An X-axis sliding mechanism of an electromagnet slide rack

By fixing the slide rack with electromagnet and neodymium magnet blocks, combined with displacement sensor and limiting device, the problem of vibration of the slide rack during the scanning process is solved, and the stable fixation and precise movement of the slide rack and the stage is achieved, improving the Scan quality and equipment stability.

CN113720781BActive Publication Date: 2024-12-13SUZHOU FENGTAI MEDICAL TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202111119512.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-09-24
Publication Date
2024-12-13
Estimated Expiration
2041-09-24

AI Technical Summary

Technical Problem

The existing slide rack stage movement mechanism has poor fixing effect, which causes the slide rack to vibrate during the scanning process and cannot maintain stable movement, affecting the scanning effect.

Method used

The X-axis sliding mechanism of the solenoid slide rack is used to fix the slide rack by the solenoid coil and neodymium magnet block, and the displacement sensor and limiting device are combined to ensure the stability and precise movement of the slide rack and the stage.

Benefits of technology

The integrated fixation of the slide rack and the stage is achieved, the scanning stability and quality are improved, the stable movement of the slide plane is ensured, and the scanning accuracy and the service life of the equipment are improved.

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Abstract

The invention discloses an X-axis sliding mechanism of an electromagnet glass slide rack, comprising a glass slide rack platform integrated part composed of a connecting plate and a double-arm bracket, the lower surface of the connecting plate is connected to the X-axis bottom plate through an X-axis slide rail assembly, a push block is provided on the connecting plate, and a displacement sensor and a limit device are respectively provided on the front and rear sides of the X-axis slide rail assembly; a support plate is provided on the left forearm of the double-arm bracket, an electromagnet seat is installed on the right forearm of the double-arm bracket, an electromagnet coil, a small magnet block and a neodymium magnet block are embedded on the electromagnet seat, the glass slide rack is horizontally inserted in the double-arm bracket, and the glass slide rack is supported on the support plate and the right side block. The invention realizes the preliminary positioning of the glass slide rack by the small magnet block and the neodymium magnet block, realizes the complete fixation of the glass slide rack by the electromagnet coil, so that the glass slide rack and the glass slide rack platform integrated part temporarily form a whole, which not only ensures the stability of the glass slide plane during scanning and improves the scanning quality, but also has novel conception, compact structure, reliable performance and easy operation.
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Description

Technical Field

[0001] The invention belongs to the technical field of machine vision imaging or electron microscope scanning, and in particular relates to an X-axis sliding mechanism of an electromagnet glass slide rack. Background Art

[0002] In the field of machine vision imaging or electron microscope scanning, in order to restore the natural state of the test sample and ensure the accuracy of the test results, the requirements for the movement stability of the slide rack in the scanning area are getting higher and higher. Most of the existing slide rack stage motion mechanisms use elastic clips or small suction magnets to clamp or fix the slide rack, but this method has a poor fixing effect. After fixation, the slide rack and the slide rack stage cannot form a whole, which causes the slide rack to vibrate on the slide rack stage during the scanning process, and the stable movement of the slide rack cannot be maintained, so the scanning effect has not been improved. Summary of the invention

[0003] In view of the defects of the prior art, the present invention provides an electromagnet glass slide rack X-axis sliding mechanism, which firmly fixes the glass slide rack on the glass slide rack carrier through the electromagnet to ensure that the glass slide rack does not vibrate with the glass slide rack carrier during the scanning process, thereby maintaining stability and improving the scanning effect.

[0004] In order to solve the above technical problems and achieve the above technical effects, the present invention is implemented through the following technical solutions:

[0005] An electromagnetic glass slide rack X-axis sliding mechanism comprises a glass slide rack carrier integrated part, the glass slide rack carrier integrated part is composed of a connecting plate and a double-arm bracket located at the front end of the connecting plate, the lower surface of the connecting plate is connected to a slider of an X-axis slide rail assembly, the upper surface of the connecting plate is provided with a push block for transmitting the thrust of the motor, the slide rail of the X-axis slide rail assembly is installed on an X-axis bottom plate, and the glass slide rack carrier integrated part realizes bidirectional movement in the X direction on the X-axis bottom plate through the X-axis slide rail assembly; the front side of the X-axis slide rail assembly is provided with a displacement sensor for reading the X-direction movement position of the glass slide rack carrier integrated part, and the rear side of the X-axis slide rail assembly is provided with a limit device for limiting the X-direction movement range of the glass slide rack carrier integrated part; the double-arm bracket is provided with a connecting plate and a slider of an X-axis slide rail assembly, the upper surface of the connecting plate is provided with a push block for transmitting the thrust of the motor, the slide rail of the X-axis slide rail assembly is installed on an X-axis bottom plate, and the glass slide rack carrier integrated part realizes bidirectional movement in the X direction on the X-axis bottom plate; the front side of the X-axis slide rail assembly is provided with a displacement sensor for reading the X-direction movement position of the glass slide rack carrier integrated part, and the rear side of the X-axis slide rail assembly is provided with a limit device for limiting the X-direction movement range of the glass slide rack carrier integrated part; A support plate for supporting the left edge of the glass slide rack is arranged on the inner side of the left forearm of the arm bracket, and an electromagnet seat for supporting the right edge of the glass slide rack is installed on the inner side of the right forearm of the double-arm bracket, and an electromagnet coil and a small magnet block for fixing the glass slide rack are embedded on the upper surface of the electromagnet seat, and a neodymium magnet block for fixing the glass slide rack is embedded on the side surface of the electromagnet seat; the glass slide rack is horizontally inserted in the double-arm bracket, and the glass slide rack is supported on the support plate and the right side block, the right part of the glass slide rack is made of metal material that can be adsorbed by a magnet, the neodymium magnet block sucks the right end face of the glass slide rack from the side, and the small magnet block sucks the lower surface of the right part of the glass slide rack from below, and the electromagnet coil sucks the lower surface of the right part of the glass slide rack from below when energized.

[0006] Furthermore, the displacement sensor is composed of an X-ray scale, an X-ray scale fixing plate, an X-ray scale reading head, an X-ray scale reading head bracket and an X-ray scale reading head fixing seat; the X-ray scale is mounted on the lower surface of the connecting plate of the slide holder stage integrated part through the X-ray scale fixing plate; the X-ray scale reading head fixing seat is mounted on the X-axis bottom plate; the X-ray scale reading head is mounted on the X-ray scale reading head fixing seat through the X-ray scale reading head bracket; the X-ray scale is located on the front side of the slider of the X-axis slide rail assembly; the X-ray scale reading head is located on the front side of the X-ray scale; and the reading accuracy of the X-ray scale reading head is 0.1 μm.

[0007] Furthermore, the limit device is composed of two X-axis limit baffles, two X-axis optical coupling limit switches and an X-axis optical coupling limit switch fixing plate, the two X-axis limit baffles are respectively installed on the left and right sides of the rear surface of the connecting plate of the glass slide rack carrier integrated part, the X-axis optical coupling limit switch fixing plate is installed on the upper surface of the X-axis bottom plate, and the two X-axis optical coupling limit switches are respectively installed on the left and right ends of the X-axis optical coupling limit switch fixing plate; the two X-axis limit baffles are located above the X-axis optical coupling limit switch fixing plate, and when the glass slide rack carrier integrated part moves to the left limit position of the X-axis slide rail assembly, the X-axis limit baffle on the left triggers the X-axis optical coupling limit switch on the left, and when the glass slide rack carrier integrated part moves to the right limit position of the X-axis slide rail assembly, the X-axis limit baffle on the right triggers the X-axis optical coupling limit switch on the right.

[0008] Furthermore, the push block is fixedly mounted on the upper surface of the connecting plate of the glass slide rack carrier integrated part by three parallel X-axis linear guides, and the X-axis linear guides are respectively locked with the push block and the connecting plate of the glass slide rack carrier integrated part by corresponding screws, thereby playing a role of buffering and shock absorption, thereby realizing vibration isolation of the motor thrust.

[0009] Furthermore, a calibration block is provided at the rear end of the lower surface of the connecting plate of the glass slide rack carrier integrated part, so that the assembly position of the glass slide rack carrier integrated part and the X-axis slide rail assembly can be quickly determined.

[0010] Furthermore, the glass slide rack includes a glass slide mounting plate and a magnet adsorption plate, the glass slide mounting plate is provided with two glass slide mounting positions arranged in front and behind, each of the glass slide mounting positions is respectively provided with a group of glass slide limiting positioning components, the magnet adsorption plate is made of a metal material adsorbed by a magnet, the magnet adsorption plate is horizontally spliced ​​at the right end of the glass slide mounting plate, and the magnet adsorption plate is locked and connected to the glass slide mounting plate by three countersunk screws screwed into the right end surface of the magnet adsorption plate, and at the same time, a locking fixing is respectively provided on the front and rear end surfaces of the splicing of the magnet adsorption plate and the glass slide mounting plate to ensure a reinforced connection.

[0011] Furthermore, a pull ring is provided at the front end of the glass slide mounting plate, so as to facilitate taking and placing of the glass slide rack.

[0012] Furthermore, the glass slide limiting and positioning assembly includes a limiting pin, a tail inclined block, a push plate, a needle gauge and a spring, the left end of each glass slide mounting point is fixedly installed with a tail inclined block, the left and right ends of the front edge or the left and right ends of the rear edge of each glass slide mounting point are respectively fixedly installed with a limiting pin, the right end of each glass slide mounting point is respectively provided with a push plate slidable left and right through a needle gauge, each needle gauge is sleeved with a spring, one end of the spring is in contact with the push plate, and the other end of the spring is in contact with the glass slide mounting plate, and each push plate is provided with anti-slip stripes for increasing friction, thereby ensuring the fixing effect of the glass slide on the glass slide rack.

[0013] Furthermore, three of the electromagnet coils are evenly embedded on the upper surface of the electromagnet seat along the Y-axis direction, two of the small magnet blocks are embedded on the upper surface of the electromagnet seat, and the two small magnet blocks are respectively located between two adjacent electromagnet coils, and three of the neodymium magnet blocks are evenly embedded on the side surface of the electromagnet seat along the Y-axis direction, thereby ensuring the fixing effect of the glass slide rack on the glass slide rack carrier integrated part.

[0014] Furthermore, an electromagnet wire slot plate is provided on the right side surface of the slide rack carrier integrated part, so as to cover the lead wire of the electromagnet coil led out from the slide rack carrier integrated part, thereby beautifying the appearance of the equipment.

[0015] The beneficial effects of the present invention are:

[0016] 1. The present invention realizes the preliminary positioning of the glass slide rack by arranging a small magnet block and a neodymium magnet block on the glass slide rack carrier integrated part, and realizes the complete fixation of the glass slide rack by arranging an electromagnet coil on the glass slide rack carrier integrated part. The large magnetic force after the electromagnet seat is energized firmly holds the glass slide rack, so that the glass slide rack and the glass slide rack carrier integrated part temporarily form a whole, which not only ensures the stability of the glass slide plane during scanning and improves the scanning quality, but also has a novel concept, compact structure, reliable performance and easy operation.

[0017] 2. The present invention realizes the locking connection between the push block and the slide holder platform integrated part through three parallel X-axis linear guide rails, plays a role of buffering and shock absorption, realizes the vibration isolation effect of the motor thrust, thereby improving the sliding stability of the slide holder platform integrated part, and further ensuring the scanning quality.

[0018] 3. The present invention uses a displacement sensor to detect the displacement distance of the slide holder stage in the X direction in real time, which has good stability and high precision.

[0019] 4. The present invention can limit the displacement distance of the slide rack carrier integrated part in the X direction through the limiting device, thereby effectively preventing the slide rack carrier integrated part from sliding excessively, and avoiding damage to the motor caused by excessive sliding of the slide rack carrier integrated part, thereby improving the service life of the mechanism.

[0020] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. The specific implementation of the present invention is given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the rear structure of the present invention;

[0024] Figure 3 It is a schematic diagram of the lower structure of the present invention;

[0025] Figure 4 It is an enlarged view of the assembly relationship between the slide rack stage integrated part and the slide rack of the present invention;

[0026] Figure 5 for Figure 4 Schematic diagram of the structure after removing the slide rack;

[0027] Figure 6 It is a schematic diagram of the three-dimensional structure of the slide rack of the present invention. DETAILED DESCRIPTION

[0028] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. The descriptions herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0029] See also Figure 1-5As shown, an electromagnetic glass slide rack X-axis sliding mechanism comprises a glass slide rack carrier integrated part 1, the glass slide rack carrier integrated part 1 is composed of a connecting plate 101 and a double-arm bracket 102 located at the front end of the connecting plate 101, the lower surface of the connecting plate 101 is connected to a slider of an X-axis slide rail assembly 2, the upper surface of the connecting plate 101 is provided with a push block 3 for transmitting the thrust of the motor, the slide rail of the X-axis slide rail assembly 2 is installed on an X-axis bottom plate 4, and the glass slide rack carrier integrated part 1 realizes bidirectional movement in the X direction on the X-axis bottom plate 4 through the X-axis slide rail assembly 2; the front side of the X-axis slide rail assembly 2 is provided with a displacement sensor for reading the X-direction movement position of the glass slide rack carrier integrated part 1, and the rear side of the X-axis slide rail assembly 2 is provided with a limit device for limiting the X-direction movement range of the glass slide rack carrier integrated part 1; the inner side of the left forearm of the double-arm bracket 102 is provided with a support plate 10 for supporting the left edge of the glass slide rack 5, the double An electromagnet seat 6 for supporting the right edge of the glass slide rack 5 is installed on the inner side of the right forearm of the arm support 102. An electromagnet coil 7 and a small magnet block 8 for fixing the glass slide rack 5 are embedded on the upper surface of the electromagnet seat 6. A neodymium magnet block 9 for fixing the glass slide rack 5 is embedded on the side surface of the electromagnet seat 6. The small magnet block 8 and the neodymium magnet block 9 both play a role in maintaining the initial position of the glass slide rack 5. The electromagnet coil 7 plays a complete role in fixing the glass slide rack 5 through its large magnetic force after being energized. The function of fixing the glass slide rack 5; the glass slide rack 5 is horizontally inserted in the double-arm bracket 102, and the glass slide rack 5 is supported on the support plate 10 and the electromagnet seat 6, the right part of the glass slide rack 5 is made of metal material that can be adsorbed by a magnet, the neodymium magnet block 9 attracts the right end face of the glass slide rack 5 from the side, the small magnet block 8 attracts the lower surface of the right part of the glass slide rack 5 from below, and the electromagnet coil 7 attracts the lower surface of the right part of the glass slide rack 5 from below when powered on.

[0030] For further information, see Figure 3 As shown, the displacement sensor is composed of an X-ray scale 11, an X-ray scale fixing plate 12, an X-ray scale reading head 13, an X-ray scale reading head bracket 14 and an X-ray scale reading head fixing seat 15. The X-ray scale 11 is installed on the lower surface of the connecting plate 101 of the glass slide rack stage integrated part 1 through the X-ray scale fixing plate 12, the X-ray scale reading head fixing seat 15 is installed on the X-axis base plate 4, the X-ray scale reading head 13 is installed on the X-ray scale reading head fixing seat 15 through the X-ray scale reading head bracket 14, the X-ray scale 11 is located on the front side of the slider of the X-axis slide rail assembly 2, the X-ray scale reading head 13 is located on the front side of the X-ray scale 11, and the reading accuracy of the X-ray scale reading head 13 is 0.1μm.

[0031] For further information, see Figure 2As shown, the limit device is composed of two X-axis limit baffles 16, two X-axis optical coupling limit switches 17 and an X-axis optical coupling limit switch fixing plate 18, the two X-axis limit baffles 16 are respectively installed on the left and right sides of the rear surface of the connecting plate 101 of the slide rack stage integrated part 1, the X-axis optical coupling limit switch fixing plate 18 is installed on the upper surface of the X-axis bottom plate 4, and the two X-axis optical coupling limit switches 17 are respectively installed on the left and right ends of the X-axis optical coupling limit switch fixing plate 18; The two X-axis limit baffles 16 are located above the X-axis optical coupling limit switch fixing plate 18, and when the slide rack carrier integrated part 1 moves to the left extreme position of the X-axis slide rail assembly 2, the X-axis limit baffle 16 on the left triggers the X-axis optical coupling limit switch 17 on the left, and when the slide rack carrier integrated part 1 moves to the right extreme position of the X-axis slide rail assembly 2, the X-axis limit baffle 16 on the right triggers the X-axis optical coupling limit switch 17 on the right.

[0032] For further information, see Figure 1-5 As shown, the push block 3 is fixedly mounted on the upper surface of the connecting plate 101 of the glass slide rack carrier integrated part 1 by three parallel X-axis linear guides 19. The X-axis linear guides 19 are respectively locked with the push block 3 and the connecting plate 101 of the glass slide rack carrier integrated part 1 by corresponding screws, playing a role of buffering and shock absorption, thereby realizing vibration isolation of the motor thrust.

[0033] For further information, see Figure 2 As shown, a calibration block 20 is provided at the rear end of the lower surface of the connecting plate 101 of the slide rack carrier integrated part 1, so that the assembly position of the slide rack carrier integrated part 1 and the X-axis slide rail assembly 2 can be quickly determined.

[0034] For further information, see Figure 6 As shown, the glass slide rack 5 includes a glass slide mounting plate 501 and a magnet adsorption plate 502. The glass slide mounting plate 501 is provided with two glass slide mounting holes arranged in front and back, and each of the glass slide mounting holes is respectively provided with a group of glass slide limiting positioning components. The magnet adsorption plate 502 is made of a metal material adsorbed by a magnet. The magnet adsorption plate 502 is horizontally spliced ​​at the right end of the glass slide mounting plate 501, and the magnet adsorption plate 502 is locked and connected to the glass slide mounting plate 501 by three countersunk screws 503 screwed into the right end surface of the magnet adsorption plate 502. At the same time, a locking fixing piece 504 is respectively provided on the front and rear end surfaces of the splicing place between the magnet adsorption plate 502 and the glass slide mounting plate 501 to ensure a reinforced connection.

[0035] Furthermore, the flatness of the contact portion between the magnet adsorption plate 502 and the electromagnet seat 6 is 5 μm, thereby ensuring the fit between the slide rack 5 and the electromagnet seat 6 .

[0036] For further information, see Figure 6 As shown, a pull ring 505 is provided at the front end of the glass slide mounting plate 501 to facilitate taking and placing of the glass slide rack 5 .

[0037] For further information, see Figure 6 As shown, the glass slide limiting and positioning assembly includes a limiting pin 506, a tail inclined block 507, a push plate 508, a needle gauge 509 and a spring. The left end of each glass slide mounting point is fixedly installed with a tail inclined block 507, and the left and right ends of the front edge or the left and right ends of the rear edge of each glass slide mounting point are respectively fixedly installed with a limiting pin 506. The right end of each glass slide mounting point is respectively provided with a push plate 508 slidably provided left and right through a needle gauge 509. Each needle gauge 509 is sleeved with a spring, one end of the spring is in contact with the push plate 508, and the other end of the spring is in contact with the glass slide mounting plate 501. Each push plate 508 is provided with an anti-slip stripe 510 for increasing friction, thereby ensuring the fixing effect of the glass slide 22 on the glass slide rack 5.

[0038] For further information, see Figure 5 As shown, the upper surface of the electromagnet seat 6 is evenly embedded with three electromagnet coils 7 along the Y-axis direction, the upper surface of the electromagnet seat 6 is embedded with two small magnet blocks 8, and the two small magnet blocks 8 are respectively located between two adjacent electromagnet coils 7, and the side surface of the electromagnet seat 6 is evenly embedded with three neodymium magnet blocks 9 along the Y-axis direction, thereby ensuring the fixing effect of the glass slide rack 5 on the glass slide rack carrier integrated part 1.

[0039] Furthermore, the number of the electromagnet coils 7 can be designed to be redundant, that is, when one of the electromagnet coils 7 fails, the remaining two electromagnet coils 7 that are working normally can still firmly hold the slide rack 5 .

[0040] For further information, see Figure 1 As shown, an electromagnet wire slot plate 21 is provided on the right side surface of the slide rack stage integrated part 1, so as to cover the lead wire of the electromagnet coil 7 led out from the slide rack stage integrated part 1, thereby beautifying the appearance of the equipment.

[0041] The working principle of the present invention is as follows:

[0042] First, push the push plate 508 to the right, put the glass slide 22 to be scanned into the glass slide mounting hole of the glass slide rack 5, and the glass slide 22 is limited in the Y direction by the limiting pin 506 on the front edge or the rear edge of the glass slide mounting hole. Then release the push plate 508, and the push plate 508 automatically resets to the left along the needle gauge 509 under the action of the spring. The tail inclined block 507 at the left end of the glass slide mounting hole and the reset push plate 508 clamp the glass slide 22 to achieve positioning in the X direction, thereby effectively fixing the glass slide 22 on the glass slide rack 5;

[0043] Then, the slide rack 5 with the glass slide 22 fixed thereon is inserted into the double-arm bracket 102 at the front end of the slide rack stage integrated part 1. At this time, the left edge of the slide rack 5 is supported on the support plate 10 of the left forearm of the double-arm bracket 102, and the right part of the slide rack 5 is supported on the electromagnet seat 6 on the right forearm of the double-arm bracket 102. The small magnet block 8 on the upper surface of the electromagnet seat 6 and the neodymium magnet block 9 on the side surface of the electromagnet seat 6 are used to initially position the slide rack 5 from the Z direction and the X direction respectively.

[0044] Since the flatness of the contact part between the glass slide rack 5 and the electromagnet seat 6 is 5μm, in order to ensure the horizontality of the glass slide rack 5 when scanning the slide, the electromagnet seat 6 needs to be horizontally adjusted before scanning begins; in the front and back directions, the two threaded holes on the top of the electromagnet seat 6 are used to install the top screws to achieve horizontal adjustment in the front and back directions; in the left and right directions, metal gaskets of varying thicknesses (0.001-0.1mm) are used to raise the height to achieve horizontal adjustment in the left and right directions.

[0045] When scanning begins, the electromagnet coil 7 on the upper surface of the electromagnet seat 6 is energized to generate a strong magnetic force and firmly absorb the right part of the slide rack 5, so that the slide rack 5 is completely fixed in the double-arm bracket 102 at the front end of the slide rack stage integrated part 1, so that the slide rack 5 and the slide rack stage integrated part 1 form a whole when scanning, ensuring the stability of the plane of the slide 22 during scanning and improving the scanning quality;

[0046] After scanning is completed, the electromagnet coil 7 is powered off, the strong magnetic force disappears, and the slide rack 5 can be smoothly pulled out from the double-arm bracket 102 at the front end of the slide rack platform integrated part 1, and then the push plate 508 is pushed to the right again, and the slide 22 to be scanned is removed from the slide mounting point of the slide rack 5, and finally the push plate 508 is released again. Under the action of the spring, the push plate 508 automatically resets to the left along the needle gauge 509, waiting for the next batch of slides 22 to be replaced, which is convenient for the replacement of the slides 22 and the insertion and removal of the slide rack 5.

[0047] During the scanning process, the displacement sensor composed of the X-ray scale 11, the X-ray scale fixing plate 12, the X-ray scale reading head 13, the X-ray scale reading head bracket 14 and the X-ray scale reading head fixing seat 15 will detect the displacement distance of the slide holder stage integrated part 1 in the X direction in real time. The X-ray scale 11 is fixed to the lower surface of the slide holder stage integrated part 1 through the X-ray scale fixing plate 12, and the X-ray scale reading head 13 is fixed to the X-axis bottom plate 4 through the X-ray scale reading head bracket 14 and the X-ray scale reading head fixing seat 15. When the slide holder stage integrated part 1 slides on the X-axis bottom plate 4 through the X-axis slide rail assembly 2, the X-ray scale 11 moves along with the slide holder stage integrated part 1. The push block 3 and the slide holder platform integral part 1 are locked and connected through three parallel X-axis linear guide rails 19, which play a role of buffering and shock absorption, and realize the vibration isolation of the motor thrust. Therefore, not only the sliding stability of the slide holder platform integral part 1 is improved, but also the stability of the X-ray scale reading head 13 during detection is improved. In addition, the detection accuracy of the X-ray scale reading head 13 can reach 0.1μm, and the accuracy is relatively high.

[0048] During the scanning process, the limit device composed of two X-axis limit baffles 16, two X-axis optical coupling limit switches 17 and an X-axis optical coupling limit switch fixing plate 18 can limit the displacement distance of the slide rack stage integrated part 1 in the X direction. When the slide rack stage integrated part 1 moves to the left limit position of the X-axis slide rail assembly 2, the X-axis limit baffle 16 on the left triggers the X-axis optical coupling limit switch 17 on the left, thereby stopping the motor from driving the slide rack stage integrated part 1 to work to the left; and when the slide rack stage integrated part 1 moves to the right limit position of the X-axis slide rail assembly 2, the X-axis limit baffle 16 on the right triggers the X-axis optical coupling limit switch 17 on the right, thereby stopping the motor from driving the slide rack stage integrated part 1 to work to the right.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An electromagnetic slide rack X-axis sliding mechanism, Features: The invention comprises a glass slide rack platform integrated part (1), the glass slide rack platform integrated part (1) comprises a connecting plate (101) and a double-arm bracket (102) located at the front end of the connecting plate (101), the lower surface of the connecting plate (101) is connected to a slider of an X-axis slide rail assembly (2), the upper surface of the connecting plate (101) is provided with a push block (3) for transmitting the thrust of a motor, the slide rail of the X-axis slide rail assembly (2) is installed on an X-axis bottom plate (4); the front side of the X-axis slide rail assembly (2) is provided with a displacement sensor for reading the X-direction movement position of the glass slide rack platform integrated part (1), the rear side of the X-axis slide rail assembly (2) is provided with a limit device for limiting the X-direction movement range of the glass slide rack platform integrated part (1); the inner side of the left forearm of the double-arm bracket (102) is provided with a support plate (10) for supporting the left edge of the glass slide rack (5), the An electromagnet seat (6) for supporting the right edge of the glass slide rack (5) is installed on the inner side of the right forearm of the double-arm bracket (102); an electromagnet coil (7) and a small magnet block (8) for fixing the glass slide rack (5) are embedded on the upper surface of the electromagnet seat (6); a neodymium magnet block (9) for fixing the glass slide rack (5) is embedded on the side surface of the electromagnet seat (6); the glass slide rack (5) is horizontally inserted in the double-arm bracket (102), and the glass slide rack (5) is supported on the support plate (10) and the electromagnet seat (6); the right part of the glass slide rack (5) is made of a metal material that can be adsorbed by a magnet; the neodymium magnet block (9) adsorbs the right end surface of the glass slide rack (5) from the side; the small magnet block (8) adsorbs the lower surface of the right part of the glass slide rack (5) from below; and the electromagnet coil (7) adsorbs the lower surface of the right part of the glass slide rack (5) from below when power is turned on; The push block (3) is fixedly mounted on the upper surface of the connecting plate (101) of the slide rack platform integrated part (1) via three parallel X-axis linear guide rails (19); the X-axis linear guide rails (19) are respectively locked and connected to the push block (3) and the connecting plate (101) of the slide rack platform integrated part (1) via corresponding screws, so as to achieve vibration isolation of the motor thrust; A calibration block (20) for quickly determining the assembly position of the slide rack platform integrated part (1) and the X-axis slide rail assembly (2) is provided at the rear end of the lower surface of the connecting plate (101) of the slide rack platform integrated part (1).

2. The X-axis sliding mechanism of the electromagnet slide rack according to claim 1, Features: The displacement sensor is composed of an X-ray scale (11), an X-ray scale fixing plate (12), an X-ray scale reading head (13), an X-ray scale reading head bracket (14) and an X-ray scale reading head fixing seat (15); the X-ray scale (11) is mounted on the lower surface of the connecting plate (101) of the glass slide rack platform integrated part (1) through the X-ray scale fixing plate (12); the X-ray scale reading head fixing seat (15) is mounted on the X-axis bottom plate (4); the X-ray scale reading head (13) is mounted on the X-ray scale reading head fixing seat (15) through the X-ray scale reading head bracket (14); the X-ray scale (11) is located on the front side of the slider of the X-axis slide rail assembly (2); the X-ray scale reading head (13) is located on the front side of the X-ray scale (11); and the reading accuracy of the X-ray scale reading head (13) is 0.1 μm.

3. The X-axis sliding mechanism of the electromagnet slide rack according to claim 1, Features: The limit device is composed of two X-axis limit baffles (16), two X-axis optical coupling limit switches (17) and an X-axis optical coupling limit switch fixing plate (18), the two X-axis limit baffles (16) are respectively mounted on the left and right sides of the rear surface of the connecting plate (101) of the slide rack carrier integrated part (1), the X-axis optical coupling limit switch fixing plate (18) is mounted on the upper surface of the X-axis bottom plate (4), and the two X-axis optical coupling limit switches (17) are respectively mounted on the left and right ends of the X-axis optical coupling limit switch fixing plate (18); the two The X-axis limit baffle (16) is located above the X-axis optical coupling limit switch fixing plate (18), and when the slide rack carrier integrated part (1) moves to the left extreme position of the X-axis slide rail assembly (2), the X-axis limit baffle (16) on the left side triggers the X-axis optical coupling limit switch (17) on the left side, and when the slide rack carrier integrated part (1) moves to the right extreme position of the X-axis slide rail assembly (2), the X-axis limit baffle (16) on the right side triggers the X-axis optical coupling limit switch (17) on the right side.

4. The X-axis sliding mechanism of the electromagnet slide rack according to claim 1, Features: The glass slide rack (5) comprises a glass slide mounting plate (501) and a magnet adsorption plate (502). The glass slide mounting plate (501) is provided with two glass slide mounting holes arranged in a front-to-back manner. A group of glass slide limiting positioning components are respectively arranged on each of the glass slide mounting holes. The magnet adsorption plate (502) is made of a metal material adsorbed by a magnet. The magnet adsorption plate (502) is horizontally spliced ​​to the right end of the glass slide mounting plate (501), and the magnet adsorption plate (502) is locked and connected to the glass slide mounting plate (501) by three countersunk screws (503) screwed into the right end surface of the magnet adsorption plate (502). At the same time, a locking fixing piece (504) for reinforcing the connection is respectively arranged on the front and rear end surfaces of the splicing place of the magnet adsorption plate (502) and the glass slide mounting plate (501).

5. The X-axis sliding mechanism of the electromagnet slide rack according to claim 4, Features: The front end of the glass slide mounting plate (501) is provided with a pull ring (505) for facilitating the taking and placing of the glass slide rack.

6. The X-axis sliding mechanism of the electromagnet slide rack according to claim 4, Features: The glass slide limiting and positioning assembly comprises a limiting pin (506), a tail inclined block (507), a push plate (508), a needle gauge (509) and a spring. The left end of each glass slide mounting hole is fixedly mounted with a tail inclined block (507). The left and right ends of the front edge or the left and right ends of the rear edge of each glass slide mounting hole are respectively fixedly mounted with a limiting pin (506). The right end of each glass slide mounting hole is respectively provided with a push plate (508) slidably disposed left and right via a needle gauge (509). Each needle gauge (509) is sleeved with a spring. One end of the spring contacts the push plate (508) and the other end of the spring contacts the glass slide mounting plate (501). Each push plate (508) is provided with an anti-slip stripe (510) for increasing friction.

7. The X-axis sliding mechanism of the electromagnet slide rack according to claim 1, Features: The upper surface of the electromagnet seat (6) is evenly embedded with three electromagnet coils (7) along the Y-axis direction, the upper surface of the electromagnet seat (6) is embedded with two small magnet blocks (8), and the two small magnet blocks (8) are respectively located between two adjacent electromagnet coils (7), and the side surface of the electromagnet seat (6) is evenly embedded with three neodymium magnet blocks (9) along the Y-axis direction.

8. The X-axis sliding mechanism of the electromagnet slide rack according to claim 1, Features: An electromagnet wire slot plate (21) for covering the lead wires of the electromagnet coil (7) is arranged on the right side surface of the glass slide rack stage integrated part (1).

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