Injector, processing device and cleaning device

Abstract

The present application provides an ejector, a processing device, and a cleaning device, which can suppress a decrease in suction force in a case where liquid intrudes into the inside of the ejector and inexpensively perform processing or cleaning of an object to be processed. The ejector generates a suction force, the ejector having: an inflow pipe having a plurality of openings formed at a front end thereof from which a drive fluid is ejected; an outflow pipe having a receiving port that receives the drive fluid ejected from the openings at a position opposite to the front end of the inflow pipe; and a main body portion that surrounds around the openings and the receiving port, having a suction passage that suctions an external fluid to the inside.

Description

Technical Field

[0001] The present invention relates to an attractive force injector and a processing and cleaning apparatus having the same injector. Background Technology

[0002] Electronic devices such as personal computers and smartphones contain chips with semiconductor devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations). These chips are manufactured by dicing wafers that have functional layers formed on the front side of semiconductor substrates such as silicon and silicon carbide.

[0003] The wafer is cut along a predetermined dicing line, for example, after being ground to the desired thickness on the back side. Furthermore, machining debris sometimes adheres to the front side of the wafer and the individual chips manufactured from it; therefore, the wafer and chips are usually cleaned at appropriate times.

[0004] The processing apparatus for grinding or cutting a wafer and the cleaning apparatus for cleaning the wafer and the individual chips manufactured from the wafer each include a chuck stage having a holding surface for holding the wafer.

[0005] When processing and cleaning the wafer or chip, external forces are applied to the wafer or chip. In order to prevent the processed object from moving even under such conditions, the chuck stage typically attracts and holds the processed object (see, for example, Patent Documents 1 and 2).

[0006] Patent Document 1: Japanese Patent Application Publication No. 2009-246098

[0007] Patent Document 2: Japanese Patent Application Publication No. 2010-36275

[0008] A porous section is provided on the front side of the chuck worktable to maintain negative pressure when the workpiece is attracted. The front side of the porous section serves as the holding surface for attracting and holding the workpiece. Furthermore, the porous section is connected to an ejector, and the suction force generated in the ejector maintains the porous section at negative pressure.

[0009] Ejectors can be broadly classified into those driven by a gas or a liquid, where the driving fluid is used to generate an attractive force. The former primarily utilizes Bernoulli's principle, which preserves the energy (momentum) of inviscid fluids. The latter primarily utilizes Newton's law of viscosity, which applies to frictional forces generated by the velocity gradient between the viscous fluid and the surrounding fluid.

[0010] However, although gases have lower viscosity than liquids, there is no such thing as a completely non-viscous gas. Therefore, even in a jet propelled by a gas, friction is generated between the gas and the surrounding fluid as the gas moves. Thus, a jet propelled by a gas generates an attractive force using Bernoulli's theorem and Newton's law of viscosity.

[0011] Furthermore, the processing and cleaning of the workpiece described above are typically carried out while liquid is being supplied. Additionally, to reliably hold the workpiece, the size of the porous portion in the holding surface is usually designed to be slightly larger than the size of the workpiece itself.

[0012] Therefore, sometimes the area near the outer edge of the porous section's retaining surface is not covered by the workpiece during processing or cleaning, but is exposed to the liquid. As a result, the liquid supplied to the workpiece is sometimes drawn into the interior of the porous section through this area due to the suction force generated in the injector.

[0013] Furthermore, the liquid drawn into the porous section may sometimes reach the interior of the ejector via a connecting passage. In this case, friction may occur between the driving fluid and the liquid intruding into the ejector, hindering the flow of the driving fluid. As a result, the ejector's suction power is reduced, potentially causing adverse conditions during the processing or cleaning of the workpiece.

[0014] While ejectors exist that mitigate the adverse effects of liquid intrusion, these are large devices with complex mechanisms and require significant amounts of driving fluid. Therefore, using such ejectors to manufacture chips could potentially increase the chip's manufacturing cost. Summary of the Invention

[0015] In view of the above problems, one object of the present invention is to provide an injector that can suppress the reduction of attractive force when liquid enters the interior of the injector and to process or clean the workpiece inexpensively.

[0016] Another object of the present invention is to provide a processing apparatus and a cleaning apparatus having such an injector.

[0017] According to one aspect of the invention, an injector is provided that generates an attractive force, wherein the injector has: an inlet pipe having a plurality of openings at a front end from which a driving fluid is ejected; an outlet pipe having a receiving port at a position opposite to the front end of the inlet pipe for receiving the driving fluid ejected from the openings of the inlet pipe; and a body portion surrounding the openings and the receiving port, having an attractive path for attracting external fluid.

[0018] Preferably, the driving fluid is a liquid.

[0019] According to another aspect of the present invention, a processing apparatus is provided for processing a workpiece having a device formed on its front side, wherein the processing apparatus comprises: a chuck table having a holding surface for holding the workpiece; a processing unit for processing the workpiece held by the chuck table using a processing abrasive mounted at the front end of a spindle; the aforementioned ejector; and a connecting path for connecting the suction path of the ejector to the holding surface.

[0020] According to another aspect of the present invention, a cleaning apparatus is provided for cleaning an object having a device formed on its front side, wherein the cleaning apparatus comprises: a chuck table having a holding surface for holding the object to be cleaned; a cleaning unit for cleaning the object held by the chuck table; the aforementioned jet; and a connecting path for connecting the suction path of the jet to the holding surface.

[0021] According to one aspect of the invention, an ejector is provided that injects driving fluid from a plurality of openings in an inlet pipe into the interior of a body portion. In this ejector, compared to an ejector that injects driving fluid from a single opening, the surface area of ​​the flow path through which the driving fluid is expected to pass within the body portion is increased. That is, in this ejector, the contact area between the driving fluid and the surrounding fluid is increased.

[0022] Therefore, according to one aspect of the invention, the frictional force generated between the driving fluid and the surrounding fluid can be increased efficiently. As a result, even if liquid intrudes into the interior of the main body and obstructs the flow of the driving fluid, the adverse effects caused by the intruding liquid can be reduced. That is, even in such a case, the decrease in the attractive force of the injector can be suppressed.

[0023] Furthermore, according to one aspect of the invention, the desired attraction force can be achieved without complicating or increasing the size of the device, and without significantly increasing the amount of driving fluid required. As a result, the processing or cleaning of the workpiece can be performed inexpensively.

[0024] Furthermore, according to another aspect of the invention, a processing or cleaning apparatus having such an injector is provided. In these apparatuses, as described above, it is possible to suppress the reduction of the attractive force of the injector and to perform the processing or cleaning of the workpiece inexpensively. Attached Figure Description

[0025] Figure 1 This is a perspective view schematically showing the injector of an embodiment.

[0026] Figure 2 It is shown schematically. Figure 1A cross-sectional view of a portion of the injector shown.

[0027] Figure 3 It is an illustrative representation of... Figure 1 and Figure 2 The diagram shows a perspective view of the worktable base and chuck worktable connected to the injector.

[0028] Figure 4 It is an illustrative representation of... Figure 1 and Figure 2 The diagram shows a cross-sectional view of the injector-connected worktable base and chuck worktable.

[0029] Figure 5 It is a schematic cross-sectional view of a machining apparatus that performs machining on a workpiece held on the retaining surface of a chuck table.

[0030] Figure 6 It is a perspective view schematically showing a cleaning apparatus for cleaning a workpiece held on the holding surface of a chuck table (or rotary table).

[0031] Label Explanation

[0032] 11: Workpiece; 17: Cutting fluid; 21: Cleaned item; 2: Injector; 4: Main body; 4a: Wall; 4b: Wall; 4c: Suction path; 6: Inflow pipe; 6a: Part; 6b: Opening (hole); 6c: Wall; 8: Outflow pipe; 8a: Receiving port; 8b: Part; 8c: Front end; 20: Chuck table; 22: Frame; 22a: Recess; 22b: Lower surface; 22c: Recess; 22d: Recess; 22e: Positioning recess; 22f: Recess; 24: Perforated plate; 24a: Upper surface (holding surface); 26: Ring component; 50: Cutting device; 52: Cutting unit; 56: Spindle; 58: Cutting tool; 60: Coolant supply nozzle; 70: Cleaning device; 84: Table rotation unit; 86: Cleaning fluid receiving unit; 88: Chuck table (or rotary table); 88a: Perforated plate; 94: Shaft; 100a: Outer peripheral wall; 100b: Bottom wall; 100c: Inner peripheral wall; 104: Drain outlet; 108: Drying unit; 110: Drying nozzle; 112: Arm; 114: Shaft; 116: Cleaning unit; 118: Cleaning nozzle; 120: Arm; 122: Shaft; 126: Cover component. Detailed Implementation

[0033] The implementation of the injector is described with reference to the accompanying drawings. Figure 1 This is a perspective view schematically showing the injector 2 according to the embodiment. Figure 2 It is shown schematically. Figure 1 A cross-sectional view of a portion of the injector 2 shown.

[0034] The ejector 2 generates an attractive force by causing a driving fluid to flow inside the main body 4, which is isolated from the outside. This driving fluid can be any type of liquid or gas. Examples of driving fluids include liquids such as water, air, or inert gases such as argon and nitrogen.

[0035] The main body 4 has opposing walls 4a and 4b, and an attraction path 4c provided on the walls of the main body 4 other than the walls 4a and 4b. Furthermore, one end of the inflow pipe 6 is inserted into the wall 4a, and one end of the outflow pipe 8 is inserted into the wall 4b.

[0036] The inlet pipe 6 provides a path for the driving fluid to flow into the interior of the main body 4. The outlet pipe 8 provides a path for the fluid present inside the main body 4 to flow out. The suction path 4c provides a path for attracting external fluid into the interior of the main body 4.

[0037] The other end of the inflow pipe 6 is connected to a driving fluid supply source (not shown) in such a way that driving fluid is supplied. Furthermore, one end of the inflow pipe 6 located inside the main body 4 includes a portion (which functions as a venturi tube) 6a that decreases in diameter and then increases in diameter as it approaches the center of the main body 4 from the wall 4a of the main body 4.

[0038] One end of the inflow pipe 6 has a wall 6c with multiple openings (holes) 6b. The wall 6c has a predetermined thickness from one end (front end) of the inflow pipe 6 toward the portion 6a. The front end of the inflow pipe 6 is approximately circular in shape, and its diameter is approximately equal to the maximum diameter of the portion 6a. That is, the wall 6c is approximately cylindrical in shape.

[0039] The shape of the plurality of openings 6b is not limited to a specific shape. In addition, the shapes of the plurality of openings 6b at the front end of the inflow pipe 6 may all be the same or similar, or they may each be different. However, from the viewpoint of uniformly spraying the driving fluid, it is preferable that the shape of the plurality of openings 6b at the front end of the inflow pipe 6 is a circle with approximately equal diameters.

[0040] Furthermore, from the viewpoint of uniformly spraying the driving fluid, it is preferable that the plurality of openings 6b penetrate the wall 6c while maintaining the shape of the front end of the inflow pipe 6. For example, it is preferable that the thickness of the wall 6c is larger than the diameter of the front end of the inflow pipe 6, and that the plurality of openings 6b penetrate the wall 6c while maintaining the shape of the front end of the inflow pipe 6.

[0041] A receiving port 8a for an outflow pipe 8 is provided at a position opposite to the front end of the inflow pipe 6. The receiving port 8a has a shape similar to a mortar with an open bottom. In addition, the diameter of the receiving port 8a on the side opposite to the front end of the inflow pipe 6 is larger than the diameter of the front end of the inflow pipe 6.

[0042] Therefore, the flow path through which the driving fluid passes inside the main body 4 extends from multiple openings 6b to receiving ports 8a. Furthermore, the outflow pipe 8 located inside the main body 4 includes a portion 8b whose diameter increases as it approaches the wall 4b of the main body 4 from the center of the main body 4.

[0043] The main body 4 surrounds the plurality of openings 6b of the inlet pipe 6 and the receiving port 8a of the outlet pipe 8, so that fluid does not enter or exit outside the suction path 4c, the inlet pipe 6, and the outlet pipe 8. That is, the main body 4 is sealed outside the suction path 4c, the inlet pipe 6, and the outlet pipe 8.

[0044] in addition, Figure 1 and Figure 2 The ejector 2 shown may also have a recovery unit that provides a source circulation of the driving fluid discharged from the front end 8c of the outlet pipe 8 to a driving fluid (not shown). The ejector 2 with this recovery unit is preferred in terms of its ability to reuse the driving fluid.

[0045] exist Figure 1 and Figure 2 In the ejector 2 shown, a driving fluid source (not shown) supplies driving fluid to the inlet pipe 6. The driving fluid supplied to the inlet pipe 6 is accelerated due to the Venturi effect and ejected from multiple openings 6b provided at the front end into the interior of the main body 4. The driving fluid ejected into the interior of the main body 4 flows into the outlet pipe 8 from the receiving port 8a.

[0046] At this point, the pressure of the driving fluid decreases in a way that counteracts the energy increase due to the acceleration of the driving fluid (Bernoulli's theorem), and friction is generated between the driving fluid and the surrounding fluid (Newton's law of viscosity). Consequently, the external fluid flows into the interior of the main body 4 via the suction path 4c, and the surrounding fluid flows into the outlet pipe 8 along with the driving fluid. In short, the ejector 2 creates a negative pressure inside the main body 4, generating an attractive force via the suction path 4c.

[0047] Here, the ejector 2 injects driving fluid into the interior of the main body 4 from multiple openings 6b of the inlet pipe 6. Therefore, in the ejector 2, compared to an ejector that injects driving fluid from a single opening, the surface area of ​​the flow path through which the driving fluid is expected to pass inside the main body 4 is increased. That is, in the ejector 2, the contact area between the driving fluid and the surrounding fluid is increased.

[0048] Therefore, in the ejector 2, the frictional force generated between the driving fluid and the surrounding fluid can be increased efficiently. As a result, even if the liquid intrudes into the interior of the main body 4 and obstructs the flow of the driving fluid, the adverse effects caused by the intruding liquid can be reduced (specific examples of liquid intrusion into the interior of the main body 4 will be described later). That is, even in such a case, the decrease in the attractive force of the ejector 2 can be suppressed.

[0049] Furthermore, the ejector 2 does not complicate or enlarge the device, and it achieves the desired attraction without significantly increasing the amount of drive fluid required. As a result, the processing or cleaning of the workpiece can be carried out inexpensively (specific examples of the processing or cleaning of the workpiece will be described later).

[0050] Figure 3 It is an illustrative representation of... Figure 1 and Figure 2 The figure shows a perspective view of the worktable base 18 and the chuck worktable 20 connected to the injector 2. Figure 4 These are their cross-sectional views. Additionally, the chuck table 20 is fixed in a manner that allows it to be mounted and dismounted relative to the table base 18.

[0051] An upwardly protruding annular protrusion 18b is provided on the upper surface 18a of the worktable base 18. In the region of the upper surface 18a inner than the protrusion 18b, an upwardly protruding annular protrusion 18c, concentric with the protrusion 18b, is provided, with a diameter smaller than the protrusion 18b. Furthermore, in the region between the protrusions 18b and 18c on the upper surface 18a, an upwardly protruding cylindrical positioning protrusion 18d is provided.

[0052] In the region of the upper surface 18a that is inner than the protrusion 18c, an annular groove 18e with a smaller diameter than the protrusion 18c is formed concentrically with the protrusion 18c. Furthermore, one end of a connecting passage 18f located inside the worktable base 18 opens in the region of the upper surface 18a that is inner than the groove 18e. The other end of the connecting passage 18f is connected to... Figure 1 and Figure 2 The suction path 4c of the main body 4 of the ejector 2 shown is connected.

[0053] The chuck worktable 20 includes: a frame 22 having a recess 22a on its upper surface; and a perforated plate 24 fixed to the recess 22a of the frame 22 by an adhesive. The perforated plate 24 functions as a porous portion that attracts and holds the workpiece, and the upper surface 24a serves as a holding surface for attracting and holding the workpiece. For example, the frame 22 may be made of metal or the like, and the perforated plate 24 may be made of porous ceramic or the like.

[0054] An annular recess 22c, corresponding to the protrusion 18b of the worktable base 18, is formed on the lower surface 22b of the frame 22. An annular recess 22d, corresponding to the protrusion 18c of the worktable base 18, is formed in a region of the lower surface 22b that is more inner than the recess 22c. That is, the recess 22c and the recess 22d are concentric.

[0055] A positioning recess 22e is formed in the area of ​​the worktable base 18 corresponding to the positioning protrusion 18d (i.e., the area between the recess 22c and the recess 22d). Additionally, a circular recess 22f is formed in the area corresponding to the annular groove 18e (i.e., the area inside the recess 22d). One end of a connecting passage 22g, located inside the frame 22, opens at the bottom of this recess 22f. The other end of the connecting passage 22g opens at the bottom of the recess 22a and communicates with the perforated plate 24.

[0056] When fixing the chuck table 20 to the table base 18, for example, a ring member 26 with a shape corresponding to the groove 18e is inserted into the annular groove 18e of the table base 18. The ring member 26 is formed, for example, of resin, and is not easily slipped relative to the table base 18 and the chuck table 20. In addition, the ring member 26 is formed with a thickness (height) protruding from the upper surface 18a when inserted into the groove 18e.

[0057] After inserting the ring component 26 into the slot 18e, the chuck table 20 is placed on the worktable base 18 such that the upper surface 18a of the worktable base 18 faces the lower surface 22b of the frame 22. At this time, the positions of the worktable base 18 and the chuck table 20 are adjusted so that the protrusions 18b, 18c, and locating protrusions 18d are respectively inserted into the recesses 22c, 22d, and locating recesses 22e.

[0058] As described above, the shape of the recess 22f corresponds to the shape of the slot 18e into which the ring member 26 is inserted. Therefore, when the chuck table 20 is placed on the table base 18, a portion of the ring member 26 protruding from the upper surface 18a is inserted into the recess 22f. By inserting the ring member 26 into the slot 18e and the recess 22f, positional displacement of the table base 18 relative to the chuck table 20 can be suppressed.

[0059] After the chuck table 20 is placed on the table base 18, the connecting path 18f is connected to the connecting path 22g. Therefore, Figure 1 and Figure 2 The suction path 4c of the main body 4 of the ejector 2 shown is connected to the holding surface (upper surface 24a of the perforated plate 24) of the chuck table 20 via the connecting path 18f and the connecting path 22g.

[0060] In this state, if to Figure 1 and Figure 2 The inlet pipe 6 of the ejector 2 provided with driving fluid creates a negative pressure inside the suction path 4c, as well as the connecting paths 18f and 22g, thereby attracting the perforated plate 24. This allows the workpiece to be held on the holding surface (upper surface 24a of the perforated plate 24) of the chuck stage 20.

[0061] Figure 5 This is a schematic cross-sectional view of a machining apparatus that processes a workpiece 11 held on the retaining surface of a chuck table 20. Specifically, Figure 5 A cutting device 50 is shown that uses a cutting unit 52 to perform cutting in a manner that forms a (semi-cut) groove on the workpiece 11.

[0062] Figure 5 The cutting device 50 shown has Figure 3 and Figure 4 The worktable base 18 and chuck worktable 20 shown attract and hold the workpiece 11 on the holding surface of the chuck worktable 20.

[0063] The workpiece 11 is, for example, a disk-shaped wafer formed of semiconductors such as silicon, whose front (upper surface) side is divided into a central device region and an outer peripheral region surrounding the device region. The device region is further divided into multiple regions by predetermined dividing lines (spacers) arranged in a grid pattern, and semiconductor devices such as ICs and LSIs are formed in each region.

[0064] Figure 5 The cutting device 50 shown also includes a chuck table moving mechanism (not shown) and a cutting unit moving mechanism (not shown). This chuck table moving mechanism, for example, enables the table base 18 and the chuck table 20 to move in the machining feed direction (…). Figure 5 The cutting unit moving mechanism can, for example, move the cutting unit 52 in the indexing feed direction (forward and backward movement). Figure 5 (left and right directions) and feed direction ( Figure 5 Move upwards (in the vertical direction).

[0065] The cutting unit 52 has a spindle 56 that rotates around an axis that is substantially parallel to the plane of the holding surface of the chuck table 20. An annular cutting tool 58 is mounted on one end of the spindle 56, and a rotary drive source (not shown) such as an electric motor is connected to the other end. Therefore, the cutting tool 58 rotates by the torque transmitted by the rotary drive source via the spindle 56.

[0066] The cutting tool 58 is a machining tool that cuts the workpiece 11 using a machining abrasive. Therefore, the cutting unit 52 can also be a unit that cuts the workpiece 11 using a machining abrasive mounted at the front end of the spindle 56.

[0067] As a cutting tool 58, for example, a hub-type cutting tool is used, which integrates an annular base formed of metal or the like and an annular cutting edge formed along the outer periphery of the base. The cutting edge of the hub-type cutting tool is made of an electroformed abrasive, which is obtained by fixing abrasive grains (machining abrasive) formed of diamond and cubic boron nitride (cBN) with a bonding material such as nickel plating.

[0068] Alternatively, as the cutting tool 58, a washer-type cutting tool consisting of annular cutting edges can also be used. These annular cutting edges are obtained by fixing abrasive grains (machining tools) with a bonding material formed from metal, ceramics, and resin.

[0069] A cutting fluid supply nozzle 60 is provided near the cutting tool 58. When the workpiece 11 is cut by the cutting tool 58, the cutting fluid supply nozzle 60 supplies cutting fluid 17 to the workpiece 11 and the cutting tool 58. The cutting fluid 17 is, for example, water.

[0070] When cutting the workpiece 11 using the cutting unit 52, firstly, the workpiece 11 is brought into contact with the upper surface 24a of the perforated plate 24. Alternatively, after the workpiece 11 is attached to a scribe strip having the same size as the workpiece 11, the workpiece 11 is brought into contact with the upper surface of the perforated plate 24 through the scribe strip. Then, the workpiece is cut towards... Figure 1 and Figure 2 The inlet pipe 6 of the ejector 2 shown provides the driving fluid.

[0071] Therefore, the negative pressure generated in the ejector 2 acts on the holding surface (upper surface 24a of the perforated plate 24) of the chuck table 20 through the suction path 4c and the connecting paths 18f and 22g. As a result, the workpiece 11 can be attracted and held on the chuck table 20.

[0072] Next, while the cutting tool 58 is rotated via the spindle 56, the worktable base 18 and the chuck table 20 are moved along the machining feed direction in such a way that the workpiece 11 contacts the cutting tool 58. Figure 5 The workpiece 11 is moved in the forward and backward direction. As a result, the workpiece 11 is cut to form a groove.

[0073] like Figure 5 As shown, when cutting the workpiece 11 attracted and held by the chuck table 20, cutting fluid 17 is supplied from the cutting fluid supply nozzle 60 to the workpiece 11 and the cutting tool 58.

[0074] Here, as Figure 5As shown, the cutting fluid 17 sometimes intrudes into the connecting passages 18f and 22g via the perforated plate 24, etc. Furthermore, because the connecting passages 18f and 22g are connected to... Figure 1 and Figure 2 The suction path 4c of the main body 4 of the injector 2 shown is connected, so sometimes the cutting fluid 17 may penetrate into the interior of the main body 4 of the injector 2.

[0075] In contrast, the ejector 2 injects driving fluid into the interior of the main body 4 through multiple openings 6b of the inlet pipe 6. Therefore, in the ejector 2, compared to an ejector that injects driving fluid from a single opening, the surface area of ​​the flow path through which the driving fluid passes within the main body 4 is increased. Consequently, in the ejector 2, the frictional force generated between the driving fluid and the surrounding fluid can be increased efficiently.

[0076] As a result, even if liquid intrudes into the interior of the main body 4 and obstructs the flow of the driving fluid, the cutting device 50 with the ejector 2 can reduce the adverse effects caused by the intruding liquid. That is, even in such a case, the decrease in the attractive force of the ejector 2 can be suppressed, and the possibility of adverse conditions occurring during cutting by the cutting device 50 can be reduced.

[0077] Furthermore, the ejector 2 is not a large device with a complex mechanism, nor does it require a large amount of driving fluid. Therefore, by using the cutting device 50 with the ejector 2, the workpiece 11 can be cut inexpensively.

[0078] Furthermore, the processing apparatus having a processing unit capable of mounting the ejector 2 is not limited to, for example, Figure 5 The cutting device shown has a cutting unit for performing cutting. The ejector 2 can also be mounted, for example, on a grinding device having a grinding unit that grinds the surface of a workpiece using a machining tool mounted at the front end of a spindle.

[0079] In grinding apparatus, grinding is typically performed while supplying liquid to the surface of the workpiece. Therefore, the jet 2 is also preferably used as a jet mounted on such a grinding apparatus.

[0080] Figure 6 This is a schematic perspective view of a cleaning apparatus 70 that cleans the object 21 held on the retaining surface of a chuck table (or rotary table) 88. However, in Figure 6 For convenience, a portion of the structural element is removed, showing its cross-section.

[0081] In addition, Figure 6In the example shown, the object to be cleaned 21 is a disc-shaped wafer with grooves formed in a grid pattern, but the object to be cleaned by the cleaning apparatus 70 is not limited to such an object 21. Examples of objects to be cleaned by the cleaning apparatus 70 include, for example, a disc-shaped wafer before the grooves are formed or multiple chips manufactured by dividing the wafer.

[0082] The cleaning apparatus 70 has a table rotation unit 84 that rotates the chuck table 88. The table rotation unit 84 has, for example, a shaft 94 that rotates about an axis that is approximately parallel to the vertical direction. A cover member 126 that surrounds a portion of the side of the shaft 94 is connected to the side of the shaft 94.

[0083] A chuck table 88 is connected to one end of the shaft 94. A perforated plate 88a is provided on the front side of the chuck table 88. Furthermore, the axis of the shaft 94 is approximately perpendicular to the plane of the front side of the perforated plate 88a.

[0084] Additionally, a connecting passage (not shown) is provided inside shaft 94, one end of which communicates with the back side of perforated plate 88a. The other end of this connecting passage is connected to... Figure 1 and Figure 2 The main body 4 of the ejector 2 shown is connected to the suction path 4c. That is, this connecting path connects the suction path 4c to the perforated plate 88a. Therefore, the ejector 2 is connected to the holding surface (upper surface of the perforated plate 88a) of the chuck table 88 via the suction path 4c and this connecting path.

[0085] At the other end of shaft 94 are connected a rotary drive source (not shown) such as an electric motor and a lifting drive source (not shown) such as a cylinder. Therefore, the chuck table 88 rotates by the power of the rotary drive source transmitted via shaft 94. In addition, the chuck table 88 moves up and down between the upper loading / unloading position and the lower cleaning position using the power of the lifting drive source to load or unload the item 21 to be cleaned.

[0086] A cleaning fluid receiving unit 86 is disposed at a position surrounding the shaft 94. The cleaning fluid receiving unit 86 has a cylindrical outer peripheral wall 100a, an annular bottom wall 100b extending radially inward from the lower part of the outer peripheral wall 100a, and a cylindrical inner peripheral wall 100c vertically arranged upward from the inner peripheral side of the bottom wall 100b. The shaft 94 passes through the inside of the inner peripheral wall 100c. The outer diameter of the inner peripheral wall 100c is smaller than the inner diameter of the cover member 126. When the chuck table 88 descends to the cleaning position, the cover member 126 surrounds the inner peripheral wall 100c from the outer peripheral side.

[0087] A drain outlet 104 is provided on the bottom wall 100b, and the drain outlet 104 is connected to a downwardly extending drainage channel (not shown). When the cleaning fluid falls into the cleaning fluid receiving unit 86, the cleaning fluid is discharged from the drain outlet 104 to the outside through the drainage channel. When the chuck table 88 descends to the cleaning position, the inner peripheral wall 100c is surrounded by the cover component 126, thus suppressing the downward scattering of the cleaning fluid through the through hole through which the shaft 94 passes.

[0088] A drying unit 108 is disposed on the inner side of the outer peripheral wall 100a. The drying unit 108 has a tubular shaft portion 114 inserted into the bottom wall 100b. The shaft portion 114 is a tubular component extending on the outer side of the chuck table 88 in a direction substantially perpendicular to the front surface of the chuck table 88. The upper end of the shaft portion 114 reaches a position higher than the front surface of the chuck table 88 and is connected to the arm portion 112. A rotary drive source (not shown), such as an electric motor, is connected to the lower end of the shaft portion 114 to rotate the shaft portion 114.

[0089] The arm 112 is a tubular component extending to a length equivalent to the distance from the upper end of the shaft 114 to the center of the chuck table 88. The extending direction of the arm 112 is substantially perpendicular to the extending direction of the shaft 114. A downward-facing drying nozzle 110 is provided at the front end of the arm 112 (the end of the arm 112 not connected to the shaft 114). The shaft 114 is connected to an air supply source (not shown) and is able to eject air from the drying nozzle 110 toward the front side of the chuck table 88 via the shaft 114 and the arm 112.

[0090] A cleaning unit 116 is arranged on the inner side of the outer peripheral wall 100a, with the inner peripheral wall 100c sandwiched between it and the drying unit 108. The cleaning unit 116 has a tubular shaft portion 122 inserted into the bottom wall 100b. The shaft portion 122 is a tubular component extending on the outer side of the chuck table 88 in a direction substantially perpendicular to the front surface of the chuck table 88. The upper end of the shaft portion 114 reaches a position higher than the upper surface of the chuck table 88 and is connected to the arm portion 120. A rotary drive source, such as an electric motor, is connected to the lower end of the shaft portion 122 to rotate the shaft portion 122.

[0091] The arm 120 is a tubular component extending to a length equivalent to the distance from the shaft 122 to the center of the chuck table 88. The extending direction of the arm 120 is substantially perpendicular to the extending direction of the shaft 122. A downward-facing cleaning nozzle 118 is provided at the front end of the arm 120 (the end of the arm 120 not connected to the shaft 122). The shaft 122 is connected to a cleaning fluid supply source (not shown), enabling the cleaning fluid to be sprayed from the cleaning nozzle 118 onto the front side of the chuck table 88 via the shaft 122 and the arm 120.

[0092] When cleaning the object 21 using the cleaning device 70, a cleaning fluid (typically a mixture of water and air) is sprayed from the cleaning nozzle 118 toward the object 21 while the chuck table 88 rotates at high speed. Then, dry air is sprayed onto the object 21 from the drying nozzle 110 to remove the cleaning fluid.

[0093] Here, the cleaning fluid sometimes intrudes into the communication path provided inside the shaft 94 via the perforated plate 88a of the chuck table 88. Furthermore, this communication path... Figure 1 and Figure 2 The suction path 4c of the main body 4 of the ejector 2 shown is connected, so sometimes the cleaning fluid may penetrate into the interior of the main body 4 of the ejector 2.

[0094] In contrast, the ejector 2 injects driving fluid into the interior of the main body 4 through multiple openings 6b of the inlet pipe 6. Therefore, in the ejector 2, compared to an ejector that injects driving fluid from a single opening, the surface area of ​​the flow path through which the driving fluid passes within the main body 4 is increased. Consequently, in the ejector 2, the frictional force generated between the driving fluid and the surrounding fluid can be increased efficiently.

[0095] As a result, even when liquid intrudes into the interior of the main body 4 and obstructs the flow of the driving fluid, the cleaning device 70 with the ejector 2 can reduce the adverse effects caused by the intruding liquid. That is, even in such a case, the decrease in the attractive force of the ejector 2 can be suppressed, and the possibility of the cleaning device 70 causing adverse conditions during cutting can be reduced.

[0096] Furthermore, the ejector 2 is not a large device with a complex mechanism, nor does it require a large amount of driving fluid. Therefore, by using the cleaning device 70 with the ejector 2, the object 21 can be cleaned inexpensively.

Claims

1. A jetting device that generates an attractive force, characterized in that, The injector has: The inlet pipe has multiple openings at its front end from which driving fluid is ejected. The outflow pipe has a receiving port at a position opposite to the front end of the inflow pipe for receiving the driving fluid ejected from the opening of the inflow pipe. as well as The main body, which surrounds the opening and the receiving port, has an attraction path for attracting external fluid. The receiving port is positioned inside the wall of the main body. The inflow pipe includes a section whose diameter decreases and then increases as it approaches the front end of the inflow pipe.

2. The injector according to claim 1, characterized in that, The driving fluid is a liquid.

3. A processing apparatus for processing a workpiece on which a device is formed on its front side, characterized in that, The processing device has the following features: A chuck table having a holding surface for holding the workpiece; The machining unit uses a machining tool mounted on the front end of the spindle to machine the workpiece held in the chuck table. The injector as claimed in claim 1 or 2; and A connecting path that connects the suction path of the injector to the retaining surface.

4. A cleaning apparatus for cleaning an object on which a device is formed on its front side, characterized in that, The cleaning device has the following features: A chuck table having a holding surface for holding the object being cleaned; The cleaning unit cleans the object to be cleaned held on the chuck table. The injector as described in claim 1 or 2; as well as A connecting path that connects the suction path of the injector to the retaining surface.

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