between the bottom of the pump body and the housing of the control device, so water droplets overflowing from the gap will not enter from the inside of the cylindrical part.

[0016] Thus, the circuit safety during maintenance work is achieved. In addition, the drip-proof structure can be realized with a simple structure without using a sealing member.

[0017] Furthermore, the present invention (technical solution 2) is an invention of a vacuum pump, wherein the pump body is configured to include a relay chamber and a cover detachable from the relay chamber, and the relay chamber accommodates a relay substrate to which the end of the cable is connected.

[0018] Maintenance work on the relay chamber can be easily performed by removing the cover. The pump body and the control device can be easily and freely separated by removing the end of the cable from the relay base plate.

[0019] Furthermore, the present invention (claim 3) is an invention of a vacuum pump, wherein a detachable plate for fastening and connecting the pump body and the control device is provided at the bottom of the pump body.

[0020] By providing a plate at the bottom of the pump body, even when the pump body and the control device are of different sizes, the pump body and the control device can be integrated by simply changing the plate. Therefore, for example, one control device can be freely combined with pump bodies of different capacities. The plate is fastened to the pump body and can be removed.

[0021] Furthermore, the present invention (claim 4) is an invention of a vacuum pump, characterized in that the height of the cylindrical portion is formed to be higher than a height dimension obtained by adding the gap and the plate.

[0022] The height of the cylindrical portion is formed to be higher than the height dimension obtained by adding the gap and the plate. Therefore, there is little possibility that water droplets will intrude over the cylindrical portion when they are on the upper surface of the plate.

[0023] Furthermore, the present invention (technical solution 5) is an invention of a vacuum pump, characterized in that a base through-hole is provided in the base portion of the pump body, and the height of the cylindrical portion is formed to be higher than the height dimension obtained by adding the gap and the base through-hole.

[0024] When the base portion of the pump body includes the base penetration portion, by forming the height of the cylindrical portion to be higher than the height dimension obtained by adding the gap and the plate, the possibility of water droplets intruding over the cylindrical portion is reduced.

[0025] Furthermore, the present invention (technical solution 6) is an invention of a vacuum pump, characterized in that the aforementioned cylindrical portion is constituted by a component that is separate from the housing of the aforementioned control device.

[0026] Furthermore, the present invention (technical solution 7) is an invention of a vacuum pump, characterized in that it has a cover that can be freely loaded and unloaded relative to the side of the housing of the aforementioned control device, and a bending piece is provided at the end of one side of the cover, and the bending piece abuts against the surface of the aforementioned plate.

[0027] By providing a detachable cover on the side of the housing of the control device, maintenance operations such as replacement of the circuit substrate become easy. In addition, a bending piece is provided at one end of the cover, and the bending piece is abutted against the surface of the plate, so that water drops are difficult to invade between the end of the cover and the plate.

[0028] Furthermore, the present invention (technical solution 8) is an invention of a vacuum pump, characterized in that it has a cover that can be freely loaded and unloaded relative to the side of the housing of the aforementioned control device, and a bending piece is provided at the end of one side of the cover, and the bending piece abuts against the surface of the aforementioned base portion.

[0029] By providing a detachable cover on the side of the housing of the control device, maintenance operations such as replacement of the circuit substrate become easy. In addition, a bent piece is provided at one end of the cover, and the bent piece is abutted against the surface of the base portion, so that water drops are difficult to penetrate between the end of the cover and the base portion.

[0030] Furthermore, the present invention (technical solution 9) is an invention of a vacuum pump, characterized in that the lower end of the aforementioned transfer substrate is arranged not to protrude downward compared to the lowermost end of the aforementioned pump body.

[0031] Thus, when the pump body is placed on the table in order to remove the plate, the pump body can be placed stably on the table. The possibility of damage to the transfer substrate can also be reduced.

[0032] Furthermore, the present invention (technical solution 10) is the invention of a vacuum pump, which comprises a rotor shaft installed in the aforementioned pump body and a front panel installed externally on the aforementioned control device, and the aforementioned cover is arranged to be within 90 degrees from the arrangement direction of the aforementioned front panel when observed from the central axis of the aforementioned rotor shaft.

[0033] The front side of the surface where the front panel is located is often open for reasons of operation management. Therefore, the cover is arranged within 90 degrees from the arrangement direction of the front panel when viewed from the central axis of the rotor shaft. In this way, the cover and the hood do not hinder the related devices arranged around the pump body and can be arranged to be easily removed.

[0034] Furthermore, the present invention (technical solution 11) is a control device having a shell that can be freely connected to a pump body via a predetermined gap, and is characterized in that it has a cylindrical portion protruding from the aforementioned shell and through which a cable connected to the aforementioned pump body passes, and the height of the cylindrical portion exceeds the height of the aforementioned gap.

[0035] Effects of the Invention

[0036] As described above, according to the present invention (technical solution 1), the control device is constructed as follows: the control device has a cylindrical portion, the cylindrical portion protrudes from the housing of the control device, and the inner side is used for passing the cable connecting the pump body and the control device. The height of the cylindrical portion exceeds the height of the gap formed between the bottom of the pump body and the housing of the control device, so that water droplets overflowing from the gap will not invade from the inner side of the cylindrical portion.

[0037] Thus, the circuit safety during maintenance work is achieved. In addition, the drip-proof structure can be achieved with a simple structure without using a sealing member. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a structural diagram of an embodiment of the present invention.

[0039] Figure 2 yes Figure 1An enlarged view of the structure around the terminal in FIG.

[0040] Figure 3 It is a structural diagram of another embodiment.

[0041] Figure 4 It is a structural diagram of yet another embodiment.

[0042] Figure 5 This is a diagram showing the arrangement of equipment around a turbomolecular pump.

[0043] Figure 6 This is a diagram showing a state in which the control device is pulled out toward the front panel. DETAILED DESCRIPTION

[0044] Hereinafter, embodiments of the present invention will be described. Figure 1 A structural diagram showing an embodiment of the present invention is shown in FIG. Figure 1 In the embodiment, the pump body 100 and the control device 200 of the turbomolecular pump 10 are integrated.

[0045] An air inlet 101 is formed at the upper end of a cylindrical outer tube 127 of the pump body 100. A rotor 103 is provided inside the outer tube 127, and a plurality of rotor blades 102a, 102b, 102c, etc. of turbine blades for sucking and discharging gas are radially and multi-layered formed on the circumference of the rotor 103.

[0046] A rotor shaft 113 is mounted at the center of the rotating body 103 . The rotor shaft 113 is supported and suspended in mid-air by means of a so-called five-axis controlled magnetic bearing, for example, and its position is controlled.

[0047] The upper radial electromagnets 104 are four electromagnets arranged in pairs on the radial coordinate axes of the rotor shaft 113 and on the mutually orthogonal X-axis and Y-axis. An upper radial sensor 107 composed of four electromagnets is provided close to and corresponding to the upper radial electromagnets 104. The upper radial sensor 107 is configured to detect the radial displacement of the rotating body 103 and send it to the control device 200.

[0048] In the control device 200 , based on the displacement signal detected by the upper radial sensor 107 , the excitation of the upper radial electromagnet 104 is controlled via a compensation loop having a PID regulation function to adjust the upper radial position of the rotor shaft 113 .

[0049] The rotor shaft 113 is formed of a high magnetic permeability material (iron, etc.) and is attracted by the magnetic force of the upper radial electromagnet 104. This adjustment is performed independently in the X-axis direction and the Y-axis direction.

[0050] The lower radial electromagnet 105 and the lower radial sensor 108 are arranged similarly to the upper radial electromagnet 104 and the upper radial sensor 107 , and the lower radial position of the rotor shaft 113 is adjusted to be the same as the upper radial position.

[0051] Furthermore, the axial electromagnets 106A and 106B are arranged to sandwich a disc-shaped metal disk 111 provided at the lower part of the rotor shaft 113. The metal disk 111 is made of a high magnetic permeability material such as iron. An axial sensor 109 is provided to detect the axial displacement of the rotor shaft 113, and its axial displacement signal is sent to the control device 200.

[0052] The axial electromagnets 106A and 106B are excited and controlled via a compensation circuit, which has a PID adjustment function of the control device 200 based on the axial displacement signal. The axial electromagnets 106A and 106B attract the metal disk 111 upward and downward respectively by magnetic force.

[0053] In this way, the control device 200 appropriately adjusts the magnetic force applied to the metal disk 111 by the axial electromagnets 106A and 106B, so that the rotor shaft 113 is magnetically suspended in the axial direction and is held in a non-contact manner in space.

[0054] The motor 121 includes a plurality of magnetic poles circumferentially arranged to surround the rotor shaft 113. Each magnetic pole is controlled by the control device 200 so as to rotationally drive the rotor shaft 113 by electromagnetic force acting between each magnetic pole and the rotor shaft 113.

[0055] A plurality of fixed wings 123a, 123b, 123c, etc. are arranged with a slight gap between the rotating wings 102a, 102b, 102c, etc. The rotating wings 102a, 102b, 102c, etc. are formed to be inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113 in order to transfer exhaust gas molecules downward by collision.

[0056] Furthermore, the fixed blades 123 are similarly formed to be inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113 , and are arranged alternately with the layers of the rotary blades 102 toward the inner side of the outer cylinder 127 .

[0057] Furthermore, one end of the fixing wing 123 is supported in a state of being inserted between a plurality of stacked fixing wing spacers 125a, 125b, 125c, etc.

[0058] The fixed blade spacer 125 is an annular member, and is made of a metal such as aluminum, iron, stainless steel, copper, or an alloy containing these metals as a component.

[0059] An outer cylinder 127 is fixed with a slight gap on the outer periphery of the fixed wing spacer 125. A base portion 129 is provided at the bottom of the outer cylinder 127, and a threaded spacer 131 is provided between the lower portion of the fixed wing spacer 125 and the base portion 129. An exhaust port 133 is formed at the lower portion of the threaded spacer 131 in the base portion 129, and communicates with the outside.

[0060] The threaded spacer 131 is a cylindrical member made of a metal such as aluminum, copper, stainless steel, iron, or an alloy containing these metals as components, and a plurality of spiral thread grooves 131 a are engraved on the inner circumference thereof.

[0061] The spiral direction of the screw groove 131 a is a direction in which the molecules of the exhaust gas are transferred to the exhaust port 133 when the molecules of the exhaust gas move in the rotation direction of the rotating body 103 .

[0062] A rotary wing 102d hangs down at the bottom portion continuous with the rotary wings 102a, 102b, 102c, etc. of the rotary body 103. The outer peripheral surface of the rotary wing 102d is cylindrical, and extends toward the inner peripheral surface of the threaded spacer 131, and approaches the inner peripheral surface of the threaded spacer 131 with a predetermined gap.

[0063] The base portion 129 is a disc-shaped member constituting the base portion of the turbomolecular pump 10 , and is generally made of metal such as iron, aluminum, or stainless steel.

[0064] The base portion 129 not only physically holds the turbomolecular pump 10 but also serves as a heat conduction path, and therefore is preferably made of a metal having rigidity and high thermal conductivity, such as iron, aluminum, or copper.

[0065] In this structure, when the rotary blade 102 is driven by the motor 121 and rotates together with the rotor shaft 113 , exhaust gas from the chamber is sucked through the air intake port 101 by the action of the rotary blade 102 and the fixed blade 123 .

[0066] The exhaust gas sucked from the air inlet 101 passes between the rotary blade 102 and the fixed blade 123 and is transferred to the base portion 129. At this time, the temperature of the rotary blade 102 rises due to frictional heat generated when the exhaust gas contacts or collides with the rotary blade 102, conduction and radiation of heat generated at the motor 121, etc., but the heat is transferred to the fixed blade 123 side by radiation or conduction of gas molecules of the exhaust gas.

[0067] The fixed blade spacers 125 are joined to each other at the outer circumference, and transfer heat received by the fixed blades 123 from the rotary blades 102 and friction heat generated when the exhaust gas contacts or collides with the fixed blades 123 to the outer cylinder 127 and the threaded spacers 131 .

[0068] The exhaust gas transferred to the threaded spacer 131 is guided by the thread groove 131 a and sent to the exhaust port 133 .

[0069] However, the process gas may be introduced into the chamber at a high temperature in order to increase the reactivity. Furthermore, the process gas may be cooled during exhaust and may become solid at a certain temperature and precipitate products into the exhaust system.

[0070] Then, such a process gas may become cold and solid in the turbomolecular pump 10 , and may adhere to the inside of the turbomolecular pump 10 and accumulate.

[0071] If the precipitates of the process gas are deposited inside the turbomolecular pump 10 , the deposits narrow the pump flow path, causing the performance of the turbomolecular pump 10 to deteriorate.

[0072] Here, the aforementioned product is in a state of being easily solidified and attached in the low temperature portion near the exhaust port, especially near the rotary blade 102d and the threaded spacer 131. In order to solve this problem, in the past, a heater not shown in the figure and a ring-shaped water-cooling pipe were wound around the outer periphery of the base part 129, etc., and a temperature sensor not shown in the figure (such as a thermistor) was buried in the base part 129, for example, and the heating of the heater and the cooling of the water-cooling pipe were controlled based on the signal of the temperature sensor, so that the temperature of the base part 129 was maintained at a certain high temperature (set temperature).

[0073] Next, the structure around the terminal for connecting the control cable and the power cable between the pump body 100 and the control device 200 will be described. Figure 2 Indicated in Figure 1 An enlarged view of the structure around the terminal.

[0074] Figure 1 and Figure 2 In the embodiment, a plate 150 for cooperating with the control device 200 to fix the position is installed at the bottom of the base portion 129. A transfer chamber 201 is formed at the base portion 129, and a cover 203 can be freely installed and removed relative to the transfer chamber 201. In addition, a space 205 is formed in the base portion 129 to communicate with the transfer chamber 201 for wiring of magnetic bearings, motors, etc. in the pump body 100. The space 205 is sealed by a sealing joint 207 described later and is in a vacuum atmosphere. On the other hand, the control device 200 and the transfer chamber 201 are in an atmospheric atmosphere.

[0075] In addition, a sealing joint 207 is installed on the wall around the right end of the space 205. A plurality of pins 209 penetrate the sealing joint 207. The right end of the pin 209 is exposed and penetrates a small hole (not shown) of the relay substrate 211. The pin 209 is welded at the small hole portion of the relay substrate 211 for connection with the control device 200.

[0076] The terminal 213 is disposed at the lower end of the relay substrate 211, and one end of the wire harness 215 is detachable.

[0077] A hole 150a communicating with the transfer chamber 201 is formed at the plate 150, and a hole 200a is formed at a portion of the top wall (housing) of the control device 200 that is opposite to the hole 150a. A recess 200b is formed around the upper portion of the hole 200a of the control device 200, and a hollow plate-like portion 221a formed at the bottom of the cylindrical member 221 is fixed relative to the recess 200b by bolts not shown in the figure. The cylindrical member 221 penetrates the hole 150a, and the height of the cylindrical member 221 is formed to be higher than the upper surface of the plate 150. The cylindrical member 221 is equivalent to the cylindrical portion, and the horizontal cross-sectional shape of the cylindrical member 221 is an arbitrary shape such as an ellipse or a square.

[0078] The other end of the harness 215 extends into the control device 200 through the cylindrical member 221 and the hole 200 a , and is connected to a circuit board 217 disposed in the control device 200 via a terminal.

[0079] On the other hand, a control cable and a power cable (not shown) are connected to the left end of the pin 209 and pass through the interior of the space 205 .

[0080] A detachable cover 219 is provided on the right side of the housing forming the control device 200. A bent piece 219a bent into an L-shape is provided at the upper end of the cover 219 to protrude outward. The cover 219 is screwed to the right end of the housing of the control device 200, and the bent piece 219a abuts against the lower surface of the plate 150.

[0081] A gap 220 of about 1 mm is formed between the plate 150 and the control device 200 for heat insulation. The bottom wall of the control device 200 and the plate 150 are fixed by hexagonal bolt pillars (not shown) erected at the four corners of the control device 200. The gap 220 is ensured by the height of the hexagonal bolt pillars.

[0082] Next, the operation of the embodiment of the present invention will be described.

[0083] By disposing the plate 150 at the bottom of the pump body 100, even when the pump body 100 and the control device 200 are of different sizes, the pump body 100 and the control device 200 can be integrated by only changing the plate 150. Therefore, for example, one control device 200 can be freely combined with pump bodies 100 of different capacities. The plate 150 can be fastened to the pump body 100 by bolts and can be removed.

[0084] Here, the lower end of the transfer substrate 211 can also be configured to extend downward in a manner penetrating the interior of the cylindrical member 221. However, when configured to extend downward in this manner, during the loading and unloading operation of the pump body 100 and the control device 200, for example, when the plate 150 is to be removed and the pump body 100 is placed on a table, not only will the lower end portion of the transfer substrate 211 first abut against the table, making the pump body 100 unstable on the table, but the transfer substrate 211 may also be damaged depending on the situation.

[0085] Therefore, preferably, the lower end of the transfer base plate 211 does not protrude in the axial direction compared with the upper surface of the plate 150 or the bottom surface of the pump body 100 .

[0086] Condensation may occur around the base portion 129 due to cooling of the water cooling pipe. In addition, water droplets may leak from the water cooling pipe during maintenance. The possibility of leaked water droplets invading the gap 220 is high. In particular, the possibility of water droplets invading becomes higher when the cover 219 is removed. In this case, there is a possibility that water droplets flow into the recessed portion 200b, but the hollow plate-like portion 221a is sealed and fixed to the recessed portion 200b between the metal surfaces by bolts not shown in the figure, so it is difficult for water droplets to intrude into the control device 200.

[0087] Furthermore, if the flatness of each of the bottom surface of the hollow plate-shaped portion 221 a and the recessed portion 200 b is increased, the sealing effect can be further exhibited.

[0088] Furthermore, in order to achieve a drainage effect in response to the situation where water droplets penetrate into the gap 220 , the gap 220 may be inclined at a right angle to the cover 219 .

[0089] In addition, the cylindrical member 221 penetrates the gap 220 and is formed to be higher than the thickness of the gap 220, so that water drops overflowing from the gap 220 will not invade from the inside of the cylindrical member 221. Furthermore, even if water drops are on the upper surface of the plate 150, since the cylindrical member 221 is protruded higher than the upper surface of the plate 150, the possibility of intrusion beyond the cylindrical member 221 is also less.

[0090] In addition, the bent piece 219a of the cover 219, which is on the pump body 100 side and whose upper end is bent into an L-shape, is protruded outward, so that water drops are difficult to enter the inside of the control device 200. In addition, the bent piece 219a and the plate 150 are sealed and fixed to each other at the metal surface by bolts (not shown in the figure), so water drops are also difficult to enter from the upper end of the cover 219 and the plate 150. In addition, as described later, even in the case where the plate 150 is not provided and the base portion 129 is deformed, the same effect can be obtained by making the bent piece 219a abut against the bottom surface of the base portion 129.

[0091] According to the above description, the drip-proof structure can be realized cheaply by only using the metal processing parts structure such as sheet metal pressing without using a sealing member. In addition, it has a drip-proof function, and it is easy to carry out the assembly and disassembly operation of the harness 215 of the detachable cover 203. Thus, the disassembly of the control device 200 can be carried out simply. In addition, during the maintenance work on site, it has a drip-proof function, and it is also possible to easily open the cover 219 to carry out operations such as replacement of the circuit substrate inside the control device 200.

[0092] In addition, in the embodiment of the present invention, the plate 150 is described as a component independent of the pump body 100. Figure 3 As shown in another embodiment, the plate 150 is not provided as a separate component, and the base portion 129 of the pump body 100 is deformed. In addition, it is also possible to be provided as a base bottom portion 151 relative to the pump body 100. In this case, the bottom wall of the control device 200 and the base bottom portion 151 are fixed by hexagonal bolt pillars not shown in the figure erected at the four corners of the control device 200, as in the case where the plate 150 exists therebetween. And the gap 220 is ensured by the height of the hexagonal bolt pillars. In addition, a base through portion 151a communicating with the transfer chamber 201 is provided in the base bottom portion 151.

[0093] but, Figure 3 In, about Figure 1 The same components are also denoted by the same reference numerals, and description thereof is omitted.

[0094] Here, preferably, as described above, the lower end of the transfer substrate 211 is fixed to the inner side of the pump than the upper surface of the base through-hole 151 a.

[0095] In addition, in the embodiment of the present invention, the cylindrical member 221 is constituted as an independent member, but it may also be Figure 4 As shown in another embodiment, the cylindrical portion 231 is protruded from the top wall of the control device 200. The horizontal cross-sectional shape of the cylindrical portion 231 is an ellipse, a triangle, or any other shape. Figure 4 In, with Figure 1 The same components are denoted by the same reference numerals, and description thereof is omitted.

[0096] In this case, the top wall and the cylindrical portion 231 are formed integrally. Figure 4 It is expressed in Figure 3 Similarly, the base bottom portion 151 of the pump body 100 is formed integrally with the pump body 100 without providing the plate 150, but it may also be configured so as to be integral with the pump body 100. Figure 1 , Figure 2 Similarly, a plate 150 is provided as a component independent of the pump body 100 .

[0097] Next, a method for appropriately arranging the transfer chamber 201 , the lid 219 , and the cover 203 will be described.

[0098] A variety of devices and equipment 260 such as power supplies and piping are generally arranged around the chamber of a semiconductor manufacturing device. In this environment, the turbomolecular pump 10 is often suspended at the bottom of the chamber. Figure 5 As shown, the surface other than the surface where the power switch, power connection connector, cable connector for communication with the semiconductor manufacturing device, etc. of the control device 200 are integrated (front panel 250) is surrounded by the device equipment 260. The reason is that only the front side of the surface where the front panel 250 is located needs to be open for reasons of operation management.

[0099] In such a case, in order to replace the circuit parts on site, it is desirable to be able to remove only the control device 200 while the pump body 100 is suspended at the bottom of the chamber. And, therefore, it is desirable to have a configuration in which the cover 219 and the hood 203 are easily removed without obstructing the device 260. Figure 6 As shown, the control device 200 can be easily pulled out when being pulled out from the device 260 along the front side which is the arrangement direction of the front panel 250 .

[0100] At this time, if the transfer chamber 201, the cover 219, and the hood 203 are arranged near the front panel 250 of the control device 200, the operator can enter the transfer chamber 201, the cover 219, and the hood 203 from the released part, and the maintenance work on site is easy. Figure 6 As shown, considering the ease of maintenance work, it is desired that the arrangement direction L1 of the transfer chamber 201, the cover 219, and the cover 203, as viewed from the center point O of the rotor shaft 113 of the turbomolecular pump 10, is arranged so that the angle α formed with the arrangement direction L2 of the front panel 250 is within 90 degrees.

[0101] In addition, the present invention can be variously modified and combined with the embodiments as long as they do not depart from the spirit of the present invention, and the present invention obviously also covers such modifications and the like.

[0102] Description of Reference Numerals

[0103] 10 Turbomolecular pump

[0104] 100 Pump body

[0105] 113 rotor shaft

[0106] 129 Base

[0107] 150 Plates

[0108] 151 Base bottom

[0109] 200 Control device

[0110] 150a, 200a holes

[0111] 201 Transit Room

[0112] 203 Hood

[0113] 205 Space

[0114] 207 Sealing joint

[0115] 209 Pins

[0116] 211 Transfer substrate

[0117] 213 terminal

[0118] 215 Wiring Harness

[0119] 219 Cover

[0120] 220 Gap

[0121] 221 Cylindrical parts

[0122] 221a Hollow plate part

[0123] 231 Cylindrical part

[0124] 250 front panel.

Claims

1. A vacuum pump, wherein a pump body and a control device for controlling the pump body are integrated, characterized in that: The pump body has a sealing joint having a plurality of pins. The aforementioned plurality of pins are connected to the transfer substrate. The aforementioned transfer substrate is connected to the aforementioned control device via a cable. The control device is provided with a cylindrical portion, the cylindrical portion protruding from a housing of the control device toward the bottom of the pump body, and the cable is passed through the inside thereof. The cylindrical portion passes through a gap formed between the bottom of the pump body and the housing of the control device, and the height of the cylindrical portion exceeds the height of the gap. The cylindrical portion includes a hollow plate-shaped portion for preventing water drops from intruding into the control device.

2. The vacuum pump according to claim 1, characterized in that The pump body includes a transfer chamber and a cover that is detachable from the transfer chamber. The transfer chamber accommodates the transfer substrate.

3. The vacuum pump according to claim 1, characterized in that A detachable plate for fastening and connecting the pump body and the control device is provided at the bottom of the pump body.

4. The vacuum pump according to claim 2, characterized in that A detachable plate for fastening and connecting the pump body and the control device is provided at the bottom of the pump body.

5. The vacuum pump according to claim 3, characterized in that The height of the cylindrical portion is formed to be higher than the sum of the height of the gap and the plate.

6. The vacuum pump according to claim 4, characterized in that The height of the cylindrical portion is formed to be higher than the sum of the height of the gap and the plate.

7. The vacuum pump according to any one of claims 1 to 4, characterized in that The base portion of the pump body is provided with a base penetration portion, The height of the cylindrical portion is formed to be higher than the sum of the height of the gap and the base through-portion.

8. The vacuum pump according to any one of claims 1 to 6, characterized in that The cylindrical portion is formed by a member that is separate from the housing of the control device.

9. The vacuum pump according to claim 7, characterized in that The cylindrical portion is formed by a member that is separate from the housing of the control device.

10. The vacuum pump according to claim 3 or 4, characterized in that: A cover is provided which is detachably mounted on the side of the housing of the control device. The cover has a bent piece at one end thereof. The bent piece is in contact with the surface of the plate.

11. The vacuum pump according to claim 7, characterized in that A cover is provided which is detachably mounted on the side of the housing of the control device. The cover has a bent piece at one end thereof. The bent piece is in contact with the surface of the base.

12. The vacuum pump according to claim 2, characterized in that The lower end of the relay substrate is provided so as not to protrude downward from the lowermost end of the pump body.

13. The vacuum pump according to claim 10, characterized in that A rotor shaft is internally mounted in the pump body and a front panel is externally mounted on the control device, wherein the cover is disposed within 90 degrees from the arrangement direction of the front panel when viewed from the central axis of the rotor shaft.

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