Automatic probe insertion device and automatic probe insertion method

Abstract

The present invention discloses an automatic probe needle insertion device and an automatic probe needle insertion method, wherein the automatic probe needle insertion device includes a probe assembly and two displacement platforms, the probe assembly and the sample to be tested are arranged at intervals, the probe assembly moves or vibrates relative to the sample to be tested, the two displacement platforms move in a set direction and have two matching states, in the first matching state, the two displacement platforms move toward each other, the probe assembly and the sample to be tested are arranged on the two displacement platforms respectively, in the second matching state, the two displacement platforms are linked in the same direction, one of the probe assembly and the sample to be tested is arranged on the displacement platform, and the other is arranged on the fixed platform, the first maximum movement value of the first displacement platform is less than the second maximum movement value of the second displacement platform, and the distance between the probe assembly and the sample to be tested is less than the second maximum movement value. In the automatic probe needle insertion device of the embodiment of the present invention, the two displacement platforms cooperate to move the probe assembly and the sample to be tested from a relatively long distance to a target distance, and the degree of automation is high.

Description

Technical Field

[0001] The invention belongs to the technical field of measuring instruments, and in particular relates to an automatic probe insertion device and an automatic probe insertion method. Background Art

[0002] SPM (Scanning Probe Microscopy) is one of the most important methods currently used to obtain microscopic material characterization. It mainly relies on the force between the probe and the sample to be tested to characterize the sample. In the actual detection process, the distance between the probe and the sample to be tested needs to be gradually moved from a longer distance to the nanometer level to ensure that the force between the probe and the sample to be tested is appropriate, so as to effectively obtain the surface information of the sample to be tested.

[0003] In the prior art, the distance between the probe and the sample to be tested is moved to the nanometer level mainly by manual movement. In some special occasions, such as low temperature, vacuum or constant temperature, the manual needle insertion method cannot meet the needs.

[0004] To solve the above problems, devices that can automatically insert needles have also appeared in the prior art. However, the automatic needle insertion device has low precision and cannot accurately control the distance between the probe and the sample to be tested. When the distance between the probe and the sample to be tested is close, it is easy to cause hard contact between the needle tip and the sample to be tested, resulting in damage to the probe and contamination of the sample to be tested. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes an automatic probe insertion device, which can reduce the degree of manual intervention, realize automatic needle insertion, and prevent the needle tip from hard contact with the sample to be tested during the needle insertion process, thereby solving the technical problems of the prior art automatic needle insertion device having poor accuracy, easy damage to the probe and contamination of the sample.

[0006] The present invention also aims to provide an automatic probe insertion method having the automatic probe insertion device.

[0007] According to an embodiment of the present invention, an automatic probe needle advancement device is used to detect a sample to be tested, comprising: a probe assembly, wherein the probe assembly and the sample to be tested are arranged at intervals in a set direction, and the probe assembly can move or vibrate relative to the sample to be tested; a first displacement platform and a second displacement platform, wherein both the first displacement platform and the second displacement platform can move in the set direction; the first displacement platform and the second displacement platform have a first matching state and a second matching state; in the first matching state, the first displacement platform and the second displacement platform move toward each other in the set direction, and the probe assembly and the sample to be tested are respectively arranged on the first displacement platform and the second displacement platform; in the second matching state, the first displacement platform and the second displacement platform move in the same direction in linkage in the set direction, and one of the probe assembly and the sample to be tested is arranged on the first displacement platform, and the other is arranged on a fixed platform; the first maximum movement value of the first displacement platform is less than the second maximum movement value of the second displacement platform, and the distance between the probe assembly and the sample to be tested in the set direction is less than the second maximum movement value.

[0008] According to the automatic probe insertion device of the embodiment of the present invention, by setting a first displacement table and a second displacement table that can move along a set direction, and whether in the first matching state or the second matching state, the first displacement table and the second displacement table can cooperate to reduce the distance between the probe assembly and the sample to be tested, thereby realizing automatic needle insertion and reducing the degree of manual intervention, so that the automatic probe insertion device of the present application can be used in special occasions, such as low temperature, vacuum or constant temperature conditions, and the first displacement table and the second displacement table that cooperate with each other can also improve the accuracy of the displacement of the probe assembly and the sample to be tested, ensuring that when the distance between the probe assembly and the sample to be tested is close, there will be no hard contact between the needle tip and the sample to be tested, thereby extending the service life of the probe assembly, and can effectively control the distance between the probe assembly and the sample to be tested at the nanometer level, which is convenient for subsequent detection of the sample to be tested. The automatic probe insertion device of the present application has a wide range of applications, a high degree of automation and high needle insertion accuracy.

[0009] According to an automatic needle advancement device of an embodiment of the present invention, the probe assembly includes a probe, and when the probe moves to a set direction distance from the sample to be tested that reaches a preset distance threshold, the real-time amplitude of the probe is within a target amplitude threshold; when the set direction distance between the probe and the sample to be tested is greater than the preset distance threshold, the real-time amplitude of the probe is outside the target amplitude threshold.

[0010] Optionally, the automatic probe insertion device also includes: an excitation demodulation unit, which is used to excite the probe to vibrate and demodulate the real-time amplitude of the probe, and is also used to control the movement of the first translation stage; a computer unit, which is connected to the excitation demodulation unit and the computer unit is connected to the second translation stage, and the computer unit is used to determine whether the real-time amplitude of the probe is within a target amplitude threshold, and control the excitation demodulation unit to output a control signal according to the difference; when the real-time amplitude is within the target amplitude threshold, the excitation demodulation unit controls the amplitude of the probe to remain stable; when the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit controls the movement of the first translation stage, and / or the computer unit controls the movement of the second translation stage.

[0011] Optionally, when the first translation stage moves along the set direction to the first maximum movement value, if the real-time amplitude is outside the target amplitude threshold, the first translation stage moves in the opposite direction along the set direction by the first maximum movement value, and the computer unit controls the second translation stage to move along the set direction by the first maximum movement value; the first translation stage continues to move along the set direction until the real-time amplitude is within the target amplitude threshold.

[0012] Optionally, when the first translation stage moves along the set direction to the first maximum movement value, if the real-time amplitude is outside the target amplitude threshold, the first translation stage moves in the opposite direction along the set direction by the first maximum movement value, and the computer unit controls the second translation stage to move along the set direction by the first maximum movement value, including: in the first mating state, the second translation stage moves along the set direction toward the first translation stage by the first maximum movement value; in the second mating state, the second translation stage drives the first translation stage to move toward the fixed stage by the first maximum movement value along the set direction.

[0013] Optionally, the automatic probe insertion device also includes a first driving unit and a second driving unit, the first driving unit being electrically connected to the first translation stage and the excitation demodulation unit, respectively, and the excitation demodulation unit controlling the first driving unit to drive the first translation stage to move; the second driving unit being connected to the computer unit and the second translation stage, respectively, and the computer unit controlling the second driving unit to drive the second translation stage to move.

[0014] According to the automatic probe insertion device of one embodiment of the present invention, the first displacement stage is a nano displacement stage, and the second displacement stage is a micro displacement stage.

[0015] According to an automatic probe needle advancement device of one embodiment of the present invention, in the first mating state, the sample to be tested is located on the first translation platform or the second translation platform relatively below the set direction position; the probe assembly is located on the first translation platform or the second translation platform relatively above the set direction position; in the second mating state, the first translation platform is located on the upper part of the second translation platform, and the sample to be tested is located on the fixed platform or the first translation platform relatively below the set direction position; the probe assembly is located on the fixed platform or the first translation platform relatively above the set direction position.

[0016] According to an embodiment of the present invention, a method for automatic needle advancement of a probe includes the following steps: an excitation demodulation unit outputs a voltage to excite the probe to vibrate at a set frequency, and demodulates the real-time amplitude of the probe; the real-time amplitude of the probe is compared with a target amplitude threshold of the probe; when the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit controls the first displacement stage to move and shortens the distance between the probe and the sample to be tested; the real-time movement amount of the first displacement stage is compared with a first maximum movement value of the first displacement stage, and the real-time set direction distance between the probe and the sample to be tested is compared with a preset distance threshold between the probe and the sample to be tested; when the real-time movement amount is less than the first maximum movement value, and the set direction distance is at the preset distance threshold, the excitation demodulation unit is controlled to output a constant voltage, so that the real-time set direction distance between the probe and the sample to be tested remains stable, and the real-time amplitude of the probe remains stable.

[0017] According to the automatic needle insertion method of the probe of the embodiment of the present invention, when the real-time amplitude of the probe demodulated by the excitation demodulation unit is outside the target amplitude threshold, the excitation demodulation unit controls the movement of the first displacement stage to adjust the distance between the probe and the sample to be tested, thereby realizing automatic needle insertion of the probe assembly and reducing the degree of manual intervention. In addition, during the needle insertion process, the real-time movement of the first displacement stage and the first maximum movement value of the first displacement stage as well as the real-time set direction distance between the probe and the sample to be tested and the preset distance threshold between the probe and the sample to be tested are monitored in real time. When the real-time movement of the first displacement stage is less than the first maximum movement value, and the distance between the probe and the sample to be tested in the set direction is at the preset distance threshold, the needle insertion is completed. At this time, it is only necessary to control the distance between the probe assembly and the sample to be tested to be stable, so as to prepare for the subsequent detection of the sample to be tested. The automatic needle insertion method of the probe of the present application has a high degree of automation and high needle insertion accuracy.

[0018] According to an embodiment of the present invention, the automatic needle advancement method of the probe also includes the following steps: when the real-time movement amount is equal to the first maximum movement value and the set direction distance is outside the preset distance threshold, the excitation demodulation unit controls the first translation stage to move the first maximum movement value in the opposite direction; the computer unit controls the second translation stage to move the first maximum movement value; the real-time movement amount of the first translation stage is compared with the first maximum movement value again, and the real-time set direction distance between the probe and the sample to be tested is compared with the preset distance threshold, until the real-time movement amount of the first translation stage is less than the first maximum movement value and the set direction distance is within the preset distance threshold, the excitation demodulation unit controls the probe to vibrate within the target amplitude threshold.

[0019] Additional aspects and advantages of the invention will become apparent from the following description, or may be learned by practice of the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0021] Figure 1 Schematic diagram of the automatic probe insertion device according to the first embodiment of the present invention.

[0022] Figure 2 FIG. 1 is a schematic diagram of an automatic probe insertion device according to a second embodiment of the present invention.

[0023] Figure 3 FIG. 4 is a schematic diagram of an automatic probe insertion device according to a third embodiment of the present invention.

[0024] Figure 4 Schematic diagram of an automatic probe insertion device according to a fourth embodiment of the present invention.

[0025] Figure 5 The present invention is a flowchart of a method for automatically inserting a probe according to an embodiment of the present invention.

[0026] Reference numerals:

[0027] 1000. Automatic probe insertion device;

[0028] 100, probe assembly; 110, probe; 120, probe holder;

[0029] 200, first translation stage;

[0030] 300, second translation stage;

[0031] 400, excitation demodulation unit;

[0032] 500, computer unit;

[0033] 600, a first driving unit;

[0034] 700, second driving unit;

[0035] 2000, samples to be tested. DETAILED DESCRIPTION

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] The following describes the automatic probe insertion device 1000 according to an embodiment of the present invention with reference to the accompanying drawings.

[0039] According to an embodiment of the present invention, an automatic probe insertion device 1000 is used to detect a sample 2000 to be tested. Figure 1 As shown, it includes: a probe assembly 100 , a first translation stage 200 and a second translation stage 300 .

[0040] Among them, Figure 1 As shown, the probe assembly 100 and the sample 2000 to be tested are spaced apart in a set direction, and the probe assembly 100 can move or vibrate relative to the sample 2000 to be tested.

[0041] The first translation stage 200 and the second translation stage 300 can both move in a set direction.

[0042] The first translation stage 200 and the second translation stage 300 have a first matching state and a second matching state. In the first matching state, the first translation stage 200 and the second translation stage 300 move toward each other in a set direction, and the probe assembly 100 and the sample to be tested 2000 are respectively arranged on the first translation stage 200 and the second translation stage 300; in the second matching state, the first translation stage 200 and the second translation stage 300 move in the same direction in a set direction in a linked manner, and one of the probe assembly 100 and the sample to be tested 2000 is arranged on the first translation stage 200, and the other is arranged on a fixed platform (not shown in the figure).

[0043] The first maximum movement value of the first translation stage 200 is smaller than the second maximum movement value of the second translation stage 300 , and the set direction distance between the probe assembly 100 and the sample 2000 to be tested is smaller than the second maximum movement value.

[0044] It can be seen from the above structure that the automatic probe insertion device 1000 of the embodiment of the present invention arranges the probe assembly 100 and the sample to be tested 2000 at intervals in a set direction, that is, in the set direction, there is a certain distance between the probe assembly 100 and the sample to be tested 2000, which facilitates the replacement or maintenance of the probe assembly 100, and when replacing or maintaining the probe assembly 100, it is ensured that the tools used to replace or maintain the probe assembly 100 or the probe assembly 100 itself will not scratch or contaminate the sample to be tested 2000, and the interval setting ensures that when the sample to be tested 2000 is placed, the sample to be tested 2000 will not touch the probe assembly 100.

[0045] In a specific example, the automatic probe insertion device 1000 also includes a sample table, and the sample to be tested 2000 is placed on the sample table. The sample table and the probe assembly 100 are spaced apart in a set direction. In this way, after the sample to be tested 2000 is placed on the sample table, it can be ensured that the sample to be tested 2000 and the probe assembly 100 are spaced apart in the set direction, and the sample table is also used to improve the position stability of the sample to be tested 2000, which is convenient for subsequent detection.

[0046] The set direction mentioned here refers to a specific direction, for example: X direction, Y direction, Z direction or a certain inclined direction.

[0047] It should be noted that when the probe assembly 100 and the sample to be tested 2000 are spaced apart in a set direction, in other directions, the probe assembly 100 and the sample to be tested 2000 are correspondingly arranged. For example, when the probe assembly 100 and the sample to be tested 2000 are spaced apart in the Z direction, then in the X direction and the Y direction, the coordinate points of the probe assembly 100 and the sample to be tested 2000 are equal, so that the first translation stage 200 and the second translation stage 300 only need to move in the Z direction to achieve needle insertion.

[0048] Because the probe assembly 100 and the sample to be tested 2000 are arranged at intervals in a set direction, in order to subsequently detect the sample to be tested 2000, the probe assembly 100 is set to move relative to the sample to be tested 2000 to adjust the distance between the probe assembly 100 and the sample to be tested 2000, thereby moving the distance between the probe assembly 100 and the sample to be tested 2000 to within a detectable range, and detecting the surface features of the sample to be tested 2000 through the vibration of the probe assembly 100.

[0049] By providing the first translation stage 200 and the second translation stage 300 with the first matching state and the second matching state, in the first matching state, the probe assembly 100 and the sample to be tested 2000 are respectively arranged on the first translation stage 200 and the second translation stage 300, that is, one of the probe assembly 100 and the sample to be tested 2000 is arranged on one of the first translation stage 200 and the second translation stage 300, and the other of the probe assembly 100 and the sample to be tested 2000 is arranged on the other of the first translation stage 200 and the second translation stage 300. The first translation stage 200 and the second translation stage 300 move toward each other in a set direction, thereby driving the probe assembly 100 and the sample to be tested 2000 to move toward each other, respectively, so as to achieve the purpose of adjusting the distance between the probe assembly 100 and the sample to be tested 2000, thereby realizing automatic needle insertion.

[0050] In the description of the present invention, features defined as “first” or “second” may explicitly or implicitly include one or more such features, and are used to distinguish and describe the features, without any distinction in order or importance.

[0051] Specifically, Figure 3 As shown, the probe assembly 100 is disposed on the second translation stage 300, the sample 2000 to be tested is disposed on the first translation stage 200, and the first translation stage 200 and the second translation stage 300 move toward each other in a set direction; or Figure 4 As shown, the probe assembly 100 is arranged on the first translation stage 200, and the sample 2000 to be tested is arranged on the second translation stage 300. The first translation stage 200 and the second translation stage 300 move toward each other in a set direction to adjust the distance between the probe assembly 100 and the sample 2000 to be tested.

[0052] The above-mentioned opposite movement means that the first translation stage 200 and the second translation stage 300 can both move in the direction close to each other. For example, during the needle insertion process, the first translation stage 200 moves toward the second translation stage 300, and the second translation stage 300 moves toward the first translation stage 200, thereby realizing the opposite movement of the first translation stage 200 and the second translation stage 300, so as to shorten the distance between the probe assembly 100 and the sample 2000 to be tested, thereby achieving the purpose of needle insertion.

[0053] In the second matching state, one of the probe assembly 100 and the sample to be tested 2000 is arranged on the first displacement stage 200, and the other is arranged on the fixed stage. That is to say, one of the probe assembly 100 and the sample to be tested 2000 is arranged on the first displacement stage 200, and the other of the probe assembly 100 and the sample to be tested 2000 is arranged on the fixed stage. At this time, the position of the probe assembly 100 or the sample to be tested 2000 arranged on the fixed stage is fixed, and the first displacement stage 200 drives the probe assembly 100 or the sample to be tested 2000 to move toward the fixed stage, so as to achieve the purpose of adjusting the distance between the probe assembly 100 and the sample to be tested 2000, thereby realizing automatic needle insertion. The fixed stage arranged here mainly provides a setting space for the probe assembly 100 or the sample to be tested 2000, and plays a role in fixing the probe assembly 100 or the sample to be tested 2000 to limit the position of the probe assembly 100 or the sample to be tested 2000.

[0054] Specifically, Figure 1 As shown, the sample 2000 to be tested is set on the first translation stage 200, the probe assembly 100 is set on the fixed stage, and the first translation stage 200 drives the sample 2000 to move toward the probe assembly 100 to adjust the distance between the probe assembly 100 and the sample 2000 to be tested; or Figure 2 As shown, the probe assembly 100 is arranged on the first translation stage 200, and the sample 2000 to be tested is arranged on the fixed stage. The setting of the aforementioned sample stage can be omitted here, and the sample 2000 to be tested is directly set on the fixed stage, thereby eliminating the setting of a structural component. The fixed stage can also ensure the stability of the position of the sample 2000 to be tested. The first translation stage 200 drives the probe assembly 100 to move toward the direction of the sample 2000 to be tested, so as to achieve the purpose of adjusting the distance between the probe assembly 100 and the sample 2000 to be tested.

[0055] It should be noted that if Figure 1 and Figure 2 As shown, when the first translation stage 200 and the second translation stage 300 are in the second matching state, the first translation stage 200 is arranged on the second translation stage 300, and the first translation stage 200 and the second translation stage 300 move in the same direction in a set direction, that is, the second translation stage 300 can drive the first translation stage 200 to move during the movement, thereby increasing the stroke of the first translation stage 200, ensuring that the distance between the probe assembly 100 and the sample 2000 to be tested can be controlled within the nanometer level.

[0056] The above-mentioned unidirectional linkage movement means that during the needle insertion process, the first translation stage 200 and the second translation stage 300 move in the same direction, and the first translation stage 200 and the second translation stage 300 move alternately in coordination with each other. During the movement of the second translation stage 300, the first translation stage 200 can be driven to move, thereby achieving the purpose of unidirectional linkage movement. For example: Figure 1 As shown, the sample 2000 to be tested is set on the first translation stage 200, and the probe assembly 100 is set on the fixed stage. The first translation stage 200 drives the sample 2000 to move toward the direction of the probe assembly 100. Because the first maximum movement value of the first translation stage 200 is less than the second maximum movement value of the second translation stage 300, when the first translation stage 200 drives the sample 2000 to move to the first maximum movement value, the sample 2000 to be tested and the probe assembly 100 are not within the preset distance threshold. At this time, the second translation stage 300 can be used to drive the first translation stage 200 to move, thereby shortening the distance between the sample 2000 to be tested and the probe assembly 100.

[0057] The first maximum movement value mentioned here refers to the maximum stroke of the first translation stage 200 , and the second maximum movement value refers to the maximum stroke of the second translation stage 300 .

[0058] The second maximum movement value of the second translation stage 300 is set to be greater than the first maximum movement value of the first translation stage 200. In this way, when the first translation stage 200 moves to the first maximum movement value, if the distance between the sample 2000 to be tested and the probe assembly 100 has not reached the preset distance threshold, the second translation stage 300 can be used to drive the first translation stage 200 to move, and then the first translation stage 200 moves again, to ensure that the distance between the sample 2000 to be tested and the probe assembly 100 can reach the preset distance threshold, so as to achieve the purpose of needle insertion and prepare for the subsequent detection of the sample 2000 to be tested.

[0059] Since the distance between the probe assembly 100 and the sample 2000 to be tested is mainly adjusted by the cooperation of the first translation stage 200 and the second translation stage 300, and the second maximum movement value of the second translation stage 300 is greater than the first maximum movement value of the first translation stage 200, the set direction distance between the probe assembly 100 and the sample 2000 to be tested is set to be smaller than the second maximum movement value of the second translation stage 300, so as to ensure that the first translation stage 200 and the second translation stage 300 can cooperate to move to adjust the distance between the sample 2000 to be tested and the probe assembly 100 to a preset distance threshold, and the phenomenon that the first translation stage 200 and the second translation stage 300 are both moved to the maximum stroke and the distance between the sample 2000 to be tested and the probe assembly 100 does not reach the preset distance threshold will not occur.

[0060] It should be noted that the set direction distance between the probe assembly 100 and the sample 2000 mentioned here refers to the distance between the probe assembly 100 and the sample 2000 in the set direction in the initial state when the automatic probe insertion device 1000 is not working.

[0061] It can be understood that, compared with the prior art, the automatic probe insertion device 1000 of the present application is provided with a first displacement table 200 and a second displacement table 300 that cooperate with each other, and is used to reduce the distance between the probe assembly 100 and the sample to be tested 2000 from the millimeter or submillimeter level to the nanometer level, so as to realize automatic needle insertion, reduce the degree of manual intervention, improve the scope of application, and have high control accuracy, avoid the phenomenon of hard contact between the probe assembly 100 and the sample to be tested 2000, extend the service life of the probe assembly 100 and reduce the contamination of the sample to be tested 2000.

[0062] Optionally, when the first translation stage 200 and the second translation stage 300 are in the second matching state, the first translation stage 200 is fixed to the second translation stage 300 via a connecting member, so as to connect the first translation stage 200 and the second translation stage 300, thereby realizing the same-direction linkage movement of the first translation stage 200 and the second translation stage 300.

[0063] In some embodiments of the present invention, the first displacement stage 200 is a nano displacement stage. The nano displacement stage has a small stroke and high precision, that is, the nano displacement stage can accurately control the amount of movement each time when driving the probe assembly 100 or the sample 2000 to be tested to ensure that the distance between the probe assembly 100 and the sample 2000 to be tested is moved from the millimeter or sub-millimeter level to the nanometer level, and avoid the phenomenon of hard contact between the probe assembly 100 and the sample 2000 to be tested.

[0064] Optionally, the second displacement stage 300 is a micrometer displacement stage. Compared with the nanometer displacement stage, the micrometer displacement stage has a larger stroke but lower precision, thereby ensuring that the second maximum movement value of the second displacement stage 300 is greater than the first maximum movement value of the first displacement stage 200, ensuring that the distance between the sample 2000 to be tested and the probe assembly 100 can reach a preset distance threshold, achieving the purpose of needle insertion. Among them, the nanometer displacement stage and the micrometer displacement stage are prior arts well known to those skilled in the art, and the components of the transmission parts, driving parts and other structures of the nanometer displacement stage and the micrometer displacement stage and their working principles are not described in detail here.

[0065] In some embodiments of the present invention, Figure 1As shown, the probe assembly 100 includes a probe 110. When the probe 110 moves to a set direction distance from the sample 2000 to be tested that reaches a preset distance threshold, the real-time amplitude of the probe 110 is within the target amplitude threshold; when the set direction distance between the probe 110 and the sample 2000 to be tested is greater than the preset distance threshold, the real-time amplitude of the probe 110 is outside the target amplitude threshold. That is to say, the real-time amplitude of the probe 110 is affected by the distance between the probe 110 and the sample 2000 to be tested. The probe 110 vibrates at a specific frequency. If the set direction distance between the probe 110 and the sample 2000 to be tested reaches the preset distance threshold, the real-time amplitude of the probe 110 is within the target amplitude threshold. If the set direction distance between the probe 110 and the sample 2000 to be tested is greater than the preset distance threshold, the real-time amplitude of the probe 110 is outside the target amplitude threshold. Therefore, the present application sets up the above-mentioned first displacement stage 200 and the second displacement stage 300. The first displacement stage 200 and the second displacement stage 300 cooperate to adjust the distance between the probe 110 and the sample 2000 to within the preset distance threshold, thereby ensuring that the real-time amplitude of the probe 110 is within the target amplitude threshold, which is convenient for subsequent detection of the surface features of the sample 2000 to be tested. In a specific example, the target amplitude threshold can be a range value or a fixed value.

[0066] Alternatively, if Figure 1 As shown, the probe assembly 100 also includes a probe rack 120, one end of the probe rack 120 is connected to the probe 110, and the other end of the probe rack 120 is fixed on any one of the fixed platform, the first translation platform 200 or the second translation platform 300. The probe rack 120 is used to support the probe 110 to ensure that the probe 110 can effectively generate vibrations, and when the subsequent excitation demodulation unit 400 excites the probe 110 to vibrate, the vibration of the probe rack 120 can be stimulated, thereby driving the probe 110 to vibrate.

[0067] Optionally, the probe 110 is detachably connected to the probe holder 120. It can be understood that the probe 110 is detachably connected to the probe holder 120, so that the probe 110 can be easily removed from the probe holder 120, and the probe 110 can be easily replaced or maintained.

[0068] Alternatively, if Figure 1 and Figure 2 As shown, the automatic probe insertion device 1000 also includes an excitation demodulation unit 400 and a computer unit 500. The excitation demodulation unit 400 is used to excite the probe 110 to vibrate and demodulate the real-time amplitude of the probe 110, and is also used to control the movement of the first translation stage 200. Thus, the automatic excitation of the probe 110 to vibrate, the automatic demodulation of the real-time amplitude of the probe 110, and the automatic control of the movement of the first translation stage 200 are achieved, further reducing the degree of manual intervention, and the degree of automation is high.

[0069] In a specific example, when the automatic probe advancement device 1000 needs to adjust the distance between the probe assembly 100 and the sample 2000 to be tested, the excitation demodulation unit 400 first excites the probe 110 to vibrate, and then demodulates the real-time amplitude of the probe 110 to facilitate subsequent judgment of whether the distance between the probe 110 and the sample 2000 to be tested reaches a preset distance threshold; when the demodulated real-time amplitude of the probe 110 is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move to adjust the distance between the probe 110 and the sample 2000 to ensure that the distance between the probe 110 and the sample 2000 to be tested reaches the preset distance threshold, that is, to ensure that the real-time amplitude of the probe 110 is within the target amplitude threshold, in preparation for subsequent detection of the surface features of the sample 2000 to be tested.

[0070] Optionally, the excitation demodulation unit 400 may use a lock-in amplifier, and the output voltage of the lock-in amplifier is used to excite the probe 110 to vibrate. During the vibration of the probe 110 , the lock-in amplifier is also used to demodulate the amplitude of the probe 110 .

[0071] Alternatively, if Figure 1 As shown, the computer unit 500 is connected to the excitation demodulation unit 400, and the computer unit 500 is used to determine whether the real-time amplitude of the probe 110 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference. The difference here refers to the difference between the real-time amplitude of the probe 110 and the target amplitude threshold. It can be understood that after the excitation demodulation unit 400 demodulates the real-time amplitude of the probe 110, the excitation demodulation unit 400 transmits the real-time amplitude to the computer unit 500, and the computer unit 500 is used to determine whether the real-time amplitude of the probe 110 is within the target amplitude threshold. When the real-time amplitude of the probe 110 is outside the target amplitude threshold, that is, there is a difference between the real-time amplitude and the target amplitude threshold, the computer unit 500 controls the excitation demodulation unit 400 to output a control signal to control the movement of the first translation stage 200, thereby adjusting the distance between the probe 110 and the sample 2000 to ensure that the real-time amplitude of the probe 110 is within the target amplitude threshold.

[0072] Optionally, the excitation demodulation unit 400 is connected to the computer unit 500 via a network port to ensure that the real-time amplitude of the probe 110 demodulated by the excitation demodulation unit 400 can be transmitted to the computer unit 500, and the computer unit 500 can also control the excitation demodulation unit 400 to output a control signal.

[0073] Optionally, the computer unit 500 is connected to the second translation stage 300. The computer unit 500 is used to control the movement of the second translation stage 300, so that when the distance between the probe 110 and the sample 2000 to be tested is greater than a preset distance threshold, the computer unit 500 can control the second translation stage 300 to move and adjust the distance between the probe 110 and the sample 2000 to be tested.

[0074] Optionally, the second translation stage 300 is connected to the computer unit 500 via a USB interface, so that the computer unit 500 can automatically control the movement of the second translation stage 300 .

[0075] Optionally, after the excitation demodulation unit 400 transmits the demodulated real-time amplitude of the probe 110 to the computer unit 500, the computer unit 500 compares the real-time amplitude of the probe 110 with the target amplitude threshold, determines whether there is a deviation value between the real-time amplitude of the probe 110 and the target amplitude threshold, and executes a PID (Proportion Integral Differential) algorithm. When there is a difference between the real-time amplitude of the probe 110 and the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move so that the real-time amplitude of the probe 110 is within the target amplitude threshold. When the real-time amplitude of the probe 110 is within the target amplitude threshold, there is no difference between the real-time amplitude and the target amplitude threshold, and the first translation stage 200 stops moving.

[0076] Optionally, when the real-time amplitude is within the target amplitude threshold, the excitation demodulation unit 400 controls the amplitude of the probe 110 to remain stable. Since the real-time amplitude is within the target amplitude threshold, it means that the distance between the probe 110 and the sample 2000 to be tested has reached the preset distance threshold. At this time, the vibration of the probe 110 can be controlled to determine the surface characteristics of the sample 2000 to be tested by utilizing the force between the probe 110 and the surface of the sample 2000 to be tested, thereby achieving the purpose of detecting the sample 2000 to be tested.

[0077] Optionally, when the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move, and / or the computer unit 500 controls the second translation stage 300 to move. Since the real-time amplitude is outside the target amplitude threshold, it means that the distance between the probe 110 and the sample to be tested 2000 is greater than the preset distance threshold. At this time, the first translation stage 200 and / or the second translation stage 300 are controlled to move to adjust the distance between the probe 110 and the sample to be tested 2000, so that the distance between the probe 110 and the sample to be tested 2000 reaches the preset distance threshold, thereby ensuring that the real-time amplitude of the probe 110 is within the target amplitude threshold, so as to facilitate the detection of the sample to be tested 2000.

[0078] In summary, the second translation stage 300 of the present application is connected to the computer module via a USB interface, the excitation demodulation unit 400 is connected to the computer unit 500 via a network port, and the excitation demodulation unit 400 can also control the movement of the first translation stage 200, so that the user can realize human-computer interaction through the software on the computer unit 500 to control the automatic probe insertion device 1000, and realize automatic and rapid adjustment of the distance between the probe 110 and the sample 2000 to be tested, and the PID algorithm is applied in the computer unit 500 to improve the efficiency and stability of the calculation.

[0079] Optionally, when the first translation stage 200 moves to the first maximum movement value along the set direction, if the real-time amplitude is outside the target amplitude threshold, the first translation stage 200 moves in the reverse direction along the set direction by the first maximum movement value, and the computer unit 500 controls the second translation stage 300 to move in the set direction by the first maximum movement value. That is, in the process that the excitation demodulation unit 400 controls the first translation stage 200 to move and drives the probe assembly 100 or the sample 2000 to move, if the first translation stage 200 moves to the maximum stroke, but the distance between the probe 110 and the sample 2000 in the set direction is greater than the preset distance threshold, the excitation demodulation unit 400 drives the first translation stage 200 to move in the reverse direction along the set direction by the first maximum movement value, so that the first translation stage 200 moves to the original position, and then the computer unit 500 controls the second translation stage 300 to move in the set direction by the first maximum movement value to reduce the distance between the probe 110 and the sample 2000.

[0080] It should be noted that, because after the first translation stage 200 moves the first maximum movement value, the set direction distance between the probe 110 and the sample 2000 to be tested is greater than the preset distance threshold, therefore, controlling the second translation stage 300 to move the first maximum movement value along the set direction still cannot move the distance between the probe 110 and the sample 2000 to the preset distance threshold. Therefore, after the second translation stage 300 moves the first maximum movement value along the set direction, the excitation demodulation unit 400 controls the first translation stage 200 to continue moving along the set direction until the real-time amplitude is within the target amplitude threshold.

[0081] It is worth noting that, in the present application, after the first translation stage 200 moves to the first maximum movement value and the set direction distance between the probe 110 and the sample to be tested 2000 is greater than the preset distance threshold, the first translation stage 200 is first returned to its position, and then the second translation stage 300 is controlled to move, and then the first translation stage 200 is controlled again. Such an arrangement can ensure that the last moving stage to move is the first translation stage 200. Since the first translation stage 200 is a nano-translation stage with high precision, such an arrangement can ensure that there will be no hard contact between the probe assembly 100 and the sample to be tested 2000.

[0082] Optionally, the first translation stage 200 moves along a set direction. If the first translation stage 200 has not moved to the first maximum movement value, but the real-time amplitude is within the target amplitude threshold, it means that the first translation stage 200 has not moved to the maximum displacement, and the real-time amplitude of the probe 110 is within the target amplitude threshold, and the needle insertion is completed. At this time, it is only necessary to control the excitation demodulation unit 400 to output a constant voltage so that the real-time set direction distance between the probe 110 and the sample 2000 to be tested remains stable, and the real-time amplitude of the probe 110 remains stable, so as to facilitate the detection of the sample 2000 to be tested.

[0083] Optionally, the first translation stage 200 moves in the reverse direction by the first maximum movement value along the set direction, and the computer unit 500 controls the second translation stage 300 to move in the set direction by the first maximum movement value. If the real-time amplitude is outside the target amplitude threshold, the first translation stage 200 moves in the reverse direction by the first maximum movement value along the set direction, and the computer unit 500 controls the second translation stage 300 to move in the set direction by the first maximum movement value.

[0084] Optionally, when the first translation stage 200 moves to the first maximum movement value along the set direction, if the real-time amplitude is outside the target amplitude threshold, the first translation stage 200 moves the first maximum movement value in the opposite direction along the set direction, and the computer unit 500 controls the second translation stage 300 to move the first maximum movement value along the set direction, including: in the first mating state, the second translation stage 300 moves the first maximum movement value along the set direction toward the first translation stage 200.

[0085] That is to say, Figure 3 As shown, the probe assembly 100 is disposed on the second translation stage 300, and the sample 2000 to be tested is disposed on the first translation stage 200; or Figure 4 As shown, under the premise that the probe assembly 100 is arranged on the first translation stage 200 and the sample 2000 to be tested is arranged on the second translation stage 300, when the first translation stage 200 moves to the first maximum movement value and the set direction distance between the probe 110 and the sample 2000 to be tested is greater than the preset distance threshold, the first translation stage 200 is first returned to its position, and then the computer unit 500 controls the second translation stage 300 to move the first maximum movement value in the direction of the first translation stage 200, so as to drive the probe assembly 100 or the sample 2000 to be tested arranged on the second translation stage 300 to move, thereby reducing the distance between the probe assembly 100 and the sample 2000 to be tested.

[0086] Optionally, when the first translation stage 200 moves along a set direction to a first maximum movement value, if the real-time amplitude is outside a target amplitude threshold, the first translation stage 200 moves in the opposite direction along the set direction by the first maximum movement value, and the computer unit 500 controls the second translation stage 300 to move along the set direction by the first maximum movement value, including: in the second mating state, the second translation stage 300 drives the first translation stage 200 to move along the set direction toward the fixed stage by the first maximum movement value.

[0087] That is to say, Figure 1 As shown, the sample 2000 to be tested is set on the first translation stage 200, and the probe assembly 100 is set on the fixed stage; or Figure 2 As shown, under the premise that the probe assembly 100 is arranged on the first translation stage 200 and the sample 2000 to be tested is arranged on the fixed stage, when the first translation stage 200 moves to the first maximum movement value and the set direction distance between the probe 110 and the sample 2000 to be tested is greater than the preset distance threshold, the first translation stage 200 is first returned to its position, and then the computer unit 500 controls the second translation stage 300 to move the first maximum movement value toward the fixed stage. During the movement, the second translation stage 300 can drive the first translation stage 200 to move, thereby driving the probe assembly 100 or the sample 2000 to be tested set on the first translation stage 200 to move, thereby reducing the distance between the probe assembly 100 and the sample 2000 to be tested.

[0088] It should be noted that if Figure 2 As shown, in the second matching state, and when the probe assembly 100 is set on the first translation stage 200 and the sample 2000 to be tested is set on the fixed stage, the first translation stage 200 and the second translation stage 300 are always in contact, specifically: the excitation demodulation unit 400 drives the first translation stage 200 to move to reduce the distance between the probe assembly 100 and the sample 2000 to be tested; when the computer unit 500 controls the second translation stage 300 to move toward the fixed stage by the first maximum movement value, the second translation stage 300 drives the first translation stage 200 to move together.

[0089] Alternatively, if Figure 1 As shown, the automatic probe insertion device 1000 further includes a first driving unit 600 and a second driving unit 700, wherein the first driving unit 600 is electrically connected to the first translation stage 200 and the excitation demodulation unit 400, respectively, and the excitation demodulation unit 400 controls the first driving unit 600 to drive the first translation stage 200 to move. In other words, the excitation demodulation unit 400 controls the first driving unit 600 to drive the first translation stage 200 to move, thereby realizing automatic movement of the first translation stage 200 and reducing the degree of manual intervention.

[0090] Optionally, the excitation demodulation unit 400 is connected to the first driving unit 600 by a coaxial cable. After the excitation demodulation unit 400 excites the probe 110 to vibrate and demodulates the real-time amplitude of the probe 110, the excitation demodulation unit 400 outputs an analog voltage which is transmitted to the first driving unit 600 by the coaxial cable. The first driving unit 600 controls the first translation stage 200 to move in a set direction to achieve continuous needle advancement.

[0091] Alternatively, if Figure 1 As shown, the second driving unit 700 is connected to the computer unit 500 and the second translation stage 300 respectively, and the computer unit 500 controls the second driving unit 700 to drive the second translation stage 300 to move. In other words, the computer unit 500 controls the second driving unit 700 to drive the second translation stage 300 to move, so as to realize the automatic movement of the second translation stage 300 and reduce the degree of manual intervention.

[0092] In a specific example, when the first translation stage 200 moves to the first maximum movement value along the set direction but the real-time amplitude of the probe assembly 100 is outside the target amplitude threshold, the computer unit 500 will send an instruction to the excitation demodulation unit 400 to reduce the analog voltage output by the excitation demodulation unit 400 to the first translation stage 200 to 0, so that the first translation stage 200 moves in the opposite direction along the set direction by the first maximum movement value. Subsequently, the computer unit 500 controls the second driving unit 700 to control the second translation stage 300 to move the first maximum movement value along the set direction, thereby reducing the distance between the probe assembly 100 and the sample 2000 to be tested.

[0093] Optionally, both the first driving unit 600 and the second driving unit 700 are controllers, and the controller is used to send a control signal to the first translation stage 200 or the second translation stage 300 to control the first translation stage 200 or the second translation stage 300 to move in a set direction.

[0094] In some embodiments of the present invention, Figure 3 and Figure 4As shown, in the first matching state, the sample 2000 to be tested is located on the first translation stage 200 or the second translation stage 300 at a relatively lower position in a set direction; the probe assembly 100 is located on the first translation stage 200 or the second translation stage 300 at a relatively upper position in a set direction. Here, it means that no matter the probe assembly 100 is arranged on the second translation stage 300 and the sample 2000 to be tested is arranged on the first translation stage 200; or the probe assembly 100 is arranged on the first translation stage 200 and the sample 2000 to be tested is arranged on the second translation stage 300, the sample 2000 to be tested is located below the probe assembly 100. On the one hand, it is ensured that the sample 2000 to be tested and the probe assembly 100 can be arranged relative to each other, so that when the distance between the sample 2000 to be tested and the probe assembly 100 is appropriate, the sample 2000 to be tested can be detected, and on the other hand, it is ensured that the position of the sample 2000 to be tested is stable, and the first translation stage 200 or the second translation stage 300 can stably support the sample 2000 to be tested.

[0095] Alternatively, if Figure 1 and Figure 2 As shown, in the second matching state, the first translation stage 200 is located on the upper part of the second translation stage 300, and the sample 2000 to be tested is located on the fixed stage or the first translation stage 200 relatively below in the set direction; the probe assembly 100 is located on the fixed stage or the first translation stage 200 relatively above in the set direction. Here, it is also mainly to ensure that the sample 2000 to be tested is always located below the probe assembly 100. The effect produced can refer to the beneficial effect produced by the sample 2000 to be tested being located below the probe assembly 100 in the first matching state, which will not be repeated here.

[0096] The following describes the automatic needle insertion method of the probe according to the embodiment of the present invention with reference to the accompanying drawings.

[0097] According to an embodiment of the present invention, a probe automatic insertion method is provided. Figure 5 As shown, the following steps are included:

[0098] S1 . The excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate at a set frequency, and demodulates the real-time amplitude of the probe 110 .

[0099] S2 . Compare the real-time amplitude of the probe 110 with the target amplitude threshold of the probe 110 .

[0100] S3. When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move and shortens the distance between the probe 110 and the sample 2000 to be tested.

[0101] S4. Compare the real-time movement amount of the first translation stage 200 with the first maximum movement value of the first translation stage 200, and compare the real-time set direction distance between the probe 110 and the sample 2000 with the preset distance threshold between the probe 110 and the sample 2000.

[0102] S5. When the real-time movement amount is less than the first maximum movement value and the set direction distance is within the preset distance threshold, the excitation demodulation unit 400 is controlled to output a constant voltage, so that the real-time set direction distance between the probe 110 and the sample 2000 to be tested remains stable, and the real-time amplitude of the probe 110 remains stable.

[0103] It can be seen from the above method that in the automatic needle insertion method of the probe of the embodiment of the present invention, before moving the first translation stage 200 or moving the second translation stage 300, the excitation demodulation unit 400 first outputs a voltage to excite the probe 110 to vibrate. When the probe 110 vibrates to a specific frequency, the excitation demodulation unit 400 demodulates the real-time amplitude of the probe 110, and controls the movement of the first translation stage 200 according to the difference between the real-time amplitude of the probe 110 and the target amplitude threshold value so as to shorten the distance between the probe 110 and the sample 2000 to be tested, thereby achieving the purpose of adjusting the distance between the probe 110 and the sample 2000 to be tested, thereby realizing automatic needle insertion of the probe assembly 100 and reducing the degree of manual intervention; during the movement of the first translation stage 200, the first translation stage 200 will be judged in real time. Whether the real-time movement of the stage 200 exceeds the first maximum movement value of the first translation stage 200, and whether the real-time setting direction distance between the probe 110 and the sample 2000 to be tested reaches the preset distance threshold between the probe 110 and the sample 2000 to be tested. When the real-time movement is less than the first maximum movement value, and the setting direction distance is within the preset distance threshold, it means that the first translation stage 200 has not moved to the maximum displacement, and the real-time amplitude of the probe 110 is within the target amplitude threshold, and the needle insertion is completed. At this time, it is also necessary to control the excitation demodulation unit 400 to output a constant voltage to keep the real-time setting direction distance between the probe 110 and the sample 2000 to be tested stable, and keep the real-time amplitude of the probe 110 stable, so as to facilitate the detection of the sample 2000 to be tested.

[0104] Optionally, when the excitation demodulation unit 400 excites the probe 110 to vibrate and determines that the real-time amplitude of the probe 110 is within the target amplitude threshold, there is no need to control the movement of the first translation stage 200 and the second translation stage 300. It is only necessary to ensure that the excitation demodulation unit 400 outputs a constant voltage to ensure that the distance between the probe 110 and the sample 2000 to be tested is stable.

[0105] Optionally, after the excitation demodulation unit 400 demodulates the real-time amplitude of the probe 110, the excitation demodulation unit 400 is used to transmit the real-time amplitude to the computer unit 500. The computer unit 500 is used to determine whether the real-time amplitude of the probe 110 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference between the real-time amplitude and the target amplitude threshold, so as to control the movement of the first translation stage 200 so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0106] It should be noted that the preset distance threshold between the probe 110 and the sample 2000 mentioned above can be a range value or a specific value.

[0107] In some embodiments of the present invention, Figure 5 As shown, the automatic probe insertion method also includes the following steps:

[0108] S6. When the real-time movement amount is equal to the first maximum movement value and the set direction distance is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move in the reverse direction by the first maximum movement value.

[0109] S7. The computer unit 500 controls the second translation stage 300 to move to a first maximum movement value.

[0110] S8. Compare the real-time movement of the first translation stage 200 with the first maximum movement value again, and compare the real-time set direction distance between the probe 110 and the sample 2000 to be tested with the preset distance threshold, until the real-time movement is less than the first maximum movement value and the set direction distance is within the preset distance threshold, the excitation demodulation unit 400 controls the probe 110 to vibrate within the target amplitude threshold.

[0111] It can be seen that when the first translation stage 200 moves to the maximum displacement, but the distance between the probe 110 and the sample to be tested 2000 is outside the preset distance threshold, it means that the real-time amplitude of the probe 110 is outside the target amplitude threshold. At this time, the excitation demodulation unit 400 controls the first translation stage 200 to move in the opposite direction by the first maximum movement value to return to the origin, and the computer unit 500 controls the second translation stage 300 to move by the first maximum movement value to shorten the distance between the probe 110 and the sample to be tested 2000. Subsequently, the excitation demodulation unit 400 controls the first translation stage 200 to move and shorten the distance between the probe 110 and the sample to be tested 2000. In addition, during the movement of the first translation stage 200, it is determined in real time whether the real-time movement amount of the first translation stage 200 exceeds the first maximum movement value of the first translation stage 200, and whether the real-time set direction distance between the probe 110 and the sample to be tested 2000 reaches the set direction distance between the probe 110 and the sample to be tested. If the real-time movement amount is less than the first maximum movement value and the distance in the set direction is within the preset distance threshold, the needle insertion is completed; if the first translation stage 200 moves to the maximum displacement amount, but the distance between the probe 110 and the sample 2000 to be measured is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move in the opposite direction by the first maximum movement value again, the computer unit 500 controls the second translation stage 300 to move the first maximum movement value again, and the excitation demodulation unit 400 controls the first translation stage 200 to move along the set direction again to shorten the distance between the probe 110 and the sample 2000 to be measured, and the above steps (S7, S8 and S9) are repeated until the real-time movement amount of the first translation stage 200 is less than or equal to the first maximum movement value, and the distance between the probe 110 and the sample 2000 to be measured is within the preset distance threshold, the needle insertion is completed.

[0112] Optionally, before the excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate, it is also necessary to input a driving voltage of the excitation demodulation unit 400, a specific frequency, and a preset distance threshold between the probe 110 and the sample 2000 to be tested into the computer unit 500, the computer unit 500 inputs the driving voltage to the excitation demodulation unit 400, the excitation demodulation unit 400 outputs a driving voltage to drive the probe 110 to vibrate, and demodulates the probe 110 at a specific frequency, and during the movement of the first translation stage 200, the computer unit 500 determines in real time whether the real-time movement amount of the first translation stage 200 exceeds the first maximum movement value of the first translation stage 200, and determines whether the real-time set direction distance between the probe 110 and the sample 2000 to be tested reaches the preset distance threshold between the probe 110 and the sample 2000 to be tested, and then determines whether the real-time amplitude of the probe 110 is within the target amplitude threshold.

[0113] The following describes the specific structure of the probe automatic needle insertion device 1000 and the specific steps of the probe automatic needle insertion method in a specific embodiment of the present invention in conjunction with the drawings of the specification. The embodiments of the present invention can be all embodiments after combining the above-mentioned multiple technical solutions, but are not limited to the following specific embodiments, which all fall within the protection scope of the present invention.

[0114] Example 1

[0115] A probe automatic needle insertion device 1000 is used to detect a sample 2000 to be tested. Figure 1 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .

[0116] Among them, Figure 1 As shown, the probe assembly 100 and the sample to be tested 2000 are spaced apart in the Z direction, and the sample to be tested 2000 is located below the probe assembly 100. The excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the real-time amplitude of the probe assembly 100. The excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first driving unit 600.

[0117] like Figure 1 As shown, the computer unit 500 is connected to the excitation demodulation unit 400. The computer unit 500 is used to determine whether the real-time amplitude of the probe assembly 100 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference to control the first translation stage 200 to move along the Z direction. The computer unit 500 is also used to control the second translation stage 300 to move along the Z direction by controlling the second driving unit 700.

[0118] The first translation stage 200 and the second translation stage 300 have a second mating state. In the second mating state, Figure 1 As shown, the sample 2000 to be tested is placed on the first translation stage 200, the probe assembly 100 is placed on a fixed stage (not shown in the figure), and the first translation stage 200 and the second translation stage 300 move in the same direction in linkage in the Z direction.

[0119] The first maximum movement value of the first translation stage 200 is smaller than the second maximum movement value of the second translation stage 300 , and the Z-direction distance between the probe assembly 100 and the sample 2000 to be tested is smaller than the second maximum movement value.

[0120] A method for automatically inserting a probe comprises the automatic inserting probe device 1000 in Embodiment 1, and comprises the following steps:

[0121] S1 . The excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate at a set frequency, and demodulates the real-time amplitude of the probe 110 .

[0122] S2 . Compare the real-time amplitude of the probe 110 with the target amplitude threshold of the probe 110 .

[0123] S3. When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move upward to shorten the distance between the probe 110 and the sample 2000 to be tested.

[0124] S4. Compare the real-time movement amount of the first translation stage 200 with the first maximum movement value of the first translation stage 200, and compare the real-time Z-direction distance between the probe 110 and the sample 2000 with the preset distance threshold between the probe 110 and the sample 2000.

[0125] S5. When the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 is controlled to output a constant voltage to keep the real-time Z-direction distance between the probe 110 and the sample 2000 stable and to keep the real-time amplitude of the probe 110 stable.

[0126] S6. When the real-time movement amount is equal to the first maximum movement value and the Z-direction distance is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move downward by the first maximum movement value.

[0127] S7. The computer unit 500 controls the second translation stage 300 to move upward by a first maximum movement value, and pushes the first translation stage 200 to move together.

[0128] S8. The excitation demodulation unit 400 controls the first translation stage 200 to move upward again, and compares the real-time movement amount of the first translation stage 200 with the first maximum movement value, and compares the real-time Z-direction distance between the probe 110 and the sample to be tested 2000 with the preset distance threshold, until the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 controls the probe 110 to vibrate within the target amplitude threshold.

[0129] Example 2

[0130] A probe automatic needle insertion device 1000 is used to detect a sample 2000 to be tested. Figure 2 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .

[0131] Among them, Figure 2As shown, the probe assembly 100 and the sample to be tested 2000 are spaced apart in the Z direction, and the sample to be tested 2000 is located below the probe assembly 100. The excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the real-time amplitude of the probe assembly 100. The excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first driving unit 600.

[0132] like Figure 2 As shown, the computer unit 500 is connected to the excitation demodulation unit 400. The computer unit 500 is used to determine whether the real-time amplitude of the probe assembly 100 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference to control the first translation stage 200 to move along the Z direction. The computer unit 500 is also used to control the second translation stage 300 to move along the Z direction by controlling the second driving unit 700.

[0133] The first translation stage 200 and the second translation stage 300 have a second mating state. In the second mating state, Figure 2 As shown, the probe assembly 100 is arranged on the first translation stage 200, the sample 2000 to be tested is arranged on a fixed stage (not shown in the figure), and the first translation stage 200 and the second translation stage 300 move in the same direction in linkage in the Z direction.

[0134] The first maximum movement value of the first translation stage 200 is smaller than the second maximum movement value of the second translation stage 300 , and the Z-direction distance between the probe assembly 100 and the sample 2000 to be tested is smaller than the second maximum movement value.

[0135] A method for automatically inserting a probe, including the automatic inserting probe device 1000 in Embodiment 2, comprises the following steps:

[0136] S1 . The excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate at a set frequency, and demodulates the real-time amplitude of the probe 110 .

[0137] S2 . Compare the real-time amplitude of the probe 110 with the target amplitude threshold of the probe 110 .

[0138] S3. When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move downward, so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0139] S4. Compare the real-time movement amount of the first translation stage 200 with the first maximum movement value of the first translation stage 200, and compare the real-time Z-direction distance between the probe 110 and the sample 2000 with the preset distance threshold between the probe 110 and the sample 2000.

[0140] S5. When the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 is controlled to output a constant voltage to keep the real-time Z-direction distance between the probe 110 and the sample 2000 stable and to keep the real-time amplitude of the probe 110 stable.

[0141] S6. When the real-time movement amount is equal to the first maximum movement value and the Z-direction distance is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move upward by the first maximum movement value.

[0142] S7. The computer unit 500 controls the second translation stage 300 to move downward by a first maximum movement value, and drives the first translation stage 200 to move together.

[0143] S8. The excitation demodulation unit 400 controls the first translation stage 200 to move downward again, and compares the real-time movement amount of the first translation stage 200 with the first maximum movement value, and compares the real-time Z-direction distance between the probe 110 and the sample to be tested 2000 with the preset distance threshold, until the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 controls the probe 110 to vibrate within the target amplitude threshold.

[0144] Example 3

[0145] A probe automatic needle insertion device 1000 is used to detect a sample 2000 to be tested. Figure 3 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .

[0146] Among them, Figure 3 As shown, the probe assembly 100 and the sample to be tested 2000 are spaced apart in the Z direction, and the sample to be tested 2000 is located below the probe assembly 100. The excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the real-time amplitude of the probe assembly 100. The excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first driving unit 600.

[0147] like Figure 3 As shown, the computer unit 500 is connected to the excitation demodulation unit 400. The computer unit 500 is used to determine whether the real-time amplitude of the probe assembly 100 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference to control the first translation stage 200 to move along the Z direction. The computer unit 500 is also used to control the second translation stage 300 to move along the Z direction by controlling the second driving unit 700.

[0148] The first translation stage 200 and the second translation stage 300 have a first mating state. In the first mating state, Figure 3 As shown, the probe assembly 100 is disposed on the second translation stage 300, and the sample 2000 to be tested is disposed on the first translation stage 200, and the first translation stage 200 and the second translation stage 300 move toward each other in the Z direction.

[0149] The first maximum movement value of the first translation stage 200 is smaller than the second maximum movement value of the second translation stage 300 , and the Z-direction distance between the probe assembly 100 and the sample 2000 to be tested is smaller than the second maximum movement value.

[0150] A method for automatically inserting a probe, including the automatic inserting probe device 1000 in Example 3, comprises the following steps:

[0151] S1 . The excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate at a set frequency, and demodulates the real-time amplitude of the probe 110 .

[0152] S2 . Compare the real-time amplitude of the probe 110 with the target amplitude threshold of the probe 110 .

[0153] S3. When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move upward, so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0154] S4. Compare the real-time movement amount of the first translation stage 200 with the first maximum movement value of the first translation stage 200, and compare the real-time Z-direction distance between the probe 110 and the sample 2000 with the preset distance threshold between the probe 110 and the sample 2000.

[0155] S5. When the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 is controlled to output a constant voltage to keep the real-time Z-direction distance between the probe 110 and the sample 2000 stable and to keep the real-time amplitude of the probe 110 stable.

[0156] S6. When the real-time movement amount is equal to the first maximum movement value and the Z-direction distance is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move downward by the first maximum movement value.

[0157] S7. The computer unit 500 controls the second translation stage 300 to move downward by a first maximum movement value, so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0158] S8. The excitation demodulation unit 400 controls the first translation stage 200 to move upward again, and compares the real-time movement amount of the first translation stage 200 with the first maximum movement value, and compares the real-time Z-direction distance between the probe 110 and the sample to be tested 2000 with the preset distance threshold, until the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 controls the probe 110 to vibrate within the target amplitude threshold.

[0159] Example 4

[0160] A probe automatic needle insertion device 1000 is used to detect a sample 2000 to be tested. Figure 4 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .

[0161] Among them, Figure 4 As shown, the probe assembly 100 and the sample to be tested 2000 are spaced apart in the Z direction, and the sample to be tested 2000 is located below the probe assembly 100. The excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the real-time amplitude of the probe assembly 100. The excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first driving unit 600.

[0162] like Figure 4 As shown, the computer unit 500 is connected to the excitation demodulation unit 400. The computer unit 500 is used to determine whether the real-time amplitude of the probe assembly 100 is within the target amplitude threshold, and control the excitation demodulation unit 400 to output a control signal according to the difference to control the first translation stage 200 to move along the Z direction. The computer unit 500 is also used to control the second translation stage 300 to move along the Z direction by controlling the second driving unit 700.

[0163] The first translation stage 200 and the second translation stage 300 have a first mating state. In the first mating state, Figure 4 As shown, the probe assembly 100 is disposed on a first translation stage 200 , and the sample 2000 to be tested is disposed on a second translation stage 300 . The first translation stage 200 and the second translation stage 300 move toward each other in the Z direction.

[0164] The first maximum movement value of the first translation stage 200 is smaller than the second maximum movement value of the second translation stage 300 , and the Z-direction distance between the probe assembly 100 and the sample 2000 to be tested is smaller than the second maximum movement value.

[0165] A method for automatically inserting a probe, including the automatic inserting probe device 1000 in Embodiment 4, comprises the following steps:

[0166] S1 . The excitation demodulation unit 400 outputs a voltage to excite the probe 110 to vibrate at a set frequency, and demodulates the real-time amplitude of the probe 110 .

[0167] S2 . Compare the real-time amplitude of the probe 110 with the target amplitude threshold of the probe 110 .

[0168] S3. When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move downward, so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0169] S4. Compare the real-time movement amount of the first translation stage 200 with the first maximum movement value of the first translation stage 200, and compare the real-time Z-direction distance between the probe 110 and the sample 2000 with the preset distance threshold between the probe 110 and the sample 2000.

[0170] S5. When the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 is controlled to output a constant voltage to keep the real-time Z-direction distance between the probe 110 and the sample 2000 stable and to keep the real-time amplitude of the probe 110 stable.

[0171] S6. When the real-time movement amount is equal to the first maximum movement value and the Z-direction distance is outside the preset distance threshold, the excitation demodulation unit 400 controls the first translation stage 200 to move upward by the first maximum movement value.

[0172] S7. The computer unit 500 controls the second translation stage 300 to move upward by a first maximum movement value, so that the distance between the probe 110 and the sample 2000 to be tested is shortened.

[0173] S8. The excitation demodulation unit 400 controls the first translation stage 200 to move downward again, and compares the real-time movement amount of the first translation stage 200 with the first maximum movement value, and compares the real-time Z-direction distance between the probe 110 and the sample to be tested 2000 with the preset distance threshold, until the real-time movement amount is less than the first maximum movement value and the Z-direction distance is within the preset distance threshold, the excitation demodulation unit 400 controls the probe 110 to vibrate within the target amplitude threshold.

[0174] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0175] Other components of the automatic probe insertion device 1000 and the automatic probe insertion method according to the embodiment of the present invention, such as the working principle of the phase-locked amplifier, are well known to those skilled in the art and will not be described in detail here.

[0176] In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0177] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A probe automatic needle insertion device, the probe automatic needle insertion device is used to detect a sample to be tested, characterized in that: include: A probe assembly, wherein the probe assembly and the sample to be tested are spaced apart in a set direction, and the probe assembly can move or vibrate relative to the sample to be tested; A first translation stage and a second translation stage, wherein both the first translation stage and the second translation stage can be moved in the set direction; the first translation stage and the second translation stage have a first matching state and a second matching state; In the first matching state, the first translation stage and the second translation stage move toward each other in the set direction, and the probe assembly and the sample to be tested are respectively arranged on the first translation stage and the second translation stage; In the second matching state, the first translation stage and the second translation stage move in tandem in the set direction, one of the probe assembly and the sample to be tested is arranged on the first translation stage, and the other is arranged on the fixed stage; The first maximum movement value of the first translation stage is smaller than the second maximum movement value of the second translation stage, and the distance in the set direction between the probe assembly and the sample to be tested is smaller than the second maximum movement value; The probe assembly comprises a probe, and when the probe moves to a distance from the sample to be tested in the set direction reaching a preset distance threshold, the real-time amplitude of the probe is within a target amplitude threshold; When the distance between the probe and the sample to be tested in the set direction is greater than a preset distance threshold, the real-time amplitude of the probe is outside the target amplitude threshold; Also includes: an excitation demodulation unit, the excitation demodulation unit is used to excite the probe to vibrate and demodulate the real-time amplitude of the probe, and is also used to control the movement of the first translation stage; A computer unit, the computer unit is connected to the excitation demodulation unit and the computer unit is connected to the second translation stage, the computer unit is used to determine whether the real-time amplitude of the probe is within a target amplitude threshold, and control the excitation demodulation unit to output a control signal according to the difference; the computer unit applies a PID algorithm; When the real-time amplitude is within the target amplitude threshold, the excitation demodulation unit controls the amplitude of the probe to remain stable; When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit controls the first translation stage to move, and / or the computer unit controls the second translation stage to move; when the first translation stage moves along the set direction to the first maximum movement value, if the real-time amplitude is outside the target amplitude threshold, the first translation stage moves in the set direction in the opposite direction by the first maximum movement value, and the computer unit controls the second translation stage to move along the set direction by the first maximum movement value; the first translation stage continues to move along the set direction until the real-time amplitude is within the target amplitude threshold.

2. The automatic probe insertion device according to claim 1, characterized in that: When the first translation stage moves along the set direction to the first maximum movement value, if the real-time amplitude is outside the target amplitude threshold, the first translation stage moves in the opposite direction along the set direction to the first maximum movement value, and the computer unit controls the second translation stage to move along the set direction to the first maximum movement value, comprising: In the first matching state, the second translation stage moves along the set direction toward the first translation stage by the first maximum movement value; In the second matching state, the second translation stage drives the first translation stage to move toward the fixed stage by the first maximum movement value along the set direction.

3. The automatic probe insertion device according to claim 1, characterized in that: It also includes a first driving unit and a second driving unit, wherein the first driving unit is electrically connected to the first translation stage and the excitation demodulation unit respectively, and the excitation demodulation unit controls the first driving unit to drive the first translation stage to move; The second driving unit is connected to the computer unit and the second translation stage respectively, and the computer unit controls the second driving unit to drive the second translation stage to move.

4. The automatic probe insertion device according to claim 1, characterized in that: The first translation stage is a nano translation stage, and the second translation stage is a micro translation stage.

5. The automatic probe insertion device according to claim 1, characterized in that: In the first matching state, the sample to be tested is located on the first translation platform at a relatively lower position in the set direction, and the probe assembly is located on the second translation platform at a relatively upper position in the set direction; Or the sample to be tested is located on the second translation platform which is relatively below the set direction, and the probe assembly is located on the first translation platform which is relatively above the set direction; In the second matching state, the first translation stage is located on the upper part of the second translation stage, the sample to be tested is located on the fixed stage at a relatively lower position in the set direction, and the probe assembly is located on the first translation stage at a relatively upper position in the set direction; or the sample to be tested is located on the first displacement platform which is relatively below the set direction; The probe assembly is located on the fixing platform relatively above the setting direction position.

6. A method for automatically inserting a probe, characterized in that: The following steps are involved: The excitation demodulation unit outputs a voltage to excite the probe to vibrate at a set frequency, and demodulates the real-time amplitude of the probe; comparing the real-time amplitude of the probe with a target amplitude threshold of the probe; When the real-time amplitude is outside the target amplitude threshold, the excitation demodulation unit controls the first translation stage to move and shortens the distance between the probe and the sample to be measured; Comparing the real-time movement amount of the first translation stage with the first maximum movement value of the first translation stage, and comparing the real-time set direction distance between the probe and the sample to be tested with the preset distance threshold between the probe and the sample to be tested; When the real-time movement amount is less than the first maximum movement value and the set direction distance is at a preset distance threshold, the excitation demodulation unit is controlled to output a constant voltage, so that the real-time set direction distance between the probe and the sample to be tested remains stable, and the real-time amplitude of the probe remains stable; The following steps are also included: When the real-time movement amount is equal to the first maximum movement value, and the set direction distance is outside the preset distance threshold, the excitation demodulation unit controls the first translation stage to move in the opposite direction by the first maximum movement value; The computer unit controls the second translation stage to move the first maximum movement value; The real-time movement amount of the first translation stage is compared with the first maximum movement value again, and the real-time distance in the set direction between the probe and the sample to be tested is compared with the preset distance threshold, until the real-time movement amount of the first translation stage is less than the first maximum movement value and the distance in the set direction is within the preset distance threshold, the excitation demodulation unit controls the probe to vibrate within the target amplitude threshold.

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