Horizontal Automatic Adjustment Lifting System and Method

Abstract

This application relates to a lifting system and method with automatic horizontal adjustment. In an embodiment of the present application, the lifting system with automatic horizontal adjustment includes: a plurality of guiding and supporting devices connected to the device to be lifted; a plurality of lifting mechanisms respectively connected to a corresponding one of the plurality of guiding and supporting devices; a plurality of motors respectively disposed on a corresponding one of the plurality of lifting mechanisms for driving the corresponding lifting mechanism to drive the corresponding guiding and supporting device to rise or fall; and a horizontal position sensor disposed on the top of one of the plurality of guiding and supporting devices for detecting the inclination of the device to be lifted and transmitting a signal based on the detection result to control the plurality of motors.

Description

Technical Field

[0001] This application generally relates to the field of semiconductor processing equipment, and more specifically, to a lifting system and method with automatic horizontal adjustment. Background Art

[0002] Semiconductor processing equipment typically includes a reaction chamber and a cover plate that forms a vacuum chamber therewith. The lifting of the cover plate can be controlled by a lifting device. However, the lifting devices currently used in semiconductor processing equipment cannot achieve automatic horizontal adjustment. The horizontal automatic adjustment devices used in construction machinery usually have a complex structure and a cumbersome adjustment method, making it difficult to achieve high-precision horizontal adjustment. Moreover, they use magnetic blocks to generate a magnetic field to stabilize the platform, so they are not suitable for application in semiconductor processing equipment. Summary of the Invention

[0003] This application provides a lifting system with automatic horizontal adjustment, which can automatically adjust the horizontal level of the device to be lifted, with stable lifting, high repeatability, and a long maintenance cycle.

[0004] In one aspect, this application provides a lifting system with automatic horizontal adjustment, which includes: a plurality of guiding and supporting devices connected to the device to be lifted; a plurality of lifting mechanisms respectively connected to a corresponding one of the plurality of guiding and supporting devices; a plurality of motors respectively disposed on a corresponding one of the plurality of lifting mechanisms for driving the corresponding lifting mechanism to drive the corresponding guiding and supporting device to rise or fall; and a horizontal position sensor disposed on the top of one of the plurality of guiding and supporting devices for detecting the inclination of the device to be lifted and transmitting a signal based on the detection result to control the plurality of motors.

[0005] According to an embodiment of the present application, each of the plurality of lifting mechanisms includes a transmission device, the transmission device is connected to the corresponding motor, and is connected to the corresponding guiding and supporting device through a connecting component.

[0006] According to an embodiment of the present application, the transmission device includes a speed reducer, a lead screw, and a lead screw nut.

[0007] According to an embodiment of the present application, the connecting component includes a mechanical horizontal adjustment device for adjusting the horizontal position of the corresponding guiding and supporting device and locking the corresponding guiding and supporting device.

[0008] According to an embodiment of the present application, the mechanical horizontal adjustment device includes a spherical plain bearing and a disc spring.

[0009] According to an embodiment of the present application, the spherical plain bearing includes a pair of spherical plain bearings respectively disposed on both sides of the corresponding guiding and supporting device, and the disc spring includes two sets of disc springs respectively disposed on both sides of the corresponding guiding and supporting device.

[0010] According to an embodiment of the present application, the lifting system further includes a control module, and the control module is connected to the horizontal position sensor and the plurality of motors to set an initial value of the horizontal position sensor and output powers and rotational speeds of the plurality of motors.

[0011] According to an embodiment of the present application, the device to be lifted is a cover plate of semiconductor processing equipment.

[0012] According to an embodiment of the present application, the semiconductor processing equipment further includes a reaction chamber, and the plurality of lifting mechanisms are fixed on the reaction chamber.

[0013] According to an embodiment of the present application, when an inclination of the device to be lifted exceeds a set value of the horizontal position sensor, the horizontal position sensor calculates a number of motor pulse outputs according to the inclination of the device to be lifted and transmits the result to at least one of the plurality of motors.

[0014] According to an embodiment of the present application, at least one of the plurality of motors independently adjusts its output power and rotational speed based on the number of motor pulse outputs transmitted from the horizontal position sensor.

[0015] On the other hand, the present application also provides a method of using any of the above lifting systems, which includes: controlling the plurality of motors to drive the device to be lifted to rise or fall by the plurality of guiding and supporting devices; and during the rising or falling of the device to be lifted, detecting an inclination of the device to be lifted by the horizontal position sensor and adjusting an output of at least one of the plurality of motors based on a detection result.

[0016] Details of one or more examples of the present application are set forth in the following drawings and description. Other features, objectives, and advantages will be apparent from the description, drawings, and claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The disclosure in this specification refers to and includes the following drawings:

[0018] Figure 1 is an overall schematic diagram of a lifting system with automatic horizontal adjustment according to some embodiments of the present application;

[0019] Figure 2 is Figure 1 a part of a cross-sectional view of the lifting mechanism and the guiding and supporting device in along the dashed line a-a' in;

[0020] Figure 3 is Figure 1 a cross-sectional view of the guiding and supporting device in [device name] along the dotted line b-b';

[0021] Figure 4A is Figure 3 a partial enlarged view of the part circled by a dotted line in [device name];

[0022] Figure 4B is Figure 4A a schematic diagram of the disc spring and the spherical plain bearing in [device name].

[0023] According to convention, the various features illustrated may not be drawn to scale. Thus, for clarity, the dimensions of the various features may be arbitrarily enlarged or reduced. The shapes of the various components illustrated are only exemplary shapes and do not define the actual shapes of the components. Additionally, for clarity, the illustrated embodiments may be simplified. Thus, the illustrations may not show all of the components of a given apparatus or device. Finally, the same reference numerals may be used throughout the specification and the illustrations to denote the same features. Detailed Description of the Invention

[0024] To better understand the spirit of the present invention, the following further describes it in conjunction with some embodiments of the present invention.

[0025] The terms "in one embodiment" or "according to one embodiment" used in this specification do not necessarily refer to the same specific embodiment, and the terms "in other (some / certain) embodiments" or "according to other (some / certain) embodiments" used in this specification do not necessarily refer to different specific embodiments. Their purpose is, for example, to claim that the subject matter includes combinations of all or part of the exemplary specific embodiments. The meanings of "upper" and "lower" referred to herein are not limited to the relationships directly presented in the drawings, and should include descriptions with clear corresponding relationships, such as "left" and "right", or the opposites of "upper" and "lower". The term "connected" as used herein should be understood to cover both "directly connected" and "connected via one or more intermediate components". The names of the various components used in this specification are for illustrative purposes only and do not have a limiting effect. Different manufacturers may use different names to refer to components with the same function.

[0026] The following discusses various embodiments of the present invention in detail. Although specific embodiments are discussed, it should be understood that these embodiments are for illustrative purposes only. Those skilled in the relevant art will recognize that other components and configurations may be used without departing from the spirit and scope of the present invention.

[0027] Figure 1 shows an overall schematic diagram of a horizontally automatically adjustable lifting system 10 according to some embodiments of the present application. In Figure 1In it, the lifting system 10 can control the lifting of the device to be lifted (for example, the cover plate 500). The cover plate 500 can be attached to the reaction chamber 600 to form a sealed cavity for semiconductor processing.

[0028] The lifting system 10 includes a plurality of guiding and supporting devices 100, a plurality of lifting mechanisms 200, a plurality of motors 300, and a horizontal position sensor 400. Although Figure 1 a specific number of lifting mechanisms, guiding and supporting devices, and motors are shown in it, those skilled in the art will understand that the horizontally automatically adjustable lifting system 10 can include a smaller or larger number of lifting mechanisms, guiding and supporting devices, and motors.

[0029] The guiding and supporting device 100 is connected to the cover plate 500 through a first connecting member 101 to drive the cover plate 500 to rise and fall therewith. During the rising and falling process, the guiding and supporting device 100 and the cover plate 500 are relatively fixed to each other.

[0030] The lifting mechanism 200 is connected to the corresponding guiding and supporting device 100 through a second connecting member 201. One end of the lifting mechanism 200 is fixed on the reaction chamber 600.

[0031] The motor 300 is arranged on the top of the lifting mechanism 200. Each motor 300 corresponds to a single lifting mechanism 200. The motor 300 can drive the corresponding lifting mechanism 200 to drive the corresponding guiding and supporting device 100 to rise and fall through the second connecting member 201, so as to realize the rising and falling of the cover plate 500.

[0032] The horizontal position sensor 400 is arranged on the top of one guiding support 100. The horizontal position sensor 400 can be arranged on the top of any guiding support 100. The horizontal position sensor 400 can detect the inclination of the cover plate 500 and transmit a signal based on the detection result to control each motor 300. The type of the horizontal position sensor 400 is not limited and can be any suitable type of horizontal position sensor.

[0033] In some embodiments, the horizontally automatically adjustable lifting system 10 may further include a control module (not shown). The control module is connected to the horizontal position sensor 400 and the motor 300 to set the initial value of the horizontal position sensor 400 and the output power and rotation speed of the motor 300. In one embodiment, the control module can be an industrial computer (PMC) control module. According to some embodiments, the horizontal position sensor 400 can directly transmit a signal based on the detection result to the motor 300 to control the motor 300. According to other embodiments, the horizontal position sensor 400 can transmit a signal based on the detection result to the control module, and then the control module generates a corresponding control signal to control the motor 300.

[0034] The horizontally automatically adjustable lifting system 10 can be applied to various devices to be lifted. In some embodiments, the horizontally automatically adjustable lifting system 10 can be applied to a plasma chemical enhanced vapor deposition device, an atomic layer deposition device, or a 3D vacuum device.

[0035] Figure 2 shows Figure 1 a partial cross-sectional view of the lifting mechanism 200 and the guiding and supporting device 100 along the dotted line a-a' in Figure 2 As shown, the lifting mechanism 200 may include a transmission device 210, which is disposed inside the lifting mechanism 200. The transmission device 210 (e.g., the upper end) is connected to the corresponding motor 300 and is connected to the corresponding guiding and supporting device 100 through a second connecting member 201 to transmit the power of the motor 300 to the corresponding guiding and supporting device 100. In one embodiment, the transmission device 210 may include a speed reducer, a lead screw, and a lead screw nut.

[0036] The speed reducer is a speed reduction transmission device, which is used to match the rotational speed and transmit torque. The speed reducer of the present application is not limited, and any suitable type of speed reducer can be used.

[0037] The lead screw and the lead screw nut are mainly used for the transformation between rotational motion and linear motion. The lead screw and the lead screw nut can be selected in any suitable type according to needs. For example, as Figure 2 shown, the lead screw nut can be a trapezoidal lead screw nut 211. In one embodiment, the motor 300 rotates the lead screw through the speed reducer, so that the lead screw nut moves up or down, and the second connecting member 201 connected to the lead screw nut also moves up or down accordingly, thereby driving the corresponding guiding and supporting device 100 to rise or fall, and the device to be lifted connected to the guiding and supporting device 100 can rise or fall accordingly.

[0038] Figure 3 shows Figure 1 a cross-sectional view of the guiding and supporting device 100 along the dotted line b-b' in Figure 4A is Figure 3 a partial enlarged view of the part circled by a dotted line in Figure 4B is Figure 4A a schematic diagram of the disc spring 221 and the spherical plain bearing 222 in Figure 3 As shown, the second connecting member 201 connecting the lifting mechanism 200 to the guiding and supporting device 100 may include a mechanical horizontal adjustment device 220, which can be used to adjust the horizontal position of the guiding and supporting device 100 and lock the guiding and supporting device 100. The mechanical horizontal adjustment device 220 is disposed on one side of the lifting mechanism 200 connected to the guiding and supporting device 100. As Figure 3 andFigure 4A As shown, the mechanical horizontal adjustment device 220 may include a disc spring 221 and a spherical plain bearing 222. The lower end of the connecting member may pass through the center of the disc spring 221 and be disposed in the spherical plain bearing 222, thereby realizing the connection between the lifting mechanism 200 and the guiding and supporting device 100. In some embodiments, the spherical plain bearing 222 includes a pair of spherical plain bearings respectively disposed on both sides of the guiding and supporting device 100, and the disc spring 221 includes two sets of disc springs respectively disposed on both sides of the guiding and supporting device 100.

[0039] As Figure 4B shown, the disc spring 221 is in a conical disc shape and can be deformed after being compressed to bear a certain load. To achieve a better adjustment effect, the disc springs 221 may be arranged in pairs. For example, 5 pairs of disc springs 221 may be arranged on each side of the guiding and supporting device 100. The number of disc springs 221 may be selected according to the load magnitude. The disc springs 221 can perform a certain degree of displacement compensation and lock the guiding and supporting device 100. In some embodiments, during the process of lowering the cover plate 500, to ensure that the cover plate 500 is in close fit with the reaction chamber 600, the falling displacement of the cover plate 500 is less than the equivalent displacement output by the lead screw in the lifting mechanism 200. The equivalent displacement output by the lead screw refers to the displacement of the lead screw nut when the motor outputs a certain power. The disc springs 221 can absorb the displacement surplus and lock the guiding and supporting device 100 due to deformation, so as to prevent the motor 300 from being overloaded, thereby protecting the motor 300.

[0040] The spherical plain bearing 222 has an arc surface and allows a certain axial offset to occur. When multiple motors 300 are not synchronized or the guiding and supporting device 100 has a small inclination, the spherical plain bearing 222 can finely adjust the position of the guiding and supporting device 100 and perform displacement compensation and locking through the disc spring 221 to ensure that the guiding and supporting device 100 and the lifting mechanism 200 do not get stuck.

[0041] During the process of the cover plate 500 rising or falling, the horizontal position sensor 400 can detect the inclination of the cover plate 500. When the inclination of the cover plate 500 exceeds the set value of the horizontal position sensor 400, horizontal adjustment is required. The horizontal position sensor 400 or other devices may generate a control signal based on the detection result of the horizontal position sensor 400 to adjust the output (such as output power or rotational speed) of at least one of the motors 300. In one embodiment, the horizontal position sensor 400 calculates the number of motor pulse outputs of the motor 300 according to formula (1) and transmits the calculation result to the motor 300 that needs to be adjusted. The motor 300 automatically adjusts its output power and rotational speed according to the number of motor pulse outputs, so that the cover plate 500 rises and falls smoothly. Those skilled in the art can understand that the horizontal position sensor 400 may also adopt other forms of formulas or calculation methods.

[0042]

[0043] In formula (1), the motor distance L is the distance between the motors, the inclination angle is the inclination angle of the cover plate relative to the horizontal plane detected by the horizontal position sensor 400, the lead is the lead of the lead screw, the reduction ratio is the reduction ratio of the speed reducer, and the step angle is the step angle of the motor 300. Each motor can independently adjust its output power and rotational speed based on the number of motor pulse outputs transmitted from the horizontal position sensor 400.

[0044] Referring again to Figure 1 , according to some embodiments of the present application, a method of using the lifting system 10 may include: controlling a plurality of motors 300 to cause a plurality of guiding and supporting devices 100 to drive the device to be lifted (such as the cover plate 500) to rise or fall; during the rising or falling of the device to be lifted, detecting the inclination of the device to be lifted by the horizontal position sensor 400, and adjusting the output (such as output power or rotational speed) of at least one motor 300 based on the detection result.

[0045] In some embodiments, a method of using the lifting system of the present application may include: setting an initial value of the horizontal position sensor and the output power and rotational speed of the motor through a control module; under the drive of the motor, the lifting mechanism drives the guiding and supporting device to rise or fall through a transmission device, so that the device to be lifted rises or falls along with the guiding and supporting device; the horizontal position sensor detects the levelness of the device to be lifted and transmits the detection result to the motor; the motor independently and automatically adjusts its respective output power and rotational speed based on the detection result. When the motors are not synchronized or the guiding and supporting device is slightly inclined, the mechanical level adjustment device adjusts the horizontal position of the guiding support.

[0046] Compared with the existing lifting system, the horizontally automatically adjustable lifting system of the present application can automatically adjust the level of the device to be lifted, has stable lifting, high repeatability, a long maintenance cycle, and has production economic value. Moreover, the horizontally automatically adjustable lifting system of the present application can allow a certain deviation in the synchronization of the motors, and when the multiple motors are not synchronized, the motors automatically adjust their output power and rotational speed according to the detection result of the horizontal position sensor to achieve motor synchronization. In addition, the horizontally automatically adjustable lifting system of the present application can make the cover plate fit tightly with the reaction chamber after falling, thereby ensuring the vacuum chamber.

[0047] The description herein is provided to enable those skilled in the art to make or use the invention. Various modifications to the invention will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of the invention. Thus, the invention is not limited to the examples and designs described herein, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A horizontally automatically adjustable lifting system, comprising: A plurality of guiding and supporting devices connected to the device to be lifted; A plurality of lifting mechanisms respectively connected to a corresponding one of the plurality of guiding and supporting devices; A plurality of motors respectively disposed on a corresponding one of the plurality of lifting mechanisms for driving the corresponding lifting mechanism to drive the corresponding guiding and supporting device to rise or fall; A horizontal position sensor disposed on the top of one of the plurality of guiding and supporting devices for detecting the inclination of the device to be lifted and transmitting a signal based on the detection result to control the plurality of motors; And A connecting member, each of the lifting mechanisms is connected to the corresponding guiding and supporting device through the connecting member, wherein the lower end of the connecting member passes through the center of the disc spring and is placed in a spherical plain bearing. The disc spring is in a conical disc shape for compensating the displacement of the position of the corresponding guiding and supporting device and locking the corresponding guiding and supporting device. The upper surface of the spherical plain bearing is an arc surface for adjusting the horizontal position of the corresponding guiding and supporting device.

2. The lifting system according to claim 1, wherein each of the plurality of lifting mechanisms comprises a transmission device, the transmission device is connected to the corresponding motor and is connected to the corresponding guiding and supporting device through the connecting member.

3. The lifting system according to claim 2, wherein the transmission device comprises a speed reducer, a lead screw and a lead screw nut.

4. The lifting system according to claim 1, wherein the spherical plain bearing comprises a pair of spherical plain bearings respectively disposed on both sides of the corresponding guiding and supporting device, and the disc spring comprises two groups of disc springs respectively disposed on both sides of the corresponding guiding and supporting device.

5. The lifting system according to any one of claims 1 to 4, further comprising a control module, the control module is connected to the horizontal position sensor and the plurality of motors to set an initial value of the horizontal position sensor and the output power and rotation speed of the plurality of motors.

6. The lifting system according to any one of claims 1 to 4, wherein the device to be lifted is a cover plate of a semiconductor processing device.

7. The lifting system according to claim 6, wherein the semiconductor processing device further comprises a reaction chamber, and the plurality of lifting mechanisms are fixed on the reaction chamber.

8. The lifting system according to any one of claims 1 to 4, wherein when the inclination of the device to be lifted exceeds a set value of the horizontal position sensor, the horizontal position sensor calculates the number of motor pulse outputs according to the inclination of the device to be lifted and transmits the result to at least one of the plurality of motors.

9. The lifting system according to claim 8, wherein at least one of the plurality of motors independently adjusts its output power and rotation speed based on the number of motor pulse outputs transmitted from the horizontal position sensor.

10. A method of using the lifting system according to any one of claims 1 to 9, comprising: Controlling the plurality of motors to drive the plurality of guiding and supporting devices to drive the device to be lifted to rise or fall; And During the rising or falling of the device to be lifted, the inclination of the device to be lifted is detected by the horizontal position sensor, and the output of at least one of the plurality of motors is adjusted based on the detection result.

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